CN100553976C - droplet ejection device - Google Patents

Abstract

The droplet discharge device includes a droplet discharge head, a laser irradiation device, and a suction device. The droplet ejection head ejects liquid droplets toward an object. The laser irradiation device irradiates laser light to a region of the object facing the droplet discharge head. The suction device is provided between the laser irradiation device and an irradiation position on the object irradiated with the laser light, and sucks evaporated components generated from the liquid droplets.

Description

Droplet ejection apparatus

Technical field

The present invention relates to droplet ejection apparatus.

Background technology

In the past, the such display unit of liquid crystal indicator or el display possessed the substrate that is used for display image.On this kind substrate, be that purpose is formed with the cognizance code (for example, 2 d code) that shows the manufacturing information comprise its manufactory or goods number with quality management or manufacturing management.Cognizance code is made of a plurality of points that dispose in the mode that forms the pattern of stipulating.Manufacture method as cognizance code, Te Kaiping 11-77340 communique has proposed will put the metal forming irradiating laser laser splash method of spatter film forming, the spy open the 2003-127537 communique proposed to contain polish material water to injections such as substrates, thereby point is imprinted at jetting (water jet) method on this substrate.

In described laser splash method,, the gap of metal forming and substrate must be adjusted into several μ m～tens of μ m in order to obtain wishing the point of size.Therefore, require the surface of substrate and the surface of metal forming to have high flatness, and, must be with the precision adjustment substrate of μ m level and the gap of metal forming.Therefore, the object range that can use the substrate of laser splash method is restricted, and the versatility of this method is poor.In addition, in water jetting, to the substrate mint-mark time, water or dust, polishing agent etc. disperse sometimes, thereby pollute substrate.

Thereby in recent years, as the manufacture method of eliminating the problem in the described production, ink-jet method is gazed at.In ink-jet method, the drop that will contain metal microparticle sprays from nozzle towards substrate from droplet jetting head, and makes this droplet drying, forms a little on substrate thus.Therefore, the range of application of substrate that can use this method is bigger, in addition, can form cognizance code under the situation of not polluting substrate.

In ink-jet method, bullet invests drop on the substrate according to the surface state of substrate or the surface tension of drop etc., soaks into expansion immediately along the surface of substrate.Therefore, if the drying of drop needs the time (for example, as if the time that needs more than 100 milliseconds), then play attached drop soak into expansion superfluously, thereby overflow from the some formation zone of hope the surperficial of substrate.

By towards playing attached drop irradiating laser, come the attached drop of instantaneous curing bullet, solve described problem thus.On the other hand, if irradiating laser solidifies drop, then the evaporation composition from drop is attached to the optical system that is used to launch laser, thereby has the anxiety of polluting this optical system.Therefore, the suction apparatus that sucks the evaporation composition need be set on the droplet ejection apparatus of the laser head that possesses irradiating laser, suck the evaporation composition that the periphery at laser head swims by suction apparatus, thereby remove the evaporation composition from the periphery of laser head.

In the past, proposed to suck the evaporation composition that the periphery at droplet jetting head swims, produced the technology of oozing out or avoiding producing dewfall at the droplet jetting head periphery thereby suppress drop by suction apparatus.

For example, the spy opens the 2003-136689 communique and has proposed to play attached drop and be exposed to the air stream that is produced by fan or vacuum inhalation device, thereby promotes the droplet ejection apparatus of the drying of drop.The spy opens the 2005-22194 communique and has proposed the suction apparatus that is provided with by side periphery on droplet jetting head, will be below droplet jetting head volatile materials air of periphery below droplet jetting head of swimming and his like of periphery suck the droplet ejection apparatus of eliminating.The spy opens the 2003-145737 communique and has proposed in the both sides of printing or suction action is carried out in the downstream of the throughput direction of the printing in the zone of irradiation ultraviolet radiation, sucks the droplet ejection apparatus of the evaporation composition of following ultraviolet irradiation and producing from drop.

But, open the 2003-136689 communique and the spy opens in the 2005-22194 communique the spy, in order to prevent the generation of oozing out or prevent dewfall of drop, and suck to play the attached drop periphery or the evaporation composition of droplet jetting head periphery, but the relation between the allocation position of the flow path of the evaporation composition that is inhaled into of research and optical system not.In addition; open in the 2003-145737 communique the spy; be provided with comprise be used for from the ultraviolet light of ultraviolet lamp to the electromagnetic radiation line transmittance plate of outside vagina and be used to reflect the optical system that makes the reflecting plate of its irradiation drop from the ultraviolet light of ultraviolet lamp, purpose is to protect this electromagnetic radiation line transmittance plate or the such optical system of reflecting plate.But, because the evaporation composition of evaporation is inhaled into from the both sides of printing or the downstream of irradiation area under electromagnetic irradiating device, therefore the evaporation composition in the suction process pollutes optical system by under the electromagnetic irradiating device thereby the part of evaporation composition is attached on the optical system.

Thereby described existing droplet ejection apparatus can not prevent the situation that the optical system of droplet jetting head or laser is polluted by the evaporation composition of the drop of following the laser irradiation and producing.

Summary of the invention

The object of the present invention is to provide and a kind ofly can make the stable droplet ejection apparatus of optical characteristics that shines in the laser of drop.

