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CN101158590A - Device and method for fully digital four-quadrant detector detecting laser beam deflection angle - Google Patents

Device and method for fully digital four-quadrant detector detecting laser beam deflection angle Download PDF

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CN101158590A
CN101158590A CNA2007100563073A CN200710056307A CN101158590A CN 101158590 A CN101158590 A CN 101158590A CN A2007100563073 A CNA2007100563073 A CN A2007100563073A CN 200710056307 A CN200710056307 A CN 200710056307A CN 101158590 A CN101158590 A CN 101158590A
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王乾发
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Changchun University of Science and Technology
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Abstract

本发明涉及全数字化的四象限探测器检测激光光束偏转角的装置及方法。该装置有前置放大电路(12)、滤波电路(13)、AD转换电路(16)、偏移量显示模块(18),还有四象限探测器(1)、次级放大电路模块(14)、可变增益放大电路模块(15)和高速微处理器模块(17)构成;本发明由于采用了全数字处理的方法解决了测量精度降低的问题;采用自适应可变增益放大电路使该方法能够通过根据输入信号强弱自动改变增益大小的方式来维持进入AD采集单元时信号强度的大小,克服了因输入光强变化所带来的信噪比下降而导致解算精度降低的缺点;采用高速微处理器进行光束偏转角解算的方式克服了因采用单片机解算所造成的解算速度不快的缺点。

Figure 200710056307

The invention relates to a device and a method for detecting the deflection angle of a laser beam by a fully digital four-quadrant detector. The device has a preamplifier circuit (12), a filter circuit (13), an AD conversion circuit (16), an offset display module (18), a four-quadrant detector (1), a secondary amplifier circuit module (14 ), a variable gain amplifier circuit module (15) and a high-speed microprocessor module (17); the present invention solves the problem that measurement accuracy decreases due to the adoption of an all-digital processing method; adopts an adaptive variable gain amplifier circuit to make the The method can maintain the signal strength when it enters the AD acquisition unit by automatically changing the gain according to the strength of the input signal, and overcomes the shortcomings of the reduction of the resolution accuracy caused by the decrease of the signal-to-noise ratio caused by the change of the input light intensity; Using a high-speed microprocessor to calculate the beam deflection angle overcomes the disadvantage of slow calculation speed caused by the use of a single-chip computer.

Figure 200710056307

Description

全数字化的四象限探测器检测激光光束偏转角的装置及方法 Device and method for fully digital four-quadrant detector detecting laser beam deflection angle

技术领域technical field

本发明属于光电测量技术领域,全数字化的四象限探测器检测激光光束偏转角的装置及方法。The invention belongs to the technical field of photoelectric measurement, and relates to a device and a method for detecting the deflection angle of a laser beam by an all-digital four-quadrant detector.

背景技术Background technique

目前,对激光光束偏转角的测量主要采用的光电探测器有电荷耦合器件(CCD)、位置敏感器(PSD)和四象限探测器(QD)三种光电探测器。由于电荷耦合器件(CCD)输出的数据虽能直接反应光斑在光敏面上的位置,进而根据其相对光敏面中心的偏移量得出激光束的偏转角(相对于光轴),但是电荷耦合器件(CCD)的象素太多,需要处理的数据量太大,不适合高动态范围的激光束偏转角的测量;而位置敏感器(PSD),其数据处理相对电荷耦合器件(CCD)而言要简单得多,但是由于其器件本身的参数特性,它的性能不如QD。同时QD还广泛用于视轴对准、角度测量以及跟踪等领域中。At present, the photodetectors mainly used to measure the deflection angle of the laser beam include charge-coupled device (CCD), position sensor (PSD) and four-quadrant detector (QD). Although the data output by the charge-coupled device (CCD) can directly reflect the position of the light spot on the photosensitive surface, and then obtain the deflection angle of the laser beam (relative to the optical axis) according to its offset relative to the center of the photosensitive surface, but the charge-coupled There are too many pixels in the device (CCD), and the amount of data to be processed is too large, which is not suitable for the measurement of the laser beam deflection angle with a high dynamic range; while the position sensor (PSD), its data processing is relatively low compared to the charge-coupled device (CCD). The language is much simpler, but due to the parametric characteristics of the device itself, its performance is not as good as that of QD. At the same time, QD is also widely used in the fields of boresight alignment, angle measurement and tracking.

在专利“一种平面镜摆动姿态的检测装置及其方法”(中国专利申请,公开号:CN1487264A。)中,采用了四象限探测器作为其光电传感器,其处理电路如图4所示。它由21前置放大电路模块、22和差电路模块、23锁相检测电路模块、24滤波电路模块、25AD转换电路模块、26单片机和27测量结果单元共六部分组成。四象限探测器的四路经前置放大电路后,进行和差解算,然后通过锁相检测的方式,提取信号进行AD转换,并将转换后的数据送往单片机进行偏移量解算,最后由单片机将解算结果通过RS485接口送往上位机显示。由于它采用了和差电路,会引起四象限探测器四路信号间的串扰同时引入了额外的共模噪声,并且不便于通过软件的方式对通道间性能的不均衡进行补偿,降低了解算精度;由于它采用的是单片机,其解算精度和解算速度都受到限制,在该系统中,最快速度为90次/S。In the patent "a device and method for detecting the swing attitude of a plane mirror" (Chinese patent application, publication number: CN1487264A.), a four-quadrant detector is used as its photoelectric sensor, and its processing circuit is shown in Figure 4. It consists of 21 preamplifier circuit modules, 22 sum difference circuit modules, 23 phase lock detection circuit modules, 24 filter circuit modules, 25AD conversion circuit modules, 26 single-chip microcomputers and 27 measurement result units. After the four channels of the four-quadrant detector pass through the preamplifier circuit, the sum and difference are calculated, and then through the phase-locking detection method, the signal is extracted for AD conversion, and the converted data is sent to the single-chip computer for offset calculation. Finally, the single-chip microcomputer sends the calculation result to the upper computer for display through the RS485 interface. Because it uses a sum-difference circuit, it will cause crosstalk between the four-way signals of the four-quadrant detector and introduce additional common-mode noise, and it is not convenient to compensate the unbalanced performance between channels through software, reducing the resolution accuracy ; Because it uses a single-chip microcomputer, its calculation accuracy and calculation speed are limited. In this system, the fastest speed is 90 times/S.

