CN101034077A - Piezocrystal gas sensor and method for making same - Google Patents
Piezocrystal gas sensor and method for making same Download PDFInfo
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- CN101034077A CN101034077A CN 200610022356 CN200610022356A CN101034077A CN 101034077 A CN101034077 A CN 101034077A CN 200610022356 CN200610022356 CN 200610022356 CN 200610022356 A CN200610022356 A CN 200610022356A CN 101034077 A CN101034077 A CN 101034077A
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- 238000000034 method Methods 0.000 title claims description 13
- 239000013078 crystal Substances 0.000 claims abstract description 43
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 27
- 229920000642 polymer Polymers 0.000 claims abstract description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000010453 quartz Substances 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 9
- 238000002360 preparation method Methods 0.000 claims abstract description 9
- 229920000767 polyaniline Polymers 0.000 claims abstract description 4
- 229920000128 polypyrrole Polymers 0.000 claims abstract description 4
- 229920000123 polythiophene Polymers 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims abstract 2
- 238000001548 drop coating Methods 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 238000009987 spinning Methods 0.000 claims 1
- 238000003380 quartz crystal microbalance Methods 0.000 abstract description 11
- 239000000126 substance Substances 0.000 abstract description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 3
- 239000010931 gold Substances 0.000 abstract description 3
- 229910052737 gold Inorganic materials 0.000 abstract description 3
- 229910052697 platinum Inorganic materials 0.000 abstract description 3
- 238000009776 industrial production Methods 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 description 9
- 239000002861 polymer material Substances 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 108091003079 Bovine Serum Albumin Proteins 0.000 description 1
- 229940098773 bovine serum albumin Drugs 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229960001866 silicon dioxide Drugs 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
本发明公开了一种压电晶体气体传感器，基体为石英晶片1，其特征在于，还包括设置在所述石英晶片1上的上金属电极2和下金属电极3，所述上金属电极2周围涂敷有电子聚合物层，所述上金属电极2的直径小于下金属电极3的直径，所述金属电极可以是金电极、铂电极或铝电极，所述电子聚合物是电导率高的聚合物，可以是聚苯胺、聚吡咯、聚噻吩等材料。这种特殊化学微传感器最突出的特点是使用石英晶体微天平的电学参数来探测与晶体表面相接触气氛的浓度，而且其精确度高、灵敏度高、选择性好、响应时间短；并且制备方法简单合理，易于大规模工业化生产。
The invention discloses a piezoelectric crystal gas sensor, the substrate of which is a quartz wafer 1, which is characterized in that it also includes an upper metal electrode 2 and a lower metal electrode 3 arranged on the quartz wafer 1, and the surrounding of the upper metal electrode 2 Coated with an electronic polymer layer, the diameter of the upper metal electrode 2 is smaller than the diameter of the lower metal electrode 3, the metal electrode can be a gold electrode, a platinum electrode or an aluminum electrode, and the electronic polymer is a polymer with high conductivity The material can be polyaniline, polypyrrole, polythiophene and other materials. The most prominent feature of this special chemical microsensor is that it uses the electrical parameters of the quartz crystal microbalance to detect the concentration of the atmosphere in contact with the crystal surface, and it has high accuracy, high sensitivity, good selectivity, and short response time; and the preparation method Simple and reasonable, easy for large-scale industrial production.
Description
Technical field
The invention belongs to chemical microsensor technical field, be specifically related to a kind of special chemical microsensor and manufacturing technology thereof, the most outstanding characteristics of this special chemical microsensor are to use the electrical parameter of QCM (Quartz Crystal Microbalance) to survey to contact with plane of crystal the concentration of atmosphere.
