CN100571848C - Exhaust emission treatment equipment - Google Patents

Abstract

The invention discloses a waste gas emission treatment device, which comprises: a abatement system connected to an inlet zone of the exhaust emission treatment facility; an incinerator; an exhaust pipe connected to an outlet side of the incinerator; a first heat exchanger coupling the abatement system to the incinerator; the inlet end of the desorption fan is provided with a first pipeline, and the outlet end of the desorption fan is provided with a second pipeline connected to the waste reduction system; and an air pipe connecting the exhaust pipe and the first pipeline. The waste gas emission treatment equipment of the invention uses the wind pipe, which not only can effectively improve the gas temperature, but also can completely desorb the volatile organic waste gas adsorbed by the waste reduction system. In addition, when the waste gas discharge treatment equipment of the invention properly uses a valve to adjust the amount of waste gas entering the desorption fan, the same effect can be obtained without arranging a second heat exchanger as arranged in the existing organic exhaust treatment system, so the initial construction cost and the maintenance cost of the equipment can be greatly saved.

Description

Exhaust emission treatment equipment

technical field

The invention relates to waste gas treatment equipment, in particular to an organic exhaust gas treatment system (VOC abatement system) capable of improving the desorption effect.

Background technique

With the continuous development of the domestic economy, the semiconductor industry has become one of the lifelines of my country's economic development. However, issues such as environmental protection and worker safety, which have received international attention in recent years, have also had a great impact on the domestic semiconductor industry. And with the precision of high-tech products, even a very small amount of air pollutants may affect the product qualification rate, reliability and personnel health. Therefore, no matter from any point of view, such as environmental protection, worker safety and product competition, Air pollution dissipation and emission treatment in the semiconductor industry are important issues that cannot be ignored.

At present, most of the waste gas emitted by semiconductor factories is mainly volatile organic substances, inorganic acid and alkali gases, etc. The waste gas is characterized by large air volume (>50,000m ³ /hr) and low concentration (<500ppm CH ₄ ). Currently, VOC abatement systems, such as the equipment disclosed in Taiwan Patent Publication No. 0493056, are mostly used to treat large volumes of low-concentration volatile organic compounds (Volatile Organic Compounds, VOCs). This treatment system uses two major technologies, one is adsorption concentration, using zeolite or activated carbon to adsorb VOC gas; the other is oxidative combustion, the high-concentration gas produced by desorbing saturated zeolite or activated carbon with hot air is sent to the oxidation furnace. High-temperature combustion is used to deal with these high-concentration harmful gases. However, the temperature required for hot air desorption and oxidative combustion is extremely high. For example, the temperature of the hot air should be at least 150°C to 180°C for hot air desorption, and at least 760°C for oxidative combustion. Therefore, in order to save energy and cost, when hot air desorption and oxidative combustion are performed, additional sets of heat exchangers are added to increase the temperature after exchange.

However, the size and power of the heat exchanger will affect the temperature after the exchange. If the temperature is not raised enough, not only will the zeolite or activated carbon fail to achieve the required desorption temperature and desorption effect in the long run, but it will even reduce the organic exhaust gas. The efficiency with which the treatment system treats and burns exhaust gas. Therefore, in order to solve this problem, it is necessary to replace a new heat exchanger to improve heat exchange efficiency, or to increase the high-temperature combustion temperature of the oxidation furnace. in principle.

Contents of the invention

Accordingly, the purpose of the present invention is to provide an exhaust gas treatment equipment that can solve the problems existing in the existing organic exhaust gas treatment system and has a better desorption effect, so as to avoid affecting the entire exhaust gas due to the replacement of the heat exchanger. Processing schedule, and can greatly reduce costs and save energy.

In order to solve the aforementioned technical problems, the present invention provides a waste gas emission treatment equipment, which includes: a waste reduction system; an incinerator; an exhaust pipe connected to the outlet side of the incinerator; connecting the waste reduction system with the incinerator The first heat exchanger; the desorption fan, the inlet end of the desorption fan is connected with the first pipeline, and the outlet end of the desorption fan is connected with the second pipeline and connected to the waste reduction system; and connecting the The exhaust pipe and the air pipe of the first pipeline; wherein, the exhaust gas emission treatment equipment also includes a second pipeline, a second heat exchanger and a seventh pipeline, and the second pipeline is connected to the desorption The fan and the second heat exchanger, the seventh pipeline connects the second heat exchanger and the waste reduction system, and the gas used for desorption is sent to the second pipeline, the second heat exchanger and the seventh pipeline In the waste abatement system, the gas used for desorption in the second heat exchanger exchanges heat with the exhaust gas of the incinerator.

