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CN101252111B - Chip packaging structure and manufacturing method thereof - Google Patents

Chip packaging structure and manufacturing method thereof Download PDF

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Publication number
CN101252111B
CN101252111B CN2008100921063A CN200810092106A CN101252111B CN 101252111 B CN101252111 B CN 101252111B CN 2008100921063 A CN2008100921063 A CN 2008100921063A CN 200810092106 A CN200810092106 A CN 200810092106A CN 101252111 B CN101252111 B CN 101252111B
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guide block
chip
wiring layer
described interior
layer
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CN101252111A (en
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李长祺
陈世光
张元鼎
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Advanced Semiconductor Engineering Inc
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Advanced Semiconductor Engineering Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/96Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568Temporary substrate used as encapsulation process aid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/12105Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/19Manufacturing methods of high density interconnect preforms
    • HELECTRICITY
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
    • H01L2225/10All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10
    • H01L2225/1011All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10 the containers being in a stacked arrangement
    • H01L2225/1017All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10 the containers being in a stacked arrangement the lowermost container comprising a device support
    • H01L2225/1035All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10 the containers being in a stacked arrangement the lowermost container comprising a device support the device being entirely enclosed by the support, e.g. high-density interconnect [HDI]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
    • H01L2225/10All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10
    • H01L2225/1011All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10 the containers being in a stacked arrangement
    • H01L2225/1041Special adaptations for top connections of the lowermost container, e.g. redistribution layer, integral interposer
    • HELECTRICITY
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
    • H01L2225/10All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10
    • H01L2225/1011All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10 the containers being in a stacked arrangement
    • H01L2225/1047Details of electrical connections between containers
    • H01L2225/1058Bump or bump-like electrical connections, e.g. balls, pillars, posts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

A chip package structure and a method for manufacturing the same are provided. The chip packaging structure comprises a packaging piece and a plurality of outer guide blocks. The packaging piece comprises a wiring layer, a chip, a plurality of inner guide blocks and a sealing colloid. The wiring layer is provided with a first surface and a second surface, and the chip is arranged on the first surface. The inner guide block is provided with a first end and a second end, and the first end is arranged on the first surface. The sealing colloid is arranged on the first surface and used for covering the chip and partially sealing the inner guide block, so that the first end and the second end of the inner guide block are exposed outside the sealing colloid. The outer guide block is arranged on the second surface of the wiring layer of the packaging piece and is electrically connected with the inner guide block.

Description

芯片封装结构及其制造方法 Chip package structure and manufacturing method thereof

【技术领域】【Technical field】

本发明是有关于一种封装结构及其制造方法,且特别是有关于一种芯片封装结构及其制造方法。The present invention relates to a packaging structure and its manufacturing method, and in particular to a chip packaging structure and its manufacturing method.

【背景技术】【Background technique】

近年来电子装置蓬勃的应用于日常生活中,业界无不致力发展微型且多功能的电子产品,以符合市场需求。晶圆级芯片尺寸封装(Wafer Level Chip Scale Package,WLCSP)是目前电子产品的半导体元件常用的封装结构。In recent years, electronic devices have been vigorously used in daily life, and the industry is all committed to developing miniature and multi-functional electronic products to meet market demands. Wafer Level Chip Scale Package (WLCSP) is a commonly used packaging structure for semiconductor components of electronic products.

请参照图1,其绘示传统芯片封装件的示意图。封装件10包括布线层20、封胶体30、绝缘层40、芯片50、多条内导线70及多个锡球90。封胶体30将绝缘层40、芯片50及内导线70封入其内。封胶体30设置于布线层20的一侧,锡球90则设置于布线层20的另一侧。绝缘层40位于布线层20与芯片50的间。内导线70的一端设置于芯片50,内导线70的另一端连接布线层20。芯片50通过内导线70经由布线层20电性连接至锡球90。Please refer to FIG. 1 , which shows a schematic diagram of a conventional chip package. The package 10 includes a wiring layer 20 , an encapsulant 30 , an insulating layer 40 , a chip 50 , a plurality of inner wires 70 and a plurality of solder balls 90 . The encapsulant 30 encloses the insulating layer 40 , the chip 50 and the inner wire 70 therein. The encapsulant 30 is disposed on one side of the wiring layer 20 , and the solder ball 90 is disposed on the other side of the wiring layer 20 . The insulating layer 40 is located between the wiring layer 20 and the chip 50 . One end of the inner wire 70 is disposed on the chip 50 , and the other end of the inner wire 70 is connected to the wiring layer 20 . The chip 50 is electrically connected to the solder ball 90 through the wiring layer 20 through the inner wire 70 .

封装件10因内导线70形状条件的限制,使封胶体30的一厚度H30远大于芯片50的一厚度H50。因而增加封装件10的体积,进而限缩电子装置的微型化。此外,在多功能的电子装置中,势必需将多个芯片加以结合。因此,提供一增加封装密度的封装件及其制造方法,乃业界倾力研究的方向之一。The package 10 is limited by the shape condition of the inner wire 70 , so that a thickness H30 of the encapsulant 30 is much larger than a thickness H50 of the chip 50 . Therefore, the volume of the package 10 is increased, thereby limiting the miniaturization of the electronic device. In addition, in a multifunctional electronic device, it is necessary to combine multiple chips. Therefore, providing a package with increased packaging density and its manufacturing method is one of the research directions of the industry.

