CN101407420A - Method for preparing non-grain boundary phase porous silicon nitride ceramic based on carbon thermal reduction - Google Patents
Method for preparing non-grain boundary phase porous silicon nitride ceramic based on carbon thermal reduction Download PDFInfo
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Abstract
本发明公开了一种基于碳热还原制备无晶界相多孔氮化硅陶瓷的方法,首先按重量百分比,将下述组分:氮化硅93~95%、烧结助剂5~7%混合,按常规多孔氮化硅的制备工艺获得气孔率为35-55%的多孔氮化硅试样。用氢氟酸、硝酸、硫酸去掉氮化硅中的玻璃相及烧结助剂所形成的化合物;按一定比例配制酚醛树脂及二氧化硅的溶胶,把酸洗后的多孔氮化硅基体试样多次浸入到溶胶中,烘干后放入气氛炉中,加热至1200℃通入氮气,升温至1750-1800℃,在氮气压力为2~6个大气压下保温1~2小时,得到无晶界相多孔氮化硅陶瓷。该多孔陶瓷可广泛应用于高温气氛及腐蚀性气氛下的气体分离用过滤器的基体材料,发电用燃气轮机,发动机,航天飞机,天线罩等使用的高温耐热材料等。The invention discloses a method for preparing porous silicon nitride ceramics without a grain boundary phase based on carbothermal reduction. Firstly, the following components are mixed according to weight percentage: 93-95% of silicon nitride and 5-7% of sintering aid According to the conventional porous silicon nitride preparation process, a porous silicon nitride sample with a porosity of 35-55% is obtained. Use hydrofluoric acid, nitric acid, and sulfuric acid to remove the glass phase in silicon nitride and the compound formed by the sintering aid; prepare a sol of phenolic resin and silicon dioxide in a certain proportion, and take the porous silicon nitride matrix sample after pickling Immerse in the sol for many times, put it into the atmosphere furnace after drying, heat to 1200°C, pass nitrogen gas, raise the temperature to 1750-1800°C, keep it under the nitrogen pressure of 2-6 atmospheres for 1-2 hours, and obtain amorphous Boundary phase porous silicon nitride ceramics. The porous ceramics can be widely used as base materials for gas separation filters in high-temperature atmospheres and corrosive atmospheres, as high-temperature heat-resistant materials for gas turbines for power generation, engines, space shuttles, radomes, etc.
Description
技术领域 technical field
本发明涉及多孔氮化硅陶瓷的制备方法,尤其涉及一种基于碳热还原制备无晶界相多孔氮化硅陶瓷的方法。The invention relates to a method for preparing porous silicon nitride ceramics, in particular to a method for preparing porous silicon nitride ceramics without a grain boundary phase based on carbothermal reduction.
背景技术 Background technique
多孔氮化硅具有高耐磨性、高耐应变性和耐损伤性等优异的机械性能,可以应用于高低温下过滤器、催化剂载体和生物反应器,以及复合材料的增强相等各个领域中。多孔氮化硅还具有良好的热稳定性、较低的介电常数、低介电损耗、高耐冲蚀性能,被视为最有希望的新一代透波材料。氮化硅是强共价键化合物,其自扩散系数很小,致密化所必须的体积扩散及晶界扩散速度很小,同时它的晶界能Vgb与粉末表面能Vsv、的比值(Vgb/Vsv)比离子化合物和金属要大得多,使得烧结驱动力ΔV较小,因此纯氮化硅靠固相烧结很难,必须加入烧结助剂(通常是金属氧化物)与氮化硅粉末表面的二氧化硅氧化层或氮化硅形成低熔点的共熔液体,通过液相烧结机理促进了氮化硅陶瓷的烧结与致密化。目前为止,多孔氮化硅陶瓷制备采用添加MgO,Al2O3,Y2O3,Yb2O3等氧化物烧结助剂产生液相烧结,以及碳热还原等方法。如日本专利特开2000-225985中将含有氮化硅颗粒与氧化物烧结助剂的混合粉末形成的成形体在氮气中加热,控制烧结温度和烧结助剂的添加量获得氮化硅多孔陶瓷材料。日本专利特开2001-206775中,提出了将含有二氧化硅颗粒,碳颗粒以及平均粒径5um以下的金属硅颗粒的成形体在氮气中进行热处理制备多孔氮化硅陶瓷。