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CN101312173A - Semiconductor chip package substrate and bonding pad structure thereof - Google Patents

Semiconductor chip package substrate and bonding pad structure thereof Download PDF

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Publication number
CN101312173A
CN101312173A CN 200710104060 CN200710104060A CN101312173A CN 101312173 A CN101312173 A CN 101312173A CN 200710104060 CN200710104060 CN 200710104060 CN 200710104060 A CN200710104060 A CN 200710104060A CN 101312173 A CN101312173 A CN 101312173A
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pad
solder
semiconductor chip
conductive structure
patterned
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方立志
岩田隆夫
范文正
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Powertech Technology Inc
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Powertech Technology Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto

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Abstract

A semiconductor die package substrate comprising: a core layer; a conductive structure disposed on a surface of the core layer; and an insulating layer covering the conductive structure, wherein the insulating layer has at least one patterned opening; exposing part of the conductive structure of the patterned opening to be used as a patterned welding pad; the patterning opening comprises a central part and a plurality of wing parts extending outwards from the periphery of the central part; by means of the design of the central area and the wing surface areas of the bonding pad, the adhesion effect of the bonding pad and the solder ball is increased.

Description

半导体晶片封装基板及其焊垫结构 Semiconductor chip package substrate and pad structure thereof

技术领域 technical field

本发明是有关一种球栅阵列(BGA)基板,特别是一种具有防焊层界定(Solder Mask Define,SMD)焊垫设计以供植设焊球的封装基板结构。The present invention relates to a ball grid array (BGA) substrate, in particular to a packaging substrate structure with a solder mask define (Solder Mask Define, SMD) pad design for planting solder balls.

现有技术current technology

在一般BGA半导体封装件中,通常需利用一基板作为晶片承载件,以便于基板的一侧设置晶片并使晶片与基板上的导电结构电连接,且基板的另一侧植设有多个焊球与导电结构电连接,进而借助焊球与一印刷电路板焊接,使晶片经由导电结构及焊球而与印刷电路板形成电连接关系。In a general BGA semiconductor package, it is usually necessary to use a substrate as a chip carrier, so that the chip is placed on one side of the substrate and the chip is electrically connected to the conductive structure on the substrate, and the other side of the substrate is planted with a plurality of solder joints. The ball is electrically connected with the conductive structure, and then welded with a printed circuit board by means of the solder ball, so that the chip forms an electrical connection relationship with the printed circuit board through the conductive structure and the solder ball.

请参阅图1a,基板10主要包括一芯层12及一防焊层14,芯层12上形成有导电结构(图中未示)及与导电结构连接的焊垫16,以供借助焊垫接合焊球,其中焊垫可区分为SMD焊垫与非防焊层界定(NoneSolder Mask Define,NSMD)焊垫,如图1a所示的焊垫即为一SMD焊垫16,其中焊垫16尺寸大于防焊层14上的开口20,以借助开口20界定焊垫16的暴露面积;如图1b所示,当将具有SMD焊垫16设计的封装体2与印刷电路板3进行电连接时,是借助焊球18与印刷电路板3上的焊垫16对位接合,其中由于焊球18与焊垫16的接触面积较小,会造成封装体于板层级的温度循环测试(Board Level TemperatureCycling Test,Board TCT)结果不佳,易导致焊球18与焊垫16的接合面间,或是几何尺寸不连续处发生应力集中,而产生裂缝。Please refer to Fig. 1 a, the substrate 10 mainly includes a core layer 12 and a solder resist layer 14, and a conductive structure (not shown in the figure) and a pad 16 connected to the conductive structure are formed on the core layer 12 for bonding by means of the pad Welding ball, wherein welding pad can be divided into SMD welding pad and non-solder mask limit (NoneSolder Mask Define, NSMD) welding pad, and welding pad as shown in Figure 1a is a SMD welding pad 16, and wherein welding pad 16 size is larger than The opening 20 on the solder resist layer 14 is to limit the exposed area of the pad 16 by means of the opening 20; as shown in Figure 1 b, when the package body 2 with the SMD pad 16 design is electrically connected to the printed circuit board 3, it is By means of the solder balls 18 and the solder pads 16 on the printed circuit board 3, the contact area between the solder balls 18 and the solder pads 16 is small, which will cause the temperature cycle test (Board Level Temperature Cycling Test, Board TCT) results are not good, and it is easy to cause stress concentration between the bonding surface of the solder ball 18 and the solder pad 16, or at the discontinuity of the geometric size, resulting in cracks.