【发明内容】【Content of invention】

本发明是有关于一种芯片封装结构及其制造方法,采用内导块及其对应的外导块设计来减少封装件的封胶体所需的厚度,藉以增加封装结构的密度。The invention relates to a chip packaging structure and a manufacturing method thereof. The inner guide block and its corresponding outer guide block are designed to reduce the required thickness of the encapsulant of the package, thereby increasing the density of the package structure.

根据本发明的一方面,提出一种芯片封装结构,包括一封装件及多个外导块。封装件包括一布线层、一芯片、多个内导块及一封胶体。布线层具有一第一表面及一第二表面,芯片设置于布线层的第一表面。内导块具有一第一端及一第二端,第一端设置于布线层的第一表面。封胶体设置于布线层的第一表面,用以覆盖芯片及部份封入内导块,使得内导块的第一端及第二端暴露于封胶体外。外导块设置于封装件的布线层的第二表面,且与内导块电性连接。According to one aspect of the present invention, a chip packaging structure is provided, including a package and a plurality of outer lead blocks. The package includes a wiring layer, a chip, multiple inner guide blocks and encapsulant. The wiring layer has a first surface and a second surface, and the chip is arranged on the first surface of the wiring layer. The inner guide block has a first end and a second end, and the first end is disposed on the first surface of the wiring layer. The encapsulant is disposed on the first surface of the wiring layer to cover the chip and partially enclose the inner lead block, so that the first end and the second end of the inner lead block are exposed outside the encapsulant. The outer lead block is disposed on the second surface of the wiring layer of the package, and is electrically connected with the inner lead block.

根据本发明的另一方面,提出一种芯片封装结构的制造方法。制造方法包括下列步骤:首先,提供一载体其具有一粘贴层。再者,配置多个内导块及至少一芯片于粘贴层,其中内导块具有一第一端及一第二端,且第一端设置于粘贴层。接着,形成一封胶体于粘贴层上,以覆盖芯片及内导块。然后,移除粘贴层,以暴露内导块的第一端、芯片的一主动表面及封胶体的一底面。此外,形成一布线层于封胶体的底面,以使内导块的第一端及芯片的主动表面设置于布线层的一第一表面,并电性连接布线层,以形成一封装件,封装件包括芯片、对应芯片的内导块、布线层及封胶体。最后,配置多个外导块于布线层的一第二表面。According to another aspect of the present invention, a method for manufacturing a chip packaging structure is provided. The manufacturing method includes the following steps: firstly, a carrier with an adhesive layer is provided. Furthermore, a plurality of inner guide blocks and at least one chip are arranged on the adhesive layer, wherein the inner guide block has a first end and a second end, and the first end is arranged on the adhesive layer. Next, form an encapsulant on the adhesive layer to cover the chip and the inner guide block. Then, the adhesive layer is removed to expose the first end of the inner lead block, an active surface of the chip and a bottom surface of the encapsulant. In addition, a wiring layer is formed on the bottom surface of the sealing compound, so that the first end of the inner lead block and the active surface of the chip are arranged on a first surface of the wiring layer, and the wiring layer is electrically connected to form a package. The components include a chip, an inner guide block corresponding to the chip, a wiring layer and a sealant. Finally, a plurality of outer lead blocks are arranged on a second surface of the wiring layer.

为让本发明的上述内容能更明显易懂,下文特举较佳实施例,并配合所附图式,作详细说明如下:In order to make the above content of the present invention more obvious and understandable, the following preferred embodiments are specifically cited below, and in conjunction with the accompanying drawings, the detailed description is as follows:

【附图说明】【Description of drawings】

图1(现有技术)绘示传统芯片封装件的示意图。FIG. 1 (Prior Art) shows a schematic diagram of a conventional chip package.

图2绘示依照本发明第一实施例的芯片封装结构的示意图。FIG. 2 is a schematic diagram of a chip packaging structure according to a first embodiment of the present invention.

图3A至3M绘示图2的芯片封装结构的制造方法的示意图。3A to 3M are schematic diagrams illustrating a manufacturing method of the chip package structure in FIG. 2 .

图4绘示图2的芯片封装结构的制造方法的流程图。FIG. 4 is a flowchart of a manufacturing method of the chip package structure in FIG. 2 .

图5绘示两个相同的封装件堆叠的示意图。FIG. 5 is a schematic diagram of stacking two identical packages.

图6绘示两个不同的封装件堆叠的示意图。FIG. 6 is a schematic diagram of two different package stacks.

图7A至7L绘示依照本发明第二实施例的芯片封装结构的制造方法的示意图。7A to 7L are schematic diagrams illustrating a method for manufacturing a chip package structure according to a second embodiment of the present invention.

【具体实施方式】【Detailed ways】

第一实施例first embodiment

请参照图2,其绘示依照本发明第一实施例的芯片封装结构的示意图。芯片封装结构包括一第一封装件100及多个第一外导块130。第一封装件100包括一布线层110、一芯片150、多个内导块170及一封胶体190。Please refer to FIG. 2 , which shows a schematic diagram of a chip packaging structure according to a first embodiment of the present invention. The chip package structure includes a first package 100 and a plurality of first outer leads 130 . The first package 100 includes a wiring layer 110 , a chip 150 , a plurality of inner leads 170 and an encapsulant 190 .

