CN101306412B - Fluid Spray Actuation Structure - Google Patents

Abstract

The invention is a fluid spray actuating structure, suitable for the atomizer, it atomizes the fluid blowout under the influence of electric field, the fluid spray actuating structure includes: a substrate forming a cavity for storing a liquid; the vibrating plate is provided with fixed ends at two sides, a plurality of spray holes are formed between the fixed ends, the fixed ends are respectively fixedly arranged on the substrate to seal one side of the cavity, a spacing block is formed between two adjacent spray holes, the spacing block is provided with a forming hole block and a reinforcing block integrally extended from the forming hole block, the cross section width of the forming hole block is larger than that of the reinforcing block, and the cross section thickness of the reinforcing block is larger than that of the forming hole block; and an actuating element connected to the fixed end of the vibrating plate and used for driving the vibrating plate to deform under the action of the electric field, so that the fluid stored in the cavity is excited and sprayed out of the spray hole.

Description

Fluid Spray Actuation Structure

technical field

The invention relates to an actuating structure, especially a fluid spraying actuating structure suitable for a nebulizer.

Background technique

At present, in various technical fields, whether it is medical biotechnology, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization, so the structure used to eject fluid in the nebulizer product is the key technology. Therefore, how to innovate the structure of the sprayer and break through its technical bottleneck to achieve low production cost, suitable for mass production and improve the actuation performance is the main issue that the current spray actuation structure industry needs to break through and develop.

Please refer to Fig. 1 (a), it is the schematic diagram of the actuating structure of existing nebulizer, as shown in the figure, the actuating structure 10 of existing nebulizer comprises substrate 11, vibrating plate 12 and actuating element 13, wherein two substrates 11 A cavity 14 is formed between them, which is mainly used to store liquid, and the vibrating plate 12 has a plurality of nozzle holes 121, and its two ends are fixed on the base plate 11 and one side of the cavity 14 is closed. As for the vibrating plate 12 and Sides of the fixed end of the substrate 11 are respectively connected to an actuating element 13 , the actuating element 13 is a structure in the shape of a hollow ring, and its polarization direction is the thickness direction.

The actuating structure 10 of the existing nebulizer can apply an electric field in the thickness direction of the actuating element 13 to urge the actuating element 13 to produce a lateral contraction, thereby causing the connected vibrating plate 12 to move and deform accordingly. There is a difference between the amount of piezoelectric contraction produced by the element 13 and the amount of deformation of the vibrating plate 12, which will cause the actuation structure 10 of the entire sprayer to produce a bending (bend) mode of action, which is indicated by the arrow direction of the label A in Figure 1(a). Refers to the bending deformation of the dotted line, and the vibrating plate 12 will vibrate up and down due to the bending shape.

When the operating frequency of the actuating element 13 is just the resonance frequency of the overall structure, a great velocity will be generated near the nozzle hole 121 of the vibrating plate 12 at this moment, so that the inertial force of the droplet in the nozzle hole 121 is greater than that of the nozzle hole 121. When the surface tension is high, tiny liquid droplets will be ejected from the nozzle hole 121 to achieve the purpose of fluid spraying.

Please refer to Fig. 1(b), which is a schematic diagram of the actuating structure of a common nebulizer at present, and its vibrating plate 12 is made of a thin film with a thickness of about 20 μm to 30 μm to form a nozzle hole 121 with a relatively small depth, so that The shape of the nozzle hole 121 can easily intensify the liquid flowing into the cavity 14 and oscillate and spray it out with extremely fine molecular particles. However, this thin vibrating plate 12 is easily damaged and cannot be used again under the condition of long-term bending and deformation. It will seriously affect its service life.

Please refer to Fig. 1(c) again, which is a schematic diagram of another existing sprayer actuation structure developed in order to improve the shortcoming of Fig. 1(b), as shown in the figure, the improved way is to The thickness is increased so that the vibrating plate 12 is not easily damaged and its service life can be increased. Although the problem of the service life of the vibrating plate 12 can be solved by increasing the thickness of the vibrating plate 12, it will relatively deepen the depth of the nozzle hole 121. The contact area of the attached droplet 15 at the nozzle hole 121 of the vibrating plate 12 becomes larger, so that the attached surface tension of the droplet 15 is also larger (as shown in FIG. The kinetic energy of the oscillating ejection of the particles is relatively weakened, which affects the atomization efficiency of the nebulizer liquid.

