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CN101071999B - Motion superimposed linear ultrasonic motor and electric excitation method - Google Patents

Motion superimposed linear ultrasonic motor and electric excitation method Download PDF

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CN101071999B
CN101071999B CN2007100209623A CN200710020962A CN101071999B CN 101071999 B CN101071999 B CN 101071999B CN 2007100209623 A CN2007100209623 A CN 2007100209623A CN 200710020962 A CN200710020962 A CN 200710020962A CN 101071999 B CN101071999 B CN 101071999B
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stator
motion
mover
ultrasonic motor
slider
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CN101071999A (en
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赵淳生
李玉宝
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JIANGSU FENGKE UTRASONIC MOTORS TECHNOLOGY Co Ltd
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Nanjing University of Aeronautics and Astronautics
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Abstract

一种运动叠加式直线型超声电机及电激励方式,属超声电机。该电机包括:定子、动子。所述定子是环形弹性体(2),弹性体外部上下两端面有均匀分布的驱动齿,内部上下两端面分别粘接压电陶瓷片(10)。所述动子包括下滑块(3)、上滑块(7)和上滑条(6);利用压缩弹簧(9)提供的弹簧力将可动上滑条和固定的下滑条(1)分别压在定子两侧驱动齿面上。上下两层压电陶瓷分别激励定子的两个的振动模态叠加形成定子表面行波,使得驱动端面上各质点产生椭圆运动来推动动子连续直线运动。上滑块的运动作为电机的输出运动,是上滑块相对与定子的相对运动和定子的自行运动的叠加。该直线超声电机可输出大力矩、高速度、高效率的直线运动。

Figure 200710020962

The invention relates to a motion superimposed linear ultrasonic motor and an electric excitation mode, belonging to the ultrasonic motor. The motor includes: a stator and a mover. The stator is an annular elastic body (2), and the upper and lower ends of the outer surface of the elastic body have uniformly distributed driving teeth, and the upper and lower ends of the inner surface are respectively bonded with piezoelectric ceramic sheets (10). The mover includes a lower slider (3), an upper slider (7) and an upper slider (6); the spring force provided by the compression spring (9) will move the upper slider and the fixed lower slider (1) Press them on the driving tooth surfaces on both sides of the stator respectively. The upper and lower layers of piezoelectric ceramics respectively excite the two vibration modes of the stator to superimpose to form traveling waves on the surface of the stator, so that the particles on the driving end surface generate elliptical motion to push the mover to move continuously in a straight line. The movement of the upper slider, as the output movement of the motor, is the superposition of the relative movement of the upper slider relative to the stator and the self-motion of the stator. The linear ultrasonic motor can output linear motion with high torque, high speed and high efficiency.

Figure 200710020962

Description

运动叠加式直线型超声电机及电激励方式 Motion superimposed linear ultrasonic motor and electric excitation method

技术领域:Technical field:

本发明的运动叠加式直线型超声电机及电激励方式,属超声电机领域。The motion superimposed linear ultrasonic motor and electric excitation method of the invention belong to the field of ultrasonic motors.

背景技术:Background technique:

超声电机是利用压电陶瓷的逆压电效应和超声振动的新型动力输出装置。直线型超声电机是超声电机的一大分类。其中,行波型直线超声电机属于直线型超声电机的一种。目前,行波型直线超声电机采用直梁式或环梁式结构,环梁式行波型直线超声电机利用粘接在梁上的压电陶瓷激出环梁表面的行波来驱动压在梁上的动子作直线运动。直梁式行波型直线超声电机是利用直梁两端的振子分别激振和吸振形成梁表面的行波来驱动滑块运动。这两种结构的行波型直线超声电机上的梁体积都比较大,电机驱动动子时必须使整个梁都产生振动,功率消耗大,效率低,采用单面驱动,速度低,力矩小。Ultrasonic motor is a new type of power output device that utilizes the inverse piezoelectric effect of piezoelectric ceramics and ultrasonic vibration. Linear ultrasonic motors are a major category of ultrasonic motors. Among them, the traveling-wave linear ultrasonic motor is a kind of linear ultrasonic motor. At present, the traveling wave linear ultrasonic motor adopts a straight beam or ring beam structure. The ring beam traveling wave linear ultrasonic motor uses piezoelectric ceramics bonded to the beam to excite the traveling wave on the surface of the ring beam to drive the moving wave pressed on the beam. The mover moves in a straight line. The straight-beam traveling-wave linear ultrasonic motor uses the oscillators at both ends of the straight beam to excite and absorb vibration respectively to form traveling waves on the surface of the beam to drive the movement of the slider. The beams on the traveling-wave linear ultrasonic motors of these two structures are relatively large. When the motor drives the mover, the entire beam must vibrate, resulting in high power consumption and low efficiency. Single-sided driving has low speed and small torque.

