CN101295693A - 半导体器件 - Google Patents
半导体器件 Download PDFInfo
- Publication number
- CN101295693A CN101295693A CNA2008100931811A CN200810093181A CN101295693A CN 101295693 A CN101295693 A CN 101295693A CN A2008100931811 A CNA2008100931811 A CN A2008100931811A CN 200810093181 A CN200810093181 A CN 200810093181A CN 101295693 A CN101295693 A CN 101295693A
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- CN
- China
- Prior art keywords
- semiconductor chip
- interposer
- semiconductor device
- chip
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 225
- 238000004891 communication Methods 0.000 claims abstract description 146
- 230000015654 memory Effects 0.000 claims description 61
- 230000006870 function Effects 0.000 claims description 10
- 239000011810 insulating material Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 238000012545 processing Methods 0.000 description 7
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000001934 delay Effects 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 241000724291 Tobacco streak virus Species 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/06—Arrangements for interconnecting storage elements electrically, e.g. by wiring
- G11C5/063—Voltage and signal distribution in integrated semi-conductor memory access lines, e.g. word-line, bit-line, cross-over resistance, propagation delay
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/18—Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of the types provided for in two or more different main groups of the same subclass of H10B, H10D, H10F, H10H, H10K or H10N
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06517—Bump or bump-like direct electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06572—Auxiliary carrier between devices, the carrier having an electrical connection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-113801 | 2007-04-24 | ||
JP2007113801 | 2007-04-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101295693A true CN101295693A (zh) | 2008-10-29 |
CN101295693B CN101295693B (zh) | 2010-06-23 |
Family
ID=39885948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100931811A Active CN101295693B (zh) | 2007-04-24 | 2008-04-24 | 半导体器件 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7812446B2 (zh) |
JP (1) | JP2008294423A (zh) |
CN (1) | CN101295693B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102414684A (zh) * | 2009-04-24 | 2012-04-11 | 新思科技有限公司 | 用于靠近硅过孔放置晶体管的方法及装置 |
CN104471708A (zh) * | 2012-02-08 | 2015-03-25 | 吉林克斯公司 | 具有多个插入件的堆叠裸片组件 |
CN105489589A (zh) * | 2016-01-26 | 2016-04-13 | 兰微悦美(天津)科技有限公司 | 可堆叠的集成电路及其封装方法 |
CN106373975A (zh) * | 2015-07-22 | 2017-02-01 | 瑞萨电子株式会社 | 半导体器件 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8168470B2 (en) * | 2008-12-08 | 2012-05-01 | Stats Chippac, Ltd. | Semiconductor device and method of forming vertical interconnect structure in substrate for IPD and baseband circuit separated by high-resistivity molding compound |
US9406561B2 (en) * | 2009-04-20 | 2016-08-02 | International Business Machines Corporation | Three dimensional integrated circuit integration using dielectric bonding first and through via formation last |
US8592973B2 (en) * | 2009-10-16 | 2013-11-26 | Stats Chippac Ltd. | Integrated circuit packaging system with package-on-package stacking and method of manufacture thereof |
US8841765B2 (en) * | 2011-04-22 | 2014-09-23 | Tessera, Inc. | Multi-chip module with stacked face-down connected dies |
US8563403B1 (en) | 2012-06-27 | 2013-10-22 | International Business Machines Corporation | Three dimensional integrated circuit integration using alignment via/dielectric bonding first and through via formation last |
CN113161366B (zh) * | 2018-06-29 | 2023-08-18 | 长江存储科技有限责任公司 | 具有使用内插器的堆叠器件芯片的三维存储器件 |
US11275111B2 (en) * | 2019-09-20 | 2022-03-15 | Micron Technology, Inc. | Plurality of edge through-silicon vias and related systems, methods, and devices |
KR20220167637A (ko) | 2021-06-14 | 2022-12-21 | 삼성전자주식회사 | 반도체 패키지 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6294407B1 (en) * | 1998-05-06 | 2001-09-25 | Virtual Integration, Inc. | Microelectronic packages including thin film decal and dielectric adhesive layer having conductive vias therein, and methods of fabricating the same |
JP2001024150A (ja) | 1999-07-06 | 2001-01-26 | Sony Corp | 半導体装置 |
JP3356122B2 (ja) * | 1999-07-08 | 2002-12-09 | 日本電気株式会社 | システム半導体装置及びシステム半導体装置の製造方法 |
