CN101339026A - All-solid-state dual-axis gyroscope with square through-hole piezoelectric vibrator - Google Patents
All-solid-state dual-axis gyroscope with square through-hole piezoelectric vibrator Download PDFInfo
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Abstract
一种微机电技术领域的具有正方形通孔压电振子的全固态双轴陀螺仪，包括压电振子和驱动电极，输出电极，模态检测电极。振子结构为具有正方形通孔的“回”型柱状体。“回”型内外边界为两个正方形。所有电极在压电振子的上下两个表面关于压电振子对称摆布。利用压电体在一定频率下的特殊模态下的振动作为工作状态，在两个方向上，均有压电振子的上下表面的特殊位置在运动方向相反。当外界有角速度时，运动方向相反位置产生方向相反的柯氏力，使压电振子拉伸或压缩，产生电势。通过检测输出电极上的电势检测外界双轴的角速度。本发明结构简单，抗冲击性强，不需要真空封装，具有方便固定的节点，双轴检敏感，加工工艺简单，不需要高速转动节省功耗。
An all-solid-state biaxial gyroscope with a square through-hole piezoelectric vibrator in the field of micro-electromechanical technology, including a piezoelectric vibrator, a driving electrode, an output electrode, and a mode detection electrode. The vibrator structure is a "back" columnar body with square through holes. The inner and outer boundaries of the "back" type are two squares. All the electrodes are arranged symmetrically on the upper and lower surfaces of the piezoelectric vibrator with respect to the piezoelectric vibrator. Using the vibration of the piezoelectric body in a special mode at a certain frequency as the working state, in two directions, the special positions of the upper and lower surfaces of the piezoelectric vibrator are opposite to the direction of motion. When there is angular velocity in the outside world, the opposite direction of motion will generate Coriolis force in opposite direction, so that the piezoelectric vibrator will be stretched or compressed to generate electric potential. The angular velocity of the external two axes is detected by detecting the potential on the output electrode. The invention has the advantages of simple structure, strong impact resistance, no need for vacuum packaging, convenient and fixed nodes, sensitive biaxial detection, simple processing technology, no need for high-speed rotation and power consumption saving.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, and specifically, what relate to is a kind of all solid dual spindle gyroscopes with square through-hole piezoelectric vibrator.
Background technology
Gyro is the core devices of attitude control and inertial guidance, the raising of guidance demands such as the development of inertial technology and satellite, guided missile, require that gyro is little to power, the life-span is long, volume is little, the direction that can adapt to various rugged surroundings develops.
Find through literature search prior art, (number of patent application is Chinese patent " piezoelectric gyro element and piezoelectric gyroscope ": 200510131905.3) mention the structure that can pass through the prism-shaped vibrating mass of piezoelectric, detect the angular velocity on 2 direction of principal axis.The cross section is that piezoelectric transducer one end of the prism-shaped of rectangle is fixed, on its 1st side, form the 1st drive electrode, on the 2nd side, be formed on the 2nd～the 4th drive electrode that separates on the Width, band phase differential ground applies drive current to each drive electrode, make the piezoelectric transducer vibration, its other end moves in a circle.With the direction of the rotary middle spindle quadrature of its vibration on effect when moment of torsion is arranged, the 2nd detecting electrode that the 1st detecting electrode that forms from the 1st side of piezoelectric transducer and the 2nd side form is exported the amount of deflection of consequent piezoelectric transducer, thereby detects the angular velocity on 2 direction of principal axis.
There is following deficiency in this technology: at first, driving circuit requires repeatedly phase shift, and some driving circuit also comprises amplitude detecting circuit, agc circuit, it is high that control is required, and the circuit complexity, disturbs greatly, and noise is many, be difficult to obtain desirable drive signal.Secondly, make piezoelectrics self produce circular motion as the reference motion by apply four different phase drive signals of phase place on four different electrodes, the circular motion of rule is difficult to be realized accurately, has increased the error of angular velocity detection.Guarantee that the piezoelectrics rotation obtains the high speed circular motion, power consumption is big.
