[go: up one dir, main page]

CN100596266C - Electronic component mounting device and mounting method - Google Patents

Electronic component mounting device and mounting method Download PDF

Info

Publication number
CN100596266C
CN100596266C CN200680026381A CN200680026381A CN100596266C CN 100596266 C CN100596266 C CN 100596266C CN 200680026381 A CN200680026381 A CN 200680026381A CN 200680026381 A CN200680026381 A CN 200680026381A CN 100596266 C CN100596266 C CN 100596266C
Authority
CN
China
Prior art keywords
substrate
electronic component
mounting
mentioned
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200680026381A
Other languages
Chinese (zh)
Other versions
CN101223840A (en
Inventor
广濑圭刚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of CN101223840A publication Critical patent/CN101223840A/en
Application granted granted Critical
Publication of CN100596266C publication Critical patent/CN100596266C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/36Assembling printed circuits with other printed circuits
    • H05K3/361Assembling flexible printed circuits with other printed circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75745Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/758Means for moving parts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0269Marks, test patterns or identification means for visual or optical inspection
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16Inspection; Monitoring; Aligning
    • H05K2203/166Alignment or registration; Control of registration

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)

Abstract

An electronic component mounting device has a holding table (12) for holding a substrate; X, Y, and Theta drive sources (14, 19, 20) for driving the holding table in horizontal directions; a mountingtool (5) for holding an electronic component (4) and mounting it on the upper surface of a side section of the substrate, a backup tool (22) provided so that it can be driven in the vertical directionand supporting the lower surface of the side section of the substrate when the electronic component is mounted on the upper surface of the side section of the substrate; a camera (24) for imaging thesubstrate and the electronic component before the electronic component is mounted on the substrate; and a control device (25) positionally aligning the substrate and the electronic component based onan image signal from the camera, causing the backup tool to be lifted to support the lower surface of the side section of the substrate, making the camera re-image the substrate in that state, and causing the substrate and the electronic component to be positionally re-aligned if there is a positional displacement between the substrate and the electronic component.

Description

电子部件的安装装置和安装方法 Electronic component mounting device and mounting method

技术领域 technical field

本发明涉及在基板的侧部上表面安装电子部件的电子部件的安装装置和安装方法。The present invention relates to an electronic component mounting device and a mounting method for surface mounting electronic components on a side portion of a substrate.

背景技术 Background technique

例如,在液晶单元等基板上,经由作为粘接材料的各向异性导电部件而压装TCP(带载封装:Tape Carrier Package)等的电子部件。上述基板以下述方式构成,即,借助密封剂将两张玻璃板以规定间隔粘接,在这些玻璃板之间封入液晶,并且,在各玻璃板的外表面上分别贴装偏振片。并且,在上述结构的基板上,在一张玻璃板的侧部的、从另一张玻璃板的侧部向外突出的上表面(贴合时的内表面)上,沿着其侧部的长度方向而以带状粘接双面粘接性的上述各向异性导电部件,并借助该各向异性导电部件安装上述电子部件。For example, an electronic component such as a TCP (Tape Carrier Package) is press-mounted on a substrate such as a liquid crystal cell via an anisotropic conductive member as an adhesive material. The above-mentioned substrate is constituted by bonding two glass plates at a predetermined interval through a sealant, sealing liquid crystal between these glass plates, and attaching polarizing plates to the outer surfaces of the glass plates. And, on the substrate of the above-mentioned structure, on the side of one glass plate, on the upper surface (inner surface when bonding) protruding outward from the side of the other glass plate, along the side of the The above-mentioned anisotropic conductive member with double-sided adhesiveness is bonded in a tape shape in the longitudinal direction, and the above-mentioned electronic component is mounted through the anisotropic conductive member.

在上述基板的侧部上表面安装电子部件的情况下,必须将形成于上述电子部件上的外引线相对于形成于基板上的单元侧引线精密地对位。最近,配线图案正在逐渐高密度化,例如,引线的宽度尺寸达到20μm左右,而相邻外导线的间隔达到50μm左右,因此,有时必须将电子部件在上述单元侧引线的节距方向上相对于基板精密地定位,才能可靠地将彼此的引线电连接。When electronic components are mounted on the side upper surface of the substrate, it is necessary to precisely align the outer leads formed on the electronic components with respect to the unit-side leads formed on the substrate. Recently, the density of the wiring pattern is gradually increasing. For example, the width of the lead wire reaches about 20 μm, and the interval between adjacent outer wires reaches about 50 μm. Therefore, it is sometimes necessary to arrange the electronic components in the pitch direction of the above-mentioned unit side leads. The precise positioning of the substrate can reliably connect the leads to each other electrically.

用于将上述电子部件安装到上述基板上的安装装置具有保持上述基板的保持台。在使基板的安装电子部件的侧部从上述保持台的侧缘向外突出、并用背撑工具保持该侧部的下表面的状态下,将保持在安装工具上的电子部件安装到上述基板的侧部的上表面上。A mounting device for mounting the electronic component on the substrate includes a holding table for holding the substrate. In the state where the side portion of the substrate on which the electronic component is mounted protrudes outward from the side edge of the above-mentioned holding table, and the lower surface of the side portion is held by a backing tool, the electronic component held on the mounting tool is mounted on the side of the above-mentioned substrate. on the upper surface of the side.

在将上述电子部件安装到上述基板上之前,通过摄像机对设置在基板和电子部件上的各为一对的对位标记进行摄像,根据该摄像结果将基板和电子部件对位。并且,在将基板和电子部件在上下方向上对位之后,用上述背撑工具支承上述基板的侧部下表面,在该状态下,使上述安装工具下降而将上述电子部件安装到上述基板上。Before the electronic component is mounted on the substrate, a pair of alignment marks provided on the substrate and the electronic component is imaged by a camera, and the substrate and the electronic component are aligned based on the imaging result. Then, after the substrate and the electronic component are vertically aligned, the side lower surface of the substrate is supported by the backing tool, and the mounting tool is lowered in this state to mount the electronic component on the substrate.

