CN101493425B - Full automatic ultraviolet optical detection method for microscopic surface flaw and system thereof - Google Patents
Full automatic ultraviolet optical detection method for microscopic surface flaw and system thereof Download PDFInfo
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- CN101493425B CN101493425B CN2008101726000A CN200810172600A CN101493425B CN 101493425 B CN101493425 B CN 101493425B CN 2008101726000 A CN2008101726000 A CN 2008101726000A CN 200810172600 A CN200810172600 A CN 200810172600A CN 101493425 B CN101493425 B CN 101493425B
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Abstract
The invention discloses a full-automatic ultraviolet optical detection method of microscopic surface defects and a system thereof. The system is composed of an automatic feeding system, a precision positioning system, an ultraviolet optical system, a microscopic vision system, an image acquisition system, an image processing system and an automatic discharge system which are sequentially connected. The automatic feeding system and the precision positioning system transfer a product to be detected to a work area of the microscopic vision system, microscopic surface curve characteristics of the product are illuminated by the ultraviolet optical system to strengthen microscopic surface defect characteristic information of the product, the defect characteristics are amplified and strengthened by the microscopic vision system, and are transmitted to a computer by the image acquisition system, the image processing system analyzes and processes image information of the acquired microscopic surface defect characteristics, counts products with defects and alarms, and the automatic discharge system discharges the detected product, thus realizing full-automatic optical detection of the microscopic surface quality defects.
Description
Technical field
The present invention relates to a kind of full automatic ultraviolet optical detection method for microscopic surface flaw and system thereof, specifically be method and the system thereof that a kind of micro-image technology, optical imagery treatment technology, Computer Vision Recognition technology and precision positioning technology combine, be applicable to the defects detection such as surface microscopic cut of fine electronic devices and components, semi-conductor chip and the accurate measurement of fine live width.
Background technology
Converging the computer industry giant of the whole world more than ninety percent in the area, Pearl River Delta, nearly 3000 families of electronic information enterprise are being arranged, forming electronics and information industry gold corridor along the Zhujiang River.The semi-manufacture of producing such as computer magnetic head account for 40% of world market; The circuit board of producing, computer driver etc. account for 30% of world market.At present domestic large batch of fine electronic devices and components surface quality detection major part is observed under high-power microscope by human eye and is judged, the product defects that has detects strict to optics, naked eyes also are difficult to judge at microscopically, judge by the mode of finger touch.
Large batch of product detects often needs a large amount of employees to carry out the work of high duplication.This product defects detection mode has many weak points, and at first, human eye works long hours at powerful microscopically, and is very easily tired, judges by accident easily and fails to judge; Secondly, because everyone is different with the degree of understanding to the awareness of standard, the standard of subjective judgement is also different, is difficult to quantize, and therefore in testing process, does not have unified examination criteria; At last, because the workload that detects is big, repeatability is high, serious to the injury of human eye.Majority Electronic Components Manufacturing enterprise still belongs to labour concentrated industry, have benefited from cheap relatively labor cost on the one hand, external simultaneously ripe relatively full-automatic checkout equipment cost is very expensive, therefore many enterprises are under the pressure of cost and financial pressure, still adopt a large amount of artificial this detection modes that fall behind relatively of under high-power microscope, estimating, efficient is lower, and value-added content of product is lower.
Summary of the invention
At the existing existing above-mentioned deficiency of mode technology that detects fine element, one of the object of the invention is, a kind of employing optics and image recognition principle are provided, automatically the full automatic ultraviolet optical detection system of the microscopic surface flaw of testing product.
The present invention also aims to, a kind of system that is used for realizing aforesaid full automatic ultraviolet optical detection method for microscopic surface flaw is provided.
