CN101296872A - Optical glass, manufacturing device of optical glass, and manufacturing method thereof - Google Patents
Optical glass, manufacturing device of optical glass, and manufacturing method thereof Download PDFInfo
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- CN101296872A CN101296872A CNA2006800401496A CN200680040149A CN101296872A CN 101296872 A CN101296872 A CN 101296872A CN A2006800401496 A CNA2006800401496 A CN A2006800401496A CN 200680040149 A CN200680040149 A CN 200680040149A CN 101296872 A CN101296872 A CN 101296872A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 45
- 239000005304 optical glass Substances 0.000 title abstract description 77
- 238000002844 melting Methods 0.000 claims abstract description 158
- 230000008018 melting Effects 0.000 claims abstract description 158
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 36
- 230000001590 oxidative effect Effects 0.000 claims abstract description 26
- 239000007789 gas Substances 0.000 claims description 139
- 239000011521 glass Substances 0.000 claims description 75
- 239000006063 cullet Substances 0.000 claims description 57
- 239000000463 material Substances 0.000 claims description 46
- 238000000034 method Methods 0.000 claims description 41
- 239000000203 mixture Substances 0.000 claims description 23
- 239000000126 substance Substances 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 14
- 239000000155 melt Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 4
- 229910052743 krypton Inorganic materials 0.000 claims description 4
- 229910052754 neon Inorganic materials 0.000 claims description 4
- 229910052684 Cerium Inorganic materials 0.000 claims description 3
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 3
- 229910052689 Holmium Inorganic materials 0.000 claims description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 3
- 229910052772 Samarium Inorganic materials 0.000 claims description 3
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 230000005587 bubbling Effects 0.000 claims description 2
- 230000004927 fusion Effects 0.000 claims 16
- 238000009434 installation Methods 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 60
- 229910052697 platinum Inorganic materials 0.000 abstract description 26
- 230000032683 aging Effects 0.000 abstract description 18
- 239000006060 molten glass Substances 0.000 abstract description 6
- 238000007664 blowing Methods 0.000 description 63
- 239000012768 molten material Substances 0.000 description 24
- 230000008569 process Effects 0.000 description 24
- 229910001260 Pt alloy Inorganic materials 0.000 description 22
- 239000002994 raw material Substances 0.000 description 19
- 238000010309 melting process Methods 0.000 description 18
- 238000003756 stirring Methods 0.000 description 16
- 238000002834 transmittance Methods 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 238000009423 ventilation Methods 0.000 description 10
- 230000006866 deterioration Effects 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000005352 clarification Methods 0.000 description 8
- 229910018068 Li 2 O Inorganic materials 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 5
- YKIOKAURTKXMSB-UHFFFAOYSA-N adams's catalyst Chemical compound O=[Pt]=O YKIOKAURTKXMSB-UHFFFAOYSA-N 0.000 description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910019020 PtO2 Inorganic materials 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 3
- 239000011449 brick Substances 0.000 description 3
- 238000004031 devitrification Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 239000003779 heat-resistant material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- -1 platinum ions Chemical class 0.000 description 3
- 238000004017 vitrification Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000010583 slow cooling Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 150000002222 fluorine compounds Chemical group 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000010907 mechanical stirring Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 239000000075 oxide glass Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/11—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
- C03C3/112—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine
- C03C3/115—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine containing boron
- C03C3/118—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine containing boron containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
- C03C3/093—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/102—Glass compositions containing silica with 40% to 90% silica, by weight containing lead
- C03C3/108—Glass compositions containing silica with 40% to 90% silica, by weight containing lead containing boron
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/11—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
- C03C3/112—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine
- C03C3/115—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine containing boron
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
Abstract
本发明用于制造耐老化性优异且铂节瘤的产生受到抑制的光学玻璃。本发明提供一种光学玻璃及其制造方法,在所述光学玻璃中,以质量百分比来计,含有30~70%的SiO2及/或3~20%的B2O3,且Pt含量为5ppm以下,在所述光学玻璃的制造方法中,以熔解炉的容积为基准,以2~20次/分的速度置换熔解装置内的气体,而且再向熔融玻璃内鼓吹非氧化性气体。
The present invention is used to produce optical glass that is excellent in aging resistance and suppresses the occurrence of platinum nodules. The invention provides an optical glass and a manufacturing method thereof. The optical glass contains 30-70% of SiO 2 and/or 3-20% of B 2 O 3 in terms of mass percentage, and the Pt content is 5ppm or less, in the above optical glass manufacturing method, the gas in the melting device is replaced at a rate of 2 to 20 times per minute based on the volume of the melting furnace, and the non-oxidizing gas is blown into the molten glass.
Description
技术领域 technical field
本发明涉及一种耐老化(solarization resistance)性能优异的含有SiO2及/或B2O3的光学玻璃、通过鼓吹气体(bubbling)来搅拌熔融物的同时制造含有SiO2及/或B2O3的光学玻璃的制造方法、排出熔融装置内的气体的同时制造含有SiO2及/或B2O3的光学玻璃的制造方法、以及制造含有SiO2及/或B2O3的光学玻璃的装置。The present invention relates to an optical glass containing SiO 2 and /or B 2 O 3 which is excellent in solarization resistance. 3. Method for producing optical glass, method for producing optical glass containing SiO 2 and/or B 2 O 3 while exhausting gas in a melting device, and method for producing optical glass containing SiO 2 and/or B 2 O 3 device.
背景技术 Background technique
在制造光学玻璃时,重要的是在使多种玻璃原料熔融的碎玻璃化工序及/或正式熔融工序中,对熔融物(毛坯玻璃或玻璃)进行充分搅拌。作为搅拌熔融物的方法,提供了用搅拌翼来搅拌熔融物的机械搅拌法和使用气体鼓吹装置的鼓吹法(例如,参照专利文献1)。此处,鼓吹法是指这样的方法:在熔融槽中或熔融槽的底部配置气体鼓吹装置,从气体鼓吹装置吹入氧等气体的气泡,使得液体随着气泡的上升而移动,以此来搅拌液体。When producing optical glass, it is important to sufficiently stir the molten material (blank glass or glass) in the cullet process and/or main melting process in which various glass raw materials are melted. As a method of stirring the molten material, there are provided a mechanical stirring method of stirring the molten material with stirring blades and a blowing method using a gas blowing device (for example, refer to Patent Document 1). Here, the blowing method refers to a method in which a gas blowing device is arranged in the melting tank or at the bottom of the melting tank, and bubbles of gas such as oxygen are blown from the gas blowing device so that the liquid moves with the rise of the bubbles, thereby Stir the liquid.
而且,在欲要高产出率地生产质地非常均匀的光学玻璃时,必须防止来自所述气体鼓吹装置或熔融槽等熔融装置的污染(contamination)。因此,一般来说使用至少与熔融物接触的部分或全部是由耐热性及耐腐蚀性优异的铂或铂合金所构成的熔融装置。Furthermore, when it is intended to produce highly uniform optical glass with a high yield, it is necessary to prevent contamination (contamination) from melting devices such as the gas blowing device and the melting tank. Therefore, generally, a melting device is used in which at least part or all of the part in contact with the melt is made of platinum or a platinum alloy excellent in heat resistance and corrosion resistance.
