CN101499739B - In-plane mode linear ultrasonic motor having triangular displacement amplifying mechanism and working mode thereof - Google Patents
In-plane mode linear ultrasonic motor having triangular displacement amplifying mechanism and working mode thereof Download PDFInfo
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- CN101499739B CN101499739B CN2009100246477A CN200910024647A CN101499739B CN 101499739 B CN101499739 B CN 101499739B CN 2009100246477 A CN2009100246477 A CN 2009100246477A CN 200910024647 A CN200910024647 A CN 200910024647A CN 101499739 B CN101499739 B CN 101499739B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 38
- 239000000919 ceramic Substances 0.000 claims abstract description 20
- 238000005452 bending Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims 2
- 238000003199 nucleic acid amplification method Methods 0.000 claims 2
- 230000033001 locomotion Effects 0.000 abstract description 15
- 230000036316 preload Effects 0.000 abstract 1
- 238000002604 ultrasonography Methods 0.000 description 15
- 230000007423 decrease Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
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Abstract
本发明的具有三角型位移放大机构的面内模态直线型超声电机及其工作模态，属超声电机领域。包括振子组件、动子组件；所述振子组件由金属薄板(1)和两块分别粘贴在该金属薄板(1)底面的单向极化矩形压电陶瓷片(2)组成；所述动子组件包括滑条(3)和摩擦片(4)；该超声电机还包括用于提供振子组件中的金属薄板(1)和动子组件中的摩擦片(4)之间预压力的弹簧元件(5)；其特征在于：上述金属薄板(1)为矩形结构叠加三角形结构的金属弹性体，其中以三角形结构部分作为驱动足。分别对两块压电陶瓷片进行驱动，可使振子的驱动足上产生椭圆运动，在一定预压力的作用下，使得滑条产生直线运动。
The in-plane mode linear ultrasonic motor with a triangular displacement amplifying mechanism and its working mode of the present invention belong to the field of ultrasonic motors. It includes a vibrator assembly and a mover assembly; the vibrator assembly is composed of a thin metal plate (1) and two unidirectionally polarized rectangular piezoelectric ceramic sheets (2) respectively pasted on the bottom surface of the metal sheet (1); the mover The assembly includes a sliding bar (3) and a friction plate (4); the ultrasonic motor also includes a spring element ( 5) It is characterized in that: the above-mentioned thin metal plate (1) is a metal elastic body with a rectangular structure superimposed on a triangular structure, wherein the triangular structure part is used as the driving foot. Driving the two piezoelectric ceramic pieces separately can make the driving foot of the vibrator generate elliptical motion, and under the action of a certain preload, the slide bar can generate linear motion.
Description
Technical field:
Plane modal linear type ultrasound motor and operation mode thereof with delta displacement enlarger of the present invention belongs to the ultrasound electric machine field.
Background technology:
Ultrasound electric machine is a kind of inverse piezoelectric effect of utilizing piezoelectric, excites elastomer to produce micro breadth oscillation in supersonic range, and the New-type electric machine that converts thereof into mover macroscopic view straight line or rotatablely move through the friction between fixed, the mover.The linear type ultrasound motor volume is little, and is simple in structure, in light weight, and kinematic accuracy is high, and directly the characteristics of linear movement output make linear type ultrasound motor obtain very big development.Utilize the linear type ultrasound motor of plane modal design to be more conducive to microminiaturization, more can simple, the economical and practical characteristic of reflected ultrasound electric machine structure.
Summary of the invention:
The present invention be intended to develop a kind of simple in structure, efficient is high, response speed is fast, be more suitable for microminiaturization, the linear type ultrasound motor that range of application is wider.
