CN100562970C - Dielectric barrier discharge lamp and ultraviolet irradiation device - Google Patents
Dielectric barrier discharge lamp and ultraviolet irradiation device Download PDFInfo
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- CN100562970C CN100562970C CNB2005101376287A CN200510137628A CN100562970C CN 100562970 C CN100562970 C CN 100562970C CN B2005101376287 A CNB2005101376287 A CN B2005101376287A CN 200510137628 A CN200510137628 A CN 200510137628A CN 100562970 C CN100562970 C CN 100562970C
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- 230000004888 barrier function Effects 0.000 title claims abstract description 81
- 239000012780 transparent material Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 15
- 239000000463 material Substances 0.000 abstract description 8
- 239000007789 gas Substances 0.000 description 34
- 230000015572 biosynthetic process Effects 0.000 description 13
- 238000005286 illumination Methods 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 229910052724 xenon Inorganic materials 0.000 description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 5
- 150000004820 halides Chemical class 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 150000002894 organic compounds Chemical class 0.000 description 4
- 230000035699 permeability Effects 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- -1 iodine halogens Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 208000034189 Sclerosis Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000003642 reactive oxygen metabolite Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/56—One or more circuit elements structurally associated with the lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
提供防止从被照射物飞散的不纯物附着在介质阻挡放电灯的表面上的介质阻挡放电灯以及使用了它的紫外线照射装置。介质阻挡放电灯EXL，具备由紫外线透过性的材料制成的、呈细长的管状的气密容器1，被封入气密容器内的受激准分子生成气体，以在气密容器内在其管轴方向的大致全长上产生介质阻挡放电的方式配设的较长的内部电极2，配设在气密容器的外面，以通过与内部电极的协作在气密容器内产生介质阻挡放电的方式起作用的外部电极OE，沿着气密容器的管轴方向的横贯前面部地形成气流的气流发生装置AB。
Provided are a dielectric barrier discharge lamp that prevents impurities scattered from an object to be irradiated from adhering to the surface of the dielectric barrier discharge lamp, and an ultraviolet irradiation device using the same. The dielectric barrier discharge lamp EXL has an elongated tubular airtight container 1 made of an ultraviolet-transmissive material, and the excimer sealed in the airtight container generates a gas to generate gas in the airtight container. The relatively long inner electrode 2 arranged in such a way as to generate a dielectric barrier discharge substantially over the entire length of the tube axis direction is arranged outside the airtight container to generate a dielectric barrier discharge in the airtight container by cooperating with the internal electrode. The outer electrode OE functioning in this way, the airflow generator AB that forms the airflow across the front face along the tube axis direction of the airtight container.
Description
Technical field
The ultraviolet lamp that the present invention relates to dielectric barrier discharge lamp and used it.
Background technology
It is dielectric barrier discharge that halide that makes rare gas such as xenon or rare gas etc. carries out silent discharge, thereby generation is a dielectric barrier discharge lamp near the Excimer discharge lamp of the radiation of intrinsic monochrome, by a large amount of document records, thereby be in the public eye all the time.In dielectric barrier discharge, flow through the electric current of pulse type.The electric current of this pulse type, owing to have molecular flow at a high speed, and more between stand-down, therefore make xenon etc. emit ultraviolet material and temporarily be combined into molecule state (excimers state), and when it returns to ground state, emit effectively and absorb less short wave ultraviolet again.Moreover when using xenon, carrying out with 172nm is the bigger mulecular luminescence of full width at half maximum of centre wavelength.The ultraviolet ray of wavelength 172nm, its energy is bigger than the ultraviolet ray of wavelength 185nm that is obtained by Cooper-Hewitt lamp and 254nm, and combination (key) energy than the organic compound that will decompose is big simultaneously.Therefore,, can cut off the associative key of above-mentioned organic compound, its decomposition is removed by the ultraviolet ray of illumination wavelength 172nm.And then by carrying out the ultraviolet irradiation of wavelength 172nm in atmosphere, thereby the oxygen in the atmosphere decomposes and generates active oxygen, is cut off the organic compound and the reactive oxygen species of associative key, generates carbon dioxide (CO
2) and water (H
2O) etc., thus removing of organic compound become easy.Thereby dielectric barrier discharge lamp is very effective as ultraviolet light source.