Summary of the invention
The objective of the invention is deficiency, a kind of all solid dual spindle gyroscopes with square through-hole piezoelectric vibrator is provided at prior art.It utilizes the special vibration under the distinctive mode of piezoelectric vibrator to vibrate as the reference of oscillation gyro, realizes gyro twin shaft sensitivity.Do not need accurate high speed circular revolution during work, the little and easily accurately realization of power consumption.Directly utilize the piezoelectric effect of piezoelectric vibrator to obtain voltage signal, as the detection signal of extraneous angular velocity.The present invention is simple in structure, do not need Vacuum Package, impact resistance is strong, can work well under rugged surroundings and processing technology easily realizes.Whether in addition, the present invention is provided with the mode detecting electrode, can the testing state accurate, reduces error theoretical and practical devices, drives simple and convenient.
The present invention is achieved by the following technical solutions, the present invention includes piezoelectric vibrator, drive electrode, output electrode, mode detecting electrode.
Vibrator material is a piezoelectric, and structure is " returning " type column with square through-hole, and " returning " type inner and outer boundary is two squares.Piezoelectric vibrator wherein one " returning " type surface is the piezoelectric vibrator upper surface, another " return " the type surface is the piezoelectric vibrator lower surface.The piezoelectric vibrator upper surface is parallel with the piezoelectric vibrator lower surface, and linking to each other of four points of piezoelectric vibrator upper surface and piezoelectric vibrator lower surface ragged edge constitutes a rectangular parallelepiped just.
The limit of the square that piezoelectric vibrator upper surface housing forms (square that the outer boundary on " returning " type surface forms) upside is upper surface first limit, the limit on the square right side that piezoelectric vibrator upper surface housing forms is upper surface second limit, the limit of the square downside that piezoelectric vibrator upper surface housing forms is upper surface the 3rd limit, the limit in the square left side that piezoelectric vibrator upper surface housing forms is upper surface the 4th limit, the limit of the square upside that piezoelectric vibrator lower surface housing forms is lower surface first limit, the bar limit on the square right side that piezoelectric vibrator lower surface housing forms is lower surface second limit, the limit of the square downside that piezoelectric vibrator lower surface housing forms is lower surface the 3rd limit, the limit in the square left side that piezoelectric vibrator lower surface housing forms is lower surface the 4th limit.And upper surface first limit parallel with lower surface first limit, upper surface first limit and lower surface first limit are positioned on the same surface of piezoelectric vibrator, and the line of the mid point on the mid point on upper surface first limit and upper surface the 3rd limit is that the line of the mid point on the mid point on upper surface first center line, upper surface second limit and upper surface the 4th limit is that the line of the mid point on the mid point on upper surface second center line, lower surface first limit and lower surface the 3rd limit is that the line of the mid point on the mid point on lower surface first center line, lower surface second limit and lower surface the 4th limit is lower surface second center line.
Described drive electrode comprises upper surface lower-left side drive electrode, upper surface upper right side drive electrode, lower surface lower-left side drive electrode, lower surface upper right side drive electrode.
Described output electrode comprises upper surface upside output electrode, upper surface right side output electrode, upper surface downside output electrode, upper surface left side output electrode, lower surface upside output electrode, lower surface right side output electrode, lower surface downside output electrode, lower surface left side output electrode.
Described mode detecting electrode comprises upper surface mode detecting electrode, lower surface mode detecting electrode.
Wherein upper surface upside output electrode, upper surface downside output electrode are positioned on upper surface first center line, upper surface upside output electrode and upper surface downside output electrode are symmetrically distributed about upper surface second center line, and the outward flange of close piezoelectric vibrator upper surface; Upper surface right side output electrode, upper surface left side output electrode are positioned on upper surface second center line, and upper surface right side output electrode and upper surface left side output electrode are symmetrically distributed about upper surface first center line, and the outward flange of close piezoelectric vibrator upper surface; Upper surface lower-left side drive electrode and upper surface upper right side drive electrode are positioned at piezoelectric vibrator upper surface housing and form on the foursquare clinodiagonal; Upper surface mode detecting electrode is positioned at piezoelectric vibrator upper surface housing and forms a foursquare other clinodiagonal end points place.Lower surface upside output electrode, lower surface downside output electrode are positioned on lower surface first center line, and lower surface upside output electrode and lower surface downside output electrode are symmetrically distributed about lower surface second center line, and the outward flange of close piezoelectric vibrator lower surface; Lower surface right side output electrode, lower surface left side output electrode are positioned on lower surface second center line, and lower surface right side output electrode and lower surface left side output electrode are symmetrically distributed about lower surface first center line, and the outward flange of close piezoelectric vibrator lower surface; Lower surface lower-left side drive electrode and lower surface upper right side drive electrode are positioned at piezoelectric vibrator lower surface housing and form on the foursquare clinodiagonal; Lower surface mode detecting electrode is positioned at the end points place that piezoelectric vibrator lower surface housing forms a foursquare other clinodiagonal.The line of upper surface upper left side drive electrode and lower surface lower-left side drive electrode, the line of upper surface upper right side drive electrode and lower surface upper right side drive electrode, the line of upper surface upside output electrode and lower surface upside output electrode, the line of upper surface right side output electrode and lower surface right side output electrode, the line of upper surface downside output electrode and lower surface downside output electrode, the line of upper surface left side output electrode and lower surface left side output electrode, the line of upper surface mode detecting electrode and lower surface mode detecting electrode all with the upper surface of piezoelectric vibrator, the piezoelectric vibrator lower surface is vertical.
