CN101101347A - Optical filter and method for manufacturing color filter - Google Patents
Optical filter and method for manufacturing color filter Download PDFInfo
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Abstract
Description
技术领域technical field
本发明是有关于一种滤光片的制造方法,且特别是有关于一种能够增进膜厚均匀度(thickness uniformity)的彩色滤光片的制造方法。The present invention relates to a method for manufacturing an optical filter, and in particular relates to a method for manufacturing a color filter capable of improving thickness uniformity.
背景技术Background technique
由彩色滤光片的配置可使液晶显示器进行全彩化显示。近来,一种利用喷墨印刷(inkjet printing)形成彩色滤光片的方法已被发展出来。此制造方法首先于基板上形成黑矩阵,其具有多个开口。然后,进行喷墨印刷工艺以将滤光材料(红色、绿色或蓝色等)注入到黑矩阵的开口中。继之,以烘烤或是加热板(hot plate)加热的方式,进行热处理以使滤光材料干燥并固化。The configuration of the color filter can make the liquid crystal display display in full color. Recently, a method of forming color filters using inkjet printing has been developed. In this manufacturing method, a black matrix is firstly formed on a substrate, which has a plurality of openings. Then, an inkjet printing process is performed to inject filter materials (red, green or blue, etc.) into the openings of the black matrix. Then, heat treatment is performed by baking or heating on a hot plate to dry and solidify the filter material.
喷墨印刷(Ink-jet printing)的技术可直接将滤光材料涂布于基板上,以制成彩色滤光片。其好处在于,不需利用掩膜(mask)或是网版(stencil)即可以制作彩色滤光片。喷墨印刷技术让彩色滤光片的制作流程变得简易,且不会因需使用其它酸碱溶液而衍生相关问题。Ink-jet printing technology can directly coat the filter material on the substrate to make a color filter. The advantage is that the color filter can be produced without using a mask or a stencil. Inkjet printing technology simplifies the production process of color filters, and does not cause related problems due to the need to use other acid-base solutions.
图1为已知利用喷墨印刷方式所制作的彩色滤光片的剖面示意图。请参考图1,已知彩色滤光片100包括基板110以及配置于基板110上的黑矩阵120。其中,黑矩阵120具有多个开口P,且开口P内填有滤光材料130。值得注意的是,滤光材料130是利用喷墨印刷(Ink-jet printing)的方式填入开口P的。FIG. 1 is a schematic cross-sectional view of a known color filter produced by inkjet printing. Referring to FIG. 1 , a known
填入滤光材料130时,喷墨印刷后墨水尚未干燥前的液面常会超过黑矩阵的高度,容易造成滤光材料130溢流而交互混染的问题,因此黑矩阵120上常会进行疏水处理(hydrophobic treatment),以提高滤光材料130在黑矩阵120上的表面张力而防止滤光材料130交互混染。然而,如图1所示,在表面张力的作用下,干燥后的滤光材料130会呈现中央突起、周围凹陷的厚度均匀度不佳的情况。当彩色滤光片100具有不平坦的表面时,在后续制造过程中所形成的其它膜层的阶梯覆盖性(step coverage)较差,因而需要再多加一层平坦层(over coat)于黑矩阵120以及滤光材料130上,以使后续形成的膜层能够具有较佳的阶梯覆盖性。另外,将彩色滤光片100应用在液晶显示器时,由于滤光材料130膜厚不均匀而容易导致显示影像色度不均匀(mura)的现象。因此,滤光材料130干燥之后的厚度均匀性一直是彩色滤光片100的制造过程中备受重视的一环。When filling the filter material 130, the liquid level after inkjet printing before the ink is dry often exceeds the height of the black matrix, which may easily cause the filter material 130 to overflow and cross-contaminate. Therefore, the
发明内容Contents of the invention
本发明提供一种滤光片的制造方法,以解决彩色滤光片中滤光材料的膜厚均匀度不佳的问题。The invention provides a method for manufacturing an optical filter to solve the problem of poor film thickness uniformity of the filter material in the color filter.