发明内容Contents of the invention

本发明主要是为了解决激光束偏转角QD检测中光斑偏移量解算速度和解算精度的不足,提供全数字化的四象限探测器检测激光光束偏转角的装置及实现方法。The invention mainly aims to solve the deficiency of spot offset calculation speed and calculation accuracy in QD detection of laser beam deflection angle, and provides a fully digital four-quadrant detector for detecting laser beam deflection angle device and implementation method.

本发明的基本构思如下:激光光束经成像物镜单元成像到QD传感器的光敏面上,由QD传感器将光信号转换为电信号,该电信号先经过前置放大电路进行前置放大,然后对信号进行滤波,接着对滤波后的信号进行次级放大以及自适应可变增益放大,然后送往AD转换电路,接着将AD转换后的信号送往高速微处理器进行光斑偏移量解算,最后将解算后的激光束偏移角进行显示。The basic idea of the present invention is as follows: the laser beam is imaged onto the photosensitive surface of the QD sensor through the imaging objective lens unit, and the optical signal is converted into an electrical signal by the QD sensor. Perform filtering, then perform secondary amplification and adaptive variable gain amplification on the filtered signal, and then send it to the AD conversion circuit, then send the AD converted signal to a high-speed microprocessor for spot offset calculation, and finally The calculated laser beam offset angle is displayed.

如图3所示,全数字化的四象限探测器检测激光束偏转角的装置的构成由四象限探测器1、前置放大电路模块12、滤波电路模块13、次级放大电路模块14、可变增益放大电路模块15、AD转换模块16、高速微处理器模块17和偏移量显示模块18构成;As shown in Figure 3, the device for detecting the deflection angle of the laser beam by a fully digital four-quadrant detector consists of a four-quadrant detector 1, a preamplifier circuit module 12, a filter circuit module 13, a secondary amplifier circuit module 14, a variable A gain amplifier circuit module 15, an AD conversion module 16, a high-speed microprocessor module 17 and an offset display module 18 form;

前置放大电路模块12、滤波电路模块13、次级放大电路模块14、可变增益放大电路模块15、AD转换模块16、高速微处理器模块17和偏移量显示模块18依次连接,高速微处理器模块17还与可变增益放大电路模块15连接。Preamplifier circuit module 12, filter circuit module 13, secondary amplifier circuit module 14, variable gain amplifier circuit module 15, AD conversion module 16, high-speed microprocessor module 17 and offset display module 18 are connected in sequence, and the high-speed microprocessor The processor module 17 is also connected to the variable gain amplifier circuit module 15 .

相对于已有技术“一种平面镜摆动姿态的检测装置及其方法”而言,本发明除采用前置放大电路12、滤波电路13、AD转换电路16、偏移量显示模块18外,还采用了:一、自适应可变增益放大电路模块15,用以在入射激光光功率不稳定时,确保较好的信噪比,以提高偏转角的解算精度;二、高速微处理器17,用以替代单片机进行数据解算,在进行数字信号处理的时候能达到更高的解算精度和解算速度;三、没有采用和差电路和锁相检测,同时对于滤波电路的连接位置作了调整,以便能更好地抑制噪声;采用高速微处理器17取代了单片机,以使在进行数字信号处理的时候能达到更高的解算精度和解算速度。Compared with the prior art "A device and method for detecting the swing posture of a plane mirror", the present invention adopts a 1. Adaptive variable gain amplifier circuit module 15, used to ensure a better signal-to-noise ratio when the incident laser light power is unstable, so as to improve the calculation accuracy of deflection angle; 2. High-speed microprocessor 17, It is used to replace the single-chip microcomputer for data calculation, and can achieve higher calculation accuracy and calculation speed when performing digital signal processing; 3. The sum and difference circuit and phase-lock detection are not used, and the connection position of the filter circuit is adjusted. , so that noise can be better suppressed; a high-speed microprocessor 17 is used to replace the single-chip microcomputer, so that higher resolution accuracy and resolution speed can be achieved when digital signal processing is performed.

提供全数字化的四象限探测器检测激光束偏转角的方法,其步骤和条件如下:Provide a fully digital four-quadrant detector method for detecting the deflection angle of the laser beam, the steps and conditions are as follows:

(1)调整QD光电探测器的光敏面相对于成像物镜单元2的位置,以调整成像光斑在QD光敏面上的大小:(1) Adjust the position of the photosensitive surface of the QD photodetector relative to the imaging objective lens unit 2 to adjust the size of the imaging spot on the QD photosensitive surface:

如图1所示,激光光束经成像物镜单元2聚焦到QD光电探测器1上,要调整QD光电探测器的光敏面相对于成像物镜单元2的位置,使QD光电探测器的光敏面上的成像光斑3的大小能够在0.1倍到1倍的QD光电探测器光敏面内接圆直径内调整,这样以达到最佳的探测性能。As shown in Figure 1, the laser beam is focused onto the QD photodetector 1 through the imaging objective lens unit 2, and the position of the photosensitive surface of the QD photodetector relative to the imaging objective lens unit 2 needs to be adjusted to make the imaging on the photosensitive surface of the QD photodetector The size of the light spot 3 can be adjusted within 0.1 times to 1 times the diameter of the inscribed circle on the photosensitive surface of the QD photodetector, so as to achieve the best detection performance.

(2)测量成像光斑在QD光电探测器四个象限所产生的光电流:(2) Measure the photocurrent generated by the imaging spot in the four quadrants of the QD photodetector:

如图2所示,激光光束经成像物镜单元2后的成像光斑3位于QD光电探测器1的光敏面2的四个象限:第一象限4,第二象限5,第三象限6和第四象限7中,QD光电探测器1将各个象限上的光能转换为相应的电流,由于光电流与入射到对应光敏面上的光功率成正比,而光功率又与成像光斑在QD探测器四个象限内所占的面积及光斑能量分布有关,在光斑能量分布为均匀分布时,象限电流于该象限所占光斑面积成正比,即测量该四个象限产生的电流的大小就可以得到成像光斑相对于四象限探测器四个象限所形成的坐标系的坐标,进而可得到激光光束偏转角。As shown in Figure 2, the imaging spot 3 after the laser beam passes through the imaging objective lens unit 2 is located in four quadrants of the photosensitive surface 2 of the QD photodetector 1: the first quadrant 4, the second quadrant 5, the third quadrant 6 and the fourth quadrant. In quadrant 7, QD photodetector 1 converts the light energy in each quadrant into corresponding current, because the photocurrent is proportional to the light power incident on the corresponding photosensitive surface, and the light power is in turn proportional to the imaging light spot on QD detector 4. The area occupied by each quadrant is related to the energy distribution of the spot. When the spot energy distribution is uniform, the quadrant current is proportional to the spot area occupied by the quadrant. That is, the imaging spot can be obtained by measuring the current generated by the four quadrants. Relative to the coordinates of the coordinate system formed by the four quadrants of the four-quadrant detector, the deflection angle of the laser beam can be obtained.

