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CN101118901B - Stacked chip package structure and manufacturing process thereof - Google Patents

Stacked chip package structure and manufacturing process thereof Download PDF

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Publication number
CN101118901B
CN101118901B CN2007101290251A CN200710129025A CN101118901B CN 101118901 B CN101118901 B CN 101118901B CN 2007101290251 A CN2007101290251 A CN 2007101290251A CN 200710129025 A CN200710129025 A CN 200710129025A CN 101118901 B CN101118901 B CN 101118901B
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chip
carrier
sealing
structure unit
packaging structure
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CN101118901A (en
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李玉麟
翁国良
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Advanced Semiconductor Engineering Inc
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Advanced Semiconductor Engineering Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Wire Bonding (AREA)

Abstract

The invention discloses a stacked chip packaging structure and a manufacturing process thereof. The stacked chip packaging structure comprises a first packaging structure unit and a second packaging structure unit. The first package structure unit includes a carrier, a chip, a first sealant, a wiring element, a conductive element and a second sealant. The second sealant covers the surface of the carrier, the chip, the first sealant, the wiring element and the conductive element, and exposes the top of the conductive element. The second packaging structure unit is electrically connected to the wiring element through the conductive element. The invention uses the wiring element to connect the two packaging structure units, thereby saving the available space of the loader and improving the integration level. The molding compound covers the whole bearing surface, so the shape is not influenced by the size and the configuration of the chip, and the molding compound mold of the manufacturing process can be used for the size and the configuration of various chips.

Description

堆叠式芯片封装结构及其制程 Stacked chip packaging structure and its manufacturing process

【技术领域】【Technical field】

本发明是有关于一种半导体元件封装结构(semiconductor device package)及其制程,且特别是有关于一种堆叠式(stacked type)芯片封装结构及其制程。The present invention relates to a semiconductor device package and its manufacturing process, and in particular to a stacked type chip packaging structure and its manufacturing process.

【背景技术】【Background technique】

在高度信息化社会的今天,多媒体应用的市场不断地急速扩张,集成电路(integrated circuit,IC)封装技术也需配合电子装置的数字化、网络化、区域连接化以及使用人性化的趋势而发展。为了实现上述的要求,必须强化电子元件的高速处理化、多功能化、集成化、小型轻量化以及低价化等多方面的需求,于是集成电路封装技术也跟着向微型化、高密度化发展。除了现有常见的球栅阵列式封装(Ball Grid Array,BGA)、芯片比例封装(Chip-ScalePackage,CSP)、倒装芯片封装(Flip Chip package,F/C package)之外,近来更提出堆叠式的芯片封装技术,其通过堆叠多个芯片封装单元,以提高整体的封装密度。In today's highly informationized society, the market for multimedia applications continues to expand rapidly, and integrated circuit (IC) packaging technology also needs to develop in line with the trend of digitalization, networking, regional connectivity, and user-friendly electronic devices. In order to achieve the above requirements, it is necessary to strengthen the requirements of high-speed processing, multi-function, integration, small size, light weight and low price of electronic components, so the integrated circuit packaging technology is also developing towards miniaturization and high density. . In addition to the existing common ball grid array package (Ball Grid Array, BGA), chip scale package (Chip-Scale Package, CSP), flip chip package (Flip Chip package, F/C package), recently proposed stacking A chip packaging technology, which stacks multiple chip packaging units to increase the overall packaging density.

图1为现有的一种堆叠式芯片封装结构的剖面示意图。请参照图1所示,现有的堆叠式芯片封装结构100包括第一封装单元110、第二封装单元120及多个焊球(solder ball)130,其中焊球130配置在第一封装单元110的芯片114的外围,用来连接第一封装单元110和第二封装单元120。然而,由于焊球130配置在芯片114外围,会占据线路基板112的可用面积,从而导致堆叠式芯片封装结构100的体积无法进一步缩小。此外,芯片114通过打线技术连接到线路基板112,且仅在线路基板112的局部区域上形成封胶118,以覆盖芯片114和导线116。这样,将不利于封胶模具的设计,也就是说封胶模具必须对应于封胶118的尺寸与位置进行设计,而无法共享于不同尺寸设计的封装单元的制程。FIG. 1 is a schematic cross-sectional view of a conventional stacked chip packaging structure. 1, the existing stacked chip package structure 100 includes a first package unit 110, a second package unit 120 and a plurality of solder balls (solder ball) 130, wherein the solder ball 130 is configured in the first package unit 110 The periphery of the chip 114 is used to connect the first packaging unit 110 and the second packaging unit 120 . However, since the solder balls 130 are disposed on the periphery of the chip 114 and occupy the available area of the circuit substrate 112 , the volume of the stacked chip package structure 100 cannot be further reduced. In addition, the chip 114 is connected to the circuit substrate 112 by wire bonding, and the encapsulant 118 is only formed on a partial area of the circuit substrate 112 to cover the chip 114 and the wires 116 . In this way, it is not conducive to the design of the sealing mold, that is to say, the sealing mold must be designed corresponding to the size and position of the sealing compound 118 , and cannot be shared in the manufacturing process of the packaging units designed in different sizes.