本发明提出一种滤光片的制造方法。此方法包括以下步骤。首先,提供一基板,并于基板上形成一黑矩阵,其中黑矩阵具有多个阵列排列的开口。接着,形成一滤光材料于开口内,滤光材料包括一溶剂以及与溶剂混合的一染料。随后,进行一热处理,并减缓热处理进行时,溶剂的挥发速率,以使滤光材料固化。The invention provides a method for manufacturing an optical filter. This method includes the following steps. Firstly, a substrate is provided, and a black matrix is formed on the substrate, wherein the black matrix has a plurality of openings arranged in an array. Next, a filter material is formed in the opening, the filter material includes a solvent and a dye mixed with the solvent. Subsequently, a heat treatment is performed, and the volatilization rate of the solvent is slowed down during the heat treatment, so that the filter material is cured.
本发明的一实施例中,上述的进行热处理例如是先对滤光材料进行预烘烤,以使滤光材料成形,再对滤光材料进行后烘烤,以使滤光材料固化。其中,预烘烤例如是在高于常压的环境(如1~5atm)下进行。另外,后烘烤可以是在常压的环境下、高于常压的环境下或是低于常压的环境下进行。同时,预烘烤的工艺温度例如是介于80℃至120℃之间,而较佳为90℃。后烘烤的工艺温度例如是介于190℃至250℃之间,而较佳为230℃。In an embodiment of the present invention, the aforementioned heat treatment is, for example, pre-baking the filter material to shape the filter material, and then post-baking the filter material to cure the filter material. Wherein, the pre-baking is, for example, carried out in an environment higher than normal pressure (such as 1-5 atm). In addition, the post-baking can be performed under normal pressure environment, higher than normal pressure environment or lower than normal pressure environment. Meanwhile, the pre-baking process temperature is, for example, between 80° C. and 120° C., preferably 90° C. The post-baking process temperature is, for example, between 190°C and 250°C, and preferably 230°C.
本发明的一实施例中,上述的预烘烤是于一腔体中进行,且通入腔体内的气体包括溶剂的气态组成物,或是包括一非反应气体,为不与该滤光材料反应的气体。举例来说,通入腔体内的气体包括空气、氮气、惰性气体及其组合。In an embodiment of the present invention, the above-mentioned pre-baking is carried out in a cavity, and the gas introduced into the cavity includes a gaseous composition of a solvent, or includes a non-reactive gas that does not interact with the filter material Reactive gas. For example, the gas introduced into the cavity includes air, nitrogen, inert gas and combinations thereof.
本发明的一实施例中,上述的溶剂包括丙二醇单甲基醚乙酯(propylene glycol monomethyl ether acetate,PGMEA)。In an embodiment of the present invention, the solvent includes propylene glycol monomethyl ether acetate (PGMEA).
本发明的一实施例中,形成滤光材料的方法包括喷墨印刷。In an embodiment of the invention, the method for forming the filter material includes inkjet printing.
本发明的一实施例中,在形成黑矩阵于基板上之后,更包括对黑矩阵进行一疏水处理,其中疏水处理包括等离子工艺。In an embodiment of the present invention, after the black matrix is formed on the substrate, it further includes performing a hydrophobic treatment on the black matrix, wherein the hydrophobic treatment includes a plasma process.
本发明的一实施例中,上述的滤光材料固化后具有一平坦表面。In an embodiment of the present invention, the above-mentioned filter material has a flat surface after curing.
一种彩色滤光片的制造方法,包括以下步骤。首先,提供一基板。接着,形成黑矩阵于基板上,其中黑矩阵具有多个阵列排列的第一组开口、第二组开口与第三组开口。然后,形成第一滤光材料、第二滤光材料、第三滤光材料分别于第一组开口、第二组开口与第三组开口内,且第一滤光材料、第二滤光材料、第三滤光材料包括溶剂与染料。之后,进行热处理,并减缓热处理进行时,溶剂的挥发速率,以使第一、第二与第三滤光材料固化。A method for manufacturing a color filter, comprising the following steps. First, a substrate is provided. Next, a black matrix is formed on the substrate, wherein the black matrix has a plurality of first group openings, second group openings and third group openings arranged in an array. Then, the first filter material, the second filter material and the third filter material are respectively formed in the first group of openings, the second group of openings and the third group of openings, and the first filter material, the second filter material , The third filter material includes solvent and dye. Afterwards, heat treatment is performed, and the volatilization rate of the solvent is slowed down during the heat treatment, so that the first, second and third filter materials are cured.
