CN101005152A - Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna - Google Patents
Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna Download PDFInfo
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- CN101005152A CN101005152A CN 200610001801 CN200610001801A CN101005152A CN 101005152 A CN101005152 A CN 101005152A CN 200610001801 CN200610001801 CN 200610001801 CN 200610001801 A CN200610001801 A CN 200610001801A CN 101005152 A CN101005152 A CN 101005152A
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Abstract
Thin film is prepared to cover a cavity. A first electrode layer, a first piezoelectric thin film (PTF) layer, a second electrode layer and a second PTF layer are prepared on the thin film of covering the cavity from low to up in sequence so as to constitute sub unit of antenna. Being excited by signal, any PTF layer in each sub unit of antenna generates vibration along two directions: along normal of PTF plane and parallel to the thin film plane. Two vibrations along normal of first PTF layer and normal of second PTF layer respectively are in same direction. Direction of vibration parallel to the first PTF plane is perpendicular to direction of vibration parallel to the second PTF plane each other. Arrangement of more than one sub unit of antenna constitutes aerial array. Multiple sub units of antenna can be different in areas and sizes, or in same area and size.
Description
Affiliated technical field
The present invention relates to solid-state physics lattice dynamics, electromagnetic wave and photonic crystal, the especially yellow elder brother's equation in the solid state physics, specific embodiments of the present invention relate to MEMS process technology, function film technology of preparing.
Background technology
Antenna, as the requisite key components of mobile communication product, its radiation reception or efficient, directivity, bandwidth, impedance matching property, size and cost will produce greatly influence to mobile communication product.Along with mobile communication product miniaturization more, light and handy and attractive in appearance, Antenna Design is just becoming a kind of art, takes into account miniaturization, impedance matching, radiation or receiving efficiency, requirement cheaply simultaneously simultaneously.
Many documents about miniature antenna are arranged, as U.S. Patent number: 5,712,647 in various countries' patent documentation.These patent working method differences, but all belong to the direct electricity driving antenna assembly of certain medium as substrate.Because the influence of incident wave causes the hosqt media heating, thereby makes energy loss in medium, the electromagnetic wave conversion efficiency that causes energy consumption to increase with antenna descends.And the isolation of antenna and treatment circuit is poor, causes signal to noise ratio to reduce, and causes the complexity of back-end circuit then.At present, the miniature antenna technology mainly contains dielectric resonance antenna and microstrip antenna.The advantage of dielectric resonance antenna is broadband and miniaturization.But the further miniaturization of dielectric resonance antenna need be used the dielectric material of high-k, and this will cause the reduction of antenna radiation efficiency.The method that solves this contradiction is to utilize photon crystal material.As China's public patent number of opening: CN1564374.But the theory of photonic crystal is still immature at present.And that the advantage of microstrip antenna is to be convenient to is integrated, and its shortcoming is to be used for narrowband systems.
Summary of the invention
In order to solve existing miniature antenna, the deficiency of volume, bandwidth, radiation efficiency, impedance matching, electromagnetic isolation degree, the invention provides a kind of electromagnetic wave one ultrasound piezoelectric crystal transducer antenna, this transducer utilizes piezoelectric crystal material and MEMS manufacturing technology, and, realize the structure of this antenna technology scheme according to solid state physics electromagnetic wave and polarity lattice interaction principle, ultrasound piezoelectric energy-conversion technique.This antenna is by make the film that covers cavity on cavity, and at sequentially built first electrode layer, first piezoelectric thin film layer, the second electrode lay, second piezoelectric thin film layer that cover on the film of cavity according to from bottom to top, thereby constitute antenna subelement with antenna function, at least two-layer piezoelectric thin film layer has two-layer electrode layer at least.
This antenna has been realized the reception or the signal of telecommunication-ultrasonic wave-electromagnetic emission of electromagnetic wave-ultrasonic wave-signal of telecommunication.By using two kinds of different physical layers, solved the problem of impedance matching, electromagnetic isolation degree deficiency at all.
