CN101336147A - Electroplated abrasive tool and method and mold - Google Patents

Abstract

The invention provides a mold holding abrasive particles that are electrolytically attached to a conductive substrate during an electrolysis process. The mold may have an insulating material with a molding surface for holding the abrasive particles during this process. In addition, the invention also provides a manufacturing method of the grinding tool using the die and the grinding tool produced by the manufacturing method. In one aspect of the invention, the tips of the polishing tools may be configured according to a predetermined vertical or horizontal pattern with little or no post-electrodeposition processing.

Description

Electroplating grinding tool and method and mold

technical field

The invention relates to an electroplating grinding tool, a method and a mold for manufacturing the electroplating grinding tool. Accordingly, the present invention relates to the fields of electrochemistry, materials science and physics.

Background technique

Abrasive tools have a variety of applications, including cutting, drilling, sawing, grinding, lapping, and polishing of materials. One common form of abrasive tool is to use abrasive particles on a tool substrate for cutting, grinding and polishing operations.

Super abrasive particles, such as diamond, polycrystalline diamond (Polycrystalline Diamond, PCD), cubic boron nitride (CBN) and polycrystalline cubic boron nitride (PCBN), due to their extremely high hardness, atomic density and high thermal conductivity, It is therefore widely used in many material removal applications. For example, dressing disks, grinding discs, saw blades, wire saws, and drills all have super abrasive particles attached to the substrate.

Despite the significant advantages of superabrasive tools, a number of problems continue to limit the performance and useful life of many existing superabrasive tools. For example, the placement and fixation of superabrasive particles remains problematic. An additional issue is the height to which the superabrasive particles extend from the substrate. In many applications, it is beneficial to have all the particles on a tool substrate extend to approximately the same uniform height. In many instances, a uniform particle height can help to evenly distribute the workload on the particles and thus improve particle retention. In other instances, it may be beneficial to have particles having different heights on the tool according to a predetermined vertical pattern.

There are many methods for assembling superabrasive tools, such as brazing, hot pressing, infiltration, and electroplating, to name a few. However, most of these methods fail to produce tools with the above-described superabrasive particle placement characteristics. Furthermore, tools manufactured by known methods require post-assembly processes in order to obtain a working surface with suitable characteristics, such as suitable particle exposure.

Accordingly, the art continues to seek electroplated abrasive tools and methods and molds that allow precise horizontal and vertical placement of abrasive particles and achieve proper working surfaces with little or no post-assembly processing.

Contents of the invention

Accordingly, the present invention provides an electroplated abrasive tool having a plurality of particles arranged according to both horizontal and vertical patterns with little or no post-processing, and provides methods of making and using the electroplated abrasive tool. In addition, the present invention also provides a device used in a part of the manufacturing process.

In one aspect, the present invention provides a mold for positioning and fixing abrasive particles, which is electrolytically attached to a conductive substrate during an electrolysis step. The mold may comprise or be fabricated from an insulating material having a molding surface that holds the abrasive particles as electrolytic deposits of a material attach the abrasive particles to the conductive substrate .

In another aspect, a method of making an electroplated abrasive tool comprising a plurality of abrasive particles coupled to a substrate by electrodepositing material is provided. The method may comprise the steps of: 1) temporarily affixing the plurality of abrasive particles to a mold face of a mold, such as the mold described herein; 2) positioning the mold in an electrodeposition chamber, and The face is facing a substrate to which the plurality of abrasive particles are to be electrolytically attached; 3) electrolytically attaching the plurality of abrasive particles to the substrate by an electrodeposition material; and 4) removing the mold.

In yet another aspect, the invention encompasses abrasive tools, which in certain aspects can be manufactured by the methods described herein. Such tools typically include a substrate containing a plurality of abrasive particles coupled to the substrate by an electrodeposited material. The plurality of abrasive particles can have tips arranged according to a predetermined vertical pattern.

The aforementioned features and advantages of the present invention will be further elaborated in the following detailed description and related drawings.

Description of drawings

1a to 1h are diagrams showing a series of steps for manufacturing a tool in one embodiment of the present invention.

Figure 1a is a bottom view showing the die face of a mold in one embodiment of the present invention.

Fig. 1b is a cross-sectional view along line A-A of Fig. 1a in an embodiment of the present invention.

Fig. 1c is a cross-sectional view according to Fig. 1b showing an adhesive coating layer on the die face of an embodiment of the present invention.

