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CN101242174B - Semiconductor switch - Google Patents

Semiconductor switch Download PDF

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CN101242174B
CN101242174B CN200810006125XA CN200810006125A CN101242174B CN 101242174 B CN101242174 B CN 101242174B CN 200810006125X A CN200810006125X A CN 200810006125XA CN 200810006125 A CN200810006125 A CN 200810006125A CN 101242174 B CN101242174 B CN 101242174B
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voltage
circuit
mos transistor
control circuit
channel mos
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CN101242174A (en
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串间贵仁
小岛友和
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

A challenge in outputting a voltage near the midpoint potential in a semiconductor switch which operates based on a low voltage power supply is to avoid a decrease in operation speed and a deterioration in accuracy of the output voltage which would be caused due to an increase in ON-resistance or occurrence of current leakage. Thus, a structure including a gray level generation circuit (100), an analog switch circuit (111) and a backgate voltage control circuit (122) is provided wherein the backgate voltage of each of an N-channel MOS transistor (112) and a P-channel MOS transistor (113) of the analog switch circuit (111) to which the voltage of the gray level generation circuit (100) is input is supplied from the backgate voltage control circuit (122) which has an equal structure as that of the gray level generation circuit(100).

Description

半导体开关semiconductor switch

技术领域technical field

本发明涉及一种半导体开关,尤其涉及一种抑制开态电阻为低、小型、便宜的、开关应答性优异的半导体开关。The present invention relates to a semiconductor switch, and more particularly to a semiconductor switch with low on-state resistance, small size, low cost, and excellent switching responsiveness.

背景技术Background technique

参照图6来说明半导体开关的现有技术。在图6中示出的半导体开关由产生灰度级电压的灰度级产生电路400、模拟开关电路410和开关控制电路420构成,通过模拟开关电路410将灰度级产生电路400的任意灰度级电压VM传送给输出端子。A prior art semiconductor switch will be described with reference to FIG. 6 . The semiconductor switch shown in Fig. 6 is made up of the gray level generation circuit 400 that produces gray level voltage, analog switch circuit 410 and switch control circuit 420, the arbitrary gray level of gray level generation circuit 400 is controlled by analog switch circuit 410. The stage voltage VM is delivered to the output terminal.

如图6所示,模拟开关电路410一般由P沟道MOS晶体管412和N沟道MOS晶体管411并列连接构成,P沟道MOS晶体管412和N沟道MOS晶体管411的源极和漏极分别相互连接。另外,由开关控制电路420提供使模拟开关电路410接通/断开的电压,与P沟道MOS晶体管412的门极端子连接的HIGH电平或者LOW电平的信号为Φ,与N沟道MOS晶体管411的门极端子连接的信号NΦ是使信号Φ的HIGH电平和LOW电平反相后的信号。另外,N沟道MOS晶体管411的背门极端子,即P阱与最低电位L侧电源连接,P沟道MOS晶体管412的背门极端子,即N阱与最高电位H侧电源连接。As shown in Figure 6, the analog switch circuit 410 is generally composed of a P-channel MOS transistor 412 and an N-channel MOS transistor 411 connected in parallel, and the sources and drains of the P-channel MOS transistor 412 and the N-channel MOS transistor 411 are connected to each other respectively. connect. In addition, the switch control circuit 420 provides a voltage for turning on/off the analog switch circuit 410, and the signal of HIGH level or LOW level connected to the gate terminal of the P-channel MOS transistor 412 is Φ, and the signal of the N-channel MOS transistor 412 is Φ. The signal to which the gate terminal of the MOS transistor 411 is connected is a signal obtained by inverting the HIGH level and the LOW level of the signal Φ. In addition, the back gate terminal of the N-channel MOS transistor 411, that is, the P well is connected to the lowest potential L-side power supply, and the back gate terminal of the P-channel MOS transistor 412, that is, the N well is connected to the highest potential H-side power supply.

该现有的CMOS结构的模拟开关电路410,当将信号NΦ的HIGH电平电压施加到N沟道MOS晶体管411的门门极端子上时,N沟道MOS晶体管411呈导通状态,同时将信号Φ的LOW电平电压施加到P沟道MOS晶体管412的门门极端子上,P沟道MOS晶体管412也呈导通状态。从而,模拟开关电路410成导通(ON)状态,使得灰度级电压VM被传送给输出端子。In the analog switch circuit 410 of this existing CMOS structure, when the HIGH level voltage of the signal is applied to the gate terminal of the N-channel MOS transistor 411, the N-channel MOS transistor 411 is in a conducting state, and at the same time When the LOW level voltage of the signal Φ is applied to the gate terminal of the P-channel MOS transistor 412, the P-channel MOS transistor 412 is also turned on. Accordingly, the analog switch circuit 410 is turned into an ON state, so that the gray scale voltage VM is transmitted to the output terminal.

然后,将信号NΦ的LOW电平电压施加到N沟道MOS晶体管411的门门极端子上时,N沟道MOS晶体管411呈断开状态,同时将信号Φ的HIGH电平电压施加到P沟道MOS晶体管412的门门极端子上,P沟道MOS晶体管412也呈断开状态。从而,模拟开关电路410呈断开(OFF)状态,使得灰度级电压VM不被传送给输出端子。Then, when the LOW level voltage of the signal is applied to the gate terminal of the N-channel MOS transistor 411, the N-channel MOS transistor 411 is turned off, and at the same time, the HIGH level voltage of the signal Φ is applied to the P At the gate terminal of the channel MOS transistor 412, the P channel MOS transistor 412 is also turned off. Accordingly, the analog switch circuit 410 is in an OFF state, so that the gray scale voltage VM is not transmitted to the output terminal.