图2是现有的另一种堆叠式芯片封装结构的剖面示意图。请参照图2,堆叠式芯片封装结构200与图1的堆叠式芯片封装结构100类似,他们的差异处在于:堆叠式芯片封装结构200的第一封装单元210的封胶212是覆盖于整个线路基板216上,并暴露出多个配置在线路基板216上且围绕芯片218的焊球214。第二封装单元220固定在第一封装单元210上方,并透过焊球230及焊球214电性连接到第一封装单元210。FIG. 2 is a schematic cross-sectional view of another existing stacked chip packaging structure. Please refer to FIG. 2, the stacked chip packaging structure 200 is similar to the stacked chip packaging structure 100 in FIG. The substrate 216 exposes a plurality of solder balls 214 disposed on the circuit substrate 216 and surrounding the chip 218 . The second packaging unit 220 is fixed above the first packaging unit 210 and is electrically connected to the first packaging unit 210 through the solder ball 230 and the solder ball 214 .

图2的封胶212覆盖在整个线路基板216上,这种设计有助于提高封胶模具的兼容率。然而,由于焊球214及焊球230仍然配置在芯片218的外围,同样占据了线路基板216的可用面积,限制了堆叠式芯片封装结构200的尺寸。The sealant 212 in FIG. 2 covers the entire circuit substrate 216 , and this design helps to improve the compatibility of the sealant mold. However, since the solder balls 214 and the solder balls 230 are still disposed on the periphery of the chip 218 , they also occupy the available area of the circuit substrate 216 and limit the size of the stacked chip package structure 200 .

图3是现有的又一种堆叠式芯片封装结构的剖面示意图。请参照图3,在堆叠式芯片封装结构300中,改为在第一封装单元310上配置一线路基板312b,并使线路基板312b通过导线316电性连接到第一封装单元310的线路基板312a。此外,第二封装单元320通过多个焊球330连接到线路基板312b,以使第一封装单元310与第二封装单元320通过线路基板312b相互电性连接。此种设计可以解决需占用线路基板312a的空间来配置焊球的问题,但由于需形成特定形状的封胶318,以包覆导线316,并暴露出线路基板312b的表面,以供焊球330配置,因此同样会有封胶膜具无法共享的问题,而必须对应于封装单元的外型来设计不同的封胶膜具。FIG. 3 is a schematic cross-sectional view of yet another conventional stacked chip packaging structure. 3, in the stacked chip package structure 300, a circuit substrate 312b is arranged on the first packaging unit 310 instead, and the circuit substrate 312b is electrically connected to the circuit substrate 312a of the first packaging unit 310 through wires 316. . In addition, the second package unit 320 is connected to the circuit substrate 312b through a plurality of solder balls 330, so that the first package unit 310 and the second package unit 320 are electrically connected to each other through the circuit substrate 312b. This design can solve the problem of occupying the space of the circuit substrate 312a to arrange the solder balls. However, it is necessary to form a special-shaped sealant 318 to cover the wires 316 and expose the surface of the circuit substrate 312b for the solder balls 330. configuration, so there is also the problem that the sealing film cannot be shared, and different sealing films must be designed corresponding to the appearance of the packaging unit.

【发明内容】【Content of invention】

本发明的主要目的在于提供一种堆叠式芯片封装结构,用以改善前述现有芯片封装结构技术的缺点。The main purpose of the present invention is to provide a stacked chip packaging structure to improve the above-mentioned shortcomings of the existing chip packaging structure technology.

本发明的另一目的在于提供一种芯片封装结构,可应用于上述堆叠式芯片封装结构,以解决现有芯片封装结构技术的问题。Another object of the present invention is to provide a chip packaging structure, which can be applied to the above-mentioned stacked chip packaging structure, so as to solve the problems of the existing chip packaging structure technology.

本发明的又一目的在于提供一种芯片封装结构的制程,用以制作上述芯片封装结构。Another object of the present invention is to provide a manufacturing process of a chip packaging structure, which is used to manufacture the above-mentioned chip packaging structure.