As dielectric barrier discharge lamp, the known dielectric barrier discharge lamp (with reference to patent documentation 1) that has the gas-tight container that uses elongated tubular product such to carry out dielectric barrier discharge.The dielectric barrier discharge lamp that patent documentation 1 is put down in writing, constitute in such a way, promptly form and possess elongated gas-tight container, internal electrode that direction of principal axis in this gas-tight container extends and the luminous tube of enclosing the excimers generation gas in the gas-tight container, to have refrigerating function and form simultaneously the lamp body of the aluminum of depression in the chimeric mode of a part with the outside of gas-tight container, touch outside as outer electrode at gas-tight container, thereby make its tube axial direction produce the same dielectric barrier discharge along gas-tight container, make the heat diffusion rapidly that produces from luminous tube simultaneously, thereby luminous efficiency is maintained higher state.In addition, closely contact each other with gas-tight container, constitute in mode with both face contacts in order to make outer electrode.
When carrying out ultraviolet irradiation with above-mentioned this dielectric barrier discharge lamp in the past, along with the large tracts of landization of shone thing, and then develop rectangular dielectric barrier discharge lamp, bring into use effective length to surpass the dielectric barrier discharge lamp of 1m.If use rectangular like this dielectric barrier discharge lamp, just can realize the application of multiple industry such as the sclerosis of ashing, photosensitive resin of large-area liquid crystal substrate for example and sterilization.
Patent documentation 1: the spy opens the 2003-197152 communique
; when the shone thing irradiation ultraviolet radiation being carried out for example dry type cleaning with the such lamp of dielectric barrier discharge lamp; attached to the impurity that disperses because of ultraviolet irradiation on the shone thing, and in air, produce or the impurity that in air, swims etc. will surface attached to dielectric barrier discharge lamp on.Its result exists from the ultraviolet ray amount of dielectric barrier discharge lamp to the outside radiation and reduces, the problem that reduces along with the process of the time of lighting a lamp with respect to the ultraviolet illumination of shone thing.So, when ultraviolet illumination reduces, just be difficult to the ultraviolet irradiation effects such as clean effect that obtain stipulating.
Summary of the invention
The object of the present invention is to provide the impurity that prevents to disperse from shone thing attached to the lip-deep dielectric barrier discharge lamp of dielectric barrier discharge lamp and the ultraviolet lamp that has used it.
Dielectric barrier discharge lamp of the present invention is characterized in that, possesses: the gas-tight container of being made by the material of ultraviolet permeability, be elongated tubulose; The excimers of being enclosed in the gas-tight container generate gas; With the long internal electrode that the mode of generation dielectric barrier discharge sets on the roughly total length of its tube axial direction in gas-tight container; Be provided in the outside of gas-tight container along its tube axial direction, with outer electrode by playing a role with cooperating of internal electrode produces dielectric barrier discharge in gas-tight container mode; The air-stream generating device that front face ground forms air-flow that traverses along the tube axial direction of gas-tight container.
In the present invention, owing to possess above formation, therefore even if will be attached to impurity on the shone thing or the impurities such as impurity that in air dielectric, swim attached on the dielectric barrier discharge lamp, also can be blocked by the air-flow that front face ground forms that traverses along the tube axial direction of gas-tight container, therefore just can surface attached to dielectric barrier discharge lamp on.Its result, prevented the adhering to of lip-deep impurity of dielectric barrier discharge lamp, therefore the minimizing of the ultra violet radiation amount that causes can be prevented to adhere to effectively, and can in long-time, the degree that needs will be maintained with respect to the ultraviolet illumination of shone thing by impurity.
