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CN101246697A - Direct write method for magnetic memory cell and magnetic memory cell structure - Google Patents

Direct write method for magnetic memory cell and magnetic memory cell structure Download PDF

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CN101246697A
CN101246697A CNA2007100053545A CN200710005354A CN101246697A CN 101246697 A CN101246697 A CN 101246697A CN A2007100053545 A CNA2007100053545 A CN A2007100053545A CN 200710005354 A CN200710005354 A CN 200710005354A CN 101246697 A CN101246697 A CN 101246697A
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magnetic
magnetic field
ferromagnetic layer
layer
easy axis
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李元仁
洪建中
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Industrial Technology Research Institute ITRI
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Abstract

The invention discloses a direct write method of a magnetic storage unit. The magnetic memory cell includes a magnetically free stack having a lower ferromagnetic layer and an upper ferromagnetic layer. The lower ferromagnetic layer and the upper ferromagnetic layer both have bi-directional easy axes of substantially the same direction. The method includes applying a first magnetic field in a direction of the bi-directional easy axis and performing a write operation. When a first storage state is to be written, a second magnetic field is applied instead of the first magnetic field. The second magnetic field is oriented on a first side of the bi-directional easy axis and has a first angle. A third magnetic field is applied in place of the first magnetic field when a write operation is to write a second storage state. The third magnetic field is in the second side of the bidirectional easy axis and has a second angle. For example, at least one of the lower ferromagnetic layer and the upper ferromagnetic layer has a unidirectional easy axis and an angle with respect to a bidirectional easy axis.

Description

磁性存储单元的直接写入方法与磁性存储单元结构 Direct writing method of magnetic memory cell and structure of magnetic memory cell

技术领域 technical field

本发明有关于一种磁性存储单元的技术,且特别有关于一种磁性存储单元的写入方法与结构。The present invention relates to the technology of a magnetic storage unit, and particularly relates to a writing method and structure of the magnetic storage unit.

背景技术 Background technique

磁性存储器,例如磁性随机存取存储器(Magnetic Random AccessMemory,MRAM)也是一种非易失性存储器,有非易失性、高密集度、高读写速度、抗辐射线等优点。其是利用相邻隧穿绝缘层的磁性物质的磁化向量,由于平行或反平行的排列所产生磁阻的大小来记录0或1的数据。写入数据时,一般所使用的方法为两条电流线,例如位线(Bit Line,BL)及写入字线(Write Word Line,WWL)感应磁场所交集选择到的磁性存储器的存储单元。同时通过改变自由层磁化向量(Magnetization)方向,来更改其磁电阻值。而在读取存储数据时,让选择到的磁性存储单元流入电流,从读取的电阻值可以判定存储数据之数位值。Magnetic memory, such as Magnetic Random Access Memory (Magnetic Random Access Memory, MRAM) is also a kind of non-volatile memory, which has the advantages of non-volatility, high density, high read and write speed, and radiation resistance. It utilizes the magnetization vectors of the magnetic substances adjacent to the tunneling insulating layer to record 0 or 1 data due to the magnitude of the magnetoresistance generated by the parallel or antiparallel arrangement. When writing data, the general method used is two current lines, such as the intersection of the bit line (Bit Line, BL) and the write word line (WWL) induced magnetic field to select the memory cell of the magnetic memory. At the same time, by changing the direction of the magnetization vector (Magnetization) of the free layer, its magnetoresistance value is changed. When reading the stored data, let the selected magnetic memory cells flow in current, and the digital value of the stored data can be determined from the read resistance value.

图1绘示磁性存储单元的基本结构。参阅图1,要存取磁性存储单元,也是需要交叉且通入适当电流的电流线100、102,其依照操作的方式,又例如称为写入字线与位线。当二导线通入电流后会产生二个方向的磁场,以得到所要的磁场大小与方向,以施加在磁性存储单元104上。磁性存储单元104是叠层结构,包括磁性固定层(magnetic pinned layer)在预定方向具有固定的磁化向量(magnetization),或是总磁矩(total magnetic moment)。利用磁阻的大小,来读取数据。又,通过输出电极106、108,可以读出此存储单元所存的数据。关于磁性存储器的操作细节,是本领域普通技术人员可以了解,不继续描述。FIG. 1 shows the basic structure of a magnetic memory cell. Referring to FIG. 1 , in order to access the magnetic memory cell, current lines 100 and 102 need to be crossed and fed with appropriate current. According to the operation mode, they are also called write word lines and bit lines, for example. When the two wires are fed with current, magnetic fields in two directions will be generated to obtain the desired magnitude and direction of the magnetic field to be applied to the magnetic memory unit 104 . The magnetic memory unit 104 is a laminate structure, including a magnetic pinned layer having a fixed magnetization or total magnetic moment in a predetermined direction. Use the size of the magnetoresistance to read data. Also, through the output electrodes 106 and 108, the data stored in the memory cell can be read out. Details about the operation of the magnetic memory are well understood by those skilled in the art and will not be further described.

图2绘示磁性存储器的存储机制。于图2,磁性固定层104a有固定的磁矩方向107。磁性自由层104c,位于磁性固定层104a上方,其中间由绝缘层104b所隔离。磁性自由层104c有磁矩方向108a或是108b。由于磁矩方向107与磁矩方向108a平行,其产生的磁阻例如代表“0”的数据,反之磁矩方向107与磁矩方向108b反平行,其产生的磁阻例如代表“1”的数据。FIG. 2 illustrates the storage mechanism of the magnetic memory. In FIG. 2 , the magnetic pinned layer 104 a has a fixed magnetic moment direction 107 . The magnetic free layer 104c is located above the magnetic pinned layer 104a, and is separated by the insulating layer 104b. The magnetic free layer 104c has a magnetic moment direction 108a or 108b. Since the magnetic moment direction 107 is parallel to the magnetic moment direction 108a, the magnetic resistance generated by it represents, for example, the data of "0", otherwise the magnetic moment direction 107 is antiparallel to the magnetic moment direction 108b, and the magnetic resistance generated by it represents, for example, the data of "1". .