其中,在提供给P沟道MOS晶体管412的电压中,当背门极电压比源极电压低时,因为在作为P沟道MOS晶体管412的源极的P阱和作为背门极的N阱间存在的PN结中产生漏电流,所以希望P沟道MOS晶体管412的背门极电压是源极电压以上的电压,在现有技术中P沟道MOS晶体管412的背门极电压与最高电位的H侧电源连接。同样,在提供给N沟道MOS晶体管411的电压中,当背门极电压比源极电压高时,因为在作为源极的N阱和作为背门极的P阱间存在的PN结中产生漏电流,所以希望N沟道MOS晶体管411的背门极电压是源极电压以下的电压,在现有技术中N沟道MOS晶体管411的背门极电压与最低电位的L侧电源连接。Among them, in the voltage supplied to the P-channel MOS transistor 412, when the back-gate voltage is lower than the source voltage, because the P-well as the source of the P-channel MOS transistor 412 and the N-well as the back-gate Leakage current is generated in the PN junction existing between them, so it is desirable that the back gate voltage of the P-channel MOS transistor 412 is a voltage above the source voltage. In the prior art, the back-gate voltage of the P-channel MOS transistor 412 is related to the highest potential H-side power connection. Likewise, in the voltage supplied to the N-channel MOS transistor 411, when the back gate voltage is higher than the source voltage, because a PN junction existing between the N well as the source and the P well as the back gate is generated Therefore, it is desirable that the back gate voltage of the N-channel MOS transistor 411 is a voltage lower than the source voltage. In the prior art, the back-gate voltage of the N-channel MOS transistor 411 is connected to the lowest potential L-side power supply.

然而,在现有技术中,在模拟开关电路410中的各个MOS晶体管411、412的源极电极的电位和背门极电极的电位之间产生电位差。因此,由于基板偏压效果,MOS晶体管411、412的阈值电压升高。之后,在模拟开关电路410的输入电压VM是中间电位附近的模拟电压的情形下,基板偏压效果的影响尤其变大,从而使模拟开关电路410的开态电阻变高。另外,在中间电位附近,驱动模拟开关电路410的门门极端子的门门极·源极间电压本身变小。However, in the related art, a potential difference is generated between the potential of the source electrode and the potential of the back gate electrode of each of the MOS transistors 411 , 412 in the analog switch circuit 410 . Therefore, the threshold voltages of the MOS transistors 411, 412 increase due to the substrate bias effect. Then, when the input voltage VM of the analog switch circuit 410 is an analog voltage near the intermediate potential, the influence of the substrate bias effect is particularly large, and the on-state resistance of the analog switch circuit 410 becomes high. In addition, in the vicinity of the intermediate potential, the gate-to-source voltage itself that drives the gate terminal of the analog switch circuit 410 becomes small.

通常,MOS晶体管在门极·源极间电位差比阈值电压大时接通,这样门极·源极间电压小,阈值电压大时,开态电阻变高,使信号的传送变得困难。由此使运行速度降低,从模拟开关电路410的输出端子输出的电压精度误差变大。而且,MOS晶体管411、412的门极·源极间电位差不超过阈值电压的情形下,模拟开关电路410呈断开的状态。Normally, a MOS transistor is turned on when the potential difference between the gate and the source is larger than the threshold voltage, and the voltage between the gate and the source is small. When the threshold voltage is high, the on-state resistance becomes high, making it difficult to transmit signals. As a result, the operating speed is lowered, and the accuracy error of the voltage output from the output terminal of the analog switch circuit 410 is increased. Furthermore, when the potential difference between the gate and the source of the MOS transistors 411 and 412 does not exceed the threshold voltage, the analog switch circuit 410 is turned off.

为了避免上述问题,可以使用改变MOS晶体管的尺寸、低阈值电压化和采用耗尽型MOS晶体管的方法,但是这些方法造成漏电流增大和芯片成本增加(参照专利文献1)。In order to avoid the above problems, methods of changing the size of MOS transistors, lowering the threshold voltage, and employing depletion-type MOS transistors are available, but these methods cause increased leakage current and increased chip cost (see Patent Document 1).

[专利文献1]美国专利第7,038,525号[Patent Document 1] US Patent No. 7,038,525

发明内容Contents of the invention

[发明要解决的问题][Problem to be solved by the invention]

在三重阱结构等在深度方向上存在多个阱的加工所构成的MOS晶体管中,通过连接MOS晶体管的源极端子和背门极端子,使二者等电位,虽然使芯片面积增大,但能够避免基板偏压效果。In a MOS transistor formed by processing a plurality of wells in the depth direction, such as a triple well structure, by connecting the source terminal and the back gate terminal of the MOS transistor to make the two equipotential, the chip area will increase, but the Substrate bias effects can be avoided.

然而,即使如图7所示连接三重阱结构中MOS晶体管的源极端子和背门极端子,构成N沟道MOS晶体管411的背门极的P阱和位于该P阱外侧的N阱形成PN结的反偏压,在该PN结中产生逆向偏压漏电流I3。对于未图示的P沟道MOS晶体管412,构成该P沟道MOS晶体管的背门极的N阱和位于该N阱外侧的P阱也形成PN结的反偏压,产生逆向偏压漏电流。这些逆向偏压漏电流随着PN结的结间电位差变高而增大。在近年的微细加工中,由于基板电流和热载体的影响,漏电流变得更显著了。However, even if the source terminal and the back gate terminal of the MOS transistor in the triple well structure are connected as shown in FIG. The reverse bias of the junction produces a reverse bias leakage current I3 in this PN junction. For the P-channel MOS transistor 412 not shown in the figure, the N well constituting the back gate of the P-channel MOS transistor and the P well located outside the N well also form a reverse bias voltage of the PN junction, generating a reverse bias leakage current . These reverse bias leakage currents increase as the inter-junction potential difference of the PN junction becomes higher. In recent microfabrication, leakage current has become more significant due to the influence of substrate current and heat carrier.

