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CN101040373B - Method for encapsulating an electronic component using a plastic object, and plastic object - Google Patents

Method for encapsulating an electronic component using a plastic object, and plastic object Download PDF

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Publication number
CN101040373B
CN101040373B CN200580030617.7A CN200580030617A CN101040373B CN 101040373 B CN101040373 B CN 101040373B CN 200580030617 A CN200580030617 A CN 200580030617A CN 101040373 B CN101040373 B CN 101040373B
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CN
China
Prior art keywords
electronic component
modification
thermoplastic plastic
plastic object
discharged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200580030617.7A
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Chinese (zh)
Other versions
CN101040373A (en
Inventor
F·B·A·德沃里斯
W·G·J·高尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Flyco International Ltd
Besi Netherlands BV
Original Assignee
Fico BV
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Filing date
Publication date
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Publication of CN101040373A publication Critical patent/CN101040373A/en
Application granted granted Critical
Publication of CN101040373B publication Critical patent/CN101040373B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention relates to a method for encapsulating an electronic component in a mould by the processing steps of: placing the component into a mould cavity, feeding encapsulating material, and curing the encapsulating material, wherein the electronic component is shielded by an object. The invention also relates to an object.

Description

Use the method and the plastic object of plastic object encapsulating electronic components
Technical field
The present invention relates to a kind of in mould the encapsulating electronic components method.The invention still further relates to a kind ofly during providing encapsulating material, be used for partly shielding effect electronic component at least or be connected to the thermoplastic plastic object of the carrier of electronic component to electronic component.
Background technology
At the electronic component that is placed on usually on the carrier, more specifically for example in the encapsulation of semiconductor circuit, the encapsulating material shielding that subelement and/or carrier can be arranged.At the adhesive sheet material that adhere to product that be used to encapsulate of this utilization according to prior art.At least before arranging lamella, lamella herein can have permanent adhesion or can be by for example not long ago improving the adhesion that the temperature of thin slice strengthens in the lamella setting usually.Another selection is to utilize non-adhesive foil material (being also referred to as release film).Such non-adhesive foil material wherein is fixed on screening-off position to sheeting by exerting pressure with wanting encapsulating products to be placed in the mould, and wherein sheeting is to having shielding action on the part in the recessed carrier that will be closed.After packaging process, encapsulating products can separate with simple form from thin slice, and can not damage the remaining bonding agent that is retained in the encapsulating products.Yet the use of non-adhesive foil material has the shortcoming that increases cost.Usually can only have to have sufficiently high quality after all to work under the maximum conditions that in the electronic package process, occur by expendable sheeting.This sheeting is expensive.
US 2004/0018659 discloses the manufacture method that a kind of manufacturing has the thin surface mounted semiconductor device of unleaded structure, utilizes the intermediate adhesion sheet that has adhesive layer thus in first step, and semiconductor element adheres on it.This element provides electric wire and is encapsulated in sealing or the potting resin.In the step in the end, this bonding sheet separates and scraps from semiconductor device.The method of US 2004/0018659 uses bonding sheet with temporary transient fixedly semiconductor element.By heat effect, the bonding strength of electron beam or this sheet of ultraviolet light correctability.
Summary of the invention
The purpose of this invention is to provide a kind of cladding material of improving one's methods and using in the method that is used at the mould encapsulating electronic components, expense was lower when it in use kept the advantage of prior art.
The present invention provides the method for type described in the preamble for this purpose, be characterised in that make can discharge object and the electronic component that will encapsulate contacts before, at least modification is used to connect the contact-making surface that can discharge object and electronic component, so that arrange chain link in the strand of plastics.These plastics preferred thermoplastic plastics.Although have only several microns the extremely thin superficial layer may be enough, yet must carry out this modification to the segment thickness of this object at least.In addition, modification is necessary for the fusing point (it is lower than the temperature in the mould in the encapsulation process before modification) that makes thermoplastics and no longer is in the temperature range in these temperature in the mould.In fact the fusing point that this means modified thermoplastic is brought up at least 160 ℃, but preferred at least 175 ℃, or modification causes fusing point thoroughly to disappear.The arrangement that is positioned at (big molecule) intermolecular chain link is also referred to as the crosslinked of