因为激光的谱线宽度很窄,相对于QD光电探测器1的光谱响应曲线来说,可以认为激光源为线光源,即QD光电探测器的响应度在该激光光束波段范围内为常数,则QD光电探测器各象限的响应电流与该象限所得的光功率大小成正比。由于成像光斑3的光能在四个象限上的分布不同,导致由QD光电探测器1转换所得的各个象限的电流的大小也不相同。它们直接反应了光斑能量中心相对于QD光电探测器像敏面四个象限所形成坐标系内的位置,并由该位置即可求的激光束的偏转角。Because the spectral line width of the laser is very narrow, relative to the spectral response curve of the QD photodetector 1, the laser source can be considered as a line light source, that is, the responsivity of the QD photodetector is constant within the laser beam band range, then The response current of each quadrant of the QD photodetector is proportional to the magnitude of the light power obtained by the quadrant. Due to the different distribution of the light energy of the imaging spot 3 in the four quadrants, the magnitude of the current converted by the QD photodetector 1 in each quadrant is also different. They directly reflect the position of the spot energy center relative to the coordinate system formed by the four quadrants of the image sensitive surface of the QD photodetector, and the deflection angle of the laser beam can be obtained from this position.

(3)将四象限光电探测器所产生的电流信号转换为电压信号,并将其放大:(3) Convert the current signal generated by the four-quadrant photodetector into a voltage signal and amplify it:

如图3所示,QD光电探测器1将激光光束经成像物镜单元2后的成像光斑3对应于QD光电探测器四个象限上的光能及光斑的位置信息转换成相应的四路电信号:第一象限所得电流8,令为I1;第二象限所得电流9,令为I2;第三象限所得电流10,令为I3;第四象限所得光电流11,令为I4。这四路电流信号经前置放大电路模块12将电流信号转换为电压信号,并将其放大。As shown in Figure 3, the QD photodetector 1 converts the imaging spot 3 corresponding to the light energy and the position information of the spot on the four quadrants of the QD photodetector into corresponding four-way electrical signals after the laser beam passes through the imaging objective lens unit 2 : The current obtained in the first quadrant is 8, let it be I1; the current obtained in the second quadrant is 9, let it be I2; the current obtained in the third quadrant is 10, let it be I3; the photocurrent obtained in the fourth quadrant is 11, let it be I4. These four current signals are converted into voltage signals by the preamplifier circuit module 12 and amplified.

前置放大电路模块12有如下3种实现方式:(1)采用零偏放大的方式将由QD光电探测器所得的电流信号:I1,I2,I3,I4直接转换成电压信号,同时使之得到放大;(2)让QD光电探测器工作在反相偏压的工作状态下,采用直流放大的形式将由QD光电探测器所得的电流信号:I1,I2,I3,I4转换为电压信号,并使之放大;(3)让QD光电探测器工作在反相偏压的工作状态下,采用交流放大的形式将由QD光电探测器所得的电流信号:I1、I2、I3、I4转换为电压信号U1、U2、U3、U4,并使之放大。The pre-amplification circuit module 12 has the following three implementation methods: (1) The current signals obtained by the QD photodetector: I1, I2, I3, and I4 are directly converted into voltage signals by zero-bias amplification, and simultaneously amplified ; (2) Let the QD photodetector work under the working state of the reverse bias voltage, adopt the form of DC amplification to convert the current signal obtained by the QD photodetector: I1, I2, I3, I4 into a voltage signal, and make it Amplify; (3) Let the QD photodetector work under the working state of reverse bias voltage, and convert the current signals obtained by the QD photodetector: I1, I2, I3, I4 into voltage signals U1, U2 in the form of AC amplification , U3, U4, and enlarge them.

(4)采用滤波电路模块13,此为本发明的一发明点。滤波电路模块13加在此处,比“一种平面镜摆动姿态的检测装置及其方法”(中国专利申请,公开号:CN1487264A)中加在锁相检测后能更好地抑制噪声。(4) The filtering circuit module 13 is adopted, which is an inventive point of the present invention. Adding the filter circuit module 13 here can suppress noise better than that added after phase-locking detection in "A device and method for detecting swing attitude of a plane mirror" (Chinese patent application, publication number: CN1487264A).

采用滤波电路模块13对步骤(3)得到的前置放大后的电压信号U1、U2、U3、U4进行滤波提高信噪比:Adopt filtering circuit module 13 to carry out filtering to the preamplified voltage signal U1, U2, U3, U4 that step (3) obtains and improve signal-to-noise ratio:

采用滤波电路模块13对步骤(3)得到的前置放大后的电压信号U1、U2、U3、U4进行滤波,得到信号UL1、UL2、UL3、UL4,提高信噪比,根据光信号的频带以及应用要求可设计具体的滤波电路以达到最好的滤波效果,提高信噪比,提高光斑偏移量的解算精度。Adopt filter circuit module 13 to filter the preamplified voltage signals U1, U2, U3, U4 obtained in step (3), obtain signals UL1, UL2, UL3, UL4, improve the signal-to-noise ratio, according to the frequency band of the optical signal and Application requirements can design a specific filter circuit to achieve the best filtering effect, improve the signal-to-noise ratio, and improve the calculation accuracy of the spot offset.

所以如此,是由于QD光电探测器固有噪声、前置放大电路的固有噪声、背景噪声等噪声的影响,导致前置放大后的信号其信噪比较低所致。Therefore, it is due to the inherent noise of the QD photodetector, the inherent noise of the preamplifier circuit, background noise and other noises, resulting in a low signal-to-noise ratio of the preamplified signal.

