CN101126676B - Method for time sequence optimization of switching laser beam for high reflectivity measurement - Google Patents
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Abstract
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技术领域technical field
本发明涉及一种测量光学元件参数的方法,特别地涉及一种用于高反射率测量的开关激光束的时序优化方法。The invention relates to a method for measuring optical element parameters, in particular to a timing optimization method for switching laser beams for high reflectivity measurement.
背景技术Background technique
高反射率光学元件在激光系统中的广泛使用迫切要求精确测量高反射率,而传统方法已无法满足高反射率的测量精度要求。中国专利申请号98114152.8,公开号CN1242516A,公开日期2000年1月26日的发明专利公开了“一种反射镜高反射率的测量方法”,采用脉冲激光系统作光源,入射到两块高反镜组成的光学谐振腔,接收光腔指数衰荡信号,分别确定直腔衰荡时间τ-和折叠腔衰荡时间τ<,计算得到待测镜的反射率R。该方法的缺点是:由于脉冲激光光束质量差、衰荡腔内存在模式竞争等因素,测量精度受到限制;而且,由于所使用的脉冲激光系统造价高,不利于推广使用。中国专利申请号200610011254.9,公开号CN1804572A,公开日期2006年7月19目的发明专利申请提供了“一种高反镜反射率的测量方法”;2006年9月出版的《中国激光》,龚元,李斌成,第33卷第9期1247-1250页,公开了一种“连续激光光腔衰荡法精确测量高反射率”的方法,它们都提出了一种以连续半导体激光器作光源的高反射率测量方法,用方波调制连续激光,采用锁相方式探测输出信号的振幅衰荡和相位延迟,从而得到光腔衰荡时间和高反镜反射率。该方法中激光功率到衰荡腔的耦合效率不高。中国专利申请号200610165082.0,公开号CN1963435A,公开日期2007年5月16日的发明专利公开的“高反镜反射率测量方法”和中国专利申请号200710098755.X的发明专利申请“基于半导体激光器自混合效应的高反射率测量方法”通过简单的机械装置或光学元器件来控制从第一块腔镜反射回激光器的后向反馈光光强,使半导体激光器输出光谱特性发生改变,大幅度提高激光束耦合进衰荡光腔的效率,使光腔输出信号中出现幅值很大的尖峰信号。此尖峰信号用来得到指数衰荡信号,并拟合得到腔镜和测试镜的反射率。该方法能高精度测量高反射率,且成本低、装置简单。然而,虽然尖峰在一个周期内出现的位置相对稳定,但出现的具体位置有一定的随机特性,而且振幅波动较大,使衰荡信号的信噪比和高反射率测量精度降低。The wide use of high reflectivity optical components in laser systems urgently requires accurate measurement of high reflectivity, and traditional methods can no longer meet the measurement accuracy requirements of high reflectivity. Chinese Patent Application No. 98114152.8, Publication No. CN1242516A, the patent of invention published on January 26, 2000 discloses "a method for measuring the high reflectivity of mirrors", using a pulsed laser system as the light source, incident on two high-reflective mirrors The formed optical resonant cavity receives the exponential ring-down signal of the optical cavity, respectively determines the ring-down time τ- of the straight cavity and the ring-down time τ< of the folded cavity, and calculates the reflectivity R of the mirror to be tested. The disadvantages of this method are: due to the poor quality of the pulsed laser beam and the mode competition in the ring-down cavity, the measurement accuracy is limited; moreover, the high cost of the used pulsed laser system is not conducive to popularization and use. Chinese Patent Application No. 200610011254.9, Publication No. CN1804572A, Publication Date July 19, 2006 The purpose of the invention patent application provides "a method for measuring the reflectivity of a high mirror"; "China Laser" published in September 2006, Gong Yuan, Li Bincheng, Volume 33, No. 9, pages 1247-1250, discloses a method of "accurate measurement of high reflectance by continuous laser cavity ring-down method". The rate measurement method uses a square wave to modulate a continuous laser, and uses a phase-locked method to detect the amplitude ringing and phase delay of the output signal, so as to obtain the optical cavity ringing time and high mirror reflectivity. In this method, the coupling efficiency of the laser power to the ring-down cavity is not high. Chinese Patent Application No. 