CN100570439C - Coating mechanism and coating method, defect correction device and defect correction method - Google Patents

Abstract

The invention provides a kind of application needle that can correctly, fast, easily apply liquid material.This application needle (1) forms taper at leading section, is provided with tabular surface (3) at front end, at the outer peripheral face formation groove (4) of leading section.When the tabular surface (3) of front end and substrate (6) when contacting, the printing ink (5) that stockpiles in (2) top, tapering and groove (4) flows out because of the capillarity forward end.Therefore, can easily apply a large amount of printing ink (5) fast.

Description

Coating mechanism and coating method, defect correction device and defect correction method

(1) Technical field

The present invention relates to a coating needle, a coating mechanism using the coating needle, a defect correction device, a coating method, and a method for correcting defects of a color filter for a liquid crystal display panel. A coating needle for applying a liquid material in contact with a fine region, a coating mechanism using the coating needle, a defect correction device, a coating method, and a defect correction method for a color filter for a liquid crystal display panel.

(2) Background technology

In recent years, as the size and definition of LCD (liquid crystal display) have increased, the number of pixels has also increased. Therefore, it is difficult to manufacture a defect-free LCD, and the probability of defects has gradually increased. Under such circumstances, in order to improve the yield of products, a defect correction device that corrects defects that occur in the manufacturing process of LCD color filters is essential to the production line.

In addition, LCDs of about 37 to 45 inches have been sold in the market recently, and the size of one pixel has also increased from about 60 μm×200 μm for small panels to about 200 μm×600 μm. With the increase of the pixel size, the defect size gradually increases, and the correction size also gradually increases. Under such circumstances, the correction quality, which was not a problem at a small correction size in the past, becomes a visible area at a large correction size, and thus becomes a problem gradually.

45( a ) to ( c ) are diagrams showing defects that occur in the color filter manufacturing process of LCDs. In Fig. 45(a)-(c), the color filter includes: a transparent substrate; a grid-like pattern called a black matrix 300 formed on its surface; a plurality of groups of R (red) pixels 301, G (green) pixels 302, and B (blue) pixel 303. In the manufacturing process of the color filter, the white defect 304 caused by the color loss of the pixel or black matrix 300 shown in FIG. 45 (a), the color mixing with adjacent pixels or The black defect 305 caused by the black matrix 300 bleeding into the pixel, the foreign matter defect 306 caused by the foreign matter shown in FIG. 45(c) adhering to the pixel, and the like.

There is a method of correcting the white defect 304 as follows: the ink of the same color as the pixel with the white defect 304 is attached to the tip of the coating needle, and the ink layer of the circular flat surface at the tip of the needle is transferred to the white defect 304. Above, the white defect 304 is covered with a circular ink layer (for example, refer to Patent Document 1). There is also the following method of correcting black defects 305 and miscellaneous defects 306: a rectangular white defect 304 is formed after the defect part is cut by laser, and a rectangular ink layer is transferred to the rectangular white defect by using a coating needle with a rectangular front flat surface. 304 (for example, refer to Patent Document 2).

[Patent Document 1] Japanese Patent Laid-Open No. 9-61296

[Patent Document 2] Japanese Patent Laid-Open No. 9-262520

However, in the method of Patent Document 1, as shown in FIG. 46, since the white defect 304 is covered with a circular ink layer larger than the white defect 304, the normal part around the white defect 304 is also coated with ink, and ink overlap occurs. Section 307. As described above, when the correction size increases, the overlapping portion 307 may be judged to be unacceptable by visual inspection.

Furthermore, only the ink adhering to the flat surface of the tip of the applicator needle is transferred and applied, so there is a problem that the amount of ink that can be applied at one time is small. If the coating is repeated many times, the amount of ink applied can be increased, but each time the application needle needs to reciprocate between the ink tank and the defect, the correction time becomes longer.

In the method of Patent Document 2, because the shape of the tip of the coating needle is rectangular, the ink can be applied to the same shape as the laser cut part, but it is necessary to position the tip of the coating needle on the laser cut part with high precision. department. However, with the increase in the size of the substrate in recent years, it is not easy to perform high-precision positioning on the entire surface of the substrate.

Because the coating size is determined by the size of the front end of the coating needle, when the laser cutting size changes, the coating needle needs to be replaced, which is inconvenient to operate.

Similar to Patent Document 1, only the ink adhering to the flat surface of the tip of the applicator needle is transferred and applied, so there is a problem that the amount of ink that can be applied at one time is small.

(3) Contents of the invention

The main object of the present invention is to provide a coating needle capable of accurately, quickly and easily coating liquid materials, a coating mechanism using the coating needle, a defect correction device, a coating method and a liquid crystal display panel. Correction method.

The coating mechanism of the present invention includes: a coating needle; a container for holding a liquid material; a drive unit for moving the coating needle, and when the liquid material is attached to the tip of the coating needle, the tip of the coating needle is brought into contact with the fine area on the substrate. Contact to apply the liquid material, a tapered portion tapered toward the front end is formed at the front end, a flat surface is formed at the front end, and a liquid material supply portion for supplying the liquid material attached to the front end to the front end is formed at the tapered portion .

It is characterized in that a through hole with approximately the same diameter as the coating needle is opened at the bottom of the container, and the driving part moves the coating needle relative to the container along its axis direction, and stops the front end of the coating needle at least two of the following Position: the standby position where the tip of the applicator needle contacts the liquid material in the container, and the applicator position where the tip of the applicator needle protrudes downward from the bottom of the container through the through hole.

The liquid material supply portion of the applicator needle is preferably a tank. It is preferable that a part of the groove is formed to have a wider width than the other part of the groove. The liquid material supply part is preferably a flat surface. Preferably, the flat surface is divided into a plurality of regions, and steps are provided between the plurality of regions. The liquid material supply part is preferably a concave curved surface. Preferably, the concave curved surface is divided into a plurality of regions, and steps are provided between the plurality of regions. Preferably, the tapered portion is divided into a plurality of sections, and the liquid material supply portion is a step provided between the plurality of sections.

It is preferable that the driving part of the coating mechanism has a holding member for holding the coating needle in a form inclined at a predetermined angle with respect to the substrate. parallel to the substrate.

In the defect correction device of the present invention, the fine region on the substrate is a defect portion of a fine pattern formed on the substrate. The defect correction device is characterized by comprising: a correction head having the coating mechanism, an observation optical system for observing a defective part, a laser irradiation mechanism for irradiating laser light to remove the defective part; a substrate table on which a substrate is placed; and The positioning mechanism moves the correction head and the substrate table relative to each other for positioning, and applies the liquid material attached to the tip of the application needle to the defective part for correction.

The driving part of the coating mechanism preferably includes: a first sub-driving part that moves the coating needle in its axial direction or a direction perpendicular to the substrate; and a second sub-driving part that moves the coating needle substantially parallel to the substrate, In the standby position, the tip portion of the application needle is outside the field of view of the observation optical system, whereas in the application position, the tip portion of the application needle is within the field of view of the observation optical system.

The application method of the present invention is characterized in that the liquid material is attached to the front end of the application needle of the application mechanism, and after the liquid accumulation is generated in the upper part of the taper by surface tension, the front end of the application needle is brought into contact with the application needle. When the substrate is in contact, the liquid material at the tip of the coating needle adheres to the substrate to cause uneven surface tension, and the liquid material is supplied from the liquid accumulation part to the contact part between the tip of the coating needle and the substrate through the liquid material supply part.

Preferably, the liquid material is applied linearly on the substrate by moving the application needle relative to the substrate in a state where the tip of the application needle is in contact with the substrate.

Preferably, the liquid material is attached to the tip of the coating needle tilted at a predetermined angle relative to the substrate, and the coating is performed while observing the coating state by bringing the tip of the coating needle into contact with the substrate within the field of view of the observation optical system.