Figure 1d is a bottom view of a mold showing the placement of abrasive particles on the mold surface in accordance with one embodiment of the present invention.

Fig. 1e is a cross-sectional view according to Fig. 1c in an embodiment of the present invention, which shows the arrangement of abrasive particles on the die surface.

Figure If is a partial cross-sectional view of an electrodeposition chamber showing the orientation of a tool substrate and a mold in accordance with one embodiment of the present invention.

1g is a partial cross-sectional view according to FIG. 1f showing abrasive particles coupled to the tool substrate through an electrodeposited material, in accordance with one embodiment of the present invention.

Figure 1h is a cross-sectional view of a tool in one embodiment of the present invention.

2a to 2c are diagrams of a series of steps for manufacturing a tool in another embodiment of the present invention.

Fig. 2a is a cross-sectional view of a mold according to another embodiment of the present invention, which shows the arrangement of abrasive particles on the mold surface.

2b is a cross-sectional view according to FIG. 2a showing a tool substrate and abrasive particles coupled to the tool substrate by an electrodeposited material in accordance with another embodiment of the present invention.

Figure 2c is a cross-sectional view of a tool in another embodiment of the present invention.

The above drawings are only used for further understanding of the present invention. It should be noted that the actual dimensions of the layers and features may vary from what is shown.

Description of component symbols

10 molds 100 electrodeposition chambers

14 Insulation material 18 Die surface

22 abrasive particles 26 holes

30 electrolyte 34 areas

38 adhesive material 42 tip

49 work surfaces 50 tools

54 Substrate 56 Surface

58 electrodeposition materials 62 vertical graphics

Detailed ways

Before the present invention is disclosed and described, it is to be understood that the invention is not limited to the specific structures, process steps or materials disclosed herein, but extends to equivalents understood by those skilled in the relevant arts. It should also be understood that the terminology used herein is used to describe particular embodiments only and is not intended to be limiting.

The articles "a" and "the" used in the specification and appended claims include plural usage unless otherwise specified in the text. By way of example, "an abrasive particle" includes one or more such particles.

definition

In describing and claiming the present invention, the following terminology will be used in accordance with the definitions set forth below.

As used herein, "insulating material" refers to one or more materials that form a mold in a manner effective to avoid accumulation of electrodeposited material on the mold surface of the insulating material. As explained herein, the insulating material may comprise non-conductive and/or conductive materials.

As used herein, "mold face" refers to a surface on the insulating material to which abrasive particles can be fixed.

As used herein, "predetermined pattern" refers to a non-random configuration of abrasive particles or pores that is determined prior to assembly of a tool or device containing such particles or pores.

As used herein, "horizontal pattern" refers to an arrangement of abrasive particles or holes throughout a surface to which the abrasive particles or holes are intended to be attached.

As used herein, "vertical pattern" refers to an arrangement of the heights at which the tips of abrasive particles extend from the working surface of a tool or tool substrate.

As used herein, "working surface" means the surface of a tool or tool substrate that faces or is intended to come into contact with a workpiece being polished, ground or ground during operation.

As used herein, "lattice" refers to a horizontal pattern in which adjacent abrasive particles are equally spaced, and in the case of holes, adjacent holes are equally spaced.

As used herein, "post-electrodeposition procedure" refers to certain conventional methods of conditioning or grinding procedures used to expose a tool to its working surface.

As used herein, "holding" and "temporarily securing" refer to coupling or supporting a particle so as to prevent the particle from falling off or moving on the surface to which the particle is coupled or supported. For example, in some embodiments, gravity is sufficient to couple or support abrasive particles on the surface.

"Template" as used herein refers to a device having a plurality of holes for fixing abrasive particles to a mold according to a predetermined pattern. The configuration of the holes on the template controls the default pattern. In use, one side of the template is positioned against the die face of a mold and diamond particles are spread on the other side of the template. The plurality of holes can be designed such that each hole matches only a single abrasive particle and the abrasive particle falls through the hole to contact the die surface. The plurality of holes can also be designed to accommodate only particles of a specific size. The particles within the holes can contact the mold surface so that the particles can be fixed on the mold surface. The remaining unfixed abrasive particles can be removed. The template is then removed from the mold.

As used herein, "substantially" with respect to a definite property or matter means a degree of error that is sufficiently insignificant to detract from the definite property or matter measurably.

