CN101308755A - Plane emission type cathode structure of field emission display - Google Patents
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Abstract
一种场发射显示器的平面发射式阴极结构,该阴极结构具有阴极基板,在该阴极基板上设置有多个阴极单元,该阴极单元包括射极层、栅极层以及介电层,其中该射极层与栅极层共面地设置在阴极基板上,而且相互对应分离并形成间隔,另外,该介电层设置在该射极层与栅极层所形成的间隔内,并且分别与该射极层与栅极层形成间隙而不邻接,从而改变射极层与栅极层的电场分布状态。
A planar emission cathode structure of a field emission display, the cathode structure has a cathode substrate, a plurality of cathode units are arranged on the cathode substrate, the cathode units include an emitter layer, a gate layer and a dielectric layer, wherein the emitter layer and the gate layer are arranged on the cathode substrate in the same plane, and are separated from each other and form a gap, and in addition, the dielectric layer is arranged in the gap formed by the emitter layer and the gate layer, and forms a gap with the emitter layer and the gate layer respectively without being adjacent, so as to change the electric field distribution state of the emitter layer and the gate layer.
Description
技术领域 technical field
本发明涉及一种场发射器,特别涉及一种共面成型的阴极板结构。The invention relates to a field emitter, in particular to a coplanar cathode plate structure.
背景技术 Background technique
近年来,由于平面显示器(Flat Panel Display)具有轻、薄的特色,而且甚至在画质、分辨率以及亮度的表现上更胜于传统电视,所以其被广泛应用在不同尺寸的显示需要求上,小至手机屏幕,大至户外广告牌,均可看到平面显示器的应用,使得平面显示器在市场上备受关注。In recent years, flat panel display (FPD) has been widely used in display requirements of different sizes due to its light and thin features, and even better than traditional TV in terms of image quality, resolution and brightness. , as small as mobile phone screens, as large as outdoor billboards, the application of flat-panel displays can be seen, making flat-panel displays attract much attention in the market.
因此各种不同类型的平面显示器不断在市场上推出,包括液晶显示器(LCD)、等离子显示器(PDP)、有机发光二极管显示器(OLED)以及场发射型显示器(FED)等;特别是场发射型显示器(FED)是近年来新兴的平面显示器的种类之一,其原理是利用内部结构中设置的阴极电子发射源产生电子束,从而撞击所对应的荧光层以产生亮光。Therefore, various types of flat-panel displays are continuously launched on the market, including liquid crystal displays (LCDs), plasma displays (PDPs), organic light-emitting diode displays (OLEDs), and field emission displays (FEDs); especially field emission displays (FED) is one of the types of flat-panel displays emerging in recent years. Its principle is to use the cathode electron emission source set in the internal structure to generate electron beams, thereby hitting the corresponding fluorescent layer to generate bright light.
传统技术中三极结构的场发射型显示器包括阳极板、阴极板以及位于阴、阳极板间的栅极层,其中该栅极层提供吸引该阴极板产生的电子的电位,再由阳极导电层提供高电位,从而提供电子的加速动能,以撞击该阳极板而产生亮光。The field emission display of the three-pole structure in the traditional technology includes an anode plate, a cathode plate, and a gate layer between the cathode and anode plates, wherein the gate layer provides a potential for attracting electrons generated by the cathode plate, and then the anode conductive layer A high potential is provided to provide the accelerated kinetic energy of electrons to strike the anode plate to produce bright light.
然而,上述传统结构虽然可使该场发射型显示器正常发光,但是由于栅极层的设计是直接设置在该阴极板与阳极板之间,且邻接于该阴极板所设置的射极上,造成了该阴极板在制作上较为复杂,而且成本高;因此,后来的现有技术为了降低成本并改进上述结构在制作上的缺陷,发展出一种射极与栅极设置在同一个平面上的阴极结构,如美国专利公开号US6891320中公开的,改变了传统利用层叠的方式所构成的阴极结构,不但在制作过程上较为简易,而且还可降低其制作成本。However, although the above-mentioned conventional structure can make the field emission display normally emit light, because the design of the gate layer is directly arranged between the cathode plate and the anode plate, and is adjacent to the emitter provided by the cathode plate, resulting in It is found that the cathode plate is relatively complicated to manufacture and the cost is high; therefore, in order to reduce the cost and improve the defects of the above-mentioned structure in the prior art, a kind of emitter and grid are developed on the same plane. The cathode structure, as disclosed in US Patent Publication No. US6891320, changes the traditional cathode structure formed by lamination, not only is easier in the manufacturing process, but also reduces its manufacturing cost.
