CN100562717C - Hybrid sensor - Google Patents
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- 238000001514 detection method Methods 0.000 claims abstract description 77
- 230000003071 parasitic effect Effects 0.000 claims abstract description 9
- 230000035945 sensitivity Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
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- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
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Abstract
一种混合传感器,包括:多个堆叠的挠性片;其中所述多个挠性片的第一片包括:开关电极图案,以及检测电极图案,其中所述检测电极图案基本上覆盖所述第一片中除形成所述开关电极图案的区域之外的整个区域,其中所述第一片还包括:保护电极图案,被供应有与供应到所述检测电极图案相同的电势,并且被位于所述第一片上以阻止所述检测电极图案与所述开关电极图案之间的寄生电容。
A hybrid sensor comprising: a plurality of stacked flexible sheets; wherein a first sheet of the plurality of flexible sheets includes: a switch electrode pattern, and a detection electrode pattern, wherein the detection electrode pattern substantially covers the second The entire area in one sheet except for the area where the switching electrode pattern is formed, wherein the first sheet further includes: a guard electrode pattern supplied with the same potential as that supplied to the detection electrode pattern and located at the on the first chip to prevent parasitic capacitance between the detection electrode pattern and the switch electrode pattern.
Description
要求2004年5月10日提交的日本专利申请号2004-139518,以及2004年10月4日提交的日本专利申请号2004-291873的优先权,其内容被引入在这里以供参考。Priority is claimed from Japanese Patent Application No. 2004-139518 filed on May 10, 2004, and Japanese Patent Application No. 2004-291873 filed on October 4, 2004, the contents of which are incorporated herein by reference.
技术领域 technical field
本发明涉及包括静电电容传感器的混合传感器,其利用静电电容的变化来检测邻近的对象,以及接触压力传感器,其检测负荷压力。更具体地,本发明涉及通过堆叠多个弹性的或者挠性的片而制造的混合传感器,所述片每个被提供有电极图案。The present invention relates to a hybrid sensor including an electrostatic capacitance sensor that detects a nearby object using a change in electrostatic capacitance, and a contact pressure sensor that detects load pressure. More specifically, the present invention relates to a hybrid sensor manufactured by stacking a plurality of elastic or flexible sheets each provided with an electrode pattern.
背景技术 Background technique
一种具有静电电容传感器以及接触压力传感器的相关技术的混合传感器,以及利用所述混合传感器检测坐在汽车的座位上的人体的系统被公开在日本未审查的专利申请,第一公开,号2002-326554,被转让给与本申请相同的申请人。如图8中所示,所述混合传感器6通过堆叠由如聚酯膜的绝缘树脂膜制成的上和下挠性片11和12以及位于其之间的绝缘片13形成。所述挠性片11和12在互相面对的所述片11的下表面11a以及所述片12的上表面12a上被分别提供有开关电极图案14和15。所述电极图案14和15是通过丝网印刷形成,在所述丝网印刷中适合的导电材料如银糊被沉积。所述电极图案14和15的每个包括多个着落(land)部分14a和15a,其被用作配置在矩阵图案中的开关接触16,以及导线部分14b和15b,其将所述着落部分14a和15a电连接到检测电路(没有示出)。所述绝缘片13在对应于所述着落部分14a和15a的位置具有多个开口17。每个所述开口17具有一个直径,足以使所述着落部分14a中的一个能够与所述着落部分15a的关联的一个相接触。当施加压力负荷时,所述上挠性片11的着落部分14a的一个或者一些通过所述开口17接触所述下挠性片12的着落部分15a相关联的一个或者一些,以进行电接触。所述混合传感器6通过上面描述的结构元件执行所述接触压力传感器的功能。A related art hybrid sensor having an electrostatic capacitance sensor and a contact pressure sensor, and a system for detecting a human body sitting on a seat of a car using the hybrid sensor are disclosed in Japanese Unexamined Patent Application, First Publication, No. 2002 -326554, assigned to the same applicant as this application. As shown in FIG. 8, the
所述混合传感器6中的静电电容传感器的功能是通过形成在所述上挠性片11上与所述绝缘片13面对的表面11a上的一对检测电极图案7a和7b而实现的。所述检测电极图案7a和7b与所述开关电极图案14绝缘。这样构造的所述静电电容传感器根据从所述检测电极图案7a和7b获得的静电电容中的变化来检测邻近的对象而不与其接触。The function of the capacitance sensor in the
根据上面的结构,用于所述混合传感器的制造成本可被减少,因为所述接触压力传感器以及所述静电电容传感器被形成在所述相同的挠性片上。According to the above structure, the manufacturing cost for the hybrid sensor can be reduced because the contact pressure sensor and the electrostatic capacitance sensor are formed on the same flexible sheet.