Limit parallel with the Z axle of piezoelectric vibrator is piezoelectric vibrator first limit, and next bar of clockwise direction limit parallel with the Z axle is piezoelectric vibrator second limit, is followed successively by piezoelectric vibrator the 3rd limit, piezoelectric vibrator the 4th limit.Through finite element analysis, finding has four some vibration displacements very little under operational vibration mode.Therefore gyroscope of the present invention selects for use these four points as node (node is a point of fixity), and its position is respectively on piezoelectric vibrator first limit mid point and the piezoelectric vibrator second limit mid point line apart from 1/4 point of the piezoelectric vibrator first limit mid point distance for the piezoelectric vibrator upper surface square length of side, be 1/4 point of the square length of side of piezoelectric vibrator upper surface apart from piezoelectric vibrator second limit mid point distance on piezoelectric vibrator first limit mid point and the piezoelectric vibrator second limit mid point line, be 1/4 point of the square length of side of piezoelectric vibrator upper surface apart from piezoelectric vibrator the 3rd limit mid point distance on piezoelectric vibrator the 3rd limit mid point and piezoelectric vibrator the 4th limit mid point line, be 1/4 point of the square length of side of piezoelectric vibrator upper surface apart from piezoelectric vibrator the 4th limit mid point distance on piezoelectric vibrator the 3rd limit mid point and piezoelectric vibrator the 4th limit mid point line.
The present invention utilizes the piezoelectric property of piezoelectric vibrator under special mode to carry out angular velocity detection.Between drive electrode, add alternating voltage when excitation (being in certain mode) of certain frequency, can produce a kind of special vibration, wherein piezoelectric vibrator is opposite with the position direction of vibration at lower surface upside output electrode place at the direction of vibration of upper surface upside output electrode position.When the external world was subjected to the angular velocity vertical with direction of motion, the direction of suffered Ke Shi power was opposite, and in the vertical direction produces move toward one another, made piezoelectric vibrator produce and stretched or compression.Finally make upper surface upside output electrode and lower surface upside output electrode that certain electromotive force is all arranged, the size of electromotive force is directly proportional with the size of extraneous angular velocity.Therefore can detect angular velocity by the electromotive force of upper surface upside output electrode and lower surface upside output electrode, and then the electromotive force of upper surface downside output electrode and lower surface downside output electrode also is the detection signal of the extraneous angular velocity of this direction.Piezoelectric vibrator upper surface left side output electrode is vertical with the direction of motion of upper surface upside output electrode position, in like manner with the electromotive force and the electromotive force of lower surface right side output electrode of upper surface left side output electrode, and on the left of upper surface right side output electrode electromotive force and the lower surface electromotive force of output electrode as the detection signal of another deflection speed.Through finite element analysis, the resonant frequency 442413Hz of this mode, the vibration maximum displacement of responsive both direction angular velocity (arranging the output electrode place) is respectively 0.225761E-07m, 0.194765E-07m.
