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CN101514706B - micro motor structure - Google Patents

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Publication number
CN101514706B
CN101514706B CN2008100083051A CN200810008305A CN101514706B CN 101514706 B CN101514706 B CN 101514706B CN 2008100083051 A CN2008100083051 A CN 2008100083051A CN 200810008305 A CN200810008305 A CN 200810008305A CN 101514706 B CN101514706 B CN 101514706B
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upper cover
ring
inner ring
micro
rib structure
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CN101514706A (en
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洪银树
黄义佑
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Sunonwealth Electric Machine Industry Co Ltd
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Sunonwealth Electric Machine Industry Co Ltd
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Abstract

The present invention relates to a micro-motor structure, comprising: the hub is an immovable component and is cylindrical, the top edge of the hub outwards protrudes and is provided with an upper cover, and the upper cover is in at least more than two protruding forms; the inner ring is in a hollow ring shape and is positioned on the periphery of the upper cover, the inner hole diameter of the inner ring is slightly larger than the maximum outer diameter of the upper cover, and the inner ring is in point contact with the upper cover; the rib structure is in a hollow annular shape and is fixed at the bottom of the inner ring, so that the rib structure is positioned below the upper cover, the inner aperture of the rib structure is larger than the outer diameter of the hub and smaller than the inner aperture of the inner ring and the maximum outer diameter of the upper cover, and the upper cover is stopped above the rib structure; the outer ring is in a hollow ring shape, and the inner aperture of the outer ring is far larger than the maximum outer diameter of the inner ring; at least two micro-actuators connected between the inner ring and the outer ring. Therefore, when the micro-actuator drives the rib structure, the inner ring and the outer ring to rotate, even if the inner hole of the inner ring collides with the upper cover, the mutual abrasion between the two components can be reduced and the service life of the micro-actuator is prolonged due to point contact between the two components.

Description

微马达结构micro motor structure

技术领域technical field

本发明涉及微马达结构，特别是指一种可避免构件磨损与失效，以延长寿命的微马达结构。The invention relates to a micro-motor structure, in particular to a micro-motor structure which can avoid component wear and failure and prolong life.

背景技术Background technique

如图1所示，微马达包含有：As shown in Figure 1, the micromotor includes:

一轮毂10、一肋骨结构20、一内环30、一外环40以及至少二个以上的微致动器50；A hub 10, a rib structure 20, an inner ring 30, an outer ring 40 and at least two micro-actuators 50;

再如图2所示，其使用LPCVD(低压化学气相沉积)在一基质60上沉积低应力(250MPa)氮化硅薄膜(Si3N4)作为绝缘层61。As shown in FIG. 2 again, a low-stress (250 MPa) silicon nitride film (Si 3 N 4 ) is deposited on a substrate 60 as an insulating layer 61 by using LPCVD (low pressure chemical vapor deposition).

其中，轮毂10为一固定在绝缘层61上的不可动构件，其呈中空的ㄩ形盘状体，且其顶缘朝向外突伸有上盖101。Wherein, the hub 10 is a non-movable component fixed on the insulating layer 61, which is a hollow disc-shaped body, and a top cover 101 protrudes outward from its top edge.

肋骨结构20与内环30均为中空环状，内环30位于上盖11外周，且内环30的内孔径必须略大于上盖101的最大外径，肋骨结构20固定于内环30底部，位于上盖101的下方位置，用于支撑内环30旋转，且肋骨结构20的内孔径必须大于轮毂外径10，但小于内环30的内孔径与上盖101的最大外径，使上盖101可挡止于肋骨结构20上方，以防止其旋转脱出。The rib structure 20 and the inner ring 30 are both hollow rings, the inner ring 30 is located on the outer periphery of the upper cover 11, and the inner diameter of the inner ring 30 must be slightly larger than the maximum outer diameter of the upper cover 101, and the rib structure 20 is fixed on the bottom of the inner ring 30, Located below the upper cover 101, it is used to support the rotation of the inner ring 30, and the inner diameter of the rib structure 20 must be greater than the outer diameter of the hub 10, but smaller than the inner diameter of the inner ring 30 and the maximum outer diameter of the upper cover 101, so that the upper cover 101 can stop above the rib structure 20 to prevent it from rotating out.

