CN101509792A - Sample traveling stage with flexure mechanism module to absorb the deformation of the slide - Google Patents

Abstract

The invention relates to a sample delivery platform with a flexible mechanism module for absorbing the deformation of slide rails, comprising moving parts installed in mutually crossing directions, thereby installing a first slide rail on a base and moving along a first guide block, and installing The second slide rail that is on the first slide rail and moves along the second guide block; the delivery part that transports the sample via the sample table is formed on the second slide rail by installing the flexible mechanism module, and is installed on the vertical direction X, Y strip mirrors on the sample stage measure the displacement; measure the component, spread through the laser head, beam splitter and interferometer installed on the operating path of the moving part, and receive the reflected light from the X, Y strip mirror from the receiver The input beam interference signal forms the output displacement signal; since the deformation generated by the slide rail is not transmitted to the sample stage, the deformation deviation between the mirror and the sample is reduced, and the measurement accuracy is improved because the relative distance between the mirror and the sample is fixed.

Description

Sample delivery platform with flexible mechanism modules for absorbing slide rail deformation

technical field

The present invention relates to a sample delivery platform for inspection instruments or precision processing equipment for semiconductors or FPDs (Flat Panel Display), and more particularly, to a sample delivery platform with a flexible mechanism to absorb the deformation of slide rails (slide), with the purpose of preventing The deformation of the slide rail of the sample delivery platform improves the measurement accuracy.

Background technique

In general, a sample delivery platform is an inspection instrument or precision processing equipment for semiconductors or FPDs (Flat Panel Displays), a device for loading and delivering a measurement/processing object (hereinafter referred to as a 'platform') to a desired position; and Used in laser displacement measurement systems to analyze the displacement signal measured by the interference between the laser beam incident on the mirror and the laser beam reflected by the mirror.

For example, according to FIG. 1, the sample transport platform (100) is composed of a main body portion including X, Y slide rails (113, 114) guided by X, Y guide rails (111, 112) in mutually intersecting directions. , the sample stage (116) is installed on the above-mentioned Y slide rail (114) and moves the sample (115), and the X and Y bar mirrors (barmirror) are attached to the above-mentioned sample stage (116) in mutually perpendicular directions;

And a measurement part, including an interferometer (133) to diffuse the X, Y beams, which are generated by the laser head (131) installed on the operating path of the above-mentioned main part and distributed by the beam splitter (132), through the above-mentioned X , Y strip mirrors (117, 118), and X, Y receivers (134), to convert the interference signals reflected by the above-mentioned X, Y strip mirrors (117, 118) into displacement signals.

Therefore, since the measurement of the sample position by the sample delivery platform (100) has the function of passing through the X, Y strip mirrors (117, 118) fixed on the above-mentioned sample stage (116) and by the X, Y strip mirrors (117, 118) ) the structure of the interferometric measurement between the reflected laser beams, the relative displacement between the above-mentioned X, Y strip mirrors (117, 118) and the above-mentioned sample (115) must be regularly maintained, and this problem must be solved in advance to measure the above-mentioned sample (115) in the correct position.

However, the sample stage (116) of the sample transport platform (100) is deformed due to the following reasons. First, the slide rails (113, 114) are excessively connected due to processing errors of the guide parts (111, 112) or errors in linearity and flatness. Second, in the case of ambient temperature changes, due to the difference in coefficient of thermal expansion between the slide rails (113, 114) and the sample stage (116), the degree of deformation is different, and, in particular, in the slide rails (113, 114) And in the case of excessive connection of the sample stage (116) by a connecting tool such as a screw, when the deformation of the slide rails (113, 114) is transmitted to the sample stage (116), a connection with the slide rails (113, 114) Deformation related issues.

When the sample transport platform (100) is used according to the process shown in Figure 2, these situations cause the deformation of the mirror (117) and the sample (115), and change the relative distance between the two, wherein the sample stage (116) due to the above-mentioned cause deformation. These lead directly to measurement errors and difficulty in obtaining the correct position of the sample.

Furthermore, when the laser beam (135) generated from the measurement portion of the sample carrying platform (100) enters the mirror, if the alignment of the laser beam is distorted due to the tilt error of the mirror (117) due to the deformation of the sample stage (116), Interference between the incident beam and the reflected beam does not occur, and the measurement signal of the displacement is lost. Loss of measurement signal in a displacement measurement system using a laser beam (135) is a serious problem which reduces control safety, therefore it must be prevented.

In response, according to Figure 3, according to US Patent (2003/00202251A1), which suggests such a configuration, wherein by installing in the space between the slide rail (114) and the sample stage (116) in the X, Y direction free Three deformation preventers (150) for angular movement so that deformation of the slide rail (114) is not transmitted to the sample stage (116).

Moreover, said U.S. patent also configures a flexible mechanism (160) to limit the movement in the X and Y directions, thereby preventing the deformation prevention mechanism (150) from moving in the X and Y directions during the configuration of the sample delivery platform (100). low intensity.