布线层110具有一第一表面111及一第二表面113。芯片150设置于布线层110的第一表面111。内导块170具有一第一端171及一第二端273,第一端171设置于布线层110的第一表面111。封胶体190设置于布线层110的第一表面111,用以覆盖芯片150及部份封入内导块170,使得内导块170的第一端171及第二端273暴露于封胶体190外。第一外导块130设置于第一封装件100的布线层110的第二表面113,且与内导块170电性连接。The wiring layer 110 has a first surface 111 and a second surface 113 . The chip 150 is disposed on the first surface 111 of the wiring layer 110 . The inner guide block 170 has a first end 171 and a second end 273 , and the first end 171 is disposed on the first surface 111 of the wiring layer 110 . The encapsulant 190 is disposed on the first surface 111 of the wiring layer 110 to cover the chip 150 and partially encapsulate the inner lead block 170 , so that the first end 171 and the second end 273 of the inner lead block 170 are exposed outside the encapsulant 190 . The first outer lead block 130 is disposed on the second surface 113 of the wiring layer 110 of the first package 100 and is electrically connected to the inner lead block 170 .

此外,第一封装件100更包括另一布线层210设置于封胶体190上,并覆盖内导块170的第二端273。通过设置略大于芯片150厚度的内导块170,缩小了封胶体190所需的厚度,进而降低第一封装件100的体积。In addition, the first package 100 further includes another wiring layer 210 disposed on the molding compound 190 and covering the second end 273 of the inner lead block 170 . By setting the inner guide block 170 slightly larger than the thickness of the chip 150 , the required thickness of the encapsulant 190 is reduced, thereby reducing the volume of the first package 100 .

请参照图3A至3M及图4,图3A至3M图绘示图2的芯片封装结构的制造方法的示意图,图4绘示图2的芯片封装结构的制造方法的流程图。Please refer to FIGS. 3A to 3M and FIG. 4 , FIGS. 3A to 3M are diagrams illustrating a manufacturing method of the chip packaging structure of FIG. 2 , and FIG. 4 is a flow chart of the manufacturing method of the chip packaging structure of FIG. 2 .

步骤401如图3A所示,提供一具有粘贴层121的载体120。载体120可以是一金属载具,粘贴层121的表面123及125皆具有粘性,粘贴层121的表面123粘贴于载体120。Step 401 , as shown in FIG. 3A , provides a carrier 120 with an adhesive layer 121 . The carrier 120 may be a metal carrier, the surfaces 123 and 125 of the adhesive layer 121 are both adhesive, and the surface 123 of the adhesive layer 121 is pasted on the carrier 120 .

在步骤402与图3B中,配置多个内导块170及至少一芯片于粘贴层121的表面125。本实施例以芯片150、151为例,芯片150及芯片151实质上具有相同的结构。内导块170具有第一端171及一第二端173,内导块170的第一端171及芯片150、151以粘接的方式固定于粘贴层121上。In step 402 and FIG. 3B , a plurality of inner guide blocks 170 and at least one chip are disposed on the surface 125 of the adhesive layer 121 . In this embodiment, the chips 150 and 151 are taken as an example, and the chip 150 and the chip 151 have substantially the same structure. The inner guide block 170 has a first end 171 and a second end 173 , and the first end 171 of the inner guide block 170 and the chips 150 , 151 are fixed on the adhesive layer 121 by bonding.

较佳地如图3C所示,在步骤403中提供一模具220,例如是一柱塞头(plunger)朝粘贴层121之一方向D挤压内导块170,使得内导块170的第一端171嵌入并固定于粘贴层121,但模具220未接触芯片150、151。通过将内导块170挤压坎入粘贴层121,可确保内导块170不致因后述的程序而改变其位置。Preferably as shown in Figure 3C, a mold 220 is provided in step 403, for example, a plunger head (plunger) presses the inner guide block 170 toward a direction D of the adhesive layer 121, so that the first part of the inner guide block 170 The end 171 is embedded and fixed to the adhesive layer 121 , but the mold 220 is not in contact with the chips 150 , 151 . By pressing the inner guide block 170 into the adhesive layer 121, it can be ensured that the inner guide block 170 will not change its position due to the procedure described later.

在步骤404中,如图3D所示,涂布一液态封胶材料140于粘贴层121上。液态封胶材料140可流动于粘贴层121上。In step 404 , as shown in FIG. 3D , a liquid sealing material 140 is coated on the adhesive layer 121 . The liquid sealing material 140 can flow on the adhesive layer 121 .

在步骤405及图3E中,提供另一模具222将液态封胶材料140(绘示于图3D中)加压并加热,并使其固化为封胶体190。封胶体190覆盖芯片150、151及内导块170。封胶体190的厚度H190实质上略大于芯片150、151的厚度H150,使得封胶体190包覆芯片150、151且部分封入内导块170。内导块170的第一端171因坎入粘贴层121暴露于封胶体190外,内导块170的第二端173被封入于封胶体190内。In step 405 and FIG. 3E , another mold 222 is provided to pressurize and heat the liquid encapsulant 140 (shown in FIG. 3D ), and make it solidify into the encapsulant 190 . The encapsulant 190 covers the chips 150 , 151 and the inner lead block 170 . The thickness H190 of the encapsulant 190 is substantially slightly larger than the thickness H150 of the chips 150 , 151 , so that the encapsulant 190 covers the chips 150 , 151 and partially encapsulates the inner lead block 170 . The first end 171 of the inner guide block 170 is exposed to the outside of the molding body 190 due to the insertion into the adhesive layer 121 , and the second end 173 of the inner guide block 170 is enclosed in the molding body 190 .