本发明的一实施例中,上述的第一、第二与第三滤光材料包括蓝色、绿色与红色滤光材料。In an embodiment of the present invention, the above-mentioned first, second and third filter materials include blue, green and red filter materials.
本发明的一实施例中,上述的热处理包括在高于常压的环境下进行。In an embodiment of the present invention, the above-mentioned heat treatment is carried out under an environment higher than normal pressure.
本发明的一实施例中,上述的第一、第二与第三滤光材料固化后具有平坦表面。In an embodiment of the present invention, the above-mentioned first, second and third filter materials have flat surfaces after curing.
由于本发明在进行预烘烤步骤以使滤光材料成形的过程中,由高于常压的环境或其它方式以减缓滤光材料中溶剂的挥发速率,因此滤光材料在固化的过程中仍具有流动性,而使固化后的滤光材料具有平坦的表面与均匀的膜厚。Because the present invention slows down the volatilization rate of the solvent in the filter material by an environment higher than normal pressure or other means during the pre-baking step so that the filter material is formed, the filter material is still in the process of curing. It has fluidity, so that the cured filter material has a flat surface and uniform film thickness.
附图说明Description of drawings
图1为已知利用喷墨印刷方式所制作的彩色滤光片的剖面示意图。FIG. 1 is a schematic cross-sectional view of a known color filter produced by inkjet printing.
图2A至图2D绘示本发明的一实施例的彩色滤片的制造方法。2A to 2D illustrate a manufacturing method of a color filter according to an embodiment of the present invention.
附图标号:Figure number:
100:彩色滤光片100: color filter
110、210:基板110, 210: Substrate
120、220:黑矩阵120, 220: black matrix
130、230:滤光材料130, 230: filter material
200:滤光片200: filter
240:喷嘴240: Nozzle
250:预烘烤250: pre-baked
P:开口P: open
具体实施方式Detailed ways
图2A到图2D绘示本发明的一实施例的滤光片的制造方法。本实施例的滤光片的制造方法包括下列步骤。首先,请先参照图2A,提供一基板210,并且在基板210上形成黑矩阵220。黑矩阵220具有多个开口P,各开口P成阵列排列,而黑矩阵220例如是树脂黑矩阵或是金属黑矩阵。2A to 2D illustrate a manufacturing method of an optical filter according to an embodiment of the present invention. The manufacturing method of the optical filter of this embodiment includes the following steps. First, referring to FIG. 2A , a
在形成黑矩阵220之后,例如可以于黑矩阵220表面进行疏水处理,以避免后续工艺当中滤光材料溢流的情形。一般而言,疏水处理的方式例如是进行一等离子工艺以将疏水性物质形成于黑矩阵220的表面。After forming the
接着,请参照图2B,于黑矩阵220的多个开口P内形成滤光材料230。在本实施例中,形成滤光材料230的方式包括进行一喷墨印刷工艺,以将滤光材料230由喷嘴240填入开口P中。具体而言,滤光材料230包括溶剂以及与此溶剂混合的染料,其中溶剂例如是丙二醇单甲基醚乙酯(PGMEA)或其它类似的溶剂,而染料例如是具有红色、绿色或蓝色等不同颜色的染料。Next, referring to FIG. 2B , a
由于黑矩阵220表面已进行疏水处理,当滤光材料230填入开口P时,滤光材料230与黑矩阵220表面之间的接口张力较大。因此,不同颜色的滤光材料230不易溢出而发生互相混染的情形,同时,经过疏水处理后的黑矩阵220容易使得滤光材料230呈现出中央突起而周围凹陷的不均匀表面(如图2B所绘示)。Since the surface of the
然后,进行热处理步骤,并减缓热处理步骤进行时,溶剂的挥发速率。请参照图2C,热处理步骤例如是先对滤光材料230进行预烘烤250,以使滤光材料230成形。值得一提的是,预烘烤250的步骤例如是在高于常压(如1~5atm)的环境下进行,且预烘烤250的工艺温度例如是介于80℃至120℃之间,而较佳的工艺温度例如是90℃左右。Then, a heat treatment step is performed, and the volatilization rate of the solvent is slowed down during the heat treatment step. Please refer to FIG. 2C , the heat treatment step is, for example, pre-baking 250 the