Background technology
The area that the variation of having proved the crystal resonant frequency in nineteen fifty-nine since saubrey is directly proportional with the mass change of plane of crystal with electrode has been inversely proportional to; And QCM (Quartz Crystal Microbalance) has just obtained to use widely.QCM (Quartz Crystal Microbalance) is used in the rate of sedimentation of monitoring film in the vacuum coating system at first; and afterwards, QCM ( Quartz Crystal Microbalance ) was used to the characteristic of detected gas and liquid etc. as sensor.This class Selectivity of Sensor and susceptibility not only depend on the structure that is coated in the functional material on the electrode but also depends on this electrode.2001Analytical Chimica ActaStudy of bovine serum albumin adsorption onto a silicondioxide surface using a ring-electrode piezoelectric sensorJ.Colloid Interface Sci.Study of the frequency character ofthe ring-electrode piezoelectric sensor in liquid phase and the adsorption ofCTMAB onto a quartz surfaceGranstaff5201215。
Find to produce the electrode structure of different-diameter through retrieval, and be coated with the functional material of electronic polymer class and the fields such as special chemical microsensor that form do not have pertinent literature to report as yet in the one side of the less electrode of diameter on the two sides of quartz crystal.
Summary of the invention
Technical matters to be solved by this invention is how a kind of piezoelectric crystal gas transducer and preparation method thereof is provided, the most outstanding characteristics of this special chemical microsensor are to use the electrical parameter of QCM (Quartz Crystal Microbalance) to survey to contact with plane of crystal the concentration of atmosphere, and its degree of accuracy height, highly sensitive, selectivity good, the response time is short; And preparation method's advantages of simple is easy to large-scale industrial production.
First technical matters proposed by the invention is to solve like this: a kind of piezoelectric crystal gas transducer is provided, matrix is a quartz wafer 1, it is characterized in that, also comprise the last metal electrode 2 and the following metal electrode 3 that are arranged on the described quartz wafer 1, the described metal electrode 2 of going up is coated with the electronic polymer layer on every side.
According to piezoelectric crystal gas transducer provided by the present invention, it is characterized in that, the described diameter of going up the diameter of metal electrode 2 less than following metal electrode 3, described metal electrode can be gold electrode, platinum electrode or aluminium electrode, described electronic polymer is the high polymkeric substance of conductivity, can be materials such as polyaniline, polypyrrole, polythiophene.
Second technical matters proposed by the invention is to solve like this: a kind of preparation method of piezoelectric crystal gas transducer is provided, it is characterized in that, may further comprise the steps:
Steps A, select according to desired frequency have certain diameter, quartz crystal slice 1 that certain thickness AT-cuts;
Step B designs the upper/lower electrode with certain diameter requirement, and adopts photomechanics to produce the mask that the piezoelectric crystal gas transducer electrode is used;
Step C is fixed on quartz crystal slice in the mask, is producing the upper and lower metal electrode (2,3) that one deck has different-diameter with physical vaporous deposition (PVD);
Step D, the requirement when checking with network analyzer whether the vibration frequency of the piezoelectric crystal plate that above-mentioned steps is produced satisfies design, and adjust;
Step e is produced one deck electronic polymer layer 4 to the piezoelectric crystal plate of adjusting in the one side of top electrode;
Step F is packed the above-mentioned piezoelectric crystal plate that is coated with electronic polymer layer 4 in the lead frame into, and with conducting resinl piezoelectric crystal is fixed.
Preparation method according to piezoelectric crystal gas transducer provided by the present invention is characterized in that, the method for preparing electronic polymer in the described step e can be a kind of in the methods such as drop-coating, lacquering technique, LB embrane method.
According to the produced piezoelectric crystal gas transducer of the present invention, when it is placed in oxidation, the reducibility gas, owing to accumulate in the gas on electronic polymer film surface causes the conductivity of material own by the interaction with electronic polymer material variation.If it is big that conductivity becomes, the useful area of piezoelectric crystal electrode increases, and at this moment the variation of piezoelectric crystal resonant frequency is relatively not too obvious.If conductivity diminishes, the useful area of piezoelectric crystal electrode reduces, and at this moment the variation meeting of piezoelectric crystal resonant frequency is quite obvious.Therefore, on the one hand, piezoelectric crystal gas transducer of the present invention can be got rid of those interference that causes the big gas of electronic polymer material conductivity change, on the other hand, good reacting gas of piezoelectric crystal gas transducer energy of the present invention and electronic polymer material are made the degree that the time spent conductivity diminishes.The sensor of the present invention's preparation can be used to detect humidity, NO
2, NH
3Etc. atmosphere.