为实现上述或是其它目的,本发明采用如下技术方案:一种芯片封装结构,包括一承载器(carrier)、一芯片、一第一封胶、一布线元件(circuitdistribution device)、多个导电元件以及一第二封胶。承载器具有一承载面及相对的背面。芯片配置于承载面上,并电性连接到承载器。第一封胶设置在承载面上,并覆盖芯片。布线元件配置于第一封胶上,并电性连接至承载器,且在第一封胶表面上方提供多个接垫(ball pad)。导电元件分别配置于这些接垫上。第二封胶覆盖承载面,并包覆芯片、第一封胶、布线元件与导电元件,且暴露出导电元件的顶部。In order to achieve the above or other objects, the present invention adopts the following technical solutions: a chip packaging structure, including a carrier (carrier), a chip, a first sealant, a wiring element (circuit distribution device), a plurality of conductive elements And a second sealant. The carrier has a carrying surface and an opposite back. The chip is disposed on the bearing surface and electrically connected to the bearing. The first sealant is arranged on the bearing surface and covers the chip. The wiring element is disposed on the first encapsulant and is electrically connected to the carrier, and a plurality of ball pads are provided above the surface of the first encapsulant. The conductive elements are respectively configured on the pads. The second encapsulant covers the bearing surface, covers the chip, the first encapsulant, the wiring element and the conductive element, and exposes the top of the conductive element.

本发明更提出一种堆叠式芯片封装结构,主要是以上述的芯片封装结构作为一封装结构单元,使其与另一封装结构单元相互堆叠而成。其中,两封装结构单元通过上述的导电元件与布线元件相互电性连接。The present invention further proposes a stacked chip packaging structure, which is mainly formed by using the above-mentioned chip packaging structure as a packaging structural unit and stacking it with another packaging structural unit. Wherein, the two packaging structural units are electrically connected to each other through the above-mentioned conductive elements and wiring elements.

在本发明的一实施例中,上述的承载器或布线元件分别例如为一线路基板。In an embodiment of the present invention, the above-mentioned carrier or wiring element is, for example, a circuit substrate, respectively.

在本发明的一实施例中,上述第一封装结构单元还可包括多个导电凸块,且芯片以倒装芯片方式通过这些导电凸块电性连接到承载器。In an embodiment of the present invention, the above-mentioned first package structure unit may further include a plurality of conductive bumps, and the chip is electrically connected to the carrier through these conductive bumps in a flip-chip manner.

在本发明的一实施例中,上述第一封装结构单元还可包括多条第一导线,其连接于芯片与承载器之间,并被第一封胶所包覆。In an embodiment of the present invention, the above-mentioned first package structure unit may further include a plurality of first wires connected between the chip and the carrier, and covered by the first encapsulant.

在本发明的一实施例中,上述第一封装结构单元还可包括多条第二导线,其连接于布线元件与承载器之间,并被第二封胶所包覆。In an embodiment of the present invention, the above-mentioned first package structure unit may further include a plurality of second wires connected between the wiring element and the carrier, and covered by the second encapsulant.

在本发明的一实施例中,上述导电元件例如是多个第一焊球。此外,布线元件上的接垫例如是呈阵列配置,对应地,第二封装结构单元可为一球栅阵列式封装结构单元或是其它具有阵列式接脚的封装结构元件。In an embodiment of the present invention, the above-mentioned conductive elements are, for example, a plurality of first solder balls. In addition, the pads on the wiring element are arranged in an array, for example, and correspondingly, the second package structure unit can be a ball grid array package structure unit or other package structure components with array pins.

在本发明的一实施例中,上述第一封装结构单元还可包括多个第二焊球,配置于承载器的背面。这些第二焊球通过承载器电性连接至芯片与布线元件。In an embodiment of the present invention, the first package structure unit may further include a plurality of second solder balls disposed on the back of the carrier. The second solder balls are electrically connected to the chip and the wiring elements through the carrier.

本发明更提出一种芯片封装结构制程,其包括下列步骤。首先,提供一承载器,此承载器具有一承载面与相对的背面。接着,配置一芯片于承载面上,并使芯片电性连接至承载器。然后,形成一第一封胶于承载面上,使其覆盖芯片。之后,配置一布线元组件于第一封胶上,以在第一封胶表面上方提供多个接垫。接着,配置多个导电元件于这些接垫上。然后,电性连接布线元件至承载器。之后,覆盖一第二封胶于承载面,以通过第二封胶包覆芯片、第一封胶、布线元件与这些导电元件,且第二封胶暴露出导电元件的顶部。The present invention further provides a chip packaging structure manufacturing process, which includes the following steps. Firstly, a carrier is provided, and the carrier has a carrying surface and an opposite back surface. Next, a chip is arranged on the carrying surface, and the chip is electrically connected to the carrier. Then, a first sealant is formed on the carrying surface to cover the chip. Afterwards, a wiring component is disposed on the first molding compound to provide a plurality of pads above the surface of the first molding compound. Next, a plurality of conductive elements are disposed on the pads. Then, electrically connect the wiring element to the carrier. Afterwards, a second encapsulant is covered on the carrying surface, so as to cover the chip, the first encapsulant, the wiring elements and these conductive elements through the second encapsulant, and the second encapsulant exposes the top of the conductive element.