However, although said U.S. patent uses a flexible mechanism (160) as a deformation preventing mechanism strengthening tool (150), it is difficult to compensate for the reduced strength in the X, Y directions; , will produce misalignment characteristics.

In addition, due to the height of the deformation preventing mechanism (150, 160), a height difference between the sample (115) and the slide rail (114) is generated. This creates problems in terms of reduced stability, since it creates a center of weighing in the drive unit and an offset between the operating point of the drive unit and the actual center of weighing.

In addition, according to Fig. 4, by installing three buffer mechanisms (170) above the slide rail (114) together with the sample stage (116), and by allowing the only free angle along the radial direction away from the buffer mechanism (170) ) is the center of the thermal expansion direction of the six free angles limited, whereby the deformation of the slide rail (114) will not be transmitted to the sample stage (116).

However, the above-mentioned configuration is problematic, whereby the sample transport platform (100) according to FIG. (116) and the height difference between the slide rail (114). Not only would this make the center of weight of the drive unit of the sample transport platform high, but it would also reduce control stability since this would create a deviation between the operating point of the driving force and the actual center of weight.

Since precision equipment requires ultra-precision suitable for the sample delivery platform (100), the materials used for the above-mentioned slide rails (113, 114) and sample stage (116), such as Invar or Zeroder, are used as a whole to solve the above-mentioned problems; However, this use is also problematic in that Invar or Zeroder costs at least ten times that of aluminum, and that operating costs increase due to poor workability levels.

Contents of the invention

problem to be solved

The present invention is to solve the above problems, and to provide a sample transport platform that absorbs the deformation of the slide rail using a flexible mechanism module, so that the deformation of the slide rail is prevented by the configuration of the flexible mechanism module that prevents the transmission of the structural deformation of the above-mentioned structure reduction Transported to the sample stage, it is integrated on the slide rail of the sample slide platform, or joined by bolting in the slide rail area.

The means used to solve the problem

The present invention that is used to realize above-mentioned purpose is installed in the moving part that crosses each other, thus is installed on the base and moves along the first slide rail of first guide block, and is installed on above-mentioned first slide rail and moves along the first slide rail. The second slide rail that the second guide block moves; a delivery part that transports the sample via the sample stage is installed and formed on the above-mentioned second slide rail by a flexible mechanism, and is installed on the above-mentioned sample stage through X, Y bar mirror measuring displacement; and spread by laser head, beam splitter, and interferometer installed on the operation path of the above-mentioned moving part, and by receiving input beam interference signal reflected by the above-mentioned X, Y bar mirror from the receiver; The output is converted into a measurement component composed of a displacement signal.

Beneficial effect

Using the method of integrally configuring the flexible mechanism to the second slide rail configured on the sample delivery platform, or by combining the artificial flexible mechanism module with the slide rail area, the sample delivery platform using the flexible mechanism module of the present invention to absorb the deformation of the slide rail has the following effects.

First, the measurement accuracy is improved due to the reduction of the deformation error of the mirror and the sample including the sample stage due to deformation not being transferred to the sample stage through the slide rail; and the productivity is also improved due to the reduction of the error rate due to the improvement of the sample manufacturing accuracy. improve.

Secondly, since it is possible to integrate slide rails and flexible mechanisms in the manufacturing process of the sample delivery platform, the production cost of the parts is reduced; productivity level.

Third, since ordinary aluminum or aluminum alloy can replace expensive materials such as Invar or Zeroder in the manufacturing process of the sample delivery platform, the cost of materials including slide rails can be reduced; and due to the improvement of the stability of parts, Production costs can also be saved.

Description of drawings

1 is a schematic diagram of a sample delivery platform according to conventional techniques;

Fig. 2 is the schematic diagram of the deformation state of the slide rail of the sample sliding platform configured according to the conventional technology;

FIG. 3 is an example of a deformation preventing mechanism of a slide rail according to conventional technology;

Fig. 4 is the example according to the damping mechanism of the slide rail of conventional technology;

5 is a schematic diagram of a connection state of a sample delivery platform according to conventional techniques;

6 is a schematic diagram of an exploded state of a sample delivery platform according to conventional techniques;

7 is a schematic diagram of a flexible mechanism module of a sample delivery platform according to conventional techniques;

Fig. 8 (a) and (b) are according to the example of the installed state and the deformed state of the flexible mechanism module of the present invention;

Fig. 9 (a) and (b) are according to the example of the installed state and the deformed state of the flexible mechanism module of the present invention;

Fig. 10 is an expanded schematic diagram of an example of a flexible mechanism module according to the present invention;

Figure 11 is a flexible mechanism configured on the flexible mechanism module, which deforms in the short axis direction;

Figure 12(a)-(d) are different configurations of the flexible mechanism;

Figure 13 (a) and (b) show the example using the shape of straight circular hinge flexible mechanism;

Figure 14 (a) and (b) are that six or eight flexible mechanisms can be arranged as flexible mechanism modules;

Figure 15 shows the appearance of the slide rail part;

Figure 16 shows that under the condition of temperature change, the slide rail is deformed;

Figure 17 represents the appearance of a single flexible mechanism;

Figure 18 represents the appearance of a single flexible mechanism;

Fig. 19 represents the deformation phenomenon of single flexible mechanism;

Figure 20 represents the profile of a single hinge;

Figure 21 shows that force acts on the fixed part of the single flexible mechanism along the direction of gravity;

Figure 22 shows the sinking of the flexible mechanism.