As used herein, the word "about" in connection with a particular number or range of numbers means an actual number or range that is slightly higher or lower than the actual value to which it is linked.

Multiple items, structural elements, constituent elements and/or materials, etc. used herein may be listed in a common column for convenience. However, these listings should be construed as if each component in the list is a separate and unique component. Thus, any individual component within such clause should not be construed as substantially equivalent to other components merely because there is no indication that that separate component is different from any other component in the same clause.

Concentrations, amounts, and other numerical data may be expressed or presented herein in range format. The reader should understand that the range format is used for convenience and brevity only and should be construed flexibly to include not only the values expressly recited to define the range, but also those disclosed individual values or subranges, as if Individual values and subranges within such ranges are expressly disclosed. For example, a numerical range of "about 1 to about 5" should be interpreted to include not only the explicitly recited about 1 to about 5, but also include individual values and subranges within that range. Thus, such ranges include individual values such as 2, 3, and 4 and subranges 1 to 3, 2 to 4, and 3 to 5, and so on.

The same rule applies to stating only a single value. Moreover, such an interpretation should apply regardless of the breadth of scope or characteristics recited.

this invention

The present invention comprises a method of electrodeposition manufacturing of (electroplated) abrasive tools, which allows better control of the disposition and fixation of the abrasive particles on a tool substrate according to their location in a vertical and horizontal pattern, and The methods require little or no post-electrodeposition procedures of the tool working surface. In other words, the working surface is produced by the electrodeposition process itself. The applicant has also developed a mold for this manufacturing method, and developed a plurality of abrasive tools produced by this manufacturing method.

Please refer to FIG. 1a to FIG. 1e , which show a mold 10 of the present invention. The mold 10 may be used in an electrolytic process to position and secure abrasive particles 22 to a mold face 18 of the mold 10 . Please refer to FIG. 1f to FIG. 1h , which show a partial structure of a mold 10 used in an electrodeposition chamber 100 in an embodiment of the present invention. Likewise, FIGS. 2a to 2c show other examples of the structures exhibited by the mold 10 used in an embodiment of the present invention.

As shown in the above figures, the mold 10 includes an insulating material 14 . The insulating material 14 can effectively prevent the electrodeposited material (Electrodeposited Material) 58 from accumulating on the mold surface 18 . In the example shown in Figures 1f to 1h, and Figures 2a to 2c, the tips 42 of the plurality of abrasive particles 22 are formed as part of a working surface 49 of a tool 50, and, during electrodeposition, the plurality of A tip 42 is fixed on the die face 18. The electrodeposited material 58 is prevented from accumulating on the tip 42 of the abrasive particle 22 and the working surface 49 of the tool 50 .

In one embodiment, the insulating material 14 has at least one hole 26 passing through the insulating material 14 . Referring to FIGS. 1 a to 1 e , in another embodiment, the insulating material 14 has a plurality of holes 26 passing through the insulating material 14 . The plurality of holes 26 allows an electrolyte 30 to circulate through the mold 10 from a region 34 outside the mold 10 to the surface 56 of the tool substrate 54 (according to FIGS. 56, etc.) to electrodeposit the material used to fix the abrasive particles 22 on the tool substrate 54. This cycle is beneficial because it is necessary to maintain the ion (not shown) concentration of the electrolyte at the electrodeposition site. In the examples of FIGS. 1g , 1h , 2b and 2c , the electrodeposition is on the surface 56 of the tool substrate 54 .

In some embodiments, the plurality of holes 26 can be configured according to a preset pattern. For example, the preset pattern can be a lattice, as shown in FIG. 1a and FIG. 1d. The lattice pattern helps to evenly distribute the ions of electrolyte 30 onto substrate 54 . The uniform ion distribution helps to build up the electrodeposited material 58 evenly across the surface of the tool substrate 54, which in turn helps to secure the abrasive particles 22 with uniform strength.

In other embodiments, the plurality of holes 26 may be configured to allow more electrodeposition to occur in specific areas. For example, FIG. 2b shows that the holes 26 are located in the recesses of the mould. There are more electrolyte 30 ions near the holes 26, resulting in more electrodeposited material 58 being formed there.

