CN101441081B - Vibration type micro-mechanical gyroscope - Google Patents
Vibration type micro-mechanical gyroscope Download PDFInfo
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- CN101441081B CN101441081B CN2008102391926A CN200810239192A CN101441081B CN 101441081 B CN101441081 B CN 101441081B CN 2008102391926 A CN2008102391926 A CN 2008102391926A CN 200810239192 A CN200810239192 A CN 200810239192A CN 101441081 B CN101441081 B CN 101441081B
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- 238000001514 detection method Methods 0.000 claims abstract description 50
- 239000011521 glass Substances 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000002955 isolation Methods 0.000 claims abstract description 15
- 239000003990 capacitor Substances 0.000 claims description 20
- 239000007787 solid Substances 0.000 claims 1
- 230000008878 coupling Effects 0.000 abstract description 10
- 238000010168 coupling process Methods 0.000 abstract description 10
- 238000005859 coupling reaction Methods 0.000 abstract description 10
- 230000003534 oscillatory effect Effects 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000010923 batch production Methods 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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Abstract
The invention relates to an oscillatory type micro-machinery gyro, which belongs to technical field of inertia sensor in micro-electro-mechanical system. In the micro-machinery gyro, a driving mass block is fixed on a anchor point of a micro-machinery gyro glass substrate. A detection mass block and a isolation mass block are arranged in the driving mass block, the detection mass block is fixed on the anchor point of the micro-machinery gyro glass substrate, and the isolation mass block, the driving mass block and the detection mass block are relatively stationary. a detection capacitance fixation electrode and a detection capacitance movable electrode are arranged in the detection mass block, the detection capacitance fixation electrode is fixed on the micro-machinery gyro glass substrate, and the detection capacitance movable electrode and the detection mass block are relatively stationary. A driving capacitance movable electrode and the driving mass block are relatively stationary, a driving capacitance fixation electrode is fixed on the micro-machinery gyro glass substrate. Advantages of the micro-machinery gyro are: no mechanical coupling problem existence, no detection interference due to the mechanical coupling, machinery gyro sensitivity improvement and batch production.
Description
Technical field
The present invention relates to a kind of vibrating micromechanical gyro, belong to the inertial sensor technical field in the MEMS (micro electro mechanical system), be particularly related to a kind of oscillatory type decoupling micromechanical gyroscope, the motion state that can be widely used in automotive electronics, Aero-Space, weaponry is measured and control.
Background technology
The coriolis force that gyro mainly utilizes Coriolis effect to produce is measured the angular motion parameter in moving object relative inertness space, can be widely used in measurement and control to object moving state in the product for civilian use and defence product field.Traditional gyro is subjected to the restriction of factors such as volume, weight, power consumption and cost, is difficult to apply at civil area.With integrated circuit (IC) technology and precision optical machinery processing technology serves as that micromechanical gyro that the basis makes has that volume is little, in light weight, cost is low, the high outstanding advantage of reliability, thereby can be used for civil applications field widely such as motion state of automobile control system, camera stabilization system, movable machinery control, robot observing and controlling, geodetic surveying, medical apparatus.
The vibrating micromechanical gyro basic structure of acquisition widespread use at present as shown in Figure 1.The fixed electorde 7 of the driving mass 3 of whole micromechanical gyro, the fixed electorde 4 that detects mass 8, driving electric capacity and detection electric capacity etc. is to carry out etching to obtain on same silicon chip.Driving mass 3 is fixed on the anchor point 9 of glass substrate by driving elastic beam 1.Driving the fixed electorde 4 of electric capacity and the fixed electorde 7 of detection electric capacity also is fixed on the glass substrate.The x direction is the transverse drive shaft of micromechanical gyro, and the y direction is vertical sensitive axes.On the fixed electorde 4 that drives electric capacity, apply periodically variable voltage, can make micromechanical gyro drive mass 3 and on driving direction, produce periodically variable static driven power, make to drive mass 3 and detect the vibration that mass 8 produces the x direction.Fail man-hour when the z direction has sensitive angular, because the effect of coriolis force detects mass 8 and produces vibration along the y direction, the size of amplitude and static driven power and z deflection velocity magnitude are linear.Along with the vibration that detects mass 8, detecting the movable electrode of electric capacity and the spacing between the fixed electorde changes immediately, output differential capacitor amount is changed, can realize the detection of the size of Oscillation Amplitude can obtaining the z axis angular rate by post processing electric circuit by the variation that detects the differential capacitor amount.