Detailed ways

Examples of the present invention are explained below.

Figure 5 and Figure 6 show the assembly and disassembly of the sample delivery platform; Figure 7 shows a flexible mechanism module for the sample delivery platform according to the present invention; Figure 8 and Figure 9 are examples 1 and 2, showing Installation situation and deformation situation of the flexible mechanism; and FIG. 10 is an exploded view showing an example of a flexible mechanism module according to the present invention.

According to Figure 5 and Figure 10, it consists of a moving part installed in a cross direction, thus installed on the base (10) and moving along the first guide block (21) of the first slide rail (20), and the installation On the above-mentioned first slide rail (20) and the second slide rail (30) that moves along the second guide block (32); the delivery part that transports the sample (41) through the sample stage (40), passes through the flexible mechanism module (50) ) This medium is installed and formed on the above-mentioned second slide rail (30) together, and by being installed on the X, Y bar mirror (42,43) on the above-mentioned sample stage (40) in the vertical direction to measure displacement; And a Diffusion through the laser head (61), beam splitter (62), and the interferometer (63) installed on the operating path of the above-mentioned sliding parts, and by receiving the above-mentioned X, Y strip mirror (42) from the receiver (64) , 43) The reflected input beam interference signal will generate a measurement component that is transformed into a displacement signal.

First, the sample transport platform (1) in these examples consists of a moving part that performs reciprocating motion in the X-axis and Y-axis directions of the installation position, and a moving part that is mounted on the above-mentioned moving part to transfer the measurement/processing object (41, hereinafter referred to as called 'sample'), and a measuring part that uses laser beams to measure the position of the sample (41) conveyed by the above-mentioned moving part.

The moving part is installed on the base (10) and performs reciprocating motion in the X and Y axis directions according to external signals; and is attached to the first sliding rail (20) and the second sliding rail ( 30) orientation.

Similarly, the first slide rail (20) is installed on the base (10), preferably installed on a pair of guide rails (11) parallel and regularly spaced in the center of the upper layer of the base, and performs reciprocation in the X-axis direction on the figure Movement to adjust the second guide block (32) connected with the guide rail (31).

And, the second slide rail (30) is installed on the base (10), preferably installed on a pair of guide rails (31) on both sides of the upper part of the first slide rail (20) parallel and regularly spaced, and Y on the figure Perform reciprocating motion in the axial direction to adjust the second guide block (32) connected with the guide rail (31).

And, the conveying part is installed on the second slide rail (30) and conveys the object of sample (41), by being installed on the second slide rail (30) sample is placed on the sample table (40), and inserted in the above-mentioned It consists of a flexible mechanism module (50) between the sample stage (40) and the second slide rail (30) and absorbing the deformation of the second slide rail (30).

The sample stage (40) is an object that performs reciprocating motion along the first slide rail (30) and the second slide rail (30); the X strip mirror (42) and the Y strip mirror (43) are attached to the sample in the direction perpendicular to each other The displacement of the laser beam is measured on the top of the stage.

Connection holes are formed on the second slide rail (30) and the sample stage (40), and are used during the connection process of the sample stage (40).

The flexible mechanism module (50) is configured on the second slide rail (30) and prevents the deformation of the second slide rail (30) from being transmitted to the sample stage (40); and the flexible mechanism configured on the flexible mechanism module, according to Deformation occurs in the minor axis direction shown in FIG. 11 , and when the slide is deformed, the shape of the sample stage is maintained before the slide is deformed.

Therefore, the flexible mechanism area of each flexible mechanism module (50) is formed so that a small range of deformation can occur in the minor axis direction, and, in particular, is manufactured to have Different kinds and shapes.

The flexible mechanism module (50) includes a plurality of shock-absorbing holes (53) uniformly penetrating the above-mentioned second slide rail (30) at regular intervals according to the upper and lower directions, and a plurality of shock-absorbing holes (53) are cut to fit the above-mentioned shock-absorbing holes (53). ) center deformation line (54), and provide a deformation space for the bridge part (56) and the mounting part (52) on which the above-mentioned sample stage (40) is mounted.

During the configuration of the flexible mechanism module (50), preferably on both sides of the mounting part (52), one or more bridge parts (56) are integrally formed.

At this time, the connection holes (51) formed on the mounting member (52) are provided by using connection tools such as the above-mentioned sample stage (40) and screws.

In the configuration process of the flexible mechanism module (50), it is better that the shock-absorbing hole is processed to be in a precise position and have a precise size, and in order to fit the position of the above-mentioned shock-absorbing hole (53), the above-mentioned deformation line (54 ) will be processed by wire-EDM.