在本发明的一实施例中,预烘烤250可于一腔体中进行,为了增加此腔体中的压力,本实施例可采用通入气体的方式以使腔体中的压力高于常压。通入腔体内的气体可以是溶剂的气态组成物,或是包括一非反应气体,为不与该滤光材料230反应的气体。详言之,以本实施例而言,腔体内例如可通入丙二醇单甲基醚乙酯的气体、空气、氮气,或是惰性气体等。本发明可通入不与滤光材料230反应的气体,以提高腔体内的气体总压(total pressure),也可通入溶剂的气态组成物,以提高腔体内溶剂的气体分压(gas partial pressure),同样可达到减缓溶剂的挥发速率。In one embodiment of the present invention, the pre-baking 250 can be carried out in a cavity. In order to increase the pressure in the cavity, this embodiment can adopt the method of feeding gas to make the pressure in the cavity higher than normal. pressure. The gas introduced into the chamber can be a gaseous component of a solvent, or include a non-reactive gas, which is a gas that does not react with the
在通有气体的腔体的中进行预烘烤250时,气体所施与滤光材料230的压力会使溶剂挥发的速率减缓,且当气体施与的压力越大,则溶剂的挥发速率越慢。具体来说,在滤光材料230未完全成形之前,溶剂的挥发速率较为缓慢(与常压状况相较),使得滤光材料230可保有流动性。因此,滤光材料230成形后,可以得到较为平整的表面及相当均匀的膜厚(如图2C所示)以及平坦的表面。When pre-baking 250 is carried out in a cavity with gas, the pressure applied by the gas to the
另外,热处理步骤还包括于预烘烤250之后,再对滤光材料230进行后烘烤(未绘示),以将滤光材料230完全干燥与固化,而形成滤光片200。由于,预烘烤250步骤中,滤光材料230的形状已固定,因此不论在何种压力之下进行后烘烤步骤,都不影响滤光材料230的外观及其平坦程度。因此,后烘烤可以在常压、高于常压或是低于常压的环境下进行。此外,后烘烤(未绘示)的工艺温度例如是介于190℃至250℃之间,而较佳是230℃左右,以使溶剂挥发,而形成滤光片200(如图2D所示)。In addition, the heat treatment step also includes post-baking (not shown) the
另外,在其它实施例中,可以应用上述方法以制作彩色滤光片。其中,黑矩阵220的开口P可以为阵列排列的第一组开口、第二组开口与第三组开口。当黑矩阵220的开口P可以为阵列排列的第一组开口、第二组开口与第三组开口时,可以在各个开口中对应地形成第一滤光材料、第二滤光材料、第三滤光材料。第一滤光材料、第二滤光材料、第三滤光材料可以是蓝色、绿色与红色滤光材料。并且,固化第一、第二与第三滤光材料时所进行的热处理步骤例如是在高于常压(如1~5atm)的环境下进行,以使第一、第二与第三滤光材料固化后具有平坦表面。In addition, in other embodiments, the above method can be applied to fabricate color filters. Wherein, the openings P of the
一般来说,以喷墨印刷的方式形成滤光片200时,滤光材料230中溶剂的选择常是重要的课题。举例来说,若选择沸点较低的材质作为溶剂,则溶剂挥发速率较快,因此干燥滤光材料230所需的温度较低且工艺时间也较短。不过,若要制作大型彩色滤光片,须进行多次填入滤光材料230的步骤,则较早填入开口P的滤光材料230可能在未进行热处理步骤前就已部份干燥,而造成制造过程不易控制。为了改善上述问题,可以同时使用多个多头喷嘴,以缩短填入滤光材料230的时间。然而,同时使用多个多头喷嘴却又使工艺设备的成本增加。Generally speaking, when the
若使用沸点较高的材质作为溶剂,溶剂挥发速率较慢,却不易发生干燥不均匀的问题,因此不需采用较为昂贵的多头喷嘴而节省设备成本。特别的是,依据本发明所提出的实施例,溶剂的挥发速率较慢有助于使滤光片200有更平坦的表面。相较之下,为了制造有平坦表面的滤光片200,滤光材料230的溶剂较佳是采用沸点较高的材质。举例来说,丙二醇单甲基醚乙酯的沸点约为145℃~146℃,即属于沸点较高的溶剂,其可作为本实施例所选用的溶剂。If a material with a higher boiling point is used as the solvent, the solvent volatilizes at a slower rate, but the problem of uneven drying is less likely to occur. Therefore, it is not necessary to use more expensive multi-head nozzles to save equipment costs. In particular, according to the proposed embodiment of the present invention, the slower evaporation rate of the solvent helps to make the