在本发明之一实施例中,例如是通过倒装芯片接合制程或是打线接合制程来电性连接芯片与承载器。In one embodiment of the present invention, for example, the chip and the carrier are electrically connected through a flip chip bonding process or a wire bonding process.

在本发明之一实施例中,上述配置导电元件的步骤例如是配置一第一焊球于每一接垫上。In an embodiment of the present invention, the step of arranging the conductive element is, for example, arranging a first solder ball on each pad.

在本发明之一实施例中,上述的芯片封装结构制程还包括配置多个第二焊球于承载器的背面,使第二焊球通过承载器电性连接至芯片与布线元件。In an embodiment of the present invention, the above-mentioned chip packaging structure manufacturing process further includes disposing a plurality of second solder balls on the back of the carrier, so that the second solder balls are electrically connected to the chip and the wiring elements through the carrier.

在本发明之一实施例中,上述的芯片封装结构制程还包括配置一第二封装结构单元于第一封装结构单元上,使第二封装结构单元通过导电元件电性连接至布线元件,以形成一堆叠式芯片封装结构。In one embodiment of the present invention, the above-mentioned chip packaging structure manufacturing process further includes disposing a second packaging structure unit on the first packaging structure unit, so that the second packaging structure unit is electrically connected to the wiring element through a conductive element, so as to form A stacked chip packaging structure.

基于上述,本发明将布线元件配置于芯片上方,以连接两封装结构单元,因此有助于节省封装结构单元的承载器上的可用空间,从而提高堆叠式芯片封装结构的集成度。此外,由于封胶覆盖承载器的整个承载面,且其外型不受芯片的尺寸及配置的影响,因此本发明的芯片封装结构制程所使用的封胶模具可适用于各种不同的芯片尺寸及配置。Based on the above, the present invention arranges the wiring element above the chip to connect the two packaging units, thus helping to save the available space on the carrier of the packaging unit, thereby improving the integration of the stacked chip packaging structure. In addition, since the encapsulant covers the entire carrying surface of the carrier, and its appearance is not affected by the size and configuration of the chip, the encapsulant mold used in the chip packaging structure manufacturing process of the present invention can be applied to various chip sizes and configuration.

为让本发明之上述和其它目的、特征和优点能更明显易懂,下文特举较佳实施例,并配合所附图式,作详细说明如下。In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings.

【附图说明】【Description of drawings】

图1是现有的一种堆叠式芯片封装结构的剖面示意图。FIG. 1 is a schematic cross-sectional view of a conventional stacked chip packaging structure.

图2是现有的另一种堆叠式芯片封装结构的剖面示意图。FIG. 2 is a schematic cross-sectional view of another existing stacked chip packaging structure.

图3是现有的又一种堆叠式芯片封装结构的剖面示意图。FIG. 3 is a schematic cross-sectional view of yet another conventional stacked chip packaging structure.

图4是本发明一实施例的芯片封装结构的剖面示意图。FIG. 4 is a schematic cross-sectional view of a chip packaging structure according to an embodiment of the present invention.

图5是本发明一实施例的堆叠式芯片封装结构的剖面示意图。FIG. 5 is a schematic cross-sectional view of a stacked chip package structure according to an embodiment of the present invention.

图6A至图6I绘示上述的芯片封装结构的制作流程。6A to 6I illustrate the manufacturing process of the above-mentioned chip package structure.