之后,如步骤406及图3F所示,对粘贴层121进行后段热处理(post-moldcuring),并将粘贴层121及封胶层190沿一方向D1移动以使粘贴层121脱离载体120。接着如图3G所示,使封胶体190脱离粘贴层121,以暴露内导块170的第一端171、芯片150、151的一主动表面150’及封胶体190的一底面190’。Afterwards, as shown in step 406 and FIG. 3F , post-mold curing is performed on the adhesive layer 121 , and the adhesive layer 121 and the sealing layer 190 are moved along a direction D1 to separate the adhesive layer 121 from the carrier 120 . Then, as shown in FIG. 3G , the encapsulant 190 is separated from the adhesive layer 121 to expose the first end 171 of the inner guide block 170, an active surface 150' of the chips 150, 151 and a bottom surface 190' of the encapsulant 190.

步骤407如图3H及3I所示,提供再一研磨治具224研磨封胶体190的一顶面191,直至接触内导块170的第二端173,并再进一步研磨以使内导块170暴露出较大面积的一第二端273,以增加后续电性连接的稳定性。研磨后封胶体的厚度H191实质上仍大于芯片150、151的厚度H150。Step 407, as shown in Figures 3H and 3I, provides yet another grinding jig 224 to grind a top surface 191 of the encapsulant 190 until it contacts the second end 173 of the inner guide block 170, and further grinds to expose the inner guide block 170 A second end 273 with a larger area is formed to increase the stability of the subsequent electrical connection. After grinding, the thickness H191 of the encapsulant is still substantially greater than the thickness H150 of the chips 150 , 151 .

在步骤408及图3J中,将封胶体190翻转使其底面190’及芯片150、151的主动表面150’朝向上方,并于封胶体190的底面190’形成布线层110,以使内导块170的第一端171及芯片150、151的主动表面150’设置于布线层110的第一表面111,并电性连接布线层110。内导块170的第一端171通过布线层110与芯片150、151电性连接。In step 408 and FIG. 3J , the encapsulant 190 is turned over so that the bottom surface 190 ′ and the active surfaces 150 ′ of the chips 150 and 151 face upward, and the wiring layer 110 is formed on the bottom surface 190 ′ of the encapsulant 190 so that the inner guide block The first end 171 of 170 and the active surface 150 ′ of the chips 150 and 151 are disposed on the first surface 111 of the wiring layer 110 and are electrically connected to the wiring layer 110 . The first end 171 of the inner lead block 170 is electrically connected to the chips 150 , 151 through the wiring layer 110 .

布线层110包含底层金属(Under Bump metal lurgy,UBM)110a、重新布线层(Re-Distribution Layer,RDL)110b及高分子层110c。底层金属110a与内导块170接触使其电性连接重新布线层110b,内导块170并通过重新布线层110b与芯片150及151电性连接,高分子层110c则用以电性阻隔,避免发生短路。重新布线层110b可用溅镀方式形成,高分子层110c则以涂布方式形成于重新布线层110b上。The wiring layer 110 includes an Under Bump Metal (UBM) 110a, a Re-Distribution Layer (RDL) 110b and a polymer layer 110c. The underlying metal 110a is in contact with the inner lead block 170 to electrically connect the redistribution layer 110b. The inner lead block 170 is also electrically connected to the chips 150 and 151 through the redistribution layer 110b. The polymer layer 110c is used for electrical isolation to avoid A short circuit has occurred. The rewiring layer 110b can be formed by sputtering, and the polymer layer 110c can be formed on the rewiring layer 110b by coating.

在步骤409及图3K中,将封胶体190翻转使其研磨后之一顶面193朝向上方,并在封胶体190的顶面193形成另一布线层210。布线层210通过与内导块170的第二端273连接电性连接至内导块170。布线层210形成的方式与布线层110相同,因此不再详加叙述。In step 409 and FIG. 3K , the encapsulant 190 is turned over so that the polished top surface 193 faces upward, and another wiring layer 210 is formed on the top surface 193 of the encapsulant 190 . The wiring layer 210 is electrically connected to the inner lead block 170 by being connected to the second end 273 of the inner lead block 170 . The wiring layer 210 is formed in the same way as the wiring layer 110 , so it will not be described in detail.

接着,在图3L及步骤410中,再将封胶体190翻转并配置第一外导块130于布线层110的第二表面113。第一外导块130接触底层金属110a或重新布线层110b,使第一外导块130与芯片150、151通过内导块170及布线层110电性连接。Next, in FIG. 3L and step 410 , the encapsulant 190 is turned over and the first outer lead block 130 is disposed on the second surface 113 of the wiring layer 110 . The first outer lead block 130 is in contact with the underlying metal 110 a or the redistribution layer 110 b, so that the first outer lead block 130 is electrically connected to the chips 150 and 151 through the inner lead block 170 and the wiring layer 110 .