上述共面结构设计将射极与栅极成形在阴极基板上,具有降低成本以及简化制作过程等优点,但对于栅极沿水平方向吸引射极所产生的电子的电场却造成了影响;由于栅极表面电场的向量直接影响该场发射电子的数量及方向,在相同电位条件下,射极与栅极的间隔越大,作用在射极表面电场的强度就相对越小,因此造成射极的电子产生效率降低,直接影响到该场发射器的发光效果。The above-mentioned coplanar structure design forms the emitter and the grid on the cathode substrate, which has the advantages of reducing cost and simplifying the manufacturing process, but it has an impact on the electric field of the electrons generated by the grid attracting the emitter along the horizontal direction; The vector of the electric field on the surface of the pole directly affects the quantity and direction of the electrons emitted by the field. Under the same potential condition, the larger the distance between the emitter and the grid, the smaller the intensity of the electric field acting on the surface of the emitter. The electron generation efficiency is reduced, which directly affects the luminous effect of the field emitter.
虽然射极与栅极所形成的间隔可利用半导体制作过程缩减至数微米以下,但也会相对提高其制作成本,而且在相同电位情况下,如果射极与栅极间隔过小,则在两个电场交互影响下,将使射极所释放的部分自由电子受栅极吸引无法加速至阳极,反而向栅极方向移动而产生漏电流现象。如果利用厚膜制作过程,虽然可降低制作成本,但该射极与栅极的间隔会受印制面板的准确性的影响而必须保持在数十微米以上,否则将会产生射极与栅极结构的平坦性问题或是材料烧结后变形,使该射极与栅极无法作用,而为了弥补此种制作过程所造成射极与栅极间隔过大的问题,必须提高阳极板的电位以得到阳极板对阴极板较大的电场强度。因此,不管选择哪一种制作过程,均会出现运用在阴极板共面结构上的缺陷,势必要寻求新的方式来解决。Although the distance formed between the emitter and the gate can be reduced to less than a few microns by using the semiconductor manufacturing process, it will relatively increase its production cost, and under the same potential, if the distance between the emitter and the gate is too small, the Under the interaction of two electric fields, part of the free electrons released by the emitter will be attracted by the gate and cannot be accelerated to the anode, but will move towards the gate instead, resulting in a leakage current phenomenon. If a thick film manufacturing process is used, although the manufacturing cost can be reduced, the distance between the emitter and the grid will be affected by the accuracy of the printed panel and must be kept at more than tens of microns, otherwise the emitter and grid will be generated. The flatness of the structure or the deformation of the material after sintering makes the emitter and the grid unable to function. In order to make up for the problem of the excessive distance between the emitter and the grid caused by this manufacturing process, the potential of the anode plate must be increased to obtain The greater electric field strength of the anode plate to the cathode plate. Therefore, no matter which manufacturing process is selected, there will be defects applied to the coplanar structure of the cathode plate, and it is necessary to find a new way to solve it.
发明内容 Contents of the invention
针对上述缺陷,本发明主要提供了一种场发射显示器的平面发射式阴极结构,该阴极结构具有阴极基板,在该阴极基板上设置有多个阴极单元,该阴极单元包括射极层、栅极层以及介电层,其中该射极层与栅极层共面地设置在阴极基板上,而且相互对应分离并形成间隔,另外,该介电层设置在该射极层与栅极层所形成的间隔中,并且分别与该射极层和栅极层形成间隙而不邻接,从而形成该阴极结构的共面结构。In view of the above defects, the present invention mainly provides a planar emission cathode structure of a field emission display, the cathode structure has a cathode substrate, and a plurality of cathode units are arranged on the cathode substrate, and the cathode units include an emitter layer, a grid layer and a dielectric layer, wherein the emitter layer and the gate layer are coplanarly arranged on the cathode substrate, and are separated from each other and form intervals; in addition, the dielectric layer is arranged on the layer formed by the emitter layer and the gate layer and form gaps with the emitter layer and the gate layer respectively without being adjacent to each other, thereby forming a coplanar structure of the cathode structure.
与现有技术相比,本发明的场发射显示器的平面发射式阴极结构的有益效果在于,通过在共面设置、相互对应且分离的射极层与栅极层所形成的间隔内设置介电层,可改变射极层与栅极层的电场分布状态,同时由于共面结构可直接制作在阴极基板上,因此可降低该制作过程的成本。Compared with the prior art, the beneficial effect of the planar emission cathode structure of the field emission display of the present invention is that by setting the dielectric The electric field distribution state of the emitter layer and the gate layer can be changed, and at the same time, the cost of the manufacturing process can be reduced because the coplanar structure can be directly fabricated on the cathode substrate.
