CN101008704A - Variable-shape mirror and optical pickup apparatus therewith - Google Patents
Variable-shape mirror and optical pickup apparatus therewith Download PDFInfo
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- CN101008704A CN101008704A CNA2006101428197A CN200610142819A CN101008704A CN 101008704 A CN101008704 A CN 101008704A CN A2006101428197 A CNA2006101428197 A CN A2006101428197A CN 200610142819 A CN200610142819 A CN 200610142819A CN 101008704 A CN101008704 A CN 101008704A
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Abstract
一种可变形镜，具有：基板；形成于基板上的下部电极膜；形成于下部电极膜上的压电膜；形成于压电膜上的上部电极膜；和镜膜，其直接形成于基板上，并且设置为由下部电极膜、压电膜、和上部电极膜所构成的驱动部包围。该镜膜设置在基板中所设置的可动部上，并且驱动部的至少一部分设置在该可动部上。
A deformable mirror having: a substrate; a lower electrode film formed on the substrate; a piezoelectric film formed on the lower electrode film; an upper electrode film formed on the piezoelectric film; and a mirror film formed directly on the substrate , and is provided surrounded by a drive unit composed of a lower electrode film, a piezoelectric film, and an upper electrode film. The mirror film is provided on the movable part provided in the substrate, and at least a part of the driving part is provided on the movable part.
Description
Technical field
The present invention relates to a kind of deformable mirror, promptly can change its mirror shape to be used for the mirror of optic pick-up etc., particularly a kind of deformable mirror that is constructed with the film of a plurality of stacked formation.The invention still further relates to a kind of optic pick-up that comprises this type of deformable mirror.
Background technology
When using optic pick-up from the CD such as CD (compact disc) or DVD (digital versatiledisc), to read information or during to the CD writing information, the optical axis of optic pick-up ideally should be for vertical mutually with the relation between the panel surface.Yet in practice, when CD rotated, its relation was not to keep vertical always.Therefore, for the CD such as CD or DVD,, thereby produce wave front aberration (it is poor to be mainly intelligent image) when panel surface during, the optical path bending of laser with respect to inclined light shaft.And when to by using the optic pick-up can be to its recorded information or when the CD that wherein obtains information exchanges, the thickness of the disc board of CD is different will to produce wave front aberration (it is poor to be mainly intelligent image).
When producing this wave front aberration, be radiated at the LASER SPECKLE on the CD position deviation correct position.When wave front aberration unfavourably greater than allowed band, just can not correctly read again or writing information.Therefore, usually, used deformable mirror to proofread and correct wave front aberration, and various deformable mirrors have been arranged.
For example, JP-A-2002-279677 has proposed a kind of deformable mirror, and it is formed with thin silicon substrate and thin piezoelectric film.At this, be provided with minute surface in a side of silicon substrate, and be formed with insulation course at the opposite side of silicon substrate.And, being formed in the electrode of thin piezoelectric film both sides, an electrode that is positioned at a side at least is divided into discontinuous section, so that the shape that makes minute surface changes according to the pattern of the electrode section of being cut apart.
Yet disadvantageously, about the deformable mirror as proposing among the above-mentioned JP-A-2002-279677, piezoelectric film all is formed on the thin silicon substrate with the electrode that is used for the drive pressure electrolemma.This makes can not handle this mirror well during the manufacturing of deformable mirror, cause inefficiency, and even causes that deformable mirror is damaged during manufacture.
Mention processing, the deformable mirror that is proposed among JP-A-2005-032286 and the JP-A-2004-151631 shows better, is because about forming the substrate of minute surface, have only the part that needs to move this Jing Chu to form thinly this this.According to JP-A-2005-032286, in deformable mirror as shown in Figure 6, reflectance coating 101 is formed at the bottom side that is provided with circular cavity of substrate 105.And, at the upside of substrate 105, be formed with lower electrode 103, piezoelectric film 102 and be divided into discontinuous section upper electrode 104.