The defect correction method of a color filter for a liquid crystal display panel according to the present invention is a method of correcting defects of a color filter for a liquid crystal display panel by coating by the coating mechanism. The color filter for a liquid crystal display panel includes a color filter film formed on a substrate. This defect correction method is characterized in that the color filter film is removed by laser in a region containing defects larger than the flat surface of the tip of the coating needle, and the tip of the coating needle with the liquid material for correction attached to the tip is inside the removed region, Then, the tip of the application needle is brought into contact with the normal portion around the region, and the correction liquid material is applied in an amount corresponding to the size of the removed color filter film.

Another defect correction method of a color filter for a liquid crystal display panel of the present invention is a method for correcting defects of a color filter for a liquid crystal display panel by using the coating of the coating mechanism, and is characterized in that the color filter for a liquid crystal display panel contains a The color filter film on the substrate is removed by laser in a region that is larger than the flat surface of the tip of the coating needle and contains defects. Inside this area, the tip of the application needle is relatively moved along the surface of the substrate to apply the liquid material for correction.

The applicator needle of the present invention has a tapered portion tapered toward the distal end, a flat surface at the distal end, and a liquid material supply portion for supplying liquid material adhering to the distal end to the distal end. Therefore, when the flat surface of the tip of the applicator needle is brought into contact with the substrate, the liquid material accumulated in the upper portion of the taper is supplied to the tip by the liquid material supply unit and coated on the substrate. Therefore, compared with the conventional method of transferring only the liquid material on the flat surface of the tip of the application needle onto the substrate, it is possible to quickly and easily apply a large amount of liquid material. For example, when applying ink to a white defect of a color filter, the ink can be applied to the entire white defect accurately, quickly and easily by bringing the tip of the application needle into contact with the white defect.

(4) Description of drawings

Fig. 1 is a diagram showing the configuration of a distal end portion of an applicator needle according to Embodiment 1 of the present invention.

Fig. 2 is a diagram showing a modified example of the first embodiment.

Fig. 3 is a diagram showing another modified example of the first embodiment.

Fig. 4 is a diagram showing still another modified example of the first embodiment.

FIG. 5 is a diagram showing an ink application method using the application needle described in FIGS. 1 to 4 .

FIG. 6 is another diagram showing an ink application method using the application needle described in FIGS. 1 to 4 .

Fig. 7 is still another diagram showing an ink application method using the application needle described in Figs. 1 to 4 .

Fig. 8 is still another diagram showing an ink application method using the application needle described in Figs. 1 to 4 .

9 is a diagram showing an ink application method using an application needle as a comparative example.

FIG. 10 is another diagram showing an ink application method using an application needle as a comparative example.

FIG. 11 is a diagram showing the configuration of an ink application mechanism using the application needle described in FIGS. 1 to 8 .

FIG. 12 is a diagram showing the overall configuration of a defect correction device including the ink application mechanism shown in FIG. 11 .

Fig. 13 is a diagram showing an ink application method according to Embodiment 2 of the present invention.

FIG. 14 is a diagram for explaining the effect of the ink application method shown in FIG. 13 .

Fig. 15 is a diagram showing a method of avoiding interference between the application needle and the objective lens shown in Fig. 14 .

Fig. 16 is a diagram showing the overall configuration of a defect correction device according to Embodiment 3 of the present invention.

Fig. 17 is a diagram showing the configuration and operation of the ink application mechanism shown in Fig. 16 .

Fig. 18 is a diagram showing the configuration of the distal end portion of an applicator needle according to Embodiment 4 of the present invention.

Fig. 19 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 18 .

Fig. 20 is a diagram showing a modified example of the fourth embodiment.

Fig. 21 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 20 .

Fig. 22 is a diagram showing another modified example of the fourth embodiment.

Fig. 23 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 22 .

Fig. 24 is a diagram showing still another modified example of the fourth embodiment.

Fig. 25 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 24 .

Fig. 26 is a diagram for explaining a method of manufacturing the applicator needle shown in Figs. 18 to 25 .

Fig. 27 is another diagram for explaining the method of manufacturing the applicator needle shown in Figs. 18 to 25 .

Fig. 28 is a diagram showing still another modified example of the fourth embodiment.

Fig. 29 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 28 .

Fig. 30 is a diagram showing still another modified example of the fourth embodiment.

Fig. 31 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 30 .

Fig. 32 is a diagram showing the configuration of the distal end portion of an applicator needle according to Embodiment 5 of the present invention.

Fig. 33 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 32 .

Fig. 34 is a diagram showing the configuration of the distal end portion of an applicator needle according to Embodiment 6 of the present invention.

Fig. 35 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 34 .

Fig. 36 is a diagram showing a modified example of the sixth embodiment.

Fig. 37 is a view showing the state of ink adhered to the tip of the applicator needle shown in Fig. 36 .

Fig. 38 is a diagram showing white defects corrected by the pattern correcting method according to the seventh embodiment of the present invention.

FIG. 39 is a diagram for explaining problems that occur when correcting the white defect shown in FIG. 38 .

FIG. 40 is another diagram for explaining problems that occur when correcting the white defect shown in FIG. 38 .

Fig. 41 is a diagram showing a pattern correction method according to Embodiment 7 of the present invention.

Fig. 42 is a diagram showing a modified example of the seventh embodiment.

Fig. 43 is a diagram showing another modified example of the seventh embodiment.

FIG. 44 is a diagram for explaining problems that occur when correcting the white defect shown in FIG. 43 .

Fig. 45 is a diagram showing defects generated on a color filter.

Fig. 46 is a diagram showing problems in the conventional ink application method.

(Description of component symbols)

1, 11, 91, 95, 96 applicator needle 2, 12, 92 taper

3, 13, 51, 93, 94 flat surface 4 slots

5 ink 6, 105 substrate

7, 10, 14, 52 ink layer 8 color filter film

9 Laser resection part 12a, 12b part

12c, 94c, 97c steps 21, 65 ink coating mechanism

22 coating needle drive cylinder 23 drive shaft

24, 54 holding member 25 rotating table

26 rotating shaft 27 notch

28～31 ink tanks 32 cleaning devices

33 Air blowing device 34 Electric motor

35 indexing boards 36 indexing sensors

37 Sensor for origin return 40, 62 Observation optical system

41CCD Camera 42Laser

43 Lighting for ink curing 44 Z-axis stage

45X-axis stage                   46Y-axis stage

47, 69 Computer for control 48 Operation panel

53 objective lenses 55 pairs of X-axis stages

61 Defect correction device 63 Monitor

64 Laser section for cutting 66 Substrate heating section

67 Image processing department 68 Main computer

70XY stage 71 clamping part

72Z Stage 73 Coating Cylinder

73a, 80a output shaft 74 coating components

75 Linear Guide 75a Guide Rail

75b sliding part 76 limiter

78 container 78a, 78b holes

80 cylinder block 81 shell

12a, 12b, 94a, 94b, 97a, 97b area 100, 300 black matrix

101, 301R pixels 102, 302G pixels

103, 303B pixels 104, 304 white defects

305 black defects 306 sundry defects

307 Overlap

(5) specific implementation

(Embodiment 1)

Fig. 1(a) is a front view showing the front end portion of the applicator needle 1 according to Embodiment 1 of the present invention, Fig. 1(b) is a bottom view thereof, and Fig. 1(c) is an enlarged portion A of Fig. 1(b) Fig. 1(d) is a cross-sectional view of the ID-ID line of Fig. 1(a), and Fig. 1(e) is an enlarged view of part B of Fig. 1(d).

In Fig. 1(a)-(e), a tapered part 2 is provided at the front end of the coating needle 1, and the tapered part 2 makes the sectional area of the coating needle 1 within the length range not affected by the ink surface tension. The area gradually expands from the front end of the application needle 1 toward the base end, and the front end of the application needle 1 is provided with a flat surface 3, and on the outer peripheral surface of the front end of the application needle 1, from the front end to the upper part of the tapered part 2 Grooves 4 of predetermined dimensions are formed.