外环40也呈中空环状，且外环40的内孔径必须远大于内环30的最大外径，内环30与外环40之间具有多个微致动器50，各微致动器50以其支撑悬臂梁51连结于内环30与外环40之间，且各支撑悬臂梁51上又各自设有轴衬52与致动平板53。The outer ring 40 is also in the shape of a hollow ring, and the inner diameter of the outer ring 40 must be much larger than the maximum outer diameter of the inner ring 30. There are multiple micro-actuators 50 between the inner ring 30 and the outer ring 40. Each micro-actuator 50 is connected between the inner ring 30 and the outer ring 40 by its supporting cantilever beams 51 , and each supporting cantilever beam 51 is provided with a bushing 52 and an actuating plate 53 respectively.

绝缘层61上另设有上、下电极62、63，当给定驱动电压的情况下，致动平板53因受静电力吸引而弯曲，移除给定电压后，储存于致动平板53的张应力能量即推使微致动器50移动完成一次步进运动(微致动器的动作原理为习知技术，故本文中仅简单叙述)。The insulating layer 61 is additionally provided with upper and lower electrodes 62, 63. When the driving voltage is given, the actuating plate 53 is bent due to being attracted by electrostatic force. After the given voltage is removed, the actuating plate 53 The tensile stress energy pushes the microactuator 50 to move to complete a stepping motion (the action principle of the microactuator is a known technology, so it is only briefly described in this article).

习用的微马达，其上盖101呈圆环状的突出型态，故当微致动器50带动肋骨结构20、内环30与外环40旋转时，可能因为些许的偏移量而导致内环30的内孔碰撞上盖101，造成内环30内孔与上盖11之间发生严重的面接触磨擦，特别是微致动器马达的尺寸往往小于2×2(mm)时，内环30内孔与上盖101之间的面接触磨擦更容易造成构件的磨损与失效。The upper cover 101 of the conventional micro-motor is protruding in the shape of a ring, so when the micro-actuator 50 drives the rib structure 20, the inner ring 30 and the outer ring 40 to rotate, the inner ring may be caused by a slight offset. The inner hole of the ring 30 collides with the upper cover 101, causing severe surface contact friction between the inner hole of the inner ring 30 and the upper cover 11, especially when the size of the microactuator motor is often smaller than 2×2 (mm), the inner ring The surface contact friction between the inner hole of 30 and the upper cover 101 is more likely to cause wear and failure of components.

发明内容Contents of the invention

针对上述问题，本发明的主要目的在于提供一种微马达结构，其上盖呈至少二个以上的突出型态，且其与内环内孔呈点接触，可避免构件磨损与失效。In view of the above problems, the main purpose of the present invention is to provide a micro-motor structure, the upper cover has at least two protruding shapes, and it is in point contact with the inner hole of the inner ring, which can avoid component wear and failure.

为达到上述目的，本发明所提供的一种微马达结构，其特征在于包括：一轮毂，为不可动构件并呈圆柱体，其顶缘向外突伸有上盖，所述上盖呈至少二个以上的突出型态；一内环，呈中空环状并位于所述上盖外周，其内孔径略大于所述上盖的最大外径，并与所述上盖呈点接触；一肋骨结构，呈中空环状并固定于所述内环底部，使其位于所述上盖下方，且其内孔径大于所述轮毂外径，小于所述内环的内孔径与所述上盖的最大外径，使所述上盖被挡止于所述肋骨结构上方；一外环，呈中空环状，且其内孔径远大于所述内环的最大外径；至少二微致动器，连结于所述内环与所述外环之间。In order to achieve the above object, a micro-motor structure provided by the present invention is characterized in that it includes: a hub, which is a non-movable component and is in the shape of a cylinder, and a top cover protrudes outward from its top edge, and the top cover is at least More than two protruding shapes; an inner ring, which is hollow and located on the outer periphery of the upper cover, the inner diameter of which is slightly larger than the maximum outer diameter of the upper cover, and is in point contact with the upper cover; a rib structure, which is hollow and ring-shaped and fixed on the bottom of the inner ring so that it is located under the upper cover, and its inner diameter is larger than the outer diameter of the hub, and smaller than the inner diameter of the inner ring and the maximum diameter of the upper cover. outer diameter, so that the upper cover is stopped above the rib structure; an outer ring, which is hollow and ring-shaped, and its inner diameter is much larger than the maximum outer diameter of the inner ring; at least two micro-actuators, connected between the inner ring and the outer ring.

