CN101101369A - A Method of Accurately Determining the Coaxial Reference of Laser Transceiver by Using Zernike Coefficient - Google Patents
A Method of Accurately Determining the Coaxial Reference of Laser Transceiver by Using Zernike Coefficient Download PDFInfo
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Abstract
运用Zernike系数精确确定激光收发同轴基准的方法,本发明涉及收发共用同一天线的光学系统发射光路与接收光路的同轴确定方法。它克服了现有方法因角棱镜加工精度和难度的限制不能满足高精度应用需求的缺陷。它包括如下步骤:由干涉仪发射激光光束,该光束依次通过被测光学系统的发射光路组件、分光镜和光学天线后出射;光学天线的出口外垂直其光轴设置一平面镜,使从光学天线出射到平面镜表面上的激光光束沿原光路返回到干涉仪中;调整平面镜时,监视干涉仪内的干涉条纹,使Zernike小于λ/10;入射平面镜的激光光束,经平面镜反射后,经过分光镜的反射,入射到被测光学系统的接收光路组件中,以此光束为基准调整接收光路组件的光轴。
The invention relates to a method for accurately determining the coaxial reference of laser transceivers by using Zernike coefficients. The invention relates to a method for determining the coaxiality of a transmitting optical path and a receiving optical path of an optical system where the transmitting and receiving optical systems share the same antenna. It overcomes the defect that the existing method cannot meet the high-precision application requirements due to the limitation of the machining accuracy and difficulty of the corner prism. It includes the following steps: the laser beam is emitted by the interferometer, and the beam passes through the emitting optical path assembly of the optical system under test, the beam splitter and the optical antenna in turn, and then exits; a plane mirror is arranged outside the exit of the optical antenna perpendicular to its optical axis, so that from the optical antenna The laser beam emitted onto the surface of the plane mirror returns to the interferometer along the original optical path; when adjusting the plane mirror, monitor the interference fringes in the interferometer so that Zernike is less than λ/10; the laser beam incident on the plane mirror, after being reflected by the plane mirror, passes through the beam splitter The reflection of the light beam is incident into the receiving optical path assembly of the optical system under test, and the optical axis of the receiving optical path assembly is adjusted based on this light beam.
Description
技术领域technical field
本发明涉及收发共用同一天线的光学系统发射光路与接收光路的同轴确定方法。The invention relates to a method for determining the coaxiality of the transmitting optical path and the receiving optical path of an optical system that share the same antenna for transmitting and receiving.
背景技术Background technique
在研制收发共用同一天线的光学系统时,发射光路与接收光路的同轴度是被严格要求的重要参数之一。现有的调整方法中,由发射光路经天线输出光场,利用角棱镜将其沿原路反射回接收天线进入接收光路,以此入射光为基准轴,对接收光路进行调整,保证发射、接收光路的同轴性。由于角棱镜加工精度的限制,发射光场并不严格按原路返回,使得发射、接收光路同轴度的精度仅能达到数十μrad,不能满足高精度应用需求。另一方面由于大孔径角棱镜较难加工,因此该方法在大孔径天线光学系统中难以得到应用。When developing an optical system that transmits and receives the same antenna, the coaxiality of the transmitting optical path and the receiving optical path is one of the important parameters that are strictly required. In the existing adjustment method, the light field is output from the transmitting light path through the antenna, and the angular prism is used to reflect it back to the receiving antenna along the original path and enter the receiving light path. Taking the incident light as the reference axis, the receiving light path is adjusted to ensure the transmission and reception. The coaxiality of the optical path. Due to the limitation of the processing accuracy of the corner prism, the emitted light field does not return strictly according to the original path, so that the coaxiality accuracy of the emitted and received optical paths can only reach tens of μrad, which cannot meet the requirements of high-precision applications. On the other hand, because the large-aperture angular prism is difficult to process, this method is difficult to be applied in the large-aperture antenna optical system.