(5)采用次级放大电路模块14,对滤波后的信号UL1、UL2、UL3、UL4进行再次放大,增大有效信号的幅度,提高信噪比。此为本发明的一发明点,对信号进行二次放大一是实现与滤波电路模块的阻抗匹配;一是降低对前置放大器的性能要求。(5) The secondary amplifying circuit module 14 is used to re-amplify the filtered signals UL1, UL2, UL3, and UL4 to increase the amplitude of the effective signal and improve the signal-to-noise ratio. This is an inventive point of the present invention. The secondary amplification of the signal is to achieve impedance matching with the filter circuit module; the other is to reduce the performance requirements of the preamplifier.

由于在进行远距离的激光光束偏转角的测量中,信号通常很微弱,尽管经过前置放大电路后信号得到增强,但仍很小,需要对其进行再一次的放大。本发明采用次级放大电路模块14对滤波后的信号进行再次放大,得到信号US1、US2、US3、US4,增大有效信号的幅度,提高信噪比。Since the signal is usually very weak in the measurement of the long-distance laser beam deflection angle, although the signal is enhanced after passing through the pre-amplification circuit, it is still very small, and it needs to be amplified again. The present invention uses the secondary amplifying circuit module 14 to re-amplify the filtered signal to obtain signals US1, US2, US3 and US4, thereby increasing the amplitude of the effective signal and improving the signal-to-noise ratio.

(6)采用自适应可变增益放大电路模块15,此为本发明的一发明点。通过该模块的采用能根据当前信号的强度改变放大倍数,使放大后的信号幅度保持在一个较高的水平,能够提高检测精度。(6) Adaptive variable gain amplifier circuit module 15 is adopted, which is an inventive point of the present invention. The adoption of the module can change the amplification factor according to the strength of the current signal, so that the amplitude of the amplified signal can be kept at a high level, and the detection accuracy can be improved.

采用自适应可变增益放大电路以使信噪比保持在一个高的状态,保证光斑偏移量解算精度的稳定性:An adaptive variable gain amplifier circuit is used to keep the signal-to-noise ratio at a high level, ensuring the stability of the accuracy of spot offset calculation:

由于传输距离远,传输过程中难免会受到其它因素的干扰,造成信号强度降低,在放大倍数相同的情况下,降低了信号的信噪比,导致偏移量解算精度的降低。本发明采用自适应可变增益放大电路模块15对信号US1、US2、US3、US4进行处理(在信号较弱的时候提高放大倍数,在信号过强的时候降低放大倍数),得到信号UA1、UA2、UA3、UA4。Due to the long transmission distance, it is inevitable to be interfered by other factors during the transmission process, resulting in a decrease in signal strength. In the case of the same amplification factor, the signal-to-noise ratio of the signal is reduced, resulting in a decrease in the accuracy of offset calculation. The present invention adopts adaptive variable gain amplifier circuit module 15 to process signals US1, US2, US3, US4 (increase the amplification factor when the signal is weak, reduce the amplification factor when the signal is too strong), and obtain signals UA1, UA2 , UA3, UA4.

(7)在对信号进行可变增益放大后,采用四路AD转换电路16将模拟信号转变成为数字信号:(7) After carrying out variable gain amplification to the signal, adopt four-way AD conversion circuit 16 to convert the analog signal into a digital signal:

在对信号进行可变增益放大后,采用AD转换模块16将四路模拟信号UA1、UA2、UA3、UA4转变成为四路串行数字信号ADC1、ADC2、ADC3、ADC4。在四路AD转换电路16中,可根据需要的转换精度、信号电压的范围、通道的数量、通道AD转换的转换方式(同步转换或顺序转换)等选择合适的AD转换器,同时为保证四个通道能够同时采样,并相互独立以减小通道间的相互干扰,选择需要的AD转换器的数量。在该模块中还需要对自适应可变增益放大电路模块15的输出信号进行处理,以满足AD转换器的输入信号性能要求,达到最佳的AD转换性能。After the signals are amplified with variable gain, the AD conversion module 16 is used to convert the four analog signals UA1 , UA2 , UA3 , UA4 into four serial digital signals ADC1 , ADC2 , ADC3 , ADC4 . In the four-way AD conversion circuit 16, an appropriate AD converter can be selected according to the required conversion precision, the range of the signal voltage, the number of channels, the conversion mode (synchronous conversion or sequential conversion) of the channel AD conversion, etc. Each channel can be sampled at the same time and be independent from each other to reduce the mutual interference between channels, and select the number of AD converters required. In this module, it is also necessary to process the output signal of the adaptive variable gain amplifier circuit module 15 to meet the performance requirements of the input signal of the AD converter and achieve the best AD conversion performance.

(8)采用高速微处理器17,此为本发明的一发明点。在对四路模拟信号进行模数转换后,将转换后得到的数字信号输出到高速微处理器17进行处理:(8) Adopt high-speed microprocessor 17, this is an inventive point of the present invention. After the analog-to-digital conversion is carried out to the four-way analog signals, the digital signals obtained after the conversion are output to the high-speed microprocessor 17 for processing:

在对信号进行模数转换后,将转换后的数字信号输出到高速微处理器17进行处理。在该模块中需要完成四通道数字信号ADC1、ADC2、ADC3、ADC4的数字滤波处理,对QD光电探测器四个象限非均匀性及后续处理电路四个通道间的不均匀性等进行补偿,自适应可变增益放大电路模块15的放大倍数的控制,QD光电传感器上光斑偏移量解算、激光光束偏转角解算,偏移量的传输工作。由于高度微处理器(如:DSP、FPGA等)的运算速度非常快,能达几十兆、上百兆甚至上千兆,同时这类高速微处理器的运算精度也很高,大多都能够大于16位,几乎都大于单片机的处理速度和处理精度,因此能够迅速完成这些工作,得出激光光束偏转角,从而达到很高的光束偏转角解算速度,并同时提高光束偏转角的解算精度。After analog-to-digital conversion is performed on the signal, the converted digital signal is output to the high-speed microprocessor 17 for processing. In this module, it is necessary to complete the digital filtering processing of the four-channel digital signals ADC1, ADC2, ADC3, and ADC4, to compensate the non-uniformity of the four quadrants of the QD photodetector and the non-uniformity between the four channels of the subsequent processing circuit, etc., automatically Adapt to the control of the magnification of the variable gain amplifier circuit module 15, the calculation of the offset of the light spot on the QD photoelectric sensor, the calculation of the deflection angle of the laser beam, and the transmission of the offset. Due to the high computing speed of high-speed microprocessors (such as: DSP, FPGA, etc.), which can reach tens of megabytes, hundreds of megabytes or even gigabytes, and the computing precision of such high-speed microprocessors is also very high, most of them can More than 16 bits, almost all of which are greater than the processing speed and processing accuracy of the single-chip microcomputer, so these tasks can be completed quickly, and the laser beam deflection angle can be obtained, so as to achieve a very high beam deflection angle calculation speed, and at the same time improve the calculation of the beam deflection angle precision.