Porous silicon nitride has excellent mechanical properties such as high wear resistance, high strain resistance and damage resistance, and can be used in various fields such as filters, catalyst supports and bioreactors under high and low temperature, as well as reinforcement of composite materials. Porous silicon nitride also has good thermal stability, low dielectric constant, low dielectric loss, and high erosion resistance, and is regarded as the most promising new generation of wave-transmitting materials. Silicon nitride is a strong covalent bond compound, its self-diffusion coefficient is very small, and the volume diffusion and grain boundary diffusion speed necessary for densification are very small. At the same time, the ratio of its grain boundary energy V gb to powder surface energy V sv , ( V gb /V sv ) is much larger than ionic compounds and metals, making the sintering driving force ΔV smaller, so it is difficult to sinter pure silicon nitride by solid phase, and sintering aids (usually metal oxides) and nitrogen must be added The silicon dioxide oxide layer or silicon nitride on the surface of silicon nitride powder forms a eutectic liquid with a low melting point, which promotes the sintering and densification of silicon nitride ceramics through the liquid phase sintering mechanism. So far, porous silicon nitride ceramics have been prepared by adding oxide sintering aids such as MgO, Al 2 O 3 , Y 2 O 3 , Yb 2 O 3 to produce liquid phase sintering, and carbothermal reduction. For example, in Japanese Patent Laid-Open No. 2000-225985, the molded body formed by the mixed powder containing silicon nitride particles and oxide sintering aids is heated in nitrogen, and the sintering temperature and the amount of sintering aids are controlled to obtain silicon nitride porous ceramic materials. . In Japanese Patent Laid-Open No. 2001-206775, it is proposed to prepare porous silicon nitride ceramics by heat-treating a molded body containing silicon dioxide particles, carbon particles and metal silicon particles with an average particle size of 5 μm or less in nitrogen.
以上制备方法中由于加入烧结助剂,通过液相烧结,形成含有玻璃相的多孔氮化硅陶瓷。由于含有较多的玻璃相,强度较低,且在高温下玻璃相易软化,所以其耐高温性,绝缘性及介电性等性能都有一定的影响。In the above preparation method, due to the addition of sintering aids, the porous silicon nitride ceramics containing the glass phase are formed through liquid phase sintering. Because it contains more glass phase, the strength is low, and the glass phase is easy to soften at high temperature, so its high temperature resistance, insulation and dielectric properties have certain influences.
发明内容Contents of the invention
本发明的目的是提供一种无晶界相多孔氮化硅陶瓷的制备方法,提高现有多孔氮化硅陶瓷的高温性能应用。The purpose of the present invention is to provide a method for preparing porous silicon nitride ceramics without a grain boundary phase, so as to improve the high-temperature performance and application of the existing porous silicon nitride ceramics.
