CN101509149B - Support table with heater in crystal growth furnace - Google Patents

Abstract

A supporting table body with a heater in a crystal growth furnace is electrically connected to an electric heater through a plurality of supporting columns respectively and supports an upper table plate. Each support column is correspondingly screwed on a nut seat of the metal electrode column by the graphite electrode support column, and the metal electrode column is fixed on the furnace wall by the fixed seat. The fixing flange of the fixing seat is welded on the furnace wall, the elastic gasket is arranged in the fixing seat, and each supporting column can evenly apply force to the supporting table body through the adjustment of the elasticity of the elastic gasket. The invention disperses the weight of the supporting table body by a plurality of supporting columns and stably fixes the supporting table body on the furnace wall of the crystal growth furnace, so that the supporting table body is not easy to topple and can prevent safety accidents; but also can make the table plate thin, which is beneficial to uniformly and directly transferring heat into the crucible when heating and enabling the silicon slurry to uniformly grow crystal when heat is dissipated.

Description

Support table with heater in crystal growth furnace

technical field

The invention relates to a supporting table body, in particular to a supporting table body suitable for a crystal growth furnace with a heater.

Background technique

Please refer to Fig. 1, it shows as known crystal growth furnace 9, and heating chamber 90 as shown in the figure is arranged in the crystal growth furnace 9, is provided with table board 91, and crucible 92 in heating chamber 90 contents, and dresses in crucible 92 Contains silicon material. The support column 93 is fixed on the furnace bottom cover 94 of the crystal growth furnace 9 and supported under the table 91 and the crucible 92 .

In the known crystal growth furnace 9 , in order to consider that the table 91 can be installed in the crystal growth furnace 9 in a balanced manner, some general-purpose crystal growth furnaces use three support columns 93 to achieve balance. In order to effectively support the crucible 92 with three support columns 93, the table board 91 is usually made thick enough to prevent breakage, and the design of each support column 93 is also relatively thick to bear a considerable load.

As shown in the figure, the electric heater 95 is arranged around the crucible 92 to heat the silicon material with radiant heat. When heating, the heat capacity of the table 91 is large, and it needs to absorb a large amount of heat to gradually reach the set temperature to completely melt the silicon material into a slurry; Uneven cooling of the slurry above and below causes stress inside the solidified crystal anchor, resulting in poor product quality.

Furthermore, if the silicon slurry leaks out from the small cracks in the crucible 92, the molten silicon slurry will erode one of the supporting pillars 93 under the condition of continuous accumulation, causing cracks, causing the crucible 92 to fall when it breaks, and finally a safety accident will occur. .

Contents of the invention

The object of the present invention is to provide a support table with a heater in a crystal growth furnace, in order to improve the defects in the known technology.

In order to achieve the above object, the supporting table with a heater in the crystal growth furnace provided by the present invention includes a table board and at least four support columns, and the table board is supported and fixed in a crystal growth furnace by the at least four support columns. inside the furnace wall;

in:

The support table body also includes a plurality of electric heaters, which are respectively arranged under the table board; wherein, each support column includes:

A graphite electrode support includes a bottom end and a top end, the bottom end is provided with an external thread, and the top end is supported against one of the plurality of electric heaters and electrically connected to each other;

A metal electrode column includes a nut base and an outer screw rod, one end of the nut base is recessed with an inner screw hole corresponding to the outer thread of the graphite electrode support, and the other end of the nut base protrudes and extends with a shoulder formed between the external screw and the external screw;

A fixed seat includes a fixed flange, an insulating shaft sleeve, an upper insulating pad, a sealing gasket, an elastic washer, a fixing ring, and a plurality of insulating rings, wherein the fixing flange includes a hollow cylinder , and an outer ring, the outer circumference of the hollow cylinder is fixed on the furnace wall of the side wall of the crystal growth furnace, and a central hole is formed inside, the outer ring is provided with a plurality of perforations; the insulating sleeve is sleeved on the metal The outer periphery of the nut seat of the electrode column is also accommodated in the central hole; the upper insulating pad includes a central through hole, and a plurality of round holes are opened on its outer circumference; the sealing gasket includes a central hole, and There are a plurality of escape holes on its outer circumference; the elastic washer includes a central portion, a circumferential portion, and at least one elastic piece, and the at least one elastic piece is connected between the central portion and the circumferential portion to provide a shaft In the direction of the elastic force, a center hole is opened in the center of the circle, and a plurality of through holes are opened in the circumference; the outer screw rod of the above-mentioned metal electrode column passes through the center hole of the sealing gasket and the center hole of the elastic washer, and make the shoulder abut against the sealing gasket; the outer circumference of the fixing ring is provided with a plurality of fixing holes;