而NSMD焊垫是指焊垫16的周边不被防焊层14覆盖,如图2a所示,即焊垫16的表面及焊垫16周边的部分芯层12借助开口20露出,以利焊球18的接合;当BGA封装件采用NSMD焊垫16时,虽然于焊球18与焊垫16间具有较佳的TCT结果,但如图2b所示,当封装体承受外在应力时,NSMD焊垫16因没有防焊层加以覆盖,容易与芯层12分离,而同样造成讯号线路裂缝。The NSMD pad means that the periphery of the pad 16 is not covered by the solder resist layer 14, as shown in Figure 2a, that is, the surface of the pad 16 and part of the core layer 12 around the pad 16 are exposed by the opening 20 to facilitate solder balls. 18; when the BGA package uses NSMD pad 16, although there is a better TCT result between the solder ball 18 and the pad 16, as shown in Figure 2b, when the package is subjected to external stress, the NSMD soldering The pad 16 is easily separated from the core layer 12 because it is not covered by the solder resist layer, which also causes cracks in the signal circuit.

美国专利第6,201,305号与台湾专利I234838号即提出一种NSMD焊垫的结构设计,以改善焊垫与芯层的分离现象;在美国专利第6,201,305号中,是使焊垫具有多个呈辐射状排列的臂部的海星形状,并于防焊层上设计一圆形开口,使臂部的外端受到防焊层覆盖,而焊垫中央区域、臂部内端与二相邻臂部间的部分芯层露出,使焊球得同时与露出的部分焊垫与部分芯层接触,除增加接触面积之外,亦不易与芯层分离;而台湾专利I 234838号即利用上述概念,在焊垫上开设多个中空部分,使焊垫外端受到防焊层覆盖,而焊垫的内端与经由中空部分所露出的部分芯层则同时与焊球接触,以增加焊球的接触面积。U.S. Patent No. 6,201,305 and Taiwan Patent No. I234838 propose a structural design of an NSMD pad to improve the separation between the pad and the core layer; in U.S. Patent No. 6,201,305, the pad has multiple radial shapes Arranged arms are in the shape of a starfish, and a circular opening is designed on the solder mask so that the outer ends of the arms are covered by the solder mask, while the central area of the solder pad, the inner end of the arm and the part between the two adjacent arms The core layer is exposed, so that the solder balls are in contact with the exposed part of the pad and part of the core layer at the same time. In addition to increasing the contact area, it is also difficult to separate from the core layer; and Taiwan Patent No. I 234838 uses the above concept to open a solder pad on the pad. The plurality of hollow parts makes the outer end of the solder pad covered by the solder resist layer, while the inner end of the solder pad and the part of the core layer exposed through the hollow part are in contact with the solder ball at the same time, so as to increase the contact area of the solder ball.

然而,上述美国专利第6,201,305号与台湾专利I234838号是皆在针对NSMD焊垫进行改良,在制造过程上皆须针对焊垫的形状先进行复杂且困难的蚀刻制造过程。However, the above-mentioned US Patent No. 6,201,305 and Taiwan Patent No. I234838 are both aimed at improving the NSMD pads. In the manufacturing process, a complex and difficult etching process must be performed for the shape of the pads.

发明内容 Contents of the invention

为了解决上述问题,本发明目的之一是提供一种半导体晶片封装基板及其焊垫结构,借助图案化焊垫的设计可增加焊垫与焊球的接触面积并改善黏着效果。In order to solve the above problems, one object of the present invention is to provide a semiconductor chip packaging substrate and its bonding pad structure, which can increase the contact area between the bonding pad and the solder ball and improve the adhesion effect by means of the design of the patterned bonding pad.

本发明目的之一是提供一种半导体晶片封装基板及其焊垫结构,是利用防焊层的图案化开口设计定义出图案化焊垫,可有效改善焊垫与焊球的黏着状况与封装品质。One of the objects of the present invention is to provide a semiconductor chip packaging substrate and its solder pad structure, which uses the patterned opening design of the solder resist layer to define the patterned solder pads, which can effectively improve the adhesion between the solder pads and solder balls and the packaging quality. .