逆向偏压漏电流I3是由与模拟开关电路410连接的灰度级产生电路400供给的,虽然本来希望在灰度级产生电路400中流过的电流不从H侧电源到L侧电源分流(I2=I1),但是由于逆向偏压漏电流I3从灰度级产生电路400分流到模拟开关电路410中,使得I2=I1-I3,结果是由于灰度级产生电路400中的电阻分压使得在灰度级电压中产生误差,使得从模拟开关电路410的输出端子输出的电压的精度降低。The reverse bias leakage current I3 is supplied by the gray scale generating circuit 400 connected to the analog switch circuit 410, although it is originally desired that the current flowing in the gray scale generating circuit 400 is not shunted from the H side power supply to the L side power supply (I2 =I1), but because the reverse bias leakage current I3 is shunted from the gray level generating circuit 400 to the analog switch circuit 410, so that I2=I1-I3, the result is that due to the resistor division in the gray level generating circuit 400, in An error occurs in the gray scale voltage, so that the precision of the voltage output from the output terminal of the analog switch circuit 410 is reduced.

从而,本发明的目的在于:即使在需要MOS晶体管的阈值电压高的加工和低电压的电路设计的情形下,半导体开关的开态电阻也低,即使是更微细化的加工,也能够防止漏电流,实现高速运行和输出电压的高精度化。Therefore, the object of the present invention is: even under the situation that needs the processing of high threshold voltage of MOS transistor and the circuit design of low voltage, the on-state resistance of semiconductor switch is also low, also can prevent leak current, realizing high-speed operation and high precision of output voltage.

[解决问题的手段][means to solve the problem]

为了实现上述目的,本发明的半导体开关通过保持构成模拟开关电路的MOS晶体管的源极·背门极间的电压为较低,使半导体开关难以受到基板偏压效果的影响,能够实现开态电阻低的半导体开关,能够实现输出电压的精度高地运行。In order to achieve the above object, the semiconductor switch of the present invention keeps the voltage between the source and the back gate of the MOS transistor constituting the analog switch circuit low, so that the semiconductor switch is difficult to be affected by the substrate bias effect, and the on-state resistance can be realized. Low semiconductor switches enable high precision operation of the output voltage.

下面进行具体地说明,根据本发明的半导体开关包括:产生多个灰度级电压的灰度级产生电路、具有分别选择所述多个灰度级电压中的一个灰度级电压的多个模拟开关电路的灰度级选择器电路、和控制所述灰度级选择器电路的运行的开关控制电路,其特征在于:所述多个模拟开关电路分别包括具有与所述多个灰度级电压中应该选择的灰度级电压连接的源极的MOS晶体管,所述开关控制电路包括:为了控制所述MOS晶体管的接通·断开而提供该MOS晶体管的门极电压的定时控制电路、提供与所述MOS晶体管的源极电压大致相等的电压作为所述MOS晶体管的背门极电压的背门极电压控制电路。It will be described in detail below. The semiconductor switch according to the present invention includes: a gray-scale generation circuit for generating a plurality of gray-scale voltages, a plurality of analog circuits with a plurality of gray-scale voltages for respectively selecting one of the plurality of gray-scale voltages. A grayscale selector circuit of a switch circuit, and a switch control circuit for controlling the operation of the grayscale selector circuit, wherein the plurality of analog switch circuits respectively include The MOS transistor connected to the source of the gray scale voltage that should be selected, the switch control circuit includes: a timing control circuit that provides the gate voltage of the MOS transistor in order to control the on/off of the MOS transistor, provides A backgate voltage control circuit for setting a voltage substantially equal to a source voltage of the MOS transistor as a backgate voltage of the MOS transistor.

[发明效果][Invention effect]

根据本发明,在半导体开关中,开态电阻较低,能够防止漏电流,能够实行高速运行和输出电压精度高的运行。According to the present invention, in the semiconductor switch, the on-state resistance is low, leakage current can be prevented, and high-speed operation and operation with high output voltage accuracy can be performed.

附图说明Description of drawings

图1是示出根据本发明的半导体开关的总结构的方框图。FIG. 1 is a block diagram showing the general structure of a semiconductor switch according to the present invention.

图2是根据本发明第1实施方式的半导体开关的详细结构图。FIG. 2 is a detailed configuration diagram of the semiconductor switch according to the first embodiment of the present invention.

图3是在图2中的N沟道MOS晶体管中采用了三阱结构的情形的剖面图。FIG. 3 is a cross-sectional view of a case where a triple well structure is used in the N-channel MOS transistor in FIG. 2 .

图4是根据本发明第2实施方式的半导体开关的详细结构图。4 is a detailed configuration diagram of a semiconductor switch according to a second embodiment of the present invention.

图5是示出图4中的偏压电路的具体实例的电路图。FIG. 5 is a circuit diagram showing a specific example of the bias circuit in FIG. 4 .

图6是示出现有的半导体开关的结构实例的电路图。FIG. 6 is a circuit diagram showing a structural example of a conventional semiconductor switch.

图7是在图6中的N沟道MOS晶体管中采用了三阱结构的情形的剖面图。FIG. 7 is a cross-sectional view of a case where a triple well structure is used in the N-channel MOS transistor in FIG. 6 .