【具体实施方式】【Detailed ways】

图4为本发明一实施例的芯片封装结构的剖面示意图。请参照图4,本实施例的芯片封装结构400包括一承载器410、一芯片420、一第一封胶430、一布线元件440、多个导电元件450、一第二封胶460。承载器410具有一承载面412与相对的背面414。芯片420设置于承载面412上,并电性连接至承载器410。第一封胶430设置在承载面412上,并覆盖芯片420。布线元件440设置于第一封胶430上,并电性连接至承载器410,且布线元件440在第一封胶430表面上方提供多个接垫442。导电元件450分别设置于接垫442上。第二封胶460覆盖承载面412,并包覆芯片420、第一封胶430、布线元件440与导电元件450,且暴露出导电元件450的顶部。FIG. 4 is a schematic cross-sectional view of a chip packaging structure according to an embodiment of the present invention. Referring to FIG. 4 , the chip packaging structure 400 of this embodiment includes a carrier 410 , a chip 420 , a first encapsulant 430 , a wiring element 440 , a plurality of conductive elements 450 , and a second encapsulant 460 . The carrier 410 has a carrying surface 412 and an opposite back surface 414 . The chip 420 is disposed on the carrying surface 412 and electrically connected to the carrier 410 . The first encapsulant 430 is disposed on the carrying surface 412 and covers the chip 420 . The wiring element 440 is disposed on the first encapsulant 430 and electrically connected to the carrier 410 , and the wiring element 440 provides a plurality of pads 442 above the surface of the first encapsulant 430 . The conductive elements 450 are respectively disposed on the pads 442 . The second encapsulant 460 covers the carrying surface 412 and covers the chip 420 , the first encapsulant 430 , the wiring element 440 and the conductive element 450 , and exposes the top of the conductive element 450 .

在本实施例中,布线元件440与承载器410可分别为一线路基板或一印刷电路板(printed circuit board,PCB)。然而,本发明并不限制布线元件440与承载器410的型态。在其它实施例中,布线元件440亦可为其它可在第一封胶430表面上方提供多个接垫442的封装结构元件,而承载器410也可以是其它适于承载芯片420的封装结构元件。此外,在本实施例中,导电元件450例如为焊球。然而,在本发明的其它实施例中,导电元件450也可以是导电块或其它类型的导体。In this embodiment, the wiring element 440 and the carrier 410 can be a circuit substrate or a printed circuit board (printed circuit board, PCB) respectively. However, the present invention does not limit the types of the wiring element 440 and the carrier 410 . In other embodiments, the wiring element 440 can also be other packaging structural elements that can provide a plurality of pads 442 above the surface of the first encapsulant 430, and the carrier 410 can also be other packaging structural elements suitable for carrying the chip 420. . In addition, in this embodiment, the conductive element 450 is, for example, a solder ball. However, in other embodiments of the present invention, the conductive element 450 may also be a conductive block or other types of conductors.

承上述,由于本实施例的芯片封装结构400利用设置在芯片420上方的布线元件440来使与外界电性连接的导电元件450集中于芯片420上方,因此有助于节省承载器410上的可用面积,以提高芯片封装结构400的集成度,并可使承载器410有足够的承载面积来承载较大尺寸的芯片420。此外,由于本实施例的芯片封装结构400的第二封胶460覆盖整个承载面412,且其外型不受芯片420的尺寸及配置的影响,因此用以形成第二封胶460的封胶模具可适用于各种不同的芯片420尺寸及配置。也就是说,单一封胶模具便可用以制造多种规格的芯片封装结构400,这样便无须针对多种规格而订制多种对应的封胶模具,因而能使芯片封装结构400的制造成本降低。Based on the above, since the chip packaging structure 400 of this embodiment utilizes the wiring elements 440 arranged above the chip 420 to concentrate the conductive elements 450 electrically connected to the outside world above the chip 420, it helps to save available space on the carrier 410. area, so as to improve the integration degree of the chip package structure 400, and enable the carrier 410 to have enough carrying area to carry a larger-sized chip 420. In addition, since the second sealant 460 of the chip packaging structure 400 of this embodiment covers the entire bearing surface 412, and its appearance is not affected by the size and configuration of the chip 420, the sealant used to form the second sealant 460 Dies are available for various chip 420 sizes and configurations. That is to say, a single sealing mold can be used to manufacture the chip packaging structure 400 of various specifications, so that there is no need to order a variety of corresponding sealing molds for various specifications, thereby reducing the manufacturing cost of the chip packaging structure 400 .

在本实施例中,芯片420是以打线方式通过多条第一导线470与承载器410电性连接,其中这些第一导线470被第一封胶430所包覆。然而,在本发明的另一实施例中,芯片420也可以倒装芯片方式通过多个导电凸块(未图示)电性连接至承载器410。此外,在本实施例中,布线元件440可以打线方式通过多条第二导线480电性连接至承载器410,其中这些第二导线480被第二封胶460所包覆。In this embodiment, the chip 420 is electrically connected to the carrier 410 through a plurality of first wires 470 by wire bonding, wherein the first wires 470 are covered by the first encapsulant 430 . However, in another embodiment of the present invention, the chip 420 can also be electrically connected to the carrier 410 through a plurality of conductive bumps (not shown) in a flip-chip manner. In addition, in this embodiment, the wiring element 440 can be electrically connected to the carrier 410 through a plurality of second wires 480 by wire bonding, wherein the second wires 480 are covered by the second encapsulant 460 .