发明内容:Invention content:

本发明的目的在于研制一种尺寸小、结构简单、力矩大、速度快、效率高、响应速度快的运动叠加式直线型超声电机。The purpose of the present invention is to develop a motion superimposed linear ultrasonic motor with small size, simple structure, large torque, fast speed, high efficiency and fast response.

本发明的运动叠加式直线型超声电机,包括定子和动子及压电陶瓷。其特点是:所述定子包括环形弹性体和压电陶瓷片,环形弹性体上下两外侧面分别有均匀分布的驱动齿,弹性体内部上下面分别粘接有压电陶瓷,用于激励弹性体产生振动。动子由两个滑条组成;利用压缩弹簧的弹簧力将滑条压在定子驱动齿面上;利用相位差π/2的同频率正弦信号同时激励上下两层压电陶瓷来分别激发定子的两个的振动模态,这两个振动模态的叠加形成定子表面行波使得驱动端面上各质点产生椭圆运动来推动动子连续直线运动。其中,下滑条固定,定子下驱动端面驱动其自身作自行式直线运动;与此同时定子的上驱动端面驱动上滑条作相同方向的直线运动。电机上滑条的输出运动则是这两个运动的叠加。当激励信号相反时,即可实现动子的反方向直线运动。The motion superimposed linear ultrasonic motor of the present invention includes a stator, a mover and piezoelectric ceramics. Its characteristics are: the stator includes an annular elastic body and a piezoelectric ceramic sheet, the upper and lower outer surfaces of the annular elastic body have uniformly distributed driving teeth, and the upper and lower sides of the elastic body are respectively bonded with piezoelectric ceramics for exciting the elastic body. Vibrate. The mover is composed of two sliders; the slider is pressed against the drive tooth surface of the stator by the spring force of the compression spring; the upper and lower piezoelectric ceramics are simultaneously excited by the same frequency sinusoidal signal with a phase difference of π/2 to respectively excite the stator's Two vibration modes, the superposition of these two vibration modes forms a traveling wave on the surface of the stator, so that each particle on the driving end surface generates an elliptical motion to push the mover to move continuously in a straight line. Wherein, the lower slide is fixed, and the lower drive end face of the stator drives itself to make a self-propelled linear motion; meanwhile, the upper drive end face of the stator drives the upper slide bar to make a linear motion in the same direction. The output motion of the slider on the motor is the superposition of these two motions. When the excitation signals are opposite, the reverse linear motion of the mover can be realized.

该直线超声电机结构简单、尺寸小、输出力矩大、速度高、效率高。The linear ultrasonic motor has the advantages of simple structure, small size, large output torque, high speed and high efficiency.

附图说明:Description of drawings:

图1是运动叠加式直线超声电机结构示意图。图中标号名称:1.下滑条;2.弹性体;3.下滑块;4.螺栓;5.滑轮6.上滑条;7.上滑块;8.螺母;9.压缩弹簧;10.压电陶瓷片;11.中间块。Figure 1 is a schematic diagram of the structure of a motion superimposed linear ultrasonic motor. Label name in the figure: 1. Lower slider; 2. Elastic body; 3. Lower slider; 4. Bolt; 5. Pulley 6. Upper slider; 7. Upper slider; 8. Nut; 9. Compression spring; 10 . Piezoelectric ceramic sheet; 11. Middle block.

图2是运动叠加式直线超声电机行波形成原理图。其中图2(a)是弹性体的弯曲模态(一);图2(b)是弹性体的弯曲模态(二)。图2所示的两个弯曲模态在空间相位上相差π/2。Fig. 2 is a schematic diagram of the traveling wave formation of the motion superimposed linear ultrasonic motor. Among them, Figure 2(a) is the bending mode (1) of the elastic body; Figure 2(b) is the bending mode (2) of the elastic body. The two bending modes shown in Figure 2 are π/2 out of phase in space.