The present invention for achieving the above object, the technical scheme that is provided is:
A kind of full automatic ultraviolet optical detection method for microscopic surface flaw, it comprises product to be detected and control computer, it comprises the steps:
1) sets gradually an automatical feeding system, a Precision Position Location System, a ultraviolet optics system, a micro-vision system, an image capturing system, an image processing system and an automatic discharge system, and connect, make it to be connected each other successively it and communication mutually, constitute a detection system;
2) described automatical feeding system starts, product to be detected is sent in the perform region of micro-vision system, by Precision Position Location System with its accurate location;
3) ultraviolet optics system start-up, the microcosmic surface curvilinear characteristic for the treatment of testing product throws light on, and strengthens the microscopic surface flaw characteristic information of product, and these defect characteristics amplify through the micro-vision system and strengthen handling;
4) image capturing system starts, and control computer is gathered and be transferred to the information after the micro-vision system amplifies and strengthens handling;
5) image processing system starts, and the image information of the product microscopic surface flaw feature to be measured that receives is analyzed and handled, and comprises defective product to be measured is added up and reported to the police;
6) discharge system starts automatically, with the product that detection is finished, discharging automatically.
Described full automatic ultraviolet optical detection method for microscopic surface flaw, described step 1), it comprises the steps:
Set the operational factor of automatical feeding system, Precision Position Location System, ultraviolet optics system, micro-vision system, image capturing system, image processing system and automatic discharge system respectively.
Described full automatic ultraviolet optical detection method for microscopic surface flaw, described step 5), it comprises the steps:
31) original image extracts;
32) feature extraction;
33) Flame Image Process.
A kind of system that realizes described full automatic ultraviolet optical detection method for microscopic surface flaw, it is made of the automatical feeding system, a Precision Position Location System, a ultraviolet optics system, a micro-vision system, an image capturing system, an image processing system and the automatic discharge system that connect successively.
Described Precision Position Location System comprises driver module, motion-control module, positional information feedback module, wherein is provided with movement velocity, scope, step distance parameter regulation unit in the motion-control module.
Described ultraviolet optics system comprises ultraviolet light transmitter module, radiating module, light angle adjusting module and brightness adjusting module.
Described micro-vision system comprises a micro-amplification module that the mass defect feature on surface can be amplified, and a collectable image information and it is transferred to the ultraviolet light video camera that image processing system carries out graphical analysis.
Beneficial effect of the present invention is: method provided by the invention is because the ultraviolet light wavelength is short, and wavelength coverage is 100nm-300nm, compares and wavelength of visible light scope 350nm-700nm, and the ultraviolet optics system is more suitable for high-precision optical detection; Micro-vision system and image processing system are combined, realization is to the accurate detection of the surface quality defect feature of microcosmic, can replace human eye and under high-power microscope, observe and judge, thereby many deficiencies of avoiding human eye to judge have improved detection efficiency and accuracy effectively; But system provided by the invention fully automatic feeding, detection and discharging, and accuracy of detection height, speed are fast, have improved production efficiency and product percent of pass greatly.
The present invention is further described below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is a workflow schematic block diagram of the present invention;
Fig. 2 is the composition module frame chart of the Precision Position Location System among Fig. 1;
Fig. 3 is the composition module frame chart of the ultraviolet optics system among Fig. 1;
Fig. 4 is the composition module frame chart of the micro-vision system among Fig. 1;
Fig. 5 is the composition module frame chart of the image processing system among Fig. 1.
Embodiment
Embodiment: referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, a kind of full automatic ultraviolet optical detection method for microscopic surface flaw that the embodiment of the invention provides, it comprises product to be detected and control computer, it also comprises the steps:
1) sets gradually an automatical feeding system, a Precision Position Location System, a ultraviolet optics system, a micro-vision system, an image capturing system, an image processing system and an automatic discharge system, and connect, make it to be connected each other successively it and communication mutually, constitute a detection system;
2) described automatical feeding system starts, product to be detected is sent in the perform region of micro-vision system, by Precision Position Location System with its accurate location;
3) ultraviolet optics system start-up, the microcosmic surface curvilinear characteristic for the treatment of testing product throws light on, and strengthens the microscopic surface flaw characteristic information of product, and these defect characteristics amplify through the micro-vision system and strengthen handling;
4) image capturing system starts, and control computer is gathered and be transferred to the information after the micro-vision system amplifies and strengthens handling;
5) image processing system starts, and the image information of the product microscopic surface flaw feature to be measured that receives is analyzed and handled, and comprises defective product to be measured is added up and reported to the police;
6) discharge system starts automatically, with the product that detection is finished, discharging automatically.