According to the present invention, can provide to prevent effectively on the surface of impurity attached to dielectric barrier discharge lamp, and in long-time, will maintain the dielectric barrier discharge lamp of the degree that needs and the ultraviolet lamp that has used it with respect to the ultraviolet illumination of shone thing.
Description of drawings
Fig. 1 is a part of cross-section front view that is used to implement the 1st form of dielectric barrier discharge lamp of the present invention.
Fig. 2 is a part of breach front view of its luminous tube.
Fig. 3 shows the support portion of its luminous tube and a part of breach cross-section front view of power supply.
Fig. 4 is its side cut away view.
Fig. 5 is with respect to the variation of the ultraviolet illumination of time of lighting a lamp of the dielectric barrier discharge lamp of the 1st form of the present invention and the chart of showing together of comparative example.
Fig. 6 is the side cut away view of showing the 2nd form be used to implement dielectric barrier discharge lamp of the present invention.
Fig. 7 is the front cross-sectional view of showing as the ultraviolet decontaminating apparatus that is used to implement a form of ultraviolet lamp of the present invention.
Fig. 8 is its upward view.
Fig. 9 is the profile along the IX-IX ' line of this Fig. 8.
Label declaration
1 gas-tight container, 2 internal electrodes
4 supply lines, 5 maintaining parts
8 look for an arm AB air-flow to form device
EXL dielectric barrier discharge lamp HFI high-frequency lighting circuit
LT luminous tube OE outer electrode
Embodiment
Below, be used to implement form of the present invention with reference to description of drawings.
The 1st form
Fig. 1 to Fig. 4, showed the 1st form that is used to implement dielectric barrier discharge lamp of the present invention, Fig. 1 is the part section front view of dielectric barrier discharge lamp, Fig. 2 is the local disrumpent feelings front view of luminous tube, Fig. 3 shows the support portion of luminous tube and the local disrumpent feelings cross-section front view of power supply, and Fig. 4 is a side cut away view.In this form, dielectric barrier discharge lamp EXL possesses gas-tight container 1, excimers and forms gas, internal electrode 2, outer electrode OE and air-flow and form device AB, is loaded by high-frequency lighting circuit HFI and lights a lamp.Moreover gas-tight container 1, excimers form gas and internal electrode 2, are assembled together in advance and constitute incorporate luminous tube LT.
＜about luminous tube LT〉in this form, luminous tube LT except above-mentioned formation, also has a pair of power supply 3A, 3B and a pair of support portion 5,5 at its two ends.
(about gas-tight container 1) gas-tight container 1 is made by the material of ultraviolet permeability, is formed with elongated discharge space 1a in inside.For example, can be made as the closed at both ends of elongated pipe and form the structure of columned discharge space 1a in inside.In addition, the 2nd form is such as described later, also can be made as by form the structure of elongated discharge space 1a ' cylindraceous with the closed at both ends of dual elongated pipe and in inside.As the material of ultraviolet permeability, generally make of synthetic quartz glass.But in the present invention, as long as have permeability with respect to the ultraviolet ray of the wavelength that will utilize, constituting with any material can.
In addition, gas-tight container 1 uses in order to allow that a plurality of dielectric barrier discharge lamp EXL that will be used to guarantee desired ultraviolet ray amount dispose in parallel with narrower and small interval, the good straight tube of linearity preferably, but slight curvature any have no relations.In fact, when forming elongated pipe, be easy to produce bending a little,, can form about maximum 1mm or its following bending for example with respect to the about 1200mm of total length.But, the bending of this degree, owing to be straight tube substantially, so allowed.