In sum, piezoelectric crystal gas transducer degree of accuracy height of the present invention, highly sensitive, selectivity good, the response time is short.
Description of drawings
Fig. 1 is the cross-sectional view of piezoelectric crystal gas transducer provided by the present invention;
Fig. 2 is the lead frame figure of piezoelectric crystal gas transducer;
Fig. 3 is with pack into front elevation behind the lead frame shown in Figure 2 of piezoelectric crystal gas transducer.
Wherein, 1, quartz wafer, 2, go up metal electrode, 3, metal electrode down, 4, the electronic polymer layer, 5, lead frame.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing.
As Fig. 1, piezoelectric crystal gas transducer of the present invention, comprise quartz wafer 1, last metal electrode 2, following metal electrode 3 and be coated in electronic polymer layer 4 on the metal electrode, last metal electrode 2 diameters are less than following metal electrode 3, wherein metal electrode can be gold electrode, platinum electrode or aluminium electrode, and electronic polymer is the high polymkeric substance of conductivity, can be materials such as polyaniline, polypyrrole, polythiophene.
The concrete preparation method of piezoelectric crystal gas transducer of the present invention is as follows:
Step 1, select according to desired frequency have certain diameter, quartz crystal slice 1 that certain thickness AT-cuts;
Step 6 is packed the above-mentioned piezoelectric crystal that is coated with electronic polymer layer 4 in as shown in Figure 2 the lead frame 5 into, and with conducting resinl piezoelectric crystal is fixed.
Promptly produce the piezoelectric crystal gas transducer finished product by above step, as shown in Figure 3.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100223560A CN100520390C (en) | 2006-11-29 | 2006-11-29 | Piezocrystal gas sensor and method for making same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100223560A CN100520390C (en) | 2006-11-29 | 2006-11-29 | Piezocrystal gas sensor and method for making same |
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| Publication Number | Publication Date |
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| CN101034077A true CN101034077A (en) | 2007-09-12 |
| CN100520390C CN100520390C (en) | 2009-07-29 |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221568A (en) * | 2011-03-30 | 2011-10-19 | 中国矿业大学 | Room temperature gas sensor with double-clamped beam |
| CN102590008A (en) * | 2012-03-08 | 2012-07-18 | 中国科学院合肥物质科学研究院 | Quartz crystal micro-balance trace ammonia gas detection device |
| CN101482530B (en) * | 2008-08-20 | 2013-01-16 | 上海博物馆 | Method for producing piezoelectric crystal gas transducer |
| CN102967522A (en) * | 2012-11-15 | 2013-03-13 | 电子科技大学 | Quartz crystal microbalance (QCM) mass sensor |
| CN103336026A (en) * | 2013-05-31 | 2013-10-02 | 谷宇 | Polymer piezoelectric gas sensor system for detecting gases |
| CN103575865A (en) * | 2013-11-15 | 2014-02-12 | 天津理工大学 | Preparation method of quartz crystal microbalance gas sensor for detecting ammonia |
| CN104198320A (en) * | 2013-08-29 | 2014-12-10 | 北京至感科技有限公司 | Handheld fast reaction iron content monitor |
| CN104198323A (en) * | 2013-09-03 | 2014-12-10 | 北京至感科技有限公司 | Highly sensitive acid sensor |