200610165082.0, Publication No. CN1963435A, Invention Patent Publication Date May 16, 2007 "High Mirror Reflectivity Measurement Method" and Chinese Patent Application No. 200710098755.X Invention Patent Application "Based on Semiconductor Laser Self-mixing The high reflectivity measurement method of the effect "uses simple mechanical devices or optical components to control the intensity of the backward feedback light reflected from the first cavity mirror back to the laser, so that the output spectral characteristics of the semiconductor laser are changed, and the laser beam is greatly improved. The efficiency of coupling into the ring-down optical cavity causes a peak signal with a large amplitude to appear in the output signal of the optical cavity. This peak signal is used to obtain the exponential ring-down signal, and is fitted to obtain the reflectivity of the cavity mirror and the test mirror. The method can measure high reflectance with high precision, and has low cost and simple device. However, although the position of the spike in a cycle is relatively stable, the specific position of the peak has certain random characteristics, and the amplitude fluctuates greatly, which reduces the measurement accuracy of the signal-to-noise ratio and high reflectivity of the ring-down signal.
发明内容Contents of the invention
本发明要解决的技术问题:克服现有技术的不足,提供一种用于高反射率测量的开关激光束的时序优化方法,该方法用来确定最大尖峰出现频率最高的时刻,在该时刻关断激光束并记录指数衰减信号,从而提高衰荡信号的信噪比,并进一步提高高反射率测量精度。The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a timing optimization method for switching on and off laser beams for high reflectivity measurement. The laser beam is interrupted and the exponential decay signal is recorded, thereby improving the signal-to-noise ratio of the ring-down signal and further improving the measurement accuracy of high reflectivity.
本发明的技术解决问题:用于高反射率测量的开关激光束的时序优化方法,其特征在于由以下方案之一实现:Technical problem solving of the present invention: the method for timing optimization of switching laser beams for high reflectivity measurement is characterized in that it is realized by one of the following schemes:
(1)用函数发生器或函数发生卡输出的方波调制半导体激光器激励电流或电压,方波上升沿和下降沿分别对应开启或关断半导体激光器。确定光腔输出信号最大振幅出现的时刻与方波上升沿之间的时间间隔在此基础上,优化方波调制频率f和/或占空比P使光腔输出信号最大振幅处于方波下降沿,从而关断激光束,同时触发采集指数衰减信号,经过时间Δt2后,由下一个周期的方波上升沿重新开启激光束,重复上述过程实现衰荡信号和高反射率的重复测量。(1) Use the square wave output by the function generator or function generator card to modulate the excitation current or voltage of the semiconductor laser, and the rising and falling edges of the square wave correspond to turning on or off the semiconductor laser, respectively. Determine the time interval between the moment when the maximum amplitude of the optical cavity output signal appears and the rising edge of the square wave On this basis, optimize the square wave modulation frequency f and/or duty cycle P so that the maximum amplitude of the output signal of the optical cavity is at the falling edge of the square wave, thereby turning off the laser beam and triggering the acquisition of the exponential decay signal at the same time. After time Δt 2 , The laser beam is turned on again from the rising edge of the square wave in the next period, and the above process is repeated to realize the repeated measurement of the ring-down signal and high reflectivity.