The insulating material 14 can be formed in a variety of ways. In one embodiment, the insulating material 14 may be formed of a resin. For example, the resin material can be a synthetic resin or a polymeric material such as polyimide. The resin material may also include epoxies, lacquers, varnishes, acrylic polymers and mixtures thereof. In addition, the resin material can be a rubber material, including natural and artificial rubbers, such as styrene-butadiene (Styrene-Butadiene), polychloroprene rubber (Polychloroprene Elastomers), fluorine rubber (Fluoroelastomers), ethylene-propylene -Ethylene Propylene Diene, Nitrile Elastomers, such as Buna-N and NBR rubber, Polysiloxanes, Polyisobutylenes and amino Potassium esters (Urethanes).

In other embodiments, as long as the insulating material 14 effectively or substantially prevents the electrodeposited material 58 from forming on the die surface 18 , the insulating material 14 may include conductive components. For example, the insulating material 14 can be a stainless steel substrate (not shown) coated with insulating varnish (not shown).

The insulating material 14 may also include a die surface 18 that is formed when an electrodeposited material 58 is electrodeposited to secure abrasive particles 22 to a surface 56 of a conductive substrate 54 (e.g., tool substrate 54). , for fixing the abrasive particles 22. The mold 10 can hold the abrasive particles 22, such as diamond particles, in various ways. For example, an adhesive material 38 can be adhered on the mold surface 18 to fix the abrasive particles 22 . The adhesive material 38 can be used to independently configure each abrasive particle 22 . Other methods for fixing the abrasive particles 22 may include magnetic force, frictional force, gravity and so on. For example, in one embodiment, the mold surface may include a plurality of grooves for the plurality of abrasive particles to be frictionally fixed in the grooves.

Referring to FIG. 1 e , in one embodiment, the plurality of abrasive particles 22 are fixed so as to directly contact the mold surface 18 . Beneficially, the vertical pattern 62 corresponding to a tool 50 can be controlled by configuring the shape of the die face. Referring to FIGS. 2 a to 2 c , for example, the mold face may be configured to have a shape inverted from a vertical figure to correspond to abrasive particles on a tool substrate 54 .

The die face 18 shape itself is suitable for many applications of the abrasive tool 50 . For example, the mold surface can be substantially flat (as shown in FIGS. 1a-1g ), concave or convex, or the mold surface can include both concave and convex portions (as shown in FIGS. 2a and 2b ). In another example that is particularly useful for chemical mechanical polishing (CMP), the concave portion of the mold face can have a slope of about 1/1000 or a concavity of about 1/1000. In this last example, the vertical pattern 62 of a polishing tool can be made to have a convex profile with a slope of about 1/1000, which is typically required for CMP applications.

In addition, in some embodiments where the abrasive particles 22 directly contact the mold surface 18, the plurality of abrasive particle tips 42 as part of the working surface 49 of the tool may be arranged according to a predetermined vertical pattern. This can contribute to uniform dressing and good finish quality of the polished object (not shown). In addition, this may allow the object being polished to have a special finishing pattern.

In some embodiments, the plurality of abrasive particles 22 can be fixed on the mold surface 18 according to a predetermined horizontal pattern. Thus, the spacing between the abrasive particles on the surface 56 of the tool substrate 54 is controlled. Such control may have several benefits. For example, controlled abrasive particle spacing can increase performance during polishing by reducing excessive friction (or drag) and reducing heat generation. In some embodiments, the plurality of abrasive particles must be regularly distributed on the tool surface. To achieve these applications, the plurality of abrasive particles can be fixed on the mold surface according to a lattice pattern.

The plurality of abrasive particles can be positioned on the mold surface according to a predetermined horizontal pattern by various techniques. For example, the plurality of abrasive particles can be individually disposed on the mold surface. Alternatively, a plate (as defined above) may be used to more efficiently place abrasive particles on the die face. Other methods can use a transfer belt or other transfer media, on which the abrasive particles are temporarily arranged according to a predetermined horizontal pattern, and then transferred to the mold surface.

In an embodiment of the present invention, the plurality of abrasive particles 22 can be fixed on the mold surface 18 according to a predetermined pattern complementary to the hole 26 pattern. For example, the plurality of abrasive particles and holes can be configured according to the lattice patterns shown in FIG. 1d respectively. Beneficially, these complementary patterns allow the electrolyte 30 to be electrodeposited around each abrasive particle with substantially equal ion concentrations. Therefore, the amounts of the electrodeposited material 58 to respectively fix the respective abrasive particles are substantially equal. This helps to give maximum retention to the abrasive particles by distributing approximately equal workload to each abrasive particle.