In order to reach described purpose, a mode of the present invention provides a kind of droplet ejection apparatus.This droplet ejection apparatus possesses droplet jetting head, laser irradiation device and suction apparatus.Droplet jetting head sprays drop to object.The area illumination laser of laser irradiation device pair and the opposed described object of described droplet jetting head.Suction apparatus be located at described laser irradiation device and the described object that shone by described laser on irradiation position between and suck the evaporation composition that drop that bullet invests described object produces through the laser irradiation and from the described drop of described laser irradiation.

Description of drawings

Fig. 1 is the vertical view of expression liquid crystal indicator;

Figure 1A is with the enlarged drawing of the part that surrounds of circle 1A among Fig. 1;

Fig. 2 is the approximate three-dimensional map of the droplet ejection apparatus of expression one embodiment of the present invention;

Fig. 3 is the approximate vertical view of the droplet ejection apparatus of presentation graphs 2;

Fig. 4 is the figure of an assembly of the droplet ejection apparatus of presentation graphs 2;

Fig. 5 is the figure of expression droplet jetting head;

Fig. 6 is the figure of an explanation assembly;

Fig. 7 is the block diagram of the electric structure of expression droplet ejection apparatus.

The specific embodiment

Below, illustrate with reference to Fig. 1～Fig. 7 and to have specialized one embodiment of the present invention.At first, liquid crystal indicator 1 is described, this liquid crystal indicator 1 has the cognizance code 10 that utilizes droplet ejection apparatus 20 of the present invention and form.

In Fig. 1, be formed with the display part 3 of the quadrangle shape of having enclosed liquid crystal molecule in the substantial middle position of a side of transparent substrates 2 (surperficial 2a).Be formed with scan line drive circuit 4 and data line drive circuit 5 in the outside of display part 3.The data-signal that sweep signal that liquid crystal indicator 1 is generated based on these scan line drive circuits 4 and data line drive circuit 5 are generated is controlled the state of orientation of the liquid crystal molecule in the described display part 3.Modulate planar light from not shown lighting device by the state of orientation of liquid crystal molecule, liquid crystal indicator 1 shows the image of wishing in the zone of display part 3 thus.

It is the foursquare code region S of 1mm approximately that inferior horn in the left side of surperficial 2a is formed with on one side.This code region S is divided into a plurality of data cell C of the matrix that constitutes 16 row * 16 row imaginaryly.On selecteed data cell C, form the some D that serves as a mark respectively,, constitute the cognizance code 10 of liquid crystal indicator 1 by these D.In the present embodiment, the center of establishing the data cell C that need to form some D is target ejection position P, and the length of establishing one side of each data cell C is " cell width W ".

Each point D is hemispheric mark, and its external diameter equates with the length (described " cell width W ") on one side of each data cell C.The drop Fb that the aqueous body F (with reference to Fig. 5) that obtains constitutes by metal microparticle (for example, nickel particle or manganese particulate) is scattered in the dispersant is towards data cell C ejection, and bullet invests data cell C.Point D is by dry and bake and play attached drop Fb and form.Played the dry of attached drop Fb and baked by drop Fb irradiating laser B (with reference to Fig. 5) is carried out.

Cognizance code 10 can be by the configuration pattern that has or not the point of determining corresponding to the some D in each data cell C, the goods number of reproduction liquid crystal indicator 1 or lot number sign indicating number etc.In the present embodiment of Fig. 1～Fig. 5, the length direction of described transparent substrates 2 is defined as directions X, the direction with the directions X quadrature in will the face parallel with substrate 2 is defined as the Y direction.In addition, will be defined as the Z direction with the direction of both sides' quadrature of directions X and Y direction.Especially, establish the direction represented with arrow among the figure for+directions X ,+the Y direction ,+the Z direction, and establish the direction opposite with them be respectively-directions X ,-the Y direction ,-the Z direction.

Then, based on Fig. 2 the droplet ejection apparatus 20 that is used to form cognizance code 10 is described.In the present embodiment, the situation that forms the cognizance code 10 corresponding with each transparent substrates 2 on female substrate 2M of a plurality of mother metals that become transparent substrates 2 dispersedly is described.Female substrate 2M is the object of droplet ejection apparatus 20 ejection drops.

In Fig. 2, droplet ejection apparatus 20 possesses and forms the roughly base station 21 of rectangular shape.Side (sidepiece of directions X) at base station 21 disposes the substrate stocker 22 of accommodating a plurality of female substrate 2M.Substrate stocker 22 moves along the above-below direction (+Z direction reaches-the Z direction) of Fig. 2, each the female substrate 2M that is contained in the substrate stocker 22 is exported on base station 21, or the female substrate 2M on the base station 21 is imported in the groove of substrate stocker 22.

The position of the close described substrate stocker 22 of 21a disposes the running gear 23 that extends along the Y direction on base station 21.Running gear 23 portion within it has walking motor MS (with reference to Fig. 7), makes and conveying device that the output shaft of the motor MS that walks links is walked along the Y direction.Conveying device 24 is to have adsorbable and keep the horizontal articulated robot of conveying arm 24a of the back side 2Mb of female substrate 2M.Conveying device 24 portion within it has conveying motor MT (with reference to Fig. 7), rotates elastically with the conveying arm of the output shaft driving binding of carrying motor MT and at upper and lower to move up on the XY plane.

The both sides of the Y direction of 21a and be provided with a pair of mounting table 25R, the 25L of the female substrate 2M of mounting on base station 21.A pair of mounting table 25R, 25L delimit the space (recess 25a) of plug conveying arm 24a respectively at the back side 2Mb that with surperficial 2Ma is female substrate 2M of upside and mounting.Conveying arm 24a moves on the inside of recess 25a or down motion, with female substrate 2M from each mounting table 25R, 25L promote or mounting on each mounting table 25R, 25L.