| CN104406881A (en) * | 2014-11-18 | 2015-03-11 | 中国科学院苏州生物医学工程技术研究所 | Piezoelectric acoustic wave biosensor based on micro-nano structure |
| CN105262370A (en) * | 2015-10-26 | 2016-01-20 | 阜阳欣奕华材料科技有限公司 | Method for preparing humidity response power generation device |
| CN111624240A (en) * | 2020-05-11 | 2020-09-04 | 电子科技大学 | Sensing/transduction coupling self-driven gas sensor and preparation method thereof |
| CN113026209A (en) * | 2021-02-08 | 2021-06-25 | 东华大学 | Self-driven piezoelectric response surface hydrophilicity and hydrophobicity regulating fiber membrane and preparation method thereof |
-
2006
- 2006-11-29 CN CNB2006100223560A patent/CN100520390C/en not_active Expired - Fee Related
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101482530B (en) * | 2008-08-20 | 2013-01-16 | 上海博物馆 | Method for producing piezoelectric crystal gas transducer |
| CN102221568B (en) * | 2011-03-30 | 2013-03-06 | 中国矿业大学 | Room temperature gas sensor with double-clamped beam |
| CN102221568A (en) * | 2011-03-30 | 2011-10-19 | 中国矿业大学 | Room temperature gas sensor with double-clamped beam |
| CN102590008A (en) * | 2012-03-08 | 2012-07-18 | 中国科学院合肥物质科学研究院 | Quartz crystal micro-balance trace ammonia gas detection device |
| CN102967522B (en) * | 2012-11-15 | 2014-11-05 | 电子科技大学 | Quartz crystal microbalance (QCM) mass sensor |
| CN102967522A (en) * | 2012-11-15 | 2013-03-13 | 电子科技大学 | Quartz crystal microbalance (QCM) mass sensor |
| CN103336026A (en) * | 2013-05-31 | 2013-10-02 | 谷宇 | Polymer piezoelectric gas sensor system for detecting gases |
| CN104198320A (en) * | 2013-08-29 | 2014-12-10 | 北京至感科技有限公司 | Handheld fast reaction iron content monitor |
| CN104198320B (en) * | 2013-08-29 | 2016-08-24 | 北京至感传感器技术研究院有限公司 | A kind of hand-held fast reaction iron instrument |
| CN104198323A (en) * | 2013-09-03 | 2014-12-10 | 北京至感科技有限公司 | Highly sensitive acid sensor |
| CN103575865A (en) * | 2013-11-15 | 2014-02-12 | 天津理工大学 | Preparation method of quartz crystal microbalance gas sensor for detecting ammonia |
| CN104406881A (en) * | 2014-11-18 | 2015-03-11 | 中国科学院苏州生物医学工程技术研究所 | Piezoelectric acoustic wave biosensor based on micro-nano structure |
| CN104406881B (en) * | 2014-11-18 | 2017-09-26 | 中国科学院苏州生物医学工程技术研究所 | A kind of piezoelectric sound wave biology sensor based on micro-nano structure |
| CN105262370A (en) * | 2015-10-26 | 2016-01-20 | 阜阳欣奕华材料科技有限公司 | Method for preparing humidity response power generation device |
| CN111624240A (en) * | 2020-05-11 | 2020-09-04 | 电子科技大学 | Sensing/transduction coupling self-driven gas sensor and preparation method thereof |
| CN111624240B (en) * | 2020-05-11 | 2021-12-17 | 电子科技大学 | Sensing/transduction coupling self-driven gas sensor and preparation method thereof |
| CN113026209A (en) * | 2021-02-08 | 2021-06-25 | 东华大学 | Self-driven piezoelectric response surface hydrophilicity and hydrophobicity regulating fiber membrane and preparation method thereof |
| CN113026209B (en) * | 2021-02-08 | 2021-12-21 | 东华大学 | Self-driven piezoelectric response modulating surface hydrophilic and hydrophobic fiber membrane and preparation method thereof |
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| Publication number | Publication date |
|---|---|
| CN100520390C (en) | 2009-07-29 |
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Granted publication date: 20090729 Termination date: 20121129 |