在本实施例中,接垫442呈阵列配置于布线元件440的上表面。然而,在本发明的其它实施例中,这些接垫442也可以呈其它形式而配置于第一封胶430表面上方。另外,芯片封装结构400可更包括多个焊球490,配置于承载器410的背面414。焊球490通过承载器410电性连接至芯片420与布线元件440,且芯片封装结构400可透过这些焊球490与其它电子零件(如主机板)电性连接。In this embodiment, the pads 442 are arranged in an array on the upper surface of the wiring element 440 . However, in other embodiments of the present invention, the pads 442 may also be arranged in other forms on the surface of the first encapsulant 430 . In addition, the chip package structure 400 may further include a plurality of solder balls 490 disposed on the back surface 414 of the carrier 410 . The solder balls 490 are electrically connected to the chip 420 and the wiring element 440 through the carrier 410 , and the chip package structure 400 can be electrically connected to other electronic components (such as a motherboard) through the solder balls 490 .

本发明更提出一种堆叠式芯片封装结构,主要是以上述的芯片封装结构作为一封装结构单元,使其与另一封装结构单元相互堆叠而成。图5为本发明一实施例的堆叠式芯片封装结构的剖面示意图。请参照图5,本实施例的堆叠式芯片封装结构500包括一第一封装结构单元510以及一第二封装结构单元520。第一封装结构单元510为上述的芯片封装结构400。第二封装结构单元520配置于第一封装结构单元510上,并通过导电元件450电性连接至布线元件440。具体而言,在本实施例中,第二封装结构单元520为一球栅阵列式封装结构单元,其球形接脚(spherical lead)522与呈阵列配置的导电元件450对应连接。此外,由于布线元件440上具有相当足够的面积以配置导电元件450,因此可适用于高集成度的封装结构单元之间的接合。The present invention further proposes a stacked chip packaging structure, which is mainly formed by using the above-mentioned chip packaging structure as a packaging structural unit and stacking it with another packaging structural unit. FIG. 5 is a schematic cross-sectional view of a stacked chip package structure according to an embodiment of the present invention. Referring to FIG. 5 , the stacked chip package structure 500 of this embodiment includes a first package structure unit 510 and a second package structure unit 520 . The first packaging structure unit 510 is the above-mentioned chip packaging structure 400 . The second packaging structure unit 520 is disposed on the first packaging structure unit 510 and is electrically connected to the wiring element 440 through the conductive element 450 . Specifically, in this embodiment, the second package structure unit 520 is a ball grid array package structure unit, and its spherical leads (spherical leads) 522 are correspondingly connected to the conductive elements 450 arranged in an array. In addition, since the wiring element 440 has a sufficient area for disposing the conductive element 450 , it is suitable for bonding between highly integrated packaging structural units.

图6A至图6I绘示上述的芯片封装结构的制作流程,主要包括下列步骤。首先,请参照图6A所示,提供上述的承载器410。接着,请参照图6B所示,将芯片420配置于承载器410的承载面412上,并使芯片420电性连接至承载器410。本实施例进行一打线接合制程,以使芯片420通过多条第一导线470电性连接至承载器410。当然,本发明的其它实施例也可以采用倒装芯片接合或其它方式使芯片420电性连接至承载器410。6A to 6I illustrate the manufacturing process of the above-mentioned chip packaging structure, which mainly includes the following steps. First, as shown in FIG. 6A , the above-mentioned carrier 410 is provided. Next, as shown in FIG. 6B , the chip 420 is disposed on the carrying surface 412 of the carrier 410 , and the chip 420 is electrically connected to the carrier 410 . In this embodiment, a wire bonding process is performed so that the chip 420 is electrically connected to the carrier 410 through a plurality of first wires 470 . Certainly, other embodiments of the present invention may also use flip-chip bonding or other methods to electrically connect the chip 420 to the carrier 410 .

然后,请参照图6C所示,形成第一封胶430于承载器410的承载面412上,使其覆盖芯片420。举例来说,可以模具来形成第一封胶430。在本实施例中,所形成的第一封胶430还包覆第一导线470。Then, as shown in FIG. 6C , a first sealant 430 is formed on the carrying surface 412 of the carrier 410 so as to cover the chip 420 . For example, a mold can be used to form the first sealant 430 . In this embodiment, the formed first encapsulant 430 also covers the first wire 470 .

