CN101252111B - Chip packaging structure and manufacturing method thereof - Google Patents
Chip packaging structure and manufacturing method thereof Download PDFInfo
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- CN101252111B CN101252111B CN2008100921063A CN200810092106A CN101252111B CN 101252111 B CN101252111 B CN 101252111B CN 2008100921063 A CN2008100921063 A CN 2008100921063A CN 200810092106 A CN200810092106 A CN 200810092106A CN 101252111 B CN101252111 B CN 101252111B
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
Description
【技术领域】【Technical field】
本发明是有关于一种封装结构及其制造方法,且特别是有关于一种芯片封装结构及其制造方法。The present invention relates to a packaging structure and its manufacturing method, and in particular to a chip packaging structure and its manufacturing method.
【背景技术】【Background technique】
近年来电子装置蓬勃的应用于日常生活中,业界无不致力发展微型且多功能的电子产品,以符合市场需求。晶圆级芯片尺寸封装(Wafer Level Chip Scale Package,WLCSP)是目前电子产品的半导体元件常用的封装结构。In recent years, electronic devices have been vigorously used in daily life, and the industry is all committed to developing miniature and multi-functional electronic products to meet market demands. Wafer Level Chip Scale Package (WLCSP) is a commonly used packaging structure for semiconductor components of electronic products.
请参照图1,其绘示传统芯片封装件的示意图。封装件10包括布线层20、封胶体30、绝缘层40、芯片50、多条内导线70及多个锡球90。封胶体30将绝缘层40、芯片50及内导线70封入其内。封胶体30设置于布线层20的一侧,锡球90则设置于布线层20的另一侧。绝缘层40位于布线层20与芯片50的间。内导线70的一端设置于芯片50,内导线70的另一端连接布线层20。芯片50通过内导线70经由布线层20电性连接至锡球90。Please refer to FIG. 1 , which shows a schematic diagram of a conventional chip package. The
封装件10因内导线70形状条件的限制,使封胶体30的一厚度H30远大于芯片50的一厚度H50。因而增加封装件10的体积,进而限缩电子装置的微型化。此外,在多功能的电子装置中,势必需将多个芯片加以结合。因此,提供一增加封装密度的封装件及其制造方法,乃业界倾力研究的方向之一。The
【发明内容】【Content of invention】
本发明是有关于一种芯片封装结构及其制造方法,采用内导块及其对应的外导块设计来减少封装件的封胶体所需的厚度,藉以增加封装结构的密度。The invention relates to a chip packaging structure and a manufacturing method thereof. The inner guide block and its corresponding outer guide block are designed to reduce the required thickness of the encapsulant of the package, thereby increasing the density of the package structure.
根据本发明的一方面,提出一种芯片封装结构,包括一封装件及多个外导块。封装件包括一布线层、一芯片、多个内导块及一封胶体。布线层具有一第一表面及一第二表面,芯片设置于布线层的第一表面。内导块具有一第一端及一第二端,第一端设置于布线层的第一表面。封胶体设置于布线层的第一表面,用以覆盖芯片及部份封入内导块,使得内导块的第一端及第二端暴露于封胶体外。外导块设置于封装件的布线层的第二表面,且与内导块电性连接。According to one aspect of the present invention, a chip packaging structure is provided, including a package and a plurality of outer lead blocks. The package includes a wiring layer, a chip, multiple inner guide blocks and encapsulant. The wiring layer has a first surface and a second surface, and the chip is arranged on the first surface of the wiring layer. The inner guide block has a first end and a second end, and the first end is disposed on the first surface of the wiring layer. The encapsulant is disposed on the first surface of the wiring layer to cover the chip and partially enclose the inner lead block, so that the first end and the second end of the inner lead block are exposed outside the encapsulant. The outer lead block is disposed on the second surface of the wiring layer of the package, and is electrically connected with the inner lead block.
