CN101439934B - Slurry for printing composite nano diamond thin film on glass substrate and preparation thereof - Google Patents
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- CN101439934B CN101439934B CN2008102338055A CN200810233805A CN101439934B CN 101439934 B CN101439934 B CN 101439934B CN 2008102338055 A CN2008102338055 A CN 2008102338055A CN 200810233805 A CN200810233805 A CN 200810233805A CN 101439934 B CN101439934 B CN 101439934B
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- 239000002113 nanodiamond Substances 0.000 title claims abstract description 84
- 239000002131 composite material Substances 0.000 title claims abstract description 37
- 238000007639 printing Methods 0.000 title claims abstract description 30
- 239000002002 slurry Substances 0.000 title claims abstract description 30
- 239000000758 substrate Substances 0.000 title claims abstract description 27
- 239000011521 glass Substances 0.000 title claims abstract description 26
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 239000010409 thin film Substances 0.000 title claims description 3
- 239000010439 graphite Substances 0.000 claims abstract description 27
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 27
- 239000001856 Ethyl cellulose Substances 0.000 claims abstract description 16
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229920001249 ethyl cellulose Polymers 0.000 claims abstract description 16
- 235000019325 ethyl cellulose Nutrition 0.000 claims abstract description 16
- 239000002904 solvent Substances 0.000 claims abstract description 16
- 239000002994 raw material Substances 0.000 claims abstract description 9
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical group CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 claims description 8
- 238000001132 ultrasonic dispersion Methods 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 238000009827 uniform distribution Methods 0.000 claims description 2
- 239000012467 final product Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 9
- 238000000227 grinding Methods 0.000 abstract description 8
- 238000003756 stirring Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 238000002156 mixing Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 43
- 229910003460 diamond Inorganic materials 0.000 description 23
- 239000010432 diamond Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 23
- 238000007650 screen-printing Methods 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 8
- 229910052739 hydrogen Inorganic materials 0.000 description 8
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 7
- 229940116411 terpineol Drugs 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000007873 sieving Methods 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 238000004537 pulping Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 235000011837 pasties Nutrition 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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Abstract
本发明涉及信息显示领域的技术,尤其是玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料及其制备方法,其特点是,包括下列步骤:a、对原料进行研磨,将纳米石墨、纳米金刚石、和乙基纤维素研磨至粒度为10-100纳米作为原料备用;b、制备纳米金刚石浆料,将原料纳米石墨、纳米金刚石、和乙基纤维素按重量比3-6∶8-16∶6-12比例混合作为溶质,按重量比2-4∶5-10将溶质加入溶剂中,超声分散7-9小时,然后在300-373K下加热搅拌,过350-450目筛后,自然冷却至室温即可。本发明中玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料,其具有较低的成本并且适用于玻璃衬底大面积均匀制备复合纳米金刚石薄膜。The present invention relates to the technology in the field of information display, especially the slurry used for printing composite nano-diamond films on glass substrates and its preparation method, which is characterized in that it comprises the following steps: a. Grinding the raw materials, mixing nano-graphite and nano-diamond , and ethyl cellulose are ground to a particle size of 10-100 nanometers as raw materials for subsequent use; b, preparing nano-diamond slurry, raw material nano-graphite, nano-diamond, and ethyl cellulose in a weight ratio of 3-6: 8-16: Mix 6-12 ratio as solute, add solute into solvent according to weight ratio 2-4:5-10, ultrasonically disperse for 7-9 hours, then heat and stir at 300-373K, pass through 350-450 mesh sieve, and cool naturally to room temperature. The slurry used for printing the composite nano-diamond film on the glass substrate in the present invention has lower cost and is suitable for large-area and uniform preparation of the composite nano-diamond film on the glass substrate.
Description
技术领域 technical field
本发明涉及信息显示领域的技术,尤其是玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料及其制备方法,该玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料可用于制备复合纳米金刚石薄膜,用于制作极地考察、航空航天等的显示器阴极。The invention relates to the technology in the field of information display, especially the paste used for printing composite nano-diamond film on glass substrate and its preparation method. The paste used for printing composite nano-diamond film on the glass substrate can be used to prepare composite nano-diamond film , used to make display cathodes for polar expeditions, aerospace, etc.