图3是压电陶瓷片极化分区示意图,其中图3(a)为定子上层压电陶瓷片极化示意图;Fig. 3 is a schematic diagram of the polarization partition of the piezoelectric ceramic sheet, wherein Fig. 3 (a) is a schematic diagram of the polarization of the piezoelectric ceramic sheet on the upper layer of the stator;

图3(b)为定子下层压电陶瓷片极化分区示意图。Figure 3(b) is a schematic diagram of the polarization partition of the piezoelectric ceramic sheet under the stator.

图4是定子驱动齿表面的运动轨迹示意图,其中图4(a)为定子驱动齿表面质点顺时针运动示意图;图4(b)为电机输出左向运动示意图;图4(c)为定子驱动齿表面质点逆时针运动示意图;图4(d)为电机输出向右运动示意图。Figure 4 is a schematic diagram of the motion trajectory of the surface of the stator driven teeth, in which Figure 4(a) is a schematic diagram of the clockwise movement of the surface particles of the stator driven teeth; Figure 4(b) is a schematic diagram of the leftward movement of the motor output; Figure 4(c) is a schematic diagram of the stator driven Schematic diagram of counterclockwise movement of tooth surface particles; Figure 4(d) is a schematic diagram of motor output moving to the right.

具体实施方式:Detailed ways:

一种运动叠加式直线型超声电机如图1所示。其特点:定子是带有均匀分布驱动齿的环形弹性体2,弹性体内部上下两面粘接有压电陶瓷片10,用于分别激励弹性体的两个弯曲模态。动子由下滑块3和上滑条6组成;下滑块用中间块11和螺栓4使其与弹性体及上滑块保持位置固定,压缩弹簧9的弹簧力使弹性体的带驱动齿的两个驱动面分别压在可动的上滑条和固定的下滑条上;由上下两层压电陶瓷片来分别激发定子的两个的振动模态,这两个振动模态的叠加形成弹性体表面行波使得下驱动端面上各质点产生椭圆运动来推动弹性体做直线运动,弹性体则带动上下滑块一体运动;同时弹性体上驱动端面上各质点的椭圆运动也推动上滑条做相同方向的直线运动,构成直线超声电机。反方向的运动则由相反的驱动信号来激励弹性体振动模态而实现。该电机采用两个驱动面的行波驱动,实现上下两种运动叠加,速度快,效率高。A motion superimposed linear ultrasonic motor is shown in Figure 1. Its features: the stator is an annular elastic body 2 with evenly distributed driving teeth, and the upper and lower sides of the elastic body are bonded with piezoelectric ceramic sheets 10, which are used to respectively excite the two bending modes of the elastic body. The mover is composed of the lower slider 3 and the upper slider 6; the lower slider uses the middle block 11 and the bolt 4 to keep its position fixed with the elastic body and the upper slider, and the spring force of the compression spring 9 makes the belt driving teeth of the elastic body The two driving surfaces of the stator are respectively pressed on the movable upper slider and the fixed lower slider; the two vibration modes of the stator are respectively excited by the upper and lower piezoelectric ceramic sheets, and the superposition of these two vibration modes forms a The traveling wave on the surface of the elastic body makes the particles on the lower driving end surface produce elliptical motion to push the elastic body to make a linear motion, and the elastic body drives the upper and lower sliders to move together; at the same time, the elliptical motion of each particle on the upper driving end surface of the elastic body also pushes the upper slider. Make a linear motion in the same direction to form a linear ultrasonic motor. Movement in the opposite direction is achieved by exciting the elastic vibration modes with opposite drive signals. The motor is driven by traveling waves on two driving surfaces to realize the superimposition of up and down motions, with fast speed and high efficiency.