根据本发明的另一方面,提出一种芯片封装结构的制造方法。制造方法包括下列步骤:首先,提供一载体其具有一粘贴层。再者,配置多个内导块及至少一芯片于粘贴层,其中内导块具有一第一端及一第二端,且第一端设置于粘贴层。接着,形成一封胶体于粘贴层上,以覆盖芯片及内导块。然后,移除粘贴层,以暴露内导块的第一端、芯片的一主动表面及封胶体的一底面。此外,形成一布线层于封胶体的底面,以使内导块的第一端及芯片的主动表面设置于布线层的一第一表面,并电性连接布线层,以形成一封装件,封装件包括芯片、对应芯片的内导块、布线层及封胶体。最后,配置多个外导块于布线层的一第二表面。According to another aspect of the present invention, a method for manufacturing a chip packaging structure is provided. The manufacturing method includes the following steps: firstly, a carrier with an adhesive layer is provided. Furthermore, a plurality of inner guide blocks and at least one chip are arranged on the adhesive layer, wherein the inner guide block has a first end and a second end, and the first end is arranged on the adhesive layer. Next, form an encapsulant on the adhesive layer to cover the chip and the inner guide block. Then, the adhesive layer is removed to expose the first end of the inner lead block, an active surface of the chip and a bottom surface of the encapsulant. In addition, a wiring layer is formed on the bottom surface of the sealing compound, so that the first end of the inner lead block and the active surface of the chip are arranged on a first surface of the wiring layer, and the wiring layer is electrically connected to form a package. The components include a chip, an inner guide block corresponding to the chip, a wiring layer and a sealant. Finally, a plurality of outer lead blocks are arranged on a second surface of the wiring layer.
为让本发明的上述内容能更明显易懂,下文特举较佳实施例,并配合所附图式,作详细说明如下:In order to make the above content of the present invention more obvious and understandable, the following preferred embodiments are specifically cited below, and in conjunction with the accompanying drawings, the detailed description is as follows:
【附图说明】【Description of drawings】
图1(现有技术)绘示传统芯片封装件的示意图。FIG. 1 (Prior Art) shows a schematic diagram of a conventional chip package.
图2绘示依照本发明第一实施例的芯片封装结构的示意图。FIG. 2 is a schematic diagram of a chip packaging structure according to a first embodiment of the present invention.
图3A至3M绘示图2的芯片封装结构的制造方法的示意图。3A to 3M are schematic diagrams illustrating a manufacturing method of the chip package structure in FIG. 2 .
图4绘示图2的芯片封装结构的制造方法的流程图。FIG. 4 is a flowchart of a manufacturing method of the chip package structure in FIG. 2 .
图5绘示两个相同的封装件堆叠的示意图。FIG. 5 is a schematic diagram of stacking two identical packages.
图6绘示两个不同的封装件堆叠的示意图。FIG. 6 is a schematic diagram of two different package stacks.
图7A至7L绘示依照本发明第二实施例的芯片封装结构的制造方法的示意图。7A to 7L are schematic diagrams illustrating a method for manufacturing a chip package structure according to a second embodiment of the present invention.
【具体实施方式】【Detailed ways】
第一实施例first embodiment
请参照图2,其绘示依照本发明第一实施例的芯片封装结构的示意图。芯片封装结构包括一第一封装件100及多个第一外导块130。第一封装件100包括一布线层110、一芯片150、多个内导块170及一封胶体190。Please refer to FIG. 2 , which shows a schematic diagram of a chip packaging structure according to a first embodiment of the present invention. The chip package structure includes a
布线层110具有一第一表面111及一第二表面113。芯片150设置于布线层110的第一表面111。内导块170具有一第一端171及一第二端273,第一端171设置于布线层110的第一表面111。封胶体190设置于布线层110的第一表面111,用以覆盖芯片150及部份封入内导块170,使得内导块170的第一端171及第二端273暴露于封胶体190外。第一外导块130设置于第一封装件100的布线层110的第二表面113,且与内导块170电性连接。The
此外,第一封装件100更包括另一布线层210设置于封胶体190上,并覆盖内导块170的第二端273。通过设置略大于芯片150厚度的内导块170,缩小了封胶体190所需的厚度,进而降低第一封装件100的体积。In addition, the
请参照图3A至3M及图4,图3A至3M图绘示图2的芯片封装结构的制造方法的示意图,图4绘示图2的芯片封装结构的制造方法的流程图。Please refer to FIGS. 3A to 3M and FIG. 4 , FIGS. 3A to 3M are diagrams illustrating a manufacturing method of the chip packaging structure of FIG. 2 , and FIG. 4 is a flow chart of the manufacturing method of the chip packaging structure of FIG. 2 .