A plurality of fixing bolts pass through the plurality of fixing holes, the plurality of insulating rings, the plurality of through holes, the plurality of escape holes, the plurality of circular holes, and the plurality of through holes respectively, and pass through the plurality of bolts The caps are correspondingly locked, so that the upper insulating pad, the sealing gasket, and the elastic gasket are clamped and fixed between the fixing flange and the fixing ring, wherein the fixing flange and the sealing gasket Electrical insulation is formed between the insulating sleeve, the upper insulating pad, and the plurality of insulating rings; and

A locking nut, correspondingly locked to the outer screw rod of the metal electrode column, and clamping and fixing the sealing gasket and the elastic washer between the locking nut and the shoulder of the metal electrode column .

Said supporting table body, wherein, an insulating pressing piece is interposed between the two ends of each electric heater and the table board, and the insulating pressing piece corresponds to the top end of the graphite electrode support below it.

The above-mentioned supporting table body, wherein, two ends of each electric heater are respectively recessed with a pit, and the bottom of the table is recessed with a plurality of pits, and the insulating pressing piece is accommodated in the pit and its corresponding pit. hole.

In the above-mentioned supporting table body, the insulating pressing piece refers to a zirconia pressing piece.

Said supporting table body, wherein, a central depression is also provided under the table board.

The support table body, wherein, the top end of the graphite electrode pillar is also provided with an external thread, and the graphite electrode pillar also includes an adjusting nut, and the adjusting nut is screwed on the external thread to support the top. against the heater.

Said supporting table body, wherein, the adjusting nut includes a graphite adjusting nut.

In the support table, the metal electrode column includes a copper electrode column.

Said supporting table body, wherein, the lower surface of the fixing flange is also provided with a ring protrusion, and the upper surface of the upper insulating pad is also provided with a ring groove, and the ring protrusion is correspondingly fitted and accommodated in the ring recess. in the slot.

Said supporting table body, wherein, the fixing flange includes a stainless steel flange.

Said supporting table body, wherein, the insulating sleeve includes an alumina fiber sleeve.

Said supporting table body, wherein, the upper insulating pad includes an alumina fiber pad.

Said supporting table body, wherein, the outer periphery of the upper insulating pad is also provided with an outer flange.

Said supporting table body, wherein, the sealing gasket includes a copper gasket.

Said supporting table body, wherein, the fixing seat further includes a lower insulating pad, and the lower insulating pad is interposed between the elastic washer and the fixing ring, and a plurality of through holes are opened on the outer circumference of the lower insulating pad.

The supporting table body further includes a plurality of insulating seats and a plurality of insulating covers, which are respectively coated on the plurality of nuts correspondingly.

The supporting table body further includes a plurality of insulating bases and a plurality of insulating covers, which respectively cover the plurality of fixing bolts correspondingly.

In this way, under the adjustment of the elastic force of the above-mentioned elastic washer, the supporting columns can be evenly applied to the supporting table body, and the number of supporting columns can be increased without limitation. In addition to dispersing the weight of the supporting table body and stably fixing it on the furnace wall of the bottom cover of the crystal growth furnace, it is not easy to topple over, and safety accidents can be prevented. In addition, the table supporting the table body can be made thinner, and its heat capacity is relatively reduced, so that the electric heater under the table can transfer heat evenly and directly to the crucible when it is heated; It can effectively achieve the heat dissipation effect, not only is conducive to the uniform growth of silicon slurry, but also can save energy consumption.

Description of drawings

FIG. 1 is a schematic diagram of a known crystal growth furnace.

Fig. 2 is a cross-sectional view of a crystal growth furnace according to a preferred embodiment of the present invention.

Fig. 3 is a cross-sectional view of a supporting table body in a preferred embodiment of the present invention.

Fig. 4 is an exploded view of a supporting table body in a preferred embodiment of the present invention.

Fig. 5 is a sectional view of the supporting table body of the second preferred embodiment of the present invention.

Fig. 6 is a cross-sectional view of a supporting table body according to a third preferred embodiment of the present invention.