之后,在图3M及步骤411中,将封胶体190翻转并切割封胶体190及布线层110、210以形成多个第一封装件100、100’。第一封装件100包括芯片150、对应芯片150的内导块170、布线层110、210、封胶体190及第一外导块130,第一封装件100’包括芯片151、对应芯片151的内导块170、布线层110、210、封胶体190及第一外导块130。After that, in FIG. 3M and step 411, the molding body 190 is turned over and the molding body 190 and the wiring layers 110, 210 are cut to form a plurality of first packages 100, 100'. The first package 100 includes a chip 150, an inner lead block 170 corresponding to the chip 150, wiring layers 110, 210, an encapsulant 190, and a first outer lead block 130. The first package 100' includes a chip 151, an inner block corresponding to the chip 151. The guide block 170 , the wiring layers 110 , 210 , the encapsulant 190 and the first outer lead block 130 .

通过上述方法形成的芯片封装结构,第一封装件100、100’对应的芯片150、151通过内导块170及布线层110与主动表面150’电性连接,并各具有外导块130可设置于其他电子结构上。In the chip package structure formed by the above method, the chips 150, 151 corresponding to the first package 100, 100' are electrically connected to the active surface 150' through the inner lead block 170 and the wiring layer 110, and each has an outer lead block 130 that can be set on other electronic structures.

另外,本发明的芯片封装结构更可将多个封装件加以堆叠。相互堆叠的封装件更可以是相同结构亦或是不同结构的封装件。In addition, the chip package structure of the present invention can stack multiple packages. The stacked packages can be packages with the same structure or different structures.

请参照图5,其绘示两个相同的封装件堆叠的示意图。第一封装件100及第一封装件100’具有相同结构与相同尺寸。将对应芯片151的第一外导块130连接至第一封装件100的布线层210,以使第一封装件100及第一封装件100’通过第一外导块130电性连接,形成堆叠式芯片封装结构。再者,当堆叠的封装结构为两相同的封装件堆叠时,上层第一封装件100’更可将第一外导块130直接对应连接至下层第一封装件100的内导块170,进而可省略制作第一封装结构100的布线层210。Please refer to FIG. 5 , which shows a schematic diagram of stacking two identical packages. The first package 100 and the first package 100' have the same structure and the same size. Connect the first outer lead block 130 corresponding to the chip 151 to the wiring layer 210 of the first package 100, so that the first package 100 and the first package 100' are electrically connected through the first outer lead block 130 to form a stack type chip packaging structure. Furthermore, when the stacked package structure is two identical packages stacked, the upper first package 100 ′ can directly connect the first outer lead block 130 to the inner lead block 170 of the lower first package 100 , and further The wiring layer 210 for forming the first package structure 100 may be omitted.

再者,请参照图6,其绘示两个不同的封装件堆叠的示意图。第一封装件100及第二封装件300具有不同的尺寸与结构。将多个第二外导块330及第二封装件300配置于第一封装件100的布线层210的上方,使得第二封装件300通过第二外导块330与内导块170的第二端273电性连接。进一步来说,第二封装件300更包括另一芯片350被一封胶体390封入。芯片350与第二外导块330电性连接,且芯片150及芯片350实质上具有不同的结构。第二外导块330接触布线层210并通过布线层210与内导块170的第二端273电性连接。使第一封装件100及第二封装件300不同结构的芯片150及350可电性连接,形成堆叠式芯片封装结构。Furthermore, please refer to FIG. 6 , which shows a schematic diagram of two different package stacks. The first package 100 and the second package 300 have different sizes and structures. A plurality of second outer lead blocks 330 and the second package 300 are disposed above the wiring layer 210 of the first package 100, so that the second package 300 passes through the second outer lead blocks 330 and the second inner lead block 170. Terminal 273 is electrically connected. Furthermore, the second package 300 further includes another chip 350 encapsulated by an encapsulant 390 . The chip 350 is electrically connected to the second outer lead block 330 , and the chip 150 and the chip 350 have substantially different structures. The second outer lead block 330 contacts the wiring layer 210 and is electrically connected to the second end 273 of the inner lead block 170 through the wiring layer 210 . The chips 150 and 350 of different structures in the first package 100 and the second package 300 can be electrically connected to form a stacked chip package structure.

本实施例说明的芯片封装结构,可应用于三维(3D)发散型(Fan-Out)晶圆级芯片尺寸封装(Wafer Level Chip Scale Package,WLCSP)。内导块170、第一外导块130及第二外导块330可以是多个锡球。内导块170的形状及大小并没有限制,其被封胶体190封入的厚度较佳地略大于芯片150的厚度H150。第一封装件100通过设置内导块170减少封胶体190所需的厚度,进而缩小了第一封装件100的体积。当芯片封装结构将不同的封装件加以堆叠时,第二封装件300通过第一封装件100的布线层210形成于封胶体190上使两封装件电性连接,因此第二外导块330不需与内导块170对应设置,第二封装件300可以是任意形状大小的封装件,增加了芯片封装结构的适用性。The chip package structure described in this embodiment can be applied to a three-dimensional (3D) divergent (Fan-Out) wafer level chip scale package (Wafer Level Chip Scale Package, WLCSP). The inner guide block 170 , the first outer guide block 130 and the second outer guide block 330 may be a plurality of solder balls. The shape and size of the inner guide block 170 are not limited, and the thickness of the inner guide block 170 encapsulated by the encapsulant 190 is preferably slightly larger than the thickness H150 of the chip 150 . The first package 100 reduces the required thickness of the encapsulant 190 by providing the inner guide block 170 , thereby reducing the volume of the first package 100 . When the chip packaging structure stacks different packages, the second package 300 is formed on the encapsulant 190 through the wiring layer 210 of the first package 100 to electrically connect the two packages, so the second outer lead 330 does not It needs to be arranged corresponding to the inner guide block 170, and the second package 300 can be a package of any shape and size, which increases the applicability of the chip package structure.