本发明目的之一是提供一种半导体晶片封装基板及其焊垫结构,可强化焊垫与焊球的黏着效果使封装元件具备有较佳的TCT测试结果。One of the objectives of the present invention is to provide a semiconductor chip packaging substrate and its bonding pad structure, which can strengthen the adhesion effect between the bonding pad and the solder ball, so that the packaged component has better TCT test results.

本发明目的之一是提供一种半导体晶片封装基板及其焊垫结构,是利用防焊层的图案化开口设计限定图案化焊垫,其中,防焊层的图案化开口是利用一般微影技术即可完成无须额外制造过程,具有制作简单的优点。One of the objects of the present invention is to provide a semiconductor chip packaging substrate and its pad structure, which uses the patterned opening design of the solder resist layer to design and limit the patterned solder pad, wherein the patterned opening of the solder resist layer is made by using general lithography technology It can be completed without additional manufacturing process and has the advantage of simple manufacture.

为了达到上述目的,本发明的一实施例提供一种半导体晶片封装基板,包括:一芯层;一导电结构设置于芯层的一表面上;以及一绝缘层覆盖于导电结构上,其中绝缘层具有至少一图案化开口;图案化开口暴露部份导电结构作为一图案化焊垫;以及图案化开口包括一中央部及自中央部周缘向外延伸的多个翼部。In order to achieve the above object, an embodiment of the present invention provides a semiconductor chip packaging substrate, comprising: a core layer; a conductive structure disposed on a surface of the core layer; and an insulating layer covering the conductive structure, wherein the insulating layer There is at least one patterned opening; the patterned opening exposes part of the conductive structure as a patterned pad; and the patterned opening includes a central portion and a plurality of wing portions extending outward from the periphery of the central portion.

本发明的另一实施例提供一种防焊层界定的焊垫结构,包括:一中央区;以及多个翼面区自中央部周缘向外延伸。Another embodiment of the present invention provides a pad structure defined by a solder resist layer, comprising: a central region; and a plurality of airfoil regions extending outward from the periphery of the central portion.

以下借助具体实施例配合所附的图式详加说明,当更容易了解本发明的目的、技术内容、特点及其所达成的功效。The following is a detailed description with the help of specific embodiments and accompanying drawings, so that it is easier to understand the purpose, technical content, characteristics and effects of the present invention.

附图的简要说明Brief description of the drawings

图1a及图1b所示分别为现有技术SMD焊垫接设有焊球的剖视图及其板层级封装示意图。FIG. 1 a and FIG. 1 b are respectively a cross-sectional view of an SMD solder pad connected with a solder ball and a schematic diagram of a board-level package in the prior art.

图2a及图2b所示分别为现有技术NSMD焊垫接设有焊球的剖视图及其裂缝示意图。FIG. 2 a and FIG. 2 b are respectively a cross-sectional view and a schematic diagram of cracks of NSMD pads connected with solder balls in the prior art.

图3a及图3b所示分别为本发明一实施例封装基板的俯视图与其AA线段剖视图。FIG. 3 a and FIG. 3 b are respectively a top view of a package substrate and a cross-sectional view along line AA of an embodiment of the present invention.

图4所示为本发明一实施例防焊层界定的焊垫结构示意图。FIG. 4 is a schematic diagram of a solder pad structure defined by a solder resist layer according to an embodiment of the present invention.

具体的实施方式specific implementation

请参阅图3a及图3b,分别为本发明一实施例封装基板结构俯视图与其AA线段剖视图,如图所示,此封装基板包括一芯层30;一导电结构32是设置于芯层30的一表面上,且导电结构32预设有作为焊垫的端部;一绝缘层,例如一防焊层34,覆盖于芯层30表面以遮盖导电结构32,防焊层34上形成有至少一图案化开口36,使开口36的位置与端部的位置对应,其中开口36包括一中央部361及多个翼部362自中央部361周缘向外延伸,以便借助中央部361及翼部362界定端部的暴露区域,此外露的端部即供作为焊垫38,以便与焊球(图中未示)进行接合。Please refer to FIG. 3a and FIG. 3b, which are respectively a top view of the packaging substrate structure and a cross-sectional view along line AA of an embodiment of the present invention. As shown in the figure, the packaging substrate includes a core layer 30; on the surface, and the conductive structure 32 is preset as the end of the pad; an insulating layer, such as a solder resist layer 34, covers the surface of the core layer 30 to cover the conductive structure 32, and at least one pattern is formed on the solder resist layer 34 The opening 36 is made so that the position of the opening 36 corresponds to the position of the end portion, wherein the opening 36 includes a central portion 361 and a plurality of wing portions 362 extending outward from the periphery of the central portion 361, so that the end is defined by the central portion 361 and the wing portion 362 The exposed area of the portion, and the exposed end portion is used as a solder pad 38 for bonding with a solder ball (not shown in the figure).