The flexible mechanism can be according to different types, for example, a leaf spring type flexible mechanism forming the contact surface of the mounting part (52) and the bridge part (56), configured into a linear shape such as [accompanying drawing 12] (a), forming the mounting part (52 ) and the straight circular hinge flexible mechanism of the contact surface of the bridge part (56), configured into a semicircular shape such as (b), forming the chamfered hinge flexible mechanism of the mounting part (52) and the bridge part (56) contact surface, configured In the shape as (c), the elliptical hinge flexible mechanism forming the contact surface of the mounting part (52) and the bridge part (56) is configured in an elliptical shape according to (d).

Leaf spring-like flexible mechanisms can generate large displacement levels, but have the disadvantage of relatively weak strength to allow deformation in the side-by-side direction; on the contrary, straight circular hinge flexible mechanisms have the advantage of excellent axial strength characteristics, although the deformation level is relatively small.

In addition, there are elliptical hinge flex mechanisms or chamfer hinge flex mechanisms that compensate for the advantages and disadvantages of these two flex mechanisms. With this, different configurations of the flexible mechanism as shown in FIG. 12 are possible.

Figure 13 shows an example of the shape of the flexible mechanism using a straight circular hinge; it can be changed to the minor axis direction by a 4-bar linkage. More complex mechanisms would be implemented in addition to the above example, but it appears that the 4-bar linkage is the easiest to handle.

In order to prevent the deformation of the sliding rail from being transmitted to the sample stage, a flexible mechanism module (50) can be arranged on the flexible mechanism module. Basically, the deformation of the flexible mechanism in the minor axis direction is allowed so that three free angles on the plane can be limited, the flexible mechanism is available from at least three units; and, more units can be provided.

Therefore, three flexible mechanisms are arranged on two corners on one side of the second slide rail (30) and the center of the other side according to Fig. 9 (a) and (b), and four flexible mechanisms are arranged on the center according to Fig. 8 (b) The four corners of the second slide rail (30).

In addition, six, eight, or more flexible mechanisms can be arranged as a flexible mechanism module according to FIG. 14 . The arrangement of the flexible mechanism does not need to be symmetrical; and although five or seven units are arranged asymmetrically, thermal deformation can be prevented from being transmitted to the sample stage.

The flexible mechanism module (50) can be integrally formed on the above-mentioned second slide rail (30), but can also be formed and connected by an additional part.

The measurement part (60) measures the position of the sample (41) installed on the sample stage (41) and transported by the laser beam, including being attached to the moving path of the first and second sliding rails (20, 30) and releasing the laser beam The laser head (61), the beam splitter (62) that distributes the laser beam released by the above-mentioned laser head (61) into X beam and Y beam, will be divided into two parts by the beam splitter (62) To the interferometer (63) of the X strip mirror (42) and the Y strip mirror (43) and by receiving the interference signal reflected by the above X, Y strip mirror (42, 43) to convert the light beam into the X, Y receiver of the displacement signal (64).

Hereinafter, the procedure of the present invention is explained as follows.

First, since the X-direction displacement of the sample stage (40) is measured by the X strip mirror (42), and the Y-direction displacement is measured by the Y strip mirror (43), so during the operation of the sample sliding platform (1), the sample position ( 41) Measured by the measuring unit.

The beam generated by the laser head (61) is divided into two directional beams (X, Y) after passing through the beam splitter (62), passes through the interferometer (63), and is reflected by the X, Y strip mirrors (42, 43) , and the interference is improved by the interferometer (63).

The interference signal of the interferometer (63) is then measured by the receiver (64) of the measuring part and converted into a displacement signal after a signal processing process.

If the first and second slide rails (20, 30) are deformed by excessive connection or thermal expansion, the deformation of the second slide rail (30) is transmitted to the sample stage (40) while being absorbed by the flexible mechanism module (50) .

In other words, although the second slide rail (30) is deformed, according to Fig. 8b and Fig. 9b, the damping hole (53) or deformation line (54) of the flexible mechanism module (50) is deformed to match the second slide rail ( 30) to a degree corresponding to the deformation level and to absorb the deformation of said slide rail (30).

Thus, since the deformation of the second sliding rail (30) is not directly transmitted to the sample stage (40) or the X, Y strip mirrors (42, 43), the sample (41) and the mirror mounted on the sample stage (40) The relative distance of (42, 43) is correctly measured.

The design method of the flexible mechanism of the present invention is explained as follows.

First, in order to prevent the thermal expansion of the slide rail part when the temperature changes, guidelines for the design method of the hinge part of the flexible mechanism are recommended.

According to Fig. 15, the appearance of the slide rail part is shown, which usually fixes the sample stage by bolt connection. According to FIG. 16 , the sliding rail deforms in the event of a temperature change. The solid line part shows the appearance of the slide rail before deformation, and the dotted line part shows the appearance of the slide rail after thermal expansion.