上述本发明的技术方案中，所述上盖为矩齿形突出型态。In the above-mentioned technical solution of the present invention, the upper cover is in the shape of a rectangular tooth protrusion.

上述本发明的技术方案中，所述上盖为三角形突出型态。In the above technical solution of the present invention, the upper cover is in the shape of a triangular protrusion.

上述本发明的技术方案中，所述上盖为弧形突出型态。In the above-mentioned technical solution of the present invention, the upper cover is in an arc-shaped protruding shape.

上述本发明的技术方案中，所述轮毂为中空的ㄩ形盘状体。In the above-mentioned technical solution of the present invention, the hub is a hollow U-shaped disk.

上述本发明的技术方案中，所述微致动器以一支撑悬臂梁连结于所述内环与所述外环之间，且各所述支撑悬臂梁上又各自设有轴衬与致动平板。In the above-mentioned technical solution of the present invention, the micro-actuator is connected between the inner ring and the outer ring by a supporting cantilever beam, and each supporting cantilever beam is provided with a bushing and an actuator respectively. flat.

采用上述技术方案，本发明在微致动器带动肋骨结构、内环与外环旋转时，即使因为些许的偏移量而导致内环的内孔碰撞上盖，由于上盖呈至少二个以上的矩齿形、三角形或弧形突出型态，故与内环内孔之间为点接触，可减少构件之间的相互磨损，以延长其寿命。With the above technical solution, when the micro-actuator drives the rib structure, the inner ring and the outer ring to rotate, even if the inner hole of the inner ring collides with the upper cover due to a slight offset, since the upper cover has at least two or more The rectangular, triangular or arc-shaped protruding shape, so it is in point contact with the inner hole of the inner ring, which can reduce mutual wear between components and prolong their life.

附图说明Description of drawings

图1是习用结构的外观示意图；Fig. 1 is the outward appearance schematic diagram of conventional structure;

图2是习用结构的剖面示意图；Fig. 2 is a schematic sectional view of a conventional structure;

图3是本发明第一种实施型态的外观示意图；Fig. 3 is a schematic view of the appearance of the first embodiment of the present invention;

图4是本发明第一种实施型态的平面示意图；Fig. 4 is a schematic plan view of the first embodiment of the present invention;

图5是本发明第二种实施型态的外观示意图；Fig. 5 is a schematic view of the appearance of the second embodiment of the present invention;

图6是本发明第二种实施型态的平面示意图；Fig. 6 is a schematic plan view of a second embodiment of the present invention;

图7是本发明第三种实施型态的外观示意图；Fig. 7 is a schematic diagram of the appearance of the third embodiment of the present invention;

图8是本发明第三种实施型态的平面示意图；Fig. 8 is a schematic plan view of a third embodiment of the present invention;

图9是本发明第四种实施型态的外观示意图；Fig. 9 is a schematic diagram of the appearance of the fourth embodiment of the present invention;

图10是本发明第四种实施型态的平面示意图。Fig. 10 is a schematic plan view of a fourth embodiment of the present invention.

具体实施方式Detailed ways

本发明为一种微马达结构，其上盖呈至少二个以上的突出型态，且其与内环内孔呈点接触，以避免构件磨损与失效。现举以下实施例并结合附图对本发明的结构及功效进行详细说明。The present invention is a micro-motor structure, the upper cover has at least two protruding shapes, and it is in point contact with the inner hole of the inner ring, so as to avoid component wear and failure. The structure and effect of the present invention will be described in detail by citing the following embodiments in conjunction with the accompanying drawings.

如图3、图4所示，为本发明第一种实施型态所提供的微马达结构，其包含有：As shown in Fig. 3 and Fig. 4, the micro-motor structure provided for the first embodiment of the present invention includes:

一轮毂10、一肋骨结构20、一内环30、一外环40以及至少二个以上的微致动器50。A hub 10 , a rib structure 20 , an inner ring 30 , an outer ring 40 and at least two micro-actuators 50 .