步骤401如图3A所示,提供一具有粘贴层121的载体120。载体120可以是一金属载具,粘贴层121的表面123及125皆具有粘性,粘贴层121的表面123粘贴于载体120。
在步骤402与图3B中,配置多个内导块170及至少一芯片于粘贴层121的表面125。本实施例以芯片150、151为例,芯片150及芯片151实质上具有相同的结构。内导块170具有第一端171及一第二端173,内导块170的第一端171及芯片150、151以粘接的方式固定于粘贴层121上。In
较佳地如图3C所示,在步骤403中提供一模具220,例如是一柱塞头(plunger)朝粘贴层121之一方向D挤压内导块170,使得内导块170的第一端171嵌入并固定于粘贴层121,但模具220未接触芯片150、151。通过将内导块170挤压坎入粘贴层121,可确保内导块170不致因后述的程序而改变其位置。Preferably as shown in Figure 3C, a
在步骤404中,如图3D所示,涂布一液态封胶材料140于粘贴层121上。液态封胶材料140可流动于粘贴层121上。In
在步骤405及图3E中,提供另一模具222将液态封胶材料140(绘示于图3D中)加压并加热,并使其固化为封胶体190。封胶体190覆盖芯片150、151及内导块170。封胶体190的厚度H190实质上略大于芯片150、151的厚度H150,使得封胶体190包覆芯片150、151且部分封入内导块170。内导块170的第一端171因坎入粘贴层121暴露于封胶体190外,内导块170的第二端173被封入于封胶体190内。In
之后,如步骤406及图3F所示,对粘贴层121进行后段热处理(post-moldcuring),并将粘贴层121及封胶层190沿一方向D1移动以使粘贴层121脱离载体120。接着如图3G所示,使封胶体190脱离粘贴层121,以暴露内导块170的第一端171、芯片150、151的一主动表面150’及封胶体190的一底面190’。Afterwards, as shown in
步骤407如图3H及3I所示,提供再一研磨治具224研磨封胶体190的一顶面191,直至接触内导块170的第二端173,并再进一步研磨以使内导块170暴露出较大面积的一第二端273,以增加后续电性连接的稳定性。研磨后封胶体的厚度H191实质上仍大于芯片150、151的厚度H150。
在步骤408及图3J中,将封胶体190翻转使其底面190’及芯片150、151的主动表面150’朝向上方,并于封胶体190的底面190’形成布线层110,以使内导块170的第一端171及芯片150、151的主动表面150’设置于布线层110的第一表面111,并电性连接布线层110。内导块170的第一端171通过布线层110与芯片150、151电性连接。In
布线层110包含底层金属(Under Bump metal lurgy,UBM)110a、重新布线层(Re-Distribution Layer,RDL)110b及高分子层110c。底层金属110a与内导块170接触使其电性连接重新布线层110b,内导块170并通过重新布线层110b与芯片150及151电性连接,高分子层110c则用以电性阻隔,避免发生短路。重新布线层110b可用溅镀方式形成,高分子层110c则以涂布方式形成于重新布线层110b上。The
在步骤409及图3K中,将封胶体190翻转使其研磨后之一顶面193朝向上方,并在封胶体190的顶面193形成另一布线层210。布线层210通过与内导块170的第二端273连接电性连接至内导块170。布线层210形成的方式与布线层110相同,因此不再详加叙述。In
接着,在图3L及步骤410中,再将封胶体190翻转并配置第一外导块130于布线层110的第二表面113。第一外导块130接触底层金属110a或重新布线层110b,使第一外导块130与芯片150、151通过内导块170及布线层110电性连接。Next, in FIG. 3L and step 410 , the
之后,在图3M及步骤411中,将封胶体190翻转并切割封胶体190及布线层110、210以形成多个第一封装件100、100’。第一封装件100包括芯片150、对应芯片150的内导块170、布线层110、210、封胶体190及第一外导块130,第一封装件100’包括芯片151、对应芯片151的内导块170、布线层110、210、封胶体190及第一外导块130。After that, in FIG. 3M and step 411, the
通过上述方法形成的芯片封装结构,第一封装件100、100’对应的芯片150、151通过内导块170及布线层110与主动表面150’电性连接,并各具有外导块130可设置于其他电子结构上。In the chip package structure formed by the above method, the
另外,本发明的芯片封装结构更可将多个封装件加以堆叠。相互堆叠的封装件更可以是相同结构亦或是不同结构的封装件。In addition, the chip package structure of the present invention can stack multiple packages. The stacked packages can be packages with the same structure or different structures.