专利文献1:日本专利特公昭48-27724号公报Patent Document 1: Japanese Patent Application Publication No. 48-27724
然而,当熔融槽或气体鼓吹装置等使用铂或铂合金时,铂部分或铂合金部分的一部分会因熔融时的高温而与空气中的氧发生反应,从而生成二氧化铂(PtO2)。此PtO2会变成气体,并从气相经由熔融玻璃表面而熔入到熔融玻璃中。而且,铂离子(Pt4+)也会从含有SiO2及/或B2O3的熔融玻璃与铂或铂合金的边界面熔入到熔融玻璃中。一般认为铂离子与老化现象之间存在某些关联性,例如,当熔入到含有SiO2及/或B2O3的熔融玻璃中的Pt4+(含PtO2)作为杂质而残存在最终产品即光学玻璃中时,有时会引起含有SiO2及/或B2O3的玻璃的透射率恶化或伴随着紫外线照射的老化现象。However, when platinum or a platinum alloy is used in a melting tank or a gas blowing device, platinum dioxide (PtO 2 ) is produced by reacting with oxygen in the air due to the high temperature of the platinum part or part of the platinum alloy part during melting. This PtO2 turns into a gas and melts into the molten glass from the gas phase through the surface of the molten glass. Furthermore, platinum ions (Pt 4+ ) also melt into the molten glass from the interface between the molten glass containing SiO 2 and/or B 2 O 3 and platinum or platinum alloy. It is generally believed that there is some correlation between platinum ions and aging phenomena, for example, when Pt 4+ (including PtO 2 ) melted into a molten glass containing SiO 2 and/or B 2 O 3 When used in optical glass as a product, the transmittance of the glass containing SiO 2 and/or B 2 O 3 deteriorates or aging phenomenon caused by ultraviolet irradiation may be caused.
所述老化现象会使含有SiO2及/或B2O3的光学透镜的性能下降,所以能否抑制老化现象,成为采用此光学透镜的重要因素。例如,对于i线步进机的光学透镜,要求其不会发生因紫外线照射引起的老化现象。The aging phenomenon will degrade the performance of the optical lens containing SiO 2 and/or B 2 O 3 , so whether the aging phenomenon can be suppressed becomes an important factor for using the optical lens. For example, for the optical lens of the i-line stepper, it is required that it will not age due to ultraviolet radiation.
尽管存在如上所述的老化现象的问题,但是在高温的玻璃制造中,因为如上所述的理由,不可避免地要使用铂制或铂合金制的熔融槽或气体鼓吹装置。因此,期待一种耐老化性能优异的含有SiO2及/或B2O3的光学玻璃。In spite of the problem of aging phenomena as described above, in high-temperature glass production, for the reasons described above, it is unavoidable to use a melting tank or a gas blowing device made of platinum or a platinum alloy. Therefore, an optical glass containing SiO 2 and/or B 2 O 3 excellent in aging resistance is desired.
发明内容 Contents of the invention
本发明是鉴于如上所述的课题而研制的,目的在于提供一种耐老化性优异的含有SiO2及/或B2O3的光学玻璃、以及用来制造耐老化性优异的玻璃的含有SiO2及/或B2O3的光学玻璃的制造方法及制造装置。The present invention was developed in view of the above-mentioned problems, and an object thereof is to provide an optical glass containing SiO 2 and/or B 2 O 3 which is excellent in aging resistance, and an optical glass containing SiO 2 and/or B 2 O 3 which is used to manufacture glass excellent in aging resistance. 2 and/or B 2 O 3 optical glass manufacturing method and manufacturing apparatus.
具体而言,本发明提供如下内容。Specifically, the present invention provides the following contents.
(1)一种光学玻璃,其含有SiO2及/或B2O3,此光学玻璃的特征在于,其中的Pt含量(质量基准)为5ppm以下。(1) An optical glass containing SiO 2 and/or B 2 O 3 , wherein the optical glass has a Pt content (mass basis) of 5 ppm or less.
(2)根据(1)所述的光学玻璃,其特征在于,以质量百分比来计,所述光学玻璃含有30%以上、70%以下的SiO2及/或3%以上、20%以下的B2O3。(2) The optical glass according to (1), characterized in that, in terms of mass percentage, the optical glass contains 30% to 70% of SiO 2 and/or 3% to 20% of B 2 O 3 .
(3)根据(1)或(2)所述的光学玻璃,其特征在于,(3) The optical glass according to (1) or (2), wherein
以质量百分比来计,所述光学玻璃含有下述成分:In terms of mass percentage, the optical glass contains the following components:
(a)SiO2:30~70%及/或(a) SiO 2 : 30-70% and/or
B2O3:3~20%及/或B 2 O 3 : 3-20% and/or
PbO:0~2%及/或PbO: 0~2% and/or
Al2O3:0~6%及/或Al 2 O 3 : 0~6% and/or
Li2O:0~5%及/或Li 2 O: 0~5% and/or
CaO:0~2%及/或CaO: 0~2% and/or
TiO2:0~0.5%及/或TiO 2 : 0~0.5% and/or
As2O3:0~1%及/或As 2 O 3 : 0~1% and/or
Sb2O3:0~1%及/或Sb 2 O 3 : 0~1% and/or
Na2O:0~13%及/或Na 2 O: 0~13% and/or
K2O:0~23%及/或K 2 O: 0~23% and/or
BaO:0~42%及/或BaO: 0~42% and/or
ZnO:0~7%ZnO: 0-7%
以及as well as
(b)部分或全部的所述氧化物经置换所得的氟化物中F的合计量为0~11%。(b) The total amount of F in the fluoride obtained by substituting part or all of the oxides is 0-11%.
(4)根据(1)至(3)中任一项所述的光学玻璃,其特征在于,以质量百分比来计,Na2O+K2O+BaO+ZnO为10~45%。(4) The optical glass according to any one of (1) to (3), wherein Na 2 O+K 2 O+BaO+ZnO is 10 to 45% by mass percent.
(5)根据(1)至(4)中任一项所述的光学玻璃,其特征在于,以质量百分比来计,SrO为0~2%及/或ZrO2为0~2%。(5) The optical glass according to any one of (1) to (4), wherein SrO is 0 to 2% and/or ZrO 2 is 0 to 2% by mass percentage.
(6)根据(1)至(5)中任一项所述的光学玻璃,其特征在于,以质量百分比来计,CaO+SrO+ZrO2为0~2%。(6) The optical glass according to any one of (1) to (5), wherein CaO+SrO+ZrO 2 is 0 to 2% by mass percentage.
(7)根据(1)至(6)中任一项所述的光学玻璃,其特征在于,以质量百分比来计,所述光学玻璃含有50.5~70%的所述SiO2、3~15%的所述B2O3、2.9%以下的所述Al2O3以及4.9%以下的所述Li2O。(7) The optical glass according to any one of (1) to (6), characterized in that, in terms of mass percentage, the optical glass contains 50.5-70% of the SiO 2 , 3-15% The B 2 O 3 , the Al 2 O 3 is less than 2.9%, and the Li 2 O is less than 4.9%.
(8)根据(1)至(7)中任一项所述的光学玻璃,其特征在于,以质量百分比来计,所述光学玻璃含有55.35~70%的所述SiO2、2.3%以下的所述Al2O3以及3%以下的所述Li2O。(8) The optical glass according to any one of (1) to (7), characterized in that, in terms of mass percentage, the optical glass contains 55.35-70% of the SiO 2 , 2.3% or less of The Al 2 O 3 and the Li 2 O are less than 3%.
(9)根据(1)至(8)中任一项所述的光学玻璃,其特征在于,V、Cr、Mn、Fe、Co、Ni、Cu、Ag、W、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Dy、Ho、Fr、Tm、Yb、Lu各成分的合计含量(质量基准)为3ppm以下。(9) The optical glass according to any one of (1) to (8), wherein V, Cr, Mn, Fe, Co, Ni, Cu, Ag, W, Ce, Pr, Nd, Pm , Sm, Eu, Gd, Dy, Ho, Fr, Tm, Yb, and Lu, the total content (mass basis) of each component is 3 ppm or less.