(generating gas about excimers) generates gas as excimers, can use one or more mixing of xenon (Xe), krypton (Kr), argon (Ar) or helium rare gas such as (He), perhaps rare gas halide, for example XeCl, KrCl etc.Moreover, under the situation of enclosing rare gas halide, also can enclose rare gas and fluorine (F), chlorine (Cl), bromine (Br) or iodine halogens such as (I), generate halide in the inside of gas-tight container 1 then.In addition, according to circumstances, except generating gas, excimers allow that also mixing does not generate the gas of excimers, for example neon (Ne) etc.
(about internal electrode 2) internal electrode 2 clips the wall of gas-tight container 1 and relatively sets with outer electrode OE.But internal electrode 2 can also be any one in following two kinds of sample attitudes, i.e. the sample attitude of being enclosed in the mode in the discharge space 1a that is exposed to gas-tight container 1, and the sample attitude that for example is provided in the outside of discharge space 1a in the inboard of gas-tight container 1.Under the situation of the latter's sample attitude, for example gas-tight container 1 is a double-sleeve structure, and internal electrode 2 is set along the wall of the tubular of the central shaft side that is formed on gas-tight container 1.Thereby in the present invention, so-called internal electrode 2 is construed as when when gas-tight container 1 is seen in the outside, relatively is provided in the electrode of the inboard of gas-tight container 1.
As can understanding from above explanation, in the present invention, internal electrode 2, be with on the roughly total length of the inside of gas-tight container 1 at its tube axial direction, be to produce the electrode that the mode of dielectric barrier discharge sets on the whole effective length of lamp, preferably so long as along the long electrode of tube axial direction, all the other are which type of formation can.Moreover in Fig. 1, Fig. 3 and Fig. 4, internal electrode 2 has omitted diagram.
Suitable configuration example to internal electrode shown in Figure 22 describes.Promptly, this internal electrode 2 is following structures, promptly, with the direction of principal axis decentralized configuration of a plurality of independently mesh-like part 2b along gas-tight container 1, and be formed on the mesh-like of the structure that sets with leaving the space on every side respectively, connect simultaneously and form incorporate structure, and set with the state of the inside that is inserted into gas-tight container 1 via linking portion 2a.By using such internal electrode 2, can relatively increase ultraviolet generation.Moreover mesh-like part 2b can be continuous with respect to Zhou Fangxiang, also can separate.
Thereby, in the present invention, be under the situation of mesh-like at internal electrode 2, its mesh-like part 2b specifically for example can be ring-type, helical form or coiled type, perhaps mesh-shape etc.
Secondly, supporting construction and the electric power-feeding structure when internal electrode 2 being provided in the inside of the gas-tight container of being made by quartz glass 1 describes.For internal electrode 2 is sealed in the gas-tight container 1, as shown in Figure 2, can adopt the hermetically-sealed construction that has used sealing metal paper tinsel 1b1.Promptly, utilize welding to wait the end 2c of the linearity that will stretch the two ends of the linking portion 2a of internal electrode 2 and form to be connected on the sealing metal paper tinsel 1b1, then after inserting internal electrode 2 in the gas-tight container 1, the quartz glass of heated end portion makes it become soft state, clamping sealing above sealing metal paper tinsel 1b1 then.So, form closure 1b in the end of gas-tight container 1, thereby internal electrode 2 is supported on the position of regulation.
( power supply 3A, 3B) power supply 3A, 3B is the part that is configured for providing with respect to internal electrode 2 feeder ear of the necessary electric current of dielectric barrier discharge.And power supply 3A, 3B are respectively bar-shaped, and the inner is welded on the molybdenum foil 1b1 in the closure 1b that is embedded in the two ends that are formed at gas-tight container 1, and cardinal extremity is outstanding to the tube axial direction of outside from the closure 1b at the two ends that are formed on gas-tight container 1.In addition, power supply 3A, 3B, the inside in aftermentioned support portion 5 is connected on the supply lines 4 by riveted joint respectively.Moreover supply lines 4 extends out from the output of high-frequency lighting circuit HFI described later.