(2)由阈值触发电路输出的方波调制激光束,方波的上升沿和下降沿分别对应开启或关断激光束。当光腔输出信号振幅大于预先设定的阈值时,阈值触发电路快速关断其输出电流形成下降沿关断激光束,同时触发采集指数衰减信号,经过时间Δt3后,由下一个周期的方波上升沿重新开启激光束,重复上述过程实现衰荡信号和高反射率的重复测量;(2) The laser beam is modulated by the square wave output by the threshold trigger circuit, and the rising and falling edges of the square wave correspond to turning on or off the laser beam, respectively. When the output signal amplitude of the optical cavity is greater than the preset threshold, the threshold trigger circuit quickly shuts off its output current to form a falling edge to turn off the laser beam, and at the same time triggers the collection of exponentially decaying signals. The laser beam is turned on again at the rising edge of the wave, and the above process is repeated to realize the repeated measurement of the ring-down signal and high reflectivity;
所述方案(1)和方案(2)通过以下途径之一开关激光束:The scheme (1) and scheme (2) switch the laser beam through one of the following ways:
(1)用方波调制半导体激光器的激励电流或电压实现开启或关断激光束;(1) Use a square wave to modulate the excitation current or voltage of the semiconductor laser to turn on or off the laser beam;
(2)激光器本身不调制,激光束连续输出,在激光器与衰荡腔之间插入电光或声光开关,用方波调制光开关的激励电流或电压实现开启或关断激光束。(2) The laser itself is not modulated, and the laser beam is continuously output. An electro-optic or acousto-optic switch is inserted between the laser and the ring-down cavity, and the excitation current or voltage of the optical switch is modulated with a square wave to turn on or off the laser beam.
所述方案(1)和方案(2)中优化前方波调制频率f的初始值范围为1Hz~1MHz。The initial value range of the optimized front wave modulation frequency f in the scheme (1) and scheme (2) is 1 Hz-1 MHz.
所述方案(1)和方案(2)中优化前占空比P的初始值范围为10000∶1~1∶100。The initial value of the duty ratio P before optimization in the scheme (1) and scheme (2) ranges from 10000:1 to 1:100.
所述方案(1)中的为多个Δt1的统计平均值,Δt1表示一个周期内最大振幅出现的时刻与本周期方波上升沿之间的时间间隔。In the scheme (1) It is the statistical average value of multiple Δt 1 , and Δt 1 represents the time interval between the moment when the maximum amplitude appears in a cycle and the rising edge of the square wave in this cycle.
所述方案(1)通过控制调制频率f和/或占空比P来实现开关激光束的时序优化,有以下三种形式实现调制频率和占空比的优化:The scheme (1) realizes the timing optimization of switching the laser beam by controlling the modulation frequency f and/or the duty cycle P, and there are three forms to realize the optimization of the modulation frequency and the duty cycle:
(1)调制频率f保持不变,占空比P变为
(2)调制频率f变为
(3)调制频率f变为
所述方案(2)中的阈值由阈值触发电路设定,在5mV~5V之间可调,初始值为光腔输出信号最大峰值,若设置的阈值在一定时间内不能触发关断激光束则阈值自动小幅下调直到能触发为止。The threshold in the scheme (2) is set by the threshold trigger circuit, which is adjustable between 5mV and 5V. The initial value is the maximum peak value of the optical cavity output signal. If the set threshold cannot trigger the laser beam to be turned off within a certain period of time, then The threshold is automatically adjusted down slightly until it can be triggered.
所述方案(2)中的方波由阈值触发电路本身生成、或由函数发生器或函数发生卡生成后输入至阈值触发电路并由阈值触发电路转换后输出。The square wave in the scheme (2) is generated by the threshold trigger circuit itself, or generated by a function generator or a function generating card, and then input to the threshold trigger circuit and output after being converted by the threshold trigger circuit.
所述方案(2)中的Δt3由以下两种方式确定: Δt in the scheme (2) is determined in the following two ways:
(1)方波调制频率保持不变,每个周期的Δt3由触发时刻到下一个方波周期的上升沿之间的时间间隔确定,Δt3因触发关断激光束时刻Δt1的改变而被动改变,即Δt3=1/f-Δt1。(1) The square wave modulation frequency remains unchanged, and Δt 3 of each cycle is determined by the time interval between the trigger moment and the rising edge of the next square wave cycle, and Δt 3 is changed by the change of Δt 1 when the laser beam is triggered off Passive change, ie Δt 3 =1/f-Δt 1 .