On the other hand, according to JP-A-2004-151631, as shown in Figure 7, mirror element 201 is formed on the side of not handling through etching and processing of mirror substrate 205, and is formed with piezoelectric element 202 through on the side of etch processes, is used to stride across electrode 203a and 204a and cloth line electrode 203b and the 204b that this piezoelectric element 202 applies voltage at it.At this, cloth line electrode 203b, 204b form the aluminium film of sputter, and this aluminium film at first is formed at the whole bottom side of mirror substrate 205, and form pattern by the offset printing processing subsequently.
Yet, disadvantageously, when forming minute surface on the side of the substrate of handling in the etching that proposes by above-mentioned JP-A-2005-032286 etc., because the flatness and the smoothness on the surface of handling are inferior like this, so be difficult to obtain smooth and smooth minute surface.Under the situation that does not have smooth and smooth minute surface, be difficult to deformable mirror aberration correction accurately.
On the other hand, according to above-mentioned JP-A-2004-151631, because minute surface is formed on the side of the substrate that does not pass through etching and processing, thus can obtain smooth and smooth minute surface really, but need form electrode pattern through on the side of etch processes.Disadvantageously, be difficult on the surface of handling like this, form the pattern of electrode conductor.
Summary of the invention
In view of the inconvenience of above-mentioned conventional art, the object of the present invention is to provide a kind of deformable mirror, although be constructed with the film of a plurality of stacked formation, but still provide smooth and smooth minute surface, and made easily.Another object of the present invention is to provide a kind of optic pick-up, because this optic pick-up comprises the deformable mirror that smooth and smooth minute surface not only is provided but also has made easily, thus this optic pick-up accurately aberration correction and can making with the less work burden form.
For achieving the above object, according to the present invention, provide a kind of deformable mirror, it comprises: drive division, and it comprises piezoelectric film and first, second electrode film that this piezoelectric film is clipped in the middle; Substrate, its part that is supporting drive division and this substrate is by being formed movable part by thinning; The mirror film, it directly is formed on the movable part, when being activated with convenient drive division, this its shape of mirror membrane change.At this, the mirror film is formed on the relative side of the side with form movable part through handling of substrate; And form not overlappingly, perhaps form as one with one of first and second electrode films with drive division.And at least a portion of drive division is arranged on the movable part.
By this structure,, be arranged on the part of the movable part that forms by a part of attenuation that makes substrate by piezoelectric film and two drive divisions that electrode film constitutes clamping this piezoelectric film; Therefore, thereby be applied to when driving this drive division on the described electrode when voltage, the minute surface that is arranged on the movable part can easily change its shape.And in the deformable mirror of this film that is constructed with a plurality of stacked formation, drive division and mirror film can be formed on the undressed side of substrate.This just makes can obtain smooth and smooth minute surface, and makes be easy to form electrode pattern on substrate.
And according to the present invention, in having the deformable mirror of structure as mentioned above, drive division can be set to round mirror coating.
This structure allows to change effectively by drive division the shape of mirror film, and allows simple the manufacturing.
And according to the present invention, in having the deformable mirror of structure as mentioned above, drive division can be set to round the periphery of mirror film.
This structure allows the shape of mirror film is changed over required shape effectively.
And according to the present invention, in having the deformable mirror of structure as mentioned above, at least one in first, second electrode film has the pattern that is divided into a plurality of discontinuous segments.
This wherein at least one electrode is divided into the structure of a plurality of discontinuous segments, help by independent use piezoelectricity polarity be unidirectional piezoelectric film realize can aberration correction deformable mirror.
And according to the present invention, optic pick-up is provided with the deformable mirror of structure as mentioned above.
By this structure, the optic pick-up that comprises the deformable mirror with smooth and smooth minute surface is aberration correction accurately.And, owing to can easily make this deformable mirror, so can make this optic pick-up with less work burden.