一般,如图2的单层的自由层104c,会有存取错误的可能。针对上述等问题,为了降低邻近单元在写入数据时的干扰情形,传统技术的改进方式是将自由层以铁磁(FM)/非磁性金属(M)/铁磁(FM)三层结构取代单层铁磁材料,而构成磁性自由叠层166,其结构如图3所示。在非磁性金属层152上下的两层是铁磁性金属层150、154,以反平行排列,形成封闭的磁力线。在下面的磁性固定叠层168,通过隧穿绝缘层(tunnel barrier layer,T)156,与磁性自由叠层166隔开。磁性固定叠层168包括上固定层(top pinned layer,TP)158、非磁性金属层160、以及下固定层(bottom pinned layer,BP)162。在上固定层与下固定层有固定的磁化向量。另外还有基层164在底部,例如是反铁磁层。Generally, for the single-layer free layer 104c shown in FIG. 2, there is a possibility of access errors. In view of the above problems, in order to reduce the interference of adjacent cells when writing data, the improvement of the traditional technology is to replace the free layer with a ferromagnetic (FM) / non-magnetic metal (M) / ferromagnetic (FM) three-layer structure A single layer of ferromagnetic material constitutes a magnetically free laminated layer 166, the structure of which is shown in FIG. 3 . The two layers above and below the non-magnetic metal layer 152 are ferromagnetic metal layers 150, 154, which are arranged in anti-parallel to form closed magnetic force lines. The underlying magnetically fixed stack 168 is separated from the magnetically free stack 166 by a tunnel barrier layer (T) 156 . The magnetic pinned stack 168 includes a top pinned layer (TP) 158 , a non-magnetic metal layer 160 , and a bottom pinned layer (BP) 162 . There are fixed magnetization vectors in the upper pinned layer and the lower pinned layer. There is also a base layer 164 at the bottom, such as an antiferromagnetic layer.

针对三层结构的磁性自由叠层166,把位线BL与写入字线WWL相对自由叠层166的磁场异向轴(magnetic anisotropic axis),使有45度的夹角,其磁场异向轴方向就是所谓的易轴(easy axis)方向。如此,位线BL与写入字线WWL可分别对自由叠层166,依照先后关系,施加与易轴夹角为45度的磁场,以旋转自由叠层166的磁化向量。存储单元所储存的数据是由铁磁性金属层154与上固定层158的二个磁化向量的方向来决定。For the magnetic free stack 166 of the three-layer structure, the bit line BL and the write word line WWL are relative to the magnetic anisotropic axis (magnetic anisotropic axis) of the free stack 166, so that there is an included angle of 45 degrees, and the magnetic field anisotropic axis The direction is the so-called easy axis direction. In this way, the bit line BL and the write word line WWL can respectively apply a magnetic field with an angle of 45 degrees to the easy axis to the free stack 166 to rotate the magnetization vector of the free stack 166 . The data stored in the memory cell is determined by the directions of the two magnetization vectors of the ferromagnetic metal layer 154 and the upper pinned layer 158 .

另外,除了将自由层改变为三层结构外,传统技术还提出以拴扣模式(toggle mode)的操作模式来旋转自由层的磁化向量。图4绘示外加磁场对三层结构的效应。参阅图4,粗箭头代表外加磁场,其长度代表大小。二个细箭头代表在自由叠层的上下铁磁层的二个磁化向量方向。当外加磁场太小时,二个磁化向量的方向不改变。当外加磁场大到一定程度时,二个磁化向量会有一张角。当外加磁场过大时,则二个磁化向量会沿着外加磁场的方向。拴扣模式的操作是属于上述的第二种情形。In addition, in addition to changing the free layer into a three-layer structure, the conventional technology also proposes to rotate the magnetization vector of the free layer in a toggle mode of operation. FIG. 4 shows the effect of an external magnetic field on a three-layer structure. Referring to Fig. 4, the thick arrow represents the external magnetic field, and its length represents the magnitude. The two thin arrows represent the directions of the two magnetization vectors in the upper and lower ferromagnetic layers of the free stack. When the applied magnetic field is too small, the directions of the two magnetization vectors do not change. When the external magnetic field is large enough, the two magnetization vectors will have an angle. When the applied magnetic field is too large, the two magnetization vectors will follow the direction of the applied magnetic field. The operation of the button mode belongs to the second situation mentioned above.

图5绘示拴扣模式的外加磁场时序图。参阅图5,H1与H2代表与易轴方向隔45度的二个外加磁场方向,而椭圆内的二个箭头代表二个磁化向量的方向。在t0阶段,没有外加磁场,因此二个磁化向量都在易轴方向上。接着,H1与H2的磁场随着图示的时序启动,得到不同时间阶段(t1~t3)的总磁场,而转动二个磁化向量的方向。在时间阶段t4时,停止施加磁场,而二个磁化向量的方向被翻转一次。这就是说,存储单元所储存的数据被写入而改变。FIG. 5 is a timing diagram of an applied magnetic field in the key mode. Referring to FIG. 5 , H1 and H2 represent the directions of two applied magnetic fields separated by 45 degrees from the direction of the easy axis, and the two arrows in the ellipse represent the directions of the two magnetization vectors. In the t 0 stage, there is no external magnetic field, so the two magnetization vectors are in the direction of the easy axis. Then, the magnetic fields of H1 and H2 are activated according to the sequence shown in the figure, and the total magnetic fields of different time periods (t 1 -t 3 ) are obtained, and the directions of the two magnetization vectors are rotated. At time period t4 , the application of the magnetic field is stopped and the directions of the two magnetization vectors are reversed once. That is to say, the data stored in the memory cell is changed by writing.

另外,在拴扣模式的操作条件下,其写入电流仍偏高,因此传统技术也提出加入磁场偏压的设计。图6绘示减小操作电流的传统技术示意图。参阅图6,存储单元的基本结构仍与图3类似,如左图所示,其主要不同的是将下固定层162的总磁矩,相对于上固定层158的总磁矩增加,例如增加厚度。由于下固定层162与上固定层158的总磁矩不平衡,会产生外漏磁场(fringemagnetic field),会对自由叠层166产生磁场偏压(bias filed)184,可以将第一象限的拴扣操作区域往磁场零点移动,其结果缩小成一距离186。因此,由于要求的写入磁场小,其要产生磁场的写入操作电流就可以减少。In addition, under the operating condition of the key-on mode, the write current is still relatively high, so the conventional technology also proposes a design of adding a magnetic field bias. FIG. 6 is a schematic diagram of a conventional technique for reducing operating current. Referring to FIG. 6, the basic structure of the memory cell is still similar to that of FIG. 3, as shown in the left figure, the main difference is that the total magnetic moment of the lower pinned layer 162 is increased relative to the total magnetic moment of the upper pinned layer 158, for example, increased thickness. Because the total magnetic moment of the lower pinned layer 162 and the upper pinned layer 158 is unbalanced, an external leakage magnetic field (fringemagnetic field) will be generated, and a magnetic field bias (bias filed) 184 will be generated to the free lamination layer 166, and the tether of the first quadrant can be The region of operation of the buckle is moved towards the zero point of the magnetic field, and as a result shrinks to a distance 186 . Therefore, since the required write magnetic field is small, the write operation current for generating the magnetic field can be reduced.