As walking motor MS and when carrying motor MT to receive the control signal of regulation, the female substrate 2M in running gear 23 and the described substrate stocker 22 of conveying device 24 outputs and with on female substrate 2M mounting any in mounting table 25R, 25L.In addition, in running gear 23 and conveying device 24 the groove, carry out the recovery of female substrate 2M with the regulation of female substrate 2M input substrate stocker 22 of mounting on mounting table 25R, 25L.

In the present embodiment, as shown in Figure 3, the code region S of the female substrate 2M of mounting on each mounting table 25R, 25L towards-directions X successively, promptly from the upside of Fig. 3 towards downside be defined as successively the first line code region S 1, the second line code region S 2 ..., fifth line code zone S5.

In Fig. 2, on base station 21, dispose articulated robot as mobile device (below, be called the SCARA robot) 26 between described a pair of mounting table 25R, the 25L of 21a.SCARA robot 26 is fixed in the top 21a of base station 21, and possesses the main shaft 27 that (+Z direction) extends along the top.

Be provided with the first arm 28a in the upper end of main shaft 27.The base end part of the first arm 28a links with the output shaft of the first motor M1 (with reference to Fig. 7) that is provided with at main shaft 27, and can rotate around the axle that extends along the Z direction in horizontal plane.Leading section at the first arm 28a is provided with the second motor M2 (with reference to Fig. 7).The output shaft of the base end part of the second arm 28b and this second motor M2 links, and the second arm 28b can rotate around the axle that extends along the Z direction in horizontal plane.

Leading section at the second arm 28b is provided with three-motor M3 (with reference to Fig. 7).The output shaft of columned the 3rd arm 28c and this three-motor M3 links.The 3rd arm 28c can rotate around the axle that extends along the Z direction.Dispose an assembly 30 in the lower end of the 3rd arm 28c.

Assembly 30 possesses the box 31 that forms box-shaped body.Dispose the suction inlet 33 of droplet jetting head (being designated hereinafter simply as ejecting head) 32 and formation suction apparatus at the downside of box 31.In addition, laser head 34 is equipped with in a side of box 31 as laser irradiation device.

When first, second and third motor M1, M2, M3 accepted the control signal of regulation, SCARA robot 26 rotated first, second and third corresponding arm 28a, 28b, 28c, thereby made an assembly 30 mobile in the regulation zone on the 21a in the above.

If describe in detail, then as shown in Figure 3, the SCARA robot generates " target trajectory R " based on the position coordinates of each code region S (each target ejection position P), and an assembly 30 is moved to scan along this target trajectory R.That is, in Fig. 3, shown in the arrow on the mounting table 25L, SCARA robot 26 at first makes first, second and third arm 28a, 28b, 28c rotate so that an assembly 30 (front end of the 3rd arm 28c) is disposed at " the initial point SP " of the first line code region S 1.In Fig. 3, initial point SP is equivalent to the right-hand member of the first line code region S 1.At this moment, in an assembly 30, be arranged in order laser head 34, suction inlet 33, ejecting head 32 towards+Y direction.

If an assembly 30 moves to initial point SP, then SCARA robot 26 moves an assembly 30, make ejecting head 32 relative suction inlets 33 in advance and suction inlet 33 relative laser heads 34 go ahead of the rest.If an assembly 30 arrives the terminal point of the first line code region S 1, then SCARA robot 26 rotates first, second and third arm 28a, 28b, 28c, thus, an assembly 30 is rotated counterclockwise at the outside of female substrate 2M 180 degree, moves to the initial point (left end of Fig. 3) of the second line code region S 2 simultaneously.At this moment, dispose laser head 34, suction inlet 33, ejecting head 32 successively towards-Y direction.

If an assembly 30 moves to the initial point of the second line code region S 2, then SCARA robot 26 makes first, second and third arm 28a, 28b, 28c rotate, thereby make an assembly 30 edge-Y scanning directions.That is, identical with the scanning of the first line code region S 1, SCARA robot 26 moves an assembly 30, make the relative suction inlets 33 of ejecting head 32 in advance and suction inlet 33 relative laser heads 34 go ahead of the rest.Same later on, the order of the third line, fourth line, fifth line code zone S3, S4, S5 is pressed by SCARA robot 26, makes an assembly 30 along the Y scanning direction, arrives the terminal point EP of fifth line code zone S5 until an assembly 30.

Thereby SCARA robot 26 makes suction inlet 33 relative laser heads 34 in advance all the time in " target trajectory R " scan period that makes an assembly 30 along Z word shape.Also have, in the present embodiment, the scanning direction of an assembly 30 is defined as " scanning direction RA ".

Fig. 4 and Fig. 5 are respectively the figure of an expression assembly 30, and Fig. 6 has observed an assembly 30 and the approximate vertical view that obtains from female substrate 2M.

As shown in Figure 4, box 31 possesses the aqueous body jar 35 of accommodating aqueous body F (with reference to Fig. 5), disposes droplet jetting head 32 at the downside of box 31.Aqueous body F is supplied in ejecting head 32 from aqueous body jar 35.