Description of drawings
Fig. 1 is the schematic diagram that shows the structure of the optical system that embodies optic pick-up of the present invention;
Fig. 2 A is the sketch that shows the structure that embodies the deformable mirror that is contained in the optic pick-up of the present invention, and this sketch is the front schematic view from the deformable mirror of its mirrored sides observation;
The schematic cross sectional views of Fig. 2 B for cutting open along the A-A line shown in Fig. 2 A;
Fig. 2 C is the sketch when showing the observing from its bottom side of the deformable mirror shown in Fig. 2 A;
Fig. 3 is the schematic plan view that shows the lower electrode structure of the deformable mirror among the embodiment;
Fig. 4 is the sketch that shows the operational circumstances of the deformable mirror among the embodiment under the state that piezoelectric film has launched;
Fig. 5 is the sketch that shows the operational circumstances of the deformable mirror among the embodiment under the state that piezoelectric film has shunk;
Fig. 6 is the sketch that shows the structure of traditional deformable mirror;
Fig. 7 is the sketch that shows the structure of traditional deformable mirror; And
Fig. 8 is the sketch that shows according to the remodeling embodiment of deformable mirror of the present invention.
Embodiment
Hereinafter, embodiments of the present invention are described with reference to the accompanying drawings.Should be appreciated that, below the embodiment that proposed only be example, the present invention is not had any qualification.
Fig. 1 is the synoptic diagram that shows the structure of the optical system that embodies the optic pick-up that contains deformable mirror of the present invention.In Fig. 1, on the one hand, optic pick-up 1 can utilize laser beam irradiation optical recording media 23, as CD, DVD or blue laser DVD (high power capacity, high definition DVD), and the light that receiving is reflected thus returns is with the information of reading and recording on the recording surface of recording medium 23, and on the other hand, this optic pick-up 1 can utilize laser beam irradiation recording medium 23 information is write the recording surface of this recording medium 23.For example, optic pick-up 1 comprises: lasing light emitter 2, collimation lens 3, optical splitter 4, quarter-wave plate 5, deformable mirror 6, object lens 20, collector lens 21 and photoelectric detector 22.
Lasing light emitter 2 is the semiconductor laser diode that sends the laser beam of predetermined wavelength.Be that the wavelength that for example can to send the wavelength that is used for CD be 785nm, be used for DVD is that 650nm or the wavelength that is used for blue laser DVD are the semiconductor laser diode of the laser beam of 405nm as used herein.In an embodiment, suppose that independent lasing light emitter 2 launches the laser beam of independent wavelength; But also can replace the lasing light emitter that use can be sent multi-wavelength's laser beam.Point to collimation lens 3 from the laser beam that lasing light emitter 2 sends.
On the one hand, optical splitter 4 transmission is by the laser beam of collimation lens 3 transmission, and on the other hand, and the laser beam that reflection reflects from recording medium 23 is so that it points to photoelectric detector 22.Laser beam by optical splitter 4 transmission is pointed to quarter-wave plate 5.
Quarter-wave plate 5 and optical splitter 4 cooperatings are to be used as optoisolator.Laser beam by quarter-wave plate 5 transmission is pointed to deformable mirror 6.
Transmit by object lens 20 from recording medium 23 laser light reflected bundles, and be reflected onto deformable mirror 6 then., on optical splitter 4, be reflected then by quarter-wave plate 5 transmission from deformable mirror 6 laser light reflected Shu Suihou, and then point to collector lens 21.Collector lens 21 will focus on the photoelectric detector 22 from recording medium 23 laser light reflected bundles.
When receiving laser beam, photoelectric detector 22 just changes optical information into electric signal, and this electric signal is fed to RF amplifier set in the unshowned optical disc apparatus etc. etc. subsequently.This electric signal comprises the information of obtaining and is used to control the position of making as a whole optic pick-up 1 and the required information (servo-information) in position of controlling object lens 20 from the data that are recorded in recording surface.