但是,当对象离传感器相对远时上面描述所述的混合传感器不可避免地具有不足的用于检测邻近对象的灵敏度。这是因为用于所述静电电容传感器的检测电极图案被提供在挠性片的相对小的区域上。However, the hybrid sensor described above inevitably has insufficient sensitivity for detecting an adjacent object when the object is relatively far from the sensor. This is because the detection electrode pattern for the electrostatic capacity sensor is provided on a relatively small area of the flexible sheet.
发明内容 Contents of the invention
考虑到上面的问题,本发明被完成。因此,本发明的一个目的是提供一种混合传感器,其包括其中用于检测邻近对象的灵敏度被提高的静电电容传感器,并且从而实现高可靠的混合传感器。The present invention has been accomplished in consideration of the above problems. Accordingly, an object of the present invention is to provide a hybrid sensor including an electrostatic capacitance sensor in which sensitivity for detecting a neighboring object is improved, and thereby realize a highly reliable hybrid sensor.
根据本发明的示范实施例,混合传感器包括多个堆叠的挠性片。所述多个挠性片的第一片包括开关电极图案和检测电极图案。所述检测电极图案基本上覆盖所述第一片中除形成所述开关电极图案的区域之外的整个区域。所述第一片可以还包括保护电极图案(guard electrode pattern),其被供应有与供应给所述检测电极图案同样的电势。所述保护电极图案位于所述第一片上以阻挡所述检测电极图案与所述开关电极图案之间的寄生电容。According to an exemplary embodiment of the present invention, a hybrid sensor includes a plurality of stacked flexible sheets. A first sheet of the plurality of flexible sheets includes a switching electrode pattern and a detecting electrode pattern. The detection electrode pattern covers substantially the entire area of the first sheet except the area where the switching electrode pattern is formed. The first sheet may further include a guard electrode pattern supplied with the same potential as that supplied to the detection electrode pattern. The guard electrode pattern is located on the first sheet to block parasitic capacitance between the detection electrode pattern and the switch electrode pattern.
所述多个挠性片的第二片可以是其中具有多个孔的绝缘片,并且所述多个挠性片的第三片可以包括地电极图案。所述第二片中的多个孔以及所述第三片的地电极图案的位置可对应于所述第一片上的所述开关电极的位置。因此,当压力被施加到所述第一和第二片时,所述开关电极可以通过所述第二片中的孔接触所述地电极。A second sheet of the plurality of flexible sheets may be an insulating sheet having a plurality of holes therein, and a third sheet of the plurality of flexible sheets may include a ground electrode pattern. The positions of the plurality of holes in the second sheet and the ground electrode pattern of the third sheet may correspond to the positions of the switch electrodes on the first sheet. Accordingly, when pressure is applied to the first and second sheets, the switch electrode may contact the ground electrode through the hole in the second sheet.