As shown in Figure 5, the downside at ejecting head 32 is equipped with nozzle plate 36.Below nozzle plate 36 (nozzle forms face 36a), opening has a plurality of circular ports (nozzle N) that connect nozzle plate 36 along the normal direction of female substrate 2M (Z direction).As shown in Figure 6, arrange with the direction of the scanning direction RA quadrature of an assembly 30 on nozzle N edge, and its arrangement pitches is identical with cell width W.Also have, in the present embodiment, will be called the attached position PF of bullet with the position on the opposed female substrate 2M of each nozzle N.

As shown in Figure 5, ejecting head 32 has the chamber 37 that is communicated with aqueous body jar 35 at the upside of each nozzle N.Chamber 37 will be derived aqueous body F from aqueous body jar 35 and will be supplied in corresponding nozzle N.Upside in each chamber 37 is pasted with vibrating membrane 38.Each vibrating membrane 38 can vibrate along the vertical direction so that the volume in the corresponding chamber 37 enlarges and dwindles.Upside at vibrating membrane 38 disposes a plurality of piezoelectric element PZs corresponding respectively with nozzle N.Each piezoelectric element PZ is playing attached position PF when consistent with target ejection position P, accepts the driving signal (driving voltage COM1: with reference to Fig. 7) of regulation and shrinks on above-below direction and extension, thereby vibrating membrane 38 is vibrated.If piezoelectric element PZ shrinks and upholds, the then interface (meniscus) of the aqueous body F of Dui Ying nozzle N vibration, thus, the drop Fb of the weight corresponding with driving voltage COM1 is from corresponding nozzle N ejection.The drop Fb that is ejected is towards space (flight range FS) flight between nozzle plate 36 and female substrate 2M of-Z direction, and bullet to invest the corresponding attached position PF of bullet be target ejection position P.The drop Fb that bullet invests target ejection position P soaks into expansion at surperficial 2Ma to make its external diameter become cell width W to equate.

In the present embodiment, establish the beginning of moving and become the time of cell width W for shining stand-by time up to the external diameter of the drop Fb that is ejected from the ejection of drop Fb.2 times distance of an assembly 30 of present embodiment mobile unit width W during this stand-by time (irradiation standby distance L w).

As shown in Figure 4, suction inlet 33 is the casing shape, and towards lower opening.Suction inlet 33 links with the suction line 39 that extends in box 31.Suction line 39 extends in the inside of the 3rd arm 28c, the second arm 28b, the first arm 28a and main shaft 27, and links with the suction pump 40 (with reference to Fig. 2 and Fig. 3) that disposes on base station 21.That is, suction inlet 33 links via suction line 39 and suction pump 40.

Suction pump 40 then begins suction action if accept to suck commencing signal.Thus, the gas that is present in the space between suction inlet 33 and the female substrate 2M sucks the suction pump 40 by suction line 39 from suction inlet 33.Because the gap of ejecting head 32 and female substrate 2M is narrow, therefore the zone between ejecting head 32 and female substrate 2M is among the described flight range FS, the zone around this flight range FS relatively, and it is big that the gas flow resistance becomes.Therefore, when suction inlet 33 sucked gases, shown in the arrow of Fig. 6, about scanning direction RA and relatively suction inlet 33 was present in advance the gas of side to avoid the big zone of flow resistance is flight range FS and be inhaled into suction inlet 33.Thereby when suction pump 40 sucked gases, the gas flow of flight range FS was suppressed, thereby stable from the heading of the drop Fb of ejecting head 32 ejections.

As shown in Figure 4, in the inside of laser head 34 along a plurality of semiconductor laser LD that the orientation of nozzle N is arranged with and nozzle N is corresponding respectively as laser instrument.Each semiconductor laser LD then penetrates the laser B of the wavelength region may corresponding with the absorbing wavelength of drop Fb if accept to drive signal (driving voltage COM2: with reference to Fig. 7) towards the below along the Z direction.In the lower end of laser head 34 be semiconductor laser LD row under, corresponding with the row of the semiconductor laser LD mirror M as optical system is extended and is provided with along the orientation of described nozzle N.Mirror M is carried out total reflection to the laser B from each semiconductor laser LD, and the scanning direction RA of the mutually correct assembly 30 of laser B that makes total reflection is towards oblique below.That is, the laser B that penetrates from each semiconductor laser LD be not directed into this semiconductor laser LD under female substrate 2M on the position, but be directed into position on female substrate 2MA of a side of going ahead of the rest about the scanning direction RA of an assembly 30.

As shown in Figure 5, in the present embodiment, be irradiation position PT with the surperficial 2Ma of female substrate 2M with towards the location definition that optical axis intersected of the laser B of oblique below.Irradiation position PT and the distance that plays between the attached position PF are set at described irradiation standby distance L w.That is, if drop Fb bullet invests behind the target ejection position P through described irradiation stand-by time, then irradiation position PT arrives bullet and invests drop Fb on the target ejection position P.

Each semiconductor laser LD sprays position P when consistent in respectively corresponding irradiation position PT and target, accepts driving voltage COM2 and penetrates laser B.The laser B mirror M total reflection that is reflected, irradiation is present in the drop Fb on the corresponding irradiation position PT.Laser B makes solvent among the drop Fb or dispersant etc. as the evaporation of evaporation composition, thereby bakes metal microparticle among the drop Fb at irradiation position PT.Thus, form the some D that has with the cell width W equal outer diameters of data cell C at target ejection position P.