为达到以上目的,本发明是采取如下技术方案予以实现的:To achieve the above object, the present invention is achieved by taking the following technical solutions:
一种基于碳热还原制备无晶界相多孔氮化硅陶瓷的方法,包括下述步骤:A method for preparing porous silicon nitride ceramics without a grain boundary phase based on carbothermal reduction, comprising the steps of:
(1)按重量百分比,将下述组分:氮化硅93~95%、烧结助剂5~7%混合,按常规多孔氮化硅的制备工艺,在N2气氛中于1750下烧结2h,获得气孔率为35-55%的多孔氮化硅试样;(1) By weight percentage, the following components are mixed: 93-95% of silicon nitride and 5-7% of sintering aid, and are sintered at 1750°C for 2h in N2 atmosphere according to the conventional preparation process of porous silicon nitride to obtain a porous silicon nitride sample with a porosity of 35-55%;
(2)用氢氟酸、硝酸、硫酸之一种以上酸酸洗除掉多孔氮化硅试样中的玻璃相及烧结助剂所形成的化合物,再碱洗除掉酸,制备出无晶界的氮化硅基体试样;(2) Pickling with one or more of hydrofluoric acid, nitric acid, and sulfuric acid to remove the compound formed by the glass phase and sintering aid in the porous silicon nitride sample, and then washing with alkali to remove the acid to prepare an amorphous Silicon nitride substrate samples in the world;
(3)配制酚醛树脂及二氧化硅的溶胶,其酚醛树脂裂解的碳与二氧化硅摩尔比为1~3,把酸洗后的多孔氮化硅基体试样浸入到溶胶中,多次浸渗,直到饱和;(3) Prepare the sol of phenolic resin and silicon dioxide, the molar ratio of the carbon and silicon dioxide cracked by the phenolic resin is 1~3, the porous silicon nitride substrate sample after pickling is immersed in the sol, dipped several times Seep until saturated;
(4)将浸渗饱和的多孔氮化硅基体试样烘干,置于气氛炉中,以5~30度/分的升温速度加热至1200℃,通入氮气,1~2h后升至1400~1600℃,1~4h后再升温至1750~1800℃,在氮气压力为2~6个大气压下保温1~2小时,即获得无晶界相多孔氮化硅陶瓷。(4) Dry the impregnated and saturated porous silicon nitride substrate sample, place it in an atmosphere furnace, heat it to 1200°C at a heating rate of 5-30°C/min, feed nitrogen gas, and rise to 1400°C after 1-2 hours. ~1600°C, heat up to 1750~1800°C after 1~4 hours, and keep warm for 1~2 hours under nitrogen pressure of 2~6 atmospheres to obtain porous silicon nitride ceramics without grain boundary phase.
上述方法中,所述的烧结助剂为氧化铝或三价稀土金属氧化物的至少一种。所述酸沈是用质量浓度96%的HF酸+98%的HNO3酸,60℃水浴2~4h除掉玻璃相;用质量浓度98%的H2SO4酸,60℃水浴1h除掉钇的化合物。所述碱洗是使用质量浓度28%的氨水,69℃1h除掉酸。In the above method, the sintering aid is at least one of alumina or trivalent rare earth metal oxides. The acid precipitation is to remove the glass phase with 96% HF acid+98% HNO3 acid in a 60°C water bath for 2 to 4 hours; to remove the glass phase with 98% H2SO4 acid in a 60°C water bath for 1 hour Yttrium compounds. The alkali washing is to use ammonia water with a mass concentration of 28% at 69° C. for 1 hour to remove acid.
所述酚醛树脂及二氧化硅溶胶的制备方法:取酚醛树脂溶于乙醇中,恒温水浴磁力搅拌,混合均匀,将正硅酸乙酯、无水乙醇、水按摩尔比=1∶2∶3混合,恒温水浴磁力搅拌均匀,加入质量浓度38%的盐酸调节pH值,水解得到二氧化硅溶胶,将两液均匀混合,得到酚醛树脂及二氧化硅的溶胶。The preparation method of the phenolic resin and silica sol: take the phenolic resin and dissolve it in ethanol, magnetically stir in a constant temperature water bath, mix evenly, and mix ethyl orthosilicate, absolute ethanol, and water in a molar ratio=1:2:3 Mix, stir evenly in a constant temperature water bath with magnetic force, add hydrochloric acid with a mass concentration of 38% to adjust the pH value, hydrolyze to obtain a silica sol, and mix the two liquids evenly to obtain a sol of phenolic resin and silica.
本发明是利用常压烧结制备出多孔氮化硅陶瓷试样,保证了氮化硅棒状结构的良好搭接,然后利用碳热还原方法制备出新氮化硅搭结的无晶界相多孔氮化硅陶瓷。The present invention uses normal pressure sintering to prepare a porous silicon nitride ceramic sample, which ensures a good lap joint of the silicon nitride rod-like structure, and then uses a carbothermal reduction method to prepare a new silicon nitride lap joint without grain boundary phase porous nitrogen Silicon ceramics.