[附图标记说明][Description of Reference Signs]

100,200,400  灰度级产生电路100, 200, 400 gray scale generation circuit

110  灰度级选择器电路110 gray level selector circuit

111,211,410  模拟开关电路111, 211, 410 Analog switch circuit

112,212,411  N沟道MOS晶体管112, 212, 411 N-channel MOS transistors

113,213,412  P沟道MOS晶体管113, 213, 412 P-channel MOS transistors

120,220,420  开关控制电路120, 220, 420 switch control circuit

121,421  定时控制电路121, 421 timing control circuit

122,222  背门极电压控制电路122, 222 back gate voltage control circuit

223,300  偏压电路223,300 Bias circuit

D0,D1,D2,D3  二极管D0, D1, D2, D3 Diodes

M1,M2,M301,M302  P沟道MOS晶体管M1, M2, M301, M302 P-channel MOS transistors

M303,M304  N沟道MOS晶体管M303, M304 N-channel MOS transistor

R,R1  电阻元件R, R1 Resistive element

VR(1)~VR(N),VL(1)~VL(N)  灰度级电压VR(1)~VR(N), VL(1)~VL(N) gray level voltage

φ,Nφ  模拟开关电路的接通/断开控制信号φ, Nφ ON/OFF control signal of analog switch circuit

具体实施方式Detailed ways

第1实施方式first embodiment

参照图1和图2说明根据本发明第1实施方式的半导体开关。本发明第1实施方式的半导体开关由灰度级产生电路100、灰度级选择器电路110和开关控制电路120构成,开关控制电路120由定时控制电路121和背门极电压控制电路122构成。A semiconductor switch according to a first embodiment of the present invention will be described with reference to FIGS. 1 and 2 . The semiconductor switch according to the first embodiment of the present invention is composed of a grayscale generation circuit 100 , a grayscale selector circuit 110 , and a switch control circuit 120 , and the switch control circuit 120 is composed of a timing control circuit 121 and a backgate voltage control circuit 122 .

其中,灰度级产生电路100由在H侧电源和L侧电源之间串联连接多个电阻元件R的电阻串电路构成。电阻元件R的个数为N个,在电阻间的连接点处产生的灰度级电压的个数为N-1个。H侧电源和L侧电源的电压、电阻元件R的大小和数量由基于半导体开关的用途的设计来决定。灰度级选择器电路110由多个模拟开关电路111构成,多个模拟开关电路111的输入侧分别连接在灰度级产生电路100的各电阻元件R间的连接点上,输出侧连接在灰度级选择器电路110的输出端子上。Among them, the grayscale generation circuit 100 is composed of a resistor string circuit in which a plurality of resistor elements R are connected in series between the H-side power supply and the L-side power supply. The number of resistive elements R is N, and the number of grayscale voltages generated at the connection points between the resistors is N−1. The voltages of the H-side power supply and the L-side power supply, and the size and number of the resistance elements R are determined by design based on the application of the semiconductor switch. The gray scale selector circuit 110 is composed of a plurality of analog switch circuits 111. The input sides of the multiple analog switch circuits 111 are respectively connected to the connection points between the resistance elements R of the gray scale generating circuit 100, and the output sides are connected to the gray scale generation circuit 100. on the output terminal of the degree selector circuit 110.

在图2中,仅表示了一个模拟开关电路111的电路图,由与灰度级产生电路100相同的电阻串电路构成背门极电压控制电路122。在图2中,模拟开关电路111是由N沟道MOS晶体管112和P沟道MOS晶体管113并联连接形成的,在P沟道MOS晶体管113的门极信号φ为LOW电平、N沟道MOS晶体管112的门极信号Nφ为HIGH电平的情形下,从串电阻的一个连接点提供的电压,例如VR(M)传送到输出端子。相反,在P沟道MOS晶体管113的门极信号φ为HIGH电平、N沟道MOS晶体管112的门极信号Nφ为LOW电平的情形下,输入侧电压VR(M)不传送到输出端子。与MOS晶体管112、113的门极端子连接的门极信号φ和其反相信号Nφ由开关控制电路120的定时控制电路121提供。In FIG. 2 , only one analog switch circuit 111 is shown, and the back gate voltage control circuit 122 is formed by the same resistor string circuit as the gray scale generation circuit 100 . In FIG. 2, the analog switch circuit 111 is formed by connecting an N-channel MOS transistor 112 and a P-channel MOS transistor 113 in parallel. The gate signal φ of the P-channel MOS transistor 113 is LOW level, and the N-channel MOS transistor 113 is connected in parallel. When the gate signal N φ of the transistor 112 is at HIGH level, a voltage supplied from one connection point of the string resistor, for example, VR(M), is transmitted to the output terminal. Conversely, when the gate signal φ of the P-channel MOS transistor 113 is at the HIGH level and the gate signal of the N-channel MOS transistor 112 is at the LOW level, the input-side voltage VR(M) is not transmitted to the output terminals. The gate signal φ connected to the gate terminals of the MOS transistors 112 and 113 and its inverted signal N φ are supplied from the timing control circuit 121 of the switch control circuit 120 .

背门极电压控制电路122由在H侧电源和L侧电源之间串联连接电阻元件R的串电阻构成,电阻元件的个数为N个,在电阻间的连接点处产生的灰度级电压的个数为N-1个。其中,在背门极电压控制电路122的电阻间连接点处产生的灰度级电压从低电压侧依次为VL(1)、VL(2)、…VL(N),从低电压侧计数的任意的第M个灰度级电压为VL(M),第M-1个灰度级电压为VL(M-1),第M+1个灰度级电压为VL(M+1)。同样,在灰度级产生电路100的电阻间连接点处产生的灰度级电压从低电压侧依次为VR(1)、VR(2)、…VR(N),从低电压侧数起的任意的第M个灰度级电压为VR(M),第M-1个灰度级电压为VR(M-1),第M+1个灰度级电压为VR(M+1)。The back gate voltage control circuit 122 is composed of series resistors connecting resistor elements R in series between the H side power supply and the L side power supply. The number of resistor elements is N, and the grayscale voltage generated at the connection point between the resistors The number of is N-1. Among them, the grayscale voltages generated at the connection point between the resistors of the back gate voltage control circuit 122 are VL(1), VL(2), ... VL(N) in order from the low voltage side, and counted from the low voltage side The arbitrary Mth grayscale voltage is VL(M), the M−1th grayscale voltage is VL(M−1), and the M+1th grayscale voltage is VL(M+1). Likewise, the gray scale voltages generated at the connecting points between the resistors of the gray scale generation circuit 100 are VR(1), VR(2), ... VR(N) in order from the low voltage side, counting from the low voltage side The arbitrary Mth grayscale voltage is VR(M), the M−1th grayscale voltage is VR(M−1), and the M+1th grayscale voltage is VR(M+1).