(9)采用了偏移量显示模块18,便于人眼观察。本发明采用了偏移量显示模块18,将激光光束的偏转角信息显示出来。该显示模块可由上位机接收高速微处理器模块解算所得的激光光束偏转角,然后在上位机上显示;也可由另外的MCU通过数码管、液晶显示屏或其它显示装置显示激光光束的偏转角。(9) The offset display module 18 is adopted, which is convenient for human eyes to observe. The present invention uses an offset display module 18 to display the deflection angle information of the laser beam. The display module can receive the laser beam deflection angle calculated by the high-speed microprocessor module by the host computer, and then display it on the host computer; it can also be displayed by another MCU through a digital tube, a liquid crystal display or other display devices. The deflection angle of the laser beam.

本发明的效果:本发明由于采用了全数字处理的方式能够克服由于前级信号调理的模拟电路各通道间性能参数不均衡带来的测量精度降低的缺点;因采用加减法电路所带来的电路共模电压、失调电压等的影响带来的解算精度的下降;以及因采用自适应可变增益放大电路使该方法能够通过根据输入信号强弱自动改变增益大小的方式来维持进入AD采集单元时信号强度的大小,克服了因输入光强变化所带来的信噪比下降而导致解算精度降低的缺点;以及因采用高速微处理器进行光束偏转角解算的方式克服了因采用单片机解算所造成的解算速度不快的缺点。Effect of the present invention: the present invention can overcome the shortcoming that the measurement accuracy reduces due to the unbalanced performance parameters between the channels of the analog circuit of the pre-stage signal conditioning due to the adoption of the full digital processing method; The reduction of the solution accuracy caused by the influence of the circuit common mode voltage, offset voltage, etc.; and because of the use of an adaptive variable gain amplifier circuit, the method can automatically change the gain according to the strength of the input signal to maintain access to AD The size of the signal strength at the time of the acquisition unit overcomes the shortcomings of the reduction of the resolution accuracy caused by the decrease of the signal-to-noise ratio caused by the change of the input light intensity; The disadvantage of slow solution speed caused by single-chip computer solution.

附图说明Description of drawings

图1为激光束偏移角测量光路图。图1的1表示的是QD的光敏面。2是成像物镜单元2。Figure 1 is a diagram of the optical path for measuring the deviation angle of the laser beam. 1 in Figure 1 represents the photosensitive surface of the QD. 2 is the imaging objective lens unit 2.

图2为光斑在QD探测器光敏面上的示意图。在图2中,1是QD光电探测器,2是成像物镜单元2,3是成像光斑3,4是第一象限4,5是第二象限,6是第三象限6,7是第四象限7。Fig. 2 is a schematic diagram of the light spot on the photosensitive surface of the QD detector. In Figure 2, 1 is the QD photodetector, 2 is the imaging objective lens unit 2, 3 is the imaging spot 3, 4 is the first quadrant 4, 5 is the second quadrant, 6 is the third quadrant 6, 7 is the fourth quadrant 7.

图3为全数字化的四象限探测器检测激光光束偏转角的装置结构框图。此图也是摘要附图。Fig. 3 is a structural block diagram of a fully digital four-quadrant detector for detecting the deflection angle of a laser beam. This figure is also an abstract drawing.

在图3中,2是成像物镜,3是成像光斑3,8是第一象限所得电流8,令为I1,9是第二象限所得电流9,令为I2,10是第三象限所得电流10,令为I3;11是第四象限所得光电流11,令为I4。In Fig. 3, 2 is the imaging objective lens, 3 is the imaging spot 3, 8 is the current 8 obtained in the first quadrant, let it be I1, 9 is the current 9 obtained in the second quadrant, let it be I2, and 10 is the obtained current 10 in the third quadrant , let it be I3; 11 is the photocurrent 11 obtained in the fourth quadrant, let it be I4.

图4是已有技术的采用四象限探测器作为其光电传感器,其处理电路图。Fig. 4 is a processing circuit diagram of a photoelectric sensor using a four-quadrant detector in the prior art.

图5是四象限探测器前置放大电路其中第一象限的电路图。Fig. 5 is a circuit diagram of the first quadrant of the four-quadrant detector preamplifier circuit.

图6是四象限探测器第一象限滤波电路的电路图。Fig. 6 is a circuit diagram of the first quadrant filter circuit of the four-quadrant detector.

图7是四象限探测器第一象限次级放大电路的电路图。Fig. 7 is a circuit diagram of the secondary amplifier circuit of the first quadrant of the four-quadrant detector.

具体实施方式Detailed ways

实施例1Example 1

将模拟电路的电路图给出来了,由于自适应可变增益放大电路、AD转换电路和微处理器电路可直接在器件的Datasheet里面的应用电路进行设计,模拟电路才是真个电路的核心,所以只给出了模拟部分的电路图。The circuit diagram of the analog circuit is given. Since the adaptive variable gain amplifier circuit, AD conversion circuit and microprocessor circuit can be directly designed in the application circuit in the datasheet of the device, the analog circuit is the core of the real circuit, so Only the circuit diagram of the analog part is given.