Explanation of main component symbols in the attached drawings:

Crystal growth furnace 1, 9 Furnace bottom cover 12, 94 Furnace wall 121

Support table body 2 crucible 20,92 table board 21,91

Electric heater 22, 95 Bearing hole 23 Insulation pressure piece 24

Bearing pit 25 Central depression 26 Support column 3, 93

Graphite electrode pillar 31 bottom end 32 external thread 321,331

Top 33 Adjusting nut 34 Metal electrode column 4

Nut seat 41 inner screw hole 411 outer screw rod 42

Shoulder 421 Fixed seat 5 Fixed flange 51

Hollow cylinder 511 Outer ring 512 Central hole 513

Perforation 514 Insulation ring 515, 562, 572 Ring protrusion 516

Insulating shaft sleeve 52 Upper insulating pad 53 Central perforation 531

Round hole 532 Outer flange 533 Ring groove 534

Sealing gasket 54 Central hole 541 Escape hole 542

Elastic washer 55 Center part 551 Circumferential part 552

Shrapnel 553 Middle hole 554 Through hole 555

Fixing ring 56 Fixing hole 561 Lower insulating pad 57

Through hole 571 Fixed bolt 6 Nut 7

Insulation seat 71, 81 insulation cover 72, 82 metal gasket 73

lock nut 8 heating chamber 90

Detailed ways

In the crystal growth furnace of the present invention, there is a support table body of a heater, including a table board and more than four support columns, and the table board is supported and fixed in the furnace wall of its furnace bottom cover of a crystal growth furnace through the support columns. .

The supporting table body includes a plurality of electric heaters, which are respectively arranged under the table board. Wherein, each supporting column includes a graphite electrode column, a metal electrode column, a fixing seat, a plurality of fixing bolts, and a locking nut.

The graphite electrode support includes a bottom end and a top end, the bottom end is provided with an external thread, and the top end is supported against the bottom of two ends of one of the plurality of electric heaters and is electrically connected with each other. The metal electrode column includes a nut base and an outer screw rod. One end of the nut base is recessed with an inner screw hole to correspond to the outer thread of the graphite electrode support. A shoulder is formed between the screws.

The fixed seat includes a fixed flange, an insulating shaft sleeve, an upper insulating pad, a sealing gasket, an elastic washer, a fixing ring, and a plurality of insulating rings. Among them, the fixed flange includes a hollow cylinder and an outer ring, the outer circumference of the hollow cylinder is welded and fixed on the furnace wall of the bottom cover of the crystal growth furnace, and a central hole is formed inside, and the outer ring is provided with a plurality of perforation.

The insulating shaft sleeve is sleeved on the outer periphery of the nut seat of the metal electrode column and accommodated in the central hole. The upper insulating pad includes a central through hole, and a plurality of round holes are opened on its outer circumference. The sealing gasket includes a central hole, and a plurality of escape holes are opened on its outer circumference.

The elastic washer includes a central part, a peripheral part, and at least one shrapnel. At least one shrapnel is connected between the central part and the peripheral part to provide an axial elastic force. There is a middle hole in the center of the central part, and a Multiple through holes.

The outer screw rod of the above-mentioned metal electrode column passes through the central hole of the sealing gasket and the middle hole of the elastic washer, and makes the shoulder abut against the sealing gasket. Moreover, a plurality of fixing holes are opened on the outer circumference of the fixing ring.

A plurality of fixing bolts respectively pass through a plurality of fixing holes, a plurality of insulating rings, a plurality of through holes, a plurality of escape holes, a plurality of round holes, and a plurality of through holes. And through a plurality of nuts correspondingly locked, so that the upper insulating pad, sealing gasket, and elastic gasket are clamped and fixed between the fixed flange and the fixed ring, wherein the fixed flange and the sealing gasket are due to An insulating shaft sleeve, an upper insulating pad, and a plurality of insulating rings are separated to form electrical insulation.

The lock nut is correspondingly locked to the outer screw rod of the metal electrode column, and the sealing gasket and the elastic washer are clamped and fixed between the lock nut and the shoulder of the metal electrode column.