附图说明 Description of drawings
图1为本发明一个实施例的结构剖视图;Fig. 1 is a structural sectional view of an embodiment of the present invention;
图2为本发明的另一个实施例的结构剖视图;Fig. 2 is a structural sectional view of another embodiment of the present invention;
图3(A)至图3(D)为本发明的电场分布示意图;Fig. 3 (A) to Fig. 3 (D) are the electric field distribution schematic diagrams of the present invention;
图4为本发明的射极释放电流与栅极电压的曲线图。FIG. 4 is a graph of emitter discharge current and gate voltage in the present invention.
在附图中,各标号所代表的部件列表如下:In the accompanying drawings, the list of parts represented by each label is as follows:
阴极结构 1 阴极基板 11
阴极单元 12 射极层 121Cathode Unit 12
栅极层 122 介电层 123
阴极导电层 124 间隔 125Cathode
具体实施方式 Detailed ways
以下将结合附图说明本发明的内容。The content of the present invention will be described below in conjunction with the accompanying drawings.
图1为本发明一个实施例的结构剖视图。如图1所示,阴极结构1具有阴极基板11,在阴极基板11上设置有多个阴极单元12,从而共同对应阳极,各阴极单元12包括射极层121、栅极层122、介电层123以及阴极导电层124,其中射极层121与栅极层122共面地设置在阴极基板11上,而且射极层121与栅极层122分别电连接阴极导电层124,从而作为导电的路径,并且射极层121与栅极层122在阴极基板11上相互分离对应并形成间隔125,在本实施例中射极层121与栅极层122的间隔125保持在50μm,此外,在阴极基板11上的射极层121与栅极层122的厚度在1μm~25μm之间。Fig. 1 is a structural sectional view of an embodiment of the present invention. As shown in FIG. 1 , the
另外,介电层123设置在射极层121与栅极层122之间形成的间隔125内,并与射极层121和栅极层122共面地设置在阴极基板11上,同时介电层123与相邻的射极层121和栅极层122分别保持一定间隙,而且介电层123不与射极层121或栅极层122相接,其中该间隙保持在5~15μm之间,而在本实施例中,介电层123由含玻璃成分的材料构成,如玻璃胶,并且该材料为介电常数大于或等于7的绝缘材料,此外,介电层123的厚度为射极层121厚度的0.5倍至1.5倍,如本实施例中的图1所示,介电层123的厚度大于射极层121与栅极层122的厚度,或如图2所示,介电层123的厚度小于射极层121与栅极层122的厚度。In addition, the
图3(A)和图3(B)为本发明的电场分布比较图。图3(A)是在无介电层123的情况下其电场的分布,图3(B)是在有介电层123的情况下其电场的分布,在图3(A)中该电场分布集中在射极层121与栅极层122所形成的间隔125内,从而使射极层121所产生的电子无法完全射向所对应的阳极,而造成漏电流现象;而在图3(B)中,可以看出在射极层121与栅极层122所形成的间隔125内设置介电层123,间隔125的电场分布密度随之降低,使得射极层121的电子被吸引出后,可顺利地被阳极所具有的电位吸引而撞击阳极,因此,通过介电层123共面地设置在射极层121与栅极层122之间,不仅简化了阴极结构1的制作过程,介电层123还可作为射极层121与栅极层122间的阻隔,改变射极层121与栅极层122间的电场分布密度,从而阻隔射极层121的电子向栅极层122移动,降低阴极结构1上的漏电流现象;另外,结合图3(C)和图3(D),设置不同介电常数的介电层123,如本实施例图3(D)中所设置的介电层123的介电常数大于图3(C)中介电层123的介电常数,使得图3(D)中邻近射极121的电场分布密度大于图3(C)中邻近射极121的电场分布密度。FIG. 3(A) and FIG. 3(B) are comparison diagrams of electric field distribution in the present invention. Fig. 3 (A) is the distribution of its electric field under the situation without
因此,结合图3(B)至图3(D)以及图4,在不同介电常数的介电层123的影响下,将改变射极层121与栅极层122的电场分布密度,如图4所示,在向栅极层122施加相同电压时,在介电常数越大的介电层123的影响下,射极层121所释放的电流越大。Therefore, in conjunction with FIG. 3(B) to FIG. 3(D) and FIG. 4, under the influence of the
上述实施方式是本发明的优选实施例,但不能以此限定本发明的实施范围,根据本发明的权利要求及说明书内容所作的等效变化或修饰,均应属于本发明的专利涵盖范围。The above-mentioned embodiment is a preferred embodiment of the present invention, but it cannot limit the implementation scope of the present invention. Equivalent changes or modifications made according to the claims of the present invention and the content of the specification should all fall within the scope of the patent of the present invention.
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