(2)Δt3保持不变,取值为衰荡时间τ的整数倍,即Δt3=kτ,τ由未进行时序优化的衰荡信号大致确定,k值视具体情况而定,范围为5<k<10000。此时方波调制频率因触发关断激光束时刻Δt1的改变而被动改变,即f=1/(Δt3+Δt1)。(2) Δt 3 remains unchanged, and its value is an integer multiple of the ring-down time τ, that is, Δt 3 =kτ, τ is roughly determined by the ring-down signal without timing optimization, and the value of k depends on the specific situation, and the range is 5 <k<10000. At this time, the modulation frequency of the square wave is passively changed due to the change of the time Δt 1 when the laser beam is triggered to be turned off, that is, f=1/(Δt 3 +Δt 1 ).
本发明与现有技术相比具有如下优点:Compared with the prior art, the present invention has the following advantages:
(1)在光腔输出信号最大尖峰出现频率最高的时刻关断激光束并记录指数衰减信号,提高了衰荡信号信噪比,有利于进一步提高高反射率测量精度。(1) Turn off the laser beam and record the exponential decay signal at the moment when the maximum peak frequency of the output signal of the optical cavity is the highest, which improves the signal-to-noise ratio of the ring-down signal and is conducive to further improving the measurement accuracy of high reflectivity.
(2)方式(1)不需触发电路,装置比方式(2)更简单,可有效降低系统成本。(2) Method (1) does not require a trigger circuit, and the device is simpler than method (2), which can effectively reduce system cost.
附图说明Description of drawings
图1为本发明基于函数发生卡的直腔高反射率测量装置实施例的示意图;1 is a schematic diagram of an embodiment of a straight cavity high reflectivity measuring device based on a function generation card in the present invention;
图2为本发明的未经时序优化的输入方波(a)和光腔输出信号(b)以及按方案(1)进行时序优化后的输入方波(c)和光腔输出信号(d);Fig. 2 is the input square wave (a) and optical cavity output signal (b) without timing optimization of the present invention and the input square wave (c) and optical cavity output signal (d) after timing optimization according to scheme (1);
图3为本发明的折叠腔构型示意图;Fig. 3 is a schematic diagram of the configuration of the folding cavity of the present invention;
图4为本发明的时序优化后探测的光腔衰荡信号及拟合曲线;Fig. 4 is the optical cavity ring-down signal and fitting curve detected after timing optimization of the present invention;
图5为本发明基于阈值触发电路的直腔高反射率测量装置示意图;5 is a schematic diagram of a straight cavity high reflectivity measuring device based on a threshold trigger circuit in the present invention;
图6为本发明的未经时序优化的输入方波(a)以及按方案(2)进行时序优化后的输入方波(b)和光腔输出信号(c);Fig. 6 is the input square wave (a) without timing optimization of the present invention and the input square wave (b) and optical cavity output signal (c) after timing optimization according to scheme (2);