The present invention utilizes on this antenna subelement two piezoelectric thin film layers to produce ultrasonic wave under signal of telecommunication excitation, any one deck piezoelectric thin film layer on each antenna subelement, have along piezoelectric thin film layer plane normal and the vibration that is parallel to the both direction on piezoelectric membrane plane, and two vibrations on first piezoelectric thin film layer and the second piezoelectric thin film layer normal direction are unidirectional.Two vibrations that are parallel to the first and second piezoelectric membrane in-planes are orthogonal.Their resultant vibration makes in piezoelectric crystal dipole do to revolve motion, thereby generates an electromagnetic field circularly polarised wave, i.e. irradiation of electromagnetic waves, or the reception that generates electromagnetic waves.Sound wave in piezoelectric propagation velocity than electromagnetic wave slow 4-5 the order of magnitude, promptly its ultrasonic wave is propagated wavelength also than short 4-5 the order of magnitude of electromagnetic wavelength under the same frequency, thereby makes antenna size reduce significantly.When by selecting the antenna subelement of suitable size dimension, increase substantially the electromagenetic wave radiation and the received signal intensity of antenna subelement thereby make electromagnetic wave, ultrasonic wave and antenna subelement take place to resonate.
Can increase electromagenetic wave radiation power or receiving efficiency by the antenna subelement arrangement of using a plurality of identical sizes.
Thereby can make the broadening of frequency resonance scope improve electromagenetic wave radiation and frequency acceptance band width by arrangement and the combination of using the big or small a plurality of antenna subelements of difference.Also increase simultaneously electromagenetic wave radiation power or receiving efficiency.
Theoretical foundation that the present invention adopts is:
According to the solid state physics theory, the mutual vibration of the positive and negative particle in the polar crystal can with the electromagnetic wave new vibration mode of formation that intercouples, be the mutual vibration of existing positive and negative particle, electromagnetic vibration mode is also arranged, this phenomenon is called electromagnetic coupled by physicist Huang Kun.Piezoelectric crystal is to belong to polar crystal, and negative ions is equivalent to the electric dipole moment in the piezoelectric crystal, can produce polarization field when excitation of electromagnetic wave, causes macroscopical electric field to make the lattice vibration in the piezoelectric crystal produce acoustic vibration thus; The acoustic vibration of lattice in like manner also can generate electromagnetic waves under certain condition.
According to crystal dynamics and classical electrodynamics, the lattice in the piezoelectric crystal comprises electric coupling polar moment, and lattice revolves vibration to be made it electric coupling polar moment and do to revolve vibration together, and electric coupling polar moment revolves the electric field that vibrational energy changes, the magnetic field that the electric field energy that is changing is changing; The electric field that the magnetic field energy that is changing is changing (schematic diagram is seen Fig. 8).In addition, because electromagnetic field can act on electric coupling polar moment in the mode of power, drive lattice and do to revolve vibration together.Be that electric coupling polar moment and lattice do to revolve vibration on the locus of balance point, meeting some requirements down, revolving of electricity coupling polar moment constitutes mutual resonance between vibration and the electromagnetic field, lattice vibration produces sound wave, and then produced and the corresponding macroscopical electric field of space electromagnetic wave, thereby produced electromagnetic pick up factor.
Independence and principle of stacking during according to the medium wave propagation of fluctuation dynamics simple harmonic vibration theory: some row simple harmonic vibration ripples meet in communication process, every row simple harmonic vibration ripple will keep its original vibration characteristics (frequency, wavelength, amplitude, direction of vibration), be not subjected to the influence of other simple harmonic vibration ripple.In the zone of meeting, the vector of the displacement that causes at this some when the displacement of arbitrary particle vibration is each row simple harmonic vibration ripple individualism and.
Utilize above-mentioned theory the present invention that lattice and electric coupling polar moment are analyzed as particle.The vibration of particle is that some row simple harmonic vibration ripples meet in communication process, at this moment the resultant displacement of particle be some row divide simple harmonic vibration vibration displacement vector and.At any time the position coordinates of t particle be (x, y, when z) t changes, x, y, z value reaches the particle position and also changes also along with change.
(x, y, movement locus z) are three-dimensional circles to particle, and the vibration of particle is to revolve vibration so at coordinate.Elucidated hereinafter divides the simple harmonic vibration vibration to come the synthetic vibration of revolving with some row.