请参照图5,其绘示两个相同的封装件堆叠的示意图。第一封装件100及第一封装件100’具有相同结构与相同尺寸。将对应芯片151的第一外导块130连接至第一封装件100的布线层210,以使第一封装件100及第一封装件100’通过第一外导块130电性连接,形成堆叠式芯片封装结构。再者,当堆叠的封装结构为两相同的封装件堆叠时,上层第一封装件100’更可将第一外导块130直接对应连接至下层第一封装件100的内导块170,进而可省略制作第一封装结构100的布线层210。Please refer to FIG. 5 , which shows a schematic diagram of stacking two identical packages. The
再者,请参照图6,其绘示两个不同的封装件堆叠的示意图。第一封装件100及第二封装件300具有不同的尺寸与结构。将多个第二外导块330及第二封装件300配置于第一封装件100的布线层210的上方,使得第二封装件300通过第二外导块330与内导块170的第二端273电性连接。进一步来说,第二封装件300更包括另一芯片350被一封胶体390封入。芯片350与第二外导块330电性连接,且芯片150及芯片350实质上具有不同的结构。第二外导块330接触布线层210并通过布线层210与内导块170的第二端273电性连接。使第一封装件100及第二封装件300不同结构的芯片150及350可电性连接,形成堆叠式芯片封装结构。Furthermore, please refer to FIG. 6 , which shows a schematic diagram of two different package stacks. The
本实施例说明的芯片封装结构,可应用于三维(3D)发散型(Fan-Out)晶圆级芯片尺寸封装(Wafer Level Chip Scale Package,WLCSP)。内导块170、第一外导块130及第二外导块330可以是多个锡球。内导块170的形状及大小并没有限制,其被封胶体190封入的厚度较佳地略大于芯片150的厚度H150。第一封装件100通过设置内导块170减少封胶体190所需的厚度,进而缩小了第一封装件100的体积。当芯片封装结构将不同的封装件加以堆叠时,第二封装件300通过第一封装件100的布线层210形成于封胶体190上使两封装件电性连接,因此第二外导块330不需与内导块170对应设置,第二封装件300可以是任意形状大小的封装件,增加了芯片封装结构的适用性。The chip package structure described in this embodiment can be applied to a three-dimensional (3D) divergent (Fan-Out) wafer level chip scale package (Wafer Level Chip Scale Package, WLCSP). The
第二实施例second embodiment
请参照图7A至7L,其绘示依照本发明第二实施例的芯片封装结构的制造方法的示意图。Please refer to FIGS. 7A to 7L , which are schematic diagrams illustrating a manufacturing method of a chip package structure according to a second embodiment of the present invention.
图7A中,提供一金属载具720其上具有一粘贴层721。粘贴层721的表面723及725具有粘性,粘贴层721的表面723粘贴于金属载具720。In FIG. 7A, a
如图7B所示,于粘贴层721的表面725配置多个内导块770及至少一芯片,在此以芯片750、751为例,芯片750及芯片751实质上具有相同的结构。其中内导块770分别设置于芯片750、751的两侧,内导块770具有一第一端771及一第二端773,且第一端771设置于粘贴层721。As shown in FIG. 7B , a plurality of inner guide blocks 770 and at least one chip are disposed on the
之后,如图7C所示,提供一柱塞头722朝粘贴层721的方向D挤压内导块770,使得内导块770的第一端771嵌入并固定于粘贴层721。柱塞头722并未接触芯片750、751。After that, as shown in FIG. 7C , a
在图7D中,涂布一液态封胶材料740于粘贴层721上,并提供一模具724。液态封胶材料740可流动于粘贴层721上。模具724具有另一粘贴层727。In FIG. 7D , a
之后,如图7E所示,利用模具724挤压加热液态封胶材料740(绘示于第7D图中),使得内导块770的第二端773嵌入粘贴层727。内导块770的第一端771亦可同时嵌入粘贴层721。液态封胶材料740经由挤压加热固化形成封胶体790,以覆盖芯片750、751及内导块770。封胶体790的一厚度H790实质上略大于芯片750、751的一厚度H750,使得封胶体790包覆芯片750、751且部分封入内导块770。内导块770的第一端771及第二端773暴露于封胶体790外。After that, as shown in FIG. 7E , the
在图7F中,对粘贴层721进行后段热处理,并将粘贴层721及封胶层790沿方向D1移动以使粘贴层721脱离金属载具720。粘贴层727随着模具724一并移除以暴露内导块770的第二端773。In FIG. 7F , post-stage heat treatment is performed on the
接着,在图7G中,移除粘贴层721,以暴露内导块770的第一端771及芯片750、751的一主动表面750’及封胶体790的一底面790’。Next, in FIG. 7G , the
之后,如图7H所示,将封胶体790翻转使其底面790’及芯片750、751的主动表面750’朝向上方,并于封胶体790的底面790’形成布线层710,以使内导块770的第一端771及芯片750、751设置于布线层710的一第一表面711,并电性连接布线层710。芯片750、751两侧的内导块770通过其第一端771连接布线层110而分别与对应的芯片750、751电性连接。Afterwards, as shown in FIG. 7H , the