结构设计原则:1、由压电陶瓷片的逆压电效应激发弹性体的两个振动模态,调节弹性体的结构尺寸应使这两个振动频率一致、并且空间相位差π/2。2、以相位差为π/2的两个同频率正弦信号分别激励上下两层压电陶瓷,激发弹性体的两个振动模态合成为弹性体上下端面的行波,在驱动齿端面各质点形成椭圆轨迹,驱动动子直线运动。Structural design principles: 1. The two vibration modes of the elastic body are excited by the inverse piezoelectric effect of the piezoelectric ceramic sheet, and the structural size of the elastic body should be adjusted so that the two vibration frequencies are consistent and the spatial phase difference is π/2.2 , Use two sinusoidal signals of the same frequency with a phase difference of π/2 to excite the upper and lower layers of piezoelectric ceramics respectively, and the two vibration modes of the excited elastic body are synthesized into traveling waves on the upper and lower end surfaces of the elastic body, which form The elliptical trajectory drives the mover to move in a straight line.

下面是一个运动叠加式直线型超声电机例子:The following is an example of a motion superimposed linear ultrasonic motor:

利用压电陶瓷片的逆压电效应d31激发出定子的两个振动模态。图1是该电机的结构示意图,它主要由定子、动子组成。定子是一个环形的金属弹性体,左右两端分别为半圆弧形,上下两端面为直线形,上下两端平面开有齿矩1mm、齿宽2mm、槽深1mm的均匀分布的驱动齿,用于放大驱动齿面的振幅。弹性体内部上下两个面粘接两层压电陶瓷片,分别用于激励定子的两个振动模态。整个定子尺寸为36mm×18mm×8mm。Two vibration modes of the stator are excited by using the inverse piezoelectric effect d31 of the piezoelectric ceramic sheet. Figure 1 is a schematic diagram of the structure of the motor, which is mainly composed of a stator and a mover. The stator is a ring-shaped metal elastic body. The left and right ends are semicircular arc-shaped respectively, and the upper and lower ends are linear. To amplify the amplitude of the driving tooth surface. Two layers of piezoelectric ceramic sheets are bonded to the upper and lower surfaces of the elastic body, which are respectively used to excite the two vibration modes of the stator. The whole stator size is 36mm×18mm×8mm.

电机定子驱动表面的运动轨迹分析见图4:The motion trajectory analysis of the motor stator drive surface is shown in Figure 4:

定子上下两层压电陶瓷片按图3(a)、(b)所示分区。压电陶瓷片箭头方向表示极化方向。其中上层压电陶瓷片为三个分区,其长度比例为3:4:3,用来激励定子的振动模态(一)(见图2(a));下层压电陶瓷片为两个分区,其长度相等,用来激励定子的振动模态(二)(见图2(b))。提供正弦激励信号E=Usinωt给上层压电陶瓷片的11、12和13三个面,同时提供余弦激励信号E=Ucosωt给下层压电陶瓷片的21和22两个面,同时激励定子的两个同频相位差π/2的振动模态,这两个模态合成定子的沿顺时针方向的行波。定子上下驱动齿面质点的运动为沿顺时针方向的椭圆运动1(见图4(a))。如图4(b)所示定子下驱动齿面驱动定子自身作向右的直线运动2,同时定子上驱动齿面驱动上滑条作相对定子向右的直线运动3,上滑条的绝对运动则是两个向右运动的叠加;提供余弦激励信号E=Ucos ωt给上层压电陶瓷片的11、12和13三个面,同时提供正弦弦激励信号E=Usin ωt给下层压电陶瓷片的21和22两个面,同时激励定子的两个同频相位差π/2的振动模态,这两个模态合成定子的沿逆时针方向的行波。定子上下驱动齿面质点的运动为沿逆时针方向的椭圆运动1(见图4(c))。如图4(d)定子下驱动齿面驱动定子作向左的直线运动2,同时定子上驱动齿面驱动上滑条作相对于定子的向左的直线运动3,上滑条的绝对运动则是两个向左运动的叠加。The upper and lower piezoelectric ceramic sheets of the stator are partitioned as shown in Figure 3(a) and (b). The arrow direction of the piezoelectric ceramic sheet indicates the polarization direction. Among them, the upper piezoelectric ceramic sheet is divided into three partitions, and its length ratio is 3:4:3, which is used to excite the vibration mode (1) of the stator (see Figure 2 (a)); the lower piezoelectric ceramic sheet is divided into two partitions , whose lengths are equal, are used to excite the stator in vibration mode (b) (see Fig. 2(b)). Provide the sinusoidal excitation signal E=Usinωt to the three surfaces 11, 12 and 13 of the upper piezoelectric ceramic sheet, and provide the cosine excitation signal E=Ucosωt to the two surfaces 21 and 22 of the lower piezoelectric ceramic sheet to simultaneously excite the two sides of the stator. Two vibration modes with the same frequency and phase difference of π/2, these two modes synthesize the traveling wave of the stator in the clockwise direction. The motion of the tooth surface particles driven by the stator up and down is an elliptical motion 1 in the clockwise direction (see Figure 4(a)). As shown in Figure 4(b), the lower drive tooth surface of the stator drives the stator itself to make a rightward linear motion 2, and at the same time, the upper drive tooth surface of the stator drives the upper slider to make a rightward linear movement relative to the stator 3, the absolute movement of the upper slider It is the superposition of two rightward movements; the cosine excitation signal E=Ucos ωt is provided to the three surfaces 11, 12 and 13 of the upper piezoelectric ceramic sheet, and the sinusoidal excitation signal E=Usin ωt is provided to the lower piezoelectric ceramic sheet The two surfaces 21 and 22 of the stator simultaneously excite two vibration modes of the same frequency and phase difference of π/2 of the stator, and these two modes synthesize the traveling wave of the stator in the counterclockwise direction. The motion of the tooth surface particles driven by the stator up and down is an elliptical motion 1 in the counterclockwise direction (see Figure 4(c)). As shown in Figure 4(d), the lower drive tooth surface of the stator drives the stator to make a leftward linear motion 2, and at the same time, the upper drive tooth surface of the stator drives the upper slider to make a leftward linear movement 3 relative to the stator, and the absolute movement of the upper slider is is the superposition of two leftward movements.