Plane modal linear type ultrasound motor with delta displacement enlarger of the present invention be the simple oscialltor structure as moving cell; Utilize intercoupling of elastomeric flexural vibration mode and longitudinal vibration mode to be used for realizing driving sufficient elliptic motion; Through function of friction, go out Motion Transmission.Plane modal linear type ultrasound motor with delta displacement enlarger of the present invention comprises vibrator component, mover assembly.Vibrator component is made up of sheet metal and two unidirectional polarization rectangular piezoelectric ceramic sheets that stick on this sheet metal bottom surface respectively; Sheet metal is the metallic elastic body of rectangular configuration stack triangular structure; Wherein sufficient as driving with the triangular structure part; Under flexural vibration mode, the triangular structure part that sheet metal had, rising in two summits that it partly is connected with the sheet metal rectangular configuration; A decline, thus drive the displacement on the generation level on the foot at motor oscillator; , specifically confirm the position on these two summits through the model function of vibration of oscillator second order flexural vibrations.Mover assembly adopts draw runner, and has pasted fricting strip above that.Through spring element precompression required between oscillator and the mover is provided.
Plane modal linear type ultrasound motor with delta displacement enlarger of the present invention utilizes inverse piezoelectric effect; When two piezoelectric ceramic pieces are applied phase difference be 180 the degree sine voltage signal the time; Two interior stretching vibrations of face that piezoelectric ceramic piece is done anti-phase, the in-plane bending vibration mode of sheet metal is effectively excited.Under flexural vibration mode, the triangular structure part that sheet metal had, rising in two summits that it partly is connected with the sheet metal rectangular configuration, a decline, thus drive the displacement on the generation level on the foot at motor oscillator; When two piezoelectric ceramic pieces being applied phase difference and be the sine voltage signal of 0 degree, two piezoelectric ceramic pieces are done stretching vibrations in the face of homophase, and the extensional vibration mode of sheet metal is effectively excited.Under extensional vibration mode, the triangular structure part that sheet metal had becomes the vertical direction displacement to the extensional vibration displacement conversion and amplifies, and goes up the displacement that produces on the vertical direction thereby make motor oscillator drive foot.When two piezoelectric ceramic pieces being applied phase difference be the sine voltage signal of pi/2, second order flexural vibration mode and single order extensional vibration mode are ejected simultaneously in the face of sheet metal.Displacement on this both direction spatially has the phase difference of pi/2, also has the phase difference of pi/2 in time, thereby on the driving foot of sheet metal, forms elliptical trajectory in the face.
This motor compact overall structure, be easy to miniaturization, make motor have more wide application space.
Description of drawings:
Fig. 1 is the plane modal linear type ultrasound motor structural representation with triangular form displacement amplifying mechanism.
Fig. 2 is motor oscillator operation mode figure.
Fig. 3 is that the drive signal that the exciting electric oscillator produces required vibration applies the mode sketch map.
Fig. 4 is that motor oscillator makes oscillator drive the view that foot produces counterclockwise elliptic motion under voltage signal drives.Wherein, I～IV is 4 view of motor oscillator in the one-period process.
Label and designation among Fig. 1, Fig. 2: 1 sheet metal, 2 piezoelectric ceramic pieces, 3 draw runners, 4 friction plates, 5 springs.
Label title: p is the piezoelectric ceramic piece polarised direction among Fig. 3; 6,7,8 is the motor oscillator driving signal input.
Embodiment:
Specify plane modal linear type ultrasound motor operation principle and embodiment below with delta displacement enlarger.
As shown in Figure 1, the plane modal linear type ultrasound motor with delta displacement enlarger of the present invention is made up of vibrator component, mover assembly.Said vibrator component is made up of sheet metal 1 and two unidirectional polarization rectangular piezoelectric ceramic sheets 2 that stick on this sheet metal 1 bottom surface respectively; Sheet metal 1 is the metallic elastic body of rectangular configuration stack triangular structure, and is wherein sufficient as driving with the triangular structure part; Said mover assembly comprises draw runner 3 and friction plate 4; Through spring element 5 vibrator component that sheet metal 1 and piezoelectric ceramic piece 2 formed and the precompression between the friction plate 5 are provided.The sine voltage signal with 90 degree phase differences that respectively two piezoelectric ceramic pieces 2 is applied drives; Can on the driving foot of sheet metal 1, produce elliptic motion; Under the effect of certain precompression; The driving foot of sheet metal 1 drives draw runner and produces rectilinear motion, through switching drive signal, can realize reciprocal rectilinear motion.