接续上述说明,中央部361是为一圆形孔,翼部362是呈圆弧形,翼部362的数目可为二个或多个且以对称的分布关系与中央部361连接,此具有中央部361及翼部362的开口36是使用一般封装基板防焊层制作方式,以微影技术经曝光与显影而形成;又芯层30的材质主要为环氧树脂、聚亚醯胺树脂、BT(bismaleimide triazine)树脂、FR4树脂或FR5树脂,导电结构32是由铜薄膜压合于芯层30表面且经蚀刻等图案化制造过程所形成的一图案化金属层。Continuing the above description, the central part 361 is a circular hole, and the wing part 362 is arc-shaped. The number of the wing parts 362 can be two or more and connected to the central part 361 in a symmetrical distribution relationship. This has a central The openings 36 of the portion 361 and the wing portion 362 are formed by using a general packaging substrate solder mask manufacturing method through exposure and development by lithography; the material of the core layer 30 is mainly epoxy resin, polyimide resin, BT (bismaleimide triazine) resin, FR4 resin or FR5 resin, the conductive structure 32 is a patterned metal layer formed by a copper film laminated on the surface of the core layer 30 and patterned by etching and other manufacturing processes.

在本发明中,由于防焊层的开口具有圆形中央部及周缘翼部的设计,使由防焊层的开口所界定的焊垫38如图4所示,包括一圆形的中央区381,以及连接中央区381周缘的多个呈圆弧形的翼面区382,翼面区382是对称分布于中央区381周缘,此种具有翼面区382的焊垫38的设计将可额外增加焊垫38与焊球的接触面积,以增加焊垫38与焊球的黏着效果,进而具有较佳的封装品质;同时,借助焊垫38的翼面区382的设计,亦可具有较佳的TCT测试结果。In the present invention, since the opening of the solder resist layer has a circular central portion and a peripheral wing portion, the solder pad 38 defined by the opening of the solder resist layer includes a circular central region 381 as shown in FIG. 4 . , and a plurality of arc-shaped airfoil regions 382 connected to the periphery of the central region 381, the airfoil regions 382 are symmetrically distributed on the periphery of the central region 381, and this design of the welding pad 38 with the airfoil region 382 will be additionally increased The contact area between the solder pad 38 and the solder ball is to increase the adhesion effect between the solder pad 38 and the solder ball, thereby having better packaging quality; at the same time, with the help of the design of the airfoil region 382 of the solder pad 38, it can also have better TCT test results.

另一方面,在本发明中,由于焊垫的形状是由防焊层的开口所界定,在制造过程上仅需对防焊层进行一般微影技术即可形成,制作简单,使本发明同时具备有制造过程简单且可有效改善焊垫与焊球的黏着效果的优点。On the other hand, in the present invention, since the shape of the welding pad is defined by the opening of the solder resist layer, the solder resist layer only needs to be formed by general photolithography in the manufacturing process, and the manufacture is simple, so that the present invention simultaneously It has the advantages of simple manufacturing process and can effectively improve the adhesion effect between the pad and the solder ball.

以上所述的实施例仅是为说明本发明的技术思想及特点,其目的在使本技术领域的技术人员能够了解本发明的内容并据以实施,当不能以之限定本发明的保护范围,即大凡依本发明所揭示的精神所作的均等变化或修饰,仍应涵盖在本发明的保护范围内。The above-described embodiments are only for illustrating the technical idea and characteristics of the present invention, and its purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. When the protection scope of the present invention cannot be limited with it, That is, all equivalent changes or modifications made according to the spirit disclosed in the present invention should still fall within the protection scope of the present invention.