Then, will the structure of the deformable mirror 6 that uses in the present embodiment be elaborated.Fig. 2 A is the sketch that shows the structure of employed deformable mirror 6 in the optic pick-up 1 of present embodiment, and this sketch is the front schematic view of the deformable mirror 6 observed from its mirrored sides.The schematic cross sectional views of Fig. 2 B for cutting open along the A-A line shown in Fig. 2 A.Sketch when Fig. 2 C is observing from its bottom side of the deformable mirror 6 shown in Fig. 2 A.
Shown in Fig. 2 A to Fig. 2 C, in an embodiment, deformable mirror 6 comprises: substrate 7, be formed at lower electrode film 8 on the substrate 7, be formed at piezoelectric film 9 on the lower electrode film 8, be formed at the upper electrode film 10 on the piezoelectric film 9 and directly be formed at mirror film 12 on the substrate 7, the drive division 11 that this mirror film 12 is arranged to be made of lower electrode film 8, piezoelectric film 9 and upper electrode film 10 surrounds.
For example, substrate 7 is made by insulating material such as glass or pottery, but also also non-special qualification.Yet in order to strengthen the piezoelectric property of piezoelectric film 9, preferably substrate 7 is formed by for example silicon or magnesium oxide.At substrate 7 is not under the situation about being formed by insulating material, and the insulation course that is formed by insulating material just need be formed between substrate 7 and the lower electrode film 8.
Fig. 3 is the schematic plan view of structure that shows the lower electrode 8 of the deformable mirror 6 among the embodiment.Should be pointed out that Fig. 3 shows lower electrode film 8 and is formed on situation on the substrate 7 separately.Lower electrode film 8 forms independent, continuous section in by the part shown in the hacures of Fig. 3.Lower electrode film 8 is connected to first electrode terminal 13 by guiding conductor (lead conductor) 14, and this first electrode terminal further is connected to the driving circuit (not shown).
Form lower electrode film 8 to eliminate and part by the corresponding substrate 7 of part shown in the hacures of Fig. 2 A.This will allow mirror film 12 directly to be formed on the substrate 7.Form lower electrode film 8, also in order to eliminate by the part shown in the 8a to 8d among Fig. 3.This will allow the guiding conductor 16a to 16d that is used for upper electrode film 10 to be formed at this.The shape of lower electrode film 8 is not limited to specific among the embodiment one, but can make amendment in purpose of the present invention; For example, the size of lower electrode film 8, shape (although not being divided into discontinuous section) can be identical with upper electrode film 10.Lower electrode film 8 even can be divided into two or more discontinuous section.
In the present embodiment, because upper electrode film 10 is divided into discontinuous section, apply different voltage so can stride across the different piece that is clipped in the piezoelectric film 9 between electrode film section 10a to 10d and the lower electrode film 8.So making and can regulate wherein angle and direction, so that change the shape that is clipped in the piezoelectric film 9 between electrode film section 10a to 10d and the lower electrode film 8, and then is required shape with the alteration of form of mirror film 12.
Preferably mirror film 12 is formed by the material of high reflectance; For example, it forms metal film by the material such as Au, Al, Ti or Cr or its alloy.For example, mirror film 12 can be made of a plurality of stacked films that form.Mirror film 12 for example forms by sputter process or vapor deposition process; That is, any can film forming processing can use, thereby for employed film shaped processing without any specific qualification.
Preferably, at least a portion of the drive division of being made up of lower electrode film 8, upper electrode film 10 and piezoelectric film 9 11 is arranged on the movable part 7b shown in frame of broken lines among Fig. 2 B.If drive division 11 does not have a part to be positioned on the movable part 7b, even so when drive division 11 is activated, the mirror film 12 on the movable part 7b also is difficult to change its shape.And, preferably drive division 11 be set to as among the embodiment round mirror film 12.So just allow when drive division 11 is activated, to change effectively the shape of mirror film 12.