第二实施例second embodiment

请参照图7A至7L,其绘示依照本发明第二实施例的芯片封装结构的制造方法的示意图。Please refer to FIGS. 7A to 7L , which are schematic diagrams illustrating a manufacturing method of a chip package structure according to a second embodiment of the present invention.

图7A中,提供一金属载具720其上具有一粘贴层721。粘贴层721的表面723及725具有粘性,粘贴层721的表面723粘贴于金属载具720。In FIG. 7A, a metal carrier 720 is provided with an adhesive layer 721 thereon. Surfaces 723 and 725 of the adhesive layer 721 are adhesive, and the surface 723 of the adhesive layer 721 is attached to the metal carrier 720 .

如图7B所示,于粘贴层721的表面725配置多个内导块770及至少一芯片,在此以芯片750、751为例,芯片750及芯片751实质上具有相同的结构。其中内导块770分别设置于芯片750、751的两侧,内导块770具有一第一端771及一第二端773,且第一端771设置于粘贴层721。As shown in FIG. 7B , a plurality of inner guide blocks 770 and at least one chip are disposed on the surface 725 of the adhesive layer 721 . Taking the chips 750 and 751 as examples, the chips 750 and 751 have substantially the same structure. The inner guide block 770 is respectively disposed on two sides of the chip 750 , 751 , the inner guide block 770 has a first end 771 and a second end 773 , and the first end 771 is disposed on the adhesive layer 721 .

之后,如图7C所示,提供一柱塞头722朝粘贴层721的方向D挤压内导块770,使得内导块770的第一端771嵌入并固定于粘贴层721。柱塞头722并未接触芯片750、751。After that, as shown in FIG. 7C , a plunger head 722 is provided to press the inner guide block 770 toward the direction D of the adhesive layer 721 , so that the first end 771 of the inner guide block 770 is embedded and fixed in the adhesive layer 721 . The plunger tip 722 does not contact the chips 750,751.

在图7D中,涂布一液态封胶材料740于粘贴层721上,并提供一模具724。液态封胶材料740可流动于粘贴层721上。模具724具有另一粘贴层727。In FIG. 7D , a liquid sealing material 740 is coated on the adhesive layer 721 and a mold 724 is provided. The liquid sealing material 740 can flow on the adhesive layer 721 . The mold 724 has a further adhesive layer 727 .

之后,如图7E所示,利用模具724挤压加热液态封胶材料740(绘示于第7D图中),使得内导块770的第二端773嵌入粘贴层727。内导块770的第一端771亦可同时嵌入粘贴层721。液态封胶材料740经由挤压加热固化形成封胶体790,以覆盖芯片750、751及内导块770。封胶体790的一厚度H790实质上略大于芯片750、751的一厚度H750,使得封胶体790包覆芯片750、751且部分封入内导块770。内导块770的第一端771及第二端773暴露于封胶体790外。After that, as shown in FIG. 7E , the mold 724 is used to squeeze and heat the liquid sealing material 740 (shown in FIG. 7D ), so that the second end 773 of the inner guide block 770 is embedded in the adhesive layer 727 . The first end 771 of the inner guide block 770 can also be embedded into the adhesive layer 721 at the same time. The liquid encapsulant 740 is extruded, heated and solidified to form an encapsulant 790 to cover the chips 750 , 751 and the inner guide block 770 . A thickness H790 of the encapsulant 790 is substantially slightly larger than a thickness H750 of the chips 750 and 751 , so that the encapsulant 790 covers the chips 750 and 751 and partially encapsulates the inner lead block 770 . The first end 771 and the second end 773 of the inner guide block 770 are exposed outside the molding compound 790 .

在图7F中,对粘贴层721进行后段热处理,并将粘贴层721及封胶层790沿方向D1移动以使粘贴层721脱离金属载具720。粘贴层727随着模具724一并移除以暴露内导块770的第二端773。In FIG. 7F , post-stage heat treatment is performed on the adhesive layer 721 , and the adhesive layer 721 and the sealant layer 790 are moved along the direction D1 to separate the adhesive layer 721 from the metal carrier 720 . The adhesive layer 727 is removed together with the mold 724 to expose the second end 773 of the inner guide block 770 .

接着,在图7G中,移除粘贴层721,以暴露内导块770的第一端771及芯片750、751的一主动表面750’及封胶体790的一底面790’。Next, in FIG. 7G , the adhesive layer 721 is removed to expose the first end 771 of the inner lead block 770, an active surface 750' of the chips 750, 751, and a bottom surface 790' of the encapsulant 790.