As shown in Figure 6, observe from the normal direction of female substrate 2M, described evaporation composition Ev be present in irradiation position PT between nozzle N and the mirror M near swim.The evaporation composition Ev that swims is positioned at the rear side of scanning direction RA by relative nozzle N suction inlet 33 sucks towards the rightabout of scanning direction RA.That is, evaporation composition Ev quilt sucks towards the rightabout of the moving direction of nozzle N, thereby leaves from nozzle N.Suction inlet 33 relative mirror M are positioned at the side in advance of scanning direction RA.Thereby the evaporation composition Ev that swims is inhaled into mouthful 33 suctions in the place ahead of the moving direction of mirror M (laser head 34), thereby mirror M is not exposed among the evaporation composition Ev.

Thereby, can avoid evaporating composition Ev and be attached on nozzle N and the mirror M.Therefore, the ejection of the drop Fb that ejecting head 32 carries out action is stable, and it is stable to be used to launch the optical characteristics of optical system of laser B, thereby laser B suitably can be shone position in hope with the intensity of hope.

Then, the electric structure of the droplet ejection apparatus 20 that explanation as above constitutes with reference to Fig. 7.

As shown in Figure 7, droplet ejection apparatus 20 possesses control device 51, and this control device 51 has CPU, ROM and RAM.Control device 51 drives running gear 23, conveying device 24 and SCARA robot 26 according to the current position and the various control program of the front end (ejecting head 32) of the 3rd arm 28c, and drives ejecting head 32 and laser head 34.

On control device 51, be connected with the input unit 52 of console switch such as having firing switch and shutdown switch, import as set paint data Ia by this input unit 52 about the information of cognizance code 10.Control device 51 is handled from the paint data Ia of input unit 52 and is generated data bitmap BMD, and generates the position coordinates (teaching coordinate Tp) of each target ejection position P based on data bitmap BMD.(teaching coordinate Tp) is corresponding with orthogonal coordinate system for this position coordinates.And then 51 couples of paint data Ia of control device implement the processing different with data bitmap BMD, thereby generate the driving voltage COM1 of relative piezoelectric element PZ and the driving voltage COM2 of phase noise spectra of semiconductor lasers LD.

Control device 51 possesses storage part 51A, stores the such data of data bitmap BMD or be used to make the program of cognizance code 10 in this storage part 51A.

Data bitmap BMD is each zone that (the surperficial 2Ma of female substrate 2M) forms on the drawing plane of cutting apart orthogonal coordinate system by imagination, and whether expression sprays the data of drop Fb respectively.That is, data bitmap BMD is used for limiting the data that whether drive each piezoelectric element PZ according to its every value (0 or 1).That is, data bitmap BMD is when ejecting head 32 is scanned on each line code region S 1～S5, whether is used to limit the data from each nozzle N ejection drop Fb.

Control device 51 with data bitmap BMD as with the regulation the synchronous ejection control signal SI of clock signal, serial transfer is in ejecting head drive circuit 56 successively.

Control device 51 possesses the 51B of interpolation operation portion, the 51B of this interpolation operation portion is to the space between the adjacent teaching coordinate Tp, implementing interpolation with the interpolation cycle of regulation (for example handles, linear interpolation or circular interpolation etc.), computing constitutes the position coordinates (interpolation coordinate) of a plurality of interpolated points of target trajectory R.The 51B of interpolation operation portion computing comprises the information (trace information TaI) of teaching coordinate Tp and interpolation coordinate, and this trace information TaI is outputed to the 51C of inverse operation portion.

The 51C of inverse operation portion is based on the trace information TaI from the 51B of interpolation operation portion output, and the anglec of rotation of each motor M1, M2 of computing, M3 etc. makes that the front position of the 3rd arm 28c is consistent with teaching coordinate Tp and interpolation coordinate successively successively.That is, the 51C of inverse operation portion successively computing can be implemented in the information (arm rotation information θ I) of the posture of an assembly 30 SCARA robot 26 that suction inlet 33 relative laser heads 34 are gone ahead of the rest such when target trajectory R moves on the RA of scanning direction.The 51C of the inverse operation portion arm rotation information θ I of computing outputs to SCARA robot drive circuit 55.

On control device 51, be connected with running gear drive circuit 53.Running gear drive circuit 53 is connected with walking motor rotation detector MSE with walking motor MS.Running gear drive circuit 53 is replied and is made walking motor MS forward or reverse from the control signal of control device 51, and based on moving direction and amount of movement from the detection signal computing conveying device 24 of walking motor rotation detector MSE.

On control device 51, be connected with SCARA robot drive circuit 55.SCARA robot drive circuit 55 is connected with the first motor M1, the second motor M2 and three-motor M3, and responds to from the arm rotation information θ I of control device 51 and make first, second and third motor M1, M2, M3 forward or reverse.In addition, SCARA robot drive circuit 55 is connected with the first motor rotation detector M1E, the second motor rotation detector M2E and three-motor rotation detector M3E, and based on moving direction and amount of movement from the front end (ejecting head 32) of detection signal computing the 3rd arm 28c of first, second and third motor rotation detector M1E, M2E, M3E.

Control device 51 makes an assembly 30 be Z word shape along target trajectory R via SCARA robot drive circuit 55 and moves.Control device 51 is exported various control signals based on the operation result (current position of ejecting head 32) from SCARA robot drive circuit 55.

If describe in detail, then control device 51 is the timing that ejecting head 32 is positioned at initial point SP in the timing of the scanning of a beginning assembly 30, generates the signal (commencing signal TP1) that is used to drive suction pump 40, outputs to suction pump drive circuit 58.