另外,在通过背撑工具支承上述基板的侧部下表面之前,根据摄像机所摄得的摄像信号来将上述基板和上述电子部件定位。定位后的基板在其侧部上表面上安装电子部件之前,由上述背撑工具支承其侧部下表面。此时,基板的侧部由背撑工具顶起。In addition, before the side lower surface of the board is supported by the backing tool, the board and the electronic component are positioned based on the imaging signal picked up by the camera. Before mounting electronic components on the side upper surface of the positioned substrate, its side lower surface is supported by the above-mentioned backing tool. At this time, the sides of the substrate are lifted up by the backing tool.

若基板的侧部被背撑工具顶起,则相对于顶起之前,基板的侧部有时会相对于上述电子部件产生位置偏离。该位置偏离有时因为基板的挠曲而产生,而在基板以应力残留的状态被保持在保持台上的情况下,该位置偏离有时因顶起所导致的应力状态变化而产生等。When the side portion of the substrate is lifted up by the backing tool, the position of the side portion of the substrate may be shifted relative to the electronic component before the lifting. This positional deviation may occur due to deflection of the substrate, and when the substrate is held on the holding table in a state where stress remains, this positional deviation may be caused by a change in the state of stress due to lifting.

但是,以往是在通过背撑工具支承基板的侧部之前,通过摄像机对基板和电子部件进行摄像,根据该摄像信号将它们对位之后,通过背撑工具支承基板的侧部下表面,然后通过上述安装工具来安装电子部件。However, in the past, before the side portion of the substrate is supported by the backing tool, the substrate and the electronic components are imaged by a camera, and after they are aligned according to the imaging signal, the lower surface of the side portion of the substrate is supported by the backing tool, and then the above-mentioned Installation tool to install electronic components.

也就是说,即便由于基板的侧部下表面被背撑工具顶起并支承,而导致基板的侧部相对于电子部件产生位置偏离,也不对该位置偏离进行修正,而是直接安装电子部件。因此,有可能导致电子部件的安装精度降低,而不能可靠地将基板和电子部件之间的引线电连接。That is, even if the side portion of the substrate deviates from the electronic component due to the side lower surface of the substrate being lifted and supported by the backing tool, the positional deviation is not corrected, and the electronic component is directly mounted. Therefore, there is a possibility that the mounting accuracy of the electronic component may be lowered, and the lead wires between the substrate and the electronic component may not be reliably electrically connected.

发明内容 Contents of the invention

本发明提供一种电子部件的安装装置和安装方法,如果由于通过背撑工具支承基板而产生位置偏离,则能够对该位置偏离进行修正后将电子部件安装到基板上。The present invention provides an electronic component mounting device and a mounting method capable of mounting an electronic component on a substrate after correcting the positional deviation caused by supporting the substrate with a backing tool.

本发明是一种将电子部件安装到基板的侧部上表面上的安装装置,其特征在于,包括:保持机构,保持上述基板;驱动机构,沿水平方向驱动该保持机构;安装机构,保持上述电子部件并将该电子部件安装到上述基板的侧部上表面上;背撑工具,以能够在上下方向上驱动的方式设置,在通过上述安装机构将上述电子部件安装到上述基板的侧部上表面上时,对该基板的侧部下表面进行支承;摄像机构,在将上述电子部件安装到上述基板上之前,对上述基板和上述电子部件进行摄像;以及控制机构,在根据来自该摄像机构的摄像信号将上述基板和电子部件对位后,使上述背撑工具上升而支承上述基板的侧部下表面,在该状态下通过上述摄像机构再次对上述基板进行摄像,当上述基板和电子部件之间存在位置偏离时,重新进行上述基板和上述电子部件的对位。The present invention is a mounting device for mounting electronic components on the side upper surface of a substrate, which is characterized in that it includes: a holding mechanism for holding the above-mentioned substrate; a driving mechanism for driving the holding mechanism in a horizontal direction; a mounting mechanism for holding the above-mentioned Electronic components and mounting the electronic components on the side upper surface of the above-mentioned substrate; the back support tool is provided in a manner that can be driven in the vertical direction, and the above-mentioned electronic components are mounted on the side of the above-mentioned substrate by the above-mentioned mounting mechanism When on the surface, the side lower surface of the substrate is supported; the imaging mechanism, before the electronic component is mounted on the substrate, takes an image of the substrate and the electronic component; After the above-mentioned substrate and electronic components are aligned by the imaging signal, the above-mentioned backing tool is raised to support the side lower surface of the above-mentioned substrate. In this state, the above-mentioned substrate is imaged again by the above-mentioned imaging mechanism. When there is positional deviation, the alignment of the said board|substrate and the said electronic component is performed again.

另外,本发明是一种将电子部件安装到基板的侧部上表面上的安装方法,其特征在于,包括:摄像工序,对上述基板上的安装上述电子部件的部分及上述电子部件进行摄像;对位工序,根据上述摄像将上述基板和上述电子部件对位;支承工序,通过背撑工具支承对位后的基板的侧部下表面;判断工序,再次对由背撑工具支承的基板进行摄像而判断基板和上述电子部件之间是否存在位置偏离;再次对位工序,在存在位置偏离时再次对上述基板进行对位;以及安装工序,在上述基板和上述电子部件之间不存在位置偏离时,在由上述背撑工具支承的上述基板的侧板上表面上安装上述电子部件。In addition, the present invention is a mounting method for mounting an electronic component on a side upper surface of a substrate, comprising: an imaging step of imaging a portion of the substrate on which the electronic component is mounted and the electronic component; Alignment process, aligning the above-mentioned substrate and the above-mentioned electronic components according to the above-mentioned imaging; supporting process, supporting the side lower surface of the aligned substrate by the backing tool; judging process, again photographing the substrate supported by the backing tool Judging whether there is a positional deviation between the substrate and the above-mentioned electronic components; re-alignment process, re-aligning the above-mentioned substrate when there is a positional deviation; and installation process, when there is no positional deviation between the above-mentioned substrate and the above-mentioned electronic components, The electronic component is mounted on the upper surface of the side plate of the substrate supported by the backing tool.