(support portion 5) support portion 5 as shown in Figure 3, possesses the cover body of round-ended cylinder shape 5a, dead ring 5b and hold-down arm 5c is arranged.Cover body 5a, the end of encirclement luminous tube LT.And, have the inserting hole 5a1 of supply lines 4 in the bottom.Dead ring 5b is provided in the openend of cover body 5a, thus the fixing end of gas-tight container 1.In addition, cover body 5a can also be made as the metallic that covers inner face with insulator in addition as requested with any one formation in metal and the insulator.Hold-down arm 5c, the top is outstanding to figure from the side of cover body 5a, touches with hold-down arm 5c luminous tube LT is being installed under the state of looking on the arm 8 shown in Figure 1 on the standing part that figure do not show on cover body 5a.Moreover, look for an arm 8, extend to the end direction of gas-tight container 1 from the tube axial direction two ends of outer electrode OE, thus the installation site of regulation luminous tube LT and gas-tight container 1.In addition, hold-down arm 5c can form with in metal and the insulator any one, can be used as requested in addition in the centre to be filled with the structure of insulant and to be formed on the structure that insulate between itself and the installation site.So, by cover body 5a is the metallic that insulate system or cover with insulator, perhaps hold-down arm 5c is made as and the installation site between insulated structure, perhaps will look for an arm 8 self maybe this to be looked for insulation between an arm 8 and the support portion 5, can suppress because and power supply 3A, 3B between produce corona discharge, and the situation that the ultra violet radiation that comes from dielectric barrier discharge lamp is reduced.
＜about outer electrode OE〉outer electrode OE, on the part of effective length of lamp at least, outside at gas-tight container 1 sets along the mode of extending with gap of its tube axial direction with tight contact or maintenance appropriateness, simultaneously relative with internal electrode 2, cooperation by outer electrode OE and internal electrode 2 plays a role, and makes in the discharge space 1a of gas-tight container 1 to produce at least a dielectric barrier discharge that wall is a medium with gas-tight container 1.
In addition, outer electrode OE can be to possess the formation of rigidity and possess in the flexible formation any one.Possessing under the situation of rigidity, is the bigger such outer electrode OE of diagram that is bulk of thermal capacitance that is made by conductive metal.Thereby,, can as required the parts that are called lamp body directly be used as outer electrode in the past.The outer electrode OE that the thin plate by aluminum that at this moment, must employing will in the past use is made is clamped in the structure between lamp body and the gas-tight container 1.In addition, in order to cool off gas-tight container 1 part in the zone that produces dielectric barrier discharge, externally set cooling device 9 on the electrode OE.At this moment, cooling device 9 can be to constitute arbitrarily, but preferably will be at the cooling water channel peripheral hardware of internal circulation cold-producing medium externally on the electrode OE, perhaps forms inwardly to be provided with.And then outer electrode OE can be any one state of continuous planar or mesh-like.Moreover, so-called mesh-like, what say is mesh-shape, punching shape, clathrate etc.
＜air-stream generating device AB〉air-stream generating device AB is the device that traverses front face ground formation air-flow along the tube axial direction of gas-tight container 1.The air-flow that forms, so long as used the air-flow of environmental gas such as atmosphere and do not considered that how environmental gas has used the clean gases such as air-flow of inert gas, air-flow can arbitrarily.But the air-flow of formation must be to stop speed and the flow of impurity attached to the particularly lip-deep degree at the position relative with shone thing of gas-tight container 1.
In addition, air-stream generating device AB can be with respect to the relation configuration of single luminous tube LT with 1 pair 1.But, as required, also allow with respect to being adjacent to side by side a plurality of luminous tube LT of configuration, with single air-stream generating device AB as the shared device of each dielectric barrier discharge lamp is set.
And then air-stream generating device AB both can be to be combined in the luminous tube LT of dielectric barrier discharge lamp EXL or the formation on the outer electrode OE, also can be the formation of separating.The latter is suitable for the above-mentioned situation that sets the formation of single air-stream generating device AB with respect to a plurality of luminous tube LT.