Above-mentioned vibrating micromechanical gyro exists the mechanical couplings problem between serious driving mode and the detection mode when working, restricting the further raising of micromechanical gyro performance.Micromechanical gyro shown in Figure 1 is when being subjected to x direction electrostatic forcing, driving mass 3 drive detection masses 8 vibrates along the x direction of principal axis simultaneously, the relative area that detects electric capacity movable electrode and fixed electorde is changed, the differential capacitor amount that causes detecting electric capacity also changes thereupon, thereby bring serious disturbance for the detection of y direction vibration signal, reduce the performance of vibrating micromechanical gyro, be difficult for realizing high-precision angular velocity measurement.
Summary of the invention
The objective of the invention is to propose a kind of vibrating micromechanical gyro, with the mechanical couplings that overcomes existing vibrating micromechanical gyro (vibration of driving direction can cause the detection side to vibration) problem, make the driving mode of oscillation independent fully with the detection mode of oscillation, can eliminate the mechanical couplings problem that drives between mode and the detection mode, suppress the parasitic disturbances that the vibration of driving direction brings to detection signal effectively, improve the performance of vibrating micromechanical gyro.
The vibrating micromechanical gyro that the present invention proposes comprises driving mass, detect mass, isolate mass, drive the capacitor fixing electrode, drive the electric capacity movable electrode, detect the capacitor fixing electrode and detecting the electric capacity movable electrode; Described driving mass is fixed on the anchor point of micromechanical gyro glass substrate by driving elastic beam; Described detection mass and isolation mass are positioned at and drive mass, detecting mass is fixed on the anchor point of micromechanical gyro glass substrate by detecting elastic beam, described isolation mass is isolated elastic supporting beams and is driven the mass relative fixed by the y direction, and isolates elastic supporting beams and detect the mass relative fixed by the x direction; Detect the capacitor fixing electrode and be positioned at the detection mass with detection electric capacity movable electrode, the fixed electorde that detects electric capacity is fixed on the micromechanical gyro glass substrate, detects the movable electrode and the detection mass relative fixed of electric capacity; Described driving electric capacity movable electrode and driving mass relative fixed, the fixed electorde that drives electric capacity is fixed on the micromechanical gyro glass substrate.
The vibrating micromechanical gyro that the present invention proposes, its advantage is:
(1) the detection mass on the existing vibrating micromechanical gyro has the degree of freedom of x and y both direction, therefore just has the mechanical couplings problem on structural design.Detection mass of the present invention has only the degree of freedom of a direction of y axle, and with the x direction quadrature that drives mass, therefore do not have the mechanical couplings problem in design.
(2) vibrating micromechanical gyro of the present invention, increased isolation mass block structure with two-freedom, but the mechanical couplings between isolation drive mass and the detection mass, it is independent fully with the motion that detects mode of oscillation to guarantee to drive mode of oscillation, on structural design, eliminate the detection interference that mechanical couplings is brought fully, improved micromechanical gyro sensitivity.
(3) identical with the processing of traditional micromechanical gyro, do not increase technology difficulty and processing cost, be easy to produce in batches.
Description of drawings
Fig. 1 is existing conventional vibrating micromechanical gyro planar structure synoptic diagram.
Fig. 2 is the planar structure synoptic diagram of vibrating micromechanical gyro of the present invention.
Among Fig. 1 and Fig. 2, the 1st, drive elastic beam, the 2nd, detect elastic beam, the 3rd, drive mass, the 4th, drive the capacitor fixing electrode, the 5th, the movable electrode of driving electric capacity, the 6th, the movable electrode of detection electric capacity, the 7th, detect the capacitor fixing electrode, the 8th, detect mass, the 9th, drive the elastic beam anchor point, the 10th, isolate mass, the 11st, detect the elastic beam anchor point, the 12nd, the x direction is isolated elastic supporting beams, and the 13rd, the y direction is isolated elastic supporting beams.
