CN101398610B - Treatment fluid for removing black defect in plate or film and treatment method - Google Patents
Treatment fluid for removing black defect in plate or film and treatment method Download PDFInfo
- Publication number
- CN101398610B CN101398610B CN2008102169593A CN200810216959A CN101398610B CN 101398610 B CN101398610 B CN 101398610B CN 2008102169593 A CN2008102169593 A CN 2008102169593A CN 200810216959 A CN200810216959 A CN 200810216959A CN 101398610 B CN101398610 B CN 101398610B
- Authority
- CN
- China
- Prior art keywords
- film
- dry plate
- dichromate
- black
- defective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000012530 fluid Substances 0.000 title claims description 27
- 230000007547 defect Effects 0.000 title abstract description 29
- 238000000034 method Methods 0.000 title abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 20
- 239000008367 deionised water Substances 0.000 claims abstract description 16
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 16
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 claims abstract description 15
- 230000002950 deficient Effects 0.000 claims description 51
- 239000003814 drug Substances 0.000 claims description 22
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 16
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 14
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 claims description 14
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 13
- 239000011707 mineral Substances 0.000 claims description 13
- 230000002829 reductive effect Effects 0.000 claims description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 12
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- 239000002253 acid Substances 0.000 claims description 9
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 6
- 239000012467 final product Substances 0.000 claims description 6
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 claims description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims description 6
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 6
- 229910001948 sodium oxide Inorganic materials 0.000 claims description 6
- 235000014347 soups Nutrition 0.000 claims description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052744 lithium Inorganic materials 0.000 claims description 5
- KIEOKOFEPABQKJ-UHFFFAOYSA-N sodium dichromate Chemical compound [Na+].[Na+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KIEOKOFEPABQKJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000009736 wetting Methods 0.000 claims description 2
- 239000000839 emulsion Substances 0.000 abstract description 5
- 238000011109 contamination Methods 0.000 abstract description 3
- 239000003153 chemical reaction reagent Substances 0.000 abstract 4
- 239000007788 liquid Substances 0.000 abstract 4
- 239000004615 ingredient Substances 0.000 abstract 1
- 150000007522 mineralic acids Chemical class 0.000 abstract 1
- 206010027146 Melanoderma Diseases 0.000 description 23
- 229920000742 Cotton Polymers 0.000 description 16
- 239000000428 dust Substances 0.000 description 16
- 239000004744 fabric Substances 0.000 description 16
- 239000000047 product Substances 0.000 description 11
- 239000003643 water by type Substances 0.000 description 8
- MCUDGYVHPADJBD-UHFFFAOYSA-L hydroxy-(hydroxy(dioxo)chromio)oxy-dioxochromium sulfuric acid Chemical compound OS(O)(=O)=O.O[Cr](=O)(=O)O[Cr](O)(=O)=O MCUDGYVHPADJBD-UHFFFAOYSA-L 0.000 description 6
- 235000019441 ethanol Nutrition 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- -1 silver halide Chemical class 0.000 description 2
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- RGCZKLWMKZEZNW-UHFFFAOYSA-L [Cr](=O)(=O)(O)O[Cr](=O)(=O)O.[N+](=O)(O)[O-] Chemical compound [Cr](=O)(=O)(O)O[Cr](=O)(=O)O.[N+](=O)(O)[O-] RGCZKLWMKZEZNW-UHFFFAOYSA-L 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000010946 fine silver Substances 0.000 description 1
- VEDYVYBWEVCBOL-UHFFFAOYSA-L hydroxy-(hydroxy(dioxo)chromio)oxy-dioxochromium hydrochloride Chemical compound [Cr](=O)(=O)(O)O[Cr](=O)(=O)O.Cl VEDYVYBWEVCBOL-UHFFFAOYSA-L 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Images
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Medicinal Preparation (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008102169593A CN101398610B (en) | 2008-10-23 | 2008-10-23 | Treatment fluid for removing black defect in plate or film and treatment method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008102169593A CN101398610B (en) | 2008-10-23 | 2008-10-23 | Treatment fluid for removing black defect in plate or film and treatment method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101398610A CN101398610A (en) | 2009-04-01 |
CN101398610B true CN101398610B (en) | 2011-07-27 |
Family
ID=40517246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008102169593A Active CN101398610B (en) | 2008-10-23 | 2008-10-23 | Treatment fluid for removing black defect in plate or film and treatment method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101398610B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111303883B (en) * | 2019-10-28 | 2021-12-14 | 芯思杰技术(深圳)股份有限公司 | A kind of etching solution and preparation method of chip mesa |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1047527A (en) * | 1990-06-05 | 1990-12-05 | 北京炼焦化学厂工商服务开发总公司 | Clean-out system |
US5118356A (en) * | 1990-11-19 | 1992-06-02 | Eastman Kodak Company | Process for cleaning a photographic processing device |
US5441665A (en) * | 1992-08-19 | 1995-08-15 | Medefield Pty Ltd | Photographic equipment cleaner |
CN1249533A (en) * | 1998-09-25 | 2000-04-05 | 住友电气工业株式会社 | Epitaxial wafer, its mfg method and method for surficial cleaning of compound semiconductor substrate |
-
2008
- 2008-10-23 CN CN2008102169593A patent/CN101398610B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1047527A (en) * | 1990-06-05 | 1990-12-05 | 北京炼焦化学厂工商服务开发总公司 | Clean-out system |
US5118356A (en) * | 1990-11-19 | 1992-06-02 | Eastman Kodak Company | Process for cleaning a photographic processing device |
US5441665A (en) * | 1992-08-19 | 1995-08-15 | Medefield Pty Ltd | Photographic equipment cleaner |
CN1249533A (en) * | 1998-09-25 | 2000-04-05 | 住友电气工业株式会社 | Epitaxial wafer, its mfg method and method for surficial cleaning of compound semiconductor substrate |
Also Published As
Publication number | Publication date |
---|---|
CN101398610A (en) | 2009-04-01 |
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Treatment fluid for removing black defect in plate or film and treatment method Effective date of registration: 20131023 Granted publication date: 20110727 Pledgee: Shenzhen SME credit financing guarantee Group Co., Ltd. Pledgor: Qingyi Precision Maskmaking (Shenzhen) Co., Ltd. Registration number: 2013990000769 |
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PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20150616 Granted publication date: 20110727 Pledgee: Shenzhen SME credit financing guarantee Group Co., Ltd. Pledgor: Qingyi Precision Maskmaking (Shenzhen) Co., Ltd. Registration number: 2013990000769 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Treatment fluid for removing black defect in plate or film and treatment method Effective date of registration: 20150623 Granted publication date: 20110727 Pledgee: Shenzhen SME credit financing guarantee Group Co., Ltd. Pledgor: Qingyi Precision Maskmaking (Shenzhen) Co., Ltd. Registration number: 2015990000498 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20160607 Granted publication date: 20110727 Pledgee: Shenzhen SME credit financing guarantee Group Co., Ltd. Pledgor: Qingyi Precision Maskmaking (Shenzhen) Co., Ltd. Registration number: 2015990000498 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model |