主要元件符号说明Description of main component symbols

2    封装体2 package body

3    印刷电路板3 printed circuit board

10   基板10 Substrate

12   芯层12 core layer

14   防焊层14 Solder Mask

16    焊垫16 pads

18    焊球18 solder balls

20    开口20 openings

30    芯层30 core layer

32    导电结构32 conductive structure

34    防焊层34 solder mask

36    开口36 openings

361   中央部361 Central Department

362   翼部362 wings

38    焊垫38 pads

381   中央区381 Central District

382   翼面区382 wing area

Claims (10)

1.一种半导体晶片封装基板,包含:1. A semiconductor chip packaging substrate, comprising: 一芯层;a core layer; 一导电结构,设置于该芯层的一表面上;以及a conductive structure disposed on a surface of the core layer; and 一绝缘层,覆盖于该导电结构上,an insulating layer covering the conductive structure, 其特征在于,该绝缘层具有至少一图案化开口;It is characterized in that the insulating layer has at least one patterned opening; 该图案化开口暴露部份该导电结构作为一图案化焊垫;以及The patterned opening exposes a portion of the conductive structure as a patterned pad; and 该图案化开口包括一中央部及自该中央部周缘向外延伸的多个翼部。The patterned opening includes a central portion and a plurality of wing portions extending outward from the periphery of the central portion. 2.如权利要求1所述的半导体晶片封装基板,其特征在于,该导电结构是一图案化金属层。2. The semiconductor chip packaging substrate as claimed in claim 1, wherein the conductive structure is a patterned metal layer. 3.如权利要求1所述的半导体晶片封装基板,其特征在于,该绝缘层是一防焊层。3. The semiconductor chip package substrate as claimed in claim 1, wherein the insulating layer is a solder resist layer. 4.如权利要求1所述的半导体晶片封装基板,其特征在于,该翼部是对称分布于该中央部周缘。4 . The semiconductor chip package substrate as claimed in claim 1 , wherein the wing portions are symmetrically distributed on the periphery of the central portion. 5.如权利要求1所述的半导体晶片封装基板,其特征在于,该中央部是圆形。5. The semiconductor chip package substrate as claimed in claim 1, wherein the central portion is circular. 6.如权利要求1所述的半导体晶片封装基板,其特征在于,该翼部是圆弧形。6. The semiconductor chip package substrate as claimed in claim 1, wherein the wing portion is arc-shaped. 7.一种防焊层界定的焊垫结构,包含:7. A pad structure defined by a solder mask, comprising: 一中央区;以及a Central District; and 多个翼面区,是自该中央区周缘向外延伸。A plurality of airfoil areas extend outward from the periphery of the central area. 8.如权利要求7所述的防焊层界定的焊垫结构,其特征在于,该多个翼面区是对称分布于该中央区周缘。8 . The pad structure defined by the solder resist layer as claimed in claim 7 , wherein the plurality of airfoil regions are symmetrically distributed around the central region. 9.如权利要求7所述的防焊层界定的焊垫结构,其特征在于,该中央区呈圆形。9. The pad structure defined by the solder resist layer as claimed in claim 7, wherein the central region is circular. 10.如权利要求7所述的防焊层界定的焊垫结构,其特征在于,该翼面区呈圆弧形。10 . The solder pad structure defined by the solder resist layer as claimed in claim 7 , wherein the airfoil region is arc-shaped. 11 .
CN 200710104060 2007-05-21 2007-05-21 Semiconductor chip package substrate and bonding pad structure thereof Pending CN101312173A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103165553A (en) * 2013-02-04 2013-06-19 日月光半导体制造股份有限公司 Semiconductor wafer and semiconductor package
CN114220904A (en) * 2021-12-12 2022-03-22 武汉华星光电半导体显示技术有限公司 display panel

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103165553A (en) * 2013-02-04 2013-06-19 日月光半导体制造股份有限公司 Semiconductor wafer and semiconductor package
CN114220904A (en) * 2021-12-12 2022-03-22 武汉华星光电半导体显示技术有限公司 display panel
CN114220904B (en) * 2021-12-12 2023-09-26 武汉华星光电半导体显示技术有限公司 display panel
US12166161B2 (en) 2021-12-12 2024-12-10 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel

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