Then, the operational circumstances of deformable mirror 6 of structure is in the manner described above described.Fig. 4 and Fig. 5 show the sketch how deformable mirror 6 is operated, and state shown in Figure 4 is the state that piezoelectric film 9 has expanded from the state shown in Fig. 2 B; State shown in Figure 5 is the state that piezoelectric film 9 has shunk from the state shown in Fig. 2 B.In Fig. 4 and Fig. 5, be applied to the voltage between upper electrode film 10b and the lower electrode film 8, and be applied to upper electrode film 10d and equate with voltage between the lower electrode film 8.
In Fig. 4, piezoelectric film 9 expands, thereby downward power just acts on the movable part 7b that can make substrate 7 motions; Therefore, movable part 7b and mirror film 12 just protrude downwards.On the contrary, in the polarity of the voltage that is applied Fig. 5 opposite with situation among Fig. 4, piezoelectric film 9 shrinks, thereby the power that makes progress just acts on the movable part 7b that can make substrate 7 motions; Therefore, movable part 7b and mirror film 12 are just protruding upward.
The operation that should be appreciated that aforesaid deformable mirror 6 only is an example; When the change in voltage that applied between single electrode film section 10a to 10d and lower electrode film 8, the shape of deformable mirror 6 can change according to different modes.
Then, the manufacture process to the deformable mirror 6 of present embodiment describes.At first, a side that forms dull and stereotyped substrate 7 is carried out etching so that form movable part 7b (first step).Then, on the opposite side of substrate 7, metal mask etc. are formed in order to the position that forms mirror film 12 (drawing hatched part among Fig. 2 A) with in order to form the position (second step) of the used guiding conductor 16a to 16d of upper electrode film 10.Subsequently, form film in the following order by above-mentioned sputter process etc.: lower electrode film 8, then be piezoelectric film 9 and follow by upper electrode film 10 (the 3rd to the 5th step).
Subsequently, remove the metal mask in second step, form etc., and directly on substrate 7, form mirror film 12 (the 6th steps) by sputter process etc.Then, be formed for the pattern (the 7th step) of the conductor of lower electrode film 8 and upper electrode film 10.
Make in this manner, deformable mirror 6 makes mirror film 12 be formed on a side of the processing such as not process etching of substrate 7.This helps to produce smooth and smooth minute surface.And the pattern that is used for the conductor of lower electrode film 8 and upper electrode film 10 also is formed on a untreated side of substrate 7.So just make their pattern be easy to form.And substrate 7 forms and makes the part 7a of this substrate 7 thicker than movable part 7b.So just guarantee well to handle during manufacture.
Can be according to deformable mirror 6 of the present invention according to implementing as any way the specifically described mode of embodiment except that above-mentioned; In other words, in purpose of the present invention, can carry out numerous modifications and variations.Specifically, for example, the drive division 11 that is used to change the shape of mirror film 12 only can be set at the part place that upper electrode film section 10a and 10c are set shown in Fig. 2 A around the periphery of mirror film 12 replacedly.
For another example, as shown in Figure 8, lower electrode film 8 and mirror film 12 can be by identical materials form and form as one (as single films).Fig. 8 is the schematic cross sectional views that is similar to Fig. 2 B of deformable mirror 6, and this deformable mirror 6 has the essentially identical structure with embodiment except lower electrode film 8 and mirror film 12 form the single film.Lower electrode film 8 and mirror film 12 form single film, so just help reducing the manufacture process of deformable mirror 6.
For another example, upper electrode film 10 and mirror film 12 can form as one.Yet, in this case, replace upper electrode film 10 to form discontinuous electrode film section, for example, lower electrode film 8 can form discontinuous electrode film section.According to the purpose situation, upper electrode film 10 and lower electrode film 8 all do not form discontinuous electrode film section.
Present embodiment relates to a kind of situation, and soon deformable mirror 6 according to the present invention is attached to the situation in the optic pick-up 1; But should be appreciated that according to deformable mirror of the present invention and also can be applied to (for example: be included in the optical devices in digital camera, the projector etc.) in other optical devices.