In other embodiments, the plurality of abrasive particles 22 can be fixed on the mold surface 18 according to a pattern that makes the distribution density of abrasive particles on at least one specific area of the mold surface higher and higher than that of the mold surface. The distribution density of abrasive particles in the remaining area of the surface. This graph is particularly useful in CMP applications. For example, a higher density of abrasive particles can be distributed on the periphery of a disc-shaped abrasive tool. The peripheral edge of the disc-shaped grinding tool rotates faster than the center, and there is greater pressure at the main edge of the disc-shaped tool. Other abrasive particle patterns and configurations are disclosed in applicant's U.S. Patent Application No. 10/109,531, filed March 27, 2002, and U.S. Patent Application No. 10/954,956, filed September 29, 2004, which Various abrasive particles and configurations are incorporated herein by reference.

In another aspect of the present invention, a method of manufacturing an abrasive tool 50 is provided wherein a plurality of abrasive particles 22 are bonded to a substrate 54 by an electrodeposited material 58 . In an initial step, a plurality of abrasive particles may be temporarily affixed to a mold face 18 of a mold 10, as described herein, and then the mold and the affixed abrasive particles may be placed in an electrodeposition chamber 100, And the mold side faces the base material. Next, a material is electrodeposited on the surface 56 of the substrate 54, and the plurality of abrasive particles are electrolytically attached to the substrate through the electrodeposited material. The mold can be removed to expose a whole or part of the abrasive tool, which includes the substrate and the abrasive particles attached to the surface of the substrate.

In one example, the plurality of abrasive particles 22 can be fixed on the mold surface 18 of the mold 10 through an above-mentioned adhesive material 38 . With the mold side facing the substrate 54, electrodeposited material 58 can begin to form on the substrate until a portion of the abrasive particles are covered. The electrodeposited material can attach the abrasive particles more firmly to the adhesive material, and thus, the mold can be easily removed to expose the sharp ends of the abrasive particles.

In one embodiment, the substrate 54 can be a conductive material, such as stainless steel. The substrate itself can be used as an electrode in the electrolysis process, and the substrate itself can also be used as a tool body (not shown in the figure). Alternatively, the substrate can be fixed to a tool body later by a method.

In another embodiment of the present invention, the electrodeposition material 58 can be a metal material, such as a metal or a metal composition material. For example, the electrodeposited material can be a metal such as nickel, chromium, copper, titanium, tungsten, tin, iron, silver, gold, manganese, magnesium, zinc, aluminum, tantalum, alloys or mixtures thereof. The metal composition material can be a composition containing at least one of the above metals.

In another aspect of the present invention, an abrasive tool 50 manufactured by the above method is provided. The abrasive tool includes a substrate 54 to which a plurality of abrasive particles 22 are bonded by an electrodeposited material 58 . The tips 42 of the plurality of abrasive particles can be arranged according to a predetermined vertical pattern. In addition, a part of the plurality of abrasive particles may be exposed outside the electrodeposition material without being covered by the electrodeposition material.

For example, the plurality of abrasive particles 22 can be set to have a uniform height or a substantially uniform height on the substrate. The vertical pattern can also be convex, concave, or have multiple convex areas and concave areas at the same time.

In addition, the plurality of abrasive particles 22 can be arranged on the substrate according to a predetermined horizontal pattern. For example, the plurality of abrasive particles can be configured according to a crystal lattice as described above. The plurality of abrasive particles can be configured so that the distribution density of the abrasive particles in a specific region on the substrate is higher than that in other regions on the substrate. Such vertical and horizontal graphics have many advantages as described above.

In other embodiments of the invention, an abrasive tool 50 may require little or no post-electrodeposition of the working surface of the tool. In this embodiment, the electrodeposited material 58 forms on the substrate 54 of the tool and does not form on the finished working surface 49 of the tool. Therefore, the finished working surface does not need to be machined to expose the sharp ends 42 of the abrasive particles as in other conventional methods. This helps to avoid damage to the abrasive particles due to the impact of reconditioning the working surface of the abrasive tool.

example

In order to better understand the present invention, several examples are provided below. However, the various examples do not limit the scope of the present invention.