In this way, by providing the tapered portion 2, the flat surface 3, and the groove 4 at the front end, when the applicator needle 1 is lifted from the ink tank, the upper portion of the tapered portion 2 generates an ink reservoir due to surface tension, and the flat surface 3 and its The vicinity is covered by a thin ink layer, and ink is accumulated in the groove 4 . When the flat surface 3 at the front end of the coating needle 1 is brought into contact with the substrate surface, the surface tension becomes unbalanced due to the adhesion of the ink to the substrate surface, and the ink accumulated in the upper part of the taper 2 and the groove 4 passes through due to capillary action. The tank 4 is supplied to the front and coated on the substrate. For example, when applying ink to a white defect of a color filter, by bringing the tip of the application needle 1 into contact with the center of the white defect, ink can be applied to the entire white defect accurately, quickly and easily.

The groove 4 may penetrate to the flat surface 3 as shown in FIGS. When the extruded ink is extruded toward the outer periphery, the position where the extruded ink and the ink stored in the groove 4 can be sufficiently connected may not penetrate to the flat surface 3 .

The cross-sectional shape of groove 4 both can be square shown in Fig. 1 (a)～(e), also can be semicircle shown in Fig. 2 (a), also can be wedge-shaped shown in Fig. 2 (b), any shape It will be all right.

The number of grooves 4 can be 1 as shown in Figure 1(a)～(e), or 2 as shown in Figure 3(a), or 3 as shown in Figure 3(b) , 4 shown in Fig. 3 (c), also can be more than 5. As the number of grooves 4 increases, the amount of ink stored in the grooves 4 increases, and the amount of ink flowing out to the contact portion between the application needle 1 and the substrate increases. A large amount of ink can be discharged in a shorter time, and the correction time can also be shortened.

The width of the groove 4 can be the same over the entire length of the groove 4 as shown in Figure 1(a)-(e), or it can be from the front end of the application needle 1 toward the base end as shown in Figure 4(a). Gradually expand. A polygonal wide portion may be formed at the center of the groove 4 as shown in FIG. 4( b ), or a circular wide portion may be formed at the center of the groove 4 as shown in FIG. 4( c ). Thus, by enlarging the width of the groove 4, the capacity of the groove 4 can be increased, and the same effect as that of the case of increasing the number of grooves 4 described above can be obtained. In the method of increasing the number of grooves 4 , when the diameter of the tip of the application needle 1 is small, the number of grooves 4 is limited. In such a case, the amount of ink stored in one groove 4 can be increased by enlarging the width of the groove 4 at the upper portion of the tip of the applicator needle 1 in this way.

Fig. 5(a) is a cross-sectional view showing a state where ink 5 is attached to the tip of the applicator needle 1 shown in Figs. . As the applicator needle 1 , a structure having two grooves 4 shown in FIG. 3( a ) is exemplified. When the ink 5 is attached to the tip of the applicator needle 1, the ink accumulates on the upper part of the taper 2 due to surface tension, and the ink 5 enters the groove 4 formed on the outer peripheral surface of the tip to become the ink 5. The state accumulated in tank 4.

Fig. 6 (a)～(e) is the sectional view that shows the action that ink 5 is coated on the substrate 6 surface by using the coating needle 1 shown in Fig. 5 (a) (b), Fig. 6 (f)～(j ) are enlarged views of the front end of the applicator needle 1 shown in FIGS. 6( a ) to ( e ), respectively.

First, as shown in Fig. 6 (a) (f), the application needle 1 with the ink 5 attached to the front end is held vertically with respect to the surface of the substrate 6, and the front end of the application needle 1 is positioned, for example, on a white defect. above the central part. Next, as shown in FIG. 6(b)(g), the flat surface 3 at the tip of the application needle 1 is brought into contact with the surface of the substrate 6 and held. As a result, the ink 5 adhering to the flat surface 3 at the tip of the applicator needle 1 is pushed toward the outer periphery of the flat surface 3 . At this time, the extruded ink 5 is connected to the ink 5 accumulated in the groove 4, so that the surface tension of the ink 5 is unbalanced, and the accumulated ink and the ink 5 accumulated in the groove 4 are due to capillary phenomenon as shown in Fig. 6(c) ) (h) to flow out to the contact portion between the coating needle 1 and the substrate 6 . The amount of ink 5 flowing out to the contact portion increases with time, and the amount of ink 5 flowing out from the application needle 1 to the surface of the substrate 6 can be controlled by the time the application needle 1 remains in contact with the substrate 6 .

As shown in FIG. 6(d)(e)(i)(j), when the application needle 1 is moved upward, the ink layer 7 is formed on the surface of the substrate 6 . When the application needle 1 is moved upward and a gap is formed between the surface of the substrate 6 and the flat surface 3 at the tip of the application needle 1 , the ink 5 also flows into the gap. At this moment, the flow velocity of the ink 5 is determined by the viscosity of the ink 5 and the wettability with respect to the surface of the substrate 6. By adjusting the speed at which the coating needle 1 moves upwards according to these conditions, the coating on the surface of the substrate 6 can be adjusted. The amount of ink 5 on the surface and the thickness of the ink layer 7.

As described above, the lower end of the groove 4 (the end in the front end direction of the application needle 1 ) only needs to be formed to a portion where the application needle 1 is held in contact with the surface of the substrate 6 so that it can be pushed from the flat surface 3 to the surface. The portion where the ink 5 on the outer periphery and the ink 5 stored in the groove 4 can be sufficiently connected does not necessarily have to penetrate to the flat surface 3 at the tip of the applicator needle 1 .

7( a ) to ( e ) are cross-sectional views showing another operation of applying the ink 5 to the surface of the substrate 6 using the application needle 1 shown in FIG. 5( a )( b ). In FIGS. 7( a ) to ( e ), a color filter film 8 is formed on the surface of the substrate 6 , and a part of the color filter film 8 is removed to form a rectangle after, for example, a black defect is ablated by a laser. In the past, a circular ink layer was transferred to cover the laser cut portion 9 by using an application needle having a circular flat surface larger than the laser cut portion 9, or a rectangular flat surface having the same size as the laser cut portion 9 was used. The coating needle transfers the rectangular ink layer on the laser cut part 9 . In the present invention, the applicator needle 1 having the flat surface 3 smaller than the laser cut portion 9 is used.

First, as shown in FIG. 7( a), the coating needle 1 to which the ink 5 of the same color as the color filter film 8 is attached to the front end is held vertically with respect to the surface of the substrate 6, and the front end of the coating needle 1 is positioned. above the central portion of the laser ablation portion 9 . Next, as shown in FIG. 7( b ), the flat surface 3 at the tip of the application needle 1 is brought into contact with the surface of the substrate 6 and held. As a result, the ink 5 adhering to the flat surface 3 at the tip of the applicator needle 1 is pushed toward the outer periphery of the flat surface 3 . At this time, the extruded ink 5 is connected to the ink 5 stored in the groove 4, and the ink 5 stored in the groove 4 is transferred to the contact between the coating needle 1 and the substrate 6 as shown in FIG. 7(c) due to capillary phenomenon. outflow. The amount of ink 5 flowing out to the contact portion increases with time, and the amount of ink 5 flowing out from the application needle 1 to the surface of the substrate 6 can be controlled by the time the application needle 1 remains in contact with the substrate 6 . The amount of ink 5 is set according to the area and thickness of the color filter film 8 ablated by laser.

The ink 5 flowing out to the contact portion between the applicator needle 1 and the substrate 6 is sucked into the stepped corners of the laser-cut color filter film 8 by capillary action, and diffuses and fills the entire laser-cut portion 9 . Therefore, the ink 5 can be filled in the entire laser cut portion 9 even if the application position is slightly deviated, and the tip of the application needle 1 will not damage the surrounding normal portion. Therefore, high-quality defect correction can be realized even if the coating position accuracy is not as high as in the past. As shown in FIG. 7(d)(e), the application needle 1 is moved upward, and the correction of the color filter film 8 is completed.

8(a)(b) are cross-sectional views showing still another operation of applying the ink 5 to the surface of the substrate 6 using the application needle 1 shown in FIG. 5(a)(b). In Fig. 8(a)(b), in the state where the flat surface 3 at the front end of the coating needle 1 is in contact with the surface of the substrate 6, the coating needle 1 and the substrate 6 are relatively moved in the horizontal direction, and the surface of the substrate 6 can be The ink 5 is applied linearly.