背景技术 Background technique
金刚石晶体具有自然界已有物质中最高的硬度、它的莫氏硬度为10。金刚石的熔点为4000℃;它还具有很高的热导率,天然II类金刚石室温下的导热率为26W/(CM·K),是铜的5倍。天然I类金刚石室温下的导热率为9W/(CM·K),人造优质单晶金刚石室温下的导热率为18~20W/(CM·K),一般有缺陷的人造单晶金刚石室温下的导热率为4.5~6.5W/(CM·K),而一般的人造多晶金刚石室温下的导热率为4~10W/(CM·K)。极好的热导率使其成为需要快速热扩散的微波电子源的首选材料。Diamond crystals have the highest hardness among substances existing in nature, and its Mohs hardness is 10. The melting point of diamond is 4000°C; it also has high thermal conductivity. The thermal conductivity of natural type II diamond at room temperature is 26W/(CM·K), which is 5 times that of copper. The thermal conductivity of natural I-type diamond at room temperature is 9W/(CM·K), and the thermal conductivity of artificial high-quality single crystal diamond is 18-20W/(CM·K) at room temperature. The thermal conductivity is 4.5-6.5W/(CM·K), while the thermal conductivity of general artificial polycrystalline diamond is 4-10W/(CM·K) at room temperature. Excellent thermal conductivity makes it the material of choice for microwave electron sources requiring fast thermal diffusion.
金刚石禁带宽度数值为5.3~5.5eV,介电常数εr为5.58±0.03,天然金刚石的电阻率为1010Ω·CM,天然II类金刚石室温下的电阻率为1~108Ω·CM,其硼的受主能级位于价带之上约0.37eV,具有很高的饱和载流子速度。金刚石的击穿场强高达100×105V/cm。金刚石具有很好的化学稳定性,耐酸耐腐蚀。即使在高温下各种酸对金刚石几乎不起作用,空气中较大尺寸的金刚石晶体在600~700℃以下和金刚石微粉晶体在450~500℃以下均是很稳定的。虽然金刚石的功函数高达5.8eV,但是金刚石具有负的电子亲和势。尤其纳米金刚石晶体内部为SP3键,使其具有很高的机械强度和化学稳定性决定了其良好的绝缘性、稳定性及高硬度;纳米金刚石晶粒越小,表层的SP2键越多,其场发射性能越好。因而纳米金刚石薄膜作为电子源成为国际上电子发射研究领域的热点。The value of the bandgap width of diamond is 5.3-5.5eV, the dielectric constant εr is 5.58±0.03, the resistivity of natural diamond is 1010Ω·CM, and the resistivity of natural II diamond at room temperature is 1-108Ω·CM. The main energy level is located about 0.37eV above the valence band with a high saturation carrier velocity. The breakdown field strength of diamond is as high as 100×105V/cm. Diamond has good chemical stability, acid and corrosion resistance. Even though various acids have little effect on diamond at high temperature, larger diamond crystals in the air are stable below 600-700°C and diamond micropowder crystals are below 450-500°C. Although the work function of diamond is as high as 5.8eV, diamond has a negative electron affinity. In particular, there are SP 3 bonds inside the nano-diamond crystal, which makes it have high mechanical strength and chemical stability, which determines its good insulation, stability and high hardness; the smaller the nano-diamond crystal grain, the more SP 2 bonds on the surface , the better its field emission performance. Therefore, the use of nano-diamond film as an electron source has become a hot spot in the field of electron emission research in the world.
目前国际国内制备纳米金刚石薄膜的方法,较之早期高温高压的爆炸法清洁可靠,并可沉积高质量的薄膜,目前制备金刚石薄膜的主流工艺方法,有化学气相沉积(MOCVD),热丝法MPCVD法,射频放电法,等离子体炬法等。国内外研究人员对在采取何种气源气氛来沉积高质量纳米金刚石薄膜也进行了广泛的探索和研究,目前常见于文献资料的气源气氛有CH4/H2CH4/Ar、CH4/N2等。At present, the methods for preparing nano-diamond films at home and abroad are cleaner and more reliable than the early high-temperature and high-pressure explosion method, and can deposit high-quality films. At present, the mainstream methods for preparing diamond films include chemical vapor deposition (MOCVD) and hot wire MPCVD. method, radio frequency discharge method, plasma torch method, etc. Researchers at home and abroad have also conducted extensive exploration and research on what kind of gas source atmosphere is used to deposit high- quality nano-diamond films. N 2 etc.