In addition, control device 51 is positioned at the timing of each code region S on female substrate 2M (target ejection position P) at ejecting head 32 (playing attached position PF), generates the signal (ejection timing signal LP) that is used to spray drop Fb, outputs to ejecting head drive circuit 56.

And then control device 51 is the timing that ejecting head 32 is positioned at terminal point EP in the timing of the scanning that finishes an assembly 30, generates the signal (end signal TP2) that is used to stop suction pump 40, outputs to suction pump drive circuit 58.

On control circuit 51, be connected with ejecting head drive circuit 56.Control device 51 will spray timing signal LP and output to ejecting head drive circuit 56, and driving voltage COM1 and ejection timing signal LP are synchronously outputed to ejecting head drive circuit 56.And then control circuit 51 will spray control signal SI serial transfer to ejecting head drive circuit 56.The conversion of ejecting head drive circuit 56 serial makes it corresponding with a plurality of piezoelectric element PZ from the ejection control signal SI of control device 51.

In addition, ejecting head drive circuit 56 is if accept ejection timing signal LP from control device 51, and then the piezoelectric element PZ to selecting based on the ejection control signal SI that has been changed by serial supplies with driving voltage COM1 respectively.And then ejecting head drive circuit 56 is if acceptance from the ejection timing signal LP of control device 51, then outputs to laser head drive circuit 57 with the ejection control signal SI that changed by serial.

On control device 51, be connected with laser head drive circuit 57.Control device 51 synchronously outputs to laser head drive circuit 57 with driving voltage COM2 and ejection timing signal LP.Laser head drive circuit 57 is if accept ejection control signal SI from ejecting head drive circuit 56, then in standby after the stipulated time is described irradiation stand-by time, supply with driving voltage COM2 respectively to the semiconductor laser LD corresponding with ejection control signal SI.

If laser head drive circuit 57 is accepted ejection control signal SI, then control device 51 makes laser head drive circuit 57 standbies irradiation stand-by time, and an assembly 30 is scanned during the irradiation stand-by time.And if through the irradiation stand-by time, irradiation position PT is consistent with the attached position P of corresponding target bullet, and then control device 51 is controlled laser head drive circuits 57, from the drop Fb ejaculation laser B of the attached position P of laser head 34 head for target bullets.

On control device 51, be connected with suction pump drive circuit 58.The control signal (described commencing signal TP1 and end signal TP2) that control device 51 output and suction pump drive circuit 58 are corresponding.Suction pump drive circuit 58 is connected with suction pump 40.Suction pump drive circuit 58 is replied and is made suction pump 40 begin to suck from the commencing signal TP1 of control device 51, and replys from the end signal TP2 of control device 51 and make suction pump 40 stop to suck.Control device 51 drives suction pump 40 and makes suction inlet 33 proceed to suck during making that an assembly 30 moves along target trajectory R.

Then, the order of using droplet ejection apparatus 20 to form cognizance code 10 is described.

At first, input device 52 is with paint data Ia input control device 51.So control device 51 drives running gears 23 and conveying device 24 is exported female substrate 2M from substrate stocker 22, and should mother's substrate 2M mounting in mounting table 25R (or mounting table 25L).In addition, the paint data Ia that control device 51 is handled from input unit 52 generates data bitmap BMD and teaching coordinate Tp.Control device 51 is stored in these data bitmaps BMD and teaching coordinate Tp among the storage part 51A.

Then, control device 51 control SCARA robot drive circuits 55 make the front position of the 3rd arm 28c move to initial point SP.During this period, the 51B of interpolation operation portion is a starting point with the initial point SP of the first line code region S 1, successively the interpolation coordinate of computing to carrying out interpolation between each teaching coordinate Tp and its follow-up teaching coordinate Tp.Control device 51 will output to the 51C of inverse operation portion by the trace information TaI that interpolation coordinate and teaching coordinate Tp constitute.The 51C of inverse operation portion generates corresponding with interpolation coordinate and teaching coordinate Tp respectively arm rotation information θ I successively.

If the front end (ejecting head 32) of the 3rd arm 28c is disposed at initial point SP, then control device 51 outputs to suction pump drive circuit 58 with commencing signal TP1, utilizes suction pump 40 to begin to suck from suction inlet 33.

In addition, if ejecting head 32 is disposed at initial point SP, then control device 51 outputs to SCARA robot drive circuit 55 via the 51C of inverse operation portion successively with described arm rotation information θ I, makes an assembly 30 begin scanning.At this moment, control device 51 is kept suction inlet 33 at the state that is disposed on the RA of scanning direction between laser head 34 and the droplet jetting head 32, makes an assembly 30 begin scanning from initial point SP along target trajectory R simultaneously.

Control device 51 is judged to play the target ejection position P whether attached position PF has arrived the beginning of the first line code region S 1 based on the operation result that obtains from SCARA robot drive circuit 55.The data cell C of the row amount code region S, that be positioned at the rightmost side that is arranged in the rightmost side in the target ejection position P of beginning and the first line code region S 1 of Fig. 3 is corresponding.In addition, 51 pairs of ejecting head drive circuits of control device, 56 output ejection control signal SI and driving voltage COM1, and to laser head drive circuit 57 outputting drive voltage COM2.