如图3所示,一种全数字化的检测激光光束偏转角的装置的构成由:QD光电探测器1、前置放大电路模块12、滤波电路模块13、次级放大电路模块14、自适应可变增益放大电路模块15、四路AD转换电路16、高速微处理器17和偏移量显示模块18构成;As shown in Figure 3, a fully digital device for detecting the deflection angle of a laser beam consists of: a QD photodetector 1, a preamplifier circuit module 12, a filter circuit module 13, a secondary amplifier circuit module 14, an adaptive Variable gain amplification circuit module 15, four-way AD conversion circuit 16, high-speed microprocessor 17 and offset display module 18 constitute;

前置放大电路模块12、滤波电路模块13、次级放大电路模块14、可变增益放大电路模块15、AD转换模块16、高速微处理器模块17和偏移量显示模块18依次连接;高速微处理器模块17还与可变增益放大电路模块15连接。Preamplifier circuit module 12, filter circuit module 13, secondary amplifier circuit module 14, variable gain amplifier circuit module 15, AD conversion module 16, high-speed microprocessor module 17 and offset display module 18 are connected in sequence; The processor module 17 is also connected to the variable gain amplifier circuit module 15 .

下面结合附图,提供全数字化的四象限探测器检测激光束偏转角的方法,其步骤和条件如下:Below in conjunction with accompanying drawing, provide the method that fully digitized four-quadrant detector detects the deflection angle of laser beam, its steps and conditions are as follows:

在图1中,激光束经成像物镜单元2聚焦到QD光电探测器的光敏面1上,在这期间,还需要调整QD光电探测器的光敏面相对于成像物镜单元2的位置,使QD光电探测器的光敏面上的成像光斑的大小能够在0.1倍到1倍的QD光电探测器的光敏面内接圆直径范围内调整,这样以达到最佳的探测性能。In Fig. 1, the laser beam is focused on the photosensitive surface 1 of the QD photodetector through the imaging objective lens unit 2. The size of the imaging light spot on the photosensitive surface of the device can be adjusted within the range of 0.1 times to 1 times the diameter of the inscribed circle on the photosensitive surface of the QD photodetector, so as to achieve the best detection performance.

在图2中,激光光束经成像物镜2后的成像光斑3位于QD光电探测器1的光敏面2的四个象限:第一象限4,第二象限5,第三象限6和第四象限7中,在QD光电探测器将各个象限上的光能转换为相应的电流的时候,由于成像光斑3的光能在四个象限上的分量不同,导致由QD光电探测器转换所得的各个象限的电流大小也不相同,因为激光的谱线宽度很窄,相对于QD光电探测器的光谱响应曲线来说,可以认为激光源为线光源,即QD光电探测器的响应度在该激光光束波段范围内为常数,则QD光电探测器各象限的响应电流与该象限所得的光功率大小成正比。它们直接反应了光斑能量中心相对于QD光电探测器像敏面四个象限所形成坐标系内的位置,由该位置即可求的激光束的偏转角。In Fig. 2, the imaging spot 3 after the laser beam passes through the imaging objective lens 2 is located in four quadrants of the photosensitive surface 2 of the QD photodetector 1: the first quadrant 4, the second quadrant 5, the third quadrant 6 and the fourth quadrant 7 In , when the QD photodetector converts the light energy in each quadrant into the corresponding current, since the light energy of the imaging spot 3 has different components in the four quadrants, the light energy of each quadrant converted by the QD photodetector The magnitude of the current is also different, because the spectral line width of the laser is very narrow. Compared with the spectral response curve of the QD photodetector, the laser source can be considered as a line light source, that is, the responsivity of the QD photodetector is within the range of the laser beam band. The inside is a constant, then the response current of each quadrant of the QD photodetector is proportional to the magnitude of the optical power obtained by the quadrant. They directly reflect the position of the spot energy center relative to the coordinate system formed by the four quadrants of the image sensitive surface of the QD photodetector, and the deflection angle of the laser beam can be obtained from this position.

在图3中,QD光电探测器将激光光束经成像物镜2后的成像光斑3对应于QD探测器四个象限上的光能及光斑的位置信息转换成相应的四路电信号:第一象限所得电流8,令为I1;第二象限所得电流9,令为I2;第三象限所得电流10,令为I3;第四象限所得光电流11,令为I4。这四路电流信号经前置放大电路模块将电流信号转换为电压信号,并将其放大。In Figure 3, the QD photodetector converts the imaging spot 3 corresponding to the light energy and spot position information on the four quadrants of the QD detector after the laser beam passes through the imaging objective lens 2 into corresponding four-way electrical signals: the first quadrant The obtained current 8, let it be I1; the second quadrant obtained current 9, let it be I2; the third quadrant obtained current 10, let it be I3; the fourth quadrant obtained photocurrent 11, let it be I4. These four current signals are converted into voltage signals by the pre-amplification circuit module and amplified.

前置放大电路模块12有如下3种实现方式:(1)采用零偏放大的方式将由QD光电探测器所得的电流信号(I1,I2,I3,I4)直接转换成电压信号,同时使之得到放大;(2)让QD光电探测器工作在反相偏压的工作状态下,采用直流放大的形式将由QD光电探测器所得的电流信号(I1,I2,I3,I4)转换为电压信号,并使之放大;(3)让QD光电探测器工作在方向偏压的工作状态下,采用交流放大的形式将由QD光电探测器所得的电流信号(I1,I2,I3,I4)转换为电压信号,并使之放大。如可采用第二种实现方式,前置放大电路以第一象限为例,如图5所示。The pre-amplification circuit module 12 has the following three implementations: (1) adopt zero-bias amplification to directly convert the current signals (I1, I2, I3, I4) obtained by the QD photodetector into voltage signals, and at the same time make it obtain Amplify; (2) Let the QD photodetector work under the working state of reverse bias voltage, adopt the form of DC amplification to convert the current signal (I1, I2, I3, I4) obtained by the QD photodetector into a voltage signal, and Make it amplified; (3) Let the QD photodetector work under the working state of the directional bias, adopt the form of AC amplification to convert the current signal (I1, I2, I3, I4) obtained by the QD photodetector into a voltage signal, and make it bigger. If the second implementation can be adopted, the preamplifier circuit takes the first quadrant as an example, as shown in FIG. 5 .