假设背门极电压控制电路122和灰度级产生电路100的各个电阻值和电阻数相等,从双方的低电位数起的第M个电压VR(M)和VL(M)为相等的电压。在以灰度级电压VR(M)为输入的模拟开关电路111中,将背门极电压控制电路122的VL(M+1)电位与构成模拟开关电路111的P沟道MOS晶体管113的背门极端子连接,将背门极电压控制电路122的VL(M-1)电位与构成模拟开关电路111的N沟道MOS晶体管112的背门极端子连接。Assuming that the respective resistance values and resistance numbers of the back gate voltage control circuit 122 and the gray scale generation circuit 100 are equal, the Mth voltages VR(M) and VL(M) from the low potential numbers of both are equal voltages. In the analog switch circuit 111 whose input is the gray level voltage VR(M), the VL(M+1) potential of the back gate voltage control circuit 122 is connected to the back gate voltage of the P-channel MOS transistor 113 constituting the analog switch circuit 111. The gate terminal is connected to connect the VL(M−1) potential of the back gate voltage control circuit 122 to the back gate terminal of the N-channel MOS transistor 112 constituting the analog switch circuit 111 .

如上所述,通过使灰度级产生电路100和背门极电压控制电路122具有相同的结构,即使在半导体的制造过程中产生了制造偏差的情形下,因为灰度级产生电路100和背门极电压控制电路122的各灰度级电压VL(M)和VR(M)由H侧电源和L侧电源的电压的电阻分压所决定,所以VL(M)和VR(M)成大致相等的值,P沟道MOS晶体管113的背门极电压VL(M+1)为比P沟道MOS晶体管113的源极电位VR(M)高的电压,N沟道MOS晶体管112的背门极电压VL(M-1)为比N沟道MOS晶体管112的源极端子还低的电压。因此,能够实现确实防止N沟道MOS晶体管112和P沟道MOS晶体管113的源极·背门极间的PN结的正向泄漏,同时难以受到基板偏压效果的影响,开态电阻小的半导体开关。As described above, by making the gray scale generation circuit 100 and the back gate voltage control circuit 122 have the same structure, even in the case of a manufacturing variation in the semiconductor manufacturing process, since the gray scale generation circuit 100 and the back gate voltage control circuit 122 have the same structure, The respective grayscale voltages VL(M) and VR(M) of the electrode voltage control circuit 122 are determined by the resistance voltage division of the voltages of the H-side power supply and the L-side power supply, so VL(M) and VR(M) are approximately equal. value, the back gate voltage VL(M+1) of the P-channel MOS transistor 113 is a voltage higher than the source potential VR(M) of the P-channel MOS transistor 113, and the back gate voltage of the N-channel MOS transistor 112 Voltage VL(M−1) is a voltage lower than the source terminal of N-channel MOS transistor 112 . Therefore, it is possible to reliably prevent the forward leakage of the PN junction between the source and back gate of the N-channel MOS transistor 112 and the P-channel MOS transistor 113, and at the same time be less affected by the effect of the substrate bias, and have a small on-state resistance. semiconductor switch.

此时,在电阻的制造偏差小的情形下,可以将N沟道MOS晶体管112的背门极与VL(M)连接,也可以将P沟道MOS晶体管113的背门极与VL(M)连接。At this time, in the case where the resistance manufacturing variation is small, the back gate of the N-channel MOS transistor 112 may be connected to VL(M), or the back gate of the P-channel MOS transistor 113 may be connected to VL(M). connect.

另外,如图3所示,从MOS晶体管的背门极流入到背门极的外周阱中的电流,例如如果是N沟道MOS晶体管112的情形,从P阱流入到N阱中的PN结逆向偏压漏电流不是由灰度级产生电路100提供的,而是由背门极电压控制电路122提供的,所以I2=I1,结果是能够将灰度级电压传送给输出端子,而不会引起灰度级产生电路100的电压偏差。此外,在P沟道MOS晶体管113的情形下,从N阱流入到P阱中的逆向偏压漏电流也由背门极电压控制电路122提供,但是省略图示。In addition, as shown in FIG. 3 , the current flowing from the back gate of the MOS transistor into the peripheral well of the back gate, for example, in the case of the N-channel MOS transistor 112, flows from the P well into the PN junction in the N well. The reverse bias leakage current is not provided by the gray level generation circuit 100, but by the back gate voltage control circuit 122, so I2=I1, and the result is that the gray level voltage can be delivered to the output terminal without A voltage deviation of the gray scale generating circuit 100 is caused. In addition, in the case of the P-channel MOS transistor 113 , the reverse bias leakage current flowing from the N well to the P well is also supplied by the back gate voltage control circuit 122 , but the illustration is omitted.

《第2实施方式》"Second Embodiment"

参照图4说明根据本发明第2实施方式的半导体开关。第2实施方式的半导体开关由模拟开关电路211、开关控制电路220和灰度级产生电路200构成。另外,开关控制电路220由定时控制电路121、背门极电压控制电路222和偏压电路223构成。A semiconductor switch according to a second embodiment of the present invention will be described with reference to FIG. 4 . The semiconductor switch of the second embodiment is composed of an analog switch circuit 211 , a switch control circuit 220 , and a gray scale generation circuit 200 . In addition, the switch control circuit 220 is composed of a timing control circuit 121 , a back gate voltage control circuit 222 and a bias circuit 223 .