9( a ) is a cross-sectional view showing a state in which ink 5 is attached to the tip of the applicator needle 11 as a comparative example, and FIG. 9( b ) is a cross-sectional view taken along line IXB-IXB of FIG. 9( a ). In Fig. 9(a)(b), a tapered portion 12 is provided at the front end of the coating needle 11, and the tapered portion 12 makes the coating needle 11 stretch within a length not affected by the surface tension of the ink 5. The cross-sectional area gradually increases from the front end of the application needle 11 toward the base end, and a flat surface 13 is provided at the front end of the application needle 11 . However, no groove like the applicator needle 1 is formed. In this way, by providing the tapered portion 12 and the flat surface 13 at the front end, once the applicator needle 11 is lifted from the ink tank, an ink pool is formed on the upper portion of the tapered portion 12 due to surface tension, and the flat surface 3 and its vicinity are covered. Thin ink layer coverage.

Fig. 10 (a) - (e) are the cross-sectional views showing the action of using the coating needle 11 shown in Fig. 9 (a) (b) to coat the ink 5 on the surface of the substrate 6, and Fig. 10 (f) - ( j) are enlarged views of the tip of the applicator needle 11 shown in FIGS. 10( a ) to ( e ), respectively.

First, as shown in FIG. 10(a)(f), the application needle 11 with the ink 5 attached to the tip is held vertically with respect to the surface of the substrate 6, and the tip of the application needle 11 is positioned at a predetermined position. Next, as shown in FIG. 10(b)(c)(g)(h), the flat surface 3 at the tip of the application needle 11 is brought into contact with the surface of the substrate 6 and held. As a result, the ink 5 adhering to the flat surface 3 at the tip of the application needle 11 is pushed toward the outer periphery of the flat surface 3 . At this time, even if the contact holding time of the application needle 11 and the substrate 6 is prolonged, the amount of the ink 5 flowing to the contact portion of the application needle 11 and the substrate 6 hardly changes. This is because only the ink 5 adhering to the flat surface 13 at the tip of the application needle 11 is transferred and applied. As shown in FIG. 10( d ) ( e ) ( i ) ( j ), when the application needle 11 is moved upward, an ink layer 14 is formed on the surface of the substrate 6 . When using this coating needle 11, even if the contact holding time between the coating needle 11 and the substrate 6 is prolonged, the amount of the ink 5 flowing to the contact portion of the coating needle 11 and the substrate 6 hardly changes, so it is impossible to carry out the process shown in FIGS. 7 and 6 . Ink application as shown in 8.

FIG. 11 is a perspective view showing the configuration of an ink application mechanism 21 that applies the ink 5 using the application needle 1 shown in FIGS. 1 to 8 , with a part omitted. In FIG. 11 , the ink application mechanism 21 includes an ink application application needle 1 and an application needle drive cylinder 22 for vertically driving the application needle 1 . The application needle 1 is provided on the front end portion of the drive shaft 23 of the application needle drive cylinder 22 via the holding member 24 .

The ink application mechanism 21 includes a horizontally arranged turntable 25 on which a plurality of ink tanks 28 to 31 are arranged in sequence along the circumferential direction, and on the turntable 25 a cleaning device 32 and air blower device33. A rotating shaft 26 is erected at the center of the rotating table 25 . In addition, a notch 27 for passing the needle 1 when ink is applied is formed on the rotary table 25 . R (red), G (green), B (blue), and black inks 5 are suitably injected into the ink tanks 28 to 31 , respectively. The cleaning device 32 is used to remove the ink 5 adhering to the coating needle 1 , and the air blowing device 33 is used to blow off the cleaning solution adhering to the coating needle 1 .

This ink application mechanism 21 also has an indexing motor 34 for rotating the rotary shaft 26 of the rotary table 25, and is also provided with an index plate 35 that rotates with the rotary shaft 26, and detects the position of the rotary table through the index plate 35. An indexing sensor 36 for the rotational position of the rotary table 25 and an origin return sensor 37 for detecting the return of the rotational position of the rotary table 25 to the origin via the index plate 35 . The motor 34 is controlled according to the output of the sensors 36 and 37 to rotate the turntable 25 so that any one of the notch 27, the ink tanks 28-31, the cleaning device 32 and the air blowing device 33 is located under the coating needle 1 .

The coating needle drive cylinder 22 and the motor 34 are fixed on the Z-axis stage (not shown), and the Z-axis stage and the color filter substrate as the defect correction object pass through the XY stage (not shown) below the coating needle 1. icon) for relative positioning.

Next, the operation of the ink application mechanism 21 will be described. First, the XY stage and the Z-axis stage are driven to position the tip of the application needle 1 at a predetermined position above the defective portion of the color filter substrate. Next, the rotary table 25 is rotated by the motor 34 to move a desired ink tank (for example, 28 ) under the application needle 1 . Next, the coating needle 1 is driven up and down by the coating needle driving cylinder 22 so that the tip of the coating needle 1 is attached with the ink 5 .

Next, the rotary table 25 is rotated by the motor 34 to move the notch 27 below the application needle 1 . Next, the coating needle 1 is driven up and down by the coating needle driving cylinder 22, and the ink 5 adhering to the tip of the coating needle 1 is coated on the defective portion of the color filter substrate.

When cleaning the application needle 1 , the rotary table 25 is rotated by the motor 34 , and the cleaning device 32 is moved below the application needle 1 . Next, the coating needle 1 is driven up and down by the coating needle driving cylinder 22 to clean the ink 5 adhering to the coating needle 1 . Next, the rotary table 25 is rotated by the motor 34 to move the air blower 33 below the application needle 1 . Next, the application needle 1 is driven up and down by the application needle driving cylinder 22 to blow off the cleaning solution adhering to the application needle 1 .

FIG. 12 is a diagram showing the overall configuration of a defect correction device equipped with the ink application mechanism 21 shown in FIG. 11 . In FIG. 12, if the defect correction device is roughly classified, it includes: a defect correction head composed of an observation optical system 40, a CCD camera 41, a laser 42, an ink application mechanism 21, and an ink curing illumination 43; The Z-axis stage 44 that moves the head in the vertical direction (Z-axis direction) relative to the substrate 6; the X-axis stage 45 that loads the Z-axis stage 44 and moves it along the X-axis direction; loads the substrate 6 A Y-axis stage 46 for moving in the Y-axis direction; a control computer 47 for controlling the operation of the entire device; and an operation panel 48 for inputting instructions from an operator into the control computer 47 .

The observation optical system 40 is used to observe the surface state of the substrate 6 and the ink application state by the ink application mechanism 21 . An image observed by the observation optical system 40 is converted into an electrical signal by the CCD camera 41 and displayed on a monitor screen of a control computer 47 . The ink curing illuminator 43 irradiates light to cure the ink 5 applied by the ink application mechanism 21 . If the ink 5 is of an ultraviolet curing type, an ultraviolet illumination is selected as the ink curing illumination 43 and mounted on the device. And when the ink 5 is of thermosetting type, the halogen lighting is selected as the lighting 43 for ink curing and loaded on the device. Laser 42 is used to remove black and foreign defects. With the configuration of this device, it is possible to correct white defects, black defects, and foreign matter defects generated on the color filter.

In the first embodiment, when the flat surface 3 at the tip of the applicator needle 1 comes into contact with the surface of the substrate 6, the ink 5 stored in the groove 4 at the tip of the applicator needle 1 flows toward the contact portion by capillary action. Therefore, the ink 5 can be filled and applied in the laser cut part 9, and there is no overlapping of the ink layer and the normal part, which has been a problem in the past, and high-quality defect correction can be performed.

The amount of ink flowing to the contact portion increases as the contact time between the applicator needle 1 and the substrate 6 increases, so it is not necessary to apply multiple times as in the past, and the correction cycle can be shortened.

When the ink 5 is filled and applied in the laser cut portion 9, the filled ink 5 is sucked into the corners of the four sides of the color filter film 8 after the laser cut due to capillary phenomenon, and spreads to the laser cut portion 9 as a whole, Therefore, the ink application position of the application needle 1 only needs to be approximately in the vicinity of the center of the laser cutting part 9, and it is not necessary to position the application position with high precision as in the past, and the entire device can be fabricated at low cost.