(10)一种光学玻璃的制造方法,其包括如下工序:“将原料混合物(以下称作批料)熔融而获得碎玻璃的工序(以下称作碎玻璃化工序)”及/或“将碎玻璃及/或批料熔融而获得玻璃的工序(以下称作正式熔融工序)”,所述光学玻璃的制造方法的特征在于,(10) A method for producing optical glass, comprising the steps of "melting a raw material mixture (hereinafter referred to as a batch) to obtain cullet (hereinafter referred to as a cullet process)" and/or "making the cullet A process of melting glass and/or batch materials to obtain glass (hereinafter referred to as the main melting process)", the manufacturing method of the optical glass is characterized in that
所获得的玻璃的组成中含有SiO2及/或B2O3,且The composition of the obtained glass contains SiO 2 and/or B 2 O 3 , and
向所述碎玻璃化工序及/或所述正式熔融工序的熔融物内鼓吹非氧化性气体。A non-oxidizing gas is blown into the melt in the cullet process and/or the main melting process.
(11)根据(10)所述的光学玻璃的制造方法,其特征在于,将所述非氧化性气体吹入到距离所述熔融物的液面100mm以上的深度。(11) The method for producing optical glass according to (10), wherein the non-oxidizing gas is blown to a depth of 100 mm or more from the liquid surface of the melt.
(12)根据(10)或(11)所述的光学玻璃的制造方法,其特征在于,针对每1升玻璃容积以0.002~0.05升/分的供给速度吹入所述非氧化性气体。(12) The method for producing optical glass according to (10) or (11), wherein the non-oxidizing gas is blown at a supply rate of 0.002 to 0.05 liter/minute per liter of glass volume.
(13)根据(10)至(12)中任一项所述的光学玻璃的制造方法,其特征在于,所述非氧化性气体为He、Ne、Ar、Kr、Xe、N2、H2、CO或者这些气体的多种混合气体。(13) The method for producing optical glass according to any one of (10) to (12), wherein the non-oxidizing gas is He, Ne, Ar, Kr, Xe, N 2 , H 2 , CO or a variety of mixed gases of these gases.
(14)一种光学玻璃的制造方法,其包括如下工序:将“原料混合物(以下称作批料)熔融而获得碎玻璃的工序(以下称作碎玻璃化工序)”及/或“将所述碎玻璃及/或批料熔融而获得玻璃的工序(以下称作正式熔融工序)”,所述光学玻璃的制造方法的特征在于,(14) A method for producing optical glass, comprising the steps of "melting a raw material mixture (hereinafter referred to as a batch) to obtain cullet (hereinafter referred to as a cullet process)" and/or "making the obtained The process of obtaining glass by melting the cullet and/or batch material (hereinafter referred to as the main melting process)", the manufacturing method of the optical glass is characterized in that
所获得的玻璃的成分中含有SiO2及/或B2O3系,且The composition of the obtained glass contains SiO 2 and/or B 2 O 3 series, and
将所述碎玻璃化工序及/或所述正式熔融工序中的熔融装置内的空间中的气体排出。The gas in the space in the melting device in the cullet process and/or the main melting process is exhausted.
(15)根据(14)所述的光学玻璃的制造方法,其特征在于,在所述碎玻璃化工序及/或所述正式熔融工序中,使所述批料及/或所述碎玻璃熔融,与之同时将所述熔融装置内的空间中的气体排出。(15) The method for producing optical glass according to (14), wherein in the cullet forming step and/or the main melting step, the batch material and/or the cullet are melted, At the same time, the gas in the space in the melting device is exhausted.
(16)根据(14)或(15)所述的光学玻璃的制造方法,其特征在于,以所述熔融装置内的空间容积为基准,以2~20次/分的速度来置换该熔融装置内的气体。(16) The method for producing optical glass according to (14) or (15), wherein the melting device is replaced at a rate of 2 to 20 times per minute based on the volume of the space in the melting device. gas inside.
(17)一种光学玻璃的制造装置,所述光学玻璃至少含有SiO2及/或B2O3,此光学玻璃的制造装置的特征在于,(17) A manufacturing apparatus for optical glass containing at least SiO 2 and/or B 2 O 3 , characterized in that the optical glass manufacturing apparatus is characterized in that
包括:将批料熔融而获得碎玻璃的批料熔融装置及/或将所述碎玻璃或所述批料熔融而获得玻璃熔融物的正式熔融装置,非氧化性气体鼓泡装置设置在所述原料混合物熔融装置内及/或所述碎玻璃熔融装置内。Including: a batch material melting device for melting batch materials to obtain cullet and/or a formal melting device for melting the cullet or the batch material to obtain glass melts, and a non-oxidizing gas bubbling device is arranged on the The raw material mixture melting device and/or the cullet melting device.
(18)一种光学玻璃的制造装置,所述光学玻璃至少含有SiO2及/或B2O3,此光学玻璃的制造装置的特征在于,(18) A manufacturing device for optical glass containing at least SiO 2 and/or B 2 O 3 , the manufacturing device for optical glass is characterized in that
包括:熔融槽,用来使批料或碎玻璃熔融而获得熔融物;炉体,覆盖所述熔融槽的周围,并且具有投入所述批料或所述碎玻璃的开口部;以及排气机构,其配置或者连通在所述开口部附近,用来将所述熔融槽内的所述熔融物所产生的气体排出。Comprising: a melting tank for melting batch materials or cullets to obtain melts; a furnace body covering the periphery of the melting tank and having an opening for feeding the batch materials or cullets; and an exhaust mechanism , which is arranged or communicated near the opening, and is used to discharge the gas generated by the molten material in the melting tank.
发明的效果The effect of the invention
根据本发明,可提供一种耐老化性优异的含有SiO2及/或B2O3的光学玻璃。According to the present invention, an optical glass containing SiO 2 and/or B 2 O 3 excellent in aging resistance can be provided.
根据本发明的光学玻璃的制造方法,可提供一种在使用将铂或铂合金作为材料的熔融装置的熔融工序中,能够抑制老化现象或产生铂节瘤的光学玻璃的制造方法。According to the method for producing optical glass of the present invention, it is possible to provide a method for producing optical glass capable of suppressing aging phenomenon and occurrence of platinum nodules in a melting process using a melting device using platinum or a platinum alloy as a material.
其结果可以获得先前所没有的“初期光线透射率良好”及/或“光线照射后的光线透射率恶化较少”的光学玻璃,作为半导体产业用(尤其是步进机用)、生物工程学或医疗等各种领域中使用的光学玻璃。As a result, optical glass with "good initial light transmittance" and/or "less deterioration in light transmittance after light irradiation" can be obtained, which is used in the semiconductor industry (especially for steppers), bioengineering, etc. Optical glass used in various fields such as medical and medical.
附图说明 Description of drawings
图1(A)是将玻璃原料熔融的原料熔融装置的平面图。图1(B)是使碎玻璃熔融的正式熔融装置的平面图。Fig. 1(A) is a plan view of a raw material melting device for melting glass raw materials. Fig. 1(B) is a plan view of an actual melting device for melting cullet.
图2(A)是使用本发明实施方式的气体鼓吹装置的批料熔融装置的沿着图1(A)的IV-IV的剖面图。图2(B)是使用本发明实施方式的气体鼓吹装置的正式熔融装置的沿着图1(B)的IV-IV的剖面图。Fig. 2(A) is a cross-sectional view along IV-IV of Fig. 1(A) of a batch material melting device using a gas blowing device according to an embodiment of the present invention. Fig. 2(B) is a cross-sectional view along line IV-IV of Fig. 1(B) of the main melting device using the gas blowing device according to the embodiment of the present invention.