The present invention since adopt block piezoelectric vibrator, simple in structure, do not need Vacuum Package, impact resistance strong, can under rugged surroundings, well work and processing technology easily realizes.The present invention utilizes the special vibration under the special mode to vibrate as reference, and the voltage signal that the direct piezo electric effect of the piezoelectrics of high tension electricity coefficient produces can detect the angular velocity of extraneous biaxially oriented exactly as detection signal.The present invention can be applied in fields such as satellite, weapon, civil navigation.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment is by piezoelectric vibrator 1, upper surface lower-left side drive electrode 2, upper surface upper right side drive electrode 3, upper surface upside output electrode 4, upper surface right side output electrode 5, upper surface downside output electrode 6, upper surface left side output electrode 7, upper surface mode detecting electrode 8; Lower surface lower-left side drive electrode 9, lower surface upper right side drive electrode 10, lower surface upside output electrode 11, lower surface right side output electrode 12, lower surface downside output electrode 13, lower surface left side output electrode 14, lower surface mode detecting electrode 15 are formed.
All electrodes are arranged upper surface lower-left side drive electrode 2, upper surface upper right side drive electrode 3, upper surface upside output electrode 4, upper surface right side output electrode 5, upper surface downside output electrode 6, upper surface left side output electrode 7, upper surface mode detecting electrode 8 up and down all about the piezoelectric vibrator symmetry on the piezoelectric upper surface; On the lower surface of piezoelectric vibrator, arrange lower surface lower-left side drive electrode 9, lower surface upper right side drive electrode 10, lower surface upside output electrode 11, lower surface right side output electrode 12, lower surface downside output electrode 13, lower surface left side output electrode 14, the limit upper surface that lower surface mode detecting electrode 15. piezoelectric vibrator upper surface housings form square (square that the outer boundary on " returning " type surface forms) upside is first limit 16, the limit that piezoelectric vibrator upper surface housing forms square right side is upper surface second limit 17, the limit that piezoelectric vibrator upper surface housing forms square downside is upper surface the 3rd limit 18, the limit that piezoelectric vibrator upper surface housing forms the square left side is upper surface the 4th limit 19, the limit that piezoelectric vibrator lower surface housing forms square upside is lower surface first limit 20, it is lower surface second limit 21 that piezoelectric vibrator lower surface housing forms article one limit, square right side, the limit that piezoelectric vibrator lower surface housing forms square downside is lower surface the 3rd limit 22, the limit that piezoelectric vibrator lower surface housing forms square left side is lower surface the 4th limit 23, and parallel and upper surface first limit 16, upper surface first limit 16 and lower surface first limit 20 and lower surface first limit 20 are positioned on the piezoelectric vibrator 1 same surface.The line of the mid point on the mid point on upper surface first limit 16 and upper surface the 3rd limit 18 is upper surface first center line, the line of the mid point on the mid point on upper surface second limit 17 and upper surface the 4th limit 19 is upper surface second center line, the line of the mid point on the mid point on lower surface first limit 20 and lower surface the 3rd limit 22 is lower surface first center line, and the line of the mid point on the mid point on lower surface second limit 21 and lower surface the 4th limit 23 is lower surface second center line.
Electrode position distributes: upper surface upside output electrode 4, upper surface downside output electrode 6 are positioned on upper surface first center line, upper surface upside output electrode 4 is symmetrically distributed about upper surface second center line with upper surface downside output electrode 6, and the outward flange of close piezoelectric vibrator 1 upper surface; Upper surface right side output electrode 5, upper surface left side output electrode 7 are positioned on upper surface second center line, upper surface right side output electrode 5 is symmetrically distributed about upper surface first center line with upper surface left side output electrode 7, and the outward flange of close piezoelectric vibrator upper surface; Upper surface lower-left side drive electrode 2 is positioned at piezoelectric vibrator upper surface housing with upper surface upper right side drive electrode 3 and forms on the foursquare clinodiagonal; Upper surface mode detecting electrode 8 is positioned at the end points place that piezoelectric vibrator upper surface housing forms a foursquare other clinodiagonal.Lower surface upside output electrode 11, lower surface downside output electrode 13 are positioned on lower surface first center line, lower surface upside output electrode 11 is symmetrically distributed about lower surface second center line with lower surface downside output electrode 13, and the outward flange of close piezoelectric vibrator lower surface; Lower surface right side output electrode 12, lower surface left side output electrode 14 are positioned on lower surface second center line, lower surface right side output electrode 12 is symmetrically distributed about lower surface first center line with lower surface left side output electrode 14, and the outward flange of close piezoelectric vibrator lower surface; Lower surface lower-left side drive electrode 9 is positioned at piezoelectric vibrator lower surface housing with lower surface upper right side drive electrode 10 and forms on the foursquare clinodiagonal; Lower surface mode detecting electrode position 15 forms the end points place of a foursquare other clinodiagonal in piezoelectric vibrator lower surface housing.The line of upper surface lower-left side drive electrode 2 and lower surface lower-left side drive electrode 9, the line of upper surface upper right side drive electrode 3 and lower surface upper right side drive electrode 10, the line of upper surface upside output electrode 4 and lower surface upside output electrode 11, the line of upper surface right side output electrode 5 and lower surface right side output electrode 12, the line of upper surface downside output electrode 6 and lower surface downside output electrode 13, the line of upper surface left side output electrode 7 and lower surface left side output electrode 14, the line of upper surface mode detecting electrode 8 and lower surface mode detecting electrode 15 all with the piezoelectric vibrator upper surface, the piezoelectric vibrator lower surface is vertical.