Again and then, air-stream generating device AB, can be possess that gas blows out structure, gas suction structure or gas blows out and the formation of gas suction structure in any one.In addition, can also be that tubular axis along gas-tight container 1 sets that long single gas blows out or the structure of gas suction structure body, perhaps set that a plurality of gases blow out or the structure of gas suction structure body etc. along the tubular axis of gas-tight container 1.
Illustrated air-stream generating device AB is to make gas discharge pipe 10 in the longitudinal extension of gas-tight container 1, as shown in Figure 4, forms a plurality of gases with proper spacing and blow out hole 11 on the side relative with gas-tight container 1 of gas discharge pipe 10.Moreover, also gas discharge pipe and outer electrode OE can be formed.In addition, replacing gas to blow out the hole can also form elongated gas and blow out slit.And then, replace making the longitudinal extension of gas discharge pipe along gas-tight container 1, can also be with of the tube axial direction assortment of a plurality of gas discharge pipes along gas-tight container 1.At this moment, a plurality of gas discharge pipes with respect to the tubular axis of gas-tight container 1 roughly the mode of quadrature be configured.
＜high-frequency lighting circuit HFI〉high-frequency lighting circuit HFI, additional high voltage between the internal electrode 2 of dielectric barrier discharge lamp EXL and outer electrode OE loads dielectric barrier discharge lamp EXL and lights a lamp.In addition, high-frequency lighting circuit HFI constitutes based on shunt transformer, its high frequency output, be respectively that its hot side is attached on a pair of power supply 3A, the 3B of the luminous tube LT among the dielectric barrier discharge lamp EXL via supply lines 4,4, low potential side is attached on the outer electrode OE in addition.
The action of＜dielectric barrier discharge lamp EXL〉dielectric barrier discharge lamp EXL, a because side of the high frequency output of high-frequency lighting circuit HFI, for example the high-pressure side output is via supply lines 4,4 are connected a pair of power supply 3A that electrode 2 is internally derived to the outside, on the 3B, the opposing party, for example low pressure (ground connection) side output is connected on the end of outer electrode OE, therefore when input power supply that the figure that opens high-frequency lighting circuit HFI does not show, produce high frequency, its high frequency output is attached to internal electrode 2, and between the wall of gas-tight container 1 outer electrode OE on the other side.Its result produces dielectric barrier discharge in the inside of gas-tight container 1.Utilizing this dielectric barrier discharge is the vacuum-ultraviolet light of centre wavelength by the excimers radiation of xenon with 172nm.Vacuum-ultraviolet light is because the wall quilt that sees through gas-tight container 1 to the outside derivation, therefore can utilize it according to various purposes.
In addition, when dielectric barrier discharge lamp EXL lit a lamp, air-stream generating device AB moved, thereby traversed near the mode of air-flow position below passing through among the figure of gas-tight container 1 of gas-tight container 1, in at least effectively long generation on the whole of dielectric barrier discharge lamp EXL, thereby form the air screen.Its result because the surface of gas-tight container 1 is protected by the air screen protection, has suppressed the surface attachment of impurity to gas-tight container 1.
Fig. 5 is with respect to the variation of the ultraviolet illumination of time of lighting a lamp of the dielectric barrier discharge lamp of the 1st form of the present invention and the chart of showing together of comparative example.In the drawings, the transverse axis and the longitudinal axis are represented respectively to light a lamp and ultraviolet illumination.Among the figure, curve A is the present invention, and curve B is a comparative example, and two curves all are to make according to about 3500 hours data that obtain of lighting a lamp.Moreover comparative example is the conventional art with the identical way of the present invention except not possessing air-stream generating device.Figure is that the data when the present invention and comparative example are used for the dry type clean under identical conditions are made.Condition determination is that the position from the side surface direction 300mm of distance dielectric barrier discharge lamp EXL blows wind speed 3m, 0.23m
3/ second the air of air quantity, measure ultraviolet irradiation apart from the ultraviolet illumination under the 3mm.