就上述传统的操作方式,对要将数据写入对应的磁性存储单元的机制已有一些改进,但是操作方式仍需要在t2阶段先读取磁性存储单元的目前的储存数据,如果储存数据与要写入的数据不同时,才进行写入。在这种传统的写入操作中,由于需要先读取数据,而读取数据的速度相对而言是比较慢,因此写入操作的速度也慢。如何提升写入操作的速度仍是研发的课题。With regard to the above-mentioned traditional operation method, some improvements have been made to the mechanism for writing data into the corresponding magnetic storage unit, but the operation method still needs to read the current storage data of the magnetic storage unit in the t2 stage. Write only when the data to be written is different. In this traditional write operation, since data needs to be read first, and the speed of reading data is relatively slow, the speed of the write operation is also slow. How to increase the speed of writing operations is still a subject of research and development.

发明内容 Contents of the invention

本发明提供磁性存储单元的直接写入方法,在不必先读取磁性存储单元的内容的情况下,可以直接将数据写入到磁性存储单元。The invention provides a direct writing method of the magnetic storage unit, which can directly write data into the magnetic storage unit without first reading the contents of the magnetic storage unit.

本发明提出一种磁性存储单元的直接写入方法。磁性存储单元包括磁性自由叠层,有下铁磁层以及上铁磁层。下铁磁层与上铁磁层都有实质上相同方向的双方向易轴。本方法包括施加第一磁场在该双方向易轴的方向上,以及进行写入操作。当要写入第一储存状态时,施加第二磁场取代第一磁场。第二磁场在双方向易轴的第一边,且夹有第一角度。当写入操作要写入第二储存状态时施加第三磁场取代该第一磁场。第三磁场在双方向易轴的第二边,且夹有第二角度。The invention proposes a direct writing method of a magnetic storage unit. The magnetic storage unit includes a magnetic free lamination layer, a lower ferromagnetic layer and an upper ferromagnetic layer. Both the lower ferromagnetic layer and the upper ferromagnetic layer have bidirectional easy axes in substantially the same direction. The method includes applying a first magnetic field in the direction of the bidirectional easy axis, and performing a write operation. When the first storage state is to be written, a second magnetic field is applied instead of the first magnetic field. The second magnetic field is on the first side of the two-way easy axis and has a first angle. A third magnetic field is applied instead of the first magnetic field when a write operation is to write into the second storage state. The third magnetic field is on the second side of the bidirectional easy axis, and has a second angle.

依照本发明的实施例所述之接写入方法,又例如该下铁磁层以及上铁磁层的至少其一具有单方向易轴,与双方向易轴有夹角。According to the connection and writing method described in the embodiments of the present invention, for example, at least one of the lower ferromagnetic layer and the upper ferromagnetic layer has a unidirectional easy axis, and has an included angle with the bidirectional easy axis.

又,本发明提出另一种磁性存储单元的直接写入方法,适用于存取磁性存储单元,该磁性存储单元包括磁性自由叠层,且该磁性自由叠层是由下铁磁层、非磁性耦合中间层、以及上铁磁层叠合所成,该下铁磁层与该上铁磁层分别有实质上相同的双方向易轴,其中通过接近垂直且与该双方向易轴相夹接近45度的第一磁场与第二磁场,以相加产生操作磁场。Also, the present invention proposes another direct writing method for a magnetic storage unit, which is suitable for accessing a magnetic storage unit. The coupling intermediate layer and the upper ferromagnetic layer are stacked. The lower ferromagnetic layer and the upper ferromagnetic layer have substantially the same two-way easy axis, and the two-way easy axis is close to perpendicular and sandwiched by nearly 45 degree of the first magnetic field and the second magnetic field to be added to generate the operating magnetic field.

所述方法包括当该操作磁场是要写入第一储存状态时进行:施加该第一磁场,该第一磁场是第一磁场准位波形,有第一宽度的第一脉冲。又,实质上同时施加该第二磁场,该第二磁场是第二磁场准位波形,有第二宽度的第二脉冲,其中该第一宽度小于该第二宽度,且该第一脉冲与该第二脉冲有实质上相同的磁场强度,于第二脉冲结束后则该操作磁场回到磁场低准位。The method includes, when the operating magnetic field is to write into a first storage state: applying the first magnetic field, the first magnetic field is a first magnetic field level waveform, and has a first pulse of a first width. Also, the second magnetic field is applied substantially simultaneously, the second magnetic field is a second magnetic field level waveform, and has a second pulse of a second width, wherein the first width is smaller than the second width, and the first pulse and the The second pulse has substantially the same magnetic field strength, and the operating magnetic field returns to the low magnetic field level after the second pulse ends.

当该操作磁场是要写入第二储存状态时进行施加该第一磁场,该第一磁场是第三磁场准位波形,有第三宽度的第三脉冲。又、实质上同时施加该第二磁场,该第二磁场是第四磁场准位波形,有第四宽度的第四脉冲,其中该第三宽度大于该第四宽度,且该第三脉冲与该第四脉冲有实质上相同的磁场强度,于第三脉冲结束后则该操作磁场回到该磁场低准位。The first magnetic field is applied when the operating magnetic field is to write into the second storage state, and the first magnetic field is a third magnetic field level waveform with a third pulse of a third width. Also, the second magnetic field is applied substantially simultaneously, the second magnetic field is a fourth magnetic field level waveform, a fourth pulse with a fourth width, wherein the third width is greater than the fourth width, and the third pulse and the The fourth pulse has substantially the same magnetic field strength, and the operating magnetic field returns to the low level of the magnetic field after the third pulse ends.

依照本发明的实施例所述之另一接写入方法,又例如该下铁磁层以及上铁磁层的至少其一具有单方向易轴,与双方向易轴有夹角。According to another write-in method described in the embodiment of the present invention, for example, at least one of the lower ferromagnetic layer and the upper ferromagnetic layer has a unidirectional easy axis, and has an included angle with the bidirectional easy axis.