For simply illustrate particle revolve vibration coordinate system (x, y, z) movement locus, the present invention earlier from the orthogonal simple harmonic vibration of both direction two-dimensional coordinate system (X, synthesizing Y) analyzed and can be obtained:
x＝A
1cos(ωt+
1)
y＝A
2cos(ωt+
2)
Orthogonal simple harmonic motion synthetic, at this moment the resultant displacement of particle be two branches vibrations displacement vector and.
At any time the position coordinates of t particle be (x, when y) t changes, x, y value reaches the particle position and also changes also along with change.Cancellation time t:
Setting phase difference for the sake of simplicity is: Δ =
2-
1=-pi/2 and A
1=A
2Its track is:
At this moment (x is a circle in y) to the resultant displacement track of particle at coordinate system.
Three vertical simple harmonic vibrations that direction is mutual, the masterpiece that can constitute three pairs of mutually orthogonal simple harmonic vibrations is used on the same particle.And the every pair of orthogonal simple harmonic vibration acts on vector and power on the particle, make particle produce displacement, the resultant displacement vector that synthesize with, make particle motion trace at two-dimensional coordinate system (X, Y), (Y, Z) and (X is respectively a circle in Z), so at three-dimensional system of coordinate (X, Y, Z) the vertical mutually displacement vector of dividing vibration of the three pairs of directions and, making the resultant displacement movement locus of particle is a three-dimensional circle at three-dimensional system of coordinate, then the mutual vertical simple harmonic vibration of these three pairs of directions claims to revolve vibration.
Technical solution of the present invention will be dealt with problems: by electromagnetic wave in the piezoelectric crystal and ultrasonic wave conversion under certain condition, realize the transducing of electromagnetic wave-ultrasonic wave-electricity.
In order to realize the present invention, according to above theory analysis, the electromagnetic wave that the present invention proposes produces the condition of intercoupling with electric dipole moment in the ultrasound piezoelectric crystal and lattice: satisfy in the above-mentioned piezoelectric crystal particle and produce and revolve vibration, i.e. vibration is revolved in electric dipole moment and lattice generation.
Electric dipole moment in the piezoelectric crystal and lattice generation are revolved vibration condition and are:
A. crystal is an ionic crystals, promptly has the piezoelectric crystal of electric dipole moment.
B. two-layer at least piezoelectric membrane polarised direction should satisfy: any one deck piezoelectric membrane, when being subjected to signal excitation, generation is along the piezoelectric membrane plane normal and be parallel to the vibration of the both direction of thin film planar, and first piezoelectric thin film layer and second piezoelectric thin film layer are unidirectional along two vibrations on the normal direction; And, being parallel to the vibration on the first piezoelectric membrane plane and being parallel to the second piezoelectric membrane plane vibration, its direction is orthogonal and two vibration phases are not same-phase or antiphase.
According to said structure, the present invention analyzes with fluctuation dynamics simple harmonic vibration theory, and a particle is subjected to the displacement that the motion of simple harmonic vibration power is produced.Because first piezoelectric thin film layer is closely to link to each other with second piezoelectric thin film layer, so the present invention is equivalent to the particle movement on the piezoelectric membrane from analyzing the physics particle perpendicular to the mid-depth point of two-layer piezoelectric membrane.
On signal excitation antenna subelement, first piezoelectric thin film layer or second piezoelectric thin film layer are done forced vibration under signal excitation, when forced vibration enters stable state, along simple harmonic vibration on the normal direction be unidirectional, can be considered:
Z＝ACOS(ωt+)
In the formula: A, are amplitude and the phase place of simple harmonic vibration along normal direction.Z is on the normal direction, the displacement of the same relatively equilbrium position of particle.Arbitrary piezoelectric thin film layer is done simple harmonic vibration under the pumping signal effect, make an other piezoelectric thin film layer forced vibration produce direct piezoelectric effect and promptly set up and the corresponding induction field of pumping signal.Phase difference under resonance state between forced vibration and the actuating force is :-pi/2.
When pumping signal and induction field acted on two piezoelectric thin film layers respectively: produce the simple harmonic vibration that is parallel to the simple harmonic vibration on the first piezoelectric membrane plane and is parallel to the second piezoelectric membrane plane, its direction was orthogonal.Can obtain:
x＝A
1cos(ωt+
1)
y＝A
2cos(ωt+
2)
Orthogonal simple harmonic motion synthetic, at this moment the resultant displacement of particle be two branches vibrations displacement vector and.