根据本发明的示范实施例,混合传感器,包括:多个堆叠的挠性片;其中所述多个挠性片的第一片包括:开关电极图案和地电极图案,其一起形成多个着落部分,检测电极图案,和第一多个缝隙,其围绕所述着落部分并且将所述着落部分从所述检测电极图案分离;其中所述检测电极图案基本上覆盖所述第一片中除形成所述检测电极图案和所述第一多个缝隙的区域之外的整个区域,其中所述第一片还包括:保护电极图案,被供应有与供应到所述检测电极图案相同的电势,并且位于所述第一片上以阻止所述检测电极图案与所述开关电极图案之间的寄生电容。According to an exemplary embodiment of the present invention, a hybrid sensor includes: a plurality of stacked flexible sheets; wherein a first sheet of the plurality of flexible sheets includes: a switch electrode pattern and a ground electrode pattern, which together form a plurality of landing portions , a detection electrode pattern, and a first plurality of slits surrounding the landing portion and separating the landing portion from the detection electrode pattern; wherein the detection electrode pattern substantially covers the first sheet except for forming the The detection electrode pattern and the entire area except the area of the first plurality of slits, wherein the first sheet further includes: a guard electrode pattern supplied with the same potential as that supplied to the detection electrode pattern, and positioned at The first chip is used to prevent parasitic capacitance between the detection electrode pattern and the switch electrode pattern.
根据本发明的示范实施例,静电电容传感器,包括多个堆叠的挠性片;其中所述多个挠性片的第一片包括:检测电极图案;第二电路图案;以及保护电极图案,其被供应有与供应到所述检测电极图案相同的电势,并且位于所述第一片上以阻挡所述检测电极图案与所述第二电路图案之间的寄生电容;以及检测电路,其被连接到所述检测电极图案,所述检测电路检测所述检测电极图案的静电电容。According to an exemplary embodiment of the present invention, an electrostatic capacitance sensor includes a plurality of stacked flexible sheets; wherein a first sheet of the plurality of flexible sheets includes: a detection electrode pattern; a second circuit pattern; and a guard electrode pattern, which is supplied with the same potential as that supplied to the detection electrode pattern, and is located on the first sheet to block a parasitic capacitance between the detection electrode pattern and the second circuit pattern; and a detection circuit, which is connected to the detection electrode pattern, the detection circuit detects the electrostatic capacitance of the detection electrode pattern.
附图说明 Description of drawings
参考下面的描述和附图,本发明的这些和其它特征,方面和优点将被更好地理解,所述描述和附图不应被理解为以任何方式限制本发明,其中:These and other features, aspects and advantages of the present invention will be better understood with reference to the following description and drawings, which should not be construed as limiting the invention in any way, wherein:
图1是示出根据本发明的第一示范实施例的混合传感器的透视图。FIG. 1 is a perspective view showing a hybrid sensor according to a first exemplary embodiment of the present invention.
图2是示出根据本发明的第一示范实施例的混合传感器的截面图。FIG. 2 is a cross-sectional view showing a hybrid sensor according to a first exemplary embodiment of the present invention.
图3是示出根据本发明的第二示范实施例的混合传感器的透视图。FIG. 3 is a perspective view showing a hybrid sensor according to a second exemplary embodiment of the present invention.
图4是示出根据本发明的第二示范实施例的混合传感器的截面图。FIG. 4 is a cross-sectional view showing a hybrid sensor according to a second exemplary embodiment of the present invention.
图5是示出根据本发明的第二示范实施例的混合传感器的修改的截面图。FIG. 5 is a cross-sectional view showing a modification of the hybrid sensor according to the second exemplary embodiment of the present invention.
图6是示出根据本发明的第三示范实施例的混合传感器的平面图。FIG. 6 is a plan view showing a hybrid sensor according to a third exemplary embodiment of the present invention.
图7是示出根据本发明的第三示范实施例的混合传感器的截面图。FIG. 7 is a cross-sectional view showing a hybrid sensor according to a third exemplary embodiment of the present invention.
图8是示出常规混合传感器的透视图。FIG. 8 is a perspective view showing a conventional hybrid sensor.
具体实施方式 Detailed ways
现在,将参照附图描述本发明的示范实施例。Now, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.