之后,如图7H所示,将封胶体790翻转使其底面790’及芯片750、751的主动表面750’朝向上方,并于封胶体790的底面790’形成布线层710,以使内导块770的第一端771及芯片750、751设置于布线层710的一第一表面711,并电性连接布线层710。芯片750、751两侧的内导块770通过其第一端771连接布线层110而分别与对应的芯片750、751电性连接。Afterwards, as shown in FIG. 7H , the encapsulant 790 is turned over so that the bottom surface 790 ′ and the active surfaces 750 ′ of the chips 750 and 751 face upward, and a wiring layer 710 is formed on the bottom surface 790 ′ of the encapsulant 790 so that the inner guide block The first end 771 of 770 and the chips 750 and 751 are disposed on a first surface 711 of the wiring layer 710 and are electrically connected to the wiring layer 710 . The inner lead blocks 770 on both sides of the chips 750 and 751 are electrically connected to the corresponding chips 750 and 751 respectively by connecting the first ends 771 to the wiring layer 110 .

在图7I中,将封胶体790翻转使其的一顶面793朝向上方,并在封胶体790的顶面793形成另一布线层715。布线层715通过与内导块770的第二端773连接电性连接至内导块770及芯片750、751。In FIG. 7I , the encapsulant 790 is turned over so that a top surface 793 faces upward, and another wiring layer 715 is formed on the top surface 793 of the encapsulant 790 . The wiring layer 715 is electrically connected to the inner lead block 770 and the chips 750 , 751 by connecting with the second end 773 of the inner lead block 770 .

接着,如图7J所示,再将封胶层790翻转使布线层710朝向上方,且配置多个第一外导块730于布线层710的一第二表面713。第一外导块730与芯片750、751通过内导块770及布线层710电性连接。Next, as shown in FIG. 7J , the sealant layer 790 is turned over so that the wiring layer 710 faces upward, and a plurality of first outer lead blocks 730 are disposed on a second surface 713 of the wiring layer 710 . The first outer lead block 730 is electrically connected to the chips 750 and 751 through the inner lead block 770 and the wiring layer 710 .

之后,在图7K中,切割封胶体790及布线层710、715以形成多个第一封装件950、950’。第一封装件950包括芯片750及对应芯片750的内导块及第一外导块。第一封装件950’包括芯片751及对应芯片751的内导块及第一外导块。After that, in FIG. 7K, the encapsulant 790 and the wiring layers 710, 715 are cut to form a plurality of first packages 950, 950'. The first package 950 includes a chip 750 and an inner lead block and a first outer lead block corresponding to the chip 750 . The first package 950' includes a chip 751 and an inner lead block corresponding to the chip 751 and a first outer lead block.

如图7L所示,将第一封装件950’配置于第一封装件950的上以形成堆叠式芯片封装结构。As shown in FIG. 7L, the first package 950' is disposed on the first package 950 to form a stacked chip package structure.

本实施例说明的芯片封装结构,内导块770的第二端773嵌入粘贴层727。移除粘贴层727后,内导块770的第一端771及第二端773暴露于封胶体790外。因此,芯片封装结构不需经由研磨程序即可形成布线层710及715,可节省研磨材料并可简化芯片封装结构的制造方法。In the chip packaging structure described in this embodiment, the second end 773 of the inner guide block 770 is embedded in the adhesive layer 727 . After the adhesive layer 727 is removed, the first end 771 and the second end 773 of the inner guide block 770 are exposed to the outside of the sealing body 790 . Therefore, the chip package structure can form the wiring layers 710 and 715 without grinding, which saves grinding materials and simplifies the manufacturing method of the chip package structure.

虽然本发明上述实施例的芯片封装结构的制作方法皆以一次形成两个封装件做说明,然具有通常知识者可知,封装件的数量并非用以限缩本发明。本发明的芯片封装结构的制作方法可形成一个封装件、三个封装件、十个封装件甚至更多。Although the manufacturing method of the chip package structure in the above-mentioned embodiments of the present invention is described by forming two packages at a time, those with ordinary knowledge can know that the number of packages is not used to limit the present invention. The manufacturing method of the chip package structure of the present invention can form one package, three packages, ten packages or even more.

本发明上述实施例揭露的芯片封装结构及其制造方法,除了减少每一封装件所需的厚度,更可通过布线层使不同型式的封装件相互堆叠。因此,其体积可较多芯片模块(Multi-Chip Module,MCM)的封装结构减少五至六倍。本发明较佳实施例揭露的芯片封装结构,其可应用于快闪式(Flash)随机存取存储器(Random-Access Memory,RAM)、静态随机存取存储器(Static Random-Access Memory,SRAM)、动态随机存取存储器(Dynamic Random-Access Memory,DRAM)、处理器(Processor)、特殊用途集成电路(Application Specific Integrated Circuit,ASIC)或控制器(Controller)。除此之外,其可在堆叠之前逐一对各封装件做检测,可更早检测出每一封装件的特性。The chip package structure and manufacturing method disclosed in the above embodiments of the present invention not only reduce the required thickness of each package, but also allow different types of packages to be stacked on each other through the wiring layer. Therefore, its volume can be reduced by five to six times compared with the packaging structure of a multi-chip module (MCM). The chip packaging structure disclosed in the preferred embodiments of the present invention can be applied to flash (Flash) random access memory (Random-Access Memory, RAM), static random access memory (Static Random-Access Memory, SRAM), Dynamic Random-Access Memory (DRAM), Processor (Processor), Application Specific Integrated Circuit (ASIC) or Controller (Controller). In addition, it can test each package one by one before stacking, and can detect the characteristics of each package earlier.