Limit parallel with the Z axle of piezoelectric vibrator is piezoelectric vibrator first limit, and next bar of clockwise direction limit parallel with the Z axle is piezoelectric vibrator second limit, is followed successively by piezoelectric vibrator the 3rd limit, piezoelectric vibrator the 4th limit.Through finite element analysis, finding has four some vibration displacements very little under operational vibration mode.Therefore the present embodiment gyroscope selects for use these four points as node (node is a point of fixity), and its position is respectively on piezoelectric vibrator first limit mid point and the piezoelectric vibrator second limit mid point line apart from 1/4 point of the piezoelectric vibrator first limit mid point distance for the piezoelectric vibrator upper surface square length of side, be 1/4 point of the square length of side of piezoelectric vibrator upper surface apart from piezoelectric vibrator second limit mid point distance on piezoelectric vibrator first limit mid point and the piezoelectric vibrator second limit mid point line, be 1/4 point of the square length of side of piezoelectric vibrator upper surface apart from piezoelectric vibrator the 3rd limit mid point distance on piezoelectric vibrator the 3rd limit mid point and piezoelectric vibrator the 4th limit mid point line, be 1/4 point of the square length of side of piezoelectric vibrator upper surface apart from piezoelectric vibrator the 4th limit mid point distance on piezoelectric vibrator the 3rd limit mid point and piezoelectric vibrator the 4th limit mid point line.
The processing technology of present embodiment is simple, at first adopts powder sintering to prepare block piezoelectrics, and the test portion that proportioning is good places crucible and with its compacting, in the high temperature cabinet-type electric furnace, heating a period of time just can obtain block piezoelectrics under required temperature.Block piezoelectric is cut, grind and just obtain piezoelectric vibrator.Then with piezoelectric vibrator as matrix, adopt MEMS (MEMS (micro electro mechanical system)) technology utilization photoresist as mask, photoresist is carried out electrosilvering after graphical obtains electrode (wherein double-face electrode adopts the double-sided alignment principle).
Present embodiment utilize piezoelectric vibrator under special mode vibration as the reference of oscillation gyro vibration, with the voltage signal of the piezoelectric effect generation of piezoelectric vibrator detection signal itself as angular velocity.X-axis is the upper surface left side output electrode 7 and upper surface right side output electrode 5 lines of centres, the Y-axis upper surface upside output electrode 4 and upper surface downside output electrode 6 lines of centres, and X-axis, Y-axis, Z axle meet the right-hand rule.When between upper surface lower-left side drive electrode 2 and upper surface upper right side drive electrode 3, reaching the alternating voltage excitation that adds certain frequency between lower surface lower-left side drive electrode 9 and the lower surface upper right side drive electrode 10 (being in certain mode), piezoelectric vibrator can produce special modal vibration, wherein when the direction of vibration of piezoelectric vibrator in upper surface upside output electrode 4 positions be the Y-axis negative direction, and be the Y-axis positive dirction at the position direction of vibration at lower surface upside output electrode 11 places.Because the direction of vibration of two positions is opposite, when adding the angular velocity that is subjected to horizontal X direction (i.e. left and right directions among the figure), the direction of suffered Ke Shi power is opposite.Make piezoelectric vibrator stretch or compression in the Z-direction generation of upper surface upside output electrode 4 with lower surface upside output electrode 11 positions.Upper and lower surface finally makes upside output electrode 4 and lower surface upside output electrode 11 that certain electromotive force is all arranged about the piezoelectric vibrator symmetry, and opposite each other.Because the size of Ke Shi power is directly proportional with extraneous angular velocity size, the size of the electromotive force that extraneous angular velocity causes is directly proportional with Ke Shi power, and the size of the electromotive force that causes of angular velocity is directly