From the center of the rail, the rail will expand radially. Assuming that the slide rail is bolted to the sample stage at four points, a force F (hereinafter referred to as 'thermal expansion force') applied to each connected part will act due to thermal expansion occurring. At this time, the thermal expansion force is calculated as follows:

[Formula 1]

$\mathrm{<span\; class="notranslate">\; f</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; \&sigma;A</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; E\&delta;A</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; E.</span>}\frac{\mathrm{<span\; class="notranslate">\; \&Delta;\; L</span>}}{\mathrm{<span\; class="notranslate">\; L</span>}}\mathrm{<span\; class="notranslate">\; A</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; E.</span>}\frac{\mathrm{<span\; class="notranslate">\; \&alpha;L\&Delta;T</span>}}{\mathrm{<span\; class="notranslate">\; L</span>}}\mathrm{<span\; class="notranslate">\; A</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; E.</span>}\frac{\mathrm{<span\; class="notranslate">\; \&alpha;L\&Delta;Tdb</span>}}{\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; E\&alpha;\&Delta;Tdb</span>}$

where A=db, ΔL-αLΔT

Here, 'α' is the thermal expansion coefficient of the material, 'E' is the elastic ratio of the material, 'A' is the cross section of the connecting part, 'd' is the diameter of the connecting bolt, 'b' is the thickness of the sliding part, 'L ' is the distance from the center of the slide rail to the connecting part, and 'ΔL' is the deformation degree of the expansion of the connecting part caused by thermal deformation.

Therefore, in order to ensure that the thermal expansion of the slide rail is not transferred to the sample stage through the flex mechanism base, the tolerance of the flex mechanism deformation due to the thermal expansion force should exceed 'ΔL'.

Second, although the tolerable degree of deformation of the flexible mechanism becomes 'ΔL', since the yielding phenomenon should not occur, the maximum stress loaded on the hinge of the flexible mechanism should be less than the yield strength.

Again, although the above two conditions have been met, due to the total weight of the sample stage, sample, and mirror fixed on the base of the flexible mechanism, there will be a sinking phenomenon in the direction of gravity; however, the value should be lower than the appropriate level.

Therefore, it can be considered that a flexible mechanism structure that satisfies the above three conditions is ideal.

The present invention now determines the conditions which should be fulfilled first. The strength of a single flexible mechanism should be calculated to estimate the degree of deformation of the flexible mechanism due to the thermal expansion force F.

For ease of understanding, the appearance of a single flexible mechanism is shown in Figure 18. Although the appearances of the device components of FIGS. 17 and 18 are different from each other, the structures and mechanisms are the same.

A single flexible instrument part is composed as follows. 60 represents the fixing part fixed to the slide rail part or the slide rail, 62 represents the fixing part for the sample stage, 61 refers to the connector part connecting the slide rail part and the fixing part, 64-70 represent six hinges with free angle of rotation . In the case of thermal expansion force F, the deformation phenomenon of a single flexible mechanism is shown in Figure 19.

Here, the position of the fixed part changes by 'Δx' due to the rotation of the eight hinges. At this time, the potential energy stored through the deformation of all hinges in order to achieve the degree of deformation 'Δx' will be calculated. The outline of a single hinge is shown in Figure 20.

The potential energy stored by the deformation of a single hinge is expressed according to formula (1).

[Formula 2]

Here, 'ke' represents the rotational strength of the hinge part, calculated according to formula (2).

$\mathrm{<span\; class="notranslate">\; V</span>}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; 1</span>}}{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; k</span>}}_{\mathrm{<span\; class="notranslate">\; \&theta;</span>}}{<span\; class="notranslate">\; (</span>\frac{\mathrm{<span\; class="notranslate">\; \&Delta;x</span>}}{\mathrm{<span\; class="notranslate">\; l</span>}}<span\; class="notranslate">\; )</span>}^{\mathrm{<span\; class="notranslate">\; 2</span>}}$

[Formula 3]

${\mathrm{<span\; class="notranslate">\; k</span>}}_{\mathrm{<span\; class="notranslate">\; \&theta;</span>}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; E.</span>}{\mathrm{<span\; class="notranslate">\; bt</span>}}^{\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}}{\mathrm{<span\; class="notranslate">\; 9</span>}\mathrm{<span\; class="notranslate">\; \&pi;</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="R"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">R</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}}$

And, Δx/l represents the rotation angle of the hinge. If the deformation of the hinge is small, the angle of rotation can be estimated as Δx/l. Since eight hinges are used, the potential energy stored in all hinges is calculated according to equation (4).

[Formula 4]

$\mathrm{<span\; class="notranslate">\; V</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; 8</span>}<span\; class="notranslate">\; \&times;</span>\frac{\mathrm{<span\; class="notranslate">\; 1</span>}}{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; \&times;</span>{\mathrm{<span\; class="notranslate">\; k</span>}}_{\mathrm{<span\; class="notranslate">\; \&theta;</span>}}{<span\; class="notranslate">\; (</span>\frac{\mathrm{<span\; class="notranslate">\; \&Delta;x</span>}}{\mathrm{<span\; class="notranslate">\; l</span>}}<span\; class="notranslate">\; )</span>}^{\mathrm{<span\; class="notranslate">\; 2</span>}}$

If the potential energy "V" is solved by "x" differentiation to calculate the strength K of a single flexible mechanism, the recovered power F can be calculated as expressed in formula (5).