之后,请参照图6D所示,将布线元件440配置于第一封胶430上,以在第一封胶430表面上方提供多个接垫442。接着,请参照图6E所示,在接垫442上形成导电元件450。具体而言,本实施例在每一接垫442上配置一焊球。然而,本发明的其它实施例也可在每一接垫442上形成一导电块或其它类型的导体。Afterwards, as shown in FIG. 6D , the wiring element 440 is disposed on the first encapsulant 430 to provide a plurality of pads 442 above the surface of the first encapsulant 430 . Next, as shown in FIG. 6E , a conductive element 450 is formed on the pad 442 . Specifically, in this embodiment, a solder ball is disposed on each pad 442 . However, other embodiments of the present invention may also form a conductive block or other types of conductors on each pad 442 .

然后,请参照图6F所示,电性连接布线元件440至承载器410。本实施例中,例如是进行一打线接合制程以使布线元件440通过第二导线480电性连接至承载器410。Then, as shown in FIG. 6F , electrically connect the wiring element 440 to the carrier 410 . In this embodiment, for example, a wire bonding process is performed to electrically connect the wiring element 440 to the carrier 410 through the second wire 480 .

之后,请参照图6G所示,将第二封胶460覆盖于承载器410的承载面412上,以使第二封胶460包覆芯片420、第一封胶430、布线元件440与导电元件450,并使第二封胶460暴露出导电元件450的顶部。举例来说,本实施例可以一封胶模具来形成第二封胶460,其中由于第二封胶460覆盖整个承载面412,其外型不受芯片420的尺寸及配置的影响,因此封胶模具可适用于各种不同的芯片420尺寸及配置,而具有较高的制程兼容性。此外,在本实施例中,所形成的第二封胶460也会包覆第二导线480。至此,完成芯片封装结构400或第一封装结构单元510的制作。Afterwards, as shown in FIG. 6G, the second sealant 460 is covered on the carrying surface 412 of the carrier 410, so that the second sealant 460 covers the chip 420, the first sealant 430, the wiring elements 440 and the conductive elements. 450 , and make the second sealant 460 expose the top of the conductive element 450 . For example, in this embodiment, the second sealant 460 can be formed by sealing a mold. Since the second sealant 460 covers the entire bearing surface 412, its appearance is not affected by the size and configuration of the chip 420, so the sealant The mold is applicable to various sizes and configurations of the chip 420 and has high process compatibility. In addition, in this embodiment, the formed second sealant 460 also covers the second wire 480 . So far, the fabrication of the chip package structure 400 or the first package structure unit 510 is completed.

本实施例的芯片封装结构制程可进一步包括图6H与图6I所示的步骤,以形成一堆叠式的芯片封装结构。承接上述步骤之后,请参照图6H所示,将第二封装结构单元520配置于第一封装结构单元510上,使第二封装结构单元520通过这些导电元件450电性连接至布线元件440。然后,请参照图6I所示,本实施例还可以选择配置多个焊球490于承载器410的背面414,使这些焊球490通过承载器410电性连接至芯片420与布线元件440。至此,大致完成堆叠式芯片封装结构500的制作。The chip packaging structure manufacturing process of this embodiment may further include the steps shown in FIG. 6H and FIG. 6I to form a stacked chip packaging structure. After the above steps, as shown in FIG. 6H , the second package structure unit 520 is disposed on the first package structure unit 510 , so that the second package structure unit 520 is electrically connected to the wiring element 440 through the conductive elements 450 . Then, as shown in FIG. 6I , in this embodiment, a plurality of solder balls 490 can also be optionally arranged on the back surface 414 of the carrier 410 , so that these solder balls 490 are electrically connected to the chip 420 and the wiring element 440 through the carrier 410 . So far, the fabrication of the stacked chip packaging structure 500 is roughly completed.

综上所述,本发明将布线元件配置于芯片上方,以连接两封装结构单元,因此有助于节省封装结构单元的承载器上的可用空间,进而提高堆叠式芯片封装结构的集成度,并可使承载器有足够的承载面积来承载较大尺寸的芯片。再者,由于布线元件上具有相当足够的面积以配置大量的导电元件,因此有助于提高封装结构单元的接脚数。此外,由于本发明的堆叠式芯片封装结构采用封胶覆盖整个承载器表面的设计,因此封胶的外型不受芯片的尺寸及配置的影响。也就是说,本发明芯片封装结构制程中所使用的封胶模具可适用于各种不同的芯片封装结构设计,具有较高的兼容性,并有助于节省生产成本。In summary, the present invention arranges the wiring elements above the chip to connect the two packaging structural units, thus helping to save the available space on the carrier of the packaging structural unit, thereby improving the integration of the stacked chip packaging structure, and The carrier can have enough carrying area to carry larger size chips. Furthermore, since there is enough area on the wiring element to dispose a large number of conductive elements, it is helpful to increase the number of pins of the package structure unit. In addition, since the stacked chip packaging structure of the present invention adopts the design that the encapsulant covers the entire surface of the carrier, the appearance of the encapsulant is not affected by the size and configuration of the chips. That is to say, the sealing mold used in the chip packaging structure manufacturing process of the present invention is applicable to various chip packaging structure designs, has high compatibility, and helps to save production costs.

