CN101259394B - Liquid medicine confecting device capable of improving liquid medicine confecting efficiency and confecting method - Google Patents
Liquid medicine confecting device capable of improving liquid medicine confecting efficiency and confecting method Download PDFInfo
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- CN101259394B CN101259394B CN2007100378320A CN200710037832A CN101259394B CN 101259394 B CN101259394 B CN 101259394B CN 2007100378320 A CN2007100378320 A CN 2007100378320A CN 200710037832 A CN200710037832 A CN 200710037832A CN 101259394 B CN101259394 B CN 101259394B
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- 239000007788 liquid Substances 0.000 title claims abstract description 91
- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000003814 drug Substances 0.000 title abstract 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 44
- 238000003860 storage Methods 0.000 claims abstract description 6
- 235000014347 soups Nutrition 0.000 claims description 138
- 238000003756 stirring Methods 0.000 claims description 12
- 238000002360 preparation method Methods 0.000 claims description 5
- 238000004364 calculation method Methods 0.000 claims description 3
- 239000000243 solution Substances 0.000 description 32
- 150000001875 compounds Chemical class 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Abstract
The invention relates to a liquid medicine preparing device and a method which can improve liquid medicine preparing efficiency. The existing liquid medicine preparing device and the method thereof can not prepare the needed liquid medicine by one time. The liquid medicine preparing device of the invention includes a primary liquid trough, a liquid medicine preparing slot, a water supply unit, a first drive device, a second drive device, a storage unit, a capturing unit, a calculating unit and a control module. The liquid medicine preparing method of the invention firstly stores the target concentration and the target volume of the liquid medicine to be prepared and captures the concentration mark of each primary liquid bucket, then calculates the liquid medicine concentration in the primary liquid trough according to the captured concentration mark, then generates a control signal according to the calculated liquid medicine concentration and the stored target concentration and the target volume as well as outputs the control signal to the second drive device and the water supply unit for driving the primary liquid and water with a corresponding amount to a liquid medicine preparing slot. The liquid medicine preparing efficiency can be greatly improved by adopting the liquid medicine preparing device and the method of the invention.
Description
Technical field
The present invention relates to the preparation of soup, particularly a kind of soup device for formulating and compound method that improves the soup confecting efficiency.
Background technology
In field of semiconductor manufacture, after transferring to the figure on the light shield on the photoresistance by photo-mask process, need to use developer solution that this figure is developed out, for guaranteeing normally carrying out of developing procedure, need replacing developer solution regularly, so semiconductor manufacturing enterprise is just very big to the demand of developer solution, one day developer solution consumption of one 8 cun semiconductor production line (concentration is 2.37%) just can reach 8000 liters.
But it is 2.37% developer solution that the raw material supplier does not provide concentration usually, is 25% stoste and concentration is provided.This concentration is that 25% original liquid concentration scope is 24.9%-25.3%, and its capacity of being contained in is in 200 liters the original liquid box.It is that 25% stoste dilution is 2.37% developer solution for concentration that the semiconductor maker needs this concentration.This concentration is that the range of allowable error of 2.37% developer solution is 2.367-2.373%.
Referring to Fig. 1, the existing compound concentration that is used for is that to generally include volume be 3000 liters former liquid bath 10 for the soup device for formulating 1 of 2.37% developer solution, volume is 1500 liters a soup make-up tank 11, be used for water supply unit 12 to 11 water supply of soup make-up tank, be used for stoste with original liquid box (not shown) and be urged to first drive unit 13 in the former liquid bath 10, be used for the stoste of former liquid bath 10 is urged to second drive unit 14 of soup make-up tank 11, one is used to store the memory cell 15 of aimed concn and target volume, one is arranged on a concentration detecting unit 16 and a control module 17 that is used to detect solution level in the soup make-up tank 11, described control module 17 is according to the data of memory cell 15 and concentration detecting unit 16, and the control water supply unit 12 and second drive unit 14 add water and the stoste developer solution with the formation aimed concn in the soup make-up tank.
Also be provided with first agitating device 100 that is used to stir stoste in the above-mentioned former liquid bath 10, also be provided with the error that second agitating device, 110, the second drive units 14 that are used to stir soup exist 0.15 gram in the soup make-up tank 11.
Before carrying out the developer solution preparation, earlier by first drive unit 13 stoste in the original liquid box is urged to former liquid bath 10, coming configuration concentration by following steps then is 2.37% developer solution: at first control module 17 control second drive units 14 and water supply unit 12 drive the water of 142.4 kilograms stoste and 1357.6 kilograms to soup make-up tank 11; This moment is because second drive unit 14 exists the error of 0.15 gram, adding development original liquid concentration scope is 24.90%-25.30%, superimposed liquor strength error like this reaches 0.040%, surpass concentration and be the error range 0.010% of 2.37% developer solution, so be difficult to once promptly make the solution of concentration in the 2.367-2.373% permissible range.