金刚石薄膜的制备方法虽然有很多种,但是这些生长方法都不能得到大面积均匀的场发射性能很好金刚石薄膜,而玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料更是薄膜制备的关键技术。Although there are many methods for preparing diamond films, none of these growth methods can produce large-area uniform diamond films with good field emission performance, and the slurry used for printing composite nano-diamond films on glass substrates is the key technology for film preparation. .
发明内容 Contents of the invention
本发明的目的之一是提供一种玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料,其具有较低的成本并且适用玻璃衬底上大面积均匀制备金刚石薄膜;One of the purposes of the present invention is to provide a slurry for printing a composite nano-diamond film on a glass substrate, which has lower cost and is suitable for preparing a large-area uniform diamond film on a glass substrate;
本发明的另一个目的是提供一种上述玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料的制备方法。Another object of the present invention is to provide a method for preparing the slurry used for printing the composite nano-diamond film on the above-mentioned glass substrate.
为实现上述目的,本发明采用的技术方案是:In order to achieve the above object, the technical scheme adopted in the present invention is:
一种玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料,其特别之处在于,以重量份计组成为:A slurry used for printing a composite nano-diamond film on a glass substrate is characterized in that it consists of:
溶质 2-4份Solute 2-4 parts
溶剂 5-10份Solvent 5-10 parts
其中溶质以重量份计组成为Wherein the solute is composed in parts by weight
纳米石墨 3-6份Nano graphite 3-6 parts
纳米金刚石 8-16份Nano diamond 8-16 parts
乙基纤维素 6-12份。Ethyl cellulose 6-12 parts.
其中溶剂是松油醇。Wherein the solvent is terpineol.
一种玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料的制备方法,其特别之处在于,包括下列步骤:A method for preparing the slurry used for printing a composite nano-diamond film on a glass substrate, which is particularly characterized in that it comprises the following steps:
a、对原料进行研磨a. Grinding raw materials
将纳米石墨、纳米金刚石、和乙基纤维素研磨至粒度为10-100纳米作为原料备用;Grinding nano-graphite, nano-diamond, and ethyl cellulose to a particle size of 10-100 nanometers as raw materials for subsequent use;
b、制备纳米金刚石浆料b, preparation of nano-diamond slurry
将原料纳米石墨、纳米金刚石、和乙基纤维素按重量比3-6∶8-16∶6-12比例混合作为溶质,按重量比2-4∶5-10将溶质加入溶剂中,超声分散7-9小时或至溶质在溶剂中充分分散,然后在300-373K下加热搅拌,过350-450目筛后,使纳米金刚石和纳米石墨均匀分布,自然冷却至室温即可。Mix the raw materials nano-graphite, nano-diamond, and ethyl cellulose in a weight ratio of 3-6:8-16:6-12 as a solute, and add the solute into a solvent at a weight ratio of 2-4:5-10, and ultrasonically disperse 7-9 hours or until the solute is fully dispersed in the solvent, then heat and stir at 300-373K, pass through a 350-450 mesh sieve to evenly distribute nano-diamonds and nano-graphite, and cool naturally to room temperature.
其中步骤b中溶剂是松油醇。Wherein the solvent is terpineol in the step b.
本发明中玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料,其具有较低的成本并且适用于玻璃衬底大面积均匀制备复合纳米金刚石薄膜。利用本发明,引入纳米石墨作为导电晶界制备的复合纳米金刚石薄膜,提高了电子发射特性和电子发射效率高的特点。金刚石具有很好的化学稳定性,耐酸耐腐蚀。用丝网印刷复合纳米金刚石薄膜制备的显示器阴极,可用于制作极地考察、航空航天等的显示器。本发明用纳米金刚石作为发射体,纳米石墨作为导电媒质,用低成本的丝网印刷方法在玻璃衬底上制备大面积均匀的复合纳米金刚石薄膜,能够制备出了场发射性能很好并能用于恶劣环境的显示器阴极。The slurry used for printing the composite nano-diamond film on the glass substrate in the present invention has lower cost and is suitable for large-area and uniform preparation of the composite nano-diamond film on the glass substrate. Utilizing the present invention, the composite nano-diamond thin film prepared by introducing nano-graphite as the conductive grain boundary improves the characteristic of electron emission and high electron emission efficiency. Diamond has good chemical stability, acid and corrosion resistance. The display cathode prepared by screen-printing composite nano-diamond film can be used to make displays for polar expeditions, aerospace and the like. The present invention uses nano-diamond as the emitter, nano-graphite as the conductive medium, and prepares a large-area and uniform composite nano-diamond film on a glass substrate with a low-cost screen printing method, which can prepare a field emission performance that is very good and can be used. Display cathodes in harsh environments.