If play the target ejection position P that attached position PF arrives the beginning of the first line code region S 1, then 56 outputs of 51 pairs of ejecting head drive circuits of control device spray timing signal LP, and the piezoelectric element PZ that selects based on ejection control signal SI is supplied with driving voltage COM1 respectively.The nozzle N that selects based on ejection control signal SI accepts driving voltage COM1 respectively, sprays drop Fb simultaneously.Each the drop Fb that is ejected flies in flight range FS, and bullet invests the surperficial 2Ma of female substrate 2M.

At this moment, because the gas flow in the flight range FS is suppressed, therefore each the drop Fb that is ejected is not causing that bullet invests corresponding target ejection position P under the crooked situation of flight.The drop Fb that invests on the target ejection position P of bullet soaks into expansion in the data cell C of correspondence, makes to become the equal outer diameters with cell width W from beginning of moving of ejection after shining stand-by time.

The ejection control signal SI that control device 51 will have been changed by serial via ejecting head drive circuit 56 outputs to laser head drive circuit 57.Then, shine stand-by time if be accompanied by from the process that begins of ejection action, irradiation position PT becomes consistent with target ejection position P, and then 51 couples of semiconductor laser LD that select based on ejection control signal SI of control device supply with driving voltage COM2 respectively.Selecteed semiconductor laser LD accepts driving voltage COM2 respectively, penetrates laser B simultaneously.By the laser B that the penetrated mirror M total reflection that is reflected, be that target ejection position P has the drop Fb with cell width W equal outer diameters thereby be radiated at corresponding irradiation position PT.Therefore the drop Fb of illuminated laser B is fixed on the surperficial 2Ma as having with the some D of cell width W equal outer diameters owing to solvent among this drop Fb or dispersant etc. are baked as the metal microparticle that evaporation composition Ev evaporates Fb in (drying) and this drop.Thus, form the some D that mates with cell width W.

At this moment, near swim irradiation position PT evaporation composition Ev is positioned at the rear side of scanning direction RA and mirror M and the suction inlet 33 that is positioned at the side in advance of scanning direction RA sucks relatively by nozzle N relatively.Therefore, do not arrive near the evaporation composition Ev that swims the irradiation position PT under the situation of nozzle N (ejecting head 32) and mirror M (laser head 34), between these nozzles N (ejecting head 32) and mirror M (laser head 34), be removed.

After, identical with described situation, control device 51 make suction inlet 33 on the RA of scanning direction under the state between laser head 34 and the droplet jetting head 32, an assembly 30 is moved along target trajectory R.And control device 51 from selecteed nozzle N ejection drop Fb, and becomes the timing that equates with cell width W at the external diameter that plays attached drop Fb, to this drop Fb irradiating laser B when respectively playing attached position PF at every turn and arrive target ejection position P.Thus, avoid nozzle N (ejecting head 32) and mirror M (laser head 34) to be evaporated composition Ev and pollute, each the code region S formation point D on female substrate 2M makes it have the Wiring pattern of regulation simultaneously.

The EP if the formation end of some D on female substrate 2M, an assembly 30 are reached home, then control device 51 will suck end signal TP2 and output to suction pump drive circuit 58, make to utilize suction pump 40 to stop from the suction that suction inlet 33 carries out.If the suction of carrying out from suction inlet 33 stops, then control device 51 control running gear 23 and conveying devices 24 have formation in female substrate 2M input substrate stocker 22 of a D, thereby finish the formation action of cognizance code 10 on female substrate 2M.

The advantage of present embodiment then, is described.

(1) laser head 34 (mirror M) disposes the suction inlet 33 that sucks evaporation composition Ev in the side in advance of scanning direction RA relatively.Thereby laser head 34 (mirror M) sucks the evaporation composition Ev that the irradiation because of laser B produces from drop Fb in the in advance side of scanning direction RA relatively.Consequently, can avoid evaporating composition Ev and be attached on the laser head 34 (mirror M), can avoid evaporating composition Ev and pollute mirror M, thereby make the optical characteristics of mirror M stable.This makes the controlled raising of shape of the some D that is made of drop Fb.

(2) between laser head 34 (mirror M) and irradiation position PT, disposed suction inlet 33.Thereby, compare in the situation of the configuration of the side in advance suction inlet 33 of scanning direction RA with relative exposure position PT, the evaporation composition Ev towards mirror M can be sucked before the arrival mirror M reliably.Consequently, can make the optical characteristics of mirror M more stable.

(3) with ejecting head 32 opposed set positions the irradiation position PT of laser B is being arranged, and between ejecting head 32 and laser head 34, disposing suction inlet 33.Thereby, can suck evaporation composition Ev reliably from suction inlet 33 towards ejecting head 32 (nozzle N), pollute ejecting head 32 (nozzle N) thereby avoid evaporating composition Ev.Consequently, can realize the stability of drop ejection action.

(4) utilize flight range FS to increase the gas flow resistance towards suction inlet 33 from female substrate 2M.Thereby, when sucking evaporation composition Ev from suction inlet 33, can suppress the gas flow among the flight range FS, thereby can make from the heading of the drop Fb of ejecting head 32 ejections stable.

(5) assembly 30 is on the RA of scanning direction when mobile right overhead, and the drop Fb that is shone by laser B is mutually opposed with suction inlet 33 relative postpones and laser head 34.Thereby, the drop Fb that is shone by laser B this drop Fb be positioned at laser head 34 under before, be positioned at reliably suction inlet 33 under.Consequently, Ev is preceding at arrival laser head 34 (mirror M) for the evaporation composition, is removed reliably by the suction of suction inlet 33.Thereby, can under the situation of the optical characteristics change that does not make mirror M, suction inlet 33 and laser head 34 be moved on female substrate 2M.Therefore, can improve the productivity ratio of cognizance code 10.

