CN101174083A - Protective film assembly container - Google Patents
Protective film assembly container Download PDFInfo
- Publication number
- CN101174083A CN101174083A CNA2007101680144A CN200710168014A CN101174083A CN 101174083 A CN101174083 A CN 101174083A CN A2007101680144 A CNA2007101680144 A CN A2007101680144A CN 200710168014 A CN200710168014 A CN 200710168014A CN 101174083 A CN101174083 A CN 101174083A
- Authority
- CN
- China
- Prior art keywords
- lid
- film assembly
- protection film
- flank
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 title claims description 26
- 229920005989 resin Polymers 0.000 claims abstract description 9
- 239000011347 resin Substances 0.000 claims abstract description 9
- 239000000126 substance Substances 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 12
- 238000007666 vacuum forming Methods 0.000 description 10
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 8
- 238000005452 bending Methods 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 4
- 238000001746 injection moulding Methods 0.000 description 4
- 230000002787 reinforcement Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 3
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003306 harvesting Methods 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000001012 protector Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000010023 transfer printing Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000003973 irrigation Methods 0.000 description 1
- 230000002262 irrigation Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000032696 parturition Effects 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Closures For Containers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packages (AREA)
Abstract
The invention provides a protection film component keeping container which has an enough rigidity to bear the attack of an external force during the pipe storage and conveyance and can prevent the absorption by the strong external air during the opening of a cover and a foreign substance from adhering to a protection film component. To achieve the aim, a resin sheet is molded to be used as a cover body (1) for the protection film component keeping container, the surface of the cover body (1) is provided with a rib part (3) which forms with a short edge of the cover body (1) an angle no greater than 10DEG and does not cross with the other rib parts. As the rib parts are not cut off by other ribs, the rigidity of the rib part (3) on the upper and lower sides (in the vertical direction) is greatly improved, and the deformation of the cover body and the damage to the protection film component as a result of the external force can be prevented.
Description
Technical field
The invention relates to a kind of protective film assembly container, the little shadow protection film assembly that uses as dust protector when it can take in, takes care of, carry products such as making semiconductor device, printed base plate or LCD at us.
Background technology
In the manufacturing of article such as semiconductor devices such as LSI or LCD, be with rayed semiconductor crystal wafer or liquid crystal with glass substrate to produce pattern, the words that thought has dust to adhere to as if this moment on employed light shield or the first minification light shield (to call light shield in the following text), this dust can cover light, or refracted ray, the pattern of transfer printing is damaged.
Therefore, these operations are normally carried out in dust free room, only even so desire often to keep photomask clean still quite difficult, so take to attach the method for protection film assembly as dust protector on the light shield surface.
At this moment, foreign matter is not directly to be attached on the light shield surface, but is attached on the protection film assembly, so as long as will be in focus in little shadow step on the mask pattern, the foreign matter on the protection film assembly just can not impact transfer printing.
Yet, though have and prevent that foreign matter from invading inner effect from the outside protection film assembly being attached on the light shield its formed enclosure space of back, only if foreign matter is to be attached to protection film assembly itself and when enclosure space is inner, just to be difficult to prevent light shield surface attachment foreign matter.Therefore, except the height spatter property that requires protection film assembly itself, more strong request keeping, the protective film assembly container that uses when carrying also have the performance of keeping this spatter property.Particularly, require it to prevent the antistatic property excellence, and the few material of powder amount is constituted when being rubbed, and formed the structure that contacts that can as far as possible prevent between protection film assembly and constituent part, and can be prevented the high rigid construction of being out of shape when applying external force.
Normally (Acrylonitrile Butadiene Styrene, ABS) resin such as resin, acrylic acid forms with mode manufacturings such as injection molding or vacuum formings protective film assembly container with acrylonitrile-butadiene-benzene diene copolymers.Utilize these manufacturing process, though possess surface smoothing thus foreign matter adhere to or send out that the doubt of dirt is less, integrally formed non-joint is so send out dirt or the less contoured article complexity of allotrylic doubt also can be made easily, production excellence, advantage such as with low cost.