molecule; Therefore take place under these temperature that the disappearance of the fusing point (or fusion scope) of expectation will exist in mould.Because increased the chain link number between the thermoplastics molecule in the modifying process, the character of thermoplastic is affected so that obtain to have more heat cured material.Thereby use relatively cheap plastics (with use according to prior art by fluorine-containing polymer, for example the non-sticky made of PTFE and ETFE discharges thin slice and compares) can realize desired shielding.Further advantage is to produce the degree of freedom that extra being used to determines the expected performance of this object (exposure period applies the intensity of radioactive ray, direction of radioactive ray or the like) at least.Yet another kind of the selection is the character that changes this object within this object.This means two relative herring bones that for example can shine material and be less than middle heart or abdominal part that the characteristic of this object edge is than the belly of center and acute irradiation more heating plastic more like this.Be otherwise noted that term " electronic component " in present patent application is interpreted as that also expression is connected to the joint product that this carrier of a carrier constitutes by having one or more electronic components.This carrier also is called as " lead frame " or " plate ".Can select with lamella existing electronic component and/or the carrier of partly shielding effect at least, thereby make and keep cladding material partly not have encapsulating material or fraction encapsulating material (for example being called for example thin part of the encapsulating material of escape orifice).This is particularly advantageous in the encapsulation that is placed on the electronic component on the carrier with continuous opening, and carrier must be coated on the side in the process of carrying out packaging process (is for example MAP QFN of no lead packages at this example).
Dependence make the ionization radioactive ray for example the form of gamma ray act on lamella and/or can the modified plastics object by on object, introducing electron beam.The modification of thermoplastics lamella molecular structure is included in and arranges more multichain joint between the macromolecular chain of thermoplasticity (crosslinked).Additional chain link will help to cancel the fusing point/softening range in the temperature range that has temperature in mould.By using emitting isotope cobalt 60 to act on the lamella, can easily obtain such molecular structure modification as the gamma ray that the energy in the gamma radiation equipment produces.The other method that reaching the desired chain link number between plastic molecules increases is included in lamella and introduces electron beam.Here usually under high vacuum and tool use the negative electrode of heating to produce electronics.When shining relatively large sheeting simultaneously, such irradiation thereby caused the minimum cost of per unit sheeting.Use the advantage of ionization radiation be parent material can be very simple and the effect ionization radiation be unique variation to existing method.
Also can come the modified plastics object, in the strand of thermoplastics or between the strand of thermoplastics, form chain link with chemical mode thus by in object, disposing substance (material).The example that is fit to the material of this purposes is that free radical forms material, for example peroxide and silane.Cause that the chemical method that chain link number between the plastic molecules increases has the advantage that does not need to use radiation source, with and cause expecting increasing or the fusing point/fusion range of disappearance plastics with controlled manner.
This modification can be carried out with a large amount of processing of mode in batches in the time cycle of determining easily.Lamellose modification can be carried out procedure of processing A respectively carrying out the optimized position of modification)-C) carry out.On the contrary, the modification of thermoplastic plastic object can also be carried out in mode continuously.In this case, can carry out object illumination or interpolation compound in " flexible operation " (" douceur ") mode of preferred compactness according to producing lathe or sealed in unit.
In preferred distortion, the thermoplastic plastic object of modification comprises a lamella.Such lamella can be suitable for only once or repeatedly use, and the application that can not become the sheeting of problem cause in packaging system.On the other hand, also to pay attention to other object, for example the object to exist, for example piece than the thick material portion-form.This is particularly suitable for repeatedly using.A kind of may be that piece and packaging system is integrated so that when between mold component, clamping the element be used to encapsulate this piece can discharge the carrier of engaged element/element, it need not carry out extra process to encapsulant (is piece in this situation).
At procedure of processing B) process in, for tab laminate being come on the electronic component of encapsulation, be desirably in the electronic component that clamping is used to encapsulate between at least two mold components with enough pressure.This mould (having at least two mold components that can replace each other) is by large-scale application.