In this way, under the adjustment of the elastic force of the above-mentioned elastic washer, the supporting columns can be evenly applied to the supporting table body, and the number of supporting columns can be increased without limitation. In addition to dispersing the weight of the supporting table body and stably fixing it on the furnace wall of the bottom cover of the crystal growth furnace, it is not easy to topple over, and safety accidents can be prevented. In addition, the table supporting the table body can be made thinner, and its heat capacity is relatively reduced, so that the electric heater under the table can transfer heat evenly and directly to the crucible when it is heated; It can effectively achieve the heat dissipation effect, not only is conducive to the uniform growth of silicon slurry, but also can save energy consumption.

In addition, an insulating pressing piece is sandwiched between the two ends of each electric heater and the table, and the insulating pressing piece corresponds to the top of the graphite electrode support below it.

Moreover, the two ends of each electric heater are respectively recessed with a pit, and the lower part of the table is recessed with a plurality of pits, and the insulating pressing sheet is accommodated in the pit and the corresponding pit, which is more stable for the table and the electric heater. role. In addition, the insulating pressing sheet refers to a pressing sheet made of zirconia, or other equivalent high-temperature-resistant insulating material.

Moreover, a central depression is also provided under the table board. Thus, the center of the table is made thinner, which can increase the heating efficiency of the electric heater, and also enable the crystal growth to start from the center of the bottom of the crucible during cooling, and then grow crystals evenly upwards and outwards, thereby avoiding the generation of internal stress.

The top of the above-mentioned graphite electrode pillar can be provided with an external thread, and the graphite electrode pillar can include an adjusting nut, and the adjusting nut is screwed on the external thread to support against the electric heater. In addition to adjusting the levelness of the supporting table body, and expanding the contact area of the electrical connection.

Moreover, the adjusting nut includes a graphite adjusting nut, and the metal electrode post includes a copper electrode post. In addition, the lower surface of the fixed flange is convexly provided with a ring protrusion, and the upper surface of the upper insulating pad is also concavely provided with a ring groove. There will be no mutual sliding between the flange and the upper insulating pad. The fixed flange includes a stainless steel flange, the insulating sleeve includes an alumina fiber sleeve, and the upper insulating pad includes a silicon rubber or Teflon gasket.

In addition, the outer peripheral ring of the upper insulating pad is provided with an outer flange to closely fit the outer peripheral of the fixing ring to enhance the insulating effect. Furthermore, the gasket includes a copper gasket. In addition, the fixing base also includes a lower insulating pad, which is sandwiched between the elastic washer and the fixing ring, and the outer circumference of the lower insulating pad is provided with a plurality of through holes. Wherein, the above-mentioned support table body also includes a plurality of insulating bases and a plurality of insulating covers, which can be respectively coated on the heads of a plurality of nuts or a plurality of fixing bolts to prevent water droplets from entering the fixing bolts and fixing bolts. Gap between flanges. Therefore, the insulation effect can be enhanced.

Further description will be made below in conjunction with accompanying drawings.

Please refer to FIG. 2 , which is a cross-sectional view of a crystal growth furnace according to a preferred embodiment of the present invention. As shown in the figure, the present invention is a support table body with a heater in a crystal growth furnace, which includes a table board 21 and eight support columns 3 . The table board 21 is supported and fixed in the furnace wall 121 of the furnace bottom cover 12 of a crystal growth furnace 1 through the support column 3 .

Please refer to FIG. 3 and FIG. 4 at the same time. FIG. 3 is a sectional view of a supporting table body according to a preferred embodiment of the present invention, and FIG. 4 is an exploded view of a supporting table body according to a preferred embodiment of the present invention. As shown in the figure, the supporting table body 2 includes a plurality of electric heaters 22 respectively disposed under the table board 21 . Wherein, each supporting column 3 includes a graphite electrode column 31 , a metal electrode column 4 , a fixing seat 5 , a plurality of fixing bolts 6 , and a locking nut 8 .

As shown in the figure, the graphite electrode pillar 31 includes a bottom end 32 and a top end 33 . The bottom end 32 is provided with an external thread 321, the top 33 is provided with an external thread 331, the graphite electrode support 31 includes an adjustment nut 34, and the adjustment nut 34 is screwed on the external thread 331 to support the electric heater 22 below the two ends of one of them and form an electrical connection with each other. Adjusting the nut 34 can adjust the levelness of the supporting table body 2 and expand the contact area of the electrical connection to reduce the resistance.

Wherein, the metal electrode column 4 is a copper electrode column, which includes a nut seat 41 and an external screw 42 . One end of the nut seat 41 is concavely provided with an inner screw hole 411 to correspond to the outer thread 321 screwed on the graphite electrode support 31, and the other end of the nut seat 41 protrudes from an outer screw 42, and a shoulder is formed between the outer screw 42. Section 421.