The protective film assembly container that semiconductor is used or printed base plate is used, about the about 200～300mm of its profile length of side, these containers normally utilize the injection molding mode to make and form.As previously mentioned, in order to keep the clean of protective film assembly container, even and also be difficult to the high rigidity of being out of shape when requiring it to have external force and apply, only the problem for the rare rigidity of protective film assembly container of these length of sides 200～300mm exists.
Originally, small containers is just than being easier to guarantee its rigidity, and changes the thickness of part, the just wall thickness of reinforcement significant points easily with the mode of injection molding.
On the other hand, being mainly used in liquid crystal and surpassing the large-scale protective film assembly container of 500mm with protection film assembly and the length of side, generally is that synthetic resin sheet materials such as ABS, acrylic acid are formed with the manufacturing of vacuum forming mode.
This be because, if use from a place or several local gates with resin injecting the injection molding mode in the mould at a high speed, its resin flows distance is oversize and can cause difficulty in the making.The vacuum forming mode is to cover the resin sheet that heated on mould, is shaped with vacuum attraction, so even large item also can make easily again.
Yet the vacuum forming mode can't form heavy wall, though available flank is done the reinforcement of some degree, the sheet material that only is crooked identical thickness of slab basically is made, so this mode of use still is difficult to make the article of high rigidity.
The example of these flanks, with regard to vessel, for example, patent documentation 1 etc. are illustrated.With regard to lid, for example, the flank of groined type as shown in figure 3 or the flank of X font (without diagram) are set.
Again, when only depending on the flank reinforcement still to dislike deficiency, for example, shown in patent documentation 2, can link to guarantee rigidity with other reinforcing body.
[Patent Document 1] spy opens 2000-173887
[Patent Document 2] special hope 2005-081533
Summary of the invention
The problem that invention institute desire solves
When our desire is taken out protection film assembly and when opening lid, can be entrainmented producing violent outer gas in the accommodating container from accommodating container.At this moment, accompanying foreign matter around airborne floating material or the accommodating container can take place is involved in together along with outer gas and is attached to phenomenon on the protection film assembly.
Because its lid of large-scale protective film assembly container is also very big, so even slowly start lid, also be easy to take place these phenomenons.
Lid is out of shape because of external force in order to prevent to carry etc., and is required to have high rigidity, and only this phenomenon can be higher significantly along with the lid rigidity.This is in order to suppress the microdeformation when the accommodating container body is raised lid.
Therefore, still can't make a kind of protective film assembly container at present, it has the high rigidity of guaranteeing the internal tank cleanliness factor, and can not be involved in foreign matter when raising lid and be attached on the protection film assembly.
According to the above, the object of the present invention is to provide a kind of protective film assembly container, it has, and enough rigidity are born keeping, the external force when carrying, and are involved in acutely outer gas can suppress to raise lid the time, and prevent that foreign matter is attached on the protection film assembly.
The technological means of dealing with problems
Protective film assembly container of the present invention is made of following member: vessel, its mounting protection film assembly; Lid, its protection film assembly that is covered, and end with the mutual chimeric card of circumference with vessel, it is characterized by: lid is to be shaped with resin sheet, at least be provided with a flank on this lid upper surface, in itself and the lid profile certain angulation on one side and is not intersected with other flanks in 10 °.
Then, the minor face angulation of this flank and lid profile more suitable 10 ° with interior be good.
Effect against existing technologies
Protective film assembly container of the present invention, its lid can bear enough rigidity of external force in keeping, the conveying because of flank has, and be easy to generate flexural deformation when raising lid, gas entrainments outside former can suppress to flow in container when uncapping violent, significantly reduces the chance that foreign matter is attached to protection film assembly.
Description of drawings
Fig. 1 is the schematic isometric of expression protective film assembly container one embodiment of the present invention.
Fig. 2 is the diagrammatic side view of expression protective film assembly container of the present invention state when uncapping.