Fig. 2 is motor oscillator operation mode figure.Fig. 2 (a) is a motor oscillator second order flexural vibration mode.Under flexural vibration mode, the triangular structure part that sheet metal had, rising in two summits that it partly is connected with the sheet metal rectangular configuration, a decline, thus drive the displacement on the generation level on the foot at motor oscillator; Fig. 2 (b) is a motor oscillator single order extensional vibration mode.Under extensional vibration mode, the triangular structure part that sheet metal had becomes the vertical direction displacement to the extensional vibration displacement conversion and amplifies, and goes up the displacement that produces on the vertical direction thereby make motor oscillator drive foot.Dotted portion is the shape before motor oscillator does not deform among the figure.
As shown in Figure 3, the polarised direction of piezoelectric ceramic is the p direction.When motor oscillator driving signal input 6 and 7 is imported E=-Vsin ω t and E=-Vcos ω t drive signal respectively; During 8 ground connection; The driving of motor oscillator can produce the elliptic motion in the xoy plane enough, under the effect of certain precompression, can promote draw runner and produce rectilinear motion.
Wherein: V is a magnitude of voltage; ω is the operation mode frequency of arch oscillator; T is the time.
Fig. 4 is for to import E=-Vsin ω t and E=-Vcos ω t drive signal respectively by motor oscillator driving signal input 6 and 7 among Fig. 3, during 8 ground connection, and 4 states of motor oscillator in one-period.Fig. 4 (I) is certain state constantly, and motor oscillator is in the maximum position state of flexural vibrations, and is in the poised state of extensional vibration, thereby makes motor oscillator drive the maximum deflection state that foot is in the right side.Along with the propelling of time, drive the movement locus of foot, state shown in experience Fig. 4 (II), Fig. 4 (III), Fig. 4 (IV) is accomplished one-period.In this process, motor oscillator drives on the foot and has formed anticlockwise elliptic motion.
When motor oscillator driving signal input 6 and 7 is imported E=-Vcos ω t and E=-Vsin ω t drive signal respectively in by Fig. 3, can drive at motor oscillator and form clockwise elliptic motion on the foot.4 states and the Fig. 4 in one-period is similar for its motor oscillator.
Thus, when through certain precompression effect the driving of motor oscillator foot with after Friction Disk Surface on the draw runner contacts, under the excitation of above-mentioned drive signal, can make draw runner generation rectilinear motion.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111969888B (en) * | 2020-08-07 | 2022-05-31 | 深圳市汇顶科技股份有限公司 | Anti-shake device for piezoelectric motor and chip |
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| CN102307021B (en) * | 2011-09-15 | 2015-10-07 | 上海大学 | Not same order bending vibration modes linear ultrasonic motor and function mode thereof |
| CN104467524B (en) * | 2014-10-16 | 2017-05-17 | 南京航空航天大学 | Working method of plate type linear piezoelectric motor based on in-plane mode |
| CN107096124B (en) * | 2017-04-28 | 2023-03-31 | 南京航空航天大学 | Piezoelectric-drive-based gastrointestinal tract ultrasonic liquid medicine permeation promoting device and working method thereof |
| JP2020127280A (en) * | 2019-02-04 | 2020-08-20 | キヤノン株式会社 | Stage device, micromanipulation apparatus and method for controlling the same |
| CN112713801A (en) * | 2021-01-26 | 2021-04-27 | 金陵科技学院 | High-precision linear driving type piezoelectric actuator |
| CN118701193B (en) * | 2024-08-28 | 2024-11-12 | 季华实验室 | A walking robot |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111969888B (en) * | 2020-08-07 | 2022-05-31 | 深圳市汇顶科技股份有限公司 | Anti-shake device for piezoelectric motor and chip |
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