具体实施方式Detailed ways
实施例1:Example 1:
实施例1详细说明了本发明的开启和关断激光束的时序优化方案(1)。图1为本发明基于函数发生卡的直腔高反射率测量装置示意图。如图1所示,测量装置由函数发生卡1、光源2、空间滤波和望远系统3、平凹高反镜4,5、透镜6、探测器7、数据采集卡8和计算机9组成。图中的粗线表示光路,细线表示信号线相连。
函数发生卡1输出两路方波信号,一路方波信号用于调制连续半导体激光器2的激励电流或电压,使激光输出功率方波调制,方波上升沿和下降沿分别对应开启和关闭激光束。另一路方波信号用于触发数据采集卡8在方波下降沿关断激光束后记录指数衰减信号。空间滤波和望远系统3由两块透镜和一个针孔组成,用于将光源2输出的激光束整形成基模并与光腔模式匹配,也可不采用空间滤波和望远系统3,即不经模式匹配直接将激光束耦合进光腔。两块相同的平凹高反镜4、5,其凹面镀高反膜,反射率大于99%,凹面相对构成直腔。激光束在腔内多次反射后输出,经透镜6会聚后由探测器7接收。探测器7将光信号转换成电信号。与方波下降沿关断激光束同时,触发信号触发数据采集卡8记录指数衰减信号,并由计算机9进行数据处理及存储。关断激光束间隔时间Δt2后重新开启激光输出。重复上述步骤以实现衰荡信号和高反射率的多次重复测量。函数发生卡1和数据采集卡8通过PCI总线直接由计算机9控制。The
如图2(a)所示,时序优化前,函数发生卡1输出调制频率为f=1kHz,占空比为1∶1的方波信号,周期为1/f=1ms。对应的光腔输出信号如图2(b)所示。时序优化前的调制频率取值范围为1Hz~1MHz,占空比P的取值范围为10000∶1~1∶100,两者同时取值使方波低电平持续时间大于5倍衰荡时间。虽然方波下降沿关闭激光器后可以记录到衰荡信号,但由于未经时序优化,下降沿的衰荡信号振幅一般较小,信噪比低,不利于高精度测量高反射率。As shown in Figure 2(a), before timing optimization, the
光腔衰荡信号中最大振幅在每个周期内出现的位置相对稳定,但也有一定的随机特性。用Δt1表示一个周期内最大振幅出现的时刻与本周期方波上升沿之间的时间间隔,每个周期的Δt1略有不同。图2(b)标出了其中一个周期最大振幅出现的位置Δt1。表示多个Δt1的统计平均值,也是最大振幅出现频率最高的位置,用来优化调制频率和占空比。The position of the maximum amplitude in each period of the optical cavity ring-down signal is relatively stable, but it also has certain random characteristics. Use Δt 1 to represent the time interval between the moment when the maximum amplitude appears in a cycle and the rising edge of the square wave in this cycle, and Δt 1 in each cycle is slightly different. Figure 2(b) marks the position Δt 1 where the maximum amplitude of one period occurs. Indicates the statistical average value of multiple Δt 1s , which is also the position with the highest frequency of occurrence of the maximum amplitude, and is used to optimize the modulation frequency and duty cycle.
本发明的开启和关断激光束的时序优化方式(1)通过控制调制频率f和占空比P来实现开关激光束的时序优化,有以下三种形式实现调制频率和占空比的优化:The timing optimization mode (1) of opening and closing the laser beam of the present invention realizes the timing optimization of switching the laser beam by controlling the modulation frequency f and the duty ratio P, and has the following three forms to realize the optimization of the modulation frequency and the duty ratio:
(1)调制频率f保持不变,占空比P变为
(2)调制频率f变为
(3)调制频率f变为
实施例1采用上述第二种调制频率和占空比的优化方法,占空比为1∶1,即
实施例2:Example 2:
实施例2详细说明了本发明的开启和关断激光束的时序优化方案(2)。图5为本发明基于阈值触发电路的直腔高反射率测量装置示意图。如图5所示,测量装置由光源2、空间滤波和望远系统3、平凹高反镜4,5、透镜6、探测器7、数据采集卡8、计算机9和阈值触发电路11组成。图中的粗线表示光路,细线表示信号线相连。