Described full automatic ultraviolet optical detection method for microscopic surface flaw, described step 1), it comprises the steps:
Set the operational factor of automatical feeding system, Precision Position Location System, ultraviolet optics system, micro-vision system, image capturing system, image processing system and automatic discharge system respectively.
Described full automatic ultraviolet optical detection method for microscopic surface flaw, described step 5), it comprises the steps:
31) original image extracts;
32) feature extraction;
33) Flame Image Process.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, a kind of system that realizes aforesaid full automatic ultraviolet optical detection method for microscopic surface flaw, it is made of the automatical feeding system, a Precision Position Location System, a ultraviolet optics system, a micro-vision system, an image capturing system, an image processing system and the automatic discharge system that connect successively.
Described Precision Position Location System comprises driver module, motion-control module, positional information feedback module, wherein is provided with movement velocity, scope, step distance parameter regulation unit in the motion-control module.
Described ultraviolet optics system comprises ultraviolet light transmitter module, radiating module, light angle adjusting module and brightness adjusting module.
Described micro-vision system comprises a micro-amplification module that the mass defect feature on surface can be amplified, and a collectable image information and it is transferred to the ultraviolet light video camera that image processing system carries out graphical analysis.
During work, automatical feeding system and Precision Position Location System accurately are sent to product to be detected in the perform region of micro-vision system, by the ultraviolet optics system microcosmic surface curvilinear characteristic of product is thrown light on, because the ultraviolet light wavelength is short, the ultraviolet optics system is more suitable for high-precision optical detection; Adopt ultraviolet optics system and micro-vision system, the microcosmic surface mass defect feature of product is obviously embodied, form image with distinct contrast, be sent to image processing system by image capturing system, image processing system comprises original image extraction, feature extraction and three links of Flame Image Process, can be provided with indexs such as the type of surface quality defect, scope, precision, speed by image processing system; After detection was finished, the product of detection being finished by automatic discharge system was transported to next link, so just finishes the sense cycle of a product, realized that the microscopic surface flaw full automatic ultraviolet optical detects.
According to the above embodiment of the present invention, possess detection method and system with the same or similar technical characterictic of present embodiment, all in protection domain of the present invention.
Claims (3)
1. a full automatic ultraviolet optical detection method for microscopic surface flaw is characterized in that it comprises the steps:
1) sets gradually an automatical feeding system, a Precision Position Location System, a ultraviolet optics system, a micro-vision system, an image capturing system, an image processing system and an automatic discharge system, and connect, make it to be connected each other successively it and communication mutually, constitute a detection system; Set the operational factor of automatical feeding system, Precision Position Location System, ultraviolet optics system, micro-vision system, image capturing system, image processing system and automatic discharge system respectively; Described Precision Position Location System comprises driver module, motion-control module, positional information feedback module, wherein is provided with movement velocity, scope, step distance parameter regulation unit in the motion-control module; Described ultraviolet optics system comprises ultraviolet light transmitter module, radiating module, light angle adjusting module and brightness adjusting module; Described micro-vision system comprises a micro-amplification module that the mass defect feature on surface can be amplified;
2) described automatical feeding system starts, product to be detected is sent in the perform region of micro-vision system, by Precision Position Location System with its accurate location;
Described product to be detected is fine electronic devices and components, semi-conductor chip;
3) ultraviolet optics system start-up, the microcosmic surface curvilinear characteristic for the treatment of testing product throws light on, and strengthens the microscopic surface flaw characteristic information of product, and these defect characteristics amplify through the micro-vision system and strengthen handling;
4) image capturing system starts, and control computer is gathered and be transferred to the information after the micro-vision system amplifies and strengthens handling;
5) image processing system starts, and the image information of the product microscopic surface flaw feature to be measured that receives is analyzed and handled, and comprises defective product to be measured is added up and reported to the police;
6) discharge system starts automatically, with the product that detection is finished, discharging automatically.