In addition, according to the present invention, the waste gas emission treatment equipment provided includes: a waste reduction system connected to the inlet area of the waste gas emission treatment equipment; an incinerator; an exhaust pipe connected to the outlet side of the incinerator; connecting the waste reduction system and the incinerator The first heat exchanger; the desorption fan, the inlet end of which is provided with a first pipeline, and its outlet end is provided with a second pipeline connected to the waste reduction system; and an air duct connecting the exhaust pipe and the first pipeline .

Since the waste gas emission treatment equipment of the present invention can increase the temperature at the inlet end of the desorption fan, the introduced external ambient gas can reach the desorption temperature after passing through the heat exchanger, and can indeed completely desorb the VOC gas adsorbed by the waste reduction system. In addition, the waste gas emission treatment equipment of the present invention can achieve the same effect even without installing the second heat exchanger in the existing organic exhaust gas treatment system, thus greatly saving the initial construction cost and maintenance cost of the equipment.

Description of drawings

In order to further understand the features and technical content of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings. Of course, these drawings are only for reference and auxiliary description, and are not intended to limit the present invention.

Fig. 1 is the schematic diagram of waste gas emission treatment equipment of the present invention;

Fig. 2 and Fig. 3 are partially enlarged schematic diagrams of the waste gas emission treatment equipment of the present invention.

Explanation of reference signs

50 Waste gas emission treatment equipment 52 Waste reduction system

54 Incinerator 56 Exhaust pipe

56a Upper exhaust pipe 56b Middle exhaust pipe

56c Lower Exhaust Pipe 58 First Heat Exchanger

60 Second heat exchanger 62 Desorption fan

64 The third pipeline 66 The fourth pipeline

68 The first pipeline 70 The second pipeline

72 Seventh pipeline 74 Fifth pipeline

76 Sixth pipeline 78 Eighth pipeline

80 Air Duct 82 First Valve

84 The first proportional valve 86 The second proportional valve

90 Third proportional valve 92 Fourth proportional valve

Detailed ways

Please refer to FIG. 1 to FIG. 3 . FIG. 1 to FIG. 3 are schematic diagrams of an exhaust emission treatment device 50 of the present invention. The waste gas emission treatment equipment 50 of the present invention includes a waste reduction system 52, an incinerator 54, an exhaust pipe 56 connected to the outlet side of the incinerator 54, a first heat exchanger 58, a second heat exchanger 60, a desorption fan 62, multiple Pipelines such as 64, 66, 68, 70, 72, 74, 76, 78 and the air duct 80. Wherein, the waste reduction system 52 can be an adsorption-desorption device such as a zeolite rotor or an activated carbon rotor, and the exhaust pipe 56 is composed of an upper exhaust pipe 56a, a middle exhaust pipe 56b and a lower exhaust pipe 56c.

As shown in Figure 1, the third pipeline 64 is arranged at the inlet of the waste abatement system 52, in order to make the low-concentration volatile organic waste gas such as volatile organic waste gas (VOC) produced at the end of the production equipment enter the abatement system. The waste system 52 is adsorbed. A fourth conduit 66 is provided at the outlet of the abatement system 52 and connected to the exhaust pipe 56 . When the volatile organic waste gas in the third pipeline 64 enters the waste reduction system 52 and is adsorbed, the waste gas becomes clean waste gas, and 90% of the clean air after adsorption passes through the fourth pipeline 66 and the exhaust pipe 56, and is discharged into the atmosphere; and the other 10% of the air volume is introduced into the system for desorption air volume.