Claims (10)

1. stack type chip packaging structure, comprise: one first encapsulating structure unit and one second encapsulating structure unit, the described first encapsulating structure unit comprises a carrier, one chip and one first sealing, wherein carrier has a loading end and opposing backside surface, chip configuration is on this loading end and be electrically connected to this carrier, first sealing is disposed on this loading end and covers this chip, the described second encapsulating structure configuration of cells is on this first encapsulating structure unit, it is characterized in that: described stack type chip packaging structure also comprises a wire element, a plurality of conducting elements and one second sealing, this wire element is disposed in this first sealing, be electrically connected to this carrier and provide a plurality of connection pads in this first sealing surface, described a plurality of conducting element is disposed at respectively on those connection pads, described second sealing covers this loading end, and coat this chip, this first sealing, this wire element and those conducting elements, and this second sealing exposes the top of those conducting elements, the described second encapsulating structure unit has a plurality of spherical pins, and those spherical pins and those conducting elements by this first encapsulating structure unit are electrically connected to this wire element in this second sealing.
2. stack type chip packaging structure as claimed in claim 1 is characterized in that: at least one in this carrier and this wire element is a circuit base plate.
3. stack type chip packaging structure as claimed in claim 1 is characterized in that: this first encapsulating structure unit also comprises a plurality of conductive projections, and this chip is electrically connected to this carrier with flip chip by those conductive projections.
4. stack type chip packaging structure as claimed in claim 1, it is characterized in that: this first encapsulating structure unit also comprises many leads, at least a portion is connected between this chip and this carrier and/or between this wire element and this carrier in these leads, this first sealing of lead that is connected between this chip and this carrier coats, and the lead that is connected between this wire element and this carrier is coated by this second sealing.
5. stack type chip packaging structure as claimed in claim 1 is characterized in that: those conducting elements comprise a plurality of first soldered balls.
6. as claim 1,2,3,4 or 5 described stack type chip packaging structures, it is characterized in that: those connection pads are array configurations.
7. stack type chip packaging structure as claimed in claim 1 is characterized in that: this second encapsulating structure unit is a spherical grid array type encapsulating structure unit.
8. as claim 1 or 7 described stack type chip packaging structures, it is characterized in that: this first encapsulating structure unit also comprises a plurality of second soldered balls, those second soldered balls are disposed at the back side of this carrier, are electrically connected to this chip and this wire element by this carrier.
9. chip-packaging structure, comprise a carrier, one chip and one first sealing, wherein said carrier has a loading end and opposing backside surface, chip configuration is on this loading end and be electrically connected to this carrier, first sealing is disposed on this loading end and covers this chip, it is characterized in that: described chip-packaging structure also comprises: a wire element, a plurality of conducting elements and one second sealing, wherein wire element is disposed in this first sealing, this wire element is electrically connected to this carrier and provides a plurality of connection pads in this first sealing surface, a plurality of conducting elements are disposed at respectively on those connection pads, second sealing covers this loading end, and coat this chip, this first sealing, this wire element and those conducting elements, and this second sealing exposes the top of those conducting elements, electrically connects a plurality of spherical pin that another encapsulating structure unit of this chip-packaging structure top configuration is had with correspondence.
10. chip-packaging structure processing procedure comprises:
One carrier is provided, and this carrier has a loading end and opposing backside surface;
Dispose a chip on this loading end, and make this chip be electrically connected to this carrier;
Form one first sealing on this loading end, make it cover chip;
Dispose a wire element in this first sealing, to provide a plurality of connection pads in this first sealing surface;
Dispose a plurality of conducting elements on those connection pads;
Electrically connect this wire element to this carrier;
Cover one second sealing in this loading end, with by this this chip of second sealant covers, this first sealing, this wire element and those conducting elements, and this second sealing exposes the top of those conducting elements, to constitute one first encapsulating structure unit; And
Dispose one second encapsulating structure unit in this top, first encapsulating structure unit, this second encapsulating structure unit has a plurality of spherical pins, and those spherical pins and those conductive components by this first encapsulating structure unit are electrically connected to this cloth line component in this second sealing.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW227553B (en) * 1992-08-03 1994-08-01 Chinese Health Inst Method of making 2,3- dihydrogen-1,4,5,8- tetrahydroxy -9,10 anthryl diketone

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