其中,因为定时控制电路121具有与第1实施方式相同的结构,所以对于与图1和图2相同的构成部分赋予相同的标记,省略其详细说明。Here, since the timing control circuit 121 has the same configuration as that of the first embodiment, the same components as those in FIGS. 1 and 2 are assigned the same symbols, and detailed description thereof will be omitted.

灰度级产生电路200具有P沟道MOS晶体管M2、多个电阻元件R和二极管D0在H侧电源和L侧电源间串联连接的结构。另外,背门极电压控制电路222具有P沟道MOS晶体管M1、多个电阻元件R和二极管D1在H侧电源和L侧电源间串联连接的结构。此外,二极管D0由并联连接的F个二极管构成,二极管D1也由并联连接的F个二极管构成。P沟道MOS晶体管M1和P沟道MOS晶体管M2的门极电压共同连接,与偏压电路223连接。The grayscale generation circuit 200 has a structure in which a P-channel MOS transistor M2, a plurality of resistance elements R, and a diode D0 are connected in series between an H-side power supply and an L-side power supply. In addition, the back gate voltage control circuit 222 has a structure in which a P-channel MOS transistor M1, a plurality of resistance elements R, and a diode D1 are connected in series between the H-side power supply and the L-side power supply. In addition, the diode D0 is composed of F diodes connected in parallel, and the diode D1 is also composed of F diodes connected in parallel. The gate voltages of the P-channel MOS transistor M1 and the P-channel MOS transistor M2 are connected in common, and are connected to the bias circuit 223 .

上述结构是使用了在第1实施方式中记载的半导体开关的带隙基准电路,不取决于电源电压和周围温度的基准电压被输出到模拟开关电路211的输出端子中。The above configuration is the bandgap reference circuit using the semiconductor switch described in the first embodiment, and a reference voltage independent of the power supply voltage and ambient temperature is output to the output terminal of the analog switch circuit 211 .

图5中示出了图4中的偏压电路223的具体电路结构。图5的偏压电路300由构成第1电流反射镜电路的P沟道MOS晶体管M301和M302、构成第2电流反射镜电路的N沟道MOS晶体管M303和M304、与N沟道MOS晶体管M303的源极和L侧电源连接的二极管D3、在N沟道MOS晶体管M304的源极和L侧电源间串联连接的电阻元件R1和二极管D2构成。FIG. 5 shows a specific circuit structure of the bias circuit 223 in FIG. 4 . The bias circuit 300 of FIG. 5 is composed of P-channel MOS transistors M301 and M302 constituting the first current mirror circuit, N-channel MOS transistors M303 and M304 constituting the second current mirror circuit, and the N-channel MOS transistor M303. Diode D3 whose source is connected to the L-side power supply, resistor element R1 and diode D2 connected in series between the source of N-channel MOS transistor M304 and the L-side power supply.

此外,二极管D2由并联连接的F个二极管构成。二极管D3和二极管D2的接合总面积分别为S1、S2,其面积比S2/S1为F。下面对于如上构成的带隙基准电路说明其运行,建立作为带隙基准电路的输出电压的基准电压的电压公式。In addition, the diode D2 is composed of F diodes connected in parallel. The total joining areas of the diode D3 and the diode D2 are S1 and S2, respectively, and the area ratio S2/S1 thereof is F. Next, the operation of the bandgap reference circuit configured as above will be described, and a voltage formula for a reference voltage serving as an output voltage of the bandgap reference circuit will be established.

在此作为前提,构成偏压电路300的第1电流反射镜电路的P沟道MOS晶体管M301和M302的门极长度和门极宽度的大小相等,构成第2电流反射镜电路的N沟道MOS晶体管M303和M304的门极长度和门极宽度的大小相等。Here, as a premise, the P-channel MOS transistors M301 and M302 of the first current mirror circuit constituting the bias circuit 300 have the same gate length and gate width, and the N-channel MOS transistors constituting the second current mirror circuit The gate length and gate width of the transistors M303 and M304 are equal in size.

假设k是玻耳兹曼常数,绝对温度为T,电子的电荷量为q时,P沟道MOS晶体管M302的源极·漏极间电流I2用Assuming that k is the Boltzmann constant, the absolute temperature is T, and the electron charge is q, the source-drain current I2 of the P-channel MOS transistor M302 is

I2=(kT/q)·LN(F)/R1        …(1)I2=(kT/q)·LN(F)/R1 …(1)

表示。其中,运算符号LN是以e为底的自然对数。该电流I2不取决于电源电压,但是由物理常数、电阻值R1以及二极管D3和二极管D2的接合总面积比F来决定。express. Among them, the operation symbol LN is the natural logarithm with e as the base. This current I2 does not depend on the power supply voltage, but is determined by physical constants, the resistance value R1, and the junction total area ratio F of the diode D3 and the diode D2.

偏压电路223(300)的偏压输出与背门极电压控制电路222的P沟道MOS晶体管M1、灰度级产生电路200的P沟道MOS晶体管M2的门极端子连接,偏压电路223(300)的P沟道MOS晶体管M302、灰度级产生电路200的P沟道MOS晶体管M2和背门极电压控制电路222的P沟道MOS晶体管M1构成电流反射镜。The bias voltage output of the bias voltage circuit 223 (300) is connected to the gate terminal of the P channel MOS transistor M1 of the back gate voltage control circuit 222 and the P channel MOS transistor M2 of the gray scale generation circuit 200, and the bias voltage circuit 223 The P-channel MOS transistor M302 of (300), the P-channel MOS transistor M2 of the gray scale generation circuit 200, and the P-channel MOS transistor M1 of the back gate voltage control circuit 222 constitute a current mirror.