综上所述,本发明的彩色滤光片的制造过程中,滤光材料成形时,溶剂的挥发速率受到压力的影响而减缓,使得干燥后的滤光材料具有平坦的表面及均匀的膜厚。因此,彩色滤光片应用于液晶显示器时,不会发生色度不均匀的现象。另外,本发明的制造方法所制的彩色滤光片的平坦度佳,不需为了后续膜层的制作而进行平坦层的覆盖,因此可以减少制造成本及简化制作流程。In summary, during the manufacturing process of the color filter of the present invention, when the filter material is formed, the volatilization rate of the solvent is slowed down by the influence of pressure, so that the dried filter material has a flat surface and a uniform film thickness. . Therefore, when the color filter is applied to a liquid crystal display, uneven chromaticity will not occur. In addition, the flatness of the color filter produced by the manufacturing method of the present invention is good, and there is no need to cover the flat layer for subsequent film layer manufacturing, so the manufacturing cost can be reduced and the manufacturing process can be simplified.
虽然本发明已以具体实施例揭示,但其并非用以限定本发明,任何本领域的技术人员,在不脱离本发明的构思和范围的前提下所作出的等同组件的置换,或依本发明专利保护范围所作的等同变化与修饰,皆应仍属本专利涵盖之范畴。Although the present invention has been disclosed with specific embodiments, it is not intended to limit the present invention. Any person skilled in the art can make replacements of equivalent components without departing from the concept and scope of the present invention, or replace them according to the present invention. The equivalent changes and modifications made in the scope of patent protection shall still fall within the scope of this patent.
Claims (23)
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103210324A (en) * | 2010-11-04 | 2013-07-17 | 大日本印刷株式会社 | Method for producing color filter |
WO2017015980A1 (en) * | 2015-07-27 | 2017-02-02 | 深圳市华星光电技术有限公司 | Low-temperature polysilicon array substrate and manufacturing method therefor and display device |
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JP2002156520A (en) * | 2000-11-22 | 2002-05-31 | Canon Inc | Color filter and method for manufacturing the same, liquid crystal element using the same |
JP4202680B2 (en) * | 2001-06-15 | 2008-12-24 | 日油株式会社 | Ink-jet ink composition for color filter, method for producing ink composition, and method for producing color filter |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103210324A (en) * | 2010-11-04 | 2013-07-17 | 大日本印刷株式会社 | Method for producing color filter |
CN103210324B (en) * | 2010-11-04 | 2015-11-25 | 大日本印刷株式会社 | The manufacture method of colored filter |
WO2017015980A1 (en) * | 2015-07-27 | 2017-02-02 | 深圳市华星光电技术有限公司 | Low-temperature polysilicon array substrate and manufacturing method therefor and display device |
US10312130B2 (en) | 2015-07-27 | 2019-06-04 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | LTPS array substrate, method for manufacturing the same, and display device |
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