Embodiment
The vibrating micromechanical gyro that the present invention proposes, its plane structure chart comprises driving mass 3, detect mass 8, isolate mass 10, drive capacitor fixing electrode 4, drive electric capacity movable electrode 5, detect capacitor fixing electrode 6 and detecting electric capacity movable electrode 7 as shown in Figure 2.Driving mass 3 is fixed on the anchor point 9 of micromechanical gyro glass substrate by driving elastic beam 1.Detect mass 8 and be positioned at driving mass 3, detect mass 8 and be fixed on the anchor point 11 of micromechanical gyro glass substrate by detecting elastic beam 2 with isolation mass 10.Isolate mass 10 and isolate elastic supporting beams 13 and drive mass 3 relative fixed, and isolate elastic supporting beams 12 and detect mass 2 relative fixed by the x direction by the y direction.Detect capacitor fixing electrode 7 and be positioned at detection mass 8 with detection electric capacity movable electrode 6, the fixed electorde 7 that detects electric capacity is fixed on the micromechanical gyro glass substrate, detects the movable electrode 6 and detection mass 8 relative fixed of electric capacity.Drive electric capacity movable electrode 5 and drive mass 3 relative fixed, the fixed electorde 4 that drives electric capacity is fixed on the micromechanical gyro glass substrate.
Below in conjunction with accompanying drawing, introduce the principle of work of vibrating micromechanical gyro of the present invention in detail:
When structural design, the elastic supporting beams that drives mass is very low along the axial equivalent stiffness of x, and the axial equivalent stiffness of y is very big, can only do the axial motion of x; The elastic supporting beams that detects mass is very low along the axial equivalent stiffness of y, and the axial equivalent stiffness of x is very big, is fixed on glass substrate owing to detect the mass elastic supporting beams, can only do the axial motion of y; It is all very low along the axial equivalent stiffness of x, y to isolate the mass elastic supporting beams, can participate in the motion of x and y both direction.
Isolate mass and vibrate simultaneously when driving mass when the x direction of principal axis vibrate, driving,, so detect mass and do not produce motion because it is very big along the axial equivalent stiffness of x to detect the elastic supporting beams of mass along the x axle.When the angular velocity input is arranged at the z direction of principal axis, isolate mass and be subjected to axial coriolis force effect along y, force and isolate mass drive detection mass along y direction of principal axis up-down vibration, its amplitude is directly proportional with the input angular velocity size.
Micromechanical gyro of the present invention drives mass and only moves in x axle (driving) direction, detecting mass only moves in y axle (driving) direction, have only and isolate the motion that mass participates in x axle and y axle both direction, therefore it is independent fully with the detection mode of oscillation to drive mode of oscillation, has eliminated the motion of driving direction fully the detection side is disturbed to the mechanical couplings of motion.
With reference to Fig. 2, the present invention includes parts such as driving mass 3, isolation mass 10, detection mass 8, driving mass elastic supporting beams 1, detection mass elastic supporting beams 2, x and y direction isolation elastic supporting beams 12,13, driving capacitor fixing electrode 4, driving electric capacity movable electrode 5, detection capacitor fixing electrode 7, detection electric capacity movable electrode 6, except that driving capacitor fixing electrode 4 and detecting the capacitor fixing moving electrode 7, all etched processing of remainder is on same silicon chip.Drive mass elastic supporting beams 1 and detect mass elastic supporting beams 2 and be bonded on respectively on the anchor point 9 and anchor point 11 of glass substrate, the whole silicon wafer plane is unsettled parallel with respect to the glass substrate plane, drives the fixed electorde 4 of electric capacity and the fixed electorde 7 of detection electric capacity and also is fixed on the glass substrate.
Drive mass 3 under the constraint that drives mass elastic supporting beams 1, can only carry out the motion of x direction, detect mass 8 under the constraint that detects mass elastic supporting beams 2, can only carry out the motion of y direction.When driving mass 3 carries out the motion of x direction under the effect of static driven power, drive isolation mass 10 and do identical motion, because the x direction isolation elastic supporting beams 12 of isolating on the mass 10 is very low in the equivalent stiffness of x direction, and it is very big in the equivalent stiffness of x direction to detect mass elastic supporting beams 2, therefore isolate the mass 10 relative masses 8 that detect and make elastic movement, the motion of x direction can't be delivered to and detect on the mass 8, detect mass 8 transfixions.