At any time the position coordinates of t particle be (x, when y) t changes, x, y value reaches the particle position and also changes also along with change.Cancellation time t:
When the antenna subelement is in the off-resonance state, phase difference =
2-
1Be not equal to zero or π just two branch vibration phases be not same-phase or antiphase, the track of its particle is oval.
When the antenna subelement is in resonance state, phase difference is Δ =
2-
1=-pi/2 is produced on A together because of two lamination conductive films again
1=A
2Its track is:
At this moment (x is a circle in y) to the resultant displacement track of particle at coordinate system.
The simple harmonic vibration of its normal direction of two-layer piezoelectric membrane plane and the simple harmonic vibration of adjacent piezoelectric membrane horizontal direction constitute orthogonal simple harmonic vibration again, same particle is subjected to the mutually effect of vertical simple harmonic vibration power, the resultant displacement track that produces also be a circle or oval (see figure 9) in two-dimensional coordinate (X, Z), (Y, Z) lining respectively.
Below analyzed respectively same particle be subjected to two mutually vertical simple harmonic vibration power act on movement locus in the two-dimensional coordinate, same in fact as shown in figure 10 particle can decompose the directed force F of the simple harmonic vibration of three directions
31, F
32, F
33, in three-dimensional coordinate system (X, Y, Z), can constitute three pairs of mutually orthogonal simple harmonic vibrations again, and its phase place is not that the masterpiece of same-phase or antiphase is used on the same particle.When the antenna subelement was in resonance state, the phase difference between the every pair of forced vibration and the actuating force was :-pi/2 is circle or elliptical orbit at resultant displacement that two-dimensional coordinate produces, and its circle or oval formed plane are again orthogonal in three-dimensional system of coordinate.It is stable that this particle moves in dynamical system, and the rotational trajectory that particle is done at three dimensions around balance point is three-dimensional circle, promptly revolves vibration.
Electromagnetic wave signal is activated on the antenna subelement, its electric dipole moment can produce polarization field, cause macroscopical electric field to produce, its macroscopical electric field acts on again and produces the inverse piezoelectric effect active force on the two-layer piezoelectric membrane of antenna subelement, because the specific polarised direction of two-layer piezoelectric membrane, produce the specific direction active force, make and do to revolve vibration around lattice is in the equilbrium position, produce ultrasonic wave; The vibration of revolving of lattice simultaneously drives electric coupling polar moment and does to revolve vibration and produce resonance again and then with the excitation of electromagnetic wave signal.
Alternate electrical signal is activated on the antenna subelement, produce the inverse piezoelectric effect active force on its two-layer piezoelectric membrane, because the specific polarised direction of two-layer piezoelectric membrane, produce the specific direction active force, make and do to revolve vibration around lattice is in the equilbrium position, the electric coupling polar moment of vibration drive that revolves of lattice is done to revolve vibration, generates electromagnetic waves; Electromagnetic wave is activated on the antenna subelement again alternately simultaneously, makes lattice do to revolve vibration and produces resonance again and then with ultrasonic wave.
The present invention has realized the mutual conversion of electromagnetic wave energy, acoustic wave energy and electric flux by the conversion of mutual excitation of electromagnetic wave-ultrasonic wave-electricity and mutual resonance.Also finished simultaneously the synthetic of pumping signal and decomposed, promptly received the electromagnetic signal of telecommunication, or applied alternate electrical signal and realize electromagnetic relay by two electrodes.
Because light wave also is a kind of electromagnetic wave, is suitable for light wave-ultrasonic wave transducer equally, realize opto-electronic conversion.
Description of drawings
Fig. 1 is the profile of antenna subelement: 1. substrate, 2. cover the film of cavity, 3. first electrode, 4. second electrode, 5. second piezoelectric film, 6. first piezoelectric film, 7. cavity.
Fig. 2 is electromagnetic wave one a ultrasound piezoelectric crystal transducer antenna schematic diagram of the present invention: 8. Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna, 10. lead-out wire, the 9. source that inputs or outputs of the signal of telecommunication of two electrode layers.