[Formula 5]

$\mathrm{<span\; class="notranslate">\; f</span>}<span\; class="notranslate">\; =</span>\frac{<span\; class="notranslate">\; \&PartialD;</span>\mathrm{<span\; class="notranslate">\; V</span>}}{<span\; class="notranslate">\; \&PartialD;</span>\mathrm{<span\; class="notranslate">\; x</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>\frac{\mathrm{<span\; class="notranslate">\; \&Delta;x</span>}}{{\mathrm{<span\; class="notranslate">\; l</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; 16</span>}\mathrm{<span\; class="notranslate">\; \&Delta;xEb</span>}{\mathrm{<span\; class="notranslate">\; t</span>}}^{\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}}{\mathrm{<span\; class="notranslate">\; 9</span>}\mathrm{<span\; class="notranslate">\; \&pi;</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="R"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">R</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; l</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}$

Using x to differentiate the restoring force F, the strength of a single flexible mechanism can be calculated as expressed in formula (6).

[Formula 6]

$\mathrm{<span\; class="notranslate">\; K</span>}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; f</span>}}{\mathrm{<span\; class="notranslate">\; \&Delta;x</span>}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; 16</span>}{\mathrm{<span\; class="notranslate">\; Ebt</span>}}^{\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}}{\mathrm{<span\; class="notranslate">\; 9</span>}\mathrm{<span\; class="notranslate">\; \&pi;</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="R"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">R</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; l</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}$

The deformation degree Δx of a single flexible mechanism calculated from formulas (2)-(6) can be calculated as expressed in formula (7).

[Formula 7]

$\mathrm{<span\; class="notranslate">\; \&Delta;x</span>}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; f</span>}}{\mathrm{<span\; class="notranslate">\; K</span>}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; 9</span>}\mathrm{<span\; class="notranslate">\; \&pi;</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="R"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">R</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; l</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}{\mathrm{<span\; class="notranslate">\; 16</span>}\mathrm{<span\; class="notranslate">\; E.</span>}{\mathrm{<span\; class="notranslate">\; bt</span>}}^{\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; \&times;</span>\mathrm{<span\; class="notranslate">\; E\&alpha;\&Delta;Tdb</span>}$

The degree of deformation (Δx) of a single flexible mechanism will exceed ΔL (Δx>/=ΔL), so the degree of thermal deformation (ΔL) of the slide member is not transmitted to the sample stage. Therefore, the condition of formula (8) should be satisfied.

[Formula 8]

$\frac{\mathrm{<span\; class="notranslate">\; 9</span>}\mathrm{<span\; class="notranslate">\; \&pi;</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="R"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">R</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; l</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}{\mathrm{<span\; class="notranslate">\; 16</span>}\mathrm{<span\; class="notranslate">\; E.</span>}{\mathrm{<span\; class="notranslate">\; bt</span>}}^{\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; \&times;</span>\mathrm{<span\; class="notranslate">\; E\&alpha;\&Delta;Tdb</span>}<span\; class="notranslate">\; \&Greater\; Equal;</span>\mathrm{<span\; class="notranslate">\; \&alpha;L\&Delta;T</span>}$

$\frac{\mathrm{<span\; class="notranslate">\; 9</span>}\mathrm{<span\; class="notranslate">\; \&pi;</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="R"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">R</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; l</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; <figure-callout\; id="16"\; label="Edb"\; filenames="A200810168658E00262.png"\; state="\{\{state\}\}">Edb</figure-callout></span>}}{\mathrm{<span\; class="notranslate">\; 16</span>}\mathrm{<span\; class="notranslate">\; E.</span>}{\mathrm{<span\; class="notranslate">\; bt</span>}}^{\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; \&Greater\; Equal;</span>\mathrm{<span\; class="notranslate">\; 1</span>}$

Second, since the stress on the hinge should be less than the yield strength, this condition needs to be considered. Considering the safety factor, it is set as ‘σmax=(0.1～0.3)σy’, assuming that the maximum pressure applied to the hinge is σmax. Adding σmax to the hinge, the magnitude of the moment (Mmax) is calculated according to formula (9).

[Formula 9]

${\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; max</span>}}<span\; class="notranslate">\; =</span>\frac{{\mathrm{<span\; class="notranslate">\; bt</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}{\mathrm{<span\; class="notranslate">\; 6</span>}{\mathrm{<span\; class="notranslate">\; K</span>}}_{\mathrm{<span\; class="notranslate">\; t</span>}}}{\mathrm{<span\; class="notranslate">\; \&sigma;</span>}}_{\mathrm{<span\; class="notranslate">\; max</span>}}<span\; class="notranslate">\; :</span>{\mathrm{<span\; class="notranslate">\; \&sigma;</span>}}_{\mathrm{<span\; class="notranslate">\; max</span>}}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 0.1</span>}<span\; class="notranslate">\; ~</span>\mathrm{<span\; class="notranslate">\; 0.3</span>}<span\; class="notranslate">\; )</span>{\mathrm{<span\; class="notranslate">\; \&sigma;</span>}}_{\mathrm{<span\; class="notranslate">\; r</span>}}$

Here, Kt, as a stress concentration factor, is expressed according to formula (10).