When the z direction of principal axis has the angular velocity input, isolate mass 10 and be subjected to axial coriolis force effect along y, force and isolate mass 10 along y direction of principal axis up-down vibration, because the x direction isolation elastic supporting beams 12 of isolating on the mass 10 is very big in the equivalent stiffness of y direction, and it is very little in the equivalent stiffness of y direction to detect mass elastic supporting beams 2, therefore isolates mass 10 drive detection masses 8 and makes elastic movement along the y direction.On the other hand, the y direction isolation elastic supporting beams 13 of isolating on the mass 10 is very low in the equivalent stiffness of y direction, and the y direction motion of isolating mass 10 also can't be delivered to and drive on the mass 3.By of the variation of detection fixed electorde 7, can realize the detection of z axis angular rate with the differential capacitor amount of movable electrode 6.
Claims (1)
1. vibrating micromechanical gyro, it is characterized in that, this micromechanical gyro is the asymmetry structure, comprises driving mass, detect mass, isolate mass, drive the capacitor fixing electrode, drive the electric capacity movable electrode, detect the capacitor fixing electrode and detecting the electric capacity movable electrode; Described driving mass and the isolation mass that detects between the mass are the rectangular solid structure, detect mass, detection capacitor fixing electrode and detection electric capacity movable electrode and be placed in the driving mass, isolate mass and detection mass and being placed on side by side in the driving mass; Described driving mass is fixed on the anchor point of micromechanical gyro glass substrate by driving elastic beam; Described detection mass is fixed on the anchor point of micromechanical gyro glass substrate by detecting elastic beam, described isolation mass is isolated elastic supporting beams and is driven the mass relative fixed by the y direction, and isolates elastic supporting beams and detect the mass relative fixed by the x direction; Detect the capacitor fixing electrode and be positioned at the detection mass with detection electric capacity movable electrode, the fixed electorde that detects electric capacity is fixed on the micromechanical gyro glass substrate, detects the movable electrode and the detection mass relative fixed of electric capacity; Described driving electric capacity movable electrode and driving mass relative fixed, the fixed electorde that drives electric capacity is fixed on the micromechanical gyro glass substrate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008102391926A CN101441081B (en) | 2008-12-12 | 2008-12-12 | Vibration type micro-mechanical gyroscope |
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| CN2008102391926A CN101441081B (en) | 2008-12-12 | 2008-12-12 | Vibration type micro-mechanical gyroscope |
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| CN101441081B true CN101441081B (en) | 2011-05-04 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101759136B (en) * | 2009-12-25 | 2011-08-31 | 紫光股份有限公司 | Fully-decoupled vibrating micromechanical gyroscope |
| US8714012B2 (en) * | 2010-02-16 | 2014-05-06 | Stmicroelectronics S.R.L. | Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope |
| US8726717B2 (en) * | 2011-04-27 | 2014-05-20 | Honeywell International Inc. | Adjusting a MEMS gyroscope to reduce thermally varying bias |
| KR101366990B1 (en) * | 2012-12-28 | 2014-02-24 | 삼성전기주식회사 | Angular velocity sensor |
| FR3013441B1 (en) * | 2013-11-20 | 2015-12-18 | Sagem Defense Securite | INERTIAL SENSORY MASS SENSOR, AND METHOD FOR MANUFACTURING SUCH SENSOR |
| FR3013442B1 (en) * | 2013-11-20 | 2015-12-18 | Sagem Defense Securite | SENSOR COMPRISING MOBILE MASSES AND MEANS FOR DETECTING MOVEMENTS RELATING TO MASSES |
| DE102016213870A1 (en) * | 2015-11-20 | 2017-05-24 | Robert Bosch Gmbh | Micromechanical rotation rate sensor and method for its production |
| CN112444239A (en) * | 2019-08-30 | 2021-03-05 | 北京大学 | Geometric compensation type (100) silicon micro-mechanical ring-shaped resonant gyroscope |
| CN111623762B (en) * | 2020-05-25 | 2021-11-12 | 东南大学 | Annular array type four-mass coupling six-axis micro-inertial sensor and processing method thereof |
| CN112097751B (en) * | 2020-09-02 | 2025-04-04 | 美新半导体(天津)有限公司 | A decoupled dual-frame micro gyroscope |
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Application publication date: 20090527 Assignee: TANGSHAN UNIS INTELLIGENT ELECTRONIC CO., LTD. Assignor: Unis Co., Ltd. Contract record no.: 2013990000491 Denomination of invention: Vibration type micro-mechanical gyroscope Granted publication date: 20110504 License type: Exclusive License Record date: 20130815 |
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