After soup in the soup make-up tank 11 is mixed, the solution level that detects in the soup make-up tanks by concentration detecting unit 16 again; If when detecting solution level and exceeding the range of allowable error of above-mentioned 2.367-2.373%, drive stostes or water to soup make-up tank 11 by control module 17 control second drive units 14 or water supply unit 12, till concentration that concentration detecting unit 16 detects developer solution in the soup make-up tank 11 is in the 2.367-2.373% scope.
The original liquid concentration that above-mentioned solution compound method provides because of no raw material supplier on the original liquid box, so just can't learn the accurate concentration of former liquid bath Central Plains liquid, so be difficult to by once preparing the soup that just obtains aimed concn and target volume, need repeatedly start and stop drive unit, reduce the service life of drive unit greatly, also cause the preparation time spent long in addition.
Summary of the invention
The object of the present invention is to provide a kind of soup device for formulating and compound method that improves the soup confecting efficiency, can improve the confecting efficiency of soup by described soup device for formulating and compound method greatly.
The object of the present invention is achieved like this: a kind of soup device for formulating that improves the soup confecting efficiency, be used for using the stoste of original liquid box to make the soup of aimed concn and target volume, the stoste of normal volume is housed in this original liquid box, and has the concentration sign that is used for identifying the original liquid box original liquid concentration on this original liquid box, described concentration is designated the weight concentration value, its scope is 24.90% to 25.30%, described aimed concn is 2.37%, described target volume is 1000 liters, described soup is a developer solution, this device comprises that one is used to load the former liquid bath of stoste, one is used for for adding stoste and the water soup make-up tank with the soup that makes aimed concn and target volume, one is used for adding to the soup make-up tank water supply unit of water, one is used for stoste with original liquid box is urged to first drive unit in the former liquid bath, one is used for second drive unit and that stoste with former liquid bath is urged to the soup make-up tank is used to store the aimed concn that needs the configuration soup and the memory cell of target volume, wherein, this soup device for formulating also comprises: an acquisition unit is used to capture the concentration sign of each original liquid box; One computing unit, the concentration sign that is used for capturing according to acquisition unit calculates the liquor strength of former liquid bath; One control module, the data that are used for storing according to the result of calculation and the memory cell of computing unit produce control signal, and export second drive unit and water supply unit to, to control second drive unit and water supply unit inject respective amount in the soup make-up tank stoste and water.
In the soup device for formulating of above-mentioned improved soup confecting efficiency, this acquisition unit is a scanner.
In the soup device for formulating of above-mentioned improved soup confecting efficiency, be provided with first agitating device that is used to stir stoste in this former liquid bath.
In the soup device for formulating of above-mentioned improved soup confecting efficiency, be provided with second agitating device that is used to stir soup in this soup make-up tank.
The present invention also provides a kind of method that adopts the above-mentioned soup device for formulating that improves the soup confecting efficiency to carry out the soup preparation, and this method may further comprise the steps: (1) storage needs the aimed concn and the target volume of configuration soup; (2) capture the concentration sign of each original liquid box; (3) identify the liquor strength that calculates in the former liquid bath according to the concentration that is captured; (4), and export second drive unit and water supply unit to according to the liquor strength in the former liquid bath that is calculated and aimed concn of being stored and target volume generation control signal; The stoste that (5) second drive units drive respective amount according to control signal to the soup make-up tank, the water supply unit according to the water of control signal supply respective amount to the soup make-up tank.
In above-mentioned soup compound method, also comprise and stir the step that the soup in the soup make-up tank mixes it.
In above-mentioned soup compound method, this soup is a developer solution.
Be difficult to compare with regard to the soup that makes aimed concn with existing soup device for formulating and method by once preparing, soup device for formulating among the present invention and method can conveniently capture and calculate the concentration of soup make-up tank herb liquid, so can drive the stoste of respective amount and the soup that water once makes aimed concn by the soup device for formulating, so can improve the confecting efficiency of soup greatly, and can avoid the frequent start-stop drive unit, improved the service life of drive unit greatly.
Description of drawings
Soup device for formulating and the method that improves the soup confecting efficiency of the present invention provided by following embodiment and accompanying drawing.
Fig. 1 is the composition structural representation of existing soup device for formulating;
Fig. 2 is the composition structural representation of the embodiment of the soup device for formulating that improves the soup confecting efficiency of the present invention;
Fig. 3 is the block diagram of the embodiment of the soup device for formulating that improves the soup confecting efficiency of the present invention;
Fig. 4 is the flow chart of the embodiment of the soup compound method that improves the soup confecting efficiency of the present invention.
The specific embodiment
Below will be described in further detail soup device for formulating and the soup compound method that improves the soup confecting efficiency of the present invention.