The first pipeline 68 and the second pipeline 70 are respectively arranged at the inlet end and the outlet end of the desorption fan 62 , wherein the second pipeline 70 is further connected to the second heat exchanger 60 . When the gas (such as air) of the external environment flows into the first pipeline 68, the gas is blown to the second pipeline 70 through the desorption fan 62 and flows into the second heat exchanger 60 for heat exchange, so as to improve the efficiency of entering and reducing waste. The temperature of the gas in the system 52, and then desorb the organic substances (VOCs) adsorbed on the zeolite rotor or the activated carbon rotor in the waste reduction system 52. The waste abatement system 52 and the second heat exchanger 60 are connected by the seventh pipeline 72, so the gas heated by the second heat exchanger 60 can be used to improve the The temperature of the waste abatement system 52 is used to desorb the volatile organic waste gas adsorbed in the waste abatement system 52 to form high-concentration volatile organic waste gas.

After the high-concentration volatile organic waste gas is formed, the high-concentration volatile organic waste gas is then transmitted to the first heat exchanger 58 through the fifth pipeline 74 for heat exchange, so as to increase the temperature of the high-concentration volatile organic waste gas and complete preheating. Finally, the heated high-concentration volatile organic waste gas enters the incinerator 54 through the sixth pipeline 76 for oxidative combustion, and then is discharged into the atmosphere through the exhaust pipe 56 . Since the temperature required for oxidative combustion is relatively high, about 760°C, high-concentration volatile organic waste gas can be burned. Therefore, the present invention uses the first heat exchanger 58 to increase the temperature of high-concentration volatile organic waste gas to save gas energy.

In addition, when desorbing volatile organic waste gas in the prior art, the desorption temperature may be insufficient due to the improper design of the second heat exchanger or the blockage of the second heat exchanger, and the desorption effect is not good, which makes the waste reduction system 52 Complete desorption is impossible, which seriously affects the adsorption effect of the waste reduction system 52. For this reason, the present invention further connects an air pipe 80 and a first valve 82 between the exhaust pipe 56 and the first pipeline 68 to increase the temperature of the gas transmitted to the seventh pipeline 72 to 180°C-300°C. Between, so that the desorption temperature of waste abatement system 52 is maintained at about 180-250° C., thereby effectively desorbing the organic substances adsorbed on the zeolite runner or the activated carbon runner. Because the temperature of the volatile organic waste gas burned by the incinerator 54 is relatively high, about 760°C, and after the waste gas passes through the first heat exchanger, the temperature at the middle exhaust pipe 56b is still above 300°C, so the present invention utilizes The small amount of volatile organic waste gas after combustion is passed to the first pipeline 68 through the air duct 80 and the first valve 82, so that the temperature of the gas entering the desorption fan 62 at the beginning is heated from room temperature 30°C to about 80°C. The rise is at least above 50°C, so that the temperature of the ambient air after passing through the second heat exchanger 60 can be higher, and it can be controlled between 180°C and 300°C, so that the desorption temperature of the waste reduction system 52 It is effectively maintained at around 180-250°C to facilitate desorption. The pipeline design of the present invention can completely desorb the volatile organic waste gas adsorbed by the waste reduction system 52 .

It is worth noting that the present invention can also use the combination of pipelines and proportional valves to automatically control the temperature of the gas entering the waste reduction system 52 more effectively, as shown in FIG. 2 . FIG. 2 is a partial enlarged schematic view of the exhaust gas emission treatment device 50 of the present invention. The air duct 80 includes a first valve 82 , which can be a temperature-controlled manual valve, and is used to control the amount of volatile organic waste gas entering the first pipeline 68 . In addition, a first proportional valve 84 can be installed in the second pipeline 70, and a second proportional valve 86 can be installed in the eighth pipeline 78 to control the temperature of the gas for the second time. When the gas is mixed with the air duct 80 through the first pipeline 68 and passes through the desorption fan 62, if the temperature is too high, the first proportional valve 84 can be used to control the amount of gas entering the second heat exchanger 60 so that the gas that does not pass through the first heat exchanger 60 The gas from the second heat exchanger 60 passes through the eighth pipeline 78 to the seventh pipeline 72 to reduce the temperature of the gas entering the heat exchanger 60 . For example, if the temperature of the gas is 100°C after passing through the desorption fan 62, the temperature of the gas after passing through the second heat exchanger 60 becomes 230°C-250°C, but the desorption temperature only needs to be 150-180°C, so the first The proportional valve 84 controls 60%-80% of the gas to enter the second heat exchanger 60, while 40%-20% of the gas is passed to the seventh pipeline 72 through the eighth pipeline 78, thereby reducing the amount of gas passing through the second heat exchange. The gas temperature of the device 60. Wherein, the first and second proportional control valves are proportional automatic valves.