Fig. 3 is the cutaway view of Fig. 2: the 11.th, and the second electrode lay connecting line.
Fig. 4 makes N cavity on substrate.
Fig. 5 is Fig. 2 partial 3 d cutaway view Amplified image.
Fig. 6 is the partial enlarged drawing of the second electrode lay and the second electrode lay connecting line among Fig. 3.
Fig. 7 is a top view of making different big or small cavitys on the substrate.
Fig. 8 is the schematic diagram of electromagnetic wave propagation principle.
Fig. 9 is that a particle is being subjected to the effect of two mutually vertical simple harmonic vibration power respectively, and particle is around the locus of balance point O, the movement locus in three two-dimensional coordinates respectively.
Figure 10 is a two-layer piezoelectric membrane in the antenna subelement, because the specific polarised direction of two-layer piezoelectric membrane, under pumping signal, the component of vertical and the horizontal specific direction of producing.
Embodiment
The present invention produces the condition that intercouples for lattice and the electric dipole moment that satisfies in electromagnetic wave and the ultrasound piezoelectric crystal, and this example adopts the MEMS processing technology to realize.Owing to can realize that MEMS machining process route of the present invention is more, and depend on concrete equipment and technical conditions, present case has just been sketched the main preparation process of part with reference to description of drawings:
1. go up according to required antenna subelement (Fig. 1) quantity and Pareto diagram and cavity (7) opening physical dimension making mask at silicon wafer substrate (1) with reference to Fig. 4.
2. by dry plasma etch or chemical wet etching, form cavity (7).
3. on other a slice silicon wafer, make the etch stop layer with doping method or electrochemical process.And make the thickness of etch stop layer as required.
4. etch stop aspect and 2. silicon wafers that form cavity (7) faces with 3. silicon wafer carry out bonding.
5. again by dry plasma etch or chemical wet etching, make 3. silicon wafer be corroded to the etch stop layer, promptly made the film (2) that covers cavity.
6. with reference to the profile of Fig. 1 antenna subelement, covering on the cavity film (2) sputter first electrode (3) successively, first piezoelectric film (6), (and with reference to Fig. 4) second electrode (4) N and connecting line (11), second piezoelectric film (5) with the plasma magnetron sputtering.
7. the crystalline orientation of conductive film (6) (5) is neutralized in ion magnetron sputtering piezoelectric membrane (6) (5) process time control, make any one deck piezoelectric membrane (6) (5) on each antenna subelement (Fig. 1), when being subjected to signal excitation (Fig. 2 (9)), generation is along the piezoelectric membrane plane normal and be parallel to the vibration of the both direction of thin film planar, and first piezoelectric membrane (6) layer and second piezoelectric membrane (5) layer on the normal direction two vibrations be unidirectional; And, being parallel to the vibration on first piezoelectric membrane (6) plane and being parallel to second piezoelectric membrane (5) plane vibration, its direction is orthogonal.The polarization orientation that is this two-layer piezoelectric membrane (6) (5) is respectively 33,32 directions and 33,31 directions.See Figure 10.Polarization orientation makes two-layer piezoelectric membrane piezoelectric modulus: d
33d
31And d
32Obtain maximization, as one timing of signal source (9) e signal strength signal intensity, the power F of three orthogonal simple harmonic vibrations
1, F
2, F
3Be proportional to d
33, d
31And d
32
8. by above-mentioned technology and structure, can produce a plurality of antenna subelements (Fig. 1) and arrange (seeing Fig. 2 and Fig. 3), again the lead-out wire (10) of first electrode layer (3) and two electrode layers of the second electrode lay (Fig. 6 (4) (11)) and the source that inputs or outputs (9) of the signal of telecommunication be linked together.Thereby constituted Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna of the present invention (8).
Piezoelectric membrane (6) (5) has at least two-layer, 7 described polarization orientations more than their resultant vibrations satisfy at least when multilayer.
The Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna course of work is as follows:
A. when signal of telecommunication e is applied on first electrode film (3) and the second electrode lay (4), shown in following formula: at vertical piezoelectric coefficient d
33, longitudinal elastic coefficient S
33 E, d
31Horizontal piezoelectric modulus, S
31 EUnder transverse elasticity coefficient situation, the 33 direction stress (Figure 10) that produced at first piezoelectric membrane (6):
The power that produces 31 directions is:
F
1Be delivered to second piezoelectric membrane (5), second piezoelectric membrane (5) piezoelectric coefficient d
33Coefficient of elasticity S
33 EWhen equaling first electrode film (3) coefficient, and d
32Be horizontal piezoelectric modulus, s
E 32Under transverse elasticity coefficient situation, because second piezoelectric membrane (5) polarization orientation is 32 directions, then F
31Second piezoelectric membrane (5) electric field that produces there is not contribution, so F
1Act on the electric field that second piezoelectric membrane (5) is produced:
The power that is produced 32 directions by e ' is:
F
32＝(d
32/s
E 32)·e’
Piezoelectric membrane (6) (5) common property has been given birth to F
31, F
32, F
33The power of the vibration that three directions are mutually orthogonal.The masterpiece that can constitute three pairs of mutually orthogonal vibrations is used on the same particle.When antenna subelement (Fig. 1) when being in resonance state, each is-pi/2 promptly to produce and revolve vibration the phase difference between forced vibration and the actuating force.
B. electromagnetic field is used for the electric coupling polar moment of piezoelectric membrane (6) (5) with masterpiece, makes it motion.Moving electric coupling polar moment both had been subjected to the power of electric field, also was subjected to the power in magnetic field, can produce polarization field during electric coupling polar moment resonance, caused macroscopical electric field to make piezoelectric membrane produce mechanical resonant thus, and principle is with the described F that also produced of a.
31, F
32, F
33Three vibration forces that direction is mutually orthogonal, piezoelectric membrane produce mechanical resonant makes lattice and electric coupling polar moment do to revolve vibration on the locus of balance point again, and then again and constitute mutual resonance between electromagnetic field and the ultrasonic wave.
Then the structure fabrication of above Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna has satisfied the condition of a. and b., the lattice and the electric dipole moment that have also satisfied simultaneously in electromagnetic wave and the ultrasound piezoelectric crystal produce the condition that intercouples, and the present invention has also realized revolving vibration wave synthesizing in decomposition to single simple harmonic vibration ripple.Promptly electromagnetic reception and emission have been realized at the signal of telecommunication input/output terminal (10) of this antenna.
The universalness and the variation of modern wireless mobile apparatus, also more and more higher to the requirement of frequency bandwidth, volume, radiation efficiency, impedance matching, cost.
For having solved the problem of the problems referred to above and existing antenna deficiency, use technical characterictic of the present invention, the technique effect of setting forth the certainty that addresses these problems generation is:
1. its ultrasonic wave is propagated wavelength also than short 4-5 the order of magnitude of electromagnetic wavelength under the same frequency, when radio high frequency waves and microwave applications, the area of the piezoelectric membrane (6) (5) on the antenna subelement (Fig. 1) has only ten microns to the hundreds of micron, thereby makes antenna size reduce significantly.
2. when antenna subelement (Fig. 1) by the suitable size dimension of selection, under signal excitation, make electromagnetic wave, ultrasonic wave and antenna subelement resonate, and, electromagnetic wave produces resonance when acting on electric coupling polar moment, piezoelectric belongs to the dielectric material of high-k, electricity coupling polar moment density height makes that electromagenetic wave radiation and the receiving efficiency on the unit are increases substantially.Arrange (see figure 3) by the antenna subelement (Fig. 1) that uses a plurality of identical size dimensions, can increase electromagenetic wave radiation power or receiving efficiency.
3. the present invention is a micron order because of the piezoelectric membrane size (6) (5) on the antenna subelement (Fig. 1), the permutation and combination (see figure 7) of a plurality of antenna subelements (Fig. 1) by using different sizes can make the broadening of frequency resonance scope, thereby has improved electromagenetic wave radiation and frequency acceptance band width.
4. what adopt because of the present invention is that the MEMS processing technology realizes, the same with semiconductor technology to have a quality consistency good, is convenient to produce in batches and high integrated characteristics.Again because, the conversion by two physical quantitys realizes electromagnetic emission and reception, has solved resistance matching problem, the isolation of antenna and treatment circuit has improved, and has simplified the treatment circuit of terminal, thereby has reduced cost.