As understandable from figure, according to the present invention, owing to prevented adhering to of impurity, even if therefore dielectric barrier discharge lamp long-term lighting, the reduction of ultraviolet illumination is also less.With respect to this, comparative example is owing to impurity adheres to, and the reduction of ultraviolet illumination is significant.
The 2nd form
Fig. 6 is the side cut away view of showing the 2nd form be used to implement dielectric barrier discharge lamp of the present invention.This form is that the luminous tube LT of dielectric barrier discharge lamp EXL is different.
That is, luminous tube LT is that gas-tight container 1 is double-sleeve structure, and the discharge space 1a that forms in inside is cylindric, and internal electrode 2 is configured in the outer surface of gas-tight container 1 ' in the inboard of gas-tight container 1 ' simultaneously.
Internal electrode 2 ' forms to cylindric in order to be provided in becoming of gas-tight container 1 ' interior side external surface cylindraceous.And, use sheet material or the screen cloth material made by conductive material to form.And then, roughly be provided in being on the outer surface cylindraceous of inboard of gas-tight container 1 ' in intimate contact.Outer electrode OE is with the formation of the 1st homomorphosis and be the configuration relative with gas-tight container 1.
Fig. 7 to Figure 10 has showed that Fig. 7 is a front cross-sectional view as the ultraviolet decontaminating apparatus of a form that is used to implement ultraviolet lamp of the present invention, and Fig. 8 is a upward view, and Fig. 9 is the profile along the IX-IX ' line of Fig. 8.In each figure, the part identical with Fig. 1 to Fig. 4 is marked with same label and omits explanation.Ultraviolet lamp UVW possesses ultraviolet lamp body 21, high-frequency lighting circuit 22 and a plurality of dielectric barrier discharge lamp EXL.
In the present invention, ultraviolet lamp UVW, the meaning is to utilize ultraviolet all devices that produce from dielectric barrier discharge lamp EXL.For example, semiconductor stepping exposure device (half Guide body ス テ Star パ one), light decontaminating apparatus, photo-hardening device and light drying device etc.In addition, ultraviolet lamp body 21 is made of the rest parts of having removed dielectric barrier discharge lamp EXL and high-frequency lighting circuit 22 from ultraviolet lamp UVW.
Dielectric barrier discharge lamp EXL can use many as required shown in each figure.Air-stream generating device AB with respect to many dielectric barrier discharge lamp EXL, sets single one below ultraviolet lamp body 21.Moreover dielectric barrier discharge lamp EXL except air-stream generating device AB, has the structure to homomorphosis shown in Figure 4 with Fig. 1.
Air-stream generating device AB, be provided in ultraviolet lamp body 21 below.
High-frequency lighting circuit 22, EXL lights a lamp with dielectric barrier discharge lamp.In addition, high-frequency lighting circuit 22 comprises the high frequency generation device, provides its necessary High frequency power of lighting a lamp to dielectric barrier discharge lamp behind the generation high frequency voltage.Moreover high frequency is to produce 10kHz or more than it, preferably the pulse voltage of the repetition rate of 100kHz～2MHz.
High-frequency lighting circuit 22, so long as voltage pulse output, just, for example, can obtain the pulse of square wave by using the transformer of square wave output no matter remaining constitutes.
So, in the present invention,, therefore can realize preventing with respect to the adhering to of the impurity on the surface of gas-tight container, and reduce the ultraviolet lamp UVW of the reduction of ultraviolet illumination because dielectric barrier discharge lamp EXL possesses air-stream generating device AB.
, ultraviolet lamp body 21 is the case shape as a whole, and inside is being divided into ultraviolet irradiation chamber 21a and power supply room 21b up and down.Ultraviolet irradiation chamber 21a and power supply room 21b can utilize the mode of hinge 21c folding to constitute with an end.