Claims (2)

1. motion superposition linear ultrasonic motor, comprise stator, mover and piezoelectric ceramic piece, it is characterized in that, described stator comprises annular elastomeric (2), piezoelectric ceramic piece (10), wherein two lateral surfaces up and down of annular elastomeric (2) have equally distributed driving gear, two piezoelectric ceramic pieces (10) are bonded in annular elastomeric (2) inner chamber respectively up and down on two inner surfaces, described mover comprises that the inboard wears two slide blocks (7 up and down of pulley, 3) and movable last draw runner (6), fixing following draw runner (1), wherein movable last draw runner (6) medial surface is pressed on the driving gear of annular elastomeric (2) superolateral surface, fixing following draw runner (1) medial surface is pressed on the driving gear of annular elastomeric (2) inferolateral surface, top shoe (7) is placed on movable last draw runner (6) lateral surface by the pulley of medial surface, sliding block (3) contacts with the lateral surface of the following draw runner of fixing (1) by the pulley of medial surface, utilize the spring force that bolt (4) provides through the interstitial hole of stator and mover and by the compression spring (9) that is sleeved on bolt (4) upper end and place intermediate mass (11) in the middle of annular elastomeric (2) inner chamber, stator is connected formation motion superposition linear ultrasonic motor in aggregates with mover.
2. the electric excitation mode of a motion superposition linear ultrasonic motor as claimed in claim 1, it is characterized in that, the sinusoidal signal that is pi/2 with two phase differences encourages two mode of oscillations with frequency phase difference pi/2 of stator can make stator produce the row ripple simultaneously, makes stator drive flank of tooth generation elliptic motion up and down and promotes the continuous rectilinear motion of mover.
CN2007100209623A 2007-04-05 2007-04-05 Motion superimposed linear ultrasonic motor and electric excitation method Expired - Fee Related CN101071999B (en)

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CN101741277B (en) * 2010-02-11 2011-11-23 宁波大学 A linear piezoelectric motor
CN109194189B (en) * 2018-10-16 2023-08-29 华侨大学 A linear ultrasonic motor based on multi-order vibration synthesis and its electric excitation method
CN110504864B (en) * 2019-08-26 2024-10-25 南京航达超控科技有限公司 8-Shaped traveling wave type linear ultrasonic motor and platform feeding device
CN110492784B (en) * 2019-08-26 2024-10-22 南京航达超控科技有限公司 Runway type traveling wave linear ultrasonic motor and single-platform and double-platform feeding device
CN113916411B (en) * 2021-09-18 2022-05-27 哈尔滨工业大学 Pre-tightening force measurement method based on global linearization Koopman state observer

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CN1665119A (en) * 2005-03-15 2005-09-07 辽宁工学院 Ring standing wave linear ultrasonic motor vibrator

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