本发明提出一种磁性存储单元结构,包括:磁性固定叠层、隧穿阻挡层、磁性自由叠层、以及第一反铁磁层。隧穿阻挡层,位于该磁性固定叠层之上。磁性自由叠层,位于该隧穿阻挡层之上方,其中该磁性自由叠层包括下铁磁层以及上铁磁层,分别具有实质上相同的双方向易轴。第一反铁磁层,相邻于该下铁磁层与该上铁磁层之其一,称为第一相邻铁磁层,其中该第一反铁磁层的磁偶排列线与该双方向易轴之间有第一夹角,以产生第一单方向易轴在该第一相邻铁磁层上。The invention proposes a magnetic storage unit structure, which includes: a magnetically fixed laminated layer, a tunnel barrier layer, a magnetically free laminated layer, and a first antiferromagnetic layer. The tunnel barrier layer is located on the magnetic fixed stack. The magnetic free lamination layer is located on the tunnel barrier layer, wherein the magnetic free lamination layer includes a lower ferromagnetic layer and an upper ferromagnetic layer, each having substantially the same easy axis in both directions. The first antiferromagnetic layer, adjacent to one of the lower ferromagnetic layer and the upper ferromagnetic layer, is referred to as a first adjacent ferromagnetic layer, wherein the magnetic pair alignment line of the first antiferromagnetic layer is aligned with the There is a first included angle between the bidirectional easy axes to generate a first unidirectional easy axis on the first adjacent ferromagnetic layer.

为让本发明之上述和其他目的、特征和优点能更明显易懂,下文特举优选实施例,并配合所附图式,作详细说明如下。In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings.

附图说明 Description of drawings

【图式简单说明】[Simple description of the diagram]

图1绘示磁性存储单元的基本结构。FIG. 1 shows the basic structure of a magnetic memory cell.

图2绘示磁性存储器的存储机制。FIG. 2 illustrates the storage mechanism of the magnetic memory.

图3绘示传统磁性存储单元剖面结构示意图。FIG. 3 is a schematic diagram of a cross-sectional structure of a conventional magnetic memory unit.

图4绘示外加磁场对三层结构自由层的效应。FIG. 4 shows the effect of an external magnetic field on the free layer of the three-layer structure.

图5绘示拴扣模式的外加磁场时序图。FIG. 5 is a timing diagram of an applied magnetic field in the key mode.

图6绘示减小操作电流的传统技术示意图。FIG. 6 is a schematic diagram of a conventional technique for reducing operating current.

图7绘示依据本发明实施例,第一状态的磁场写入波形。FIG. 7 shows a magnetic field writing waveform in a first state according to an embodiment of the present invention.

图8绘示依据本发明实施例,第二状态的磁场写入波形。FIG. 8 shows a magnetic field writing waveform in a second state according to an embodiment of the present invention.

图9绘示外加磁场使磁化向量偏转的另一情况。FIG. 9 shows another case where the magnetization vector is deflected by an external magnetic field.

图10绘示依据本发明实施例,磁性存储单元的结构示意图。FIG. 10 is a schematic diagram illustrating the structure of a magnetic memory unit according to an embodiment of the present invention.

图11绘示依据本发明实施例,外加磁场使磁化向量偏转的情况。FIG. 11 illustrates a situation where an external magnetic field deflects a magnetization vector according to an embodiment of the present invention.

图12绘示绘示依据本发明实施例,另一种磁场操作波形。FIG. 12 illustrates another magnetic field operation waveform according to an embodiment of the present invention.

【主要元件符号说明】[Description of main component symbols]

100、102:电流线                104:磁性存储单元100, 102: Current wires 104: Magnetic storage unit

104a:磁性固定层                104b:绝缘层104a: Magnetic pinning layer 104b: Insulating layer

104c:磁性自由层                106、108:电极104c: Magnetic free layer 106, 108: Electrodes

107、108a、108b:磁矩方向       150:铁磁性金属层107, 108a, 108b: Magnetic moment direction 150: Ferromagnetic metal layer

152:非磁性金属层               154:铁磁性金属层152: Non-magnetic metal layer 154: Ferromagnetic metal layer

156:隧穿绝缘层                 158:上固定层156: Tunneling insulation layer 158: Upper fixed layer

160:非磁性金属                 162:下固定层160: Non-magnetic metal 162: Lower fixed layer

164:基层                       166:磁性自由叠层164: Base layer 166: Magnetic free lamination

168:磁性固定叠层               170:上磁化向量168: Magnetic fixed stack 170: Upper magnetization vector

172:下磁化向量                 174a:外加磁场172: Lower magnetization vector 174a: Applied magnetic field

174b:外加磁场                  174c:外加磁场174b: Applied magnetic field 174c: Applied magnetic field

184:磁场偏压                   186:距离184: Magnetic field bias 186: Distance

190:磁性固定叠层               192:隧穿阻挡层190: Magnetic fixed stack 192: Tunneling barrier

194:下铁磁层                   196:金属层194: lower ferromagnetic layer 196: metal layer

198:上铁磁层                   200:磁性自由叠层198: upper ferromagnetic layer 200: magnetic free lamination

202:双方向易轴                 204:双方向易轴202: Two-way easy axis 204: Two-way easy axis

206:金属层                     208:反铁磁层206: Metal layer 208: Antiferromagnetic layer

210:反铁磁易轴方向             212:反铁磁层210: Antiferromagnetic easy axis direction 212: Antiferromagnetic layer

具体实施方式 Detailed ways

本发明提出磁性存储单元的直接写入方法,在不必先读取磁性存储单元的内容的情况下,可以直接将数据写入到磁性存储单元。The invention proposes a direct writing method of the magnetic storage unit, which can directly write data into the magnetic storage unit without first reading the contents of the magnetic storage unit.

本发明也配合提出磁性存储单元的结构。存储单元结构中的磁性自由叠层例如包括下铁磁层以及上铁磁层,分别具有实质上相同的双方向易轴。第一反铁磁层,相邻于该下铁磁层与该上铁磁层之其一,称为第一相邻铁磁层,其中该第一反铁磁层的磁偶排列线与该双方向易轴之间有第一夹角,以产生第一单方向易轴在该第一相邻铁磁层上。The invention also cooperates with the proposed structure of the magnetic memory unit. The magnetically free stacked layers in the memory cell structure include, for example, a lower ferromagnetic layer and an upper ferromagnetic layer, respectively having substantially the same easy axes in both directions. The first antiferromagnetic layer, adjacent to one of the lower ferromagnetic layer and the upper ferromagnetic layer, is referred to as a first adjacent ferromagnetic layer, wherein the magnetic pair alignment line of the first antiferromagnetic layer is aligned with the There is a first included angle between the bidirectional easy axes to generate a first unidirectional easy axis on the first adjacent ferromagnetic layer.

又,结构还可例如包括第二反铁磁层,相邻于该下铁磁层与该上铁磁层之另其一,称为第二相邻铁磁层,其中该第二反铁磁层的磁偶排列线与该双方向易轴之间有第二夹角,以产生第二单方向易轴在该第二相邻铁磁层上,且在该第一单方向易轴与该第二单方向易轴的异向性强度不同。Also, the structure may also include, for example, a second antiferromagnetic layer adjacent to the other of the lower ferromagnetic layer and the upper ferromagnetic layer, referred to as a second adjacent ferromagnetic layer, wherein the second antiferromagnetic There is a second included angle between the magnetic pair alignment line of the layer and the bidirectional easy axis to generate a second unidirectional easy axis on the second adjacent ferromagnetic layer, and between the first unidirectional easy axis and the The anisotropy strength of the second unidirectional easy axis is different.