Fig. 3 is the schematic isometric that protective film assembly container one embodiment of known lid is used in expression.
Fig. 4 is the diagrammatic side view of expression state when using the protective film assembly container of known lid to uncap.
Main description of reference numerals
1 lid
2 vessels
3 flanks
11 lids
12 vessels
13 flanks
14 protection film assemblies
21 lids
22 vessels
23 flanks
31 lids
32 vessels
33 flanks
34 protection film assemblies
A, the b amount of bow
Embodiment
Below, protective film assembly container one example of the present invention is described with reference to the accompanying drawings.Fig. 1 is the schematic isometric of expression protective film assembly container one example of the present invention, and Fig. 2 is expression starts the state of lid from this vessel a diagrammatic side view.
As shown in Figure 1, protection film assembly (without diagram) mounting and is covered with by lid 1 on vessel 2.Then, lid 1 and vessel 2 usefulness adhesive tape of paste etc. (without diagram) sealing and fixing, or fixing with binding instruments such as anchor clamps (without diagram).
Again, the material of lid, vessel can be selected suitable material from resins such as acrylic acid, ABS, PVC, only adheres in order to reduce the foreign matter that static causes, and should use can prevent the material of static.Then, lid is preferably transparent or semitransparent so that confirm inner case, and vessel is preferably whether black is for confirmation has foreign matter to adhere to.
In Fig. 1, lid 1 is embedded on the circumference of vessel 2, and the lid 1 when chimeric should dwindle with vessel 2 gap of giving birth to as far as possible, invades from the outside to prevent foreign matter.
Then, at lid 1 upper surface the 5 root portions 3 that reinforcement is used are set.In this flank 3 and the lid profile certain on one side angulation 10 ° with interior (in the example at Fig. 1 with minor face in 10 °), and must not have between each flank and intersect.
The fabric width of these flanks, highly, configuration, radical, section shape etc., in response to the needed rigidity of lid suitably design get final product, in the form of this figure, do not do any qualification.
The edge angulation of flank 3 and lid profile does not then have problem in the practicality at 10 degree with interior, can suitably be provided with, and only is parallel preferable, and is particularly parallel better with minor face.This is because with parallel compared with Yan Gengneng improves rigidity with long limit is parallel apart from short minor face, the effect of flank is performed to greatest extent.
Then, because each flank is by the cross-section intersection of other flanks and mistake,, more can improve the rigidity of flank above-below direction (longitudinal direction) greatly compared with the flank person with vertical direction (for example) as person as illustrated in Fig. 3.
For example, as shown in Figure 3, at the flank that lid 21 upper surfaces cross one another, can feel the good and excellent rigidity of balance at first blush, only these structures are real can't reach our desired rigidity.
That is, the flank of these forms of vacuum forming method made, though guarantee rigidity with vertical surface of warpage, only other flanks of intersection (connection) can cut off this vertically rigidity on surface.
The present invention there is no the intersection flank, so can bring into play the original rigidity of flank.Again, almost only there is unidirectional flank in the present invention, so can significantly reduce the flexural rigidity with the flank vertical direction.
Yet, in the reality keeping, carrying, when lid is embedded on the vessel, because the rigidity of vessel can support lid fully, so the reduction of flexural rigidity can not throw into question fully.Opposite, this is producing very big advantage on the contrary when vessel is raised lid.
When vessel was raised lid, lid 11 was easy to generate bending as shown in Figure 2.At this moment, the Support Position when lid 11 is raised should be raised from two short brinks in Fig. 2 flank configuration and is the best, grips device so be particularly suitable at this handle etc. being set.
Then, with flank vertical direction (being long side direction in this example) on low flexural rigidity, make the lid 11 incunabulum section rank when uncapping flexibly produce bending.Therefore, the initial stage section rank air of uncapping smooth-goingly flows into lid and vessel inside silently, just can have no opposing ground and easily lid be raised, so can not take place outer gas acutely inflow situation and can significantly lower foreign matter and be attached to chance on the internal Protection film assembly.