As shown in Figures 3 and 4, the fixed base 5 includes a fixed flange 51, an insulating shaft sleeve 52, an upper insulating pad 53, a sealing gasket 54, an elastic washer 55, a fixed ring 56, and eight insulating ring 515 . Wherein, the fixed flange 51 is a stainless steel flange, which includes a hollow cylinder 511 and an outer ring 512. The outer circumference of the hollow cylinder 511 is welded and fixed on the furnace wall 121 of the furnace bottom cover 12 of the crystal growth furnace. A central hole 513 is formed.

The outer ring 512 is provided with eight perforations 514, and the insulating sleeve 52 is an alumina fiber sleeve, and is sleeved on the outer periphery of the nut seat 41 of the metal electrode column 4 and is accommodated in the central hole 513, and the upper insulating pad 53 It is a vertical edge insulating pad, which is a silicone rubber or Teflon gasket, which includes a central perforation 531, and is provided with eight round holes 532 around its outer ring, and an outer ring is provided on the outer ring of the upper insulating pad 53 The flange 533 is used to closely fit the outer periphery of the fixing ring 56 to enhance the insulating effect. Wherein, the sealing gasket 54 is a copper gasket, which includes a central hole 541 and eight escape holes 542 on its outer circumference.

The elastic washer 55 includes a central portion 551 , a peripheral portion 552 , and eight elastic pieces 553 . Eight elastic pieces 553 are connected between the center portion 551 and the circumferential portion 552 to provide an axial elastic force, so as to adjust each support column 3 to be evenly stressed. A central hole 554 is defined in the center of the center portion 551 , and eight through holes 555 are defined in the peripheral portion 552 .

The outer screw 42 of the metal electrode post 4 passes through the central hole 541 of the sealing gasket 54 and the central hole 554 of the elastic washer 55 , and makes the shoulder 421 abut against the sealing gasket 54 . Eight fixing holes 561 are defined on the outer circumference of the fixing ring 56 .

In addition, the eight fixing bolts 6 in this example pass through eight fixing holes 561, eight through holes 555, eight escape holes 542, eight round holes 532, eight through holes 514, and eight insulating rings 515 respectively. , eight insulating seats 71, and eight metal gaskets 73, and are respectively locked by eight nuts 7, so that the upper insulating gasket 53, the sealing gasket 54, and the elastic washer 55 are clamped and fixed on the fixed Between the flange 51 and the fixing ring 56 , wherein the fixing flange 51 and the sealing gasket 54 are electrically insulated by the insulating sleeve 52 , the upper insulating pad 53 , and eight insulating rings 515 . In addition, eight insulating covers 72 are used to cover the eight nuts 7 to prevent water droplets from entering the gap between the fixing bolt 6 and the fixing flange 51 to enhance the insulation effect.

Moreover, since both the fixing flange 51 and the fixing ring 56 are made of stainless steel, they are good conductors of heat dissipation. The fixed flange 51 and the fixed ring 56 protrude from the bottom edge of the support column 3 to increase the heat dissipation area, which can prevent the insulating bushing 52, the upper insulating pad 53, and the insulating ring 515 from being burned due to the high heat in the furnace and lose electrical insulation effect. It actually has the effect of preventing safety incidents from occurring in the crystal growth furnace 1 due to the short circuit of the circuit.

As shown in Figure 3, the lower surface of the fixing flange 51 is also provided with a ring protrusion 516, and the upper surface of the upper insulating pad 53 is also provided with a ring groove 534, and the ring protrusion 516 is correspondingly fitted and accommodated in the ring groove. 534, thereby forming a fixing effect, so that the fixing flange 51 and the upper insulating pad 53 will not slide against each other.

As shown in Figure 3, the lock nut 8 is correspondingly locked to the outer screw 42 of the metal electrode column 4, and the sealing gasket 54 and the elastic washer 55 are sandwiched and fixed on the shoulder of the lock nut 8 and the metal electrode column 4 Between 421. The remaining outer screw 42 is used to be screwed to an external power source to provide power to the electric heater 22 in the furnace.