以下举一些实施例作为说明,但是本发明不受限于所举实施例。Some examples are given below for illustration, but the present invention is not limited to the examples given.

图7绘示依据本发明实施例,第一状态的磁场写入波形。参阅图7,在t0时段,磁场H1与H2的大小为零,也就是没有外加磁场的初始状态。又例如,上铁磁层有磁化向量170,下铁磁层有磁化向量172,二者实质上是在易轴上,但是反平行排列。在t1时段,磁场H1与H2同时启动,较佳的情形例如是磁场H1与H2的强度实质上相等,因此磁场合向量174a是在易轴上。此时,二个磁化向量170、172与磁场合向量174a达到平衡状态。接着在t2时段时,磁场H2是关闭,其也就是仅施加磁场H1,即是磁场174b。于此t2时段,二个磁化向量170、172相对磁场174b而反时针偏转。于t3时段,磁场H1接着关闭,也就是说没有外加磁场。因此,二个磁化向量170、172会落在稳定状态,其例如就是第一状态,又例如是代表“0”。此第一状态在此实施例就是磁化向量170在易轴的正方向。FIG. 7 shows a magnetic field writing waveform in a first state according to an embodiment of the present invention. Referring to FIG. 7 , during the period t 0 , the magnitudes of the magnetic fields H1 and H2 are zero, that is, the initial state without an external magnetic field. As another example, the upper ferromagnetic layer has a magnetization vector 170, and the lower ferromagnetic layer has a magnetization vector 172, both of which are substantially on the easy axis, but arranged antiparallel. During the time period t1 , the magnetic fields H1 and H2 are activated simultaneously. In a preferred situation, for example, the strengths of the magnetic fields H1 and H2 are substantially equal, so the magnetic field resultant vector 174a is on the easy axis. At this time, the two magnetization vectors 170, 172 and the resultant magnetic field 174a reach a balanced state. Then during the period t2 , the magnetic field H2 is turned off, that is, only the magnetic field H1, ie, the magnetic field 174b, is applied. During the period t2 , the two magnetization vectors 170, 172 are deflected counterclockwise relative to the magnetic field 174b. During the period t3 , the magnetic field H1 is then turned off, that is to say, no external magnetic field is applied. Therefore, the two magnetization vectors 170 , 172 will fall into a stable state, which is, for example, the first state, and for example represents "0". The first state in this embodiment is that the magnetization vector 170 is in the positive direction of the easy axis.

反之,若要写入第二状态,则写入的磁场波形会有一些变化。图8绘示依据本发明实施例,第二状态的磁场写入波形。参阅图8,其t0时段与t1时段与图7的状况一样,然而于t2时段时,则磁场H1是关闭,其也就是仅施加磁场H2,即是磁场174c。二个磁化向量170、172相对磁场174c而顺时针偏转。在t3时段,由于磁化向量170较靠近易轴的负方向,而磁化向量172较靠近易轴的正方向。因此,当没有外加磁场时,磁化向量170、172的方向会与图7的t3时段的磁化向量170、172的方向相反。这也就是说磁化向量170在易轴的负方向时,例如称为第二状态。因此,依照图8的磁场波形,可以写入所要的第二状态,其例如是“1”。当然可了解地,第一状态与第二状态仅是用来表示可区分的不同状态,而第一状态与第二状态的实际内容,不受限于实施例。例如,前述的第一状态也可以称为第二状态,而所描述第二状态则称为第一状态。Conversely, if the second state is to be written, the waveform of the magnetic field to be written will have some changes. FIG. 8 shows a magnetic field writing waveform in a second state according to an embodiment of the present invention. Referring to FIG. 8 , the t0 period and the t1 period are the same as the situation in FIG. 7 , but during the t2 period, the magnetic field H1 is turned off, that is, only the magnetic field H2 is applied, which is the magnetic field 174c. The two magnetization vectors 170, 172 are deflected clockwise relative to the magnetic field 174c. During the period t3 , since the magnetization vector 170 is closer to the negative direction of the easy axis, the magnetization vector 172 is closer to the positive direction of the easy axis. Therefore, when there is no external magnetic field, the directions of the magnetization vectors 170 , 172 are opposite to those of the magnetization vectors 170 , 172 during the period t3 in FIG. 7 . That is to say, when the magnetization vector 170 is in the negative direction of the easy axis, it is called the second state, for example. Therefore, according to the magnetic field waveform of FIG. 8, a desired second state, such as "1", can be written. Of course, it can be understood that the first state and the second state are only used to represent different states that can be distinguished, and the actual content of the first state and the second state is not limited to the embodiment. For example, the aforementioned first state may also be referred to as a second state, while the described second state is referred to as a first state.

就上述的操作波形,一般而言是可以如预期写入第一状态或是第二状态。然而,由于在t0时段的初始状态,不一定是如绘示的状态,或是磁化向量170、172在初始状态时都已偏离易轴,这会造成t1时段的状态不能确定,也因此可能造成写入错误。以下举一实例,如图9所示。参阅图9,假设在t0时段的初始状态,其磁化向量170是朝向易轴的负方向。当在t1时段,虽然外加磁场174a是在易轴正方向,磁化向量170、172的平衡状态可能是磁化向量172较偏向H2的方向。如果例如以图7的磁场波形要写入第一状态,但结果是写入第二状态,造成错误。Regarding the above operation waveforms, generally speaking, the first state or the second state can be written as expected. However, since the initial state in the t 0 period is not necessarily the state as shown, or the magnetization vectors 170, 172 have deviated from the easy axis in the initial state, this will cause the state in the t 1 period to be uncertain, and therefore May cause write errors. An example is given below, as shown in FIG. 9 . Referring to FIG. 9 , assuming the initial state at time period t 0 , its magnetization vector 170 is oriented in the negative direction of the easy axis. During the period t1 , although the applied magnetic field 174a is in the positive direction of the easy axis, the equilibrium state of the magnetization vectors 170 and 172 may be that the magnetization vector 172 is more biased towards the direction of H2. If, for example, with the magnetic field waveform of FIG. 7, the first state is to be written, but the second state ends up being written, an error is caused.