[Formula 10]

${\mathrm{<span\; class="notranslate">\; K</span>}}_{\mathrm{<span\; class="notranslate">\; t</span>}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; 2.7</span>}\mathrm{<span\; class="notranslate">\; t</span>}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; 5.4</span>}\mathrm{<span\; class="notranslate">\; R</span>}}{\mathrm{<span\; class="notranslate">\; 8</span>}\mathrm{<span\; class="notranslate">\; R</span>}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; t</span>}}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; 0.325</span>}$

When the thermal expansion force F is applied to a single flexible mechanism, since it is equally distributed among the 4 joints, the magnitude of the force applied to one joint is F/4. Since the length of the connecting piece is 'l', the magnitude of the moment added to the two hinges formed by the connecting piece is Fl/4. Therefore, due to the thermal expansion force, the magnitude of the moment (=Fl/4) applied to all hinges should be smaller than the magnitude of Mmax to prevent the yielding phenomenon of the hinges, which can be expressed according to formula (11).

$\frac{\mathrm{<span\; class="notranslate">\; Fl</span>}}{\mathrm{<span\; class="notranslate">\; 4</span>}}<span\; class="notranslate">\; \&le;</span>\frac{{\mathrm{<span\; class="notranslate">\; bt</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}{\mathrm{<span\; class="notranslate">\; 6</span>}{\mathrm{<span\; class="notranslate">\; K</span>}}_{\mathrm{<span\; class="notranslate">\; t</span>}}}{\mathrm{<span\; class="notranslate">\; \&sigma;</span>}}_{\mathrm{<span\; class="notranslate">\; max</span>}}$

$\frac{\mathrm{<span\; class="notranslate">\; 8</span>}\mathrm{<span\; class="notranslate">\; x</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="Et"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">Et</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; K</span>}}_{\mathrm{<span\; class="notranslate">\; t</span>}}}{\mathrm{<span\; class="notranslate">\; 3</span>}\mathrm{<span\; class="notranslate">\; \&pi;</span>}{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="R"\; filenames="A200810168658E00302.png"\; state="\{\{state\}\}">R</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; l</span>}}<span\; class="notranslate">\; \&le;</span>{\mathrm{<span\; class="notranslate">\; \&sigma;</span>}}_{\mathrm{<span\; class="notranslate">\; max</span>}}$

When the sample stage is fixed on the upper flexible mechanism base, due to the extra gravity, the fixed parts and connecting parts sink in the direction of gravity.

The third condition is to keep the value below a suitable value. The sinkage of the fixed parts needs to be calculated.

When the beam has a regular section, it is easy to calculate the sag with the sag formula, however, it is not easy to give the flexible mechanism of the present invention due to the irregularity of the section due to the given structural properties.

Therefore, the worst case must be considered when calculating the sinkage. The worst case of this example referred to here means that the beam of the flexible mechanism is composed of the same cross-section as the hinge and concave surface shown in FIG. 7 .

Assume that the sum of the masses of the fixtures of the base of the flexible mechanism is the mass of the sample test to be fixed on it and the masses of the mirror and the sample. If the gravitational force equally distributed on the four flexible mechanisms acts, it can be considered that a force equal to Mg/4 acts on the fixed part of a single flexible mechanism along the direction of gravity. At this time, the sinking phenomenon of the flexible mechanism is the same as that shown in FIG. 8 .

At this time, the sinking degree 'σ' of the flexible mechanism is expressed by the formula (12) derived from the beam sinking formula.

[Formula 12]

$\mathrm{<span\; class="notranslate">\; \&delta;</span>}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; 1</span>}}{\mathrm{<span\; class="notranslate">\; 12</span>}\mathrm{<span\; class="notranslate">\; EI</span>}}{\mathrm{<span\; class="notranslate">\; Fl</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; I</span>}}{\mathrm{<span\; class="notranslate">\; 12</span>}\mathrm{<span\; class="notranslate">\; EI</span>}}<span\; class="notranslate">\; (</span>\frac{\mathrm{<span\; class="notranslate">\; Mg</span>}}{\mathrm{<span\; class="notranslate">\; 4</span>}}<span\; class="notranslate">\; )</span>{\mathrm{<span\; class="notranslate">\; I</span>}}^{\mathrm{<span\; class="notranslate">\; 3</span>}}$

The cross-sectional shape of the observation beam, (referring to Figures 7 and 8), is a rectangular shape with 't' width and 'b' height; therefore, the area moment of inertia is the same as equation (13).

[Formula 13]

$\mathrm{<span\; class="notranslate">\; I</span>}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; I</span>}}{\mathrm{<span\; class="notranslate">\; 12</span>}}{\mathrm{<span\; class="notranslate">\; tb</span>}}^{\mathrm{<span\; class="notranslate">\; 3</span>}}$

Therefore, the subsidence 'σ' is calculated according to formula (14).