由于QD光电探测器固有噪声、前置放大电路的固有噪声、背景噪声等噪声的影响,导致前置放大后的信号其信噪比较低。本发明中采用滤波电路模块13对其进行滤波,以提高信噪比。根据光信号的频带以及应用要求可设计具体的滤波电路以达到最好的滤波效果,提高信噪比,提高光斑偏移量的解算精度。以第一象限为例,滤波电路可如图6所示进行设计。由于在进行远距离的激光光束偏转角的测量中,信号通常很微弱,尽管经过前置放大电路后信号得到增强,但仍很小,需要对其进行再一次的放大。本发明采用次级放大电路模块14对滤波后的信号进行再次放大,增大有效信号的幅度,提高信噪比。以第一象限为例,次级放大电路可如图7所示。Due to the inherent noise of the QD photodetector, the inherent noise of the pre-amplification circuit, background noise and other noises, the signal-to-noise ratio of the pre-amplified signal is low. In the present invention, the filter circuit module 13 is used to filter it, so as to improve the signal-to-noise ratio. According to the frequency band of the optical signal and application requirements, a specific filter circuit can be designed to achieve the best filtering effect, improve the signal-to-noise ratio, and improve the calculation accuracy of the spot offset. Taking the first quadrant as an example, the filter circuit can be designed as shown in Figure 6. Since the signal is usually very weak in the measurement of the long-distance laser beam deflection angle, although the signal is enhanced after passing through the pre-amplification circuit, it is still very small, and it needs to be amplified again. The present invention uses the secondary amplifying circuit module 14 to re-amplify the filtered signal to increase the amplitude of the effective signal and improve the signal-to-noise ratio. Taking the first quadrant as an example, the secondary amplifier circuit can be shown in FIG. 7 .

同时由于传输距离远,传输过程中难免会受到其它因素的干扰,造成信号强度降低,在放大倍数相同的情况下,降低了信号的信噪比,导致偏移量解算精度的降低。本发明采用自适应可变增益放大电路模块15对其进行处理,在信号较弱的时候提高放大倍数,在信号过强的时候降低放大倍数,以使信噪比保持在一个高的状态,保证光斑偏移量解算精度的稳定性。此处电路图可参考所选用的可变增益放大器的Datasheet进行设计。At the same time, due to the long transmission distance, other factors will inevitably be interfered during the transmission process, resulting in a decrease in signal strength. In the case of the same amplification factor, the signal-to-noise ratio of the signal is reduced, resulting in a decrease in the accuracy of offset calculation. The present invention adopts adaptive variable gain amplifier circuit module 15 to process it, increases the amplification factor when the signal is weak, and reduces the amplification factor when the signal is too strong, so that the signal-to-noise ratio remains at a high state, ensuring The stability of spot offset calculation accuracy. The circuit diagram here can be designed with reference to the Datasheet of the selected variable gain amplifier.

在对信号进行可变增益放大后,采用AD转换模块16将模拟信号转变成为数字信号。在四路AD转换电路16中,可根据需要的转换精度、信号电压的范围、通道的数量、通道AD转换的转换方式(同步转换或顺序转换)等选择合适的AD转换器,同时为保证四个通道能够同时采样,并相互独立以减小通道间的相互干扰,选择需要的AD转换器的数量。在该模块中还需要对自适应可变增益放大电路模块15的输出信号进行处理,以满足AD转换器的输入信号性能要求,达到最佳的AD转换性能。此处AD转换器可选用单通道的,其电路可参考器件的Datasheet进行设计。After the signal is amplified with variable gain, an AD conversion module 16 is used to convert the analog signal into a digital signal. In the four-way AD conversion circuit 16, an appropriate AD converter can be selected according to the required conversion precision, the range of the signal voltage, the number of channels, the conversion mode (synchronous conversion or sequential conversion) of the channel AD conversion, etc. Each channel can be sampled at the same time and be independent from each other to reduce the mutual interference between channels, and select the number of AD converters required. In this module, it is also necessary to process the output signal of the adaptive variable gain amplifier circuit module 15 to meet the performance requirements of the input signal of the AD converter and achieve the best AD conversion performance. Here, the AD converter can be single-channel, and its circuit can be designed with reference to the Datasheet of the device.

在对信号进行模数转换后,将转换后的数字信号输出到高速微处理器17进行偏移量解算。在该模块中需要完成四通到数字信号数字滤波处理,对QD光电探测器四个象限非均匀性及后续处理电路四个通道间的不均匀性等进行补偿,自适应可变增益放大电路模块15的放大倍数的控制,QD光电传感器上光斑偏移量解算、激光光束偏转角解算,偏移量的传输等工作。由于高度微处理器(如:DSP、FPGA等)的运算速度非常快,能达几十兆、上百兆甚至上千兆,同时这类高速微处理器的运算精度也很高,大多都能够大于16位,几乎都大于单片机的处理速度和处理精度,因此能够迅速完成这些工作,得出激光光束偏转角,从而达到很高的光束偏转角解算速度,并同时提高光束偏转角的解算精度。After analog-to-digital conversion is performed on the signal, the converted digital signal is output to the high-speed microprocessor 17 for offset calculation. In this module, it is necessary to complete the digital filtering process from the four channels to the digital signal, to compensate the non-uniformity of the four quadrants of the QD photodetector and the non-uniformity between the four channels of the subsequent processing circuit, etc., and the self-adaptive variable gain amplifier circuit module 15 magnification control, calculation of light spot offset on QD photoelectric sensor, calculation of laser beam deflection angle, transmission of offset, etc. Due to the high computing speed of high-speed microprocessors (such as: DSP, FPGA, etc.), it can reach tens of megabytes, hundreds of megabytes or even gigabytes. More than 16 bits, almost all of which are greater than the processing speed and processing accuracy of the single-chip microcomputer, so these tasks can be completed quickly, and the laser beam deflection angle can be obtained, so as to achieve a very high beam deflection angle calculation speed, and at the same time improve the calculation of the beam deflection angle precision.

为便于人眼观察,本发明采用了偏移量显示模块18,将激光光束的偏转角信息显示出来。该显示模块可由上位机接收高速微处理器模块解算所得的激光光束偏转角,然后在上位机上显示;也可由另外的MCU通过数码管、液晶或其它显示装置显示激光光束偏转角。In order to facilitate observation by human eyes, the present invention uses an offset display module 18 to display the deflection angle information of the laser beam. The display module can receive the laser beam deflection angle calculated by the high-speed microprocessor module by the host computer, and then display it on the host computer; it can also be displayed by another MCU through digital tubes, liquid crystals or other display devices to display the laser beam deflection angle.