附图说明 Description of drawings

图1是表示本发明一个实施方式的安装装置以及对该安装装置供给电子部件的供给装置的概略结构图。FIG. 1 is a schematic configuration diagram showing a mounting device and a supply device that supplies electronic components to the mounting device according to one embodiment of the present invention.

图2是表示安装装置的侧视图。Fig. 2 is a side view showing the mounting device.

图3是表示安装装置的背撑工具部分的侧视图。Fig. 3 is a side view showing a backing tool portion of the mounting device.

图4是表示设置在基板和电子部件上的对位标记的立体图。4 is a perspective view showing alignment marks provided on a substrate and an electronic component.

图5是对安装装置进行控制的控制电路的框图。Fig. 5 is a block diagram of a control circuit for controlling the mounting device.

图6是表示将电子部件安装到基板上时的工序的一部分的流程图。FIG. 6 is a flowchart showing a part of the process of mounting an electronic component on a substrate.

图7是表示图6所示工序的后续工序的流程图。Fig. 7 is a flow chart showing a step subsequent to the step shown in Fig. 6 .

具体实施方式 Detailed ways

下面,参照附图对本发明的一个实施方式进行说明。Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

图1表示电子部件的供给装置以及将从该供给装置供给来的电子部件安装到基板上的安装装置,上述供给装置具备部件供给台1。该部件供给台1沿周向以90度的间隔设置有4个载置部2(仅图示出3个),由第1驱动源3以各相差规定角度、例如90度的方式旋转驱动。在上述各载置部2上,通过未图示的吸附臂等供给TCP等电子部件4。FIG. 1 shows a supply device for electronic components and a mounting device for mounting electronic components supplied from the supply device on a substrate. The supply device includes a component supply table 1 . The component supply table 1 is provided with four mounting parts 2 (only three are shown) at intervals of 90 degrees in the circumferential direction, and is rotationally driven by the first driving source 3 so as to be different from each other by a predetermined angle, for example, 90 degrees. Electronic components 4 such as TCP are supplied to each of the loading sections 2 described above by a suction arm not shown in the figure or the like.

供给并载置在上述部件供给台1的载置部2上的电子部件4被交接给构成上述安装装置的安装工具5。上述安装工具5沿由第2驱动源6以各相差90度的方式旋转驱动的分度台7的周向,以90度的间隔设置。上述安装工具5具有压力缸8和安装在该压力缸8的杆9上的吸附头11。The electronic component 4 supplied and placed on the mounting portion 2 of the component supply table 1 is delivered to a mounting tool 5 constituting the mounting device. The mounting tools 5 are arranged at intervals of 90 degrees along the circumferential direction of the index table 7 rotationally driven by the second drive source 6 so as to be 90 degrees apart. The above-mentioned installation tool 5 has a pressure cylinder 8 and a suction head 11 mounted on the rod 9 of the pressure cylinder 8 .

上述吸附头11被与上述部件供给台1及上述分度台7同步地旋转驱动,从而被定位在上述部件供给台1的载置部2的上方。在该状态下,当上述压力缸8被驱动时,上述吸附头11下降而吸附并保持被供给并载置在上述载置部2上的电子部件4。The suction head 11 is rotationally driven synchronously with the component supply table 1 and the index table 7 , and is positioned above the mounting portion 2 of the component supply table 1 . In this state, when the pressure cylinder 8 is driven, the suction head 11 descends to suction and hold the electronic component 4 supplied and placed on the placement unit 2 .

吸附并保持在上述吸附头11上的电子部件4被安装到液晶显示面板等基板W的侧部上表面上。上述基板W以其安装上述电子部件4的侧部比上述保持台12的侧缘更向外突出的方式被吸附并保持在作为保持机构的保持台12的上表面上。The electronic component 4 sucked and held by the suction head 11 is mounted on the side upper surface of the substrate W such as a liquid crystal display panel. The substrate W is sucked and held on the upper surface of the holding table 12 as a holding mechanism so that the side portion on which the electronic component 4 is mounted protrudes outward from the side edge of the holding table 12 .

如图2所示,上述保持台12能够向XY方向以及θ方向驱动。即,保持台12以能够由X驱动源14沿着箭头所示的X方向驱动的方式设置在X台13上。在该X台13的下表面上,沿着与上述X方向垂直的Y方向设置有一对承接部件13a。这些承接部件13a以能够沿着沿上述Y方向设置的一对Y导轨16移动的方式被支承在基座15上。As shown in FIG. 2 , the above-mentioned holding table 12 can be driven in the XY direction and the θ direction. That is, the holding table 12 is provided on the X stage 13 so as to be drivable in the X direction indicated by the arrow by the X driving source 14 . On the lower surface of the X table 13, a pair of receiving members 13a are provided along the Y direction perpendicular to the X direction. These receiving members 13 a are supported by the base 15 so as to be movable along a pair of Y guide rails 16 provided along the above-mentioned Y direction.