(Embodiment 2)

13(a) to (k) are diagrams showing the ink coating method according to Embodiment 2 of the present invention, and in particular, FIG. 13(a) to (f) show that the ink 5 is applied to the substrate by using the coating needle 1. The sectional view of the action on the surface of 6, Fig. 13 (b) is the XIIIB-XIIIB line sectional view of Fig. 13 (a), Fig. 13 (g) ~ (k) is the coating shown in Fig. 13 (a) ~ (f) Enlarged view of the tip of needle 1.

In Fig. 13(a) ~ (k), in this ink coating method, the surface of the coating needle 1 is not perpendicular to the surface of the substrate 6, but at a certain angle (for example, the central axis of the coating needle 1 and the surface of the substrate 6 The angle between the surfaces is 45 degrees) to hold and apply obliquely. A flat surface 51 is formed at the tip of the application needle 1 , and the flat surface 51 is parallel to the surface of the substrate 6 when the application needle 1 is held at an angle. A groove 4 is formed at the front end of the coating needle 1 along a line closest to the surface of the substrate 6 when the flat surface 51 of the tip of the coating needle 1 is brought into contact with the surface of the substrate 6 when the coating needle 1 is tilted and held. form.

First, as shown in FIG. 13(a), (b) and (g), the application needle 1 with the ink 5 attached to the front end is held at a predetermined angle with respect to the surface of the substrate 6, and the application needle 1 The front end is positioned above the central portion of the white defect, for example. Next, as shown in FIG. 13(c)(h), the flat surface 51 at the tip of the application needle 1 is brought into contact with the surface of the substrate 6 and held. As a result, the ink 5 adhering to the flat surface 51 at the tip of the applicator needle 1 is pushed toward the outer periphery of the flat surface 51 . At this time, the extruded ink 5 is connected to the ink 5 stored in the groove 4, and the ink 5 stored in the groove 4 flows toward the coating needle 1 and the substrate as shown in FIG. 13(d)(i) due to capillary phenomenon. The contact part of 6 flows out. The amount of ink 5 flowing out to the contact portion increases with time, and the amount of ink 5 applied to the surface of the substrate 6 can be managed by the time the application needle 1 remains in contact with the substrate 6 . As shown in FIG. 13(e), (f), (j) (k), when the application needle 1 is moved upward, an ink layer 52 is formed on the surface of the substrate 6 .

In this way, even if the application needle 1 is not perpendicular to the surface of the substrate 6 but is installed obliquely, the ink 5 flowing out from the groove 4 can be applied by keeping the application needle 1 in contact with the surface of the substrate 6 .

Fig. 14 is a graph showing the effect of the ink application method shown in Fig. 13 . As shown in FIG. 14 , the objective lens 53 of the observation optical system 40 can be arranged at the tip of the coating needle 1 that is in contact with the surface of the substrate 6 by holding the coating needle 1 not vertically but obliquely with respect to the surface of the substrate 6 . , the state of applying the ink 5 to the surface of the substrate 6 with the application needle 1 can be observed. Thereby, when a defect is corrected, it is possible to monitor the filling state of the defective part with the ink 5, etc., and work convenience is improved.

FIG. 15 is a diagram showing a method for avoiding interference between the application needle 1 held at an inclination and the objective lens of the observation optical system 30 . In FIG. 15 , the holding member 54 attached to the lower end of the drive shaft 23 of the application needle drive cylinder 22 of the ink application mechanism 21 holds the application needle 1 inclined at a predetermined angle with respect to the surface of the substrate 6 . When ink application is performed within the field of view of the objective lens 53 by using the application needle 1 tilted in this way, if the application needle 1 is always within the field of view of the objective lens 53, the application needle 1 will interfere with the objective lens 53 when the objective lens 53 is replaced. For this purpose, a sub-X-axis stage 55 for moving the ink application mechanism 21 in the X-axis direction is provided, and the ink application mechanism 21 can be moved between the application position P1 and the standby position P2 where it does not interfere with the objective lens 53. , the interference between the coating needle 1 and the objective lens 53 can be prevented. The sub X-axis stage 55 is mounted on the Z-axis stage 44 .

(Embodiment 3)

Fig. 16 is a diagram showing the overall configuration of a defect correcting device 61 according to Embodiment 3 of the present invention. In FIG. 16 , the defect correcting device 61 is broadly classified as follows: an observation optical system 62 for observing the substrate surface, a monitor 63 for projecting the observed image, and a cutting laser for removing defects on the substrate surface by means of the observation optical system 62. part 64, an ink application mechanism 65 that applies ink 5 to a defect by using the application needle 1, a substrate heating part 66 that heats and dries the ink 5 applied on a defect, an image processing part 67 that recognizes a defect, and The main computer 68 which controls the whole apparatus, and the control computer 69 which controls the operation of the mechanism part of an apparatus. Moreover, there are also provided: an XY stage 70 for loading the substrate 6 with a defect, a gripper 71 for holding the substrate on the XY stage 70, a mechanism for driving the observation optical system 62 and the ink application mechanism 65 up and down. Z stage 72, etc.

The XY stage 70 is used to relatively move the substrate 6 to a position required for coating correction or a position desired to be observed by the observation optical system 62 , and is a form of moving the substrate 6 itself. However, as the size of the substrate 6 increases, the substrate 6 is often held on the fixed clamping part 71 which becomes the non-movable part, and the XY stage called a gantry type is fixed on the clamping part 71. 71 on the way to move. The gantry type refers to a structure in which a gate-shaped Y stage is installed across the clamping portion 71, an X-axis is mounted on the top of the gate, and a Z-axis is mounted on the X-axis stage. Therefore, it is not limited to the structure of the XY stage 70 shown in FIG.

17( a ) to ( d ) are diagrams showing the configuration and operation of the ink application mechanism 65 shown in FIG. 16 . 17( a ) to ( d ) show the state of correcting the laser cut portion 9 of the color filter film 8 formed on the surface of the substrate 6 . The ink application mechanism 65 is composed of an application cylinder 73 and an application unit 74 , and the output shaft 73 a of the application cylinder 73 can advance and retreat in the vertical direction relative to the substrate 6 . The guide rail part 75a of the linear guide 75 which can move linearly is fixed to the output shaft 73a of the coating cylinder 73 in parallel with the output shaft 73a, and the coating unit 74 is fixed to the sliding part 75b of the linear guide 75. The output shaft 73a of the coating cylinder 73 has the function of making the coating assembly 74 move up and down in the vertical direction relative to the base plate 6. As the coating cylinder 73, an electric cylinder or an air cylinder can be used, but it is best when coating accuracy is required. It is best to use cylinders guided by direct bearings.

The linear guide 75 is a bearing structure in which rolling elements such as balls are cyclically sandwiched between the sliding part 75b and the rail part 75a. The sliding part 75b can move forward and backward on the rail part 75a arbitrarily. It can freely move forward and backward in the vertical direction with respect to the base plate 6 .

By adopting the above-mentioned structure, the sliding portion 75b of the linear guide 75 descends due to the own weight of the sliding portion 75b and the application unit 74, and becomes a restriction provided at the end of the rail portion 75b so that the sliding portion 75b does not come out of the rail portion 75a. device 76 abutting state. The stopper 76 does not need to be provided if the function of preventing the sliding part 75b from falling out is given to the linear guide 75 in advance. Here, the rail portion 75a is fixed on the side of the output shaft 73a, but the slide portion 75b may be fixed to the output shaft 73 to fix the application unit 74 to the rail portion 75a.

The coating unit 74 is composed of a container 78 filled with ink 5 for correcting the laser cutting part 9 and a cylinder part 80 for driving the coating needle 1 up and down, and the coating needle 1 is fixed on the cylinder part 80 coaxially with the output shaft 80 The cylinder part 80 is fixedly held by the housing 81 on the output shaft 80a of the cylinder.