其中，轮毂10为不可动构件，其呈中空的ㄩ形盘状体，且其顶缘向外突伸有上盖11，上盖11呈至少二个以上的矩齿状突出型态。Wherein, the wheel hub 10 is a non-movable component, which is a hollow ㄩ-shaped disc body, and an upper cover 11 protrudes outward from its top edge, and the upper cover 11 is in the shape of at least two protruding rectangular teeth.

肋骨结构20与内环30均为中空环状，内环30位于上盖11外周，且内环30的内孔径必须略大于上盖11的最大外径，肋骨结构20固定于内环30底部，位于上盖11的下方位置，用于支撑内环30旋转，且肋骨结构20的内孔径必须大于轮毂外径10，但小于内环30的内孔径与上盖11的最大外径，使上盖11可被挡止于肋骨结构20上方，以防止其旋转脱出。The rib structure 20 and the inner ring 30 are both hollow rings, the inner ring 30 is located on the outer periphery of the upper cover 11, and the inner diameter of the inner ring 30 must be slightly larger than the maximum outer diameter of the upper cover 11, and the rib structure 20 is fixed on the bottom of the inner ring 30, Located below the upper cover 11, it is used to support the rotation of the inner ring 30, and the inner diameter of the rib structure 20 must be larger than the outer diameter of the hub 10, but smaller than the inner diameter of the inner ring 30 and the maximum outer diameter of the upper cover 11, so that the upper cover 11 can be stopped above the rib structure 20 to prevent it from rotating out.

外环40也呈中空环状，且外环40的内孔径必须远大于内环30的最大外径，内环30与外环40之间具有多个微致动器50，各微致动器50以其支撑悬臂梁51连结于内环30与外环40之间，且各支撑悬臂梁51上又各自设有轴衬52与致动平板53。The outer ring 40 is also in the shape of a hollow ring, and the inner diameter of the outer ring 40 must be much larger than the maximum outer diameter of the inner ring 30. There are multiple micro-actuators 50 between the inner ring 30 and the outer ring 40. Each micro-actuator 50 is connected between the inner ring 30 and the outer ring 40 by its supporting cantilever beams 51 , and each supporting cantilever beam 51 is provided with a bushing 52 and an actuating plate 53 respectively.

所以当微致动器50带动肋骨结构20、内环30与外环40旋转时，即使因为些许的偏移量而导致内环30的内孔碰撞上盖11，由于上盖11为呈至少二个以上的矩齿形突出型态，故与内环30内孔之间为点接触，可减少构件之间的相互磨损，以延长其寿命。Therefore, when the microactuator 50 drives the rib structure 20, the inner ring 30 and the outer ring 40 to rotate, even if the inner hole of the inner ring 30 collides with the upper cover 11 due to a slight offset, the upper cover 11 is at least two More than one rectangular tooth-shaped protruding shape, so it is point contact with the inner hole of the inner ring 30, which can reduce the mutual wear between the components and prolong their life.

如图5、图6所示，为本发明第二种实施型态所提供的微马达结构，其包含有：As shown in Figure 5 and Figure 6, the micro-motor structure provided for the second embodiment of the present invention includes:

一轮毂10、一肋骨结构20、一内环30、一外环40以及至少二个以上的微致动器50。A hub 10 , a rib structure 20 , an inner ring 30 , an outer ring 40 and at least two micro-actuators 50 .

其中，轮毂10顶缘朝突伸有上盖12，上盖12呈至少二个以上的三角形突出型态(图5、图6所示的第二种实施型态为三个三角形突出设计，图7、图8所示的第三种实施型态则为四个三角形突出设计)。Wherein, the top edge of the wheel hub 10 protrudes toward a loam cake 12, and the loam cake 12 is at least two triangular protruding shapes (the second embodiment shown in Fig. 5 and Fig. 6 is three triangular protruding designs, Fig. 7. The third type of implementation shown in Figure 8 is four triangles protruding design).

肋骨结构20与内环30均为中空环状，内环30位于上盖12外周，且内环30的内孔径必须略大于上盖12的最大外径，肋骨结构20固定于内环30底部，位于上盖12的下方位置，用于支撑内环30旋转，且肋骨结构20的内孔径必须大于轮毂外径10，但小于内环30的内孔径与上盖12的最大外径，使上盖12可被挡止于肋骨结构20上方，以防止其旋转脱出。The rib structure 20 and the inner ring 30 are both hollow rings, the inner ring 30 is located on the outer periphery of the upper cover 12, and the inner diameter of the inner ring 30 must be slightly larger than the maximum outer diameter of the upper cover 12, and the rib structure 20 is fixed on the bottom of the inner ring 30, Located below the upper cover 12, it is used to support the rotation of the inner ring 30, and the inner diameter of the rib structure 20 must be greater than the outer diameter of the hub 10, but smaller than the inner diameter of the inner ring 30 and the maximum outer diameter of the upper cover 12, so that the upper cover 12 can be stopped above the rib structure 20 to prevent it from rotating out.