In the present invention, since there are more than three supporting columns 3, the adjustment of the average force and levelness of the supporting table body 2 should be considered. Under the elastic force of the above-mentioned elastic washer 55 and the adjustment of the adjusting nut 34 , the supporting columns 3 can be evenly applied to the supporting table body 2 , and the number of the supporting columns 3 can be increased without limitation.

In addition to dispersing the weight of the supporting table body 2 and stably fixing it on the furnace wall 121 of the crystal growth furnace 1, it is not easy to topple over to prevent safety accidents, and a central depression 26 is also provided below the table board 21 supporting the table body 2. Thus, the center of the table plate 21 is made thinner, the heating efficiency of the electric heater 22 can be increased, and the crystal growth can be started from the center of the bottom of the crucible 20 when the crystal is cooled, and then the crystal can be grown evenly upwards and outwards, thereby avoiding the generation of internal stress. Since the heat storage of the table 21 is reduced, the electric heater 22 under the table 21 can evenly, directly and efficiently transfer heat to the crucible 20 when heating; relatively, when the silicon slurry is cooled and grown, the bottom of the crucible 20 is still It can effectively achieve the heat dissipation effect, not only is conducive to the uniform growth of silicon slurry, but also can save energy consumption.

As shown in FIG. 3 , an insulating pressing piece 24 is interposed between two ends of each electric heater 22 and the table, and the insulating pressing piece 24 corresponds to the top of the graphite electrode support 31 below it. Moreover, two ends of each electric heater 22 are respectively recessed with a pit 25, and a plurality of pits 23 are recessed under the table board 21, and the insulating pressing piece 24 is accommodated in the pit 25 and the pit 23 corresponding thereto. It also has the effect of stabilizing the table board 21 and the electric heater 22. Also, the insulating sheet 24 refers to a zirconia sheet.

As shown in FIG. 5 , it is a cross-sectional view of the supporting table body in the second preferred embodiment of the present invention. Its structure is roughly the same as that of the first embodiment. One of the differences is that eight insulating seats 81 and eight insulating covers 82 are respectively coated on the heads of the eight fixing bolts 6, and are placed on the fixing bolts 6. A metal gasket 73 is provided between the head and the insulating seat 81 . Another difference is that the insulating ring 562 passes through the fixing hole 561, the through hole 555, and the escape hole 542 respectively, and then is tightly fitted between the lower surface of the upper insulating pad 53 and the upper surface of the insulating seat 81, so as to achieve a tight seal between the fixing flange 51 and the insulating seat 81. The electrical insulation function between the pads 54.

Please refer to FIG. 6 , which is a cross-sectional view of a supporting table body according to a third preferred embodiment of the present invention. As shown in the figure, its structure is roughly the same as that of the first embodiment. One of the differences is that the fixing seat 5 of this embodiment also includes a lower insulating pad 57, and the lower insulating pad 57 is sandwiched between the elastic washer 55 and the fixing ring 56. In between, eight through holes 571 are provided on the outer circumference of the lower insulating pad 57 to facilitate the passage of the fixing bolts 6. Another difference is that the insulating ring 572 passes through the through hole 555 and the escape hole 542 respectively, and then is tightly bonded to the upper insulating ring 572. Between the lower surface of the gasket 53 and the upper surface of the edge gasket 57 , the electric insulation effect between the fixing flange 51 and the sealing gasket 54 can be achieved.

The above-mentioned embodiments are only examples for convenience of description, and the scope of rights claimed by the present invention should be based on the scope of claims in the application, rather than limited to the above-mentioned embodiments.

Claims (18)

1. the support table body that has well heater in one kind long brilliant stove comprises a table, and at least four pillar stiffeners, and this table is to support to be fixed in the furnace wall of a long brilliant stove by this at least four pillar stiffener;

Wherein:

This support table body includes a plurality of electricradiators, is arranged at the below of this table respectively; Wherein, each pillar stiffener includes:

One Graphite Electrodes pillar includes a bottom and a top, and this bottom is provided with an external screw teeth, and this apical support is resisted against these a plurality of electricradiators below wherein and forms each other and electrically connects;

One metal electrode post, include a nut seat and an external screw rod, this nut seat one end is concaved with an inner bolt hole with corresponding screw lock this external screw teeth in this Graphite Electrodes pillar, and this nut seat the other end then protrudes and is extended with this external screw rod, and and this external screw rod between be formed with a shoulder;