5. when the intrinsic mechanical oscillation frequency of antenna subelement (Fig. 1) is consistent with the wave frequency of selected reception or emission: pumping signal makes antenna subelement (Fig. 1) produce mutually perpendicular three vibration forces, cause three hyperacoustic generations of orthogonal vibration, three synthetic again vibration waves that revolve of ultrasonic wave, the electric coupling polar moment of piezoelectric membrane (6) (5) lining generates electromagnetic waves along with revolving vibration wave, electromagnetic wave is not only had an effect but also is produced lattice with electric coupling polar moment and revolves vibration wave, and then causes ultrasonic wave and antenna subelement (Fig. 1) to produce resonance.This resonance that intercouples makes the conversion efficiency of electromagnetic wave-ultrasonic wave-signal of telecommunication improve, and has avoided the loss in medium of energy.
Piezoelectric membrane (6) (5) material, can be crystal can be macromolecular material also, as PVDF.
Because light wave also is a kind of electromagnetic wave, along with the MEMS processing technology enters nanometer, realizes that with the present invention photoelectric energy is converted into possibility mutually.
Claims (5)
1. electromagnetic wave one ultrasound piezoelectric crystal transducer antenna, be by make to cover the thin of cavity on the cavity and covering on the film of cavity sequentially built first electrode layer, first piezoelectric thin film layer, the second electrode lay, second piezoelectric thin film layer according to from bottom to top, thereby constitute the antenna subelement, it is characterized in that: antenna subelement with antenna effect, have two-layer piezoelectric thin film layer at least, have two-layer electrode layer at least.
2. electromagnetic wave one ultrasound piezoelectric crystal transducer antenna according to claim 1, when being activated at, electromagnetic wave signal applies alternating signal when excitation on antenna subelement or two electrodes at the antenna subelement, it is characterized in that: any one deck piezoelectric membrane on each antenna subelement, when being subjected to signal excitation, generation is along the piezoelectric membrane plane normal and be parallel to the vibration of the both direction of thin film planar, and first piezoelectric thin film layer and second piezoelectric thin film layer are unidirectional along two vibrations on the normal direction; And it is orthogonal being parallel to the vibration on the first piezoelectric membrane plane and being parallel to second its direction of piezoelectric membrane plane vibration.
3. electromagnetic wave one ultrasound piezoelectric crystal transducer antenna according to claim 1, piezoelectric membrane has at least two-layer, and their resultant vibrations satisfy claim 2 at least when multilayer.
4. Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna according to claim 1, constitute aerial array by arranging more than an antenna subelement, it is characterized in that: can be a plurality of antenna subelement permutation and combination that area and volume vary in size, also can be that the area antenna subelement identical with the volume size arranged.
5. Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna according to claim 1 and claim 2 are described, because light wave also is a kind of electromagnetic wave, are suitable for light wave-ultrasonic wave transducer equally.
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| CN 200610001801 CN101005152A (en) | 2006-01-20 | 2006-01-20 | Electromagneticwave-supersonicwave piezoelectric crystal transducer antenna |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2455749A (en) * | 2007-12-20 | 2009-06-24 | Dhiraj Sinha | Antenna using piezoelectric material |