外环40也呈中空环状，且外环40的内孔径必须远大于内环30的最大外径，内环30与外环40之间具有多个微致动器50，各微致动器50以其支撑悬臂梁51连结于内环30与外环40之间，且各支撑悬臂梁51上又各自设有轴衬52与致动平板53。The outer ring 40 is also in the shape of a hollow ring, and the inner diameter of the outer ring 40 must be much larger than the maximum outer diameter of the inner ring 30. There are multiple micro-actuators 50 between the inner ring 30 and the outer ring 40. Each micro-actuator 50 is connected between the inner ring 30 and the outer ring 40 by its supporting cantilever beams 51 , and each supporting cantilever beam 51 is provided with a bushing 52 and an actuating plate 53 respectively.

所以当微致动器50带动肋骨结构20、内环30与外环40旋转时，即使因为些许的偏移量而导致内环30的内孔碰撞上盖12，由于上盖12为呈至少二个以上的三角突出型态，故与内环30内孔之间为点接触，可减少构件之间的相互磨损，以延长其寿命。Therefore, when the microactuator 50 drives the rib structure 20, the inner ring 30 and the outer ring 40 to rotate, even if the inner hole of the inner ring 30 collides with the upper cover 12 due to a slight offset, the upper cover 12 is at least two More than one triangular protruding type, so it is point contact with the inner hole of the inner ring 30, which can reduce the mutual wear between the components and prolong their life.

如图9、图10所示，为本发明第四种实施型态所提供的微马达结构，其也包含有一轮毂10、一肋骨结构20、一内环30、一外环40以及至少二个以上的微致动器50。As shown in Fig. 9 and Fig. 10, the micro-motor structure provided for the fourth embodiment of the present invention also includes a hub 10, a rib structure 20, an inner ring 30, an outer ring 40 and at least two The microactuator 50 above.

其中，轮毂10顶缘朝向外突的上盖13呈至少二个以上的弧形突出型态(图中所示为四个)，所以当微致动器50带动肋骨结构20、内环30与外环40旋转时，即使因为些许的偏移量而导致内环30的内孔碰撞上盖13，由于上盖13为呈至少二个以上的弧形突出型态，故与内环30内孔之间为点接触，可减少构件之间的相互磨损，以延长其寿命。Wherein, the top edge of the wheel hub 10 is in the form of at least two or more arc-shaped protrusions (four are shown in the figure) toward the upper cover 13 protruding outward, so when the micro-actuator 50 drives the rib structure 20, the inner ring 30 and the When the outer ring 40 rotates, even if the inner hole of the inner ring 30 collides with the upper cover 13 due to a slight offset, the upper cover 13 is in the shape of at least two arc-shaped protrusions, so it is in contact with the inner hole of the inner ring 30. There is a point contact between them, which can reduce the mutual wear between the components and prolong their life.

综上所述，可知本发明的诸多特点在同类产品当中实属首创。In summary, it can be known that many features of the present invention are the first among similar products.

以上所述，仅为本发明的较佳实施型态，凡应用本发明说明书、权利要求书或附图所做的等效结构变换，均应包含在本发明的专利保护范围内。The above descriptions are only preferred implementation forms of the present invention, and all equivalent structural transformations made by using the specification, claims or drawings of the present invention shall be included in the scope of patent protection of the present invention.