One permanent seat, include insulating mat, a seal liner, an elastic washer, a set collar and a plurality of dead ring on a mounting flange, the insulating sleeve,, wherein, this mounting flange includes a hollow cylinder and an external toroidal ring, this hollow cylinder periphery is fixedly arranged on the furnace wall of the brilliant furnace sidewall of this length, inside is formed with a medium pore, and this external toroidal ring offers a plurality of perforation; This insulating sleeve is sheathed on this nut seat periphery of this metal electrode post and is located in the lump in this medium pore; Should go up insulating mat and include a central hole, and offer a plurality of circular holes in its outer shroud week; The sealing liner includes a centre hole, and offers a plurality of holes of escaping in its outer shroud week; This elastic washer includes a center of circle portion, a ring perimembranous, and at least one shell fragment, and this at least one shell fragment is linked between this center of circle portion and this ring perimembranous so that an axial elastic force to be provided, and these center of circle central authorities of portion offer a mesopore, and this ring perimembranous offers a plurality of perforations; This external screw rod of above-mentioned metal electrode post passes this centre hole of sealing liner and this mesopore of this elastic washer, and this shoulder is resisted against on the sealing liner; This set collar outer shroud week offers a plurality of fixed orificess;

A plurality of standing bolts, correspondence passes these a plurality of fixed orificess, these a plurality of perforations, these a plurality of hole, these a plurality of circular holes, these a plurality of perforation and these a plurality of dead rings escaped respectively, and by the corresponding respectively locking of a plurality of nuts, with should go up insulating mat, sealing liner, and this elastic washer in the lump clamping be fixed between this mounting flange and this set collar, wherein between this mounting flange and the sealing liner because of between be separated with this insulating sleeve, insulating mat on this, form with these a plurality of dead rings and to be electrically insulated; And

One locking nut, correspondence are locked in this external screw rod of this metal electrode post, and with the sealing liner, and this elastic washer clamping be fixed between this shoulder of this locking nut and this metal electrode post.

2. support table body as claimed in claim 1, wherein, two ends of each electricradiator respectively and be folded with an insulation compressing tablet between this table, this insulation compressing tablet corresponds to this top of this Graphite Electrodes pillar below it.

3. support table body as claimed in claim 2, wherein, two ends of each electricradiator are concaved with one respectively and hold the hole, and this table below is concaved with a plurality of caves of holding, and this insulation compressing tablet is to be placed in hold in the cave corresponding with it of this Cheng Keng.

4. support table body as claimed in claim 2, wherein, this insulation compressing tablet is a zirconium white compressing tablet.

5. support table body as claimed in claim 1, wherein, this table below is provided with a concavity.

6. support table body as claimed in claim 1, wherein, this top of this Graphite Electrodes pillar is provided with an external screw teeth, and this Graphite Electrodes pillar includes one and adjusts nut, is screwed together on this external screw teeth by this adjustment nut and this electricradiator to support contact.

7. support table body as claimed in claim 6, wherein, this adjustment nut is that a graphite is adjusted nut.

8. support table body as claimed in claim 1, wherein, this metal electrode post is a copper electrode post.

9. support table body as claimed in claim 1, wherein, this mounting flange lower surface convexes with a ring projection, and insulating mat upper surface is concaved with a ring groove on this, and this ring projection is corresponding chimeric being placed in this ring groove.

10. support table body as claimed in claim 1, wherein, this mounting flange is a steel flange.

11. support table body as claimed in claim 1, wherein, this insulating sleeve is a sapphire whisker axle sleeve.

12. support table body as claimed in claim 1, wherein, insulating mat is a silicone gasket on this.

13. support table body as claimed in claim 1, wherein, insulating mat is a Teflon liner on this.

14. support table body as claimed in claim 1, wherein, peripheral ring of insulating mat is provided with an outward flange on this.

15. support table body as claimed in claim 1, wherein, the sealing liner includes a copper liner.

16. support table body as claimed in claim 1, wherein, this permanent seat includes insulating mat, and this time insulating mat is located between this elastic washer and this set collar, and this time insulating mat outer shroud week offers a plurality of through holes.

17. support table body as claimed in claim 1 wherein, comprises a plurality of bench insulators and a plurality of insulating cover, correspondence is coated on these a plurality of nuts respectively.

18. support table body as claimed in claim 1 wherein, comprises a plurality of bench insulators and a plurality of insulating cover, correspondence is coated on these a plurality of standing bolts respectively.

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