从而,假设P沟道MOS晶体管M302、P沟道MOS晶体管M1和P沟道MOS晶体管M2的门极长度分别相等,门极宽度分别相等,与在P沟道MOS晶体管M302中流过的电流I2相等的电流流过P沟道MOS晶体管M1和P沟道MOS晶体管M2中。Therefore, assuming that the gate lengths and gate widths of the P-channel MOS transistor M302, the P-channel MOS transistor M1, and the P-channel MOS transistor M2 are respectively equal, they are equal to the current I2 flowing in the P-channel MOS transistor M302 A current flows through the P-channel MOS transistor M1 and the P-channel MOS transistor M2.

其中,假设灰度级产生电路200的多个电阻元件的电阻值为R,个数为N个,从L侧电源数起的第M个灰度级电压为VR(M),二极管D0的正向电压为VD0,VR(M)用Wherein, it is assumed that the resistance value of the plurality of resistive elements of the gray scale generation circuit 200 is R, and the number is N, and the Mth gray scale voltage counted from the L-side power supply is VR(M), and the positive voltage of the diode D0 To the voltage VD0, for VR(M)

VR(M)=(M·R/R1)·(kT/q)·LN(F)+VD0       …(2)VR(M)=(M·R/R1)·(kT/q)·LN(F)+VD0 ...(2)

表示。express.

另外,假设背门极电压控制电路222的多个电阻元件的电阻值为R、个数为N个,从L侧电源数起的第M个灰度级电压为VL(M),二极管D1的正向电压为VD1,VL(M)用In addition, assuming that the resistance value of the plurality of resistance elements of the back gate voltage control circuit 222 is R, the number is N, and the Mth grayscale voltage counted from the L-side power supply is VL(M), the diode D1 The forward voltage is VD1, for VL(M)

VL(M)=(M·R/R1)·(kT/q)·LN(F)+VD1     …(3)VL(M)=(M·R/R1)·(kT/q)·LN(F)+VD1 …(3)

表示。express.

另外,在背门极电压控制电路222中从L侧电源数起的第M-1个灰度级输出为VL(M-1)用In addition, in the back gate voltage control circuit 222, the M-1th gray scale output counted from the L-side power supply is for VL(M-1).

VL(M-1)=[(M-1)·R/R1]·(kT/q)·LN(F)+VD1     …(4)VL(M-1)=[(M-1) R/R1](kT/q) LN(F)+VD1 …(4)

表示,在背门极电压控制电路222中从L侧电源数起的第M+1个灰度级输出VL(M+1)用Indicates that in the back gate voltage control circuit 222, the M+1th grayscale output VL(M+1) counted from the L-side power supply is used

VL(M+1)=[(M+1)·R/R1]·(kT/q)·LN(F)+VD1     …(5)VL(M+1)=[(M+1) R/R1](kT/q) LN(F)+VD1 …(5)

表示。express.

VL(M+1)与模拟开关电路211的P沟道MOS晶体管213的背门极连接,VL(M-1)与模拟开关电路211的N沟道MOS晶体管212的背门极连接。VL(M+1) is connected to the back gate of the P-channel MOS transistor 213 of the analog switch circuit 211 , and VL(M-1) is connected to the back gate of the N-channel MOS transistor 212 of the analog switch circuit 211 .

另外,因为通过模拟开关电路211将电压VR(M)输出到输出端子Vout,所以用In addition, since the voltage VR(M) is output to the output terminal Vout through the analog switch circuit 211, with

Vout=VR(M)=[(M·R)/R1]·(kT/q)·LN(F)+VD0     …(6)Vout=VR(M)=[(M·R)/R1]·(kT/q)·LN(F)+VD0 …(6)

表示。express.

输出电压Vout的温度特性用Temperature characteristics of output voltage Vout with

Vout/

Figure 200810006125X_1
T=VR(M)/
Figure 200810006125X_3
T=[(M·R)/R1]·(k/q)·LN(F)+
Figure 200810006125X_4
VD0/
Figure 200810006125X_5
T  …(7)表示。 Vout/
Figure 200810006125X_1
T = VR(M)/
Figure 200810006125X_3
T=[(M·R)/R1]·(k/q)·LN(F)+
Figure 200810006125X_4
VD0/
Figure 200810006125X_5
T ... (7) said.

另外,背门极电压控制电路222的灰度级电压VL(M)的温度特性用VL(M)/

Figure 200810006125X_7
T=[(M·R)/R1]·(k/q)·LN(F)+
Figure 200810006125X_8
VD1/
Figure 200810006125X_9
T  …(8)表示。In addition, the temperature characteristic of the gray level voltage VL(M) of the back gate voltage control circuit 222 is used for VL(M)/
Figure 200810006125X_7
T=[(M·R)/R1]·(k/q)·LN(F)+
Figure 200810006125X_8
VD1/
Figure 200810006125X_9
T ... (8) said.

其中,已知二极管正向电压VF的温度依存性是-2mV/℃,通过选择(7)式的右边为零的灰度级产生电路200和开关控制电路220的电阻元件R的个数M、电阻值R、电阻值R1、接合总面积比F的常数,能够得到不取决于周围温度的VR(M)、VL(M)和输出电压Vout。例如,R1=5.0kΩ,R=5.0kΩ,M=11,接合总面积比F为8时,VR(M)、VL(M)、Vout的温度特性为-0.3mV/℃。Wherein, it is known that the temperature dependence of the diode forward voltage VF is -2mV/°C, by selecting the number M, The resistance value R, the resistance value R1, and the constants of the junction total area ratio F can obtain VR(M), VL(M) and output voltage Vout independent of ambient temperature. For example, when R1=5.0kΩ, R=5.0kΩ, M=11, and the total junction area ratio F is 8, the temperature characteristics of VR(M), VL(M), and Vout are -0.3mV/°C.