(6) assembly 30 is on the RA of scanning direction when mobile right overhead, and the suction inlet 33 that is positioned at the rear side of ejecting head 32 from the evaporation composition Ev of the drop Fb that is shone by laser B sucks.Thereby, be inhaled into towards the rightabout of the moving direction of nozzle N from the evaporation composition Ev of drop Fb.Therefore, evaporation composition Ev is left quickly from nozzle N, can further avoid evaporating composition Ev reliably and pollute nozzle N, thereby can realize the stabilisation that the drop ejection is moved.

Described embodiment also can followingly change.

In said embodiment, ejecting head 32, suction inlet 33 and laser head 34 move relative to female substrate 2M, but be not limited thereto, for example, also can constitute: fixedly ejecting head 32, suction inlet 33 and laser head 34, female substrate 2M (particularly, mounting table 25L, the 25R of the female substrate 2M of mounting) is moved relative to them.

In addition, ejecting head 32, suction inlet 33 and laser head 34 do not need to constitute as a stature assembly 30, can constitute independently of each other yet.In a word, if constitute ejecting head 32, suction inlet 33 and laser head 34 separately and produce between female substrate 2M and relatively move.

In said embodiment, suction inlet 33 is disposed between laser head 34 and the irradiation position PT.But be not limited thereto, for example, suction inlet 33 also can be disposed at irradiation position PT directly over.

In said embodiment, mobile device (travel mechanism) is embodied as SCARA robot 26.But be not limited thereto, for example, mobile device also can be embodied as the mounting table that female substrate 2M of making mounting moves relative to laser head 34, or also can be embodied as carrier that the laser head 34 that makes lift-launch moves relative to female substrate 2M etc.That is, mobile device is so long as get final product producing the device that relatively moves between suction inlet 33 and the female substrate 2M or between laser head 34 and the female substrate 2M.

In said embodiment, dry and baked drop Fb by laser B.But be not limited thereto, for example, also can drop Fb flowed on the direction of hope, thereby or also can be only drop Fb is fixed the outer rim irradiating laser B of drop Fb.That is, need only the mark that constitutes by drop Fb by laser B formation.

In said embodiment, a some D is hemispherical, but is not limited thereto, and for example, also can form the point of elliptical shape or the mark of wire.

In said embodiment, formed the some D that constitutes cognizance code 10 by the drop Fb that is ejected.But be not limited thereto, for example, also can form and possess the set various films of the field effect type device various display unit such as (FED or SED etc.) that make the luminous plane electron-emitting device of liquid crystal indicator 1 or fluorescent material, metal wiring, filter etc.That is, droplet ejection apparatus is so long as can get final product by the device that plays attached drop Fb formation mark.

In said embodiment, the object that needs is sprayed drop is embodied as female substrate 2M.But be not limited thereto, for example also object can be embodied as silicon substrate or flexible substrate or metal substrate.That is, need the object of ejection drop so long as get final product by the object that plays attached drop Fb formation mark.

Claims (8)

1. droplet ejection apparatus is characterized in that possessing:

Droplet jetting head, it sprays drop to object;

Laser irradiation device, its to the area illumination laser of the opposed described object of described droplet jetting head;

Suction apparatus, its be located at described laser irradiation device and the described object that shone by described laser on irradiation position between, and suck the evaporation composition that drop that bullet invests described object produces through the laser irradiation and from the described drop of described laser irradiation.

2. droplet ejection apparatus as claimed in claim 1, it is characterized in that, also possesses mobile device, described mobile device makes in described object and the described laser irradiation device at least one move relative to another, so that bullet invests described droplet configuration on the described object on described irradiation position, and in described object and the described suction apparatus at least one moved relative to another so that described droplet configuration that described irradiation position is shone by described laser in the opposed position of described suction apparatus on.

3. droplet ejection apparatus as claimed in claim 2 is characterized in that, described mobile device is implemented to relatively move, so that the described drop that is shone by described laser is mutually opposed in relative postpone with described suction apparatus and described laser irradiation device.

4. droplet ejection apparatus as claimed in claim 2 is characterized in that, described mobile device is any articulated robot that moves on described object at least that makes in described suction apparatus, described laser irradiation device and the described droplet jetting head.

5. droplet ejection apparatus as claimed in claim 1, it is characterized in that, also possess an assembly that is equipped with described droplet jetting head, described suction apparatus and described laser irradiation device, described suction apparatus is disposed between described droplet jetting head and the described laser irradiation device.

6. droplet ejection apparatus as claimed in claim 5, it is characterized in that, also possess mobile device, described mobile device moves described assembly on described object, make the described relatively suction apparatus of described droplet jetting head in advance and the described relatively laser irradiation device of described suction apparatus in advance.

7. as each the described droplet ejection apparatus in the claim 1～6, it is characterized in that described laser irradiation device comprises: the laser instrument that penetrates described laser; Make the described laser deflection that penetrates from described laser instrument and towards the optical system of described irradiation position.

8. as each the described droplet ejection apparatus in the claim 1～6, it is characterized in that the gas flow resistance of the gas flow resistance ratios in the zone between described droplet jetting head and the described object around should the zone is big.

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