在上述X台13的下表面上设置有内螺纹体17,在该内螺纹体17中螺合有螺纹轴18。该螺纹轴18由Y驱动源19旋转驱动。由此,上述X台13被向Y方向驱动。进而,保持台12的保持上述基板W的部分被θ驱动源20向旋转方向在水平面上驱动。由此,上述保持台12能够在X、Y方向以及θ方向上进行驱动。An internally threaded body 17 is provided on the lower surface of the above-mentioned X stage 13, and a threaded shaft 18 is screwed into the internally threaded body 17. As shown in FIG. The threaded shaft 18 is rotationally driven by a Y drive source 19 . Thereby, the said X stage 13 is driven to a Y direction. Furthermore, the part of the holding table 12 holding the above-mentioned substrate W is driven in the rotation direction on the horizontal plane by the θ drive source 20 . Accordingly, the holding table 12 can be driven in the X, Y directions, and θ directions.

在上述基座15的沿X方向延伸的一个端部上,立设有支承体21。在该支承体21的上端设置有与支承体21宽度尺寸相同的背撑工具22。该背撑工具22由内置于图1和图3所示的上述支承体21中的压力缸等Z驱动源23向图1至图3中的箭头Z所示的上下方向驱动。图3表示背撑工具22下降后的状态,图1和图2表示上升后的状态。A support body 21 is erected on one end portion of the base 15 extending in the X direction. A backing tool 22 having the same width as the support body 21 is provided at the upper end of the support body 21 . The backing tool 22 is driven in the vertical direction indicated by the arrow Z in FIGS. 1 to 3 by a Z drive source 23 such as a pressure cylinder built in the support body 21 shown in FIGS. 1 and 3 . FIG. 3 shows the state after the backing tool 22 is lowered, and FIGS. 1 and 2 show the state after it is raised.

如图3所示,在上述支承体21的宽度方向两侧设置有构成摄像机构的一对摄像机24。如图4所示,一对摄像机24在同一视野中对设置于上述电子部件4的一对第1对位标记m1、和设置于上述基板W的安装电子部件4的端子部27的两侧的一对第2对位标记m2进行摄像。As shown in FIG. 3 , a pair of cameras 24 constituting an imaging mechanism are provided on both sides in the width direction of the support body 21 . As shown in FIG. 4 , a pair of cameras 24 monitor the pair of first alignment marks m1 provided on the above-mentioned electronic component 4 and the two sides of the terminal portion 27 of the electronic component 4 mounted on the above-mentioned substrate W in the same field of view. A pair of 2nd alignment mark m2 is imaged.

即,上述电子部件4在其一侧边上以规定间隔形成有一对上述第1对位标记m1,在上述基板W上以与一对第1对位标记m1相同的间隔形成有一对上述第2对位标记m2。That is, the electronic component 4 has a pair of first alignment marks m1 formed at a predetermined interval on one side thereof, and a pair of second alignment marks m1 is formed on the substrate W at the same interval as the pair of first alignment marks m1. Alignment mark m2.

如图5所示,一对摄像机24的摄像信号被输入控制装置25。控制装置25将来自摄像机24的信号转换成数字信号,根据该转换计算出各为一对的电子部件4的第1对位标记m1与基板W的第2对位标记m2的位置偏离量。As shown in FIG. 5 , imaging signals of a pair of cameras 24 are input to a control device 25 . The control device 25 converts the signal from the camera 24 into a digital signal, and calculates the amount of positional deviation between the first alignment mark m1 of each pair of electronic components 4 and the second alignment mark m2 of the substrate W based on the conversion.

然后,根据计算结果驱动上述X驱动源14、Y驱动源19以及θ驱动源20,向X、Y以及θ方向驱动上述保持台12,从而将上述基板W与上述电子部件4对位。即,将基板W相对于保持在安装工具5上的电子部件4对位。Then, the X drive source 14 , Y drive source 19 and θ drive source 20 are driven based on the calculation results, and the holding table 12 is driven in the X, Y and θ directions to align the substrate W and the electronic component 4 . That is, the substrate W is aligned with respect to the electronic component 4 held on the mounting tool 5 .

将基板W相对于电子部件4对位后,上述控制装置25向上升方向驱动Z驱动源23,将安装电子部件4的基板W的端部下表面用上述背撑工具22加以支承。After aligning the substrate W with respect to the electronic component 4 , the control device 25 drives the Z drive source 23 in the upward direction, and supports the bottom surface of the end portion of the substrate W on which the electronic component 4 is mounted by the backing tool 22 .

如图3所示,上述背撑工具22的宽度尺寸设定成,比设置于上述电子部件4上的一对第1对位标记m1的间隔稍小。即,电子部件4的宽度尺寸比背撑工具22的宽度尺寸大。上述安装工具5的宽度尺寸设定成与上述背撑工具22的宽度尺寸大致相同。As shown in FIG. 3 , the width dimension of the backing tool 22 is set to be slightly smaller than the interval between the pair of first alignment marks m1 provided on the electronic component 4 . That is, the width dimension of the electronic component 4 is larger than the width dimension of the backing tool 22 . The width dimension of the above-mentioned mounting tool 5 is set to be substantially the same as the width dimension of the above-mentioned backing tool 22 .

由此,上述基板W被定位到示教位置上,在该基板W的上方通过上述分度台7的旋转而对保持在上述安装工具5上的电子部件4进行定位,之后,能够通过设置在支承体21的宽度方向两侧的一对摄像机24,而从下方在同一视野内对位于上下方向的基板W的第2对位标记m2以及电子部件4的第1对位标记m1进行摄像。Thereby, the above-mentioned substrate W is positioned on the teaching position, and the electronic component 4 held on the above-mentioned mounting tool 5 is positioned by the rotation of the above-mentioned index table 7 above the substrate W. A pair of cameras 24 on both sides in the width direction of the support body 21 captures images of the second alignment mark m2 of the substrate W and the first alignment mark m1 of the electronic component 4 in the vertical direction from below within the same field of view.