具体实施方式 Detailed ways
丝网印刷制备复合纳米金刚石薄膜的方法如下:The method for preparing composite nano-diamond film by screen printing is as follows:
一、制备玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料1. Preparation of slurry for printing composite nano-diamond film on glass substrate
玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料配制工艺流程:纳米金刚石、纳米石墨、乙基纤维素的称量→研磨→加入溶剂中长时间超声分散→过筛→加热搅拌→过筛→冷却至室温。Slurry preparation process for printing composite nano-diamond film on glass substrate: Weighing of nano-diamond, nano-graphite, and ethyl cellulose → grinding → adding to solvent for long-term ultrasonic dispersion → sieving → heating and stirring → sieving → Cool to room temperature.
由于纳米金刚石颗粒很容易团聚在一起,形成带有若干弱连接界面的尺寸较大的团聚体,这给纳米颗粒在金属衬底表面的均匀分布带来了很大的困难,从而影响电子发射的均匀性,所以在浆料制备前分别将纳米金刚石和纳米石墨进行研磨,使其团聚体散开粒度变小。乙基纤维素最好也进行研磨。Since nano-diamond particles are easy to agglomerate together to form larger aggregates with several weakly connected interfaces, this brings great difficulties to the uniform distribution of nanoparticles on the surface of the metal substrate, thus affecting the electron emission. Uniformity, so the nano-diamond and nano-graphite are ground separately before the preparation of the slurry to make the agglomerates disperse and the particle size becomes smaller. Ethylcellulose is also preferably ground.
加热过程中超声分散的时间一般为6-9小时,待纳米金刚石、纳米石墨、乙基纤维素在溶剂松油醇中充分分散即可。纳米颗粒容易团聚,制备复合金刚石浆料,其分散分三步进行。第一步纳米金刚石、纳米石墨、乙基纤维素按3∶8∶6称量后混合进行研磨并搅匀;第二步是加入溶剂后加热至373K超声波分散7-9小时,使团聚在一起的复合纳米金刚石得到分拆。第三步是用高目数的筛网(400目以上)进一步对糊状物进行过滤,借助机械外力以除去其中的大颗粒,并确保未得到良好分散的复合纳米金刚石团聚物的尺寸在机械外力作用下处于一个合适的尺度上,使复合纳米金刚石均匀分布。冷却至室温时分散稀糊状浆料变成粘稠的。The time for ultrasonic dispersion during the heating process is generally 6-9 hours, until the nano-diamond, nano-graphite, and ethyl cellulose are fully dispersed in the solvent terpineol. Nanoparticles are easy to agglomerate, and the composite diamond slurry is prepared, and its dispersion is carried out in three steps. The first step is to weigh nano-diamond, nano-graphite, and ethyl cellulose according to 3:8:6, mix and grind and stir evenly; the second step is to add solvent, heat to 373K and ultrasonically disperse for 7-9 hours to make them agglomerate together The composite nanodiamonds were disassembled. The third step is to further filter the paste with a high-mesh sieve (more than 400 mesh), by means of mechanical external force to remove large particles therein, and to ensure that the size of the composite nano-diamond aggregates that have not been well dispersed is mechanically adjusted. Under the action of external force, it is on a suitable scale, so that the composite nano-diamond is evenly distributed. The dispersed thin pasty slurry became viscous on cooling to room temperature.