The present invention also is provided at the thermoplastic plastic object that the supply encapsulating material is used for partly shielding effect electronic component at least in the middle of the process of electronic component or is connected to the carrier of electronic component, it is characterized in that the molecular structure of plastic object contact-making surface provides chain link in macromolecular chain or between the macromolecular chain at least.This thermoplastic plastic object can comprise that for example polyethylene, polypropylene and/or PE-X form polyolefin.In the encapsulation process of electronic component, can't use this material as encapsulant so far.Except the plastics of in this section, mentioning, can also use certainly by these material derived copolymers and mixture (wherein these materials are main component).These materials (copolymer and mixture) also fall within protection scope of the present invention.
In a preferred embodiment, by the support layer supports plastic object.This supporting layer preferably includes polymer (for example polyester such as polyethylene terephthalate).On the contrary, supporting layer also can be formed by non-plastic material.Owing to have multi-layer body, the desired characteristic of releasable material (non-adhesive) can combine with other desired characteristic of this object, for example with respect to the minimum essential requirement of mechanical load capacity aspect.If for example supporting layer is strengthened by twin shaft then this latter can be increased.
In preferred distortion, form thermoplastic plastic object by plastic sheet.The application of sheeting is known in essence and the ancillary equipment that herein needs also is available on market.Notice that already used non-cohesive material is by for example expensive fluoropolymer manufacturing of senior raw material.These materials have than the higher fusing point of processing temperature and are non-stickies.Non-sticky can be understood implication and be taken place for essentially no at least polar bond between thin slice and substrate; Except that not having (molecule) polar bond, yet under the situation of non-cohesive material, can there be so-called " blocking-up ", a kind of phenomenon that has a large amount of frictional resistance at the storeroom that connects in the non-sticky mode that shows.The blocking-up phenomenon also will be present on the decision degree according in the modified plastics object of the present invention, and even the good sealing function of reinforced plastics object.The degree that blocking-up takes place partly relies on temperature conditions.
Except using the plastics sheet materials, also can use and form thermoplastic plastic object by unit of plastic.Thereby such piece can for example form the part of module of part sealed in unit and can repeatedly be utilized so that the sealing effectiveness of expectation to be provided again, and can not cause the logistic complicated more with respect to the sealed in unit operation.
Based on can further illustrating the present invention in the unrestricted embodiment of imitateing shown in the following accompanying drawing.
This:
Description of drawings
Fig. 1 shows the schematic diagram of the method according to this invention,
Fig. 2 A shows the example according to single sheet of the present invention,
Fig. 2 B shows the example according to composite wafer of the present invention, and
Fig. 3 shows the example according to homogenous material unit of plastic of the present invention.
Embodiment
Fig. 1 shows the many volume plastics sheet materials 2 that are placed on the pallet 1 and are transported process radiation source 3.Radiation source 3 is made up of the radioisotopic container 4 that is provided with cobalt within it.If must interrupt the effect of radiation source 3, then it can be dropped in the basin 5.
The roll of plastic foil material 6 of shining is adjacent to sealed in unit 7 and places.Between the mold component 8,9 of sealed in unit 7, be provided with and be installed in the electronic component 11 on the carrier 10 so that the die space 12 in upper die part 8 can embracing element 11.Carrier 10 is placed on from the sheeting that has shone 13 of roller 6 debatchings away from a side of element 11.After encapsulation operation is carried out, advance the sheeting 13 of irradiation so that the electronic component 14 of encapsulation moves on to the outside of sealed in unit.In case encapsulating electronic components 14 is along with the sheeting 15 of the carrier 17 that is associated from irradiation unloads, the employed sheeting that has shone 15 will be around to roller 16 now.
Fig. 2 A illustrates the volume 20 of the opened irradiated thermoplastic plastic foil material 21 of part.Clearly show that sheeting 21 is made up of the homogenous material layer.Fig. 2 B shows the volume 22 of the thermoplastic plastic foil material of being made up of two material layers 24,25 23.The material layer 24 on top for example by the supporting layer 25 of polyethylene manufacturing and bottom for example by the polyethylene terephthalate manufacturing.For these layers that are connected to each other, can between two material layers 24,25, use the adhesive phase that one deck is extremely thin thereby do not illustrate in the figure, this adhesive phase for example is made up of acrylate glue.
Fig. 3 schematically shows the sectional view of the sealed in unit 30 with two mould parts 31,32 separated from each other.In the die cavity 33 recessed upper mold part 32.The groove of placing therein according to unit of plastic 35 of the present invention 34 is arranged in the lower mold half 31.By placing the lead frame (not shown) on piece 35, this piece 35 will be given prominence in the process of sealed in unit 30 operations and after the close die part 31,32, and seal the lead frame that is placed on the piece 35, and piece 35 does not adhere on the lead frame.