Therefore, how to develop a fluid spray actuating structure that can overcome the above-mentioned deficiencies in the prior art is an urgent problem to be solved at present.

Contents of the invention

The main purpose of the present invention is to provide a fluid spray actuation structure, which is composed of a shaped hole block and a reinforcing block integrally extended from the shaped hole block to form a spacer between two adjacent spray holes in the vibrating plate, and the spacer The cross-sectional width of the forming hole block is larger than that of the reinforcing block, and the cross-sectional thickness of the reinforcing block is higher than that of the forming hole block, so that the spacer block forms a convex block, and is driven and actuated by the actuating element under the action of the electric field. The vibrating plate connected to the elements is deformed, so that the fluid stored in the cavity is excited and ejected from multiple nozzle holes, so as to solve the problem that the actuating structure of the traditional sprayer is too thick, which causes the vibrating plate to excite the fluid extremely The kinetic energy of the oscillating ejection of the fine molecular particles is relatively weakened, which affects the atomization performance of the nebulizer fluid.

In order to achieve the above-mentioned purpose, a relatively broad implementation of the present invention is to provide a fluid spray actuation structure, which is suitable for a sprayer, and it sprays and atomizes the fluid under the action of an electric field. The fluid spray actuation structure includes: a substrate, It forms a cavity for storing fluid; the vibrating plate has fixed ends on both sides and multiple nozzle holes between the fixed ends, and the fixed ends are respectively fixed on the base plate to close one side of the cavity. A spacer block is formed between adjacent spray holes, and the spacer block has a shaped hole block and a reinforcing block integrally extended from the shaped hole block, wherein the cross-sectional width of the shaped hole block is substantially greater than the cross-sectional width of the reinforcing block, and the reinforcing block The thickness of the section is substantially higher than the section thickness of the forming hole block; and a plurality of actuating elements are connected to the fixed end of the vibrating plate, which, under the action of an electric field, drives the vibrating plate to deform, making the fluid stored in the cavity Excited to eject from multiple nozzle holes.

According to the idea of the present invention, the section thickness of the shaped hole block is substantially 20 μm˜30 μm.

According to the idea of the present invention, the cross-sectional width of the reinforcing block is substantially one-third of the cross-sectional width of the forming hole block.

According to the idea of the present invention, the cross-sectional thickness of the fixed end is substantially the sum of the cross-sectional thicknesses of the forming hole block and the reinforcing block.

According to the idea of the present invention, the actuating element is made of a piezoelectric material.

According to the idea of the present invention, the direction of the electric field is parallel to the polarization direction of the actuating element.

According to the idea of the present invention, the spacer is substantially a convex block.

In order to achieve the above object, another broad implementation of the present invention is to provide a fluid spray structure, which includes: a base plate; The ends are respectively fixed on the base plate to close one side of the cavity, and a convex block is formed between two adjacent spray holes; and the actuating element is connected to the fixed end of the vibrating plate to drive the vibrating plate to deform.

In order to achieve the above purpose, another broad implementation of the present invention is to provide a fluid spray actuation structure, which is suitable for sprayers, and it sprays and atomizes the fluid under the action of an electric field. The fluid spray actuation structure includes: a substrate , which forms a cavity for storing fluid; the vibrating plate has fixed ends on both sides and a plurality of nozzle holes between the fixed ends, and the fixed ends are respectively fixed on the base plate to close one side of the cavity. A spacer block is formed between adjacent nozzle holes, and the spacer block is a convex block; and the actuating element is connected to the fixed end of the vibrating plate, which drives the vibrating plate to deform under the action of an electric field, so that the stored in the cavity The fluid is activated and ejected from multiple nozzle holes.

Description of drawings

Fig. 1(a) is a schematic diagram of the actuating structure of a conventional nebulizer.

Fig. 1(b) is a schematic diagram of an actuation structure of another conventional nebulizer.

FIG. 1( c ) is a schematic diagram of an actuation structure of another conventional nebulizer developed to overcome the disadvantage of FIG. 1( b ).

FIG. 1( d ) is a schematic diagram of the enlarged range of liquid droplets between the nozzle holes at B in FIG. 1( c ).