二、丝网印刷制备复合纳米金刚石薄膜2. Preparation of composite nanodiamond films by screen printing
玻璃衬底上四网印刷复合纳米金刚石薄膜所用的网有金属丝网和涤纶丝网,可根据实际印刷的需要确定丝网的质地和丝网目数。合适的丝网目数为300-400目,印刷线条越精细,所需要的目数越高。印刷设备为自动或手动的丝网印刷机。The nets used for four-screen printing of composite nano-diamond films on glass substrates include metal screens and polyester screens, and the texture and mesh number of the screens can be determined according to the needs of actual printing. The suitable screen mesh number is 300-400 mesh, the finer the printing lines, the higher the mesh number required. The printing equipment is an automatic or manual screen printing machine.
需要印刷特定图形时,要先制备印刷用的丝网版。制版工艺流程为:绘制原稿→制作阳图片→选择网框→绷网→粘网→网版前处理(清洗)→涂感光胶→烘干→晒版→显影→修版→二次曝光→干燥→印刷。When it is necessary to print specific graphics, the screen plate for printing must be prepared first. The plate-making process is: drawing the original → making positive pictures → selecting the screen frame → stretching the screen → sticking the screen → screen pre-treatment (cleaning) → applying photosensitive glue → drying → printing → developing → revision → secondary exposure → drying → Printing.
进行印刷时,手动印刷机和自动印刷机的操作方式略有不同,但其原理相同,都是用刮板(自动印刷机中称为印刷器)挤压玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料,使之通过丝网版漏印到丝网下面的承印物表面(导电玻璃衬底)。在导电玻璃衬底上利用上述丝网印刷方法,将上述玻璃衬底上印刷复合纳米金刚石薄膜使用的浆料印刷在导电玻璃衬底上作为显示器电子发射阴极。When printing, the manual printing machine and the automatic printing machine operate in slightly different ways, but the principle is the same. They are all used to print composite nano-diamond films on the glass substrate with a scraper (called a printer in an automatic printing machine). The paste is passed through the screen plate and printed onto the surface of the substrate (conductive glass substrate) under the screen. Using the screen printing method above on the conductive glass substrate, the slurry used for printing the composite nano-diamond film on the above glass substrate is printed on the conductive glass substrate as the electron emission cathode of the display.
三、印刷后的热烧结处理3. Thermal sintering treatment after printing
由于未经热烧结处理的印刷复合纳米金刚石薄膜中制浆材料包围在纳米金刚石发射体上,所以必须对其进行热烧结处理。Since the slurry material surrounds the nanodiamond emitter in the printed composite nanodiamond film without heat sintering, it must be heat sintered.
热烧结有两个目的:一方面使薄膜干燥并牢固地粘结在导电玻璃衬底上,另一方面使薄膜中所含制浆材料分解蒸发掉。如果制浆材料(乙基纤维素)不能充分地将其分解蒸发掉,这些材料在印刷层干燥后会紧密地包裹在纳米金刚石发射体上,使之无法发射电子,因此必须在后面的热处理过程中加以去除。使纳米金刚石发射体露出薄膜表面,才有利于电子场发射。Thermal sintering has two purposes: on the one hand, the film is dried and firmly bonded to the conductive glass substrate, and on the other hand, the pulping material contained in the film is decomposed and evaporated. If the pulping material (ethyl cellulose) cannot be fully decomposed and evaporated, these materials will be tightly wrapped on the nano-diamond emitter after the printing layer is dried, making it unable to emit electrons, so it must be processed in the subsequent heat treatment process. be removed from. Only when the nano-diamond emitter is exposed on the surface of the film is it conducive to electron field emission.
热烧结曲线包括3个升温阶段、3个恒温阶段和1个降温阶段。第一段的恒温主要是烘干纳米金刚石薄膜,第二段的恒温主要是通过浆料本身的表面张力的作用而使纳米金刚石印刷层表面更加均匀和平整,是一个自修饰过程。并使印刷层充分干燥。第三段的恒温过程是为了使干燥后的制浆材料在高温下分解挥发。最后是自然降温过程。The thermal sintering curve includes 3 heating stages, 3 constant temperature stages and 1 cooling stage. The constant temperature in the first stage is mainly to dry the nano-diamond film, and the constant temperature in the second stage is mainly to make the surface of the nano-diamond printing layer more uniform and smooth through the effect of the surface tension of the slurry itself, which is a self-modification process. And make the printing layer fully dry. The constant temperature process in the third stage is to decompose and volatilize the dried pulping material at high temperature. The last is the natural cooling process.