本发明的有益效果是,按照本发明的方法,通过配制酚醛树脂及二氧化硅的溶胶,保证浸渗的均匀性。通过调整氮气压力及烧结温度,可以得到具有高气孔率及良好力学性能的无晶界相多孔氮化硅陶瓷。本发明的无晶界相多孔氮化硅陶瓷,与现有多孔氮化硅陶瓷相比,由于没有晶界玻璃相,具有优异的高温性能,可以广泛应用于高温气氛及腐蚀性气氛下的气体分离用过滤器的基体材料,发电用燃气轮机,发动机,航天飞机,天线罩等使用的耐热材料的强化材料,金属基复合材料的强化材料,以及各种绝热,吸音,基板等。The beneficial effect of the present invention is that, according to the method of the present invention, the uniformity of impregnation is ensured by preparing the sol of phenolic resin and silicon dioxide. By adjusting nitrogen pressure and sintering temperature, porous silicon nitride ceramics with high porosity and good mechanical properties can be obtained without grain boundary phase. The grain boundary phase-free porous silicon nitride ceramics of the present invention, compared with the existing porous silicon nitride ceramics, has excellent high-temperature performance due to the lack of grain boundary glass phases, and can be widely used in gases under high-temperature atmospheres and corrosive atmospheres. Base materials for separation filters, reinforcement materials for heat-resistant materials used in gas turbines for power generation, engines, space shuttles, radomes, etc., reinforcement materials for metal matrix composite materials, and various heat insulation, sound absorption, substrates, etc.
附图说明 Description of drawings
图1实施例1常压烧结后试样的XRD图。Fig. 1 is the XRD pattern of the sample after normal pressure sintering in Example 1.
图2实施例1碳热还原后试样的XRD图。Fig. 2 is the XRD pattern of the sample after carbothermal reduction in Example 1.
图3实施例1碳热还原后试样的SEM图The SEM figure of the sample after Fig. 3 embodiment 1 carbothermal reduction
具体实施方式 Detailed ways
以下结合具体实施例对本发明作进一步的详细说明。The present invention will be further described in detail below in conjunction with specific examples.
多孔氮化硅陶瓷,其组成如表1所示,在表1所示的实施例1~9中,氮化硅粉末含量一般在93~95%,烧结助剂的添加量为5~7wt%,添加量超过7wt%,多孔陶瓷的收缩率加大,造成气孔率的减小以及大量的晶间玻璃相。烧结助剂是指在烧结的高温领域内变化成玻璃相的金属氧化物,可以表示为M2O3或MO(M为金属),也包括一种或数种成分的氧化物通过反应能够变为玻璃相的混合物。这样的金属氧化物如表1实施例中采用的Y2O3、Al2O3、Eu2O3或Lu2O3至少一种,根据情况也可以添加几种氧化物的混合物。Porous silicon nitride ceramics, the composition of which is shown in Table 1. In Examples 1 to 9 shown in Table 1, the silicon nitride powder content is generally 93 to 95%, and the amount of sintering aid added is 5 to 7 wt%. , the added amount exceeds 7wt%, the shrinkage rate of porous ceramics increases, resulting in a decrease in porosity and a large number of intercrystalline glass phases. Sintering aids refer to metal oxides that change into glass phases in the high temperature range of sintering, which can be expressed as M 2 O 3 or MO (M is metal), and also include oxides of one or several components that can change into glass phases through reactions. A mixture of glass phases. Such a metal oxide is at least one of Y 2 O 3 , Al 2 O 3 , Eu 2 O 3 or Lu 2 O 3 used in the examples in Table 1, and a mixture of several oxides may also be added according to circumstances.