图1和2示出根据本发明的第一示范实施例的混合传感器。混合传感器1包括上和下挠性片21和24,其由如聚酯膜的绝缘树脂膜制成,以及位于所述上和下片21和24之间的绝缘片13。所述片13,21和24被堆叠在一起以形成薄膜电路。所述挠性片21在与所述绝缘片13面对的所述片21的下表面(在图1和2中)上被提供有开关电极图案14。所述挠性片24在与所述绝缘片13面对的所述片24的上表面(在图1和2中)上被提供有地电极图案25。所述开关和地电极图案14和25是通过丝网印刷形成的,其中适合的导电材料如银糊被沉积。所述开关电极图案14包括多个着落部分14a,其被以矩阵图案配置用作开关接触16;以及电连接所述着落部分14a的导线部分14b。类似地,所述地电极图案25包括多个着落部分25a,其被分别配置成与所述开关电极图案14的所述着落部分14a面对,以及电连接所述着落部分25a的导线部分25b。所述绝缘片13在与所述着落部分14a和25a对应的位置有多个开口17。每个所述开口17具有足够的直径,使得当压力负荷被施加到所述传感器1时,所述着落部分14a的一个能够与所述着落部分25a的关联的一个接触。1 and 2 show a hybrid sensor according to a first exemplary embodiment of the present invention. The hybrid sensor 1 includes upper and lower
所述上挠性片21也具有检测电极图案22,形成在其上提供了开关电极图案14的所述挠性片21的下表面(图1和图2中)上。所述检测电极图案22被形成以基本上覆盖除形成所述开关电极图案14的区域之外的整个区域。可替换的,所述检测电极图案22可以被形成在所述挠性片21的上表面上。这样形成的检测电极图案22具有大的检测区域,这有助于邻近对象的检测。The upper
混合传感器1被连接到传感器电路30。所述地电极图案25通过所述传感器电路30的端子c被接地,作为包括在所述混合传感器1中的所述接触压力传感器和所述静电电容传感器的公共地。所述开关电极图案14被连接到所述传感器电路30的端子“a”以输出ON/OFF信号,当所述着落部分14a和25a之间有电连接时所述信号转变为地(GND)电平。The hybrid sensor 1 is connected to a
所述检测电极图案22被连接到包括在传感器电路30中的检测电路31的输入端子b以检测静电电容(electrostatic capacitance)。所述检测电路31包括振荡器,其振荡以响应例如由所述检测电极图案22与所述地之间的静电电容所确定的频率或工作循环(duty cycle);以及低通滤波器,其对所述振荡器的输出积分。电阻32被连接在输入端子b与电压控制电流源Vcc之间。The
现在将所述混合传感器1的操作描述如下。The operation of the hybrid sensor 1 will now be described as follows.
当施加压力负荷时,所述上挠性片21上所述开关电极图案14的所述着落部分14a的一个或者多个通过所述开口17接触所述下挠性片25上的所述地图案25的所述着落部分25a的一个或者多个,以进行电连接。因此,所述开关电极图案14的电势转变成地电平,检测所述压力负荷。所述混合传感器由此充当接触压力传感器。When a pressure load is applied, one or more of the
尽管由于所述检测电极图案22没有重叠到所述开关电极图案14和所述地电极图案25所处的区域,产生在那些电极图案22,14和25之间的静电电容不是那么高,寄生电容Co被形成在所述检测电极图案22和所述开关电极图案14以及所述地电极图案25之间。但是,当一对象到达所述检测电极图案22时,产生在所述对象与所述检测电极图案22之间的电容Cx被增加。所述对象具有比要检测的所述电容Cx大很多的地电容,以致所述对象的电势可以被当作地电势。所述寄生电容Co与由于所述邻近对象所引起的所述电容Cx的总电容C也被增加。所述检测电路31感测所述总电容C中的变化以检测所述邻近对象。所述混合传感器从而充当静电电容传感器。Although the electrostatic capacitance generated between those
如上所述,仅通过在所述上挠性片21上形成被设置为与要检测的物体面对的所述检测电极图案22,有可能把所述静电电容传感器的功能增加到所述混合传感器1。所述地电极图案25也可以用作所述检测电极图案22和所述开关电极图案14两者的公共接地。另外,所述开关电极图案14可以被形成在所述下挠性片24上,而所述地电极图案25也可以被形成在所述上挠性片21上。As described above, it is possible to add the function of the electrostatic capacity sensor to the hybrid sensor only by forming the
图3和4示出了本发明的第二示范实施例。与所述第一实施例类似或者相同的结构元件具有相同的参考数字,并且其解释被省略。3 and 4 show a second exemplary embodiment of the invention. Structural elements similar or identical to those of the first embodiment have the same reference numerals, and explanations thereof are omitted.