接着,参照图6和图7所示的流程图对通过上述结构的安装装置将电子部件安装到基板W的侧部上表面上时的动作进行说明。Next, the operation when the electronic component is mounted on the side upper surface of the substrate W by the mounting apparatus configured as described above will be described with reference to the flow charts shown in FIGS. 6 and 7 .

首先,在步骤1(以下将步骤记做S)中,将基板W供给到保持台12上,并将该基板W吸附并保持到上述保持台12上。在S2中,将上述保持台12驱动到预先示教的位置上。由此,上述基板W的安装电子部件4的侧部被定位在上述背撑工具22的上方。接着,在S3中,旋转驱动分度台7,将吸附并保持有电子部件4的安装工具5定位到上述基板W的侧部附近。First, in step 1 (hereinafter referred to as step S), the substrate W is supplied onto the holding table 12 , and the substrate W is sucked and held on the above-mentioned holding table 12 . In S2, the above-mentioned holding table 12 is driven to the previously taught position. Accordingly, the side portion of the substrate W on which the electronic component 4 is mounted is positioned above the backing tool 22 . Next, in S3, the index table 7 is rotationally driven, and the mounting tool 5 holding the electronic component 4 is positioned near the side portion of the substrate W described above.

将电子部件4和基板W定位到预先设定好的示教位置后,在S4中,通过一对摄像机24对设置在电子部件4和基板W上的各为一对的第1、第2对位标记m1、m2分别进行摄像。即,各摄像机24分别在同一视野内对以微小的高度差而位置接近的第1、第2对位标记m1、m2进行摄像。After positioning the electronic component 4 and the substrate W to the preset teaching position, in S4, through a pair of cameras 24, a pair of first and second pairs respectively arranged on the electronic component 4 and the substrate W are The bit marks m1 and m2 are respectively imaged. That is, each camera 24 images the 1st and 2nd alignment marks m1 and m2 which are positioned close to each other with a slight difference in height within the same field of view.

摄像机24的摄像信号被输入控制装置25并进行图像处理。由此,在S5中,计算出各第1对位标记m1和第2对位标记m2之间的位置偏离量。即,计算出电子部件4和基板W之间在X、Y以及θ方向上的位置偏离量。The imaging signal of the camera 24 is input into the control apparatus 25, and image processing is performed. Thereby, in S5, the positional displacement amount between each 1st alignment mark m1 and the 2nd alignment mark m2 is calculated. That is, the positional displacement amounts in the X, Y, and θ directions between the electronic component 4 and the substrate W are calculated.

接着,在S6中,控制装置25根据计算出的位置偏离量来向X、Y以及θ方向驱动上述保持台12也就是基板W,将基板W相对于电子部件4对位。将基板W相对于电子部件4对位后,在S7中,背撑工具22由Z驱动源23向上升方向驱动。由此,基板W中安装电子部件4的部分的下表面被上述背撑工具22顶起而支承。Next, in S6 , the control device 25 drives the above-mentioned holding table 12 , that is, the substrate W in the X, Y, and θ directions based on the calculated amount of positional deviation, and aligns the substrate W with respect to the electronic component 4 . After aligning the board|substrate W with respect to the electronic component 4, in S7, the backing tool 22 is driven to the upward direction by the Z drive source 23. Thereby, the lower surface of the portion of the substrate W where the electronic component 4 is mounted is lifted up by the backing tool 22 and supported.

通过背撑工具22支承基板W的侧部后,在S8中,通过一对摄像机24再次对设置在基板W上的第2对位标记m2进行摄像。即,在基板W的侧部由背撑工具22顶起的状态下,计算出基板W的第2对位标记m2与电子部件4的第1对位标记m1的坐标并进行比较。接着,在S9中,根据算出的第1、第2对位标记m1、m2的坐标来判断在基板W和电子部件4之间是否产生了位置偏离。After the side part of the board|substrate W is supported by the backing tool 22, in S8, the 2nd alignment mark m2 provided on the board|substrate W is imaged again by a pair of camera 24. That is, the coordinates of the second alignment mark m2 of the substrate W and the first alignment mark m1 of the electronic component 4 are calculated and compared in a state where the side portion of the substrate W is pushed up by the backing tool 22 . Next, in S9 , it is determined whether or not positional displacement has occurred between the substrate W and the electronic component 4 based on the calculated coordinates of the first and second alignment marks m1 and m2 .

当电子部件4和基板W之间没有产生位置偏离时,前进到S10,在S10中,向下降方向驱动安装工具5而将所吸附并保持的电子部件4安装到基板W上。When there is no positional deviation between the electronic component 4 and the substrate W, the process proceeds to S10. In S10, the mounting tool 5 is driven in the downward direction to mount the attracted and held electronic component 4 on the substrate W.

在由于通过背撑工具22将基板W顶起而在电子部件4与基板W之间产生了位置偏离的情况下,前进到S11,在S11中,向下降方向驱动背撑工具22。接着,向X、Y以及θ方向驱动上述基板W,并根据在S8中求出的位置偏离量来修正基板W相对于电子部件4的位置。修正基板W的位置偏离后,返回到S7,重复进行上述动作。When the positional deviation between the electronic component 4 and the substrate W has occurred due to the substrate W being pushed up by the backing tool 22 , the process proceeds to S11 , and the backing tool 22 is driven in the downward direction in S11 . Next, the substrate W is driven in the X, Y, and θ directions, and the position of the substrate W relative to the electronic component 4 is corrected based on the amount of positional deviation obtained in S8. After the positional deviation of the substrate W is corrected, the process returns to S7 and the above operations are repeated.

在S11中再次进行基板W的对位时,使背撑工具22下降。因此,即便向X、Y以及θ方向驱动基板W,基板W的下表面也不会在背撑工具的上端面上滑动,所以能够平滑而且可靠地进行基板W的对位。When aligning the substrate W again in S11, the backing tool 22 is lowered. Therefore, even if the substrate W is driven in the X, Y, and θ directions, the lower surface of the substrate W does not slide on the upper end surface of the backing tool, so that the substrate W can be aligned smoothly and reliably.