Holes 78a, 78b through which the coating needle 1 can penetrate are provided coaxially on the upper surface and the bottom surface of the container 78. As the material of the container 78, resins such as Teflon or metal materials that will not be corroded by the ink 5 can be used. , or form a coating of resin such as Teflon inside the metal container. The holes 78a, 78b of the container 78 are slightly larger than the outer diameter of the applicator needle 1, and function as sliding guide surfaces that prevent the applicator needle 1 from tilting.

The outer diameter of the applicator needle 1 is less than 1 mm, and the diameter of the flat surface 3 at the tip is about 30 μm to 70 μm. The generally used applicator needle 1 has an outer diameter of about 0.7 to 0.4 mm. The bottom surface of container 78 is provided with hole 78b, but this hole 78b is very small, and the viscosity of ink 5 is bigger than water, because the surface tension of ink 5 and non-stick property with container 78, ink 5 can not leak from hole 78b.

In the standby state where ink application is not performed, as shown in FIG. . The ink 5 is filled in the container 78 after being adjusted to an optimum viscosity using a diluent for application. For example, the viscosity of the ink 5 is set at about 30 cP (centipoise). The filling amount of the ink 5 is only enough to dip into the front end 1a of the coating needle, and the ink 5 used for one coating correction is in units of pl (picoliters), which is very small, so as long as there is an amount that can be coated within a certain period of time It is possible, for example, to fill micropipettes of up to 1 ml.

When applying ink, as shown in FIG. At this time, the ink 5 adheres to the tip 1 a of the application needle 1 . When the application needle 1 protrudes from the hole 78b provided on the bottom surface of the container 78, the hole 78b serves to guide the application needle 1 and wipe off the ink 5 adhering to the side of the application needle 1, so the ink 5 can be prevented from flowing into the container. 78 leaks.

In the state where the coating needle 1 is extended, as shown in FIG. 17(c), the output shaft 73a of the coating cylinder 73 is lowered until the substrate 6 exposed at the center of the coating needle tip 1a and the laser cutting part 9 surface contact. The descending amount of the output shaft 73a is set to be slightly larger than the distance between the front end 1a of the coating needle and the surface of the substrate 6. After the front end 1a of the coating needle contacts the surface of the substrate 6, the sliding portion 75b moves upward on the rail portion 75a of the linear guide 75. The upper movement avoids, and the coating assembly 74 also rises correspondingly, so the front end 1a of the coating needle will not press the substrate 6 with excessive force, and the substrate 6 will not be damaged. The load acting on the tip 1a of the applicator needle at this time is the total weight of the sliding portion 75b and the applicator unit 74 .

The output shaft 73a of the coating cylinder 73 waits for a predetermined time in a state where it has reached the target lowermost end. Thus, the ink 5 is supplied into the laser cut portion 9 through the groove 4 of the applicator needle 1 , and the ink 5 is filled in the laser cut portion 9 . Thereafter, as shown in FIG. 17( d ), the output shaft 73a is raised to the original position, and the tip 1a of the application needle is returned to the ink 5 to complete one application.

In this way, the tip 1a of the applicator needle is inside the ink 5 except during the correction operation, so that the ink 5 adhering to the tip 1a of the applicator needle can be prevented from drying. The ink 5 is sealed except the holes 78a and 78b provided on the upper surface and the bottom surface of the container 78, and the hole 78a on the upper surface of the container 78 is always in the state where the application needle 1 is inserted with a small gap, so the contact between the ink 5 and the atmosphere can be reduced. The area in direct contact prevents the evaporation of the ink 5. Therefore, the usable days of the ink 5 can be extended, and the frequency of maintenance of the defect correcting device 61 can be reduced.

(Embodiment 4)

Fig. 18 (a) is a side view showing the front end portion of the applicator needle 91 according to Embodiment 4 of the present invention, Fig. 18 (b) is its front view, Fig. 18 (c) is its bottom view, Fig. 18 (d) It is the XVIIID-XVIIID line sectional view of FIG. 18(b), FIG. 18(e) is the XVIIIE-XVIIIE line sectional view of FIG. 18(b), and FIG. 18(f) is the XVIIIF-XVIIIF line sectional view of FIG. 18(b). Fig. 19 (a) is a front view showing the front end portion of the coating needle 91 attached with ink 5, Fig. 19 (b) is a sectional view taken along line XIXB-XIXB of Fig. 19 (a), and Fig. 19 (c) is a sectional view of Fig. 19 ( a) XIXC-XIXC line sectional view, FIG. 19( d ) is a XIXD-XIXD line sectional view in FIG. 19( a ).

In Fig. 18(a)-(f), a tapered portion 92 is provided at the front end of the coating needle 91, and the tapered portion 92 makes the coating needle 91 stretch within a length range not affected by the surface tension of the ink. The cross-sectional area gradually expands from the front end of the application needle 91 toward the base end, and a flat surface 93 is provided at the front end of the application needle 91, and on the outer peripheral surface of the tapered part 92, a predetermined Dimensions of flat face 94.

In this way, by providing the tapered portion 92 and the flat surfaces 93, 94 at the front end, when the applicator needle 91 is lifted from the ink tank, as shown in FIGS. 19(a) to (d), the upper portion of the tapered portion 92 is And produce the ink pool portion, the flat surface 93 of the front end and its vicinity are covered by a thin ink layer, on the flat surface 94 of the taper 92 due to the surface tension of the ink 5, more ink is kept than on the outer peripheral surface other than the flat surface 94. Ink5. The higher the viscosity of the ink 5, the larger the amount of the ink 5 held on the flat surface 94, and the lower the viscosity of the ink 5, the smaller the amount of the ink 5 is.

When the flat surface 93 of the front end of the coating needle 91 was brought into contact with the substrate surface, the ink 5 remaining on the top of the tapered portion 92 and the flat surface 94 moved toward the front end because the ink 5 adhered to the surface of the substrate to cause an imbalance in surface tension. The contact portion between the flat surface 93 of the substrate and the substrate is supplied and coated on the substrate.

In this fourth embodiment, the same effect as that of the first embodiment can be obtained.

In FIGS. 18( a ) to ( f ), one flat surface 94 is provided on the outer peripheral surface of the tapered portion 92 , but a plurality of flat surfaces 94 may be provided. That is, as shown in Fig. 20(a)-(f) and Fig. 21(a)-(d), two flat surfaces 94 may be provided on the outer peripheral surface of the taper portion 92, or as shown in Fig. 22(a)- (f) and Figure 23 (a)-(d) show three flat surfaces 94, also can set four flat surfaces 94 as shown in Figure 24 (a)-(f) and Figure 25 (a)-(d) Face 94. When three flat surfaces 94 are provided, the flat surface 93 at the tip becomes triangular, and when four flat surfaces 94 are provided, the flat surface 93 at the tip becomes square. By increasing the number of flat surfaces 94, the ink 5 held on the flat surfaces 94 will increase, and the amount of ink 5 supplied to the contact surface between the front end of the application needle 91 and the substrate 6 will also increase, and the ink 5 can be processed in a shorter time. Supply a large amount of ink5.

Five or more flat surfaces 94 may be provided on the outer peripheral surface of the tapered portion 92 . However, when the number of flat surfaces 94 is further increased, the tip portion of the applicator needle 91 becomes close to a conical shape, so the amount of ink 5 held on the flat surfaces 94 decreases. When there are four flat surfaces 94, the processing is relatively simple, and more ink 5 is held on the flat surfaces 94, so that the ink 5 can be more evenly supplied to the entire contact surface between the front end of the application needle 91 and the substrate 6.

The coating needle 91 of Fig. 18 (a) ~ Fig. 25 (d) is made in this way, first prepare cylindrical needle 91 as shown in Fig. 26 (a) ~ (d), then Fig. 27 (a) ~ As shown in (d), the tip portion of the needle 91 is formed into a tapered shape tapered toward the tip, and then a flat surface 94 is formed on the outer peripheral surface of the tapered portion 92 .

However, as shown in FIGS. 28( a ) to ( f ) and 29 ( a ) to ( d ), four flat surfaces 94 may be directly formed on the columnar tip of the needle 91 . Thereby, the process of processing the tip of the needle 91 into a tapered shape can be omitted, and the application needle 91 can be produced at a lower cost. Applying the ink 5 to the substrate 6 using the application needle 91 processed in this manner has the same ink supply capability as that of the application needle 91 shown in FIGS. 24( a ) to ( f ).