TW569424B (en) * | 2000-03-17 | 2004-01-01 | Matsushita Electric Ind Co Ltd | Module with embedded electric elements and the manufacturing method thereof |
US7247932B1 (en) * | 2000-05-19 | 2007-07-24 | Megica Corporation | Chip package with capacitor |
US6594153B1 (en) * | 2000-06-27 | 2003-07-15 | Intel Corporation | Circuit package for electronic systems |
US6407929B1 (en) * | 2000-06-29 | 2002-06-18 | Intel Corporation | Electronic package having embedded capacitors and method of fabrication therefor |
JP2002043504A (ja) * | 2000-07-27 | 2002-02-08 | Sharp Corp | 複合デバイス |
JP2003060153A (ja) | 2001-07-27 | 2003-02-28 | Nokia Corp | 半導体パッケージ |
US6503765B1 (en) * | 2001-07-31 | 2003-01-07 | Xilinx, Inc. | Testing vias and contacts in integrated circuit fabrication |
JP3861669B2 (ja) * | 2001-11-22 | 2006-12-20 | ソニー株式会社 | マルチチップ回路モジュールの製造方法 |
US6870252B2 (en) * | 2003-06-18 | 2005-03-22 | Sun Microsystems, Inc. | Chip packaging and connection for reduced EMI |
US7566960B1 (en) * | 2003-10-31 | 2009-07-28 | Xilinx, Inc. | Interposing structure |
US7132743B2 (en) * | 2003-12-23 | 2006-11-07 | Intel Corporation | Integrated circuit package substrate having a thin film capacitor structure |
JP2005294451A (ja) * | 2004-03-31 | 2005-10-20 | Sharp Corp | 半導体集積回路の製造方法および半導体集積回路ならびに半導体集積回路装置 |
JP4865197B2 (ja) * | 2004-06-30 | 2012-02-01 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
CN100395889C (zh) * | 2004-12-23 | 2008-06-18 | 旺宏电子股份有限公司 | 多芯片封装结构 |
US7304369B2 (en) * | 2005-08-06 | 2007-12-04 | Geomat Insights, Llc | Integral charge storage basement and wideband embedded decoupling structure for integrated circuit |
TWI281737B (en) * | 2005-12-13 | 2007-05-21 | Via Tech Inc | Chip package and coreless package substrate thereof |
DE102006001767B4 (de) * | 2006-01-12 | 2009-04-30 | Infineon Technologies Ag | Halbleitermodul mit Halbleiterchips und Verfahren zur Herstellung desselben |
JP2008091638A (ja) * | 2006-10-02 | 2008-04-17 | Nec Electronics Corp | 電子装置およびその製造方法 |
JP5068060B2 (ja) * | 2006-10-30 | 2012-11-07 | 新光電気工業株式会社 | 半導体パッケージおよびその製造方法 |
JP2008124072A (ja) * | 2006-11-08 | 2008-05-29 | Toshiba Corp | 半導体装置 |
JP4540697B2 (ja) * | 2007-08-31 | 2010-09-08 | Okiセミコンダクタ株式会社 | 半導体装置 |
-
2008
- 2008-04-18 JP JP2008109452A patent/JP2008294423A/ja active Pending
- 2008-04-23 US US12/107,795 patent/US7812446B2/en active Active
- 2008-04-24 CN CN2008100931811A patent/CN101295693B/zh active Active
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102414684A (zh) * | 2009-04-24 | 2012-04-11 | 新思科技有限公司 | 用于靠近硅过孔放置晶体管的方法及装置 |
CN102414684B (zh) * | 2009-04-24 | 2014-02-12 | 新思科技有限公司 | 用于靠近硅过孔放置晶体管的方法及装置 |
US8661387B2 (en) | 2009-04-24 | 2014-02-25 | Synopsys, Inc. | Placing transistors in proximity to through-silicon vias |
US9003348B2 (en) | 2009-04-24 | 2015-04-07 | Synopsys, Inc. | Placing transistors in proximity to through-silicon vias |
US9275182B2 (en) * | 2009-04-24 | 2016-03-01 | Synopsys, Inc. | Placing transistors in proximity to through-silicon vias |
CN104471708A (zh) * | 2012-02-08 | 2015-03-25 | 吉林克斯公司 | 具有多个插入件的堆叠裸片组件 |
CN104471708B (zh) * | 2012-02-08 | 2017-05-24 | 吉林克斯公司 | 具有多个插入件的堆叠裸片组件 |
CN106373975A (zh) * | 2015-07-22 | 2017-02-01 | 瑞萨电子株式会社 | 半导体器件 |
CN106373975B (zh) * | 2015-07-22 | 2022-03-18 | 瑞萨电子株式会社 | 半导体器件 |
CN105489589A (zh) * | 2016-01-26 | 2016-04-13 | 兰微悦美(天津)科技有限公司 | 可堆叠的集成电路及其封装方法 |
CN105489589B (zh) * | 2016-01-26 | 2018-06-01 | 兰微悦美(北京)科技有限公司 | 可堆叠的集成电路及其封装方法 |
Also Published As
Publication number | Publication date |
---|---|
US7812446B2 (en) | 2010-10-12 |
US20080265390A1 (en) | 2008-10-30 |
CN101295693B (zh) | 2010-06-23 |
JP2008294423A (ja) | 2008-12-04 |
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PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: RENESAS ELECTRONICS CORPORATION Free format text: FORMER OWNER: NEC CORP. Effective date: 20101116 |
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Effective date of registration: 20101116 Address after: Kanagawa, Japan Patentee after: Renesas Electronics Corporation Address before: Kanagawa, Japan Patentee before: NEC Corp. |
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CP02 | Change in the address of a patent holder |
Address after: Tokyo, Japan Patentee after: Renesas Electronics Corporation Address before: Kanagawa, Japan Patentee before: Renesas Electronics Corporation |
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CP02 | Change in the address of a patent holder |