这样,在将电子部件4安装到基板W上时,根据摄像机24的摄像结果将电子部件4和基板W对位,然后通过背撑工具22支承基板W的侧部下表面。并且,在将电子部件4安装到基板W上之前,通过摄像机24再次对基板W进行摄像。结果,如果在电子部件4和基板W之间产生了位置偏离,则使背撑工具22下降而再次重新进行基板W的定位。In this way, when mounting the electronic component 4 on the substrate W, the electronic component 4 and the substrate W are aligned based on the imaging result of the camera 24 , and then the side lower surface of the substrate W is supported by the backing tool 22 . And before the electronic component 4 is mounted on the board|substrate W, the board|substrate W is imaged again by the camera 24. As shown in FIG. As a result, if a positional deviation occurs between the electronic component 4 and the substrate W, the backing tool 22 is lowered to reposition the substrate W again.

即,在将电子部件4安装到基板W上时,即使由于用背撑工具22顶起基板W而使得基板W产生挠曲等进而导致基板W相对于电子部件4的位置发生偏离,也能在对该位置偏离进行修正后安装电子部件4。因此,能够相对于基板W以较高的定位精度安装电子部件4。That is, when the electronic component 4 is mounted on the substrate W, even if the substrate W is deflected by lifting the substrate W with the backing tool 22 and the position of the substrate W relative to the electronic component 4 deviates, the The electronic component 4 is mounted after correcting the positional deviation. Therefore, it is possible to mount the electronic component 4 with respect to the substrate W with high positioning accuracy.

另外,在上述一个实施方式中,在通过背撑工具支承住基板的侧部下表面之后,通过摄像机对电子部件和基板进行摄像,再反复进行根据该摄像的基板的定位修正,但一般来说,由背撑工具支承基板而产生的位置偏离通常通过一次修正就能修正,并且接下来通过背撑工具将基板顶起并支承时几乎不会产生位置偏离。In addition, in the above-mentioned one embodiment, after the side lower surface of the substrate is supported by the backing tool, the electronic component and the substrate are imaged by the camera, and the positioning correction of the substrate based on the image is repeated, but in general, The positional deviation caused by the support of the substrate by the backing tool can usually be corrected by one correction, and there is almost no positional deviation when the substrate is lifted and supported by the backing tool next.

因此,也可以设计成,通过背撑工具支承基板时的位置偏离修正仅进行一次,在第二次通过背撑工具支承基板时不检测电子部件与基板的位置偏离,而直接将上述电子部件安装到基板上。Therefore, it can also be designed that the positional deviation correction is performed only once when the substrate is supported by the backing tool, and the positional deviation between the electronic component and the substrate is not detected when the substrate is supported by the backing tool for the second time, and the above-mentioned electronic component is directly mounted. onto the substrate.

另外,上述实施方式中,在电子部件和基板之间产生位置偏离的情况下,在S11中,在向下降方向驱动背撑工具之后进行对位,但即便不使背撑工具下降就进行对位也没关系。In addition, in the above-mentioned embodiment, in the case where a positional deviation occurs between the electronic component and the substrate, in S11, the backing tool is driven in the lowering direction and the alignment is performed, but even if the backing tool is not lowered, the alignment is performed. does not matter.

如果不使背撑工具下降就进行对位,则不存在再次通过背撑工具将定位后的基板顶起的情况,所以能够消除由于顶起而导致基板产生位置偏离的可能性。If alignment is performed without lowering the backing tool, the positioned substrate does not need to be lifted up again by the backing tool, so the possibility of positional deviation of the substrate due to the lifting can be eliminated.

进而,如果不使背撑工具下降就进行对位,则在进行基板与电子部件在X、Y以及θ方向上的位置修正之后,不必进行使背撑工具上升的动作即能将电子部件安装到基板上,所以能够缩短安装所需要的生产间隔时间。Furthermore, if alignment is performed without lowering the backing tool, after the position correction of the substrate and the electronic component in the X, Y, and θ directions is performed, the electronic component can be mounted on the backing tool without raising the backing tool. On the substrate, it is possible to shorten the production interval time required for mounting.

另外,上述实施方式中,是将基板向X、Y以及θ方向驱动来进行其相对于电子部件的对位,但如果是向基板供给电子部件的安装工具不设置在分度台上、且能够向X、Y以及θ方向进行驱动的状态,则也可以不进行基板的位置修正,而进行电子部件的位置修正。In addition, in the above-mentioned embodiment, the substrate is driven in the X, Y, and θ directions to perform alignment with respect to the electronic components, but if the mounting tool for supplying the electronic components to the substrate is not installed on the In the state of driving in the X, Y, and θ directions, the position correction of the electronic component may be performed instead of the position correction of the substrate.

如果取代基板而将电子部件向X、Y以及θ方向驱动来实施对位,则与使基板和保持台一起移动来进行对位的情况相比,能够减少惯性力和振动的产生,所以不仅能够进一步缩短对位所需的时间,而且能够提高对位精度以及安装精度,进而能够借助生产间隔时间的缩短来实现生产率的提高。If electronic components are aligned in the X, Y, and θ directions instead of the substrate, inertial force and vibration can be reduced compared The time required for alignment can be further shortened, and the alignment accuracy and mounting accuracy can be improved, and further, productivity can be improved by shortening the production interval time.

工业实用性Industrial Applicability

根据本发明,如果将基板和电子部件对位后由背撑工具支承基板的侧部,则对基板再次进行摄像来确认是否产生了位置偏离,在有位置偏离的情况下进行修正,因此能够相对于基板高精度地安装电子部。According to the present invention, after aligning the substrate and the electronic component, the side of the substrate is supported by the backing tool, and the substrate is imaged again to confirm whether there is a positional deviation, and if there is a positional deviation, it is corrected, so it is possible to compare Electronic parts are mounted on the substrate with high precision.