Claims (6)

1. 一种微马达结构，其特征在于包括：1. A micromotor structure is characterized in that comprising: 一轮毂，为不可动构件并呈圆柱体，其顶缘向外突伸有上盖，所述上盖呈至少二个以上的突出型态；The hub is a non-movable component and is in the shape of a cylinder, with an upper cover protruding outward from its top edge, and the upper cover is in at least two protruding shapes; 一内环，呈中空环状并位于所述上盖外周，其内孔径略大于所述上盖的最大外径，并与所述上盖呈点接触；an inner ring, which is in the shape of a hollow ring and located on the outer periphery of the upper cover, the inner diameter of which is slightly larger than the maximum outer diameter of the upper cover, and is in point contact with the upper cover; 一肋骨结构，呈中空环状并固定于所述内环底部，使其位于所述上盖下方，且其内孔径大于所述轮毂外径，小于所述内环的内孔径与所述上盖的最大外径，使所述上盖被挡止于所述肋骨结构上方；A rib structure, which is hollow and ring-shaped and fixed on the bottom of the inner ring so that it is located under the upper cover, and its inner diameter is larger than the outer diameter of the hub, smaller than the inner diameter of the inner ring and the upper cover The maximum outer diameter of the upper cover is stopped above the rib structure; 一外环，呈中空环状，且其内孔径远大于所述内环的最大外径；an outer ring, which is in the shape of a hollow ring, and its inner diameter is much larger than the maximum outer diameter of the inner ring; 至少二微致动器，连结于所述内环与所述外环之间。At least two micro actuators are connected between the inner ring and the outer ring. 2. 如权利要求1所述的微马达结构，其特征在于：所述上盖为矩齿形突出型态。2. The micro-motor structure according to claim 1, wherein the upper cover is in the shape of a rectangular tooth protruding. 3. 如权利要求1所述的微马达结构，其特征在于：所述上盖为三角形突出型态。3. The micro-motor structure according to claim 1, wherein the upper cover is a triangular protruding shape. 4. 如权利要求1所述的微马达结构，其特征在于：所述上盖为弧形突出型态。4. The micro-motor structure as claimed in claim 1, wherein the upper cover is in an arc-shaped protruding shape. 5. 如权利要求1所述的微马达结构，其特征在于：所述轮毂为中空的ㄩ形盘状体。5. The micro-motor structure according to claim 1, characterized in that: the hub is a hollow ㄩ-shaped disk. 6. 如权利要求1所述的微马达结构，其特征在于：所述微致动器以一支撑悬臂梁连结于所述内环与所述外环之间，且各所述支撑悬臂梁上又各自设有轴衬与致动平板。6. The micro-motor structure according to claim 1, wherein the micro-actuator is connected between the inner ring and the outer ring with a supporting cantilever beam, and each of the supporting cantilever beams They are respectively provided with a bushing and an actuating plate.
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5043043A (en) * 1990-06-22 1991-08-27 Massachusetts Institute Of Technology Method for fabricating side drive electrostatic micromotor
JPH03230780A (en) 1990-02-02 1991-10-14 Nec Corp Microscopic moving machine
US5252881A (en) * 1988-12-14 1993-10-12 The Regents Of The University Of California Micro motors and method for their fabrication
US5428259A (en) * 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
US5510299A (en) * 1994-06-03 1996-04-23 United Microelectronics Corp. Method for the manufacture of IC-processed micro electro-static motors
US5909069A (en) * 1995-06-19 1999-06-01 Georgia Tech Research Corporation Fully integrated magnetic micromotors and methods for their fabrication
JP3230780B2 (en) * 1993-03-29 2001-11-19 江藤電気株式会社 Competitive gaming device
CN201167290Y (en) * 2008-02-22 2008-12-17 建凖电机工业股份有限公司 micro motor structure

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5252881A (en) * 1988-12-14 1993-10-12 The Regents Of The University Of California Micro motors and method for their fabrication
JPH03230780A (en) 1990-02-02 1991-10-14 Nec Corp Microscopic moving machine
US5428259A (en) * 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
US5043043A (en) * 1990-06-22 1991-08-27 Massachusetts Institute Of Technology Method for fabricating side drive electrostatic micromotor
JP3230780B2 (en) * 1993-03-29 2001-11-19 江藤電気株式会社 Competitive gaming device
US5510299A (en) * 1994-06-03 1996-04-23 United Microelectronics Corp. Method for the manufacture of IC-processed micro electro-static motors
US5909069A (en) * 1995-06-19 1999-06-01 Georgia Tech Research Corporation Fully integrated magnetic micromotors and methods for their fabrication
CN201167290Y (en) * 2008-02-22 2008-12-17 建凖电机工业股份有限公司 micro motor structure

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