于是本发明再配合磁性存储单元的结构设计,可以确保t1时段的状态的稳定。也就是说,不管初始状态是何种状态,皆可以确保在t1时段的相同状态,因此也确保磁化向量170、172后续能如预期方向偏转。图10绘示依据本发明实施例,磁性存储单元的结构示意图。Therefore, in combination with the structural design of the magnetic storage unit, the present invention can ensure the stability of the state during the t1 period. That is to say, no matter what the initial state is, it can ensure the same state during the period t 1 , thus also ensuring that the magnetization vectors 170 , 172 can subsequently deflect in the expected direction. FIG. 10 is a schematic diagram illustrating the structure of a magnetic memory unit according to an embodiment of the present invention.

参阅图10,本发明提出的磁性存储单元结构实施例,例如可以包括磁性固定叠层190、隧穿阻挡层192、磁性自由叠层200、以及反铁磁层212。隧穿阻挡层192是位于磁性固定叠层190之上。磁性自由叠层200位于该隧穿阻挡层192之上方,其中磁性自由叠层200例如包括下铁磁层194、金属层196、以及上铁磁层198。铁磁层194、198分别具有实质上相同的双方向易轴202、204。依照本实施例,反铁磁层208是相邻于上铁磁层198。但是一般而言,反铁磁层208可以相邻于下铁磁层或是上铁磁层。又还可以有二个反铁磁层208,分别相邻于下铁磁层194与上铁磁层198。又,反铁磁层208可以例如与金属层206构成叠层212。Referring to FIG. 10 , the embodiment of the magnetic memory cell structure proposed by the present invention may include, for example, a magnetic fixed stack 190 , a tunnel barrier 192 , a magnetic free stack 200 , and an antiferromagnetic layer 212 . The tunneling barrier layer 192 is located on the magnetic fixed stack 190 . A magnetically free stack 200 is located on the tunneling barrier layer 192 , wherein the magnetically free stack 200 includes, for example, a lower ferromagnetic layer 194 , a metal layer 196 , and an upper ferromagnetic layer 198 . The ferromagnetic layers 194, 198 have substantially the same bidirectional easy axes 202, 204, respectively. According to this embodiment, the antiferromagnetic layer 208 is adjacent to the upper ferromagnetic layer 198 . But in general, the antiferromagnetic layer 208 can be adjacent to either the lower ferromagnetic layer or the upper ferromagnetic layer. There may also be two antiferromagnetic layers 208 adjacent to the lower ferromagnetic layer 194 and the upper ferromagnetic layer 198 respectively. Also, the antiferromagnetic layer 208 may form a layer stack 212 with the metal layer 206, for example.

这里要注意的是,反铁磁层208的易轴方向210与双方向易轴204之间有夹角,以产生单方向易轴在相邻的铁磁层198上。换句话说,铁磁层198磁化向量,在t1时段会倾向落在此单方向易轴的方向上。It should be noted here that there is an included angle between the easy axis direction 210 of the antiferromagnetic layer 208 and the bidirectional easy axis 204 , so as to generate a unidirectional easy axis on the adjacent ferromagnetic layer 198 . In other words, the magnetization vector of the ferromagnetic layer 198 tends to fall in the direction of the unidirectional easy axis during the period t1 .

由于反铁磁层208造成单方向易轴,因此能确保铁磁层198的磁化向量的方向,较不会受初始位置的影响,因此能确保后续的偏转结果。如图11所示,当磁场174a是在双方向易轴上时,铁磁层198的磁化向量170会在左边。Since the antiferromagnetic layer 208 causes a unidirectional easy axis, the direction of the magnetization vector of the ferromagnetic layer 198 can be ensured, which is less affected by the initial position, thereby ensuring subsequent deflection results. As shown in FIG. 11 , when the magnetic field 174a is on the easy axis in both directions, the magnetization vector 170 of the ferromagnetic layer 198 will be on the left.

一般而言,易轴方向210与双方向易轴204之间的夹角,以45度较佳。然而,其夹角例如实质上小于90度即可。经模拟验证,其夹角在60度下仍能准确工作。Generally speaking, the included angle between the easy axis direction 210 and the bidirectional easy axis 204 is preferably 45 degrees. However, the included angle may be substantially less than 90 degrees, for example. It has been verified by simulation that it can still work accurately at an included angle of 60 degrees.

又,由于在t1时段应绝对同时启动磁场H1与H2是不容易控制。然而,也经模拟验证,磁场H1与H2之间的同时启动时间可以有一些容忍度,例如在2ns下仍可以有一操作区域,可以达到准确写入的要求。换句或说,本发明经过多方面的模拟验证后,可以确定是具有实效的设计,允许工艺与操作条件上有一些容忍度(tolerance),而不必要求精确的制作与操作。Also, it is not easy to control because the magnetic fields H1 and H2 should be activated absolutely simultaneously during the time period t1 . However, it has also been verified by simulation that the simultaneous activation time between the magnetic fields H1 and H2 can have some tolerance, for example, there is still an operating region under 2 ns, which can meet the requirement of accurate writing. In other words, after various simulation verifications, the present invention can be determined to be an effective design, allowing some tolerance in process and operating conditions, without requiring precise fabrication and operation.

又,如前面图6所述,为了减低操作电流所提出的磁场偏压,或是有其它方式产生的磁场偏压也可以并入本发明的磁性存储单元设计,也都是在本发明特征的涵盖范围。Also, as previously described in FIG. 6, in order to reduce the magnetic field bias proposed by the operating current, or the magnetic field bias generated in other ways can also be incorporated into the magnetic memory cell design of the present invention, which are also features of the present invention. coverage.

又,图7与图8的磁场H1与H2是正的值,而操作在第一象限。然而,依相同的机制条件下,磁场H1与H2也可以是操作在第三象限,也就是说H1与H2是负的值,如图12所示。其效果仍是一样。Also, the magnetic fields H1 and H2 in FIG. 7 and FIG. 8 are positive values and operate in the first quadrant. However, under the same mechanism, the magnetic fields H1 and H2 can also operate in the third quadrant, that is to say, H1 and H2 are negative values, as shown in FIG. 12 . The effect is still the same.

本发明实施例所提出的操作磁场波形,可以省去传统写入操作中需要先读取数据的读取动作,因此可以加快写入操作。另外,为了能提升写入操作的准确度,更提出在自由铁磁层中产生单方向易轴,且其方向与双方向易轴有适当夹角。由于单方向易轴在t1时段会促使磁化向量构成相同的状态,因此后续的写入操作可以更准确将数据写入。The operating magnetic field waveform proposed by the embodiment of the present invention can save the reading operation that needs to read data first in the traditional writing operation, so the writing operation can be accelerated. In addition, in order to improve the accuracy of the writing operation, it is proposed to generate a unidirectional easy axis in the free ferromagnetic layer, and its direction has a proper angle with the bidirectional easy axis. Since the unidirectional easy axis will cause the magnetization vectors to form the same state during the period t1, subsequent write operations can write data more accurately.