The soup device for formulating that improves the soup confecting efficiency of the present invention, be used for using the stoste of original liquid box to make the soup of aimed concn and target volume, the stoste of normal volume is housed in the described original liquid box, and has the concentration sign that is used for identifying the original liquid box original liquid concentration on the described original liquid box.
In the present embodiment, described concentration is designated the weight concentration value, and its scope is 24.90% to 25.30%, and described aimed concn is 2.37%, and described objective body is 1000 liters, and described soup is a developer solution.
Referring to Fig. 2 and Fig. 3, the soup device for formulating 2 that improves the soup confecting efficiency of the present invention comprises former liquid bath 20, soup make-up tank 21, water supply unit 22, first drive unit 23, second drive unit 24, memory cell 25, acquisition unit 26, computing unit 27 and control module 28.
Each constitutive requirements of soup device for formulating 2 below will be described in detail in detail:
Former liquid bath 20 is used to load stoste, is provided with first agitating device 200 that is used to stir stoste in the former liquid bath 20.In the present embodiment, described former liquid bath 20 capacity are 3000 liters.
Soup make-up tank 21 is used for being provided with second agitating device 210 that is used to stir soup in the soup make-up tank 21 for adding stoste and water to make the soup of aimed concn and target volume.In the present embodiment, described soup make-up tank 21 capacity are 1500 liters.
Acquisition unit 26 is used to capture the concentration sign of each original liquid box (not shown), and described acquisition unit 26 is a scanner.
The concentration sign that computing unit 27 is used for being captured according to acquisition unit 26 calculates the liquor strength of former liquid bath 20.
Aimed concn and target volume that control module 28 is used for being stored according to the result of calculation of computing unit 27 and memory cell 25 produce control signal, and export second drive unit 24 and water supply unit 22 to, to control second drive unit 24 and water supply unit 22 inject respective amount in soup make-up tank 21 stoste and water.
For further specifying the effect of soup device for formulating 2 of the present invention, to use 10 original liquid boxs that normal volume stoste is housed to prepare 1000 liters of concentration is that 2.37% developer solution describes as example, wherein, the solution level in described 10 original liquid boxs is respectively 24.90%, 24.95%, 25.00%, 25.05%, 25.10%, 25.10%, 25.15%, 25.20%, 25.25% and 25.30%.
At first, memory cell 25 can the storage aimed concns (promptly 2.37%) and target volume (promptly 1000 liters), then the developer solution stoste in above-mentioned 10 original liquid boxs is urged in the former liquid bath 20 by first drive unit 23, meanwhile, by the concentration sign on above-mentioned 10 original liquid boxs of acquisition unit 26 acquisitions, the developer solution original liquid concentration that calculates in the former liquid bath 20 by computing unit 27 is 25.10% then, then control module 28 according to the developer solution original liquid concentration in the former liquid bath 20 be 25.10% and memory cell 25 in the aimed concn 2.37% and the target volume of storage produce the control signals that drive 94.42 liters of developer solution stostes and 905.58 premium on currency for 1000 liters, and export described control signal to second drive unit 24 and water supply unit 22, second drive unit 24 drives 94.42 liters developer solution stoste then to soup make-up tank 21,905.58 liters water is supplied then to soup make-up tank 21 in water supply unit 22, stir developer solutions developer solution is mixed by being arranged on second agitating device 210 in the soup make-up tank 21 at last, promptly obtained 1000 liters of concentration and be 2.37% developer solution.
Referring to Fig. 4, the soup compound method that improves the soup confecting efficiency of the present invention is at first carried out step S40, and storage needs the aimed concn and the target volume of configuration soup.In the present embodiment, described aimed concn is 2.37%, and described objective body is 1000 liters, and affiliated soup is a developer solution.Then continue step S41.
In step S41, capture the concentration sign of each original liquid box.Then continue step S42.
In step S42, identify the liquor strength that calculates in the former liquid bath according to the concentration that is captured.Then continue step S43.
In step S43,, and export second drive unit and water supply unit to according to the liquor strength in the former liquid bath that is calculated and aimed concn of being stored and target volume generation control signal.Then continue step S44.
In step S44, the stoste that second drive unit drives respective amount according to control signal to the soup make-up tank, the water supply unit according to the water of control signal supply respective amount to the soup make-up tank.Then continue step S45.
In step S45, the soup that stirs in the soup make-up tank mixes it.
In sum, soup device for formulating among the present invention and method can conveniently capture and calculate the concentration of soup make-up tank herb liquid, so can drive the stoste of respective amount and water to the soup make-up tank, once can make the soup of aimed concn, improved the confecting efficiency of soup greatly, in addition the service life that can improve drive unit.