图3是表示i线照射时间与光学玻璃的透射率的恶化率的图式。3 is a graph showing i-ray irradiation time and the deterioration rate of the transmittance of optical glass.
符号的说明Explanation of symbols
100 批料熔融装置100 batch material melting device
200 正式熔融装置200 Formal melting device
102、202熔融炉102, 202 melting furnace
106、206气体鼓吹装置106, 206 gas blowing device
110、210换气装置110, 210 ventilation device
112、212圆锥部112, 212 conical part
114、214吸入口114, 214 suction port
116、216排气管116, 216 exhaust pipe
121、221熔融槽121, 221 melting tank
122、222炉体122, 222 furnace body
126、226开口部126, 226 openings
203 排出口203 outlet
204 输送管204 delivery pipe
A 批料熔融物A batch melt
D 正式熔融物D formal melt
具体实施方式 Detailed ways
以下,根据图式来说明本发明的各实施方式。另外,在以下实施方式的说明中,对相同构成部件标注了相同符号,并省略或简化其说明。Hereinafter, each embodiment of this invention is demonstrated based on drawing. In addition, in the description of the following embodiments, the same components are given the same reference numerals, and their descriptions are omitted or simplified.
再者,本发明并不限定于以下所说明的实施方式,在能够实现本发明目的的范围内的变形、改良等都属于本发明。In addition, the present invention is not limited to the embodiments described below, and modifications, improvements, and the like within the range that can achieve the object of the present invention belong to the present invention.
玻璃的组成composition of glass
构成本发明的光学玻璃的各成分的组成范围将在以下描述。各成分是以质量百分比来表达的。另外,在本申请案说明书中质量百分比所表达的玻璃组成全部是由以氧化物为基准的质量百分比来表达的。此处“以氧化物为基准”是假定用作本发明的玻璃构成成分的原料的氧化物、硝酸盐等在熔融时全部分解而变成氧化物时,将所生成的氧化物的质量总和设为100质量百分比,进而表述玻璃中所含有的各成分的组成:。The composition range of each component constituting the optical glass of the present invention will be described below. Each component is expressed in mass percentage. In addition, all the glass compositions expressed by mass percentage in the specification of this application are expressed by mass percentage based on oxides. Here, "based on oxides" means that when oxides, nitrates, etc., which are used as raw materials for the glass constituents of the present invention, are all decomposed into oxides during melting, the mass sum of the generated oxides is set as It is 100% by mass, and then expresses the composition of each component contained in the glass:.
首先,说明本发明中能够制造耐老化性优异的含有SiO2及/或B2O3的光学玻璃、尤其是SiO2-B2O3成分的光学玻璃的组成范围。First, the composition range in which optical glass containing SiO 2 and/or B 2 O 3 , especially optical glass having a SiO 2 -B 2 O 3 component, excellent in aging resistance can be produced in the present invention will be described.
将各成分限定为所述组成范围的理由如下。The reason why each component is limited to the said composition range is as follows.
对于含有SiO2的光学玻璃而言,SiO2是在玻璃形成方面有用的成分。但是,当SiO2的重量百分比小于30%时并不优选,因为此时容易造成需要较多量的B2O3或BaO等成分的倾向,此外折射率也容易变高,或者容易导致化学性质恶化。另外,如果SiO2超过70%,则玻璃的粘度容易变高,结果容易导致难以获得质地均匀的玻璃。因此,考虑到折射率、化学性质的恶化特点、玻璃的粘性等因素,从而SiO2的下限优选50.5%以上,更优选53.0%以上,最优选55.35%以上。而且,SiO2的上限优选70%以下,更优选65%以下,最优选61%以下。For optical glass containing SiO 2 , SiO 2 is a useful component in glass formation. However, when the weight percentage of SiO2 is less than 30%, it is not preferable, because it tends to require a large amount of components such as B2O3 or BaO , and the refractive index is also likely to become high, or the chemical properties are likely to deteriorate. . In addition, when SiO 2 exceeds 70%, the viscosity of the glass tends to become high, and as a result, it tends to be difficult to obtain a glass with a uniform texture. Therefore, the lower limit of SiO 2 is preferably 50.5% or more, more preferably 53.0% or more, and most preferably 55.35% or more, considering factors such as refractive index, deterioration characteristics of chemical properties, and glass viscosity. Also, the upper limit of SiO2 is preferably 70% or less, more preferably 65% or less, and most preferably 61% or less.
对于含有B2O3的光学玻璃而言,B2O3与SiO2同样是形成玻璃的氧化物,在使玻璃低色散化或者调节粘性方面有效。但是,当B2O3小于3%及超过20%时不优选,这是因为,如果B2O3小于3%,则易使其效果不充分,而如果超过20%,则化学性质容易恶化。进一步考虑到玻璃的低色散、粘性、化学性质的恶化等因素,从而B2O3优选3%以上、20%以下。因此,B2O3的上限优选20%以下,更优选17%以下,最优选15%以下。而且,B2O3的下限优选3%以上,更优选5%以上,最优选6%以上。In optical glass containing B 2 O 3 , B 2 O 3 is a glass-forming oxide like SiO 2 , and is effective in reducing dispersion of glass or adjusting viscosity. However, it is not preferable when B2O3 is less than 3% or more than 20%, because if B2O3 is less than 3%, the effect is likely to be insufficient, and if it exceeds 20% , the chemical properties are likely to deteriorate. . Further considering factors such as low dispersion of glass, viscosity, and deterioration of chemical properties, B 2 O 3 is preferably 3% or more and 20% or less. Therefore, the upper limit of B 2 O 3 is preferably 20% or less, more preferably 17% or less, and most preferably 15% or less. Also, the lower limit of B 2 O 3 is preferably 3% or more, more preferably 5% or more, and most preferably 6% or more.
Al2O3在提高玻璃的化学耐久性、调整粘度或折射率方面有效。但是,当Al2O3超过6%时,玻璃的粘性容易变高。并且,进一步考虑到玻璃的化学耐久性、粘度或折射率等因素,从而Al2O3更优选2.9%以下,最优选2.3%以下。Al 2 O 3 is effective in improving the chemical durability of glass and adjusting viscosity or refractive index. However, when Al2O3 exceeds 6%, the viscosity of glass tends to become high. Furthermore, considering the chemical durability, viscosity, and refractive index of the glass, Al 2 O 3 is more preferably 2.9% or less, most preferably 2.3% or less.
Li2O具有促进玻璃原料熔融的效果,与其他碱金属氧化物相比,难以导致折射率降低,所以是有效的成分。但是,当Li2O超过5%时并不优选,因为此时容易导致玻璃的失透性增大。并且,进一步考虑到粘性、折射率、化学性质的恶化等因素,从而Li2O更优选4.9%以下,最优选3%以下。Li 2 O has an effect of promoting the melting of glass raw materials, and is an effective component because it is less likely to cause a decrease in the refractive index than other alkali metal oxides. However, when Li 2 O exceeds 5%, it is not preferable because the devitrification of the glass tends to increase in this case. Furthermore, taking into account factors such as viscosity, refractive index, and deterioration of chemical properties, Li 2 O is more preferably 4.9% or less, most preferably 3% or less.