Example 1: CMP Pad Dresser

A mold of polyimide layer (1 mm thickness) was embossed with holes arranged according to a lattice pattern. The center of each hole has a distance of 0.7 mm from the center of other adjacent holes, and each hole has a diameter of 0.5 mm. An acrylic (acrylic) (polymer) adhesive (50 micron thickness) is coated on one surface of the polyimide layer (eg, the die surface). A plurality of diamond abrasive grains with a grain size (mesh) of 100/120 are added on the surface, and each diamond abrasive grain is respectively located at the center of four adjacent holes around it. The diamond-covered die face was positioned adjacent to a disk-shaped stainless steel substrate (having a diameter of 108 mm and a thickness of 6.5 mm). The plurality of diamond abrasive grains are located between the mold surface stainless steel and the base material. The mold and substrate are located within a plastic (PVC) ring 48 to hold the mold and substrate together during the electrolysis process. The substrate contacts a cathode. The electrolyte is nickel sulfide solution. The plastic ring, mold and substrate are immersed in an electrolyte in a PVC layer that seals the electrolyte. Electrolysis is performed to electrodeposit nickel on the substrate. Electrolysis continues until the nickel covers approximately 2/3 of the average diamond grit size. The polyimide mold was then removed to obtain the substrate to which diamond abrasive grains were affixed by electrodeposition of nickel.

Example 2

Thirty molds were made as follows:

Each mold was formed from a stainless steel disc with a diameter of approximately 120 mm and a thickness of approximately 120 microns. Each disc is etched by lithography to form a plurality of holes configured according to a lattice pattern as described below. The plurality of holes are distributed in a circular region having a diameter of about 100 mm at the center of each disk, and the remaining regions on each disk having a width of about 20 mm adjacent to the periphery of the disk have no holes. Measure the distance between the approximate center points of adjacent holes (that is, the hole spacing), some discs have the following hole spacing:

1. The ten discs have a hole pitch of about 800micron, and each hole has a diameter of about 400mircon.

2. The ten disks have a hole pitch of about 600micron, and each hole has a diameter of about 300mircon.

3. The ten disks have a hole pitch of about 400micron, and each hole has a diameter of about 200mircon.

Each disc is coated with varnish, rubber or coated with an inert or insulating material to improve its electrical insulating properties. However, in some applications, the mold itself is a low-conductivity or non-conductive material, so the above-mentioned coating step can be used as an optional step. In some instances, when the abrasive particles are insulating (eg, diamond particles), the stainless steel disc or other conductive disc and a cathode substrate can be separated by intervening abrasive particles thereby insulating the disc.

By using the above mold, the following procedure can be used to manufacture a Diamond Pad Conditioner:

1. An adhesive layer is coated on both sides of each mold, and an abrasive particle template is assembled on each side. The plurality of abrasive particle templates are configured and selected to properly accommodate abrasive particles of a predetermined size and to allow the plurality of abrasive particles to adhere between the holes of the corresponding template's mold (in other words, each hole in each template is configured and are complementary to the holes in the mold to ensure that the abrasive particles will stick to the mold surface rather than fall through the holes in the mold.)

2. The mold and template assembly uses at least one joint tenon to pass through the corresponding joint holes formed through each component in the assembly to fix the assembly. However, it should be noted that other mechanisms such as clamps, adhesives, etc. may also be used to join the mold and template in the assembly.

3. Set diamond particles (MBG-660 manufactured by Diamond Innovation) of appropriate size in the holes of the sample plate so that each hole of the sample plate can receive a single abrasive particle that will be adhered to the surface of the mold.

4. Remove excess diamond particles by turning, vibrating, shaking each mold/sample assembly, etc.

5. Remove the template on each mold so that the plurality of diamond particles are adhered on each surface of the mold according to the pattern of the template. In some examples, the template pattern can have each diamond particle located at the center of the corresponding four adjacent perforations on the mold.

6. Center each mold between two stainless steel substrates with a diameter of about 100 mm and a thickness of about 6.5 mm, so that the diamond particles are sandwiched between the mold and the substrate. Due to the small size variation of the abrasive particles, only some of the larger abrasive particles contact the substrate if possible.

7. A heavy steel ring is pressed on the outer periphery of each mold to ensure that the mold will not move, translate or deform during the electrodeposition process. In some aspects, the heavy steel ring may actually bend the perimeter of the mold slightly to form recesses on each side of the mold. The slope of the recess can be somewhat controlled by this mechanism, in some aspects the slope can be about 1/1000. This allows the diamond particles on the periphery of the working surface of the substrate to be slightly lower (approximately 50 microns) than the center of the substrate in the finished tool.