如上所述,根据本实施方式的半导体开关,如从电路结构和式(2)、(4)、(5)可以知道的,因为P沟道MOS晶体管213的背门极端子比源极端子的电位高,N沟道MOS晶体管212的背门极端子比源极端子的电位低,所以在模拟开关电路211中,能够确实防止N沟道MOS晶体管212和P沟道MOS晶体管213的源极·背门极间的PN结的正向泄漏。另外,如从式(7)、(8)中可以知道的,因为背门极电压控制电路222的灰度级电压VL(M)和灰度级产生电路200的灰度级电压VR(M)具有相等的温度依存性和电源电压依存性,所以即使周围温度和电源电压发生变化,VL(M)和VR(M)的电压偏差也很小,能够减少基板偏压效果的影响。因为PN结逆向偏压漏电流不是由灰度级产生电路200提供的,而是由背门极电压控制电路222提供的,所以不会引起灰度级产生电路200的电压偏差,能够高精度地产生输出电压。As described above, according to the semiconductor switch of the present embodiment, as can be known from the circuit configuration and equations (2), (4), and (5), since the back gate terminal of the P-channel MOS transistor 213 is larger than the source terminal The potential is high, and the potential of the back gate terminal of the N-channel MOS transistor 212 is lower than that of the source terminal, so in the analog switch circuit 211, it is possible to reliably prevent the source of the N-channel MOS transistor 212 and the P-channel MOS transistor 213 from Forward leakage of the PN junction between the back gates. In addition, as can be known from equations (7) and (8), since the gray level voltage VL(M) of the back gate voltage control circuit 222 and the gray level voltage VR(M) of the gray level generating circuit 200 It has equal temperature dependence and power supply voltage dependence, so even if the ambient temperature and power supply voltage change, the voltage deviation of VL(M) and VR(M) is small, and the influence of the substrate bias effect can be reduced. Because the PN junction reverse bias leakage current is not provided by the gray level generation circuit 200, but by the back gate voltage control circuit 222, it will not cause a voltage deviation of the gray level generation circuit 200, and can accurately produces an output voltage.

此外,为了实现低阈值电压化,通过采用具有H侧电源和L侧电源间电压以下的具有耐压的MOS晶体管构成半导体开关,可以实现低开态电阻、高速的开关。In addition, in order to achieve a lower threshold voltage, by using a MOS transistor with a withstand voltage below the voltage between the H-side power supply and the L-side power supply to form a semiconductor switch, low on-state resistance and high-speed switching can be realized.

另外,虽然在上述第1和第2实施方式中,采用并联连接了P沟道MOS晶体管和N沟道MOS晶体管的模拟开关电路,但是采用仅由P沟道MOS晶体管构成的模拟开关,或者仅由N沟道MOS晶体管构成的模拟开关也可以取得同样的效果。In addition, in the first and second embodiments described above, an analog switch circuit in which a P-channel MOS transistor and an N-channel MOS transistor are connected in parallel is used, but an analog switch composed of only P-channel MOS transistors is used, or only An analog switch composed of N-channel MOS transistors can also achieve the same effect.

另外,作为上述第1和第2实施方式中采用的电阻元件,分别是可以通过半导体工艺制造的电阻元件,采用使用了聚硅的电阻元件、使用了扩散电阻的电阻元件或者使用了阱电阻的电阻元件也能够取得同样的效果。In addition, as the resistance element used in the above-mentioned first and second embodiments, each can be a resistance element that can be manufactured by a semiconductor process, and a resistance element using polysilicon, a resistance element using a diffused resistance, or a resistance element using a well resistor is used. A resistance element can also achieve the same effect.

另外,在上述第2实施方式中采用的二极管可以是可通过半导体工艺制造的具有PN结的元件,例如利用MOS晶体管的源极和漏极端子与背门极端子之间的PN结也能够取得同样的效果。In addition, the diode used in the above-mentioned second embodiment may be an element having a PN junction that can be manufactured by a semiconductor process. For example, a PN junction between the source and drain terminals and the back gate terminal of a MOS transistor can also be obtained. Same effect.

本发明可用于半导体开关中,尤其可用于构成灰度级产生电路和电源电路的半导体开关中。The present invention can be used in a semiconductor switch, especially in a semiconductor switch constituting a gray scale generating circuit and a power supply circuit.

Claims (3)

1. a semiconductor switch comprises
The gray scale that produces a plurality of gray-scale voltages produce circuit,
Have a plurality of analog switching circuits of selecting a gray-scale voltage in described a plurality of gray-scale voltage respectively the gray scale selector circuit and
Control the ON-OFF control circuit of the operation of described gray scale selector circuit,
It is characterized in that:
Described a plurality of analog switching circuit comprises the MOS transistor with the source electrode that is connected with the gray-scale voltage that should select in described a plurality of gray-scale voltages respectively,
Described ON-OFF control circuit comprises: provide in order to control switching on and off of described MOS transistor the gate voltage of this MOS transistor timing control circuit,
Provide and the source voltage voltage about equally of described MOS transistor tailgate pole tension control circuit as the tailgate pole tension of described MOS transistor,
Described tailgate pole tension control circuit has and the identical internal structure of described gray scale generation circuit,
Described gray scale produces circuit and described tailgate pole tension control circuit has the resistance string circuit that connects respectively between H side power supply and L side power supply.
In the claim 1 record semiconductor switch, it is characterized in that:
Described tailgate pole tension control circuit does not provide and carry out the tailgate pole tension of the voltage of bias voltage as described MOS transistor to the source electrode of described MOS transistor and the PN junction of tailgate interpolar on positive direction.
In the claim 1 record semiconductor switch, it is characterized in that:
Described gray scale produces circuit and described tailgate pole tension control circuit has current source, resistance string circuit and the diode that is connected in series respectively between H side power supply and L side power supply.
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