Claims (7)

1、一种电子部件的安装装置,将电子部件装到基板的侧部上表面上,其特征在于,包括:1. A mounting device for electronic components, which mounts the electronic components on the side upper surface of the substrate, characterized in that it includes: 保持机构,保持上述基板;a holding mechanism for holding the above-mentioned substrate; 驱动机构,沿水平方向驱动该保持机构;A driving mechanism drives the holding mechanism in a horizontal direction; 安装机构,保持上述电子部件并将该电子部件安装到上述基板的侧部上表面上;a mounting mechanism holding the electronic component and mounting the electronic component on the side upper surface of the substrate; 背撑工具,以能够在上下方向上驱动的方式设置,在通过上述安装机构将上述电子部件安装到上述基板的侧部上表面上时,对该基板的侧部下表面进行支承;a backing tool configured to be drivable in an up-and-down direction, and to support the side lower surface of the substrate when the electronic component is mounted on the side upper surface of the substrate by the mounting mechanism; 摄像机构,在将上述电子部件安装到上述基板上之前,对上述基板和上述电子部件进行摄像;以及an imaging mechanism for imaging the substrate and the electronic components before mounting the electronic components on the substrate; and 控制机构,在根据来自该摄像机构的摄像信号将上述基板和电子部件对位后,使上述背撑工具上升而支承上述基板的侧部下表面,在该状态下通过上述摄像机构再次对上述基板进行摄像,当上述基板和电子部件之间存在位置偏离时,重新进行上述基板和上述电子部件的对位。The control mechanism, after aligning the above-mentioned substrate and the electronic component based on the imaging signal from the imaging mechanism, raises the above-mentioned backing tool to support the side lower surface of the above-mentioned substrate. Imaging, and when there is a positional deviation between the substrate and the electronic component, alignment of the substrate and the electronic component is performed again. 2、如权利要求1所述的电子部件的安装装置,其特征在于,在上述基板和电子部件之间存在位置偏离时,上述控制机构使上述背撑工具下降而重新进行上述基板和上述电子部件的对位。2. The electronic component mounting apparatus according to claim 1, wherein when there is a positional deviation between the substrate and the electronic component, the control mechanism lowers the backing tool to reinstall the substrate and the electronic component. of counterpoint. 3、如权利要求1所述的电子部件的安装装置,其特征在于,在上述基板的安装上述电子部件的位置上以规定的间隔设置有一对第1对位标记,在上述电子部件上以与第1对位标记相对应的间隔设置有一对第2对位标记,上述背撑工具的宽度尺寸设定成小于一对第2对位标记的间隔,3. The electronic component mounting apparatus according to claim 1, wherein a pair of first alignment marks are provided at predetermined intervals on the position of the substrate on which the electronic component is mounted, and on the electronic component in the same manner as A pair of second alignment marks are provided at intervals corresponding to the first alignment marks, and the width dimension of the backing tool is set to be smaller than the interval between the pair of second alignment marks, 上述摄像机构是一对摄像机,该一对摄像机分别在同一视野内对位于相对置的位置上的第1、第2对位标记中的一方和第1、第2对位标记中的另一方进行摄像。The above-mentioned imaging mechanism is a pair of cameras, and the pair of cameras respectively monitors one of the first and second alignment marks and the other of the first and second alignment marks at opposite positions within the same field of view. camera. 4、如权利要求1所述的电子部件的安装装置,其特征在于,上述安装机构是以规定间隔沿分度台的周向设置的多个安装头,上述基板与上述电子部件的对位通过上述驱动机构沿水平方向驱动上述基板来进行。4. The mounting device for electronic components according to claim 1, wherein the mounting mechanism is a plurality of mounting heads arranged at predetermined intervals along the circumferential direction of the index table, and the alignment between the substrate and the electronic components is performed by The drive mechanism drives the substrate in the horizontal direction. 5、一种电子部件的安装方法,将电子部件安装到基板的侧部上表面上,其特征在于,包括:5. A method for installing an electronic component, wherein the electronic component is mounted on the side upper surface of the substrate, characterized in that it comprises: 摄像工序,对上述基板上的安装上述电子部件的部分及上述电子部件进行摄像;an imaging step of imaging a portion of the substrate on which the electronic component is mounted and the electronic component; 对位工序,根据上述摄像将上述基板和上述电子部件对位;Alignment process, aligning the above-mentioned substrate and the above-mentioned electronic components according to the above-mentioned imaging; 支承工序,通过背撑工具支承对位后的基板的侧部下表面;The supporting process, supporting the side lower surface of the aligned substrate through a backing tool; 判断工序,再次对由背撑工具支承的基板进行摄像而判断基板和上述电子部件之间是否存在位置偏离;The judging step is to take an image of the substrate supported by the backing tool again to judge whether there is a positional deviation between the substrate and the above-mentioned electronic components; 再次对位工序,在存在位置偏离时再次对上述基板进行对位;以及Re-alignment process, when there is a position deviation, the above-mentioned substrate is re-aligned; and 安装工序,在上述基板和上述电子部件之间不存在位置偏离时,在由上述背撑工具支承的上述基板的侧部上表面上安装上述电子部件。In the mounting step, when there is no positional displacement between the substrate and the electronic component, the electronic component is mounted on the side upper surface of the substrate supported by the backing tool. 6、如权利要求5所述的电子部件的安装方法,其特征在于,在再次将上述基板对位时,使上述背撑工具下降。6. The electronic component mounting method according to claim 5, wherein the backing tool is lowered when the substrate is aligned again. 7、如权利要求5所述的电子部件的安装方法,其特征在于,在上述基板上设置有一对第1对位标记,在上述电子部件上设置有一对第2对位标记,并且在同一视野内对上述第1对位标记和第2对位标记进行摄像。7. The method of mounting an electronic component according to claim 5, wherein a pair of first alignment marks is provided on the substrate, a pair of second alignment marks is provided on the electronic component, and they are in the same field of view. The above-mentioned 1st alignment mark and the 2nd alignment mark are imaged inside.
CN200680026381A 2005-08-24 2006-08-10 Electronic component mounting device and mounting method Active CN100596266C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP243085/2005 2005-08-24
JP2005243085 2005-08-24
PCT/JP2006/315844 WO2007023692A1 (en) 2005-08-24 2006-08-10 Electronic component mounting device and method