In addition, it is more noteworthy that, as mentioned above, since the volatile organic waste gas burned by the incinerator 54 can be passed through the middle exhaust pipe 56b to the air pipe 80 and then reaches the first pipeline 68, a third can be added in addition. The fourth proportional control valves 90 and 92 are respectively arranged on the air pipe 80 and the first pipeline 68 . Since the exhaust temperature of the middle exhaust pipe 56b is at least above 300° C., it can be adjusted by the suction of the desorption fan 62 and the third and fourth proportional control valves 90 , 92 . When the temperature is too high, open the third proportional control valve 90 and close the fourth proportional control valve 92; otherwise, if the temperature is too low, close the third proportional control valve 90 and open the fourth proportional control valve 92 In this way, it can be automatically adjusted to the set temperature. In addition, a filter (not shown) can be added in the second pipeline 70 to filter out particulate matter such as dust, so that The second heat exchanger 60 is omitted, thereby greatly reducing the cost of the equipment, as shown in FIG. 3 . Wherein, the third and fourth proportional control valves are proportional automatic valves.

In summary, compared with the prior art, the waste gas emission treatment equipment of the present invention has the following advantages: the waste gas emission treatment equipment of the present invention uses air ducts, which not only can effectively increase the gas temperature, but also can completely desorb the waste reduction system Adsorbed volatile organic waste gas. In addition, when the waste gas emission treatment equipment of the present invention properly uses the valve to adjust the amount of waste gas entering the desorption fan, it can achieve the same effect even without setting the second heat exchanger as in the existing organic exhaust gas treatment system. , so it can greatly save the initial construction cost and maintenance cost of the equipment.

The above only describes the preferred embodiments of the present invention, and all equivalent changes and modifications made within the scope of the claims of the present invention fall within the scope of protection claimed by the present invention.

Claims (11)

1. A waste gas emission treatment device comprising: waste reduction system; incinerator; an exhaust pipe connected to the outlet side of the incinerator; a first heat exchanger connecting the waste abatement system with the incinerator; A desorption fan, the inlet of the desorption fan is connected to a first pipeline, the outlet of the desorption fan is connected to a second pipeline and connected to the waste reduction system; and an air pipe connecting the exhaust pipe and the first pipeline; Wherein, the waste gas emission treatment equipment also includes a second pipeline, a second heat exchanger and a seventh pipeline, the second pipeline connects the desorption fan and the second heat exchanger, and the seventh pipeline connects the second Heat exchanger and waste reduction system, the gas used for desorption is sent to the waste reduction system through the second pipeline, the second heat exchanger and the seventh pipeline, and used in the second heat exchanger The desorbed gas exchanges heat with the exhaust gas of the incinerator. 2. The exhaust emission treatment facility of claim 1, wherein the abatement system is a zeolite wheel. 3. The exhaust emission treatment device of claim 1, wherein the abatement system is an activated carbon wheel. 4. The exhaust emission treatment device according to claim 1, wherein the air duct further comprises a first valve for controlling the amount of gas entering the first pipeline and the temperature of the gas. 5. The exhaust emission treatment device according to claim 4, wherein the first valve is a manual valve. 6. The exhaust emission treatment device according to claim 1, further comprising a third pipeline, a fourth pipeline, a fifth pipeline and a sixth pipeline, the third pipeline is used to send exhaust gas into The waste reduction system is used for adsorption, the fourth pipeline is used to transfer the adsorbed clean exhaust gas to the exhaust pipe, and the fifth pipeline connects the waste reduction system with the first heat exchange The sixth pipeline connects the first heat exchanger and the incinerator. 7. The exhaust emission treatment device according to claim 1, further comprising an eighth pipeline connecting the second pipeline and the seventh pipeline. 8. The exhaust emission treatment device according to claim 7, wherein the second pipeline of the desorption fan comprises a first proportional valve. 9. The exhaust emission treatment device according to claim 8, wherein the first proportional valve is used as an automatic temperature control valve for controlling the desorption temperature. 10. The exhaust emission treatment device according to claim 7, wherein the eighth pipeline of the desorption fan comprises a second proportional valve. 11. The exhaust emission treatment device according to claim 10, wherein the second proportional valve is used as an automatic temperature control valve for controlling the desorption temperature.

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