虽然本发明已以优选实施例揭露如上,然其并非用以限定本发明,任何本领域的普通技术人员,在不脱离本发明之精神和范围内,当可作些许之更动与润饰,因此本发明之保护范围当视权利要求所界定者为准。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, The scope of protection of the present invention should be defined by the claims.

Claims (24)

1. 一种磁性存储单元的直接写入方法,该磁性存储单元包括磁性自由叠层,且该磁性自由叠层是由下铁磁层、非磁性耦合中间层、以及上铁磁层叠合所成,该下铁磁层与该上铁磁层分别有实质上相同方向的双方向易轴,该方法包括:1. A direct writing method of a magnetic storage unit, the magnetic storage unit comprises a magnetic free stack, and the magnetic free stack is formed by stacking a lower ferromagnetic layer, a non-magnetic coupling intermediate layer, and an upper ferromagnetic layer , the lower ferromagnetic layer and the upper ferromagnetic layer respectively have bidirectional easy axes in substantially the same direction, the method comprising: 施加第一磁场在该双方向易轴的方向上;以及applying a first magnetic field in the direction of the bidirectional easy axis; and 进行写入操作,以写入第一储存态或是第二储存态到该磁性存储单元,performing a write operation to write the first storage state or the second storage state to the magnetic memory unit, 其中当该写入操作要写入该第一储存状态时进行:Wherein when the write operation is to be written into the first storage state: 施加第二磁场取代该第一磁场,其中该第二磁场在该双方向易轴的第一边,且夹有第一角度;以及applying a second magnetic field instead of the first magnetic field, wherein the second magnetic field is on a first side of the bidirectional easy axis and subtends a first angle; and 停止该第二磁场,stopping the second magnetic field, 其中当该写入操作要写入该第二储存状态时进行:Wherein when the write operation is to be written into the second storage state: 施加第三磁场取代该第一磁场,其中该第三磁场在该双方向易轴的第二边,且夹有第二角度,其中该第一边与该第二边是相对的;以及applying a third magnetic field instead of the first magnetic field, wherein the third magnetic field is on a second side of the bidirectional easy axis at a second angle, wherein the first side is opposite the second side; and 停止该第三磁场。The third magnetic field is stopped. 2. 如权利要求1的磁性存储单元的直接写入方法,其中该第一角度与该第二角度是实质上相等,且实质上小于90度。2. The direct writing method of a magnetic memory cell as claimed in claim 1, wherein the first angle and the second angle are substantially equal and substantially less than 90 degrees. 3. 如权利要求2的磁性存储单元的直接写入方法,其中该第一角度与该第二角度实质上是接近45度。3. The direct writing method of a magnetic memory unit as claimed in claim 2, wherein the first angle and the second angle are substantially close to 45 degrees. 4. 如权利要求1的磁性存储单元的直接写入方法,其中该磁性存储单元的该下铁磁层与该上铁磁层之其一具有单方向易轴,其中该单方向易轴与该双方向易轴之间有夹角。4. The direct writing method of the magnetic memory unit as claimed in claim 1, wherein one of the lower ferromagnetic layer and the upper ferromagnetic layer of the magnetic memory unit has a unidirectional easy axis, wherein the unidirectional easy axis is in line with the There is an included angle between the easy axes in both directions. 5. 如权利要求4的磁性存储单元的直接写入方法,其中该夹角实质上小于90度。5. The direct writing method of a magnetic memory unit as claimed in claim 4, wherein the included angle is substantially less than 90 degrees. 6. 如权利要求4的磁性存储单元的直接写入方法,其中该夹角实质上是接近45度。6. The direct writing method of a magnetic memory unit as claimed in claim 4, wherein the included angle is substantially close to 45 degrees. 7. 如权利要求1的磁性存储单元的直接写入方法,其中该磁性存储单元的该下铁磁层与该上铁磁层具有分别不同异向性强度的二个单方向易轴,且分别与该双方向易轴之间有夹角。7. The direct writing method of the magnetic storage unit as claimed in claim 1, wherein the lower ferromagnetic layer and the upper ferromagnetic layer of the magnetic storage unit have two unidirectional easy axes with different anisotropic strengths respectively, and respectively There is an included angle with the easy axis in both directions. 8. 如权利要求7的磁性存储单元的直接写入方法,其中该夹角实质上小于90度。8. The direct writing method of a magnetic memory unit as claimed in claim 7, wherein the included angle is substantially less than 90 degrees. 9. 如权利要求8的磁性存储单元的直接写入方法,其中该夹角实质上是接近45度。9. The direct writing method of a magnetic memory unit as claimed in claim 8, wherein the included angle is substantially close to 45 degrees. 10. 如权利要求7的磁性存储单元的直接写入方法,其中该第一角度与该第二角度是实质上相等,且实质上小于90度。10. The direct writing method of a magnetic memory cell as claimed in claim 7, wherein the first angle and the second angle are substantially equal and substantially less than 90 degrees. 11. 如权利要求10的磁性存储单元的直接写入方法,其中该第一角度与该第二角度实质上是接近45度。11. The direct writing method of a magnetic memory cell as claimed in claim 10 , wherein the first angle and the second angle are substantially close to 45 degrees. 12. 一种磁性存储单元的直接写入方法,适用于存取磁性存储单元,该磁性存储单元包括磁性自由叠层,且该磁性自由叠层是由下铁磁层、非磁性耦合中间层、以及上铁磁层叠合所成,该下铁磁层与该上铁磁层分别有实质上相同的双方向易轴,其中通过接近垂直且与该双方向易轴相夹接近45度的第一磁场与第二磁场,以相加产生操作磁场,该方法包括:12. A direct writing method of a magnetic storage unit, suitable for accessing a magnetic storage unit, the magnetic storage unit includes a magnetic free stack, and the magnetic free stack is composed of a lower ferromagnetic layer, a non-magnetic coupling intermediate layer, and the upper ferromagnetic layer, the lower ferromagnetic layer and the upper ferromagnetic layer respectively have substantially the same two-way easy axis, wherein the first The magnetic field and the second magnetic field are added to generate an operating magnetic field, and the method includes: 当该操作磁场是要写入第一储存状态时进行:When the operating magnetic field is to write the first storage state: 施加该第一磁场,该第一磁场是第一磁场准位波形,有第一宽度的第一脉冲;applying the first magnetic field, the first magnetic field is a first magnetic field level waveform, and has a first pulse of a first width; 实质上同时施加该第二磁场,该第二磁场是第二磁场准位波形,有第二宽度的第二脉冲,其中该第一宽度小于该第二宽度,且该第一脉冲与该第二脉冲有实质上相同的磁场强度,于第二脉冲结束后则该操作磁场回到磁场低准位;以及applying the second magnetic field substantially simultaneously, the second magnetic field being a second magnetic field level waveform, having a second pulse of a second width, wherein the first width is less than the second width, and the first pulse and the second the pulses have substantially the same field strength, and the operating field returns to the low field level after the second pulse ends; and 当该操作磁场是要写入第二储存状态时进行:When the operating magnetic field is to be written into the second storage state: 施加该第一磁场,该第一磁场是第三磁场准位波形,有第三宽度的第三脉冲;applying the first magnetic field, the first magnetic field is a third magnetic field level waveform, and has a third pulse of a third width; 实质上同时施加该第二磁场,该第二磁场是第四磁场准位波形,有第四宽度的第四脉冲,其中该第三宽度大于该第四宽度,且该第三脉冲与该第四脉冲有实质上相同的磁场强度,于第三脉冲结束后则该操作磁场回到该磁场低准位。