Fig. 30 (a) ~ (f) and Fig. 31 (a) ~ (e) are the figures that show the modified example of embodiment 4, are with Fig. 18 (a) ~ (f) and Fig. 19 (a) ~ (d) ) comparison chart. The difference between this modified example and Embodiment 4 is that the flat surface 94 is divided into a region 94a on the proximal side of the application needle 91 and a region 94b on the distal side. The region 94b on the base end side is formed lower than the region 94a on the base end side, and a step 94c is formed between the two regions 94a, 94b. In this modified example, since the ink 5 is also held on the step 94c, more ink 5 can be held than in the case without the step 94c.

In this modified example, the flat surface 94 of the tapered portion 92 is divided into two regions 94a, 94b, but it is also possible to divide the flat surface 94 into three or more regions along the longitudinal direction of the application needle 91, and each adjacent On the boundary between the two regions, the region on the distal side is formed lower than the region on the proximal side, and a step is provided between the two regions.

(Embodiment 5)

Fig. 32(a) is a front view showing the front end of the application needle 95 according to Embodiment 5 of the present invention, Fig. 32(b) is a bottom view thereof, and Fig. 32(c) is XXXIIC-XXXIIC of Fig. 32(a) Line sectional view, Fig. 32(d) is the XXXIID-XXXIID line sectional view of Fig. 32(a). Fig. 33 (a) is a front view showing the front end portion of the application needle 95 attached with ink 5, Fig. 33 (b) is a sectional view taken along line XXXIIIB-XXXIIIB of Fig. 33 (a), and Fig. 33 (c) is a sectional view of Fig. 33 ( a) XXXIIIC-XXXIIIC line sectional view.

In FIGS. 32(a) to (d), the application needle 95 differs from the application needle 11 in FIG. 9(a)(b) in that the tapered portion 12 is divided into The part 12a on the front end side and the part 12b on the front end side are formed on the boundary between the two parts 12a and 12b.

In this way, by providing the tapered portion 12 and the step 12c at the front end, when the applicator needle 95 is lifted from the ink tank, as shown in FIGS. The reservoir, the flat surface 13 and its vicinity are covered with a thin ink layer, and due to the surface tension of the ink 5, the step 12c can hold more ink 5 than the outer peripheral surface other than the step 12c.

After the flat surface 13 of the front end of the coating needle 95 contacts the surface of the substrate, the ink 5 adheres to the surface of the substrate, and the surface tension is unbalanced, and the ink 5 kept on the step 12c of the taper portion 12 moves toward the flat surface 13 of the front end and the substrate. The contacts are supplied and coated on the substrate.

In this fifth embodiment, the same effect as that of the first embodiment can be obtained.

In Embodiment 5, the tapered part 12 is divided into two parts 12a, 12b, but the tapered part 12 may be divided into three or more parts along the longitudinal direction of the application needle 95, and each adjacent two The part on the front end side is formed thinner than the part on the base end side in the boundary of the part, and a step is provided between the two parts.

(Embodiment 6)

Fig. 34 (a) is a front view showing the front end of the coating needle 96 according to Embodiment 6 of the present invention, Fig. 34 (b) is a bottom view thereof, and Fig. 34 (c) is XXXIVC-XXXIVC of Fig. 34 (a) Line sectional view, Fig. 34(d) is the XXXIVD-XXXIVD line sectional view of Fig. 34(a), Fig. 34(e) is the XXXIVE-XXXIVE line sectional view of Fig. 34(a). Fig. 35 (a) is a front view showing the front end portion of the application needle 96 attached with ink 5, Fig. 35 (b) is a sectional view taken along line XXXVB-XXXVB of Fig. 35 (a), and Fig. 35 (c) is a sectional view of Fig. 35 ( a) XXXVC-XXXVC line sectional view, FIG. 35(d) is a XXXVD-XXXVD line sectional view in FIG. 35(a).

In FIGS. 34( a ) to ( e ), the applicator needle 96 is different from the applicator needle 91 of FIGS. 28( a ) to (e) in that the flat surface 94 is replaced by a concave curved surface 97 . In this way, by providing the concave curved surface 97 and the flat surface 93 at the front end, when the applicator needle 96 is lifted from the ink tank, as shown in Figure 35 (a) to (d), the upper part of the tapered part is generated due to surface tension. In the ink reservoir, the flat surface 93 and its vicinity are covered with a thin ink layer, and due to the surface tension of the ink 5 , the concave curved surface 97 can hold more ink 5 than the outer peripheral surface other than the concave curved surface 97 .

After the flat surface 93 of the front end of the coating needle 96 contacts the surface of the substrate, the ink 5 adheres to the surface of the substrate, and the surface tension is unbalanced. The contact with the substrate is supplied and coated on the substrate.

In the sixth embodiment as well, the same effects as those in the first embodiment can be obtained.

In Embodiment 6, four concave curved surfaces 97 are provided, but three concave curved surfaces 97 or five or more concave curved surfaces 97 may be provided. The flat surface 94 of the applicator needle 91 shown in FIGS. 18( a ) to 25 ( d ) may be replaced with a concave curved surface 97 .

Fig. 36 (a) ~ (e) and Fig. 37 (a) ~ (d) are the figures that show the modified example of embodiment 6, are with Fig. 34 (a) ~ (e) and Fig. 35 (a) ~ (d) ) comparison chart. The difference between this modified example and the sixth embodiment is that the concave curved surface 97 is divided into a region 97a on the proximal side of the applicator needle 96 and a region 97b on the distal side. On the boundary between the two regions 97a and 97b, the The region 97b is formed lower than the region 97a on the base end side, and a step 97c is formed between the two regions 97a, 97b. In this modified example, the ink 5 is also held on the step 97c, so more ink 5 can be held than in the case without the step 97c.

In this modified example, the concave curved surface 97 is divided into two regions 97a, 97b, but the concave curved surface 97 may be divided into three or more regions along the longitudinal direction of the application needle 96, and each adjacent two regions The region on the front end side is formed lower than the region on the base end side on the boundary of , and a step is provided between the two regions.

(Embodiment 7)

As shown in Figure 38(a), the color filter of the LCD includes a transparent substrate, a grid-like pattern called a black matrix 100 formed on its surface, a plurality of sets of R (red) pixels 101, G (green) pixels 102, and a B (blue) pixel 103 . In the manufacturing process of the color filter, a foreign matter defect occurs in the G pixel 102. As shown in FIG. In the white defect 104, the transparent substrate 105 of the color filter is exposed.

When correcting such a large white defect 104, as shown in FIGS. The ink 5 is filled in the entire white defect 104, but when the viscosity of the ink 5 is high and the fluidity of the ink 5 is poor, the ink 5 is first squeezed out to the black matrix 100 in the narrow direction of the width of the white defect 104, and the ink cannot be completely squeezed out. 5 is applied over the entire white defect 104.

Even when the viscosity of the ink 5 is high and the fluidity of the ink 5 is poor, as shown in Figure 40 (a) to (c), if there are many places (three places in the figure) When the tip of the application needle 1 is brought into contact with the substrate 105 to apply the ink 5 , the ink 5 can be applied over the entire white defect 104 . However, protrusions of the ink 5 are generated at each position P in contact with the tip of the applicator needle 1, and it takes time to level the unevenness of the ink 5, and may be cured before being leveled. Once the applied ink 5 has unevenness, color spots will occur, so it is necessary to apply the ink 5 as evenly as possible.

