CN100529946C - Automatic focusing method and application thereof - Google Patents
Automatic focusing method and application thereof Download PDFInfo
- Publication number
- CN100529946C CN100529946C CNB2005101090044A CN200510109004A CN100529946C CN 100529946 C CN100529946 C CN 100529946C CN B2005101090044 A CNB2005101090044 A CN B2005101090044A CN 200510109004 A CN200510109004 A CN 200510109004A CN 100529946 C CN100529946 C CN 100529946C
- Authority
- CN
- China
- Prior art keywords
- focusing
- search
- maximum value
- stride
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 45
- 230000006870 function Effects 0.000 claims description 47
- 230000003287 optical effect Effects 0.000 claims description 24
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 240000007594 Oryza sativa Species 0.000 claims 1
- 235000007164 Oryza sativa Nutrition 0.000 claims 1
- 235000009566 rice Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 230000000630 rising effect