Claims (22)

1. the method for an encapsulating electronic components in mould comprises following procedure of processing:
A) place the electronic component that will encapsulate in die cavity,
B) inject encapsulating material to die cavity, and
C) the partly solidified at least encapsulating material in die cavity,
Wherein at procedure of processing B) in the process by the discharged object of the plastics manufacturing partly shielding effect electronic component that will encapsulate at least,
It is characterized in that
This can discharge object is non-viscosity, and make can discharge object and the electronic component that will encapsulate contacts before, at least be used to connect and discharge object and be modified to the contact-making surface of electronic component, cause in the strand of plastics and arrange chain link, but wherein with inviscid releaser structural reform increasing its fusing point, thereby obtain to have more heat cured material.
2. the method for claim 1, it is characterized in that by ionizing radiation is acted on the object and modification by the discharged object of plastics manufacturing.
3. method as claimed in claim 2, it is characterized in that by gamma ray is acted on the object and modification by the discharged object of plastics manufacturing.
4. the method for claim 1 is characterized in that by the electron beam alignment object is come the discharged object of modification by the plastics manufacturing.
5. the method for claim 1 is characterized in that modification forms chain link with chemical species whereby by the discharged object of plastics manufacturing between the thermoplastics molecule by substance is set in object.
6. method as claimed in claim 5 is characterized in that being used to form intermolecular chain link and adds to being made up of the substance that forms free radical to the small part substance in this object.
7. as claim 5 or 6 described methods, it is characterized in that being used to form intermolecular chain link and add to forming by peroxide and/or silane to the small part substance in this object.
8. method as claimed in claim 7 is characterized in that being carried out in mode in batches by the modification of the discharged object of plastics manufacturing.
9. method as claimed in claim 7 is characterized in that being carried out in a continuous manner by the modification of the discharged object of plastics manufacturing.
10. method as claimed in claim 9 is characterized in that by the single erosion of the modification of the discharged object of plastics manufacturing ground at procedure of processing A)-carry out in C).
11. method as claimed in claim 10 is characterized in that the discharged object by the plastics manufacturing of modification comprises lamella.
12. method as claimed in claim 10 is characterized in that the discharged object by the plastics manufacturing of modification is a module.
13. thermoplastic plastic object, it is during providing encapsulating material to electronic component, be used for partly shielding effect electronic component at least or be connected to the carrier of electronic component, it is characterized in that this plastic object be non-sticky and at least the macromolecular structure of the contact-making surface of this plastic object chain link between strand is provided, make that the chain link between the molecules of thermoplastic materials influences the character of thermoplastic so that obtain to have more heat cured material.
14. thermoplastic plastic object as claimed in claim 13 is characterized in that this thermoplastic plastic object comprises polyolefin.
15., it is characterized in that this plastic object comprises polyethylene as claim 13 or 14 described thermoplastic plastic object.
16. thermoplastic plastic object as claimed in claim 15 is characterized in that this plastic object comprises polypropylene.
17. thermoplastic plastic object as claimed in claim 16 is characterized in that this plastic object passes through support layer supports.
18. thermoplastic plastic object as claimed in claim 17 is characterized in that this supporting layer comprises polymer.
19. the thermoplastic plastic object described in claim 17 or 18 is characterized in that this supporting layer is strengthened by twin shaft.
20. thermoplastic plastic object as claimed in claim 18 is characterized in that this supporting layer comprises polyethylene terephthalate.
21. thermoplastic plastic object as claimed in claim 20 is characterized in that this thermoplastic plastic object is formed by the plastic tab layer.
22. thermoplastic plastic object as claimed in claim 20 is characterized in that this thermoplastic plastic object is formed by plastic module.
CN200580030617.7A 2004-07-30 2005-07-26 Method for encapsulating an electronic component using a plastic object, and plastic object Expired - Fee Related CN101040373B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1026749A NL1026749C2 (en) 2004-07-30 2004-07-30 Method of enclosing an electronic component with the aid of a plastic object and a plastic object.
NL1026749 2004-07-30
PCT/NL2005/000544 WO2006011791A2 (en) 2004-07-30 2005-07-26 Method for encapsulating an electronic component using a plastic object, and plastic object