Na2O及K2O在促进玻璃原料的熔融方面有效,即便玻璃中大量含有Na2O及K2O,也可以制造稳定的玻璃。但是,当Na2O及K2O的量分别超过13%及23%时并不优选,因为此时容易导致化学性质恶化。Na2O的上限优选13%以下,更优选10%以下,最优选7%以下。而且,K2O的上限优选23%以下,更优选20%以下。Na 2 O and K 2 O are effective in accelerating melting of glass raw materials, and stable glass can be produced even if Na 2 O and K 2 O are contained in large amounts in glass. However, it is not preferable when the amounts of Na 2 O and K 2 O exceed 13% and 23% respectively, because chemical properties are easily deteriorated at this time. The upper limit of Na 2 O is preferably 13% or less, more preferably 10% or less, and most preferably 7% or less. Furthermore, the upper limit of K 2 O is preferably 23% or less, more preferably 20% or less.
BaO不会过度增大玻璃的色散(不会过度减小阿贝数),而是可以提高折射率,能够在较广的组成范围内获得耐失透性较大的稳定的玻璃。但是,如果BaO超过42%,则玻璃的化学耐久性容易极度恶化。因此,BaO的上限优选42%以下,更优选25%以下,最优选18%以下。BaO does not excessively increase the dispersion of the glass (does not excessively reduce the Abbe number), but can increase the refractive index, and can obtain a stable glass with high devitrification resistance in a wide composition range. However, when BaO exceeds 42%, the chemical durability of glass tends to deteriorate extremely. Therefore, the upper limit of BaO is preferably 42% or less, more preferably 25% or less, and most preferably 18% or less.
ZnO是在提高折射率、调整粘性、改善耐失透性等方面有效的成分。但是,当ZnO超过7%时并不优选,因为此时会导致短波长区域的透射率下降。因此,ZnO的上限优选7%以下,更优选3%以下,最优选1%以下。ZnO is a component effective in increasing the refractive index, adjusting viscosity, improving devitrification resistance, and the like. However, when ZnO exceeds 7%, it is not preferable because in this case, the transmittance in the short-wavelength region decreases. Therefore, the upper limit of ZnO is preferably 7% or less, more preferably 3% or less, and most preferably 1% or less.
又,为了获得稳定、化学性质优异、且直到短波长区域为止的透射率均良好的玻璃,Na2O、K2O、BaO及ZnO的一种或两种以上成分的合计量的范围(%)的上限优选45%以下,更优选40%以下,最优选35%以下。而且,下限优选10%以上,更优选13%以上,最优选15%以上。In addition, in order to obtain a glass that is stable, excellent in chemical properties, and has good transmittance up to the short wavelength region, the range of the total amount of one or more components of Na2O , K2O , BaO, and ZnO (% ) is preferably 45% or less, more preferably 40% or less, most preferably 35% or less. Also, the lower limit is preferably 10% or more, more preferably 13% or more, and most preferably 15% or more.
PbO及TiO2对于含有SiO2及/或B2O3的光学玻璃、特别是对于SiO2-B2O3-碱金属氧化物及/或碱土类金属氧化物系玻璃而言,在防止老化现象方面有效。但是,如果所述成分的含量超过所需,则容易成为导致短波长区域的光线透射率恶化的原因,因此,所述成分的含量的上限分别优选2%以下及1.0%以下,更优选1%以下及0.1%以下。For optical glass containing SiO 2 and/or B 2 O 3 , especially for SiO 2 -B 2 O 3 -alkali metal oxide and/or alkaline earth metal oxide glass, PbO and TiO 2 play an important role in preventing aging. phenomenon is effective. However, if the content of the above-mentioned components is more than necessary, it is likely to cause deterioration of the light transmittance in the short-wavelength region. Therefore, the upper limits of the content of the above-mentioned components are preferably 2% or less and 1.0% or less, and more preferably 1%. Below and below 0.1%.
As2O3及Sb2O3具有作为玻璃澄清助剂的效果,可分别任意地添加,但为了获得所述效果,分别添加1%以下就足够。As 2 O 3 and Sb 2 O 3 have effects as glass clarification aids and can be added arbitrarily, but in order to obtain the above effects, it is sufficient to add 1% or less of each.
氟可作为与一种或两种以上所述氧化物的一部分或全部进行置换的氟化物而任意添加,在调整折射率及粘度方面有效。但是,当所述氟化物的合计量超过11%时并不优选,因为此时玻璃容易乳白化,或者折射率容易变得过小,在熔融时氟会过度挥发,从而难以制造质地均匀的玻璃。氟化物的合计量的上限优选11%以下,更优选9.5%以下。Fluorine can be added arbitrarily as a fluoride substituted for part or all of one or two or more of the above-mentioned oxides, and is effective in adjusting the refractive index and viscosity. However, when the total amount of the fluoride exceeds 11%, it is not preferable because the glass tends to become opalescent or the refractive index tends to be too small, and fluorine volatilizes excessively during melting, making it difficult to manufacture a uniform glass. . The upper limit of the total amount of fluoride is preferably 11% or less, more preferably 9.5% or less.
另外,除了所述各成分以外,为了调整折射率及改善玻璃的化学性质等,还可以分别添加不超过2%的任意成分CaO、SrO及ZrO2。再者,当添加这些成分时,选自CaO、SrO及ZrO2中的一种或两种以上的合计量优选不超过2%,更优选1%以下。In addition, in addition to the above-mentioned components, in order to adjust the refractive index and improve the chemical properties of the glass, optional components such as CaO, SrO and ZrO 2 may be added in an amount not exceeding 2%. Furthermore, when these components are added, the total amount of one or two or more selected from CaO, SrO, and ZrO 2 is preferably not more than 2%, more preferably 1% or less.
而且,Ti以外的过渡金属,例如V、Cr、Mn、Fe、Co、Ni、Cu、Ag、W、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Dy、Ho、Fr、Tm、Yb、Lu各成分的合计含量优选3ppm以下。作为杂质而含有的所述各成分的吸收系数较大,即便少量混入也会导致透射率恶化。Moreover, transition metals other than Ti, such as V, Cr, Mn, Fe, Co, Ni, Cu, Ag, W, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Dy, Ho, Fr, Tm, Yb The total content of each component of Lu is preferably 3 ppm or less. The above-mentioned components contained as impurities have a large absorption coefficient, and even if mixed in a small amount, the transmittance will be deteriorated.
为了防止老化现象,本发明的光学玻璃的Pt含量优选5ppm以下。进一步优选1ppm以下,更优选0.5ppm以下,最优选0.2ppm以下。In order to prevent aging phenomenon, the Pt content of the optical glass of the present invention is preferably 5 ppm or less. More preferably 1 ppm or less, more preferably 0.5 ppm or less, most preferably 0.2 ppm or less.
批料熔融装置、碎玻璃化工序Batch melting device, cullet vitrification process
以下,详细说明用来制造铂含量较少且耐老化现象良好的玻璃的批料熔解装置、碎玻璃化工序。Hereinafter, a batch melting device and a cullet process for producing glass with a low platinum content and good aging resistance will be described in detail.