多孔氮化硅的制备方法:将氮化硅与烧结助剂按表1的配比混合装入球磨罐,以无水乙醇为球磨介质,用氮化硅磨球在滚动球磨机上球磨24h。将混好的料浆在60℃干燥箱中干燥,过200目筛。把制备好的粉末在压力成型机单轴压成条状试样,接着把压好的生坯放着在一个涂有BN的石墨坩埚中,将石墨坩锅放入日本产HIGH-MULTI-5000多功能炉中,在N2气氛中于1750℃下烧结2h,获得气孔率为35-55%的多孔氮化硅试样(实施例1-实施例9)。The preparation method of porous silicon nitride: mix silicon nitride and sintering aid according to the ratio in Table 1 and put them into a ball milling tank, use absolute ethanol as the ball milling medium, and use silicon nitride balls to mill on a rolling ball mill for 24 hours. The mixed slurry was dried in a 60°C drying oven and passed through a 200-mesh sieve. The prepared powder is uniaxially pressed into a strip sample in a pressure forming machine, and then the pressed green body is placed in a graphite crucible coated with BN, and the graphite crucible is placed in a Japanese-made HIGH-MULTI-5000 In a multifunctional furnace, sinter at 1750° C. for 2 h in N atmosphere to obtain a porous silicon nitride sample with a porosity of 35-55% (Example 1-Example 9).
无晶界的氮化硅基体试样制备方法:将表1实施例1-实施例9制备气孔率为35-55%的多孔氮化硅试样用96%浓HF酸+98%浓HNO3酸,温度60℃,水浴2~4h,酸洗除掉玻璃相;98%浓H2SO4酸,60℃1h,酸洗除掉钇的化合物;28%浓氨,温度69℃,时间1h,碱洗除掉酸,制备出无晶界的氮化硅基体试样。Preparation method of the silicon nitride substrate sample without grain boundary: use 96% concentrated HF acid+98% concentrated HNO3 to prepare a porous silicon nitride sample with a porosity of 35-55% in Table 1, Example 1-Example 9 Acid,
溶胶的制备方法:取酚醛树脂(70%C)溶于乙醇中,恒温水浴磁力搅拌,混合均匀。将正硅酸乙酯(TEOS,密度为0.933g·mL-1),无水乙醇(密度为0.79g·mL-1),水按一定的比例混合,(摩尔比比例为1∶2∶3),恒温水浴磁力搅拌均匀,加入盐酸(密度为1.19g·mL-1,质量百分比浓度约为38%),调节pH值,盐酸用量为HCl/TEOS=0.01mol(摩尔比),进行水解,得到二氧化硅溶胶,将两混合液均匀混合,制备出酚醛树脂及二氧化硅的溶胶。The preparation method of the sol: take the phenolic resin (70%C) and dissolve it in ethanol, stir it magnetically in a constant temperature water bath, and mix evenly. Mix tetraethyl orthosilicate (TEOS, density: 0.933g·mL -1 ), absolute ethanol (density: 0.79g·mL -1 ), water in a certain ratio, (the molar ratio is 1:2:3 ), stir evenly in a constant temperature water bath, add hydrochloric acid (density is 1.19g·mL −1 , mass percentage concentration is about 38%), adjust the pH value, the amount of hydrochloric acid is HCl/TEOS=0.01mol (molar ratio), carry out hydrolysis, The silicon dioxide sol is obtained, and the two mixtures are uniformly mixed to prepare a sol of phenolic resin and silicon dioxide.
酚醛树脂裂解的碳与正硅酸乙酯水解的二氧化硅的摩尔比为1∶3~3∶1。碳热还原反应中,碳与二氧化硅的最佳摩尔比为2,当小于1时,由于碳含量少,因此可以生成氮化硅与二氧化硅的复合陶瓷,当大于3时,碳含量增多,烧失重增加,大大影响无晶界相多孔氮化硅陶瓷的强度,碳与二氧化硅容易形成碳化硅,因此选摩尔比在1~3。The molar ratio of the carbon cracked by the phenolic resin to the silicon dioxide hydrolyzed by the ethyl orthosilicate is 1:3-3:1. In the carbothermal reduction reaction, the optimum molar ratio of carbon to silicon dioxide is 2. When it is less than 1, the composite ceramics of silicon nitride and silicon dioxide can be produced due to the low carbon content. When it is greater than 3, the carbon content The increase of carbon dioxide will increase the weight loss on ignition, which will greatly affect the strength of porous silicon nitride ceramics without grain boundary phase. Carbon and silicon dioxide are easy to form silicon carbide, so the molar ratio is selected at 1-3.
