CN101322231A - 高密度三维半导体晶片封装 - Google Patents
高密度三维半导体晶片封装 Download PDFInfo
- Publication number
- CN101322231A CN101322231A CNA2006800456304A CN200680045630A CN101322231A CN 101322231 A CN101322231 A CN 101322231A CN A2006800456304 A CNA2006800456304 A CN A2006800456304A CN 200680045630 A CN200680045630 A CN 200680045630A CN 101322231 A CN101322231 A CN 101322231A
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- China
- Prior art keywords
- substrate layer
- semiconductor
- traces
- substrate
- flash memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 131
- 238000004806 packaging method and process Methods 0.000 title description 2
- 239000000758 substrate Substances 0.000 claims abstract description 174
- 235000012431 wafers Nutrition 0.000 claims abstract description 80
- 238000000034 method Methods 0.000 claims abstract description 31
- 238000004804 winding Methods 0.000 claims 25
- 238000004080 punching Methods 0.000 claims 5
- 230000005611 electricity Effects 0.000 claims 4
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000004642 Polyimide Substances 0.000 abstract description 8
- 229920001721 polyimide Polymers 0.000 abstract description 8
- 238000005538 encapsulation Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- BSIDXUHWUKTRQL-UHFFFAOYSA-N nickel palladium Chemical compound [Ni].[Pd] BSIDXUHWUKTRQL-UHFFFAOYSA-N 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/14—Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
- G11C5/143—Detection of memory cassette insertion or removal; Continuity checks of supply or ground lines; Detection of supply variations, interruptions or levels ; Switching between alternative supplies
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/12—Group selection circuits, e.g. for memory block selection, chip selection, array selection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/485—Adaptation of interconnections, e.g. engineering charges, repair techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5382—Adaptable interconnections, e.g. for engineering changes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, the devices being individual devices of subclass H10D or integrated devices of class H10
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
- G11C5/04—Supports for storage elements, e.g. memory modules; Mounting or fixing of storage elements on such supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06527—Special adaptation of electrical connections, e.g. rewiring, engineering changes, pressure contacts, layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06579—TAB carriers; beam leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Memories (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
Claims (32)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/264,889 US7663216B2 (en) | 2005-11-02 | 2005-11-02 | High density three dimensional semiconductor die package |
US11/264,889 | 2005-11-02 | ||
PCT/US2006/042664 WO2007056013A2 (en) | 2005-11-02 | 2006-11-01 | High density three dimensional semiconductor die package |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101322231A true CN101322231A (zh) | 2008-12-10 |
CN101322231B CN101322231B (zh) | 2011-11-23 |
Family
ID=37995167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800456304A Expired - Fee Related CN101322231B (zh) | 2005-11-02 | 2006-11-01 | 高密度三维半导体晶片封装 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7663216B2 (zh) |
EP (1) | EP1949427A2 (zh) |
KR (1) | KR101015266B1 (zh) |
CN (1) | CN101322231B (zh) |
TW (1) | TWI339884B (zh) |
WO (1) | WO2007056013A2 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102723287A (zh) * | 2012-06-09 | 2012-10-10 | 江苏长电科技股份有限公司 | 双面三维线路芯片正装先封后蚀制造方法及其封装结构 |
CN114446858A (zh) * | 2015-03-20 | 2022-05-06 | 罗茵尼公司 | 用于半导体装置转印的方法 |
CN115274614A (zh) * | 2022-05-11 | 2022-11-01 | 厦门通富微电子有限公司 | 覆晶薄膜及其封装方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008142875A (ja) * | 2006-12-13 | 2008-06-26 | Hitachi Cable Ltd | 個片切断用金型および半導体装置の製造方法 |
SG149724A1 (en) * | 2007-07-24 | 2009-02-27 | Micron Technology Inc | Semicoductor dies with recesses, associated leadframes, and associated systems and methods |
SG149725A1 (en) * | 2007-07-24 | 2009-02-27 | Micron Technology Inc | Thin semiconductor die packages and associated systems and methods |
EP2031598A1 (en) * | 2007-08-31 | 2009-03-04 | Axalto SA | System and method of writing data in a flash memory on the basis of additional removable contact pads |