如图1(A)及图2(A)所示,碎玻璃化工序中使用的批料熔融装置100包括:熔融炉102,用来使批料熔融以获得批料熔融物A;以及气体鼓吹装置106,向所述批料熔融物A内鼓吹气体。而且,熔融炉102包括:成为批料熔融时的容器的熔融槽121;覆盖此熔融槽121周围的炉体122;以及加热装置(未图示)。As shown in Fig. 1(A) and Fig. 2(A), the batch
对于熔融槽121而言,考虑到批料熔融物A的熔融、澄清所需的耐热性、耐侵蚀生及对批料熔融物A的品质影响较少等因素,优选的是,至少与批料熔融物A接触的部分例如是由石英、铂(Pt)或者铂合金(Pt合金)所构成的熔融槽,更优选的是由铂或铂合金构成的熔融槽121。For the
炉体122覆盖熔融槽121的周围,是由耐火砖等耐热材料所形成。在此炉体122的上部,形成了用以向熔融槽121中投入玻璃原料的开口部126。而且,开口部126成为用以将熔融槽121内的批料熔融物A内残存的气体导入到排出装置(未图示)的入口,所述排出装置连接于从炉体122内部排出所述残存气体的换气装置110。The
气体鼓吹装置106从所述开口部126插入到熔融槽121内。即,开口部126兼作用来向熔融物内鼓吹气体的气体鼓吹装置106的插入孔。为了充分搅拌批料熔融物A,气体鼓吹装置106的构造是能够尽可能地产生大型气泡的众所周知的构造。对于此气体鼓吹装置106而言,考虑到它们的耐热性、对批料熔融物A的耐侵蚀性以及对批料熔融物A的品质的影响较少等因素,优选的是,例如与批料熔融物A接触的部分是由石英、铂或铂合金构成的气体鼓吹装置,更优选的是由铂或铂合金构成的气体鼓吹装置。The
当熔融槽121等构成批料熔融装置100的构件或气体鼓吹装置106中,与批料熔融物A接触的部分为铂或铂合金时,因为氧会与铂或铂合金发生反应而产生PtO2,所以作为以气体鼓吹装置106进行鼓吹时所使用的气体,优选非氧化性气体。作为非氧化性气体,可列举氧分压为1%以下、优选0.01%以下、更优选0.0001%以下的气体,优选氦气(He)、氖气(Ne)、氩气(Ar)、氪气(Kr)、氙气(Xe)或氮气(N2)等中性气体,或者一氧化碳(CO)或/及氢气(H2)等还原性气体,或者选自所述气体中的两种以上的混合气体。When platinum or a platinum alloy is used in the part of the
作为使用气体鼓吹装置106向批料熔融物A内吹入非氧化性气体的深度,可以任意地设定,但优选距离批料熔融物A的液面100mm以上的深度来向批料熔融物A内吹入非氧化性气体。The depth at which the non-oxidizing gas is blown into the batch material melt A using the
另外,换气装置110设置在熔融炉102的上部。此换气装置110包括:形成有吸入口114的圆锥部112,此吸入口114的开口面形状与开口部126大致相同;以及与此圆锥部112连接着的排气管116。再者,换气装置110是用来排出由熔融槽121内的批料熔融物A产生的气体的排气机构的一例。In addition, the
圆锥部112呈圆锥状,即,随着从吸入口114朝向上方而逐渐变细。The
批料熔融装置100内的气体的排出,是使用换气装置110,以熔融炉102熔融时的空间容积为基准,以2~20次/分的速度进行排出的(批料熔融工序)。The gas in the
排气管116是从圆锥部112的最上部向垂直于气体鼓吹装置106的方向左右一分为二地形成的,并且只有左右两侧中的一侧(本实施方式中是右侧)排气管116,其方向改变为平行于气体鼓吹装置106的方向,也就是反重力方向,并且延伸,而另一侧(本实施方式中是左侧)排气管116在中途被关闭。The
而且,换气装置110中,利用作为吸引机构(吸引装置)之一例的吸引泵来吸引与圆锥部112相反一侧的开口部,以此将批料熔融物A上方的熔融时空间的气压控制为0.1kPa~100.0kPa(1hPa~1000hPa),同时将批料熔融装置100内的批料熔融物A的上方空间内存在的气体排出。进一步,在本实施方式中,只有左右两侧中的一侧(本实施方式中是右侧)排气管116延伸而连接到吸引机构,但只要将批料熔融物A上方的气压控制在所述的范围内,那么左侧的排气管也可以延伸而连接到其他熔解装置。In addition, in the
这样,批料熔融物A的上方空间内的压力被控制为与大气压大致相同或低于大气压的负压侧,同时熔融槽121内的批料熔融物A的上方空间内存在的气体从炉体122内部经由开口部126而朝向换气装置110的吸入口114排出。In this way, the pressure in the space above the batch material melt A is controlled to be approximately the same as the atmospheric pressure or the negative pressure side lower than the atmospheric pressure, and at the same time, the gas present in the space above the batch material melt A in the
另外,作为批料熔融物A内残存的气体,有是氧化性气体的氧、使用气体鼓吹装置106进行鼓吹时所吹入的气体,更有氧与铂或铂合金发生反应而产生的PtO2等。In addition, as the gas remaining in the batch material melt A, there are oxygen which is an oxidizing gas, the gas blown in when blowing with the
正式熔融装置、正式熔融工序Main melting device, main melting process
以下,详细说明用来制造铂含量较少且耐老化现象良好的玻璃的正式熔融装置、正式熔融工序。Hereinafter, the main melting device and the main melting process for producing glass with a low platinum content and good aging resistance will be described in detail.
如图1(B)及图2(B)所示,正式熔融工序中使用的正式熔融装置200包括:熔融炉202,用来使批料熔融以获得正式熔融物,或者用来使碎玻璃化工序中获得的碎玻璃熔融以获得正式熔融物D;排出正式熔融物D的排出口203;输送管204,作为从熔融炉202到后续工序为止的正式熔融物D的路径(导管);气体鼓吹装置206,向所述正式熔融物D内鼓吹气体;以及作为排出机构之一例的换气装置210,将正式熔融物D的上方空间内的气体排出。As shown in Figure 1 (B) and Figure 2 (B), the
熔融炉202包括:成为碎玻璃熔融时的容器的熔融槽221;覆盖此熔融槽221周围的由耐火砖等耐热材料构成的炉体222;以及加热装置(未图示)。The
对于熔融槽221而言,考虑到正式熔融物D的熔融、澄清所需的耐热性、耐侵蚀性及对正式熔融物D的品质影响较少等因素,优选的是,至少与正式熔融物D接触的部分例如是由石英、铂或者铂合金所构成的熔融槽,更优选的是由铂或铂合金构成的熔融槽。For the
炉体222覆盖熔融槽221的周围,是由耐火砖等耐热材料所构成。在此炉体222的上部,形成了用以向熔融槽221中投入碎玻璃的开口部226。而且,此开口部226成为用以将熔融槽221内的正式熔融物D内残存的气体导入到吸入口214的入口,所述吸入口214用于从炉体222内部排出所述残存气体。The
在输送管204上,设置有未图示的加热装置。通过此加热装置来控制输送管204的温度,从而控制输送管204中的正式熔融物D的粘性,并且使输送管204中的正式熔融物D的流速得到控制。而且如上所述,输送管204成为从正式熔融工序到后续工序(澄清工序、搅拌工序、缓冷工序)为止的正式熔融物D的导管。On the
气体鼓吹装置206从所述开口部226插入到熔融槽221内。即,开口部兼作用来向熔融物内鼓吹气体的气体鼓吹装置的插入孔。为了对正式熔融物D进行充分搅拌,气体鼓吹装置206的构造是能够尽可能地产生大型气泡的众所周知的构造。对于此气体鼓吹装置206而言,考虑到它们的耐热性、对正式熔融物D的耐侵蚀性以及对正式熔融物D的品质影响较少等因素,优选的是,例如至少与正式熔融物D接触的部分是由石英、铂或铂合金构成的气体鼓吹装置,特别优选的是由铂或铂合金构成的气体鼓吹装置。The
作为以气体鼓吹装置206进行鼓吹时所使用的气体,可以任意地设定。但是,当熔融槽221、输送管204等构成正式熔融装置200的构件或气体鼓吹装置206中,与正式熔融物D接触的部分是铂或铂合金时,因为氧会与铂或铂合金发生反应而产生PtO2,所以作为以气体鼓吹装置206进行鼓吹时所使用的气体,优选非氧化性气体。作为非氧化性气体,可列举氧分压为1%以下、优选0.1%以下、更优选0.01%以下的气体,优选氦气(He)、氖气(Ne)、氩气(Ar)、氪气(Kr)、氙气(Xe)或氮气(N2)等中性气体,或者一氧化碳(CO)或氢气(H2)等还原性气体,或者选自所述气体中的两种以上的混合气体。The gas used for blowing by the