将酸洗后的无晶界氮化硅基体试样实施例1-实施例9浸入到不同碳与二氧化硅摩尔比的溶胶中(表1),多次浸渗,直到饱和。烘干后放入多功能气氛炉中,以5~30度/分的升温速度加热1200℃,通入氮气,1~2h后升至1400~1600℃,1~4h后升至1750-1800℃,在氮气压力为2~6个大气压下保温1~2小时,即获得无晶界相多孔氮化硅陶瓷。The sample examples 1 to 9 of the grain boundary-free silicon nitride matrix after pickling were immersed in sols with different molar ratios of carbon to silicon dioxide (Table 1), and soaked several times until saturated. After drying, put it into a multi-functional atmosphere furnace, heat at 1200°C at a heating rate of 5-30°C/min, pass in nitrogen, rise to 1400-1600°C after 1-2 hours, and rise to 1750-1800°C after 1-4 hours , keep the heat for 1-2 hours under the nitrogen pressure of 2-6 atmospheres to obtain porous silicon nitride ceramics without grain boundary phase.
上述成形体的烧结温度是在氮气气氛下至1750-1800℃。如果温度不到1750度,氮化硅相转变不能彻底完成。如果温度超过1800℃,可能会会使氮化硅晶粒异常长大,造成颗粒的不均匀,力学性能下降。在碳热还原反应中,碳与二氧化硅可以高温反应碳化硅,因此可以通过提高氮气压力来阻止碳化硅的形成。保温时间小于1小时,氮化硅的相转变不充分,根据XRD可知,保温2小时α-β相转变已经完全完成,时间延长,造成能源的浪费,因此保温时间最好在1-2小时。The sintering temperature of the molded body is 1750-1800° C. under nitrogen atmosphere. If the temperature is less than 1750 degrees, the silicon nitride phase transformation cannot be completely completed. If the temperature exceeds 1800°C, the silicon nitride grains may grow abnormally, resulting in uneven grains and a decrease in mechanical properties. In the carbothermal reduction reaction, carbon and silicon dioxide can react with silicon carbide at high temperature, so the formation of silicon carbide can be prevented by increasing the nitrogen pressure. If the holding time is less than 1 hour, the phase transition of silicon nitride is not sufficient. According to XRD, the α-β phase transformation has been completely completed after 2 hours of holding time. The prolonged time will cause waste of energy. Therefore, the holding time is preferably 1-2 hours.
用电子天平测量试样质量,三点弯曲法测量弯曲强度。阿基米德排水法测定开气孔率。X射线衍射(XRD)仪分析物相。用扫描电镜(SEM)观察试样的显微结构。表1本发明实施例1-9的组成及烧结工艺条件。表2本发明多孔氮化硅陶瓷的测试性能。实施例1常压烧结后试样的XRD图如图1所示,碳热还原后试样的XRD图如图2所示,SEM图如图3所示。The quality of the sample was measured with an electronic balance, and the bending strength was measured by the three-point bending method. The Archimedes drainage method was used to determine the open porosity. X-ray diffraction (XRD) analysis of the phase. The microstructure of the samples was observed with a scanning electron microscope (SEM). Table 1 Composition and sintering process conditions of Examples 1-9 of the present invention. Table 2 Test performance of porous silicon nitride ceramics of the present invention. Example 1 The XRD pattern of the sample after normal pressure sintering is shown in FIG. 1 , the XRD pattern of the sample after carbothermal reduction is shown in FIG. 2 , and the SEM pattern is shown in FIG. 3 .