US8951841B2 (en) * | 2012-03-20 | 2015-02-10 | Infineon Technologies Ag | Clip frame semiconductor packages and methods of formation thereof |
JP6118652B2 (ja) * | 2013-02-22 | 2017-04-19 | ルネサスエレクトロニクス株式会社 | 半導体チップ及び半導体装置 |
KR102099878B1 (ko) | 2013-07-11 | 2020-04-10 | 삼성전자 주식회사 | 반도체 패키지 |
KR101663558B1 (ko) | 2016-05-23 | 2016-10-07 | 제엠제코(주) | 패키지 파괴 방지 구조를 갖는 반도체 칩 패키지 |
US10615151B2 (en) * | 2016-11-30 | 2020-04-07 | Shenzhen Xiuyuan Electronic Technology Co., Ltd | Integrated circuit multichip stacked packaging structure and method |
US10957705B2 (en) * | 2018-12-24 | 2021-03-23 | Sandisk Technologies Llc | Three-dimensional memory devices having a multi-stack bonded structure using a logic die and multiple three-dimensional memory dies and method of making the same |
US11301151B2 (en) * | 2020-05-08 | 2022-04-12 | Macronix International Co., Ltd. | Multi-die memory apparatus and identification method thereof |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR970003915B1 (ko) | 1987-06-24 | 1997-03-22 | 미다 가쓰시게 | 반도체 기억장치 및 그것을 사용한 반도체 메모리 모듈 |
US5028986A (en) * | 1987-12-28 | 1991-07-02 | Hitachi, Ltd. | Semiconductor device and semiconductor module with a plurality of stacked semiconductor devices |
US4996583A (en) | 1989-02-15 | 1991-02-26 | Matsushita Electric Industrial Co., Ltd. | Stack type semiconductor package |
US6486528B1 (en) * | 1994-06-23 | 2002-11-26 | Vertical Circuits, Inc. | Silicon segment programming apparatus and three terminal fuse configuration |
US5434745A (en) * | 1994-07-26 | 1995-07-18 | White Microelectronics Div. Of Bowmar Instrument Corp. | Stacked silicon die carrier assembly |
US5873161A (en) | 1996-07-23 | 1999-02-23 | Minnesota Mining And Manufacturing Company | Method of making a Z axis interconnect circuit |
JP3815936B2 (ja) * | 2000-01-25 | 2006-08-30 | 株式会社ルネサステクノロジ | Icカード |
US6600222B1 (en) | 2002-07-17 | 2003-07-29 | Intel Corporation | Stacked microelectronic packages |
US7550842B2 (en) * | 2002-12-12 | 2009-06-23 | Formfactor, Inc. | Integrated circuit assembly |
US6929065B2 (en) * | 2003-08-08 | 2005-08-16 | James H. Cannon | Latch-type tubing protector having C-shaped clamping members, a minimized running profile and a large holding force |
US20070196671A1 (en) | 2004-03-30 | 2007-08-23 | Geltec Co., Ltd. | Electromagnetic wave absorber |
US7245021B2 (en) | 2004-04-13 | 2007-07-17 | Vertical Circuits, Inc. | Micropede stacked die component assembly |
-
2005
- 2005-11-02 US US11/264,889 patent/US7663216B2/en active Active
-
2006
- 2006-11-01 WO PCT/US2006/042664 patent/WO2007056013A2/en active Application Filing
- 2006-11-01 EP EP06827290A patent/EP1949427A2/en not_active Withdrawn
- 2006-11-01 CN CN2006800456304A patent/CN101322231B/zh not_active Expired - Fee Related
- 2006-11-01 KR KR1020087013352A patent/KR101015266B1/ko active Active
- 2006-11-01 TW TW095140456A patent/TWI339884B/zh not_active IP Right Cessation
-
2009
- 2009-12-29 US US12/648,697 patent/US8653653B2/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102723287A (zh) * | 2012-06-09 | 2012-10-10 | 江苏长电科技股份有限公司 | 双面三维线路芯片正装先封后蚀制造方法及其封装结构 |
CN102723287B (zh) * | 2012-06-09 | 2013-10-09 | 江苏长电科技股份有限公司 | 双面三维线路芯片正装先封后蚀制造方法及其封装结构 |
CN114446858A (zh) * | 2015-03-20 | 2022-05-06 | 罗茵尼公司 | 用于半导体装置转印的方法 |
CN115274614A (zh) * | 2022-05-11 | 2022-11-01 | 厦门通富微电子有限公司 | 覆晶薄膜及其封装方法 |
Also Published As
Publication number | Publication date |
---|---|
US8653653B2 (en) | 2014-02-18 |
EP1949427A2 (en) | 2008-07-30 |
TWI339884B (en) | 2011-04-01 |
CN101322231B (zh) | 2011-11-23 |
TW200729448A (en) | 2007-08-01 |
US20070096266A1 (en) | 2007-05-03 |
KR20080080296A (ko) | 2008-09-03 |
US20100102440A1 (en) | 2010-04-29 |
WO2007056013A2 (en) | 2007-05-18 |
US7663216B2 (en) | 2010-02-16 |
WO2007056013A3 (en) | 2007-07-26 |
KR101015266B1 (ko) | 2011-02-18 |
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C14 | Grant of patent or utility model | ||
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Owner name: SANDISK TECHNOLOGIES, INC. Free format text: FORMER OWNER: SANDISK CORPORATION Effective date: 20120913 |
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Effective date of registration: 20120913 Address after: Texas, USA Patentee after: Sandy Technology Corp. Address before: California, USA Patentee before: Sandisk Corp. |
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Address after: Texas, USA Patentee after: SANDISK TECHNOLOGIES LLC Address before: Texas, USA Patentee before: Sandy Technology Corp. |
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