Applying the second magnetic field substantially simultaneously, the second magnetic field is a fourth magnetic field level waveform, a fourth pulse with a fourth width, wherein the third width is greater than the fourth width, and the third pulse is the same as the fourth pulse The pulses have substantially the same magnetic field strength, and the operating magnetic field returns to the low magnetic field level after the third pulse ends. 13. 如权利要求12的磁性存储单元的直接写入方法,其中该磁性存储单元的该下铁磁层与该上铁磁层之其一具有单方向易轴,其中该单方向易轴与该双方向易轴之间有夹角。13. The direct writing method of the magnetic storage unit as claimed in claim 12, wherein one of the lower ferromagnetic layer and the upper ferromagnetic layer of the magnetic storage unit has a unidirectional easy axis, wherein the unidirectional easy axis is in line with the There is an included angle between the easy axes in both directions. 14. 如权利要求13的磁性存储单元的直接写入方法,其中该夹角实质上小于90度。14. The direct writing method of a magnetic memory unit as claimed in claim 13, wherein the included angle is substantially less than 90 degrees. 15. 如权利要求13的磁性存储单元的直接写入方法,其中该夹角实质上是接近45度。15. The direct writing method of a magnetic memory cell as claimed in claim 13 , wherein the included angle is substantially close to 45 degrees. 16. 如权利要求12的磁性存储单元的直接写入方法,其中该磁性存储单元的该下铁磁层与该上铁磁层具有分别不同异向性强度的二个单方向易轴,且分别与该双方向易轴之间有夹角。16. The direct writing method of the magnetic storage unit as claimed in claim 12, wherein the lower ferromagnetic layer and the upper ferromagnetic layer of the magnetic storage unit have two unidirectional easy axes with different anisotropic strengths respectively, and respectively There is an included angle with the easy axis in both directions. 17. 如权利要求16的磁性存储单元的直接写入方法,其中该夹角实质上小于90度。17. The direct writing method of a magnetic memory cell as claimed in claim 16, wherein the included angle is substantially less than 90 degrees. 18. 如权利要求16的磁性存储单元的直接写入方法,其中该夹角实质上是接近45度。18. The direct writing method of a magnetic memory cell as claimed in claim 16, wherein the included angle is substantially close to 45 degrees. 19. 一种磁性存储单元结构,包括:19. A magnetic memory cell structure comprising: 磁性固定叠层;Magnetic fixed lamination; 隧穿阻挡层,位于该磁性固定叠层之上;a tunneling barrier layer on the magnetic pinned stack; 磁性自由叠层,位于该隧穿阻挡层之上方,其中该磁性自由叠层包括下铁磁层以及上铁磁层,分别具有实质上相同的双方向易轴;以及A magnetically free stack, located above the tunneling barrier, wherein the magnetically free stack includes a lower ferromagnetic layer and an upper ferromagnetic layer, respectively having substantially the same easy axis in both directions; and 第一反铁磁层,相邻于该下铁磁层与该上铁磁层之其一,称为第一相邻铁磁层,其中该第一反铁磁层的磁偶排列线与该双方向易轴之间有第一夹角,以产生第一单方向易轴在该第一相邻铁磁层上。The first antiferromagnetic layer, adjacent to one of the lower ferromagnetic layer and the upper ferromagnetic layer, is referred to as a first adjacent ferromagnetic layer, wherein the magnetic pair alignment line of the first antiferromagnetic layer is aligned with the There is a first included angle between the bidirectional easy axes to generate a first unidirectional easy axis on the first adjacent ferromagnetic layer. 20. 如权利要求19的磁性存储单元结构,其中该第一夹角实质上小于90度。20. The magnetic memory cell structure as claimed in claim 19, wherein the first included angle is substantially less than 90 degrees. 21. 如权利要求19的磁性存储单元结构,其中该第一反铁磁层与该第一相邻铁磁层之间还包括非磁性层。21. The magnetic memory cell structure of claim 19, wherein a nonmagnetic layer is further included between the first antiferromagnetic layer and the first adjacent ferromagnetic layer. 22. 如权利要求19的磁性存储单元结构,更包括第二反铁磁层,相邻于该下铁磁层与该上铁磁层之另其一,称为第二相邻铁磁层,其中该第二反铁磁层的磁偶排列线与该双方向易轴之间有第二夹角,以产生第二单方向易轴在该第二相邻铁磁层上,且在该第一单方向易轴与该第二单方向易轴的异向性强度不同。22. The magnetic memory cell structure of claim 19, further comprising a second antiferromagnetic layer adjacent to the other one of the lower ferromagnetic layer and the upper ferromagnetic layer, referred to as a second adjacent ferromagnetic layer, Wherein there is a second included angle between the magnetic pair alignment line of the second antiferromagnetic layer and the bidirectional easy axis, so as to generate a second unidirectional easy axis on the second adjacent ferromagnetic layer, and in the first A unidirectional easy axis has a different anisotropic strength than the second unidirectional easy axis. 23. 如权利要求22的磁性存储单元结构,其中该第二夹角实质上小于90度。23. The magnetic memory cell structure as claimed in claim 22, wherein the second included angle is substantially less than 90 degrees. 24. 如权利要求22的磁性存储单元结构,其中该第二反铁磁层与该第二相邻铁磁层之间还包括非磁性层。24. The magnetic memory cell structure of claim 22, wherein a nonmagnetic layer is further included between the second antiferromagnetic layer and the second adjacent ferromagnetic layer.
CNA2007100053545A 2007-02-14 2007-02-14 Direct write method for magnetic memory cell and magnetic memory cell structure Pending CN101246697A (en)

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