In the 21a of ultraviolet irradiation chamber, as described later with a plurality of dielectric barrier discharge lamp EXL configuration in parallel.A plurality of dielectric barrier discharge lamp EXL, their outer electrode forms as single part.Thereby the curved surface of the recessed song of outer electrode OE is disposed by a plurality of parallel connections under adjacent state.In addition, ultraviolet irradiation chamber 21a constitutes in such a way, promptly be provided in the top of conveying device of the shone thing of decontaminating apparatus regularly, be opened below simultaneously, thus on the extremely near position to shining vacuum-ultraviolet light by the shone thing under following (figure does not show).
High-frequency lighting circuit 22 is incorporated in the power supply room 21b, produces high frequency voltage after will being imported into the power conversion in the power supply room 21b via the protective device 21b3 of power supply wiring, then respectively to a plurality of dielectric barrier discharge lamp EXL power supplies.
Claims (2)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP375861/2004 | 2004-12-27 | ||
| JP2004375861A JP2006185656A (en) | 2004-12-27 | 2004-12-27 | Dielectric barrier discharge lamp and ultraviolet irradiation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1797697A CN1797697A (en) | 2006-07-05 |
| CN100562970C true CN100562970C (en) | 2009-11-25 |
Family
ID=36738624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101376287A Expired - Fee Related CN100562970C (en) | 2004-12-27 | 2005-12-26 | Dielectric barrier discharge lamp and ultraviolet irradiation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006185656A (en) |
| KR (1) | KR100822489B1 (en) |
| CN (1) | CN100562970C (en) |
| TW (1) | TWI290332B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2823771C1 (en) * | 2023-03-31 | 2024-07-30 | Федеральное государственное бюджетное учреждение науки "Институт сильноточной электроники Сибирского отделения Российской академии наук" | GAS-DISCHARGE RADIATION SOURCE WITH WAVELENGTH OF 126 nm |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5092329B2 (en) * | 2006-09-26 | 2012-12-05 | 栗田工業株式会社 | Short wavelength ultraviolet discharge lamp and ultraviolet irradiation treatment equipment |
| JP4356776B2 (en) * | 2007-06-15 | 2009-11-04 | ウシオ電機株式会社 | UV discharge lamp |
| TWI466735B (en) * | 2008-09-18 | 2015-01-01 | Gs Yuasa Int Ltd | Ultraviolet irradiation apparatus |
| JP6717371B2 (en) * | 2016-02-24 | 2020-07-01 | コニカミノルタ株式会社 | Light irradiation device and light irradiation method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020025746A (en) * | 2000-09-28 | 2002-04-04 | 하리슨 도시바 라이팅 가부시키가이샤 | Discharged lamp and ultra-violet radiation apparatus |
-
2004
- 2004-12-27 JP JP2004375861A patent/JP2006185656A/en not_active Withdrawn
-
2005
- 2005-11-21 TW TW094140822A patent/TWI290332B/en not_active IP Right Cessation
- 2005-12-26 CN CNB2005101376287A patent/CN100562970C/en not_active Expired - Fee Related
- 2005-12-27 KR KR1020050130492A patent/KR100822489B1/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2823771C1 (en) * | 2023-03-31 | 2024-07-30 | Федеральное государственное бюджетное учреждение науки "Институт сильноточной электроники Сибирского отделения Российской академии наук" | GAS-DISCHARGE RADIATION SOURCE WITH WAVELENGTH OF 126 nm |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI290332B (en) | 2007-11-21 |
| CN1797697A (en) | 2006-07-05 |
| KR100822489B1 (en) | 2008-04-16 |
| KR20060074889A (en) | 2006-07-03 |
| TW200627506A (en) | 2006-08-01 |
| JP2006185656A (en) | 2006-07-13 |
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