四、热烧结后的氢等离子体处理4. Hydrogen plasma treatment after thermal sintering
将丝网印刷的复合纳米金刚石薄膜阴极样品热烧结后的氢等离子体处理,等离子发生器产生高压高频能量在喷嘴钢管中被激活和被控制的辉光放电中产生了低温氢等离子体,借助压缩空气将氢等离子体喷向纳米金刚石薄膜表面,当氢等离子体与表面相遇时,产生了化学作用和物理变化,其表面分子链结构得到了改变,SP2键变多,使电子的遂穿和发射变得容易;并使复合纳米金刚石薄膜表面的金刚石尖端分布均匀,提高电子场发射的稳定性。After the screen-printed composite nano-diamond film cathode sample is thermally sintered for hydrogen plasma treatment, the plasma generator generates high-voltage and high-frequency energy, which is activated and controlled in the nozzle steel pipe to generate low-temperature hydrogen plasma. Compressed air sprays hydrogen plasma onto the surface of the nano-diamond film. When the hydrogen plasma meets the surface, chemical effects and physical changes occur, the molecular chain structure of the surface is changed, and the number of SP 2 bonds increases, allowing the tunneling of electrons. And the emission becomes easy; and the diamond tips on the surface of the composite nano-diamond film are evenly distributed, and the stability of the electron field emission is improved.
实施例1Example 1
一种丝网印刷制备复合纳米金刚石薄膜的方法,包括下列步骤:A method for preparing a composite nano-diamond film by screen printing, comprising the following steps:
a、纳米金刚石和纳米石墨的研磨:在浆料制备前分别将取纳米石墨30克、纳米金刚石80克、乙基纤维素60克用研体进行研磨至粒度为100纳米,充分混合作为溶质;a. Grinding of nano-diamond and nano-graphite: before slurry preparation, 30 grams of nano-graphite, 80 grams of nano-diamond and 60 grams of ethyl cellulose are ground to a particle size of 100 nanometers, fully mixed as a solute;
b、制备纳米金刚石浆料:将混合好的溶质,按1∶5质量比例将溶质加入松油醇中,超声分散8小时至溶质在溶剂中充分分散,然后在373K下加热搅拌,过400目筛后,使纳米金刚石和纳米石墨均匀分布,自然冷却至室温待用;b. Preparation of nano-diamond slurry: add the mixed solute to terpineol in a mass ratio of 1:5, ultrasonically disperse for 8 hours until the solute is fully dispersed in the solvent, then heat and stir at 373K, pass through 400 mesh After sieving, the nano-diamond and nano-graphite are evenly distributed, and naturally cooled to room temperature for use;
c、丝网印刷制备复合纳米金刚石薄膜:选择目数为350目的金属丝网或涤纶丝网,用上一步骤得到的纳米金刚石浆料通过丝网印刷机进行丝网印刷在玻璃板上;C, screen printing prepares composite nano-diamond film: select mesh number to be 350 object wire mesh or polyester screen, carry out screen printing on glass plate by screen printing machine with the nano-diamond slurry that last step obtains;
d、印刷后的热烧结处理:升温至T1K后保持20分钟,然后再升温至T2K后保持130分钟,然后再升温至T3K后保持80分钟,自然冷却至室温待用。d. Thermal sintering after printing: raise the temperature to T 1 K and keep it for 20 minutes, then raise the temperature to T 2 K and keep it for 130 minutes, then raise the temperature to T 3 K and keep it for 80 minutes, then cool it down to room temperature for use.
e、氢等离子体处理:通过等离子发生器产生低温氢等离子体,借助压缩空气以0.70W/cm2将氢等离子体喷向上一步骤得到的纳米金刚石薄膜表面,时间保持1.5分钟,使纳米金刚石发射尖均匀分布在薄膜表面上。e. Hydrogen plasma treatment: Generating low-temperature hydrogen plasma through a plasma generator, spraying hydrogen plasma on the surface of the nano-diamond film obtained in the previous step with the help of compressed air at 0.70W/ cm2 , and keeping the time for 1.5 minutes to make the nano-diamond emit The tips are evenly distributed on the surface of the film.