发明内容Contents of the invention
本发明的目的是提供一种运用Zernike系数精确确定激光收发同轴基准的方法,以克服现有的方法因角棱镜加工精度和难度的限制不能满足高精度应用需求的缺陷。它包括如下步骤:一、由干涉仪1发射激光光束,该光束依次透过被测光学系统2的发射光路组件2-1、分光镜2-2和光学天线2-3后出射;二、在光学天线2-3的出口外垂直其光轴设置一平面镜3,平面镜3安装在调整机构4上,通过调整机构4对平面镜3相对于入射激光光束的垂直度进行调整,以使从光学天线2-3出射到平面镜3表面上的激光光束沿原光路返回到干涉仪1中;利用调整机构4调整平面镜3时,监视干涉仪1内的干涉条纹,使得波前误差多项式倾斜系数Zernike小于λ/10;三、入射平面镜3的激光光束,经平面镜3反射后,经过分光镜2-2的反射,入射到被测光学系统2的接收光路组件2-4中,以此光束为基准调整接收光路组件2-4的光轴。The purpose of the present invention is to provide a method for accurately determining the coaxial reference of laser transmitting and receiving by using Zernike coefficients, so as to overcome the defect that the existing method cannot meet the high-precision application requirements due to the limitation of the processing accuracy and difficulty of the corner prism. It includes the following steps: 1. The laser beam is emitted by the
由于本发明的方法没有使用加工精度和难度都较高的角棱镜,克服了现有技术的缺陷。本发明提出一种高精度激光发射/接收系统基准轴确定技术,利用干涉仪、高精度调整机构、高精度平面镜,通过精确测量Zernike倾斜系数,依据激光发射光路组件的光轴确定激光接收光路组件的光轴基准,将激光接收光路的基准轴与发射光路的同轴度提高到0.1μrad的数量级,并可将此技术广泛应用于具有大孔径光学天线的光收发系统中。Since the method of the present invention does not use a corner prism with high processing precision and difficulty, it overcomes the defects of the prior art. The present invention proposes a high-precision laser emission/reception system reference axis determination technology, using an interferometer, a high-precision adjustment mechanism, and a high-precision plane mirror to accurately measure the Zernike tilt coefficient, and determine the laser receiving optical path assembly according to the optical axis of the laser emitting optical path assembly The optical axis reference can improve the coaxiality between the reference axis of the laser receiving optical path and the emitting optical path to the order of 0.1μrad, and this technology can be widely used in optical transceiver systems with large aperture optical antennas.
附图说明Description of drawings
图1是本发明的结构示意图。Fig. 1 is a structural schematic diagram of the present invention.
具体实施方式Detailed ways
具体实施方式一:下面结合图1具体说明本实施方式。本实施方式由如下步骤组成:一、由干涉仪1发射激光光束,该光束依次透过被测光学系统2的发射光路组件2-1、分光镜2-2和光学天线2-3后出射;二、在光学天线2-3的出口外垂直其光轴设置一平面镜3,平面镜3安装在调整机构4上,通过调整机构4对平面镜3相对于入射激光光束的垂直度进行调整,以使从光学天线2-3出射到平面镜3表面上的激光光束沿原光路返回到干涉仪1中;利用调整机构4调整平面镜3时,监视干涉仪1内的干涉条纹,使得波前误差多项式倾斜系数Zernike小于λ/10;三、入射平面镜3的激光光束,经平面镜3反射后,经过分光镜2-2的反射,入射到被测光学系统2的接收光路组件2-4中,以此光束为基准调整接收光路组件2-4的光轴,即可保证被测光学系统2的发射光路与接收光路的不同轴度小于(λ/10)/φ。φ为光学天线2-3的有效口径,λ为激光光束的波长。Specific Embodiment 1: The present embodiment will be specifically described below with reference to FIG. 1 . This embodiment is composed of the following steps: 1. The laser beam is emitted by the
当平面镜3的光轴与光学天线2-3的发射光路光轴不重合时,波前误差的多项式系数Zernike倾斜量不为零,干涉仪1的条纹将呈现左右、上下不对称状态。When the optical axis of the
监视干涉仪1条纹的同时调节调整机构4,使得波前误差多项式倾斜系数Zernike小于λ/10,可保证平面镜3的光轴与发射光路光轴夹角小于(λ/10)/φ,入射平面镜3的激光光束,经平面镜3反射后,入射被测光学系统2的接收光路,以此光束为基准调整被测光学系统2的接收光路即可保证其发射与接收系统的不同轴度小于(λ/10)/φ。While monitoring the fringes of the
使用时可以选择口径为φ300毫米的平面镜作为反射镜,面型精度RMS为1/70λ。可以选择美国ZYGO公司生产的GHI-4”HS型干涉仪发射参考光束,并探测反射波阵面与参考波阵面的干涉条纹。ZYGO公司生产的干涉仪具有CCD探测器,可将干涉条纹图像直接输入带有数据采集卡的计算机,进行图像处理。ZYGO公司生产的干涉仪主要参数为:口径φ300mm,工作波长632.8nm,可以选择水平旋转、俯仰旋转的二维高精度调整架作为调整机构4对平面镜的角度进行调整。When using it, you can choose a flat mirror with a diameter of φ300mm as the reflector, and the surface accuracy RMS is 1/70λ. You can choose the GHI-4”HS interferometer produced by ZYGO Company of the United States to emit the reference beam and detect the interference fringes between the reflected wavefront and the reference wavefront. The interferometer produced by ZYGO Company has a CCD detector, which can convert the interference fringe image Direct input to the computer with data acquisition card for image processing. The main parameters of the interferometer produced by ZYGO company are: diameter φ300mm, working wavelength 632.8nm, two-dimensional high-precision adjustment frame with horizontal rotation and pitch rotation can be selected as the adjustment mechanism4 Adjust the angle of the plane mirror.