[Formula 14]

$\mathrm{<span\; class="notranslate">\; \&delta;</span>}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; Mg</span>}{\mathrm{<span\; class="notranslate">\; l</span>}}^{\mathrm{<span\; class="notranslate">\; 3</span>}}}{\mathrm{<span\; class="notranslate">\; 4</span>}\mathrm{<span\; class="notranslate">\; E.</span>}{\mathrm{<span\; class="notranslate">\; tb</span>}}^{\mathrm{<span\; class="notranslate">\; 3</span>}}}$

In this design, it is desirable that this value be below the appropriate sinkage limit (delta limit).

Therefore, in order to design a satisfactory flexible mechanism, the three conditions mentioned above should all be satisfied; and these conditions are expressed by equations (8), (11) and (14).

^* Code of the main components in the picture ^*

1: Sample delivery platform

10: base

11, 31: guide rail

20: The first slide rail

30: Second slide rail

40: sample table

41: sample

42, 43: X, Y strip mirrors

50: flexible mechanism

52: Mounting parts

53: Vibration hole

54: deformation line

63: Interferometer

64: Receiver

Claims (9)

1. the sample with the distortion of compliant mechanism module absorption slide rail transports platform and its three parts;

Be installed into mutually crisscross moving-member, first slide rail (20) that is installed in that base (10) is gone up and moves along first guide block (21), and second slide rail (30) that is installed in that described first slide rail (20) is gone up and moves along second guide block (32);

Transport parts, it transports sample (41) by the sample stage (40) be formed on described second slide rail (30) is installed with compliant mechanism module (50), and by in the X, Y bar mirror (42, the 43) Displacement Measurement that are installed on the mutually perpendicular direction on the described sample stage (40); And

Measurement component, spread by laser head (61), bundle divider (62) and the interferometer (63) that is installed on the courses of action of described moving-member, and output is transformed into displacement signal by receive the input beam interference signal that reflects by described X, Y bar mirror (42,43) from receiver (62).

2. compliant mechanism module as claimed in claim 1 (50) is characterized in that, described compliant mechanism module (50) has on upper and lower direction to determine evenly to penetrate at interval a plurality of shock relieve vents (53) above described second slide rail (30); And a plurality ofly be cut into the hook (54) that meets in described shock relieve vent (53) center, and provide bridge parts and its to go up the deformation space of the installing component of the described sample stage of installation (40);

And be that sample transports platform, have characteristic, so that use the compliant mechanism module for slide rail is out of shape the purpose that absorbs according to previously described form.

3. compliant mechanism module as claimed in claim 1 or 2 (50), it is characterized in that, described compliant mechanism module (50) is to transport platform with the sample that compliant mechanism module absorption slide rail is out of shape, and has the feature on four jiaos that are formed on described second slide rail (30).

4. compliant mechanism module as claimed in claim 1 or 2 (50), it is characterized in that, described compliant mechanism module (50) is to transport platform with the sample that the compliant mechanism module absorbs the slide rail distortion, has the feature at the center of the angle of a side that is formed on described second slide rail (30) and opposite side.

5. compliant mechanism module as claimed in claim 1 or 2 (50), it is characterized in that, described compliant mechanism module (50) is to transport platform with the sample that compliant mechanism module absorption slide rail is out of shape, and has five or more a plurality of to serving as a contrast or asymmetricly be placed on the feature on described second slide rail (30).

6. installing component as claimed in claim 2 (52), it is characterized in that, described installing component (52) is to transport platform with the sample that compliant mechanism module absorption slide rail is out of shape, and has the feature that the vibration-absorptive material (55) that contacts with described sample stage (40) is fixed on upside.

7. compliant mechanism module as claimed in claim 2 (50), it is characterized in that, the sample that absorbs the slide rail distortion with the compliant mechanism module transports platform, and the contact region with described installing component (52) and bridge parts (56) forms linearity configuration, semi-circular shape or elliptical shape or any their feature in conjunction with shape.

8. compliant mechanism module as claimed in claim 1 or 2 (50), it is characterized in that, described compliant mechanism module (50) is to transport platform with the sample that compliant mechanism module absorption slide rail is out of shape, and has the feature that is machined into described second slide rail (30) or is connected to described second slide rail (30).

9. compliant mechanism module as claimed in claim 1 or 2 (50), it is characterized in that, described compliant mechanism module (50) is to transport platform with the sample that compliant mechanism module absorption slide rail is out of shape, and has according to the following equation (1) or (3) and determines the feature of described installing component (52) and bridge parts (56) by adjusting described shock relieve vent (53) and described hook (54);

[formula 1]

The Δ L of-Δ X

Wherein Δ is the degree of deformation of compliant mechanism parts; Δ L is the thermal deformation degree of slide rail parts;

[formula 2]

-Fl/4≤M _max

Wherein F1/4 is the size of moment; M _MaxBe the quality summation of installing component, comprise sample stage and sample; F is a thermal expansion force; L is the length of web member;

[formula 3]

σ＝δlimit

Wherein σ is the sinkage of compliant mechanism parts; δ limit is the sinkage limit value of compliant mechanism parts.

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