Fig. 2(a) is a schematic diagram of the fluid spray actuation structure of the preferred embodiment of the present invention.

Fig. 2(b) is a schematic structural diagram of the spacer block shown in Fig. 2(a).

FIG. 2( c ) is a schematic diagram of the polarization direction of the actuating element shown in FIG. 2( a ) and the state of applying an electric field.

FIG. 2( d ) is a schematic diagram of deformation of the actuating element shown in FIG. 2( a ).

FIG. 2( e ) is a schematic diagram of the state of the liquid droplets between the nozzle holes enlarged at C in FIG. 2( a ).

Detailed ways

Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the description in the following paragraphs. It should be understood that the present invention can have various changes in different aspects, all of which do not depart from the scope of the present invention, and the descriptions and illustrations therein are used as illustrations in nature, not for limit the invention.

Please refer to FIG. 2(a), which is a schematic structural diagram of a fluid spray actuation structure in a preferred embodiment of the present invention. As shown in the figure, the fluid spray actuation structure 20 of the present invention can be applied to a nebulizer used in medical biotechnology, The fluid spray actuating structure 20 is mainly composed of a base plate 21, a vibrating plate 22 and an actuating element 23, wherein a cavity 24 is formed between the base plates 21, which is mainly used to store fluid, and the vibrating plate 22 is arranged on the base plate 21 and causes Between the moving element 23, and its two sides have a fixed end 221, respectively fixed on the base plate 21, can be used to close one side of the cavity 24, between the two fixed ends 221 of the vibrating plate 22 there are multiple a nozzle hole 222, and a plurality of interval blocks 223 are formed between two adjacent nozzle holes 222 (as shown in Fig. Shaped block body, the reinforcing block 2232 is arranged above the forming hole block 2231 and the two are made in an integrated manner, that is, the reinforcing block 2232 is integrally extended from the forming hole block 2231, and the vibration plate 22 is actuated by the actuating element 23 drives and bends and deforms, the supporting effect of the forming hole block 2231 can be strengthened by the reinforcing block 2232, and the cross-sectional width L1 of the forming hole block 2231 is greater than the cross-sectional width L2 of the reinforcing block 2232, and the cross-sectional thickness T2 of the reinforcing block 2232 is high The cross-sectional thickness T1 of the hole block 2231 is formed.

In this embodiment, the cross-sectional thickness T1 of the forming hole block 2231 can be 20 μm to 30 μm, and the cross-sectional width L2 of the reinforcing block 2232 is about one-third of the cross-sectional width L1 of the forming hole block 2231, and the forming hole block 2231 The sum of the section thickness T1 and the section thickness T2 of the reinforcing hole block 2231 is equal to the section thickness T3 of the fixed end 221 of the vibrating plate 225 .

As for the plurality of actuating elements 23 are respectively connected to the fixed end 221 of the vibrating plate 22 , and in some embodiments, the actuating element 23 preferably has a structure in the form of a hollow ring.

Please refer to Fig. 2 (c) again, which is a schematic diagram of the polarization direction of the actuating element and the state of the applied electric field. As shown in the figure, the actuating element 23 of the present invention can be made of a piezoelectric material, and its polarization direction It is the thickness direction of the actuating element 23, that is, the arrow direction indicated by the label D in Fig. 2(c). In addition, there is a signal electrode 25 on one side of the thickness direction of the actuating element 23, which can be a positive electrode, and the opposite One side has a ground electrode 26, which can be a negative electrode.

When a voltage acts on the signal electrodes 25 and ground electrodes 26 on both sides of the actuating element 23, an upward electric field will be generated, that is, the arrow direction indicated by the label E in Fig. 2 (c), due to the direction of the electric field and the actuation The polarization directions of the elements 23 are parallel to each other, so the actuating element 23 will produce a lateral shrinkage under the action of the electric field, that is, deformation in the direction indicated by the X and Y directions as shown in FIG. 2(c), because the actuating element 23 is connected to the fixed end 221 of the vibrating plate 22, and the fixed end 221 of the vibrating plate 22 is fixed on the base plate 21, so the vibrating plate 22 connected to the actuating element 23 will move and deform accordingly.