8. Place each mold/substrate assembly in the mounting holes of a plastic frame. The bases of the plurality of substrates are connected to the cathode of an electroplating cell. The plurality of mold/substrate assemblies are covered with a nickel sulfide electrolytic solution (ie, disposed in an electrolyte tank or vat), and when the substrate is energized, nickel ions are reduced and nickel metal is deposited on the substrate. When a nickel layer is formed on the substrate, the nickel layer grows toward the mold, and diamond particles attached to the mold are eventually coated by the nickel layer and embedded in the nickel layer to a selected extent. The depth to which the abrasive particles are embedded can be controlled by the operator of the procedure. In one aspect, the depth of the nickel layer can be about 1/3 to 2/3 of the distance between the mold and the substrate. Since the electrolytic solution can circulate through the perforations of the mold, the nickel layer can be formed uniformly and rapidly.

9. The mold cannot be electrified due to the intermediary insulating diamond particles and the selected varnish coating or other insulating materials, so nickel will not be deposited on the mold or the diamond particles near the mold surface.

10. Once the nickel layer is formed, the abrasive tool and mold are removed from the plating solution and separated from each other to expose the mold face of the abrasive tool. The mold is then reusable.

As the nickel layer grows from the substrate to the mold, and as the growth process causes the abrasive particles to attach to the substrate, the profile appearance of the exposed diamond particle tips on the final finished abrasive tool is affected by the shape of the die face of the mold . In this way, the plurality of diamond particle tips can be configured according to a predetermined vertical pattern on the working surface of the finished abrasive tool. Additionally, due to the nature of this process, the finished abrasive tool does not need to go through a post-assembly finishing process or work to complete. In other words, in some aspects, once the nickel layer is formed and the abrasive tool is removed from the plating bath, a finished abrasive tool that is ready for use is simultaneously completed.

Of course, the reader should understand that the above examples are only for illustrating the application of the principles of the present invention. On the premise of not violating the scope and spirit of the present invention, those skilled in the art to which this case belongs can make various modifications and different configurations, and the appended patent scope intends to cover these modifications and different configurations. Therefore, when the details of the present invention that are considered to be the most practical and preferred embodiments have been disclosed above, for those skilled in the art, the concepts and principles proposed herein can be used to understand Various changes including size, material, shape, form, function, method of operation, assembly and use are made without limitation.

Claims (47)