Publications (2)

Publication Number Publication Date
CN101223840A CN101223840A (en) 2008-07-16
CN100596266C true CN100596266C (en) 2010-03-24

Family

ID=37771443

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200680026381A Active CN100596266C (en) 2005-08-24 2006-08-10 Electronic component mounting device and mounting method

Country Status (5)

Country Link
JP (1) JP4664366B2 (en)
KR (1) KR101014292B1 (en)
CN (1) CN100596266C (en)
TW (1) TW200715436A (en)
WO (1) WO2007023692A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4829813B2 (en) * 2007-03-01 2011-12-07 芝浦メカトロニクス株式会社 Electronic component mounting apparatus and mounting method
KR101095189B1 (en) * 2007-05-25 2011-12-16 시바우라 메카트로닉스 가부시끼가이샤 Mounting device and mounting method of electronic parts
JP4937857B2 (en) * 2007-08-03 2012-05-23 芝浦メカトロニクス株式会社 Electronic component mounting apparatus and mounting method
JP4852513B2 (en) * 2007-11-01 2012-01-11 パナソニック株式会社 Component mounting system
JP4918015B2 (en) * 2007-11-01 2012-04-18 パナソニック株式会社 Component mounting method
US8319831B2 (en) * 2009-03-25 2012-11-27 Fuji Xerox Co., Ltd. Component manipulating method, component extracting method, component assembling method, component manipulating apparatus, component extracting apparatus, and component assembling apparatus
JP2011035028A (en) * 2009-07-30 2011-02-17 Juki Corp Electronic component-mounting apparatus
KR101096460B1 (en) 2010-10-01 2011-12-20 다래비젼주식회사 Substrate Attachment Attachment Method Using Substrate Attachment Attachment Device
DE102015106224B4 (en) * 2015-04-22 2022-09-01 Asm Assembly Systems Gmbh & Co. Kg Process for repeated measurement of a component carrier located in a placement area of a placement machine, as well as placement machine and computer program for carrying out this method
JP6675356B2 (en) * 2016-08-16 2020-04-01 芝浦メカトロニクス株式会社 Electronic component mounting equipment
CN110301172B (en) * 2017-02-20 2022-02-01 株式会社富士 Component mounting system and component mounting method
JP7285303B2 (en) * 2017-09-28 2023-06-01 芝浦メカトロニクス株式会社 Mounting equipment for electronic components and method for manufacturing display members
TWI871033B (en) * 2022-09-29 2025-01-21 日商芝浦機械電子裝置股份有限公司 Mounting device and substrate manufacturing device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10284891A (en) * 1997-04-02 1998-10-23 Matsushita Electric Ind Co Ltd Component mounting method and device
JP2000277991A (en) * 1999-03-25 2000-10-06 Shibaura Mechatronics Corp Component mounting apparatus and method
JP3941767B2 (en) * 2003-10-16 2007-07-04 松下電器産業株式会社 Work mounting apparatus and work mounting method

Also Published As

Publication number Publication date
CN101223840A (en) 2008-07-16
WO2007023692A1 (en) 2007-03-01
KR20080046614A (en) 2008-05-27
KR101014292B1 (en) 2011-02-16
JPWO2007023692A1 (en) 2009-02-26
TW200715436A (en) 2007-04-16
JP4664366B2 (en) 2011-04-06
TWI311792B (en) 2009-07-01

Similar Documents

Publication Publication Date Title
CN100596266C (en) Electronic component mounting device and mounting method
US8074351B2 (en) Part mounting device and part mounting method
CN210429751U (en) Semiconductor device chip mounting device and mechanism for aligning multiple semiconductor devices
KR100913579B1 (en) Bonding device for driving circuit board and its method
CN103079393B (en) Electronic component mounting device
JP2018029172A (en) Crimping device
JP4489025B2 (en) Crimping device
EP1339098B1 (en) Component mounting apparatus and component mounting method
JP2014083787A (en) Screen printing method and screen printing apparatus
JP5371590B2 (en) Mounting processing equipment and display board module assembly line
CN101584032B (en) Electronic device mounting device and mounting method
KR20120054615A (en) Apparatus and method for mounting electronic component
CN108091287B (en) Panel lighting inspection device
JP5017041B2 (en) Component mounting method and apparatus
KR100487581B1 (en) Bonding device of surface mounting equipment
KR101017522B1 (en) Bonding Head Alignment Structure of Chip-on-Glass Bonding Device
JP4959958B2 (en) Panel holder, panel assembly equipment
CN112331582A (en) Chip mounting device and method for manufacturing semiconductor device
CN111862805A (en) Method of manufacturing display device
JP4262162B2 (en) Electronic component mounting equipment
KR102758008B1 (en) Apparatus for Mounting Micro IC Type Flip
JP2000031211A (en) Bonding apparatus and bonding method
KR100900710B1 (en) Display panel and PC adhesive
JP3886850B2 (en) Alignment mark position detection method
JP5095544B2 (en) Electronic component mounting apparatus and mounting method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant