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CN101408409A - High precision digital type linear displacement transducer - Google Patents

High precision digital type linear displacement transducer Download PDF

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CN101408409A
CN101408409A CNA2008102363288A CN200810236328A CN101408409A CN 101408409 A CN101408409 A CN 101408409A CN A2008102363288 A CNA2008102363288 A CN A2008102363288A CN 200810236328 A CN200810236328 A CN 200810236328A CN 101408409 A CN101408409 A CN 101408409A
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linear displacement
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华亮
冯浩
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Nantong University
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Abstract

本发明公开了一种高精度数字式直线位移传感器,包括电机驱动的光栅盘,光栅盘上设有一条透光刻线,光栅盘上方设置直线轨道,直线轨道两端分别固装一个反射式红外光电传感器,另有一个反射式红外传感器与直线轨道上的移动物体连接,光栅盘面向反射式红外传感器的一面为光亮面。本发明具有测量范围大、结构简单、安装方便、成本低、测量精度和分辨率高、无须调零、通过软件直接判向等优点。

Figure 200810236328

The invention discloses a high-precision digital linear displacement sensor, which comprises a motor-driven grating disc, a light-transmitting scribe line is arranged on the grating disc, a linear track is arranged above the grating disc, and a reflective infrared sensor is respectively fixed at both ends of the linear track. A photoelectric sensor, another reflective infrared sensor is connected with the moving object on the linear track, and the side of the grating disc facing the reflective infrared sensor is a bright surface. The invention has the advantages of large measurement range, simple structure, convenient installation, low cost, high measurement accuracy and resolution, no need for zero adjustment, and direct direction judgment through software.

Figure 200810236328

Description

高精度数字式直线位移传感器 High precision digital linear displacement sensor

技术领域: Technical field:

本发明涉及一种直线位移传感器,具体地说,是涉及一种具有很高精度的数字式直线位移传感器。The invention relates to a linear displacement sensor, in particular to a digital linear displacement sensor with high precision.

背景技术: Background technique:

在工业生产中,尤其在航空航天、自动军械装备等领域要求直线位移检测具有更高的精度和分辨率,这就对直线位移传感器的要求大大增强。当前用于直线位移测量的传感器种类很多,但现有的传感器在实际应用中或多或少都存在着一些问题,有的设备复杂、成本高,有的对环境要求高,有的精度低、线性范围小,有的结构复杂、工艺要求高。如电容式传感器结构简单、动态响应快,但容易受寄生电容和外界干扰。电感式传感器结构简单、输出功率大,输出阻抗小,抗干扰能力强,但它动态响应慢,易受磁场干扰。磁栅传感器安装使用方便,成本低,单精度不高,使用时需屏蔽,抗干扰能力差。光栅尺测量精度高,可控性好,被普遍采用。如德国HEIDENHAIN、日本MITUTOYO等公司生产的直线位移光栅尺精度和分辨率很高。但光栅尺对使用环境要求高,要求光栅运行平稳、无突变和相对低速,且不能受工业现场粉尘、油污和水气污染。国产的光栅传感器份量重、精度低、性能不稳定,而进口的高精度光栅尺价格昂贵。此外光纤直线位移传感器及激光传感器均存在成本高的问题。In industrial production, especially in aerospace, automatic ordnance equipment and other fields, linear displacement detection is required to have higher accuracy and resolution, which greatly enhances the requirements for linear displacement sensors. There are many types of sensors currently used for linear displacement measurement, but the existing sensors have more or less problems in practical applications, some of which are complex and costly, some have high environmental requirements, and some have low precision. The linear range is small, and some have complex structures and high process requirements. For example, capacitive sensors have simple structure and fast dynamic response, but they are easily affected by parasitic capacitance and external interference. The inductive sensor has simple structure, large output power, small output impedance and strong anti-interference ability, but it has slow dynamic response and is easily disturbed by magnetic field. The magnetic grid sensor is easy to install and use, low in cost, low in single precision, needs to be shielded when used, and has poor anti-interference ability. The grating ruler has high measurement accuracy and good controllability, and is widely used. Such as Germany HEIDENHAIN, Japan MITUTOYO and other companies produce linear displacement grating scale accuracy and resolution is very high. However, the grating ruler has high requirements on the use environment, requiring the grating to run smoothly, without sudden changes and relatively low speed, and not to be polluted by dust, oil and water vapor on the industrial site. Domestic grating sensors are heavy, have low precision, and unstable performance, while imported high-precision grating scales are expensive. In addition, both the optical fiber linear displacement sensor and the laser sensor have the problem of high cost.

发明内容: Invention content:

本发明提供一种结构简单、安装方便、成本低、测量精度和分辨率高的高精度数字式直线位移传感器。The invention provides a high-precision digital linear displacement sensor with simple structure, convenient installation, low cost, high measurement accuracy and resolution.

本发明解决其技术问题所采用的技术方案是:The technical solution adopted by the present invention to solve its technical problems is:

一种高精度数字式直线位移传感器,其特征是:包括电机驱动的光栅盘,光栅盘上设有一条透光刻线,光栅盘上方设置直线轨道,直线轨道两端分别固装一个反射式红外光电传感器,另有一个反射式红外传感器与直线轨道上的移动物体连接,光栅盘面向反射式红外传感器的一面为光亮面。A high-precision digital linear displacement sensor is characterized in that it includes a motor-driven grating disc, a light-transmitting scribe line is arranged on the grating disc, a linear track is arranged above the grating disc, and a reflective infrared sensor is fixed at both ends of the linear track. A photoelectric sensor, another reflective infrared sensor is connected with the moving object on the linear track, and the side of the grating disc facing the reflective infrared sensor is a bright surface.

本发明所述的高精度数字式直线位移传感器的有益效果主要表现在:The beneficial effects of the high-precision digital linear displacement sensor of the present invention are mainly manifested in:

1.结构简单,光栅盘制作简单,只须开一条透光刻线,线宽不需要很窄,只要能够使所采用的反射式光电传感器工作就可以。安装方便,实现数字化非接触式检测。1. The structure is simple, and the grating disk is easy to manufacture. It only needs to open a light-transmitting scribe line, and the line width does not need to be very narrow, as long as the reflective photoelectric sensor used can work. Easy to install and realize digital non-contact detection.

2.成本低,测量范围大。2. Low cost and large measurement range.

3.精度和分辨率高,在保持电机转速稳定的前提下,采用高频脉冲填充法,可获得很高的精度。3. High precision and resolution. Under the premise of keeping the motor speed stable, high-frequency pulse filling method can be used to obtain high precision.

4.测量前无须调零,无须判向电路,可通过软件直接判向,方便了检测过程。4. There is no need for zero adjustment before measurement, and no direction judgment circuit, and the direction can be directly judged by software, which facilitates the detection process.

附图说明: Description of drawings:

下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.

图1是本发明所述的高精度数字式直线位移传感器结构图;Fig. 1 is a structural diagram of a high-precision digital linear displacement sensor of the present invention;

图2是本发明所述的直线位移传感器测量原理俯视简图1;Fig. 2 is a schematic top view 1 of the measurement principle of the linear displacement sensor of the present invention;

图3是本发明所述的直线位移传感器测量原理时序图1;Fig. 3 is the timing diagram 1 of the measurement principle of the linear displacement sensor according to the present invention;

图4是本发明所述的直线位移传感器测量原理俯视简图2;Fig. 4 is a schematic top view 2 of the measuring principle of the linear displacement sensor according to the present invention;

图5是本发明所述的直线位移传感器测量原理俯视简图3;Fig. 5 is a top view schematic diagram 3 of the measuring principle of the linear displacement sensor according to the present invention;

图6是本发明所述的直线位移传感器测量原理时序图2。Fig. 6 is the timing diagram 2 of the measuring principle of the linear displacement sensor according to the present invention.

图7是本发明所述的直线位移传感器测量原理俯视简图4;Fig. 7 is a schematic top view 4 of the measurement principle of the linear displacement sensor according to the present invention;

图8是本发明所述的传感器接口电路结构框图;Fig. 8 is a structural block diagram of the sensor interface circuit of the present invention;

图9是本发明所述的传感器接口电路采用74HC4040作为计数器时的高频脉冲计数电路原理图。Fig. 9 is a schematic diagram of a high-frequency pulse counting circuit when the sensor interface circuit of the present invention uses 74HC4040 as a counter.

具体实施方式: Detailed ways:

一种高精度数字式直线位移传感器,包括电机6驱动的光栅盘5,光栅盘上设有一条透光刻线7,光栅盘上方设置直线轨道4,直线轨道两端分别固装一个反射式红外光电传感器1、2(静传感器),另有一个反射式红外传感器3(动传感器)与直线轨道上的移动物体连接,光栅盘面向反射式红外传感器的一面为光亮面。A high-precision digital linear displacement sensor, including a grating disk 5 driven by a motor 6, a light-transmitting scribe line 7 is arranged on the grating disk, a linear track 4 is arranged above the grating disk, and a reflective infrared sensor is fixed at both ends of the linear track. Photoelectric sensors 1 and 2 (static sensors), and another reflective infrared sensor 3 (moving sensor) are connected with the moving object on the linear track, and the side of the grating disk facing the reflective infrared sensor is a bright surface.

使用的圆光栅只开有一条透光刻线,光栅盘采用反射性能较好的亚光铝等材料制作,其面向反射式光电传感器的一面为光亮面。当透光刻线经过反射式光电传感器时,传感器输出一低电平脉冲。当刻线不经过反射式光电传感器时,传感器的红外发射管发出的光经光栅盘面反射,接收端输出高电平。4为物体直线运行轨道(轨迹),被测物体沿轨道(轨迹)直线运行,反射式光电传感器1、2固定在轨道两端,反射式光电传感器3跟随被测物体运动。为了分析方便,以下将反式光电传感器1、2简称为“静传感器”(其中光电传感器1称为工作静传感器、光电传感器2称为辅助静传感器),反射式光电传感器3简称为“动传感器”,微型同步电机的转速简称为“同步转速”。The circular grating used has only one light-transmitting engraved line, and the grating disk is made of materials such as matt aluminum with good reflective performance, and the side facing the reflective photoelectric sensor is a bright surface. When the light-transmitting line passes the reflective photoelectric sensor, the sensor outputs a low-level pulse. When the engraved line does not pass through the reflective photoelectric sensor, the light emitted by the infrared emitting tube of the sensor is reflected by the grating disk, and the receiving end outputs a high level. 4 is the straight track (track) of the object, the measured object runs straight along the track (track), the reflective photoelectric sensors 1 and 2 are fixed at both ends of the track, and the reflective photoelectric sensor 3 follows the movement of the measured object. For the convenience of analysis, the trans-type photoelectric sensors 1 and 2 are referred to as "static sensors" hereinafter (the photoelectric sensor 1 is called the working static sensor, and the photoelectric sensor 2 is called the auxiliary static sensor), and the reflective photoelectric sensor 3 is referred to as the "dynamic sensor". ", the speed of the micro synchronous motor is called "synchronous speed" for short.

1.被测物体移动方向远离工作静传感器1. The moving direction of the measured object is far away from the working static sensor

测量原理俯视图如图2所示,设同步转向为顺时针方向,n为同步转速,被测物体初始位置在A0处,在测量前先启动同步电机带动光栅盘转动,光栅透光刻线分别经过静传感器1、动传感器、静传感器2后,会依此输出三个脉冲信号(假设经过处理后均为负脉冲信号)。The top view of the measurement principle is shown in Figure 2. The synchronous steering is clockwise, n is the synchronous speed, and the initial position of the measured object is at A0. After the static sensor 1, the dynamic sensor, and the static sensor 2, three pulse signals will be output accordingly (assuming that they are all negative pulse signals after processing).

传感器测量原理时序图如图3所示。在测量之前,同步电机转动后,静传感器1、动传感器、静传感器2的输出的脉冲信号分别如图3中的脉冲A、B和D所示。静传感器1与动传感器的初始相位差为θ1。此时我们在两脉冲间填充高频脉冲,在静传感器1脉冲下降沿启动高频脉冲计数,在动传感器下降沿停止计数(如图3中的脉冲C所示),则计得的高频脉冲个数N1与θ1成正比。同理,在两个静传感器输出脉冲间填充高频脉冲,设θ=θ1234,则高频脉冲数N2与θ成正比。当光栅刻线继续旋转,与静传感器1再次接触时,可得到同步电机转动360°所计得的高频脉冲数N8。可得:The timing diagram of the sensor measurement principle is shown in Figure 3. Before the measurement, after the synchronous motor rotates, the output pulse signals of static sensor 1, dynamic sensor and static sensor 2 are shown as pulse A, B and D in Fig. 3 respectively. The initial phase difference between the static sensor 1 and the dynamic sensor is θ 1 . At this time, we fill the high-frequency pulse between the two pulses, start counting the high-frequency pulse at the falling edge of the static sensor 1 pulse, and stop counting at the falling edge of the moving sensor (as shown by pulse C in Figure 3), then the counted high-frequency pulse The number of pulses N 1 is proportional to θ 1 . Similarly, high-frequency pulses are filled between the output pulses of two static sensors, assuming θ=θ 1234 , then the number of high-frequency pulses N 2 is proportional to θ. When the grating reticle continues to rotate and contacts the static sensor 1 again, the number N 8 of high-frequency pulses counted by the synchronous motor rotating 360° can be obtained. Available:

Figure A20081023632800061
Figure A20081023632800061

L 1 = L 5 Sin θ 1 Sin ( 180 - θ 1 - θ 5 ) (设θ5、L5已知)                        (2) L 1 = L 5 sin θ 1 sin ( 180 - θ 1 - θ 5 ) (Assume that θ 5 and L 5 are known) (2)

当被测物产生了线位移,则带动动传感器同步移动,设从位置A0移动到位置A1,此时静传感器输出脉冲不变,动传感器输出脉冲如图3中的F所示。此时,我们在两脉冲间填充高频脉冲如图G所示,则脉冲个数H5与θ12成正比,N4=N5-N1与θ2成正比。可得:When the measured object has a linear displacement, it drives the dynamic sensor to move synchronously, assuming that it moves from position A 0 to position A 1 . At this time, the output pulse of the static sensor remains unchanged, and the output pulse of the dynamic sensor is shown as F in Figure 3. At this time, we fill the high-frequency pulses between the two pulses as shown in Figure G, then the number of pulses H 5 is proportional to θ 1 + θ 2 , and N 4 = N 5 -N 1 is proportional to θ 2 . Available:

Figure A20081023632800071
Figure A20081023632800071

LL 22 == LL 55 Sinsin (( θθ 11 ++ θθ 22 )) Sinsin (( 180180 -- θθ 11 -- θθ 22 -- θθ 55 )) -- LL 11 -- -- -- (( 44 ))

同理,当被测物以A1为初始点,从位置A1移动到位置A2,此时动传感器的输出脉冲波形如图3的H所示,通过计数两脉冲下降沿间的高频Similarly, when the object under test moves from position A 1 to position A 2 with A 1 as the initial point, the output pulse waveform of the motion sensor is shown in Figure 3 H, by counting the high frequency between the falling edges of the two pulses

脉冲数为N7(如图I所示)。此时新的角位移所代表的脉冲数N6=N7-N5。则被测物移动的角位移θ3The number of pulses is N 7 (as shown in Figure 1). At this time, the number of pulses represented by the new angular displacement is N 6 =N 7 -N 5 . Then the angular displacement θ 3 of the object to be measured is:

Figure A20081023632800073
Figure A20081023632800073

则物体运动的直线位移为:Then the linear displacement of the object motion is:

LL 33 == LL 55 Sinsin (( θθ 11 ++ θθ 22 ++ θθ 33 )) Sinsin (( 180180 -- θθ 11 -- θθ 22 -- θθ 33 -- θθ 55 )) -- LL 11 -- LL 22 -- -- -- (( 66 ))

可以采用上述方法得到线位移测量通用公式:The general formula for linear displacement measurement can be obtained by the above method:

LL == LL GG Sinsin (( θθ CC ++ θθ )) Sinsin (( 180180 -- θθ CC -- θθ -- θθ GG )) -- LL QQ -- -- -- (( 77 ))

Figure A20081023632800076
Figure A20081023632800076

式中,L-被测线位移;LG-电机轴心到静传感器1中心间的距离;θC-动静传感器间初始时刻相位差;θG-静传感器1中心和电机轴心所形成的连线与直线轨道的夹角;θ-动传感器直线移动后产生的相位角;LQ-初始时刻静动传感器间的距离;NB-本时刻静动传感器间高频脉冲数;NC-初始时刻静动传感器间高频脉冲数;N-360度范围高频脉冲数。In the formula, L-displacement of the measured line; L G -the distance between the motor shaft center and the center of the static sensor 1; θ C -the initial moment phase difference between the dynamic and static sensors; The angle between the connecting line and the straight track; θ - the phase angle generated by the linear movement of the moving sensor; L Q - the distance between the static and moving sensors at the initial moment; N B - the number of high-frequency pulses between the static and moving sensors at this moment; N C - The number of high-frequency pulses between static and dynamic sensors at the initial moment; the number of high-frequency pulses in the range of N-360 degrees.

在这里要说明的是,“初始时刻静动传感器间高频脉冲数”不是一个固定的数。如把初始时刻定义在A0则N1为“初始时刻静动传感器间高频脉冲数”;如把初时刻定义在A1,则N4为“初始时刻静动传感器间高频脉冲数”。这要视测量需要而定,可以在接口电路程序中通过软件实现不同的功能。It should be explained here that the "number of high-frequency pulses between static and dynamic sensors at the initial moment" is not a fixed number. If the initial moment is defined at A 0 , then N 1 is "the number of high-frequency pulses between static and dynamic sensors at the initial moment"; if the initial moment is defined at A 1 , then N 4 is "the number of high-frequency pulses between static and dynamic sensors at the initial moment" . It depends on the measurement needs, and different functions can be realized by software in the interface circuit program.

在这里使用的是动态测量方法,也就是同步电机不停转动,控制器不断记录静动传感器间的高频脉冲数,不断根据公式更新计算结果并显示。通过显示,可以定时测量物体的直线位移并观测到被测物直线移动的动态过程。The dynamic measurement method is used here, that is, the synchronous motor keeps rotating, and the controller continuously records the number of high-frequency pulses between the static and dynamic sensors, and constantly updates and displays the calculation results according to the formula. Through the display, the linear displacement of the object can be measured regularly and the dynamic process of the linear movement of the measured object can be observed.

测量结果的精度和分辨率取决于高频脉冲的频率和同步电机转动的匀速程度,只要高频脉冲的频率足够高,同步电机匀速转动,理论上可以得到很高的测量精度和测量分辨率。The accuracy and resolution of measurement results depend on the frequency of high-frequency pulses and the degree of uniform rotation of the synchronous motor. As long as the frequency of high-frequency pulses is high enough and the synchronous motor rotates at a uniform speed, theoretically high measurement accuracy and resolution can be obtained.

在此我们也可以看出,静传感器2的作用冗余,仅需一个静传感器(工作静传感器)和一个动传感器就可以完成线位移检测。我们在设计中,依然采用两个静传感器,可以方便用户采用不同的检测方式完成更多功能。Here we can also see that the role of the static sensor 2 is redundant, and only one static sensor (working static sensor) and one dynamic sensor are needed to complete the linear displacement detection. In our design, we still use two static sensors, which can facilitate users to use different detection methods to complete more functions.

且直线轨道与光栅圆盘的位置不会影响到测量,只要直线轨道不经过圆心且在圆盘范围内,都可以进行检测。如图4所示,直线轨道(轨迹)在任意位置、采用单反射式红外传感器检测,公式7、8同样适用。And the position of the linear track and the grating disc will not affect the measurement, as long as the linear track does not pass through the center of the circle and is within the range of the disc, it can be detected. As shown in Figure 4, the linear track (trajectory) is detected at any position by a single-reflection infrared sensor, and formulas 7 and 8 are also applicable.

2.被测物体移动方向接近工作静传感器2. The moving direction of the measured object is close to the working static sensor

当被测物体移动方向渐渐接近工作静传感器时,如图5所示。动传感器初始位置在A0处,透光刻线经过静传感器再经过动传感器后,会输出两个脉冲,如图6中的A、B所示。两脉冲的相位差即为两传感器初始相位差θ=θ123。此时在静传感器脉冲下降沿启动高频脉冲计数,在动传感器下降沿停止计数(如图6中的脉冲C所示),则计得的高频脉冲个数N1与θ成正比。设静动传感器间初始距离L=L1+L2+L3When the moving direction of the measured object gradually approaches the working static sensor, as shown in Figure 5. The initial position of the dynamic sensor is at A 0. After the transparent reticle passes through the static sensor and then the dynamic sensor, two pulses will be output, as shown in A and B in Figure 6. The phase difference between the two pulses is the initial phase difference between the two sensors θ=θ 123 . At this time, high-frequency pulse counting is started at the falling edge of the static sensor pulse, and counting is stopped at the falling edge of the moving sensor (as shown by pulse C in Figure 6), and the counted high-frequency pulse number N1 is proportional to θ. It is assumed that the initial distance between static and dynamic sensors is L=L 1 +L 2 +L 3 .

当被测物产生了线位移,则带动动传感器同步运动,设从位置A0移动到位置A1,此时静传感器输出脉冲不变,动传感器输出脉冲如图6中的D所示。此时,我们在两脉冲间填充高频脉冲如图E所示,计得高频脉冲个数N3与(θ23)成正比。When the measured object produces a linear displacement, it will drive the dynamic sensor to move synchronously, assuming that it moves from position A 0 to position A 1 . At this time, the output pulse of the static sensor remains unchanged, and the output pulse of the dynamic sensor is shown as D in Figure 6. At this time, we fill the high-frequency pulses between the two pulses as shown in Figure E, and the number N 3 of high-frequency pulses is calculated to be proportional to (θ 23 ).

通过减法运算可以得到N2=N1-N3,如图中C所示。N2与角位移θ1成正比。并且可以得到同步电机转过360°所计得的高频脉冲数N6。则计算公式如下:N 2 =N 1 -N 3 can be obtained through subtraction, as shown by C in the figure. N2 is proportional to the angular displacement θ1 . And the number N 6 of high-frequency pulses counted when the synchronous motor turns 360° can be obtained. Then the calculation formula is as follows:

Figure A20081023632800091
Figure A20081023632800091

Figure A20081023632800092
Figure A20081023632800092

Figure A20081023632800093
Figure A20081023632800093

L1=L-L2-L3                        (13)L 1 =LL 2 -L 3 (13)

同理,当被测物以A1作为起始位置,从位置A1移动到位置A2,此时静传感器和动传感器的输出脉冲波形如图中D、F所示,通过计数两脉冲下降沿间的高频脉冲数为N5(如图中G所示)。可得:Similarly, when the object under test moves from position A 1 to position A 2 with A 1 as the initial position, the output pulse waveforms of the static sensor and the dynamic sensor are shown in D and F in the figure, and the two pulses drop by counting The number of high-frequency pulses between edges is N 5 (shown as G in the figure). Available:

Figure A20081023632800101
Figure A20081023632800101

Figure A20081023632800103
Figure A20081023632800103

L2=L2+L3-L3                    (17)L 2 =L 2 +L 3 -L 3 (17)

可以采用上述方法得到线位移测量通用公式:The general formula for linear displacement measurement can be obtained by the above method:

LL == LL QQ -- LL GG Sinsin θθ BB Sinsin (( 180180 -- θθ GG -- θθ BB )) -- -- -- (( 1818 ))

Figure A20081023632800105
Figure A20081023632800105

L-被测线位移;LG-电机轴心到静传感器间距离;θG-静传感器中心和电机轴心所形成的连线与直线轨道的夹角;LQ-初始时刻静动传感器间的距离;NB-本时刻静动传感器间高频脉冲数;NG-初始时刻静动传感器间高频脉冲数;N-360度范围高频脉冲数;θB-动传感器直线移动后动静传感器间相位差。L-displacement of the measured line; L G -the distance between the motor shaft center and the static sensor; θ G -the angle between the line formed by the center of the static sensor and the motor shaft and the straight track; L Q -the distance between the static and dynamic sensors at the initial moment N B - the number of high-frequency pulses between the static and dynamic sensors at this moment; N G - the number of high-frequency pulses between the static and dynamic sensors at the initial moment; N - the number of high-frequency pulses in the range of 360 degrees; Phase difference between sensors.

3.被测物体移动方向未知或不定3. The moving direction of the measured object is unknown or uncertain

同步转向由传感器中同步电机提供,方向固定不变(假设固定为顺时针方向)。而被测物体移动方向很多情况下是未知或不定的。在此情况下首先要判别被物移动方向。判别方法很简单:当光栅刻线第N-1次经过静、动传感器后得到了它们之间的高频脉冲数,在接口电路软件中用寄存器记录为“上一次静动传感器间高频脉冲数”。然后将光栅刻线第N次经过静、动传感器后得到的高频脉冲数记录为“本时刻静动传感器间高频脉冲数”。用“本时刻静动传感器间高频脉冲数”减去“上一次静动传感器间高频脉冲数”,如果为正就说明被测物向远离工作静传感器的方向移动,此时采用7、8式计算线位移。如果为负说明物体向接近工作静传感器的方向移动,此时采用18、19式来计算线位移。当光栅刻线第N+1次经过静动传感器时,将第N次的“本时刻静动传感器间高频脉冲数”作为第N+1次的“上一次静动传感器间高频脉冲数”进行计算和判别。如果仅需计算线位移而不需知道移动方向时,没有必要如此繁琐,只需始终使用公式7、8或18、19,结果取绝对值即可。The synchronous steering is provided by the synchronous motor in the sensor, and the direction is fixed (assuming it is fixed in clockwise direction). However, the moving direction of the measured object is unknown or uncertain in many cases. In this case, the moving direction of the object must be judged first. The method of discrimination is very simple: when the grating line passes through the static and dynamic sensors for the N-1 time, the number of high-frequency pulses between them is obtained, and it is recorded in the interface circuit software as "the last high-frequency pulse between static and dynamic sensors". number". Then record the number of high-frequency pulses obtained after the grating reticle passes through the static and dynamic sensors for the Nth time as "the number of high-frequency pulses between the static and dynamic sensors at this moment". Subtract the "high-frequency pulse number between static and dynamic sensors last time" from "the number of high-frequency pulses between static and dynamic sensors at this moment". If it is positive, it means that the measured object is moving away from the working static sensor. At this time, use 7, 8 to calculate the line displacement. If it is negative, it means that the object moves towards the direction close to the working static sensor. At this time, formulas 18 and 19 are used to calculate the linear displacement. When the grating reticle passes through the static sensor for the N+1th time, the Nth "number of high-frequency pulses between static sensors at this moment" is taken as the "Number of high-frequency pulses between static sensors last time" for the N+1th time. ” to calculate and judge. If you only need to calculate the linear displacement and do not need to know the direction of movement, there is no need to be so cumbersome, just always use formulas 7, 8 or 18, 19, and take the absolute value of the result.

在更一般的情况下,同步转速不定,物体移动方向不定时,会出现如图7所示情形:静动传感器间初始夹角大于180°。为了能使用公式7、8或18、19进行计算,应当使同步转向反向。因此可以得到发明的传感器使用流程:In a more general situation, the synchronous speed is not fixed, and the moving direction of the object is not fixed, and the situation shown in Figure 7 will appear: the initial angle between the static and dynamic sensors is greater than 180°. To be able to use equations 7, 8 or 18, 19 for calculations, the synchronous steering should be reversed. Therefore, the inventive sensor usage process can be obtained:

①检测前使微型同步电机转动,在接口电路微控制器中通过程序识别,使光栅刻线第一次经过静传感器所得到的脉冲作为起始脉冲,始终保持动传感器的输出脉冲滞后于静传感器输出脉冲。并计算初始时静动传感器间距离及对应的夹角。① Make the miniature synchronous motor rotate before detection, and identify it through the program in the microcontroller of the interface circuit, so that the pulse obtained by the grating line passing through the static sensor for the first time is used as the initial pulse, and the output pulse of the dynamic sensor always lags behind the output of the static sensor pulse. And calculate the initial distance between the static and dynamic sensors and the corresponding angle.

②如静动传感器间初始夹角小于180°则不做处理,如大于180°则改变同步电机转向,并重复步骤“①”的工作。②If the initial angle between the static and dynamic sensors is less than 180°, no processing will be done; if it is greater than 180°, the steering of the synchronous motor will be changed, and the work of step "①" will be repeated.

③判别物体移动方向。如果物体向着接近工作静传感器的方向移动,则采用公式18、19计算线位移。如物体向着远离工作静传感器的方向移动,则采用公式7、8计算线位移。③ Determine the moving direction of the object. If the object is moving towards the approach of the working static sensor, the linear displacement is calculated using Equations 18 and 19. If the object moves away from the working static sensor, formula 7 and 8 are used to calculate the linear displacement.

在测量时,也可采用两个静传感器间的高频脉冲数作为基准,来代替360度范围高频脉冲数N。When measuring, the number of high-frequency pulses between two static sensors can also be used as a reference instead of the number N of high-frequency pulses in the 360-degree range.

4.传感器性能及优缺点分析4. Analysis of sensor performance and advantages and disadvantages

4.1传感器精密度、准确度及分辨率分析4.1 Sensor precision, accuracy and resolution analysis

对于线位移传感器来说,测量精密度、准确度和分辨率是最重要的技术指标。测量精密度是指相同条件下,对被测量进行多次反复测量,测得值之间的一致(符合)程度。从测量误差的角度来说,精密度所反映的是测得值的随机误差。在本系统中,测量精密度主要取决于同步转速的均匀程度。For linear displacement sensors, measurement precision, accuracy and resolution are the most important technical indicators. Measurement precision refers to the degree of agreement (coincidence) between the measured values after repeated measurements of the measured value under the same conditions. From the perspective of measurement error, precision reflects the random error of the measured value. In this system, the measurement precision mainly depends on the uniformity of the synchronous rotational speed.

测量精度(准确度)是指被测量的测得值与其“真值”的接近程度。从测量误差的角度来说,正确度所反映的是测得值的系统误差。此时我们来计算理论上系统可达到的分辨率和精度,假设传感器中同步电机转速为200r/min(3.3r/s),则电机带动光栅刻线转动360度所记得的高频脉冲数为: 1 / 3.3 1 / ( 25 × 10 6 ) ≈ 7575757 个。则理论上最小可分辨的角度为

Figure A20081023632800122
该角度所对应的线位移也是非常小的,因此线位移测量分辨率和精度都很高。而且电机转速越慢,系统分辨率越高,精度也越高。但电机转动速度越小,系统响应越慢。为了提高系统响应速度,应使电机快速旋转,此时可以通过增加高频脉冲频率来提高系统精度和分辨率。Measurement precision (accuracy) refers to how close the measured value of a measurand is to its "true value". From the perspective of measurement error, the accuracy reflects the systematic error of the measured value. At this point, let’s calculate the theoretical resolution and accuracy that the system can achieve. Assuming that the synchronous motor speed in the sensor is 200r/min (3.3r/s), the number of high-frequency pulses that the motor drives the grating reticle to rotate 360 degrees is : 1 / 3.3 1 / ( 25 × 10 6 ) ≈ 7575757 indivual. Then the theoretical minimum resolvable angle is
Figure A20081023632800122
The linear displacement corresponding to this angle is also very small, so the resolution and precision of linear displacement measurement are very high. And the slower the motor speed, the higher the system resolution and the higher the accuracy. But the smaller the motor rotation speed, the slower the system response. In order to improve the response speed of the system, the motor should be rotated rapidly. At this time, the system accuracy and resolution can be improved by increasing the high-frequency pulse frequency.

4.2新型直线位移传感器系统的优缺点分析4.2 Analysis of the advantages and disadvantages of the new linear displacement sensor system

该新型直线位移传感器优点如下:The advantages of the new linear displacement sensor are as follows:

(1)测量范围大,只需要保证物体移动范围在以光栅刻线为半径的圆内即可,增大光栅刻线长度可增大量程。(1) The measurement range is large. It is only necessary to ensure that the moving range of the object is within a circle with the grating line as the radius. Increasing the length of the grating line can increase the range.

(2)结构简单,安装方便,成本低。(2) Simple structure, convenient installation and low cost.

(3)测量精度和分辨率高。(3) The measurement accuracy and resolution are high.

(4)测量前无须调零。(4) There is no need for zero adjustment before measurement.

(5)不需另加判向电路,通过软件直接判向。(5) No additional direction judgment circuit is needed, and the direction is directly judged by software.

该系统设计也存在缺点及改进方法:There are also shortcomings and improvement methods in this system design:

(1)存在一定系统误差(1) There is a certain systematic error

主要为电气误差和同步转速误差。电气误差由两部分组成,系统中采用的控制器接收到动传感器信号后进入中断,同时发出锁存信号读取高频脉冲数需要一定时间,此时间会造成所读的高频脉冲数多于实际的脉冲数,形成测量系统误差,可以通过改进控制器(如选用CPLD、FPGA或DSP等作为控制器来减少误差)。此外,控制器进行正弦计算时,一般采用查表法会存在一定误差,可通过改进算法及采用高端控制器来减小误差。同步转速误差主要由于同步转速的不均匀会引起高频脉冲计数误差,可以通过选用转速均匀度高的电机来减小误差。Mainly electrical error and synchronous speed error. The electrical error is composed of two parts. The controller used in the system enters the interrupt after receiving the signal from the moving sensor, and at the same time sends out the latch signal to read the number of high-frequency pulses. It takes a certain time. This time will cause the number of high-frequency pulses read to be more than The actual number of pulses forms the error of the measurement system, which can be reduced by improving the controller (such as selecting CPLD, FPGA or DSP as the controller). In addition, when the controller performs sine calculation, there will be certain errors when using the look-up table method, and the error can be reduced by improving the algorithm and using a high-end controller. The synchronous speed error is mainly due to the high-frequency pulse count error caused by the uneven synchronous speed, and the error can be reduced by selecting a motor with high speed uniformity.

(2)响应速度慢(2) Slow response speed

当被测物产生直线位移后,传感器并不能立即响应,而是要等到光删刻线转动到新位移处时才能响应。可以通过提高同步转速来提高响应速度。或将该传感器用于定时测量的场合。When the measured object produces a linear displacement, the sensor cannot respond immediately, but can only respond when the reticle rotates to the new displacement. The response speed can be improved by increasing the synchronous speed. Or use the sensor for timing measurements.

(3)不适于测量高速物体位移(3) Not suitable for measuring the displacement of high-speed objects

5.传感器接口电路设计5. Sensor interface circuit design

5.1硬件设计总体框图5.1 Overall block diagram of hardware design

在设计中,采用AT89S51单片机与高速计数器74HC4040或CPLD相结合的方式,可有效降低系统成本,增强系统的可扩展能力。接口电路总体框图如图8所示。In the design, the combination of AT89S51 single-chip microcomputer and high-speed counter 74HC4040 or CPLD can effectively reduce the system cost and enhance the scalability of the system. The overall block diagram of the interface circuit is shown in Figure 8.

5.2信号处理模块5.2 Signal processing module

如采用反射式红外传感器作为位置传感器,可采用LM339等比较器对传感器输出信号进行整形。If a reflective infrared sensor is used as a position sensor, a comparator such as LM339 can be used to shape the output signal of the sensor.

5.3高频计数模块5.3 High frequency counting module

74HC4040工作频率可达50MHZ。本课题设计的高频脉冲计数电路如图9所示。计数单元采用25M有源晶振作为高频脉冲输入,通过脉冲下降沿触发74HC4040开始计数。由于74HC4040是12位二进制计数器,所以系统采用两片级联的方式,并将第一片的最高位连接到第二片的CLK端,从而用第一片的高四位与第二片的低四位共同组成一个16位二进制计数器。但如果只采用16位计数不能满足系统要求,因为16位计数器计满所需时间为 1 25 × 10 6 × 2 16 = 0.002621 秒,这意味着传感器光栅刻线经过动传感器与静传感器间的时间间隔必须小于0.002621秒,同步电机达不到如此高的速度。所以我们将第二片74HC4040的Q4接到单片机的T0端,计满216个数后Q4出现下降沿,触发T0计数。由于T0本身为16位二进制计数器,则由以上结构可构成32位二进制计数器。如果计满所需时间为 1 25 × 10 6 × 2 32 = 171.8 秒,可以满足要求。同时25M时钟经过216分频,T0端的计数频率为381HZ,这也可以满足要求。The working frequency of 74HC4040 can reach 50MHZ. The high-frequency pulse counting circuit designed in this subject is shown in Figure 9. The counting unit uses a 25M active crystal oscillator as the high-frequency pulse input, and triggers the 74HC4040 to start counting through the falling edge of the pulse. Since the 74HC4040 is a 12-bit binary counter, the system adopts two cascade connections, and connects the highest bit of the first chip to the CLK terminal of the second chip, thus using the high four bits of the first chip and the low The four bits together form a 16-bit binary counter. However, if only 16-bit counting is used, the system requirements cannot be met, because the time required for the 16-bit counter to be full is 1 25 × 10 6 × 2 16 = 0.002621 seconds, which means that the time interval between the sensor grating reticle passing through the moving sensor and the static sensor must be less than 0.002621 seconds, and the synchronous motor cannot reach such a high speed. So we connect the Q4 of the second 74HC4040 to the T0 terminal of the single-chip microcomputer. After counting 2 16 numbers, Q4 has a falling edge, which triggers T0 counting. Since T0 itself is a 16-bit binary counter, the above structure can form a 32-bit binary counter. If the time required to complete is 1 25 × 10 6 × 2 32 = 171.8 seconds, can meet the requirements. At the same time, the 25M clock is divided by 2 16 , and the counting frequency of the T0 terminal is 381HZ, which can also meet the requirements.

此外,也可采用CPLD作为高频计数模块,CPLD具有频率高、集成度高、抗干扰能力强、可靠性好、可维护性强等特点。使用CPLD虽然增加了系统成本,但实现了系统性能的提升。本发明选用ALTERA公司生产的EPM7032作为硬件设计中的CPLD模块。实验中采用CPLD完成计数功能,单片机完成运算及显示存储功能。In addition, CPLD can also be used as a high-frequency counting module. CPLD has the characteristics of high frequency, high integration, strong anti-interference ability, good reliability, and strong maintainability. Although the use of CPLD increases the system cost, it improves the system performance. The present invention selects EPM7032 produced by ALTERA Company as the CPLD module in the hardware design. In the experiment, the CPLD is used to complete the counting function, and the single-chip microcomputer is used to complete the calculation and display storage functions.

5.4显示模块及数据存储模块5.4 Display module and data storage module

采用数码管动态显示方式,8255扩展单片机的I/O口。其中PA口输出段码,PB口和PC口输出位码。位扫描口加反向驱动器75452以提供足够的驱动电流,段数据口经同向驱动器7407再接到LED各段。本系统中测量出的直线位移的历史数据要进行保存,以便用户进行查询,为此硬件系统中使用了非易失性存储器24C04来保存这些信息,单片机通过I2C协议的软件包对24C04进行读写。The digital tube dynamic display method is adopted, and the 8255 expands the I/O port of the single-chip microcomputer. Among them, PA port outputs segment code, PB port and PC port output bit code. A reverse driver 75452 is added to the bit scanning port to provide sufficient driving current, and the segment data port is connected to each segment of the LED through the same direction driver 7407. The historical data of linear displacement measured in this system should be saved so that users can inquire. For this reason, non-volatile memory 24C04 is used in the hardware system to save these information. read and write.

Claims (1)

1、一种高精度数字式直线位移传感器,其特征是:包括电机驱动的光栅盘,光栅盘上设有一条透光刻线,光栅盘上方设置直线轨道,直线轨道两端分别固装一个反射式红外光电传感器,另有一个反射式红外传感器与直线轨道上的移动物体连接,光栅盘面向反射式红外传感器的一面为光亮面。1. A high-precision digital linear displacement sensor, which is characterized in that it includes a motor-driven grating disc, a light-transmitting scribe line is arranged on the grating disc, a linear track is arranged above the grating disc, and a reflector is fixed at both ends of the linear track. Infrared photoelectric sensor, another reflective infrared sensor is connected with the moving object on the linear track, and the side of the grating disc facing the reflective infrared sensor is a bright surface.
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CN104406524A (en) * 2014-11-13 2015-03-11 浙江大学 Combined grating micrometric displacement sensor and displacement measuring method using same
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CN105987743A (en) * 2015-02-02 2016-10-05 深圳市特安电子有限公司 Radar liquidometer calibration device
CN107462168A (en) * 2017-08-31 2017-12-12 广东工业大学 A kind of new array photoelectric Raster Displacement Detection System and method
CN107825703A (en) * 2017-12-15 2018-03-23 深圳市纵维立方科技有限公司 The detection method of 3D printer fracture putty
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