如图3和4中所示,除图1和2中所示的第一实施例中的混合传感器中所包括的结构元件之外,第二实施例的混合传感器2包括保护电极图案42。所述保护电极图案42被形成在上挠性片41的下表面上(图3和4中)以位于所述开关电极图案14与所述检测电极图案22之间的空间或者区域,并且围绕所述开关电极图案14。也就是说,考虑到所述挠性片41的平面,所述保护电极图案42,所述检测电极图案22以及所述开关电极图案14不被重叠。所述保护电极图案42被供应有与供应到所述检测电极图案22相同的电压。为此,传感器电路50通过充当电压跟随器缓的冲放大器51以及连接到所述保护电极图案42的端子d供应从所述检测电极图案22的输出电压到所述保护电极图案42。As shown in FIGS. 3 and 4 , the hybrid sensor 2 of the second embodiment includes a
根据上面的结构,所述检测电极图案22以及所述保护电极图案42总是具有相同的电势,并且因此没有静电电容被形成在它们之间。所述检测电极图案22,所述开关电极图案14以及所述地电极图案25之间的所述寄生电容Co因此被大大地减小。因此有可能放大所述邻近对象与所述检测电极图案22之间产生的所述电容Cx中的变化,并且增加所述静电电容传感器的灵敏度。According to the above structure, the
如图5中所示,可替换地,除所述保护电极图案42以外另外的保护电极图案44可以被形成在所述下挠性片24的上表面上。在此情况中,所述保护电极图案44被形成在所述上表面上以基本上覆盖除其上形成所述地电极图案25的区域之外的整个区域,以围绕所述地电极图案25。因为所述保护电极图案44也被形成在下挠性片24上,所述下挠性片24在面对要检测的邻近对象的上挠性片41的对面(opposite)。此结构使有可能防止由例如产生在所述静电电容传感器的下侧(图5中)上以及在从所述下侧接近所述下挠性片24的邻近对象所产生的噪声所导致的误检测。类似于所述第一实施例,所述开关电极图案14可以形成在所述下挠性片24上而所述地电极图案25可以形成在所述上挠性片41上。As shown in FIG. 5 , alternatively, another
图6和7显示本发明的第三示范实施例。与第一和第二实施例类似或者相同的结构元件具有相同的参考数字,并且其解释被省略。6 and 7 show a third exemplary embodiment of the present invention. Structural elements similar or identical to those of the first and second embodiments have the same reference numerals, and explanations thereof are omitted.
根据第三实施例的混合传感器3包括上和下挠性片61和62以及位于所述上和下挠性片61和62之间的绝缘片63。所述上挠性片61被提供有电极图案64,其在面对所述绝缘片63的其下表面上包括开关电极图案64c,地电极图案64d以及保护电极图案69。在图6中,为了清楚,所述电极图案64由实线绘制。类似于第一和第二实施例,所述电极图案64具有着落部分64a和导线部分64b。在所述着落部分64a处,所述开关电极图案64c以及所述地电极图案64d被配置有互相面对的梳齿。所述保护电极图案69被配置在所述开关电极图案64c的外周以在所述着落部分64a以及所述导线部分64b围绕所述图案64c。The
所述下挠性片62被提供有多个短路图案65,其以矩阵形式配置在对应于所述上挠性片61的所述电极图案64的所述着落图案64a的位置。The lower
所述绝缘片63在对应于所述着落部分64a和所述短路图案65的位置处具有多个开口67。每个开口67具有足够的直径以在压力负荷被施加到所述传感器3时使所述着落部分64a的一个能够接触短路图案65的关联的一个。The insulating
所述上和下挠性片61和62以及所述绝缘片63被进一步分别提供有缝隙68a,68c和68b。所述挠性片61上的缝隙68a被形成所述保护电极图案69的外周以围绕所述图案69。因此,所述缝隙68a将所述电极图案64形成的区域与所述上挠性片61的其它部分分开,除图6中左侧的无缝隙形成部分之外。所述缝隙68b和68c被分别形成在所述绝缘片63的开口67以及所述下挠性片62上的所述短路图案65的外周处,以围绕它们。当所述上和下挠性片61和62以及所述绝缘片63被堆叠在一起时,所述缝隙68a,68b和68c被重叠以形成贯穿的缝隙。The upper and lower
在所述上挠性片61上的所述缝隙68a的外周处,检测电极图案66被形成以围绕所述缝隙68a。如图6中所示,所述检测电极图案66被形成以基本上覆盖除形成所述电极图案64以及缝隙68a的区域之外的整个区域。这样形成的检测电极图案66具有有助于邻近对象的检测的大的检测区域。当一对象到达所述检测电极图案66时,产生在所述对象与所述检测电极图案66之间的电容Cx被增加。所述对象具有比要检测的所述电容Cx大很多的地电容,所以所述对象的电势可以被当作地电势。所述电容Cx中的变化因此是可检测的。At the outer periphery of the