proportional with the size of extraneous angular velocity as can be known.Therefore can detect the angular velocity of directions X by the upper surface upside output electrode 4 and the electromotive force of lower surface upside output electrode 11, and then the electromotive force of upper surface downside output electrode 6 and lower surface downside output electrode 13 also is the detection signal of directions X angular velocity with the size of extraneous angular velocity also.Because piezoelectric effect, output electrode does not have electromotive force yet when having extraneous angular velocity.Upper surface upside output electrode 4 is identical owing to vibrating suffered stress with upper surface downside output electrode 6, have identical electromotive force, but direction of motion is opposite, and the electromotive force that extraneous angular velocity causes is opposite.Therefore the electromotive force of upper surface upside output electrode 4 and upper surface downside output electrode 6 can be subtracted each other as output signal and can eliminate the electromotive force that vibration causes.In order to make output signal bigger, the precision of gyro is higher, the electromotive force addition of the electromotive force of upper surface upside output electrode 4 and lower surface downside output electrode 13 the most at last deducts the detection signal of the electromotive force of the electromotive force of upper surface downside output electrode 6 and lower surface upside output electrode 11 as the angular velocity on the directions X again.Upper surface left side output electrode 7 is vertical with the direction of motion of upper surface upside output electrode 4, in like manner with the electromotive force and the electromotive force addition of lower surface right side output electrode 12 of upper surface left side output electrode 7, deduct the detection signal of the electromotive force of output electrode 14 on the left of the electromotive force of upper surface right side output electrode 5 and the lower surface again as Y deflection speed.The angular velocity detection coupling of verifying this both direction by analysis is very little.
Produce the chip Input Control Word by single-chip microcomputer to signal, control word may command signal produces frequency and the phase place that chip produces signal.The voltage signal that produces is carried out positive and anti-phase amplification respectively, as gyrostatic drive source.Upper surface mode detecting electrode 8 has an extreme value with the electromotive force of lower surface mode detecting electrode 15 when finding to vibrate under this mode by analysis and research, therefore utilize these characteristics to identify whether vibration is under this mode, reduce error theoretical and practical devices, to guarantee to detect the accuracy of angular velocity.Obtain the resonant frequency of required mode according to theoretical analysis, carry out frequency sweep in its vicinity.Determine the reference vibration of piezoelectric vibrator by the signal of observing upper surface mode detecting electrode 8 and lower surface mode detecting electrode 15.The output signal of output electrode is amplified as the detection signal that finally obtains X, Y deflection velocity magnitude.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103370603A (en) * | 2010-12-22 | 2013-10-23 | 萨热姆防务安全公司 | Vibrating gyroscope and corresponding manufacturing process |
| CN103697873A (en) * | 2013-12-13 | 2014-04-02 | 上海交通大学 | Prop drawing-shaped micro-mechanical solid fluctuating modal matching gyroscope |
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| CN1206460A (en) * | 1996-10-29 | 1999-01-27 | 三井化学株式会社 | Vibration gyroscope |
| JP3285140B2 (en) * | 1997-09-04 | 2002-05-27 | 株式会社村田製作所 | Adjustment method of vibration gyro |
| JP4258466B2 (en) * | 2004-12-16 | 2009-04-30 | セイコーエプソン株式会社 | Piezoelectric gyro element and piezoelectric gyroscope |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103370603A (en) * | 2010-12-22 | 2013-10-23 | 萨热姆防务安全公司 | Vibrating gyroscope and corresponding manufacturing process |
| CN103370603B (en) * | 2010-12-22 | 2016-07-13 | 萨热姆防务安全公司 | Vibrating gyroscope and corresponding manufacturing method |
| CN103697873A (en) * | 2013-12-13 | 2014-04-02 | 上海交通大学 | Prop drawing-shaped micro-mechanical solid fluctuating modal matching gyroscope |
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