2. full automatic ultraviolet optical detection method for microscopic surface flaw according to claim 1 is characterized in that, described step 5), and it comprises the steps:
51) original image extracts;
52) feature extraction;
53) Flame Image Process.
3. system that realizes the described full automatic ultraviolet optical detection method for microscopic surface flaw of claim 1, it is characterized in that it is made of the automatical feeding system, a Precision Position Location System, a ultraviolet optics system, a micro-vision system, an image capturing system, an image processing system and the automatic discharge system that connect successively; Described Precision Position Location System comprises driver module, motion-control module, positional information feedback module, wherein is provided with movement velocity, scope, step distance parameter regulation unit in the motion-control module; Described ultraviolet optics system comprises ultraviolet light transmitter module, radiating module, light angle adjusting module and brightness adjusting module; Described micro-vision system comprises a micro-amplification module that the mass defect feature on surface can be amplified.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9970873B1 (en) | 2014-11-12 | 2018-05-15 | Kla-Tencor Corporation | System and method for luminescent tag based wafer inspection |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000352507A (en) * | 1999-06-10 | 2000-12-19 | Sony Corp | Inspection apparatus |
| JP2002214159A (en) * | 2001-01-12 | 2002-07-31 | Sony Corp | Substrate inspecting device, substrate inspecting method, and manufacturing method for liquid crystal display device |
| CN1379459A (en) * | 2001-01-22 | 2002-11-13 | 索尼株式会社 | Apparatus used for evaluating polycrystalline silicon film |
| WO2004100206A1 (en) * | 2003-05-09 | 2004-11-18 | Ebara Corporation | Electron beam device, electron beam inspection method, electron beam inspection device, pattern inspection method and exposure condition determination method |
| CN1699915A (en) * | 2001-03-06 | 2005-11-23 | 东丽株式会社 | Inspection method, inspection device and manufacturing method for display panel |
| JP2006098156A (en) * | 2004-09-29 | 2006-04-13 | Hitachi High-Technologies Corp | Defect inspection method and apparatus |
| US20060163503A1 (en) * | 2005-01-21 | 2006-07-27 | Yuta Urano | Method for inspecting pattern defect and device for realizing the same |
| CN201302555Y (en) * | 2008-10-31 | 2009-09-02 | 东莞康视达自动化科技有限公司 | Full-automatic ultraviolet optical detection system for microscopic surface defects |
-
2008
- 2008-10-31 CN CN2008101726000A patent/CN101493425B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000352507A (en) * | 1999-06-10 | 2000-12-19 | Sony Corp | Inspection apparatus |
| JP2002214159A (en) * | 2001-01-12 | 2002-07-31 | Sony Corp | Substrate inspecting device, substrate inspecting method, and manufacturing method for liquid crystal display device |
| CN1379459A (en) * | 2001-01-22 | 2002-11-13 | 索尼株式会社 | Apparatus used for evaluating polycrystalline silicon film |
| CN1699915A (en) * | 2001-03-06 | 2005-11-23 | 东丽株式会社 | Inspection method, inspection device and manufacturing method for display panel |
| WO2004100206A1 (en) * | 2003-05-09 | 2004-11-18 | Ebara Corporation | Electron beam device, electron beam inspection method, electron beam inspection device, pattern inspection method and exposure condition determination method |
| JP2006098156A (en) * | 2004-09-29 | 2006-04-13 | Hitachi High-Technologies Corp | Defect inspection method and apparatus |
| US20060163503A1 (en) * | 2005-01-21 | 2006-07-27 | Yuta Urano | Method for inspecting pattern defect and device for realizing the same |
| CN201302555Y (en) * | 2008-10-31 | 2009-09-02 | 东莞康视达自动化科技有限公司 | Full-automatic ultraviolet optical detection system for microscopic surface defects |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9970873B1 (en) | 2014-11-12 | 2018-05-15 | Kla-Tencor Corporation | System and method for luminescent tag based wafer inspection |
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