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CN103603653A (en) * | 2013-11-25 | 2014-02-26 | 国家电网公司 | Method and device for measuring inclination of drilled hole |
CN106855396A (en) * | 2015-12-09 | 2017-06-16 | 财团法人金属工业研究发展中心 | Optical measurement system, method for improving interference image quality and measuring cylindricity |
CN108956098A (en) * | 2018-07-27 | 2018-12-07 | 莱特巴斯光学仪器(镇江)有限公司 | A kind of disappear tilting gearing and method in the test of plano-convex non-spherical lens wavefront |
CN109100733A (en) * | 2018-07-05 | 2018-12-28 | 南京先进激光技术研究院 | Laser radar apparatus error detecting facility, method and device |
CN109358321A (en) * | 2018-09-27 | 2019-02-19 | 中国船舶工业系统工程研究院 | A kind of method of adjustment that laser transmitting-receiving is coaxial |
CN114112318A (en) * | 2020-09-01 | 2022-03-01 | 南京先进激光技术研究院 | On-line detection method and detection device for optical mirror surface |
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US5187539A (en) * | 1991-09-23 | 1993-02-16 | Rockwell International Corporation | Mirror surface characteristic testing |
JP2002357508A (en) * | 2001-05-31 | 2002-12-13 | Olympus Optical Co Ltd | Lens inspection method |
JP2006135111A (en) * | 2004-11-05 | 2006-05-25 | Canon Inc | Wavefront aberration measuring apparatus, exposure apparatus, and device manufacturing method |
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CN103603653A (en) * | 2013-11-25 | 2014-02-26 | 国家电网公司 | Method and device for measuring inclination of drilled hole |
CN106855396A (en) * | 2015-12-09 | 2017-06-16 | 财团法人金属工业研究发展中心 | Optical measurement system, method for improving interference image quality and measuring cylindricity |
CN109100733A (en) * | 2018-07-05 | 2018-12-28 | 南京先进激光技术研究院 | Laser radar apparatus error detecting facility, method and device |
CN108956098A (en) * | 2018-07-27 | 2018-12-07 | 莱特巴斯光学仪器(镇江)有限公司 | A kind of disappear tilting gearing and method in the test of plano-convex non-spherical lens wavefront |
CN108956098B (en) * | 2018-07-27 | 2020-08-28 | 莱特巴斯光学仪器(镇江)有限公司 | Inclination eliminating device and method for wavefront test of plano-convex aspheric lens |
CN109358321A (en) * | 2018-09-27 | 2019-02-19 | 中国船舶工业系统工程研究院 | A kind of method of adjustment that laser transmitting-receiving is coaxial |
CN109358321B (en) * | 2018-09-27 | 2023-05-16 | 中国船舶工业系统工程研究院 | Adjustment method for laser transceiving coaxiality |
CN114112318A (en) * | 2020-09-01 | 2022-03-01 | 南京先进激光技术研究院 | On-line detection method and detection device for optical mirror surface |
CN114112318B (en) * | 2020-09-01 | 2024-11-22 | 南京先进激光技术研究院 | An optical mirror online detection method and detection device |
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