[embodiment]
Below, embodiments of the invention are described, only the present invention is not limited only to this.The ABS resin sheet material (t=3mm, black) that can prevent static with the vacuum forming method is made into the protective film assembly container body 2 of shape as shown in Figure 1.
This vessel central portion is higher, but the mounting protection film assembly.
Then, can prevent that with the vacuum forming method ABS resin sheet material (t=3mm, transparent) of static is made into the lid 1 of shape as shown in Figure 1.Lid 1 is provided with the flank height 20mm in 3, four places of flank, wide 50mm in five places of upper surface, flank height 20mm, the wide 100mm of central authorities.
Certainly, this lid 1 can be embedded on the vessel 2, and the outward appearance after the combination as shown in Figure 1.All sizes are length 1450 * wide by 1330 * height 95mm.
This protective film assembly container is moved in the dust free room of grade 1, made its drying again after thoroughly cleaning with neutral irrigation and pure water.Afterwards, will be in the darkroom check with light harvesting lamp (light quantity 300,000 luxs) that the protection film assembly (outside cun 1366 * 1146, without diagram) of foreign matter was accommodated in this container carefully.
Then, utilize cover body opening/closing action whether the protection film assembly of internal tank is adhered to foreign matter evaluation.
As shown in Figure 2, catch two minor faces of lid 11, slowly raise and take away by 2 operators.
This moment, lid 11 produced bending slightly after raising, when leaving vessel 12 fully, in the bending (size of a among Fig. 2) of the about 20mm of central portion generation.Afterwards, the careful taking-up is accommodated in inner protection film assembly 14, carries out inspection of foreign substance with the light harvesting lamp in the darkroom like this.Found that and do not see fully on the protection film that foreign matter increases.
Afterwards, in order to confirm to repeat 4 these experiments again, the foreign matter on the protection film is not still seen increase fully.
In addition, lid 11, vessel 12 carry out cleaning at every turn again at this moment, and test is reused same item with protection film assembly.
Then, at the aluminium sheet (the about 28kg of weight) of (correctly is on the flank 3) mounting 1000 * 1300 * 8mmt on the lid 1 with the evaluation rigidity.
Afterwards, observe the lid outward appearance, find that obvious bending does not take place lid from transverse direction.
[comparative example]
The ABS resin sheet material (t=3mm, black) that can prevent static with the vacuum forming method is made into the protective film assembly container body 22 of shape as shown in Figure 3.
This vessel central portion is higher, but the mounting protection film assembly.
Then, can prevent that with the vacuum forming method ABS resin sheet material (t=3mm, transparent) of static is made into the lid 21 of shape as shown in Figure 3.
At lid 21 upper surfaces the flank 23 of groined type, all flank height 20mm, wide 50mm are set.Certainly, this lid 21 can be embedded on the vessel 22, and the outward appearance after the combination as shown in Figure 1.
All sizes are identical with embodiment, are length 1450 * wide by 1330 * height 95mm.
With regard to this protective film assembly container, with the cover body opening/closing action whether inner protection film assembly is adhered to foreign matter, carry out and the identical evaluation of the foregoing description.
As shown in Figure 4, catch two minor faces of lid 31, slowly raise and take away by 2 operators.31 pairs of lids are raised the powerful opposing of action generation and can't be raised easily at this moment.
Again, lid 31 is not seen obvious bending after vessel 32 is lifted off fully, and only central portion has the bending of (size of b among Fig. 4) about 5mm approximately.Afterwards, the careful taking-up is accommodated in inner protection film assembly 34, carries out inspection of foreign substance with the light harvesting lamp in the darkroom like this.As a result, at the foreign matter of having found on the protection film to increase about 3 size 50～100 μ m.
Afterwards, in order to confirm to carry out 4 these experiments again, have on 3 protection films in 4 times the situation that foreign matter increases takes place.At this moment, lid 31, vessel 32 carry out cleaning at every turn again, and test is used same item with protection film assembly, and accompanying foreign matter is all removed with hair-dryer at every turn.