1. A mold for positioning and securing a plurality of abrasive particles that are electrolytically attached to a conductive substrate during an electrodeposition process, the mold comprising: An insulating material having a mold surface for holding the plurality of abrasive particles during electrodeposition of a material, wherein the electrodeposited material holds the abrasive particles to the conductive substrate. 2. The mold as claimed in claim 1, further comprising an adhesive, the adhesive adheres to the mold surface to fix the plurality of abrasive particles. 3. The mold according to claim 1, wherein the insulating material has at least one hole formed through the insulating material, and the hole allows an electrolyte to circulate through the mold from an area outside the mold to reach the mold surface . 4. The mold as claimed in claim 3, wherein a plurality of holes are formed through the insulating material. 5. The mold as claimed in claim 4, wherein the plurality of holes are configured according to a predetermined pattern. 6. The mold as claimed in claim 5, wherein the preset pattern is a lattice. 7. The mold of claim 1, wherein the mold face has a shape that is inverted from a vertical pattern applied to the abrasive particles. 8. The mold of claim 7, wherein the mold face is substantially flat. 9. The mold as claimed in claim 7, wherein the mold surface is concave and has at least one concave portion. 10. The mold of claim 9, wherein the slope of the recess is about 1/1000. 11. The mold of claim 7, wherein the mold face is convex. 12. The mold as claimed in claim 7, wherein the mold surface has a plurality of concaves and convexes. 13. The mold according to claim 1, wherein the plurality of abrasive particles are fixed on the mold surface according to a predetermined horizontal pattern. 14. The mold as claimed in claim 13, wherein the predetermined horizontal pattern is a lattice pattern. 15. The mold according to claim 5, wherein the plurality of abrasive particles are fixed on the mold surface according to a predetermined pattern, and the predetermined pattern is complementary to the pattern of the holes. 16. The mold according to claim 15, wherein the pattern of abrasive particles and the pattern of holes are respectively a lattice pattern. 17. The mold as claimed in claim 13, wherein the predetermined horizontal pattern makes the distribution density of abrasive particles on at least one specific area of the mold surface higher than that of other areas of the mold surface. 18. The mold as claimed in claim 1, wherein the insulating material comprises a resin material. 19. The mold of claim 18, wherein the resin is a synthetic resin. 20. The mold of claim 18, wherein the resin material is a polymeric material. 21. The mold as claimed in claim 18, wherein the resin material is selected from the group consisting of epoxy, lacquer, varnish, acrylic polymer and mixtures thereof. 22. The mold of claim 21, the insulating material is a varnish. 23. The mold of claim 21, wherein the insulating material is an acrylic polymer. 24. The mold of claim 1, the insulating material is a rubber material. 25. The mold according to claim 24, the rubber material is natural rubber or artificial rubber. 26. A method of manufacturing a tool having a plurality of abrasive particles bonded to a substrate by an electrodeposited material, wherein the method of manufacturing comprises: Temporarily fixing the plurality of abrasive particles to a mold face of a mold according to claim 1; positioning the mold in an electrodeposition chamber with the mold side facing a substrate to which the plurality of abrasive particles are to be electrolytically attached; electrolytically attaching the plurality of abrasive particles to the substrate through an electrodeposition material; and Remove the mold. 27. The manufacturing method as claimed in claim 26, wherein the substrate comprises a conductive material. 28. The manufacturing method as claimed in claim 27, wherein the conductive material is a stainless steel. 29. The manufacturing method of claim 26, wherein the substrate is a tool body. 30. The manufacturing method of claim 26, further comprising a step of removing the substrate from the electrodeposition chamber and attaching the substrate to a tool body. 31. The manufacturing method as claimed in claim 26, wherein the electrodeposition material is a metal material. 32. The manufacturing method as claimed in claim 26, wherein the electrical metal material is a metal composition material. 33. The manufacturing method as claimed in claim 32, wherein the metal constituent material comprises at least one element selected from the group consisting of nickel, chromium, copper, titanium, tungsten, tin, iron, silver, gold, manganese, magnesium , zinc, aluminum, tantalum, alloys thereof, or mixtures thereof. 34. The manufacturing method as claimed in claim 33, wherein the metal constituent material comprises nickel. 35. The manufacturing method as claimed in claim 31, wherein the metal composition is composed of a metal. 36. The manufacturing method as claimed in claim 35, wherein the metal is an element selected from the group consisting of nickel, chromium, copper, titanium, tungsten, tin, iron, silver, gold, manganese, magnesium, zinc, aluminum , tantalum, alloys thereof, or mixtures thereof. 37. The manufacturing method of claim 36, the metal being nickel. 38. A tool manufactured by the manufacturing method of claim 26, comprising: A substrate, the substrate is combined with a plurality of abrasive particles through an electrodeposited material, the plurality of abrasive particles each have a tip, the plurality of abrasive particle tips are arranged according to a preset vertical pattern, and a part of them is exposed on the The electrodeposited material is not covered by the electrodeposited material. 39. The tool as claimed in claim 38, wherein the predetermined vertical pattern is a pattern of uniform height upward from the substrate. 40. The tool as claimed in claim 38, wherein the predetermined vertical figure is a convex figure. 41. The tool as claimed in claim 38, wherein the predetermined vertical figure is a concave figure. 42. The tool as claimed in claim 38, wherein the predetermined vertical pattern includes a plurality of convex regions and concave regions at the same time. 43. The tool of claim 38, wherein the plurality of abrasive particles are further arranged according to a predetermined horizontal pattern. 44. The tool as claimed in claim 43, wherein the predetermined horizontal pattern is a lattice. 45. The tool as claimed in claim 43, wherein the predetermined horizontal pattern makes the distribution density of abrasive particles in a specific region on the substrate higher than that of other regions on the substrate. 46. The tool of claim 36, wherein the electrodeposited material renders the finished working surface unnecessary for any post-electrodeposition process. 47. A tool comprising: A substrate, the substrate is combined with a plurality of abrasive particles through an electrodeposited material, the tips of the plurality of abrasive particles are arranged according to a predetermined horizontal pattern, and a part is exposed on the substrate according to a predetermined vertical pattern On top of the electrodeposited material, the electrodeposited material has a working surface created by the electrodeposition process.

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