在图7I中,将封胶体790翻转使其的一顶面793朝向上方,并在封胶体790的顶面793形成另一布线层715。布线层715通过与内导块770的第二端773连接电性连接至内导块770及芯片750、751。In FIG. 7I , the
接着,如图7J所示,再将封胶层790翻转使布线层710朝向上方,且配置多个第一外导块730于布线层710的一第二表面713。第一外导块730与芯片750、751通过内导块770及布线层710电性连接。Next, as shown in FIG. 7J , the
之后,在图7K中,切割封胶体790及布线层710、715以形成多个第一封装件950、950’。第一封装件950包括芯片750及对应芯片750的内导块及第一外导块。第一封装件950’包括芯片751及对应芯片751的内导块及第一外导块。After that, in FIG. 7K, the
如图7L所示,将第一封装件950’配置于第一封装件950的上以形成堆叠式芯片封装结构。As shown in FIG. 7L, the first package 950' is disposed on the
本实施例说明的芯片封装结构,内导块770的第二端773嵌入粘贴层727。移除粘贴层727后,内导块770的第一端771及第二端773暴露于封胶体790外。因此,芯片封装结构不需经由研磨程序即可形成布线层710及715,可节省研磨材料并可简化芯片封装结构的制造方法。In the chip packaging structure described in this embodiment, the
虽然本发明上述实施例的芯片封装结构的制作方法皆以一次形成两个封装件做说明,然具有通常知识者可知,封装件的数量并非用以限缩本发明。本发明的芯片封装结构的制作方法可形成一个封装件、三个封装件、十个封装件甚至更多。Although the manufacturing method of the chip package structure in the above-mentioned embodiments of the present invention is described by forming two packages at a time, those with ordinary knowledge can know that the number of packages is not used to limit the present invention. The manufacturing method of the chip package structure of the present invention can form one package, three packages, ten packages or even more.
本发明上述实施例揭露的芯片封装结构及其制造方法,除了减少每一封装件所需的厚度,更可通过布线层使不同型式的封装件相互堆叠。因此,其体积可较多芯片模块(Multi-Chip Module,MCM)的封装结构减少五至六倍。本发明较佳实施例揭露的芯片封装结构,其可应用于快闪式(Flash)随机存取存储器(Random-Access Memory,RAM)、静态随机存取存储器(Static Random-Access Memory,SRAM)、动态随机存取存储器(Dynamic Random-Access Memory,DRAM)、处理器(Processor)、特殊用途集成电路(Application Specific Integrated Circuit,ASIC)或控制器(Controller)。除此之外,其可在堆叠之前逐一对各封装件做检测,可更早检测出每一封装件的特性。The chip package structure and manufacturing method disclosed in the above embodiments of the present invention not only reduce the required thickness of each package, but also allow different types of packages to be stacked on each other through the wiring layer. Therefore, its volume can be reduced by five to six times compared with the packaging structure of a multi-chip module (MCM). The chip packaging structure disclosed in the preferred embodiments of the present invention can be applied to flash (Flash) random access memory (Random-Access Memory, RAM), static random access memory (Static Random-Access Memory, SRAM), Dynamic Random-Access Memory (DRAM), Processor (Processor), Application Specific Integrated Circuit (ASIC) or Controller (Controller). In addition, it can test each package one by one before stacking, and can detect the characteristics of each package earlier.
综上所述,虽然本发明已以较佳实施例揭露如上,然其并非用以限定本发明。本发明所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作各种的更动与润饰。因此,本发明的保护范围当视后附的申请专利范围所界定者为准。To sum up, although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art of the present invention can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.
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