Then, at the aluminium sheet (the about 28kg of weight) of (correctly is on the flank 23) mounting 1000 * 1300 * 8mmt on the lid 21 with the evaluation rigidity.Find that after transverse direction is observed the lid outward appearance flank 23 on the lid inwards is absorbed in about about 15～20mm, and cause lid to damage.
Claims (2)
1. protective film assembly container comprises:
Vessel is in order to the mounting protection film assembly;
Lid, its covered protection film assembly, and end at the mutual chimeric card of circumference with this vessel,
It is characterized by:
This lid is to be shaped with resin sheet, and this lid upper surface is provided with at least 1 flank, its with the lid profile in certain one side angulation in 10 °, and with the non-intersect fork of other flanks.
2. protective film assembly container as claimed in claim 1, wherein,
The minor face angulation of this flank and lid profile is in 10 °.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP299460/06 | 2006-11-02 | ||
| JP2006299460A JP4672636B2 (en) | 2006-11-02 | 2006-11-02 | Pellicle storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101174083A true CN101174083A (en) | 2008-05-07 |
| CN101174083B CN101174083B (en) | 2010-12-29 |
Family
ID=39422666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101680144A Expired - Fee Related CN101174083B (en) | 2006-11-02 | 2007-10-31 | Protective film assembly container |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4672636B2 (en) |
| KR (1) | KR101389867B1 (en) |
| CN (1) | CN101174083B (en) |
| HK (1) | HK1112293A1 (en) |
| TW (1) | TWI332470B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114229229A (en) * | 2021-10-29 | 2022-03-25 | 东莞市金恒晟新材料科技有限公司 | Anti-cutting protective film |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5626850B2 (en) * | 2010-05-10 | 2014-11-19 | 旭化成イーマテリアルズ株式会社 | Pellicle storage container |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04367434A (en) * | 1991-06-05 | 1992-12-18 | Mamoru Kamo | Thin wall container |
| JPH07223678A (en) * | 1994-02-09 | 1995-08-22 | Hanshin Kasei Kogyo Kk | Container for foodstuffs |
| JPH09315431A (en) * | 1996-03-29 | 1997-12-09 | Sumitomo Chem Co Ltd | Plastic pallets |
| JPH10114388A (en) * | 1996-10-07 | 1998-05-06 | Nikon Corp | Pellicle container |
| JP2000173887A (en) * | 1998-12-02 | 2000-06-23 | Asahi Kasei Denshi Kk | Pellicle housing case |
| JP4236535B2 (en) * | 2003-07-31 | 2009-03-11 | 旭化成エレクトロニクス株式会社 | Large pellicle storage container |
| WO2006080060A1 (en) | 2005-01-27 | 2006-08-03 | Asahi Kasei Emd Corporation | Case for housing large-sized pellicle |
| JP4391435B2 (en) * | 2005-03-22 | 2009-12-24 | 信越化学工業株式会社 | Pellicle storage container |
-
2006
- 2006-11-02 JP JP2006299460A patent/JP4672636B2/en active Active
-
2007
- 2007-10-01 KR KR1020070098643A patent/KR101389867B1/en active Active
- 2007-10-31 TW TW096140952A patent/TWI332470B/en not_active IP Right Cessation
- 2007-10-31 CN CN2007101680144A patent/CN101174083B/en not_active Expired - Fee Related
-
2008
- 2008-07-07 HK HK08107439.6A patent/HK1112293A1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114229229A (en) * | 2021-10-29 | 2022-03-25 | 东莞市金恒晟新材料科技有限公司 | Anti-cutting protective film |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101389867B1 (en) | 2014-04-29 |
| CN101174083B (en) | 2010-12-29 |
| KR20080040564A (en) | 2008-05-08 |
| TW200821233A (en) | 2008-05-16 |
| HK1112293A1 (en) | 2008-08-29 |
| JP4672636B2 (en) | 2011-04-20 |
| JP2008116667A (en) | 2008-05-22 |
| TWI332470B (en) | 2010-11-01 |
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