作为使用气体鼓吹装置206向正式熔融物D内吹入非氧化性气体的深度,可以任意地设定,但优选距离正式熔融物D的液面100mm以上的深度来向碎玻璃熔融物D内吹入非氧化性气体。The depth at which the non-oxidizing gas is blown into the main molten material D using the
换气装置210设置在熔融炉202的上部。此换气装置210包括:形成有吸入口214的圆锥部212,此吸入口214的开口面形状与开口部226大致相同;以及与此圆锥部212连接着的排气管216。另外,换气装置210是用来排出由熔融槽221内的碎玻璃熔融物产生的气体的排气机构的一例。
圆锥部212呈圆锥状,即,随着从吸入口214朝向上方而逐渐变细。The
正式熔融装置200内的气体的排出,是使用换气装置210,以熔融炉202熔融时的空间容积为基准,以2~20次/分的速度进行排出的(正式熔融工序)。The gas in the
排气管216是从圆锥部212的最上部向垂直于气体鼓吹装置206的方向左右一分为二地形成的,并且只有左右两侧中的一侧(本实施方式中是右侧)排气管216,其方向改变为平行于气体鼓吹装置206的方向,也就是反重力方向,并且延伸,而另一侧(本实施方式中是左侧)排气管216在中途被关闭。The
而且,换气装置210中,利用作为吸引机构(吸引装置)之一例的吸引泵来吸引与圆锥部212相反一侧的开口部,以此将正式熔融物D上方的熔融时空间的气压控制为0.1kPa~100.0kPa(1hPa~1000hPa),同时将正式熔融装置200内的正式熔融物D的上方空间内存在的气体排出。进一步,在本实施方式中,只有左右两侧中的一侧(本实施方式中是右侧)排气管216延伸而连接到吸引机构,但只要将正式熔融物D上方的空间的气压控制在所述的范围内,那么左侧的排气管也可以延伸而连接到其他熔解装置。In addition, in the
这样,正式熔融物D的上方空间内的气压被控制为与大气压大致相同或低于大气压的负压侧,同时熔融槽221内的碎玻璃熔融物D的上方空间内存在的气体从炉体222内部经由开口部226而朝向换气装置210的吸入口214排出。In this way, the air pressure in the upper space of the actual molten material D is controlled to be substantially the same as the atmospheric pressure or lower than the negative pressure side of the atmospheric pressure, and at the same time, the gas existing in the upper space of the cullet molten material D in the
另外,作为正式熔融物D内残存的气体,有是氧化性气体的氧、使用气体鼓吹装置206进行鼓吹时所吹入的气体,更有氧与铂或铂合金发生反应而产生的PtO2等。In addition, as the remaining gas in the main molten material D, there are oxygen which is an oxidizing gas, the gas blown in when blowing with the
在输送管204上,设置有未图示的加热装置。通过此加热装置来控制输送管204的温度,从而控制输送管204中的正式熔融物D的粘性,其结果使得输送管204中的正式熔融物D的流速得到控制。而且如上所述,输送管204成为从正式熔融工序到后续工序(澄清工序、搅拌工序、缓冷工序)为止的正式熔融物D的导管。On the
再者,在本实施方式中,气体鼓吹装置106、206分别经由位于炉体122、222上部的开口部126、226而插入到熔融槽121、221内,但并不限定于此,例如,气体鼓吹装置106、206也可以贯穿熔融槽121、221的侧面部或底部而从侧面部或底部向批料熔融物A或正式熔融物D内鼓吹气体。Furthermore, in this embodiment, the
又,本实施方式中,是在碎玻璃化工序及正式熔融工序这两个熔融工序中,分别使用气体鼓吹装置106、206来对批料熔融物A及正式熔融物D内鼓吹气体,但也可以只在碎玻璃化工序或正式熔融工序的任一个工序中鼓吹气体。并且,在不进行气体鼓吹的工序中,也可以准备具备搅拌翼的搅拌机,所述搅拌翼用来搅拌熔融槽(例如熔融槽121或熔融槽221)内的熔融物(例如批料熔融物A或正式熔融物D)。此搅拌翼的形状并无特别限定,例如可以使用螺旋状等众所周知的形状及构成的搅拌翼。In addition, in the present embodiment, in the two melting steps of the culletization step and the main melting step, the
而且,在本实施方式中,在批料熔融工序及正式熔融工序中设置了排气机构,但也可以在任一个工序中设置排气机构。Furthermore, in the present embodiment, the exhaust mechanism is provided in the batch material melting process and the main melting process, but the exhaust mechanism may be provided in either process.
另外,在本实施方式中,只是在正式熔融工序中所设置的正式熔融装置200中设置了作为排出机构之一例的换气装置210,但也可以视需要而省略换气装置210。而且,也可以在碎玻璃化工序中所设置的批料熔融装置100中也设置作为排出机构的换气装置110。另外,当在批料熔融装置100中设置了作为排出机构的换气装置110时,也可以视需要而在正式熔融装置200中省略换气装置210。In addition, in this embodiment, only the
换气装置110及210只要具有使批料熔融物A、碎玻璃熔融物D的上方空间内存在的气体排出的功能即可,可以使用具有各种形状及构成的众所周知的换气装置。As long as the
而且,对于构成正式熔融装置200的输送管204等而言,考虑到它们的耐热性、对玻璃的耐侵蚀性及对正式熔融物D的品质影响较少等因素,优选的是,至少在与正式熔融物D接触的部分是铂或铂合金制,但不必限定于此等材料。Moreover, for the
而且,当熔融物的流速是由熔融物的粘性以外的参数、例如熔融槽221内的压力来控制等情形,未必需要在输送管204上设置加热装置(未图示)。Moreover, when the flow rate of the molten material is controlled by parameters other than the viscosity of the molten material, such as the pressure in the
所述加热装置可以使用众所周知的加热装置,例如电热器、电加热器、通电发热体、高频感应加热装置、或者使用燃烧器等的通过气体等的燃烧来加热的加热装置等,进一步,输送管204优选可以通过直接通电而加热,但不必限定于此。The heating device can use a well-known heating device, such as an electric heater, an electric heater, an electric heating element, a high-frequency induction heating device, or a heating device that uses a burner or the like to heat through combustion of gas, etc., and further, transport The
光学玻璃的制造方法Manufacturing method of optical glass
接着,使用图2(A)及图2(B),来说明使用所述的熔融装置及制造方法来制造本发明的光学玻璃的制造方法。Next, the manufacturing method which manufactures the optical glass of this invention using the said melting apparatus and manufacturing method is demonstrated using FIG.2(A) and FIG.2(B).