Therefore, in Embodiment 7, as shown in Fig. 41 (a) to (c), the tip of the coating needle 1 is brought into contact with one end of the white defect 104, and in this state the coating needle 1 is moved along the white defect 104. The defect 104 is relatively moved relative to the substrate 105 in a direction in which the width of the defect 104 is large and in a direction horizontal to the surface of the substrate 105 , and the entire white defect 104 is coated. Here, after the tip of the coating needle 1 is brought into contact with the surface of the substrate 105 once, and the ink 5 is supplied from the ink reservoir to the contact portion of the coating needle 1 and the substrate 105, even the gap between the coating needle 1 and the substrate 105 The ink 5 can be supplied even if there is a slight gap between them, so when the coating needle 1 is moved horizontally, it is not necessary to completely contact the front end of the coating needle 1 with the surface of the substrate 105 . Thereby, even when the viscosity of the ink 5 is high and the fluidity of the ink 5 is poor, the ink 5 can be uniformly applied to the white defect 104 in a short time.

It is also possible to make the front end of the coating needle 1 contact one end of the white defect 104 as shown in FIGS. Ink 5 is applied to half of the white defect 104. After the ink 5 is replenished on the application needle 1, the front end of the application needle 1 is brought into contact with the other end of the white defect 104. In this state, the ink 5 is applied. The application needle 1 moves to the center of the white defect 104 , and the ink 5 is applied to the remaining half of the white defect 104 . Instead of applicator needle 1, applicator needles 91, 95, 96 can also be used.

As shown in FIG. 43( a), in the case of correcting a white defect 104 formed by laser ablation of a part of the G pixel 102 in a large square shape, if the front end of the coating needle 1 is only in contact with the white defect 104 If the ink 5 is applied once in contact with the center, it takes time to spread the ink 5 to the entire white defect 104 when the viscosity of the ink 5 is high and the fluidity of the ink 5 is poor. Therefore, as shown in FIG. 44 , although it can be applied over the entire white defect 104 , the amount of the applied ink 5 increases, and the center of the applied ink 5 becomes a raised state. In such a case, the color of the corrected portion is darker than that of the surrounding normal portion. The coating film thickness is also thicker than that of the surrounding normal part, and the correction quality deteriorates.

Therefore, in this modified example, as shown in FIGS. 43( b ) to ( d ), the tip of the coating needle 1 draws an arc while being in contact with the white defect 104 , and moves relatively to the substrate 105 . Apply ink 5. Here, after the tip of the coating needle 1 is brought into contact with the surface of the substrate 105 once, and the ink 5 is supplied from the ink reservoir to the contact portion of the coating needle 1 and the substrate 105, even the gap between the coating needle 1 and the substrate 105 The ink 5 can be supplied even if there is a slight gap between them, so it is not necessary to completely contact the front end of the coating needle 1 with the surface of the substrate 105 when the coating needle 1 is moved. As a result, the ink 5 can be spread over the entire white defect 104 in a short time, so as shown in FIG. 43(c), uniform ink application without bumps can be performed.

In this modified example, the coating needle 1 moves in an arc shape, but as long as the ink 5 can spread over the entire white defect 104, the coating needle 1 can be moved arbitrarily. For example, it is also possible to move in a square along the four sides of the white defect 104 .

The embodiments disclosed above are illustrative and not restrictive. The scope of the present invention is not limited to the above description, but includes the meanings equivalent to the claims and all modifications within the claims.

Claims (16)

1, a kind of applying mechanism comprises: application needle; The container that keeps liquid material; And the drive division that described application needle is moved,

Described application needle is attached with under the situation of liquid material at leading section, front end is contacted to apply described liquid material with fine zone on the substrate, be formed with the tapering that attenuates towards described front end at described leading section, be formed with tabular surface at described front end, be formed with in described tapering and be used for and supply with the liquid material supply unit of described front end attached to the described liquid material on the described leading section

It is characterized in that, described applying mechanism offers diameter and the roughly the same through hole of described application needle in the bottom of described container, described drive division makes described application needle relatively move with respect to described container along its axis direction, makes the leading section of described application needle stop at following at least 2 positions: the position of readiness that the liquid material in the leading section of described application needle and the described container contact and the leading section of described application needle pass the coating position that described through hole stretches out below the bottom of described container.

2, applying mechanism as claimed in claim 1 is characterized in that, the described liquid material supply unit of described application needle is a groove.

3, applying mechanism as claimed in claim 2 is characterized in that, the part of the described groove of described application needle forms bigger than the width of other parts of described groove.

4, applying mechanism as claimed in claim 1 is characterized in that, the described liquid material supply unit of described application needle is a tabular surface.

5, applying mechanism as claimed in claim 4 is characterized in that, the described tabular surface of described application needle is divided into a plurality of zones, is provided with step between described a plurality of zones.

6, applying mechanism as claimed in claim 1 is characterized in that, the described liquid material supply unit of described application needle is a concave curved surface.

7, applying mechanism as claimed in claim 6 is characterized in that, the described concave curved surface of described application needle is divided into a plurality of zones, is provided with step between described a plurality of zones.

8, applying mechanism as claimed in claim 1 is characterized in that, the described wimble fraction of described application needle is slit into a plurality of parts,

Described liquid material supply unit is provided in a side of the step between described a plurality of part.

9, applying mechanism as claimed in claim 1 is characterized in that, described drive division has the retaining member that described application needle is kept with the form that tilts with predetermined angular with respect to described substrate,

The tabular surface of described application needle front end forms, and is parallel with described substrate when described application needle is kept obliquely by described retaining member.

10, a kind of defect correction device is applicable to and revises the defective part that is formed on the fine pattern on the described substrate, it is characterized in that, comprising:

Trimming head has the described applying mechanism of claim 1, the viewing optical system that is used to observe described defective part, irradiating laser to remove the laser radiation mechanism of described defective part;

Put the substrate platform of described substrate;

And the detent mechanism that makes described trimming head and described substrate platform relatively move and position,

To be coated on the described defective part attached to the described liquid material of described application needle leading section and revise.

11, defect correction device as claimed in claim 10 is characterized in that, described drive division comprises:

The 1st secondary drive division that described application needle is moved along its axis direction or the direction vertical with described substrate;

And the 2nd secondary drive division that moves, with making described application needle and described substrate almost parallel

At described position of readiness, the front end of described application needle is outside the visual field of described viewing optical system, and in described coating position, the front end of described application needle is in the visual field of described viewing optical system.

12, a kind of coating method, it is characterized in that, make on the leading section of liquid material attached to claim 1 application needle of each described applying mechanism to the claim 8, after making the top away from the front end of described application needle in tapering produce hydrops portion by surface tension, make the front end and the described substrate contacts of described application needle, the liquid material of described application needle front end is attached on the described substrate and to produce surface tension inhomogeneous, supplies with described liquid material by described liquid material supply unit to the contact site of described application needle front end and described substrate from described hydrops portion.

13, coating method as claimed in claim 12 is characterized in that, under the state of the front end of described application needle and described substrate contacts, described application needle and described substrate is relatively moved, the described liquid material of wire ground coating on described substrate.

14, coating method as claimed in claim 12, it is characterized in that, make with respect to adhering to described liquid material on the described application needle leading section of described substrate with predetermined angular inclination maintenance, by make described application needle front end in the visual field of viewing optical system with described substrate contacts, thereby while observe coating state and apply.

15, a kind of display panels is with the defect correcting method of color filter, is to utilize claim 1 method that the application needle of each described applying mechanism is revised with the defective of color filter display panels to the claim 8, it is characterized in that,

Described display panels contains the color filter film that is formed on the described substrate with color filter,

Utilize laser to remove described color filter film in zone bigger than the described tabular surface of described application needle front end and that contain described defective,

Leading section is attached with revise described application needle front end with liquid material in the zone of removing inboard and in described application needle front end and described zone on every side normally the discontiguous position of part contact, will apply with liquid material with the correction of the big or small corresponding amount of the color filter film of removing.

16, a kind of display panels is with the defect correcting method of color filter, is to utilize claim 1 method that the application needle of each described applying mechanism is revised with the defective of color filter display panels to the claim 8, it is characterized in that,

Described display panels contains the color filter film that is formed on the described substrate with color filter,

Utilize laser to remove described color filter film in zone bigger than the described tabular surface of described application needle front end and that contain described defective,

Make leading section be attached with the described application needle front end of revising with liquid material and contact in the regional inboard of removing, the described substrate surface of front end edge that makes described application needle in this inboard, zone relatively moves and uses liquid material with coating correction.

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