表1本发明实施例1-9的组成及烧结工艺条件Table 1 Composition and sintering process conditions of Examples 1-9 of the present invention
表2本发明多孔氮化硅陶瓷的测试性能Table 2 Test performance of porous silicon nitride ceramics of the present invention
表2可以看出:酸洗后基体质量减少5~10%,浸渗后试样的增重为9~14%,碳热还原后质量减少4~7%,因此基本补上腐蚀掉的质量,酸洗后试样的气孔率增加2~3%。1750~1800℃的温度烧结范围内,材料在35-55%的气孔率下表现出了很高的弯曲强度,最高可达220.67MPa。随着酚醛树脂中裂解的碳与二氧化硅摩尔比增加,质量损失增加。试样腐蚀后,连接氮化硅棒状结构间的玻璃相腐蚀掉了,只剩下棒状结构,而且之间没有搭接,所以强度降低,几乎降为原先强度的一半。当基体试样渗入酚醛树脂及二氧化硅后,酚醛树脂裂解的碳与二氧化硅以及氮气碳热还原反应生成氮化硅,把棒状氮化硅重新搭接起来,所以强度升高,与原烧结样品几乎同样强度水平的无晶界相多孔氮化硅陶瓷。It can be seen from Table 2 that the mass of the matrix decreases by 5-10% after pickling, the weight gain of the sample after impregnation is 9-14%, and the mass decreases by 4-7% after carbothermal reduction, so the corroded mass is basically replenished , The porosity of the sample increased by 2-3% after pickling. In the sintering temperature range of 1750-1800°C, the material exhibits high bending strength at a porosity of 35-55%, up to 220.67MPa. The mass loss increases as the molar ratio of cracked carbon to silica in the phenolic resin increases. After the sample was corroded, the glass phase connecting the silicon nitride rod-like structures was corroded, leaving only the rod-like structures, and there was no overlap between them, so the strength was reduced, almost to half of the original strength. When the matrix sample is infiltrated with phenolic resin and silicon dioxide, the carbon decomposed by the phenolic resin reacts with silicon dioxide and nitrogen carbothermal reduction to form silicon nitride, and the rod-shaped silicon nitride is rejoined, so the strength increases, which is similar to the original The sintered samples have almost the same level of strength as the grain boundary phase-free porous silicon nitride ceramics.
图1可以看出:常压烧结样品主晶相为β-Si3N4,还有少量的晶界晶体相Y2Si3O3N4。这表明α-Si3N4已经全部转变成β-Si3N4,相变已经完成,少量的Y2Si3O3N4是由Y2O3和Si3N4及SiO2反应生成的。除此之外,由于烧结助剂参与了液相的形成,因此在最终烧结后一部分以无定形玻璃晶界相的形式存在于烧结试样中。It can be seen from Figure 1 that the main crystal phase of the atmospheric pressure sintered sample is β-Si 3 N 4 , and there is a small amount of grain boundary crystal phase Y 2 Si 3 O 3 N 4 . This shows that α-Si 3 N 4 has been completely transformed into β-Si 3 N 4 , the phase transition has been completed, and a small amount of Y 2 Si 3 O 3 N 4 is formed by the reaction of Y 2 O 3 with Si 3 N 4 and SiO 2 of. In addition, since the sintering aid participated in the formation of the liquid phase, part of the amorphous glass grain boundary phase existed in the sintered sample after final sintering.
图2可以看出:碳热还原烧结XRD中只有β-Si3N4的衍射峰,说明试样的成分是β-Si3N4,而没有出现SiC的衍射峰,说明在氮气气氛下,酚醛树脂裂解的碳与二氧化硅及氮气碳热还原反应生成β-Si3N4,高的氮气压力可以促进氮化硅的形成,而抑制碳化硅的形成。It can be seen from Figure 2 that there is only the diffraction peak of β-Si 3 N 4 in the carbothermal reduction sintering XRD, indicating that the composition of the sample is β-Si 3 N 4 , and no diffraction peak of SiC appears, indicating that under nitrogen atmosphere, Carbon decomposed by phenolic resin reacts with silicon dioxide and nitrogen carbothermal reduction to generate β-Si 3 N 4 . High nitrogen pressure can promote the formation of silicon nitride and inhibit the formation of silicon carbide.
图3可以看出:新生成的棒状晶粒把原先氮化硅棒状晶互相搭接起来,提高了试样的强度,因此可以制备出无晶界相的多孔氮化硅陶瓷。It can be seen from Figure 3 that the newly formed rod-shaped grains overlap the original silicon nitride rod-shaped grains, which improves the strength of the sample, so porous silicon nitride ceramics without grain boundary phase can be prepared.
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