Due to the difference between the piezoelectric contraction generated by the actuating element 23 and the deformation of the vibrating plate 22, it will cause the fluid spray actuating structure 20 to produce a bending (bend) mode of action, that is, the symbol F in FIG. 2( d ). The bending deformation of the dotted line indicated by the direction of the arrow, so that the vibrating plate 22 will vibrate up and down due to the bending shape. The vicinity of 222 can produce extremely high velocity, and when the inertial force of the droplet of its nozzle hole 222 is greater than the surface tension of nozzle hole 222, tiny droplet 27 will be ejected by nozzle hole 222 (as shown in Fig. 2 (e) ), the particle size of the ejected droplets 27 can be controlled within 5 μm or as small as 1 μm, and the size of the ejected droplets can be kept uniform to achieve the purpose of fluid spraying.

Since the cross-sectional width L1 of the forming hole block 2231 of the spacer block 223 of the present invention is greater than the cross-sectional width L2 of the reinforcing block 2232, and the cross-sectional thickness T2 of the reinforcing block 2232 is higher than the cross-sectional thickness T1 of the forming hole block 2231, it can be seen that the forming hole block 2231 is formed in a thin-shaped manner, and its cross-sectional thickness T1 can be 20 μm to 30 μm, but not limited thereto. In this way, the depth of the nozzle hole 222 formed on the surface of the vibrating plate 22 also has the characteristics of a thin film shape , the surface tension that can make the droplet attach to the nozzle hole 222 is less, please refer to Fig. 2 (e) and Fig. 1 (d) again, compare the surface tension of the droplet attached to the nozzle hole place between the present invention and the prior art , it can be seen that the nozzle hole 222 of the present invention has a smaller area of the attached droplet 27 compared to the nozzle hole 121 shown in FIG. The liquid droplet 15 is small, so the shape of the nozzle hole 222 of the present invention can increase the kinetic energy for the liquid to vibrate and eject with extremely fine molecular particles, that is, it can easily intensify the fluid flowing into the cavity 24 and eject it with extremely fine molecular particles. In order to achieve the best spray actuation efficiency.

To sum up, the fluid spray actuation structure of the present invention forms a convex block by integrally extending a reinforcing block on the forming hole block of the spacer block, which can strengthen the supporting function of the forming hole block, and the forming hole The thin shape design of the block makes the depth of the nozzle hole of the vibrating plate also have the characteristics of a thin film shape, which can make the surface tension of the droplet attached to the nozzle hole small, and can easily intensify the liquid flowing into the cavity and oscillate with extremely fine molecular particles In the case of long-term bending and deformation of the vibrating plate, it is less likely to be damaged and can increase the benefit of service life, which is extremely industrially applicable and progressive. Therefore, the fluid spray actuation structure of the present invention has great industrial value.

Claims (6)

1. a fluid spray actuating structure is applicable to a sprayer, and with fluid ejection atomizing, it comprises under electric field action for it:

One substrate, it forms a cavity, in order to store this fluid;

One oscillating plate, its both sides have respectively between a stiff end and this stiff end and have a plurality of spray orifices, this stiff end is fixedly arranged on respectively on this substrate, to seal a side of this cavity, form a spacer block between two adjacent these spray orifices, and this spacer block has a shaped hole piece and reaches by the extended boss of this shaped hole piece institute one, wherein the cross-sectional width of this boss be essentially this shaped hole piece cross-sectional width 1/3rd, the section thickness of this boss comes down to be higher than the section thickness of this shaped hole piece; And

One activates element, is connected on this stiff end of this oscillating plate, and it drives this oscillating plate and produce deformation under this electric field action, this fluid that is stored in this cavity is intensified and sprays from these a plurality of spray orifices.

2. fluid spray actuating structure according to claim 1 is characterized in that the section thickness of this shaped hole piece is essentially 20 μ m～30 μ m.

3. fluid spray actuating structure according to claim 1 is characterized in that the section thickness of this stiff end is essentially the summation of the section thickness of this shaped hole piece and this boss.

4. fluid spray according to claim 1 causes structure, it is characterized in that this actuation element is made of a piezoelectric.

5. fluid spray actuating structure according to claim 1, the direction that it is characterized in that this electric field are parallel with the polarised direction of this actuation element.

6. fluid spray actuating structure according to claim 1 is characterized in that this spacer block is essentially a convex block.

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