实施例2Example 2
一种丝网印刷制备复合纳米金刚石薄膜的方法,包括下列步骤:A method for preparing a composite nano-diamond film by screen printing, comprising the following steps:
a、纳米金刚石和纳米石墨的研磨:在浆料制备前分别将取纳米石墨60克、纳米金刚石160克、乙基纤维素120克用研体进行研磨至粒度为100纳米,充分混合作为溶质;a. Grinding of nano-diamond and nano-graphite: Before slurry preparation, 60 grams of nano-graphite, 160 grams of nano-diamond, and 120 grams of ethyl cellulose are ground to a particle size of 100 nanometers, and fully mixed as a solute;
b、制备纳米金刚石浆料:将混合好的溶质,按2∶10质量比例将溶质加入松油醇中,超声分散8小时至溶质在溶剂中充分分散,然后在343K下加热搅拌,过400目筛后,使纳米金刚石和纳米石墨均匀分布,自然冷却至室温待用。b. Preparation of nano-diamond slurry: add the mixed solute to terpineol in a mass ratio of 2:10, ultrasonically disperse for 8 hours until the solute is fully dispersed in the solvent, then heat and stir at 343K, pass through 400 mesh After sieving, the nano-diamond and nano-graphite are evenly distributed, and naturally cooled to room temperature for use.
其余部分与实施例1相同。All the other parts are identical with embodiment 1.
实施例3Example 3
一种丝网印刷制备复合纳米金刚石薄膜的方法,包括下列步骤:A method for preparing a composite nano-diamond film by screen printing, comprising the following steps:
a、纳米金刚石和纳米石墨的研磨:在浆料制备前分别将取纳米石墨15克、纳米金刚石40克、乙基纤维素30克用研体进行研磨至粒度为100纳米,充分混合作为溶质;a. Grinding of nano-diamond and nano-graphite: before slurry preparation, 15 grams of nano-graphite, 40 grams of nano-diamond, and 30 grams of ethyl cellulose are ground to a particle size of 100 nanometers, fully mixed as a solute;
b、制备纳米金刚石浆料:将混合好的溶质,按1∶5质量比例将溶质加入松油醇中,超声分散9小时至溶质在溶剂中充分分散,然后在333K下加热搅拌,过350目筛后,使纳米金刚石和纳米石墨均匀分布,自然冷却至室温待用。b. Preparation of nano-diamond slurry: add the mixed solute to terpineol in a mass ratio of 1:5, ultrasonically disperse for 9 hours until the solute is fully dispersed in the solvent, then heat and stir at 333K, pass through 350 mesh After sieving, the nano-diamond and nano-graphite are evenly distributed, and naturally cooled to room temperature for use.
其余部分与实施例1相同。All the other parts are identical with embodiment 1.
实施例4Example 4
一种丝网印刷制备复合纳米金刚石薄膜的方法,包括下列步骤:A method for preparing a composite nano-diamond film by screen printing, comprising the following steps:
a、纳米金刚石和纳米石墨的研磨:在浆料制备前分别将取纳米石墨15克、纳米金刚石60克、乙基纤维素30克用研体进行研磨至粒度为60纳米,充分混合作为溶质;a. Grinding of nano-diamond and nano-graphite: before slurry preparation, 15 grams of nano-graphite, 60 grams of nano-diamond, and 30 grams of ethyl cellulose are ground to a particle size of 60 nanometers, fully mixed as a solute;
b、制备纳米金刚石浆料:将混合好的溶质,按1∶2.5质量比例将溶质加入松油醇中,超声分散7小时至溶质在溶剂中充分分散,然后在300K下加热搅拌,过450目筛后,使纳米金刚石和纳米石墨均匀分布,自然冷却至室温待用。b. Preparation of nano-diamond slurry: add the mixed solute to terpineol in a mass ratio of 1:2.5, ultrasonically disperse for 7 hours until the solute is fully dispersed in the solvent, then heat and stir at 300K, pass through 450 mesh After sieving, the nano-diamond and nano-graphite are evenly distributed, and naturally cooled to room temperature for use.
其余部分与实施例1相同。All the other parts are identical with embodiment 1.
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