首先,如图2A所示,以质量百分比来计,将调配成含有30%以上、70%以下的SiO2及/或3%以上、20%以下的B2O3的能够制造光学玻璃的批料投入到批料熔融装置100的熔融槽121中,并使其熔融。此时,使用气体鼓吹装置106,将非氧化性气体鼓吹到使玻璃原料熔融(粗熔融)而获得的批料熔融物A内。此气体鼓吹通过如下方式进行:在距离熔融槽121内的批料熔融物A的液面100mm以上的深度处,针对每1升批料熔融物A的容积,以0.002~0.05升/分的供给速度吹入非氧化性气体(碎玻璃化工序)。在炉外浇铸所获得的批料熔融物A,并作为碎玻璃而回收。First, as shown in FIG. 2A , in terms of mass percentage, a batch capable of producing optical glass that is formulated to contain 30% to 70% of SiO 2 and/or 3% to 20% of B 2 O 3 is prepared. The material is put into the
接着,如图2(B)所示,将回收的碎玻璃投入到正式熔融装置200的熔融槽221中,并使其熔融。此时,使用气体鼓吹装置206,将非氧化性气体(例如氩气)鼓吹到使碎玻璃熔融(正式熔融)而获得的正式熔融物D内。此气体鼓吹通过如下方式进行:在距离熔融槽221内的正式熔融物D的液面100mm以上的深度处,针对每1升正式熔融物D的容积,以0.002~0.05升/分的供给速度吹入非氧化性气体。Next, as shown in FIG. 2(B), the recovered cullet is put into the
而且,在使碎玻璃熔融的工序中,利用作为吸引机构(吸引装置)之一例的吸引泵来吸引,而将正式熔融物D上方的气体从换气装置210排出(正式熔解工序)。此时,如果控制吸引泵以将正式熔融物D上方的气压设为0.1kPa~100.0kPa(1hPa~1000hPa),则正式熔融物D上方的气体可以良好地排出。而且,优选以熔融炉202内的熔融时空间容积为基准,以2~20次/分的速度来置换正式熔融装置200内的气体。所获得的正式熔融物D从此正式熔解工序转移到后续工序(澄清工序、搅拌工序、保冷工序),在后续工序中制造光学玻璃。Then, in the step of melting the cullet, the gas above the main melt D is sucked by a suction pump as an example of a suction mechanism (suction device) from the ventilation device 210 (main melting step). At this time, if the suction pump is controlled so that the air pressure above the main melt D is 0.1 kPa to 100.0 kPa (1 hPa to 1000 hPa), the gas above the main melt D can be discharged well. Furthermore, it is preferable to replace the gas in the
另外,本实施方式中,在原料熔融工序中使玻璃原料熔融之后,使其骤冷而制造固化的碎玻璃,并将所制造的碎玻璃投入到熔融槽221中而获得正式熔融物D,然后再连续地将熔融物供给到后续工序,但正式熔融工序也可以是以批料方式进行,而非连续方式。In addition, in the present embodiment, after the glass raw material is melted in the raw material melting step, it is rapidly cooled to produce solidified cullet, and the produced cullet is put into the
以下,使用实施例及比较例来进一步详细地说明本发明,但本发明并不限定于以下的实施例。Hereinafter, the present invention will be described in more detail using examples and comparative examples, but the present invention is not limited to the following examples.
实施例Example
将利用本发明的制造方法而制造的光学玻璃作为实施例的光学玻璃,并且将利用其它方法而制造的光学玻璃作为比较例的光学玻璃,向这些玻璃照射超高压汞灯的i线(365nm),测量出此时的透射率的变化。The optical glass produced by the production method of the present invention is used as the optical glass of the example, and the optical glass produced by other methods is used as the optical glass of the comparative example, and these glasses are irradiated with the i-line (365nm) of the ultra-high pressure mercury lamp. , and measure the change in transmittance at this time.
实施例1Example 1
按照表1所示的组成比例来称量光学玻璃用原料(玻璃原料),并将它们混合。The raw materials for optical glass (glass raw materials) were weighed according to the composition ratio shown in Table 1, and these were mixed.
表1Table 1
随后,将玻璃原料投入到批料熔融装置100的熔融槽121中,在1300℃进行14小时的碎玻璃化工序。此时,不进行气体鼓吹,将批料熔融物冷却,作为碎玻璃回收。将此回收的碎玻璃投入到正式熔融装置200的熔融槽221中,在1150℃进行15小时的熔融。此时,使用气体鼓吹装置206,向将碎玻璃熔融(正式熔融)所获得的正式熔融物D内鼓吹氩气。此鼓吹是对每1升玻璃以0.024升/分的气体供给速度、以距离进行鼓吹的液面500mm的深度进行的鼓吹。另外,在此熔融工序中,将正式熔融物D上方的空间与大气压相比设为减压状态(正式熔融物D的上方空间的气压为0.3kPa),由此将正式熔融物D的上方空间内存在的气体由换气装置210吸入,并排出到大气中(正式熔融工序)。将所获得的正式熔融物D转移到后续工序(澄清工序、搅拌工序、保冷工序),制造本实施例的光学玻璃。Subsequently, the glass raw material was put into the
比较例comparative example
按照与实施例1相同的组成比例来称量本比较例的光学玻璃的玻璃原料,并将它们混合。随后,将此玻璃原料投入到原料熔融装置100的熔融槽121中,在1300℃进行14小时的碎玻璃化工序。此时,不进行气体鼓吹,将批料熔融物冷却,作为碎玻璃回收。将此回收的碎玻璃投入到正式熔融装置200的熔融槽221中,在1150℃进行15小时的熔融。此时,使用气体鼓吹装置206,向将碎玻璃熔融(正式熔融)所获得的正式熔融物D内鼓吹“氧气”。此鼓吹是对每1升玻璃以0.024升/分的气体供给速度、以距离进行鼓吹的液面500mm的深度进行的鼓吹。另外,在使此玻璃块熔融的工序中,不从正式熔融物D的上方空间排出气体(正式熔融工序)。将所获得的正式熔融物D转移到后续工序(澄清工序、搅拌工序、保冷工序),制造本比较例的光学玻璃。The glass raw material of the optical glass of this comparative example was weighed by the same composition ratio as Example 1, and they were mixed. Subsequently, this glass raw material was put into the
接着,以2.5W/cm2的条件,向实施例的光学玻璃与比较例的光学玻璃照射i线(365nm),测量出此时的透射率的变化。另外,透射率是利用U-4000(日立制作所制造)而测量出的波长365nm的光线的透射率。Next, the optical glass of the example and the optical glass of the comparative example were irradiated with i-rays (365 nm) under the condition of 2.5 W/cm 2 , and changes in transmittance at that time were measured. In addition, the transmittance is the transmittance of light rays with a wavelength of 365 nm measured using U-4000 (manufactured by Hitachi, Ltd.).
图3是表示对实施例的光学玻璃与比较例的光学玻璃照射i线(365nm)时的透射率的变化。如图3所示,照射后不久,比较例的光学玻璃的透射率的恶化率就大于实施例的光学玻璃。而且,随着照射时间的推移,该倾向变得显着。如此,通过设置空气管道以排出碎玻璃熔融物的上方空间内的气体,并且使用气体鼓吹装置来向批料熔融物及/或正式熔融物内鼓吹气体,可以提供耐老化性优异的光学玻璃。FIG. 3 shows changes in transmittance when i-rays (365 nm) are irradiated to the optical glass of the example and the optical glass of the comparative example. As shown in FIG. 3 , immediately after the irradiation, the deterioration rate of the optical glass of the comparative example was larger than that of the optical glass of the example. And, this tendency becomes remarkable as the irradiation time elapses. In this way, an optical glass with excellent aging resistance can be provided by providing an air duct to exhaust the gas in the space above the cullet melt, and using a gas blowing device to blow gas into the batch melt and/or the main melt.
而且,本发明的实施例的光学玻璃的组成、在i线照射(500小时)下的透射率的恶化量和Pt含量如表1所示。In addition, Table 1 shows the composition of the optical glass according to the example of the present invention, the amount of deterioration of the transmittance under i-ray irradiation (500 hours), and the Pt content.
如表1所示可知,实施例1至6的Pt含量与比较例的Pt含量相比较少,耐老化性优异。As shown in Table 1, it can be seen that the Pt content of Examples 1 to 6 is smaller than that of the comparative example, and the aging resistance is excellent.
Claims (18)
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