According to the present invention, deformable mirror has: drive division, and it comprises piezoelectric film and first, second electrode film that this piezoelectric film is clipped in the middle; Substrate, its part that is supporting drive division and this substrate is by being formed movable part by thinning; The mirror film, it directly is formed on the movable part, thus when drive division was activated, this mirror film just changed its shape.Here, the mirror film is formed on the relative side of the side with form movable part through handling of substrate, and forms not overlappingly with drive division, perhaps forms as one with one of first and second electrode films.And at least a portion of drive division is arranged on the movable part.
In this manner, drive division and mirror film all can be formed on the untreated side of substrate.This makes can obtain smooth and smooth minute surface, and allows to form electrode pattern with the less work burden on substrate.
And in deformable mirror according to the present invention, drive division can be provided with round the mirror film.This just makes and is easy to make permission changes the mirror shape when drive part is activated deformable mirror.
And in deformable mirror according to the present invention, drive division can be set to round the circumference of mirror film.This just feasible shape that can when drive part is activated, change mirror effectively.
And in deformable mirror according to the present invention, at least one in first, second electrode film has the pattern that is divided into a plurality of discontinuous segments.This can become required shape with the alteration of form of mirror by to use piezoelectricity polarity be unidirectional piezoelectric film with regard to making.
And, include optic pick-up, because it comprises the deformable mirror with smooth and smooth minute surface, so aberration correction accurately according to deformable mirror of the present invention.In addition, owing to this deformable mirror is made easily, so can make this optic pick-up with less work burden.
Claims (12)
1, a kind of deformable mirror comprises:
Drive division, it comprises piezoelectric film and first and second electrode films that this piezoelectric film is clipped in the middle;
Substrate, its part that is supporting this drive division and this substrate is by being formed movable part by thinning;
The mirror film, it directly is formed on this movable part, when being driven with this drive division of box lunch, this its shape of mirror membrane change;
Wherein, this mirror film is formed on the relative side of the side with form movable part through handling of substrate; And this mirror film forms not overlapping with this drive division, perhaps forms as one with one of described first and second electrode films;
Wherein, at least a portion of this drive division is arranged on this movable part.
2, deformable mirror according to claim 1,
Wherein, this drive division is set to round this mirror film.
3, deformable mirror according to claim 1,
Wherein, at least one in first and second electrode films has the pattern that is divided into a plurality of discontinuous segments.
4, deformable mirror according to claim 2,
Wherein, this drive division is set to round the periphery of this mirror film.
5, deformable mirror according to claim 2,
Wherein, at least one in first and second electrode films has the pattern that is divided into a plurality of discontinuous segments.
6, deformable mirror according to claim 4,
Wherein, at least one in first and second electrode films has the pattern that is divided into a plurality of discontinuous segments.
7, a kind of optic pick-up comprises deformable mirror according to claim 1.
8, a kind of optic pick-up comprises deformable mirror according to claim 2.
9, a kind of optic pick-up comprises deformable mirror according to claim 3.
10, a kind of optic pick-up comprises deformable mirror according to claim 4.
11, a kind of optic pick-up comprises deformable mirror according to claim 5.
12, a kind of optic pick-up comprises deformable mirror according to claim 6.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005310839 | 2005-10-26 | ||
| JP2005310839 | 2005-10-26 | ||
| JP2006276274 | 2006-10-10 |
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| Publication Number | Publication Date |
|---|---|
| CN101008704A true CN101008704A (en) | 2007-08-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006101428197A Pending CN101008704A (en) | 2005-10-26 | 2006-10-26 | Variable-shape mirror and optical pickup apparatus therewith |
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| CN (1) | CN101008704A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110441903A (en) * | 2018-05-04 | 2019-11-12 | 中强光电股份有限公司 | Zoom optics element |
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- 2006-10-26 CN CNA2006101428197A patent/CN101008704A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110441903A (en) * | 2018-05-04 | 2019-11-12 | 中强光电股份有限公司 | Zoom optics element |
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