| CN104013422A (en) * | 2013-02-28 | 2014-09-03 | 精工爱普生株式会社 | Ultrasonic transducer device, ultrasonic measurement apparatus, and ultrasonic imaging apparatus |
| CN104013421A (en) * | 2013-02-28 | 2014-09-03 | 精工爱普生株式会社 | Ultrasonic transducer device, head unit, probe, and ultrasonic imaging apparatus |
| CN104013420A (en) * | 2013-02-28 | 2014-09-03 | 精工爱普生株式会社 | Ultrasonic transducer device, head unit, probe, and ultrasonic imaging apparatus |
| CN108091982A (en) * | 2017-12-28 | 2018-05-29 | 中国电子科技集团公司第二十六研究所 | Micro-nano film magnetosonic antenna |
| CN108736157A (en) * | 2018-06-29 | 2018-11-02 | 西安电子科技大学 | Miniaturized low-frequency based on standing acoustic waves resonance structure/VLF emission antenna |
| CN109848023A (en) * | 2018-12-11 | 2019-06-07 | 吉林大学 | A PVDF Ultrasonic Transmitter with Double Cylindrical Structure |
| CN111864353A (en) * | 2020-07-28 | 2020-10-30 | 中山大学 | An ultra-small acoustic resonant antenna |
| CN112582780A (en) * | 2020-11-18 | 2021-03-30 | 电子科技大学 | Bulk acoustic wave magnetoelectric array antenna and preparation method thereof |
| CN113097699A (en) * | 2021-03-17 | 2021-07-09 | 清华大学 | Antenna and electronic device |
| CN113745796A (en) * | 2021-09-08 | 2021-12-03 | 哈尔滨工程大学 | Polarization controllable acoustic excitation antenna |
| CN115000710A (en) * | 2022-05-20 | 2022-09-02 | 安徽安努奇科技有限公司 | Antenna |
| CN120049856A (en) * | 2025-04-27 | 2025-05-27 | 浙江大学 | A micro piezoelectric antenna based on a thin film bulk acoustic resonator structure |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2455749A (en) * | 2007-12-20 | 2009-06-24 | Dhiraj Sinha | Antenna using piezoelectric material |
| CN104013420B (en) * | 2013-02-28 | 2019-06-28 | 精工爱普生株式会社 | Ultrasonic detector device, head unit, detector and ultrasound imaging device |
| CN104013422A (en) * | 2013-02-28 | 2014-09-03 | 精工爱普生株式会社 | Ultrasonic transducer device, ultrasonic measurement apparatus, and ultrasonic imaging apparatus |
| CN104013421A (en) * | 2013-02-28 | 2014-09-03 | 精工爱普生株式会社 | Ultrasonic transducer device, head unit, probe, and ultrasonic imaging apparatus |
| CN104013420A (en) * | 2013-02-28 | 2014-09-03 | 精工爱普生株式会社 | Ultrasonic transducer device, head unit, probe, and ultrasonic imaging apparatus |
| CN104013421B (en) * | 2013-02-28 | 2018-10-02 | 精工爱普生株式会社 | Ultrasonic transducer device, head unit, detector and ultrasound imaging device |
| CN108091982A (en) * | 2017-12-28 | 2018-05-29 | 中国电子科技集团公司第二十六研究所 | Micro-nano film magnetosonic antenna |
| CN108736157A (en) * | 2018-06-29 | 2018-11-02 | 西安电子科技大学 | Miniaturized low-frequency based on standing acoustic waves resonance structure/VLF emission antenna |
| CN108736157B (en) * | 2018-06-29 | 2020-08-21 | 西安电子科技大学 | Miniaturized low frequency/very low frequency transmitting antenna based on acoustic standing wave resonant structure |
| CN109848023A (en) * | 2018-12-11 | 2019-06-07 | 吉林大学 | A PVDF Ultrasonic Transmitter with Double Cylindrical Structure |
| CN109848023B (en) * | 2018-12-11 | 2024-04-30 | 吉林大学 | PVDF ultrasonic transmitter with double-cylinder structure |
| CN111864353A (en) * | 2020-07-28 | 2020-10-30 | 中山大学 | An ultra-small acoustic resonant antenna |
| CN112582780A (en) * | 2020-11-18 | 2021-03-30 | 电子科技大学 | Bulk acoustic wave magnetoelectric array antenna and preparation method thereof |
| CN113097699A (en) * | 2021-03-17 | 2021-07-09 | 清华大学 | Antenna and electronic device |
| CN113745796A (en) * | 2021-09-08 | 2021-12-03 | 哈尔滨工程大学 | Polarization controllable acoustic excitation antenna |
| CN113745796B (en) * | 2021-09-08 | 2023-11-17 | 哈尔滨工程大学 | A polarization controllable acoustically excited antenna |
| CN115000710A (en) * | 2022-05-20 | 2022-09-02 | 安徽安努奇科技有限公司 | Antenna |
| CN115000710B (en) * | 2022-05-20 | 2023-10-13 | 安徽安努奇科技有限公司 | Antenna |
| CN120049856A (en) * | 2025-04-27 | 2025-05-27 | 浙江大学 | A micro piezoelectric antenna based on a thin film bulk acoustic resonator structure |
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