综上所述,虽然本发明已以较佳实施例揭露如上,然其并非用以限定本发明。本发明所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作各种的更动与润饰。因此,本发明的保护范围当视后附的申请专利范围所界定者为准。To sum up, although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art of the present invention can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.

Claims (20)

1. chip-packaging structure comprises:
One first packaging part comprises:
One first wiring layer has a first surface and a second surface;
One chip is arranged at this first surface of this first wiring layer;
Guide block in a plurality of has one first end and one second end, and this first end is arranged at this first surface of this first wiring layer; And
One adhesive body is arranged at this first surface of this first wiring layer, in order to cover this chip and partly enclose described in guide block, make described in this first end and this second end of guide block be exposed to outside this adhesive body; And
The a plurality of first outer guide block is arranged at this second surface of this first wiring layer of this first packaging part, and with described in guide block electrically connect.
2. chip-packaging structure according to claim 1 is characterized in that, more comprises:
The a plurality of second outer guide block is disposed on this first packaging part; And
One second packaging part is disposed on this first packaging part, and this second packaging part electrically connects by this second end of the described second outer guide block and described interior guide block.
3. chip-packaging structure according to claim 2 is characterized in that, the described second outer guide block correspondence is connected in described interior guide block.
4. chip-packaging structure according to claim 2 is characterized in that, this first packaging part more comprises one second wiring layer, is arranged on this adhesive body, and the wherein said second outer guide block electrically connects by this second end of this second wiring layer and described interior guide block.
5. chip-packaging structure according to claim 4, it is characterized in that, this second wiring layer has a first surface and a second surface, this second end of guide block is arranged at this second surface of this second wiring layer in described, and the described second outer guide block is arranged at this first surface of this second wiring layer.
6. chip-packaging structure according to claim 1 is characterized in that, this second end of described interior guide block flushes in this adhesive body.
7. chip-packaging structure according to claim 1 is characterized in that, this second end of described interior guide block protrudes from this adhesive body.
8. chip-packaging structure according to claim 1 is characterized in that, this first end of described interior guide block protrudes from this adhesive body, and this first wiring layer covers this first end of each described interior guide block.
9. chip-packaging structure according to claim 1 is characterized in that the thickness of this adhesive body is more than or equal to the thickness of this chip.
10. the manufacture method of a chip-packaging structure comprises:
(a) provide a carrier, have an adhered layer on this carrier;
(b) a plurality of interior guide blocks of configuration and at least one chip are in this adhered layer, and wherein said interior guide block has one first end and one second end, and this first end is arranged at this adhered layer;
(c) form an adhesive body on this adhered layer, to cover this chip and described interior guide block;
(d) remove this adhered layer, to expose this first end, an active surface of this chip and a bottom surface of this adhesive body of described interior guide block;
(e) form one first wiring layer in this bottom surface of this adhesive body, so that this active surface of this first end of described interior guide block and this chip is arranged at a first surface of this first wiring layer, and electrically connect this first wiring layer, forming one first packaging part, this first packaging part comprise this chip, to should chip described in guide block, this first wiring layer and this adhesive body; And
(f) the configuration a plurality of first outer guide block is in a second surface of this first wiring layer.
11. manufacture method according to claim 10 is characterized in that, more comprises:
(g) configuration a plurality of second outer guide block and one second packaging part make this second packaging part electrically connect by this second end of the described second outer guide block and described interior guide block in the top of this first packaging part.
12. manufacture method according to claim 11 is characterized in that, more comprises:
Form the end face of one second wiring layer in this adhesive body, this second wiring layer is electrically connected to described interior guide block, and wherein in this step (g), the described second outer guide block electrically connects by this second end of this second wiring layer and described interior guide block.
13. manufacture method according to claim 10 is characterized in that, more comprises:
Form one second wiring layer in one of this adhesive body end face, this second wiring layer is electrically connected to described interior guide block.
14. manufacture method according to claim 10 is characterized in that, in this step (c) before, this method more comprises:
Towards the described interior guide block of the direction extruding of this adhered layer, make this first end of described interior guide block embed this adhered layer.
15. manufacture method according to claim 10 is characterized in that, in this step (d) afterwards, this method more comprises:
Grind an end face of this adhesive body, until expose described in this second end of guide block.
16. manufacture method according to claim 10 is characterized in that, this step (c) comprising:
(c1) coating one liquid adhesive material is in this adhered layer; And
(c2) solidifying this liquid state adhesive material is this adhesive body.
17. manufacture method according to claim 16 is characterized in that, this step (c2) comprising:
One mould is provided, and this mould has another adhered layer; And
Utilize this mould extruding and heat this liquid state adhesive material, make this second end of described interior guide block embed this another adhered layer.
18. manufacture method according to claim 17 is characterized in that, in this step (c2) afterwards, this method more comprises:
Remove this another adhered layer, to expose this second end of described interior guide block.
19. manufacture method according to claim 10 is characterized in that, in this step (f) afterwards, this method more comprises:
(h) cut this adhesive layer and this first wiring layer to form a plurality of these first packaging parts.
20. manufacture method according to claim 19 is characterized in that, this step (h) afterwards, this method more comprises:
Pile up described first packaging part, each described first packaging part electrically connects by the corresponding part described first outer guide block.
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