Claims (7)
1. soup device for formulating that can improve the soup confecting efficiency, be used for using the stoste of original liquid box to make the soup of aimed concn and target volume, the stoste of normal volume is housed in this original liquid box, and has the concentration sign that is used for identifying the original liquid box original liquid concentration on this original liquid box, described concentration is designated the weight concentration value, its scope is 24.90% to 25.30%, described aimed concn is 2.37%, described target volume is 1000 liters, described soup is a developer solution, this device comprises that one is used to load the former liquid bath of stoste, one is used for for adding stoste and the water soup make-up tank with the soup that makes aimed concn and target volume, one is used for adding to the soup make-up tank water supply unit of water, one is used for stoste with original liquid box is urged to first drive unit in the former liquid bath, one is used for second drive unit and that stoste with former liquid bath is urged to the soup make-up tank is used to store the aimed concn that needs the configuration soup and the memory cell of target volume, it is characterized in that, this soup device for formulating also comprises: an acquisition unit is used to capture the concentration sign of each original liquid box; One computing unit, the concentration sign that is used for capturing according to acquisition unit calculates the liquor strength of former liquid bath; One control module, the data that are used for storing according to the result of calculation and the memory cell of computing unit produce control signal, and export second drive unit and water supply unit to, to control second drive unit and water supply unit inject respective amount in the soup make-up tank stoste and water.
2. the soup device for formulating that improves the soup confecting efficiency as claimed in claim 1 is characterized in that this acquisition unit is a scanner.
3. the soup device for formulating that improves the soup confecting efficiency as claimed in claim 1 is characterized in that, is provided with first agitating device that is used to stir stoste in this former liquid bath.
4. the soup device for formulating that improves the soup confecting efficiency as claimed in claim 1 is characterized in that, is provided with second agitating device that is used to stir soup in this soup make-up tank.
5. the soup device for formulating that improves the soup confecting efficiency as claimed in claim 1 is characterized in that this soup is a developer solution.
6. one kind is adopted the soup device for formulating that improves the soup confecting efficiency as claimed in claim 1 to carry out the method that soup is prepared, and it is characterized in that this method may further comprise the steps:
(1) storage needs the aimed concn and the target volume of configuration soup;
(2) capture the concentration sign of each original liquid box;
(3) identify the liquor strength that calculates in the former liquid bath according to the concentration that is captured;
(4), and export second drive unit and water supply unit to according to the liquor strength in the former liquid bath that is calculated and aimed concn of being stored and target volume generation control signal;
The stoste that (5) second drive units drive respective amount according to control signal to the soup make-up tank, the water supply unit according to the water of control signal supply respective amount to the soup make-up tank.
7. the method for soup preparation as claimed in claim 6 is characterized in that, this method comprises that also the soup that stirs in the soup make-up tank mixes it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100378320A CN101259394B (en) | 2007-03-06 | 2007-03-06 | Liquid medicine confecting device capable of improving liquid medicine confecting efficiency and confecting method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100378320A CN101259394B (en) | 2007-03-06 | 2007-03-06 | Liquid medicine confecting device capable of improving liquid medicine confecting efficiency and confecting method |
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| Publication Number | Publication Date |
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| CN101259394A CN101259394A (en) | 2008-09-10 |
| CN101259394B true CN101259394B (en) | 2011-06-01 |
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| CN2007100378320A Active CN101259394B (en) | 2007-03-06 | 2007-03-06 | Liquid medicine confecting device capable of improving liquid medicine confecting efficiency and confecting method |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1037092A (en) * | 1988-04-28 | 1989-11-15 | 广州冶金机械厂 | The general feeding device that can control the liquid proportioning |
| CN2124757U (en) * | 1992-05-12 | 1992-12-16 | 湖南省农业机械研究所 | Automatic dilution apparatus for primary liquid |
| US5522660A (en) * | 1994-12-14 | 1996-06-04 | Fsi International, Inc. | Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid |
| CN1211467A (en) * | 1997-04-11 | 1999-03-24 | 拉贝勒公司 | System for diluting ultrapure chemicals which is intended for microelectronics industry |
-
2007
- 2007-03-06 CN CN2007100378320A patent/CN101259394B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1037092A (en) * | 1988-04-28 | 1989-11-15 | 广州冶金机械厂 | The general feeding device that can control the liquid proportioning |
| CN2124757U (en) * | 1992-05-12 | 1992-12-16 | 湖南省农业机械研究所 | Automatic dilution apparatus for primary liquid |
| US5522660A (en) * | 1994-12-14 | 1996-06-04 | Fsi International, Inc. | Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid |
| CN1211467A (en) * | 1997-04-11 | 1999-03-24 | 拉贝勒公司 | System for diluting ultrapure chemicals which is intended for microelectronics industry |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2000-347377A 2000.12.15 |
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| CN101259394A (en) | 2008-09-10 |
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