实施例2测量装置与中国专利申请号200610165082.0,公开号CN1963435A,公开日期2007年5月16日的发明专利公开的“高反镜反射率测量方法”的实施例测量装置相同,但本发明的实施例2重点在于说明基于阈值触发电路的开关激光束的时序优化方法。光源2采用连续半导体激光器。空间滤波和望远系统3由两块透镜和一个针孔组成,用于将光源2输出的激光束整形成基模并与光腔模式匹配,也可不采用空间滤波和望远系统3,即不经模式匹配直接将激光束耦合进光腔。两块相同的平凹高反镜4、5,其凹面镀高反膜,反射率大于99%,凹面相对构成直腔谐振腔。激光束在谐振腔内多次反射后输出,经透镜6会聚后由探测器7接收。探测器7将光信号转换成电信号,并同时输出到数据采集卡8和阈值触发电路11。阈值触发电路11用来比较设定的阈值和光腔输出信号振幅的大小。当光腔输出信号振幅大于设定的阈值时,阈值触发电路11关断激光束并同时触发数据采集卡8记录关断激光束后的指数衰减信号。数据采集卡8记录指数衰减信号并送入计算机9进行处理。关断激光束间隔时间Δt3后重新开启激光输出。重复上述步骤以实现衰荡信号和高反射率的多次重复测量。
本实施例2中,阈值触发电路11通过改变半导体激光器的激励电流或电压快速关闭激光输出,从而得到指数衰减信号。也可在激光器与衰荡腔之间插入电光或声光开关,由阈值触发电路控制光开关激励电流或电压来开启或关断激光束。In
本实施例2中,时序优化前的方波直接由阈值触发电路生成,用于调制半导体激光器的激励电流,当光腔输出信号振幅大于阈值时关断半导体激光器的激励电流。方波也可由函数发生器(或函数发生卡)生成后输入阈值触发电路,再由阈值触发电路输出作为半导体激光器的激励电流调制信号。方波调制频率取值范围为1Hz~1MHz,占空比P的取值范围为10000∶1~1∶100,两者同时取值使方波低电平持续时间大于5倍衰荡时间。In
如图6(a)所示,时序优化前,阈值触发电路输出调制频率为f=1kHz,占空比为1∶1的方波信号,周期为1/f=1ms。阈值触发电路设置阈值为153mV。当光腔输出信号距上升沿约0.29ms时振幅超过阈值,阈值触发电路快速关断半导体激光器激励电流,形成方波下降沿,如图6(b)所示。下降沿关断激光束后得到光腔指数衰减信号,如图6(c)所示。图6(c)中虚线表示设置的阈值。与下降沿关断激光束同时,阈值触发电路触发数据采集卡记录指数衰减信号,并送入计算机进行拟合得到衰荡时间和反射率结果。衰减信号的处理以及腔镜、待测平面镜反射率计算过程与实施例1相同。当经历一段时间Δt3后,下一个方波周期的上升沿开启激光束,重复上述步骤以实现衰荡信号和高反射率的多次重复测量。As shown in Figure 6(a), before timing optimization, the threshold trigger circuit outputs a square wave signal with a modulation frequency of f=1kHz, a duty ratio of 1:1, and a period of 1/f=1ms. A threshold trigger circuit sets the threshold to 153mV. When the amplitude of the output signal of the optical cavity exceeds the threshold when it is about 0.29 ms away from the rising edge, the threshold trigger circuit quickly shuts off the excitation current of the semiconductor laser, forming a falling edge of a square wave, as shown in Figure 6(b). After the falling edge turns off the laser beam, the cavity exponential decay signal is obtained, as shown in Figure 6(c). The dotted line in Figure 6(c) represents the set threshold. At the same time as the falling edge turns off the laser beam, the threshold trigger circuit triggers the data acquisition card to record the exponential decay signal, and sends it to the computer for fitting to obtain the ring-down time and reflectivity results. The processing of the attenuation signal and the calculation process of the reflectivity of the cavity mirror and the plane mirror to be measured are the same as those in
本实施例2中方波调制频率保持不变,f=1kHz。由于每个周期尖峰出现的具体位置有一定的随机特性,因此每个周期的触发时刻Δt1有所不同。Δt3由触发时刻到下一个方波周期的上升沿之间的时间间隔确定,因此Δt3随触发关断激光束时刻Δt1的改变而被动改变,即Δt3=1/f-Δt1。也可采用以下方式:Δt3保持不变,取值为衰荡时间τ的整数倍,即Δt3=kτ,τ由未进行时序优化的衰荡信号大致确定,k值视具体情况而定,范围为5<k<10000。此时方波调制频率因触发关断激光束时刻Δt1的改变而被动改变,即f=1/(Δt3+Δt1)。In
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