混合传感器3被连接到与图3中所示的传感器电路50类似的传感器电路。也就是说,所述开关电极图案64c被连接到所述传感器电路50的端子“a”,所述检测电极图案66被连接到所述传感器电路50的端子b,所述地电极图案64b被连接到所述传感器电路50的端子c,以及所述保护电极图案69被连接到所述传感器电路50的端子d。The
在此实施例中,可以被称为膜开关的所述电极图案64通过所述缝隙68a从形成所述检测电极图案66的区域分开。当所述混合传感器3被安装在弯曲处时,此结构防止由施加到所述混合传感器3的弯曲力所导致的所述混合传感器3的误操作。In this embodiment, the
如上面的描述,根据本发明的所述混合传感器具有检测电极图案,其被提供以基本上覆盖除其上形成所述开关电极图案的区域之外的整个区域。因此,所述检测电极图案具有对检测邻近对象有贡献的大的检测区域。此结构使得有可能提高所述静电电容传感器的灵敏度。As described above, the hybrid sensor according to the present invention has the detection electrode pattern provided to cover substantially the entire area except the area on which the switching electrode pattern is formed. Therefore, the detection electrode pattern has a large detection area that contributes to detection of adjacent objects. This structure makes it possible to improve the sensitivity of the electrostatic capacity sensor.
另外,根据本发明的所述混合传感器中的静电电容传感器具有保护电极图案,其被配置成位于所述检测电极图案和其它电极图案之间的区域或者空间。所述保护电极图案被施加与所述检测电极图案的电压相等的电压。因此,考虑静电电容,所述检测电极图案被从所述其它电极图案隔离。此结构使得即使多个功能被提供在所述混合传感器上也可能避免所述静电电容传感器的灵敏度的降级。In addition, the electrostatic capacitance sensor in the hybrid sensor according to the present invention has a guard electrode pattern arranged in a region or a space between the detection electrode pattern and other electrode patterns. The guard electrode pattern is applied with a voltage equal to that of the detection electrode pattern. Therefore, the detection electrode pattern is isolated from the other electrode patterns in consideration of electrostatic capacity. This structure makes it possible to avoid degradation of the sensitivity of the electrostatic capacity sensor even if a plurality of functions are provided on the hybrid sensor.
尽管本发明的示范实施例已经在上面进行了描述和说明,需要理解的是这些仅是本发明的示范而不应被看作是限制。可以在不脱离本发明的精神或者范围的情况下进行添加,省略,替换,以及其它修改。因此,本发明不应该被看成由前面的说明书来限制,而是仅由所附的权利要求的范围所限制。While exemplary embodiments of the invention have been described and illustrated above, it is to be understood that these are only exemplary of the invention and are not to be considered limiting. Additions, omissions, substitutions, and other modifications can be made without departing from the spirit or scope of the present invention. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.
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