Claims (5)

1. The device for detecting the deflection angle of the laser beam by the fully digital four-quadrant detector is characterized by comprising a pre-amplification circuit (12), a filter circuit (13), an AD conversion circuit (16) and an offset display module (18), and further comprising a four-quadrant detector (1), a secondary amplification circuit module (14), a variable gain amplification circuit module (15) and a high-speed microprocessor module (17);
the pre-amplification circuit module (12), the filter circuit module (13), the secondary amplification circuit module (14), the variable gain amplification circuit module (15), the AD conversion module (16), the high-speed microprocessor module (17) and the offset display module (18) are connected in sequence; the high-speed microprocessor module (17) is also connected with the variable gain amplifying circuit module (15).
2. The method for detecting the deflection angle of the laser beam by the fully-digitalized four-quadrant detector is characterized by comprising the following steps and conditions:
1) adjusting the position of the photosensitive surface of the four-quadrant detector (1) relative to the imaging objective unit (2) to adjust the size of the imaging light spot on the photosensitive surface of the four-quadrant detector (1):
laser beams are focused on a photosensitive surface of the four-quadrant detector (1) through the imaging objective lens unit (2), and the position of the photosensitive surface of the four-quadrant detector (1) relative to the imaging objective lens unit (2) is adjusted, so that the size of an imaging light spot (3) on the photosensitive surface of the four-quadrant detector (1) can be adjusted within a circle-joining diameter of the photosensitive surface of the four-quadrant detector (1) from 0.1 time to 1 time;
2) measuring photocurrent generated by imaging light spots in four quadrants of a four-quadrant detector (1);
3) converting the photocurrent signal into a voltage signal and amplifying it:
the four-quadrant detector (1) converts light energy of an imaging light spot (3) of a laser beam passing through the imaging objective lens unit (2) and corresponding to four quadrants of the four-quadrant detector (1) and position information of the light spot into corresponding four paths of electric signals: the current (8) obtained in the first quadrant is I1; the current (9) obtained in the second quadrant is I2; the current (10) obtained in the third quadrant is I3; the photocurrent (11) obtained in the fourth quadrant is I4, and the four paths of current signals are converted into voltage signals through the preamplification circuit module (12) and are amplified; the method comprises the following steps:
the pre-amplification circuit module (12) adopts a zero-offset amplification mode to obtain current signals from the four-quadrant detector (1): i1, I2, I3 and I4 are directly converted into voltage signals and amplified; or,
the four-quadrant detector (1) works in a reverse bias working state, and a direct current amplification form is adopted to obtain current signals of the four-quadrant detector (1): i1, I2, I3 and I4 are converted into voltage signals and amplified; or,
the four-quadrant detector (1) works in a reverse bias working state, and current signals obtained by the four-quadrant detector (1) are amplified in an alternating current mode: i1, I2, I3 and I4 are converted into voltage signals and amplified;
4) filtering the pre-amplified signal obtained in the step 3) by using a filter circuit module (13) to improve the signal-to-noise ratio;
5) adopting a secondary amplifying circuit module (14) to amplify the filtered signal of the step 4) again, increasing the amplitude of the effective signal, and improving the signal-to-noise ratio:
6) the signal obtained in the step 5) is further amplified by adopting an adaptive variable gain amplification circuit module (15), the amplification factor is increased when the signal is weak, and the amplification factor is reduced when the signal is too strong, so that the signal-to-noise ratio is kept in a high state, and the stability of the light spot offset resolving precision is ensured;
7) the signals obtained in the step 6) are converted into digital signals through a four-way AD conversion circuit (16):
in the four-way AD conversion circuit (16), the conversion voltage range of an AD conversion chip can be determined according to the amplitude range of the output signal after the self-adaptive variable gain amplification circuit module (15); the four-way AD conversion circuit can simultaneously carry out four-way AD conversion, has better integrated linear error and differential linear error, has no crosstalk as much as possible during the four-way AD conversion, and can select proper AD conversion chips and the number of the chips according to the requirements;
8) after the signals are subjected to analog-to-digital conversion, the converted digital signals are output to a high-speed microprocessor (17) for offset solution:
the control of an AD conversion chip, the digital filtering processing of four-channel digital signals of ADC1, ADC2, ADC3 and ADC4, the compensation of the nonuniformity of four quadrants of a four-quadrant detector (1) and the nonuniformity among four channels of a subsequent processing circuit, the control of the amplification factor of a self-adaptive variable gain amplification circuit module (15), the calculation of the light spot offset, the calculation of the laser beam deflection angle and the transmission of the offset of the four-quadrant detector (1) are required to be completed in the module, and the laser beam deflection angle is obtained;
9) and an offset display module (18) is adopted to display the deflection angle information of the laser beam:
the display module can receive the laser beam deflection angle calculated by the high-speed microprocessor module through an upper computer and then display the laser beam deflection angle on the upper computer; alternatively, the deflection angle of the laser beam is displayed by another microcontroller via a digital tube, liquid crystal display, or other display device.
3. The fully digitized method for detecting the deflection angle of laser beam in four-quadrant detector according to claim 2, wherein the pre-amplifying circuit module (12) in step 3) directly converts the current signals I1, I2, I3 and I4 obtained from the four-quadrant detector (1) into voltage signals by means of zero-offset amplification, and simultaneously amplifies the voltage signals.
4. The fully digitized method for detecting the deflection angle of laser beam by four-quadrant detector according to claim 2, wherein the pre-amplifying circuit module (12) in step 3) is configured to make the four-quadrant detector (1) operate under reverse-biased operating condition, and convert the current signals I1, I2, I3, I4 obtained by the four-quadrant detector (1) into voltage signals in the form of dc amplification, and amplify them.
5. The fully digitized method for detecting the deflection angle of laser beam by four-quadrant detector according to claim 2, wherein the pre-amplifying circuit module (12) in step 3) is configured to operate the four-quadrant detector (1) in reverse-biased operating state, and to convert the current signals I1, I2, I3, I4 obtained by the four-quadrant detector (1) into voltage signals in the form of ac amplification and amplify the voltage signals.
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