Publications (2)

Publication Number Publication Date
CN101040373A CN101040373A (en) 2007-09-19
CN101040373B true CN101040373B (en) 2010-06-23

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Application Number Title Priority Date Filing Date
CN200580030617.7A Expired - Fee Related CN101040373B (en) 2004-07-30 2005-07-26 Method for encapsulating an electronic component using a plastic object, and plastic object

Country Status (5)

Country Link
CN (1) CN101040373B (en)
MY (1) MY151694A (en)
NL (1) NL1026749C2 (en)
TW (1) TWI373830B (en)
WO (1) WO2006011791A2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1195424A (en) * 1995-07-11 1998-10-07 美国3M公司 Semiconductor wafer processing adhesives and tapes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726071B2 (en) * 1989-03-27 1995-03-22 積水化学工業株式会社 Release liner
US6235387B1 (en) * 1998-03-30 2001-05-22 3M Innovative Properties Company Semiconductor wafer processing tapes
JP2000263714A (en) * 1999-03-09 2000-09-26 Minnesota Mining & Mfg Co <3M> Fluorine-base release sheet and manufacture thereof
NL1020594C2 (en) * 2002-05-14 2003-11-17 Fico Bv Method for enveloping an electronic component with the aid of a foil layer.
JP2004063615A (en) * 2002-07-26 2004-02-26 Nitto Denko Corp Semiconductor device, manufacturing method thereof and adhesive sheet for manufacturing the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1195424A (en) * 1995-07-11 1998-10-07 美国3M公司 Semiconductor wafer processing adhesives and tapes

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP平2-252781A 1990.10.11
同上.

Also Published As

Publication number Publication date
NL1026749C2 (en) 2005-08-19
WO2006011791A3 (en) 2006-09-14
WO2006011791A2 (en) 2006-02-02
CN101040373A (en) 2007-09-19
MY151694A (en) 2014-06-30
TWI373830B (en) 2012-10-01
TW200614453A (en) 2006-05-01

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Assignee: Leshan Fei Ge mould Co.,Ltd.

Assignor: Fico B.V.

Contract record no.: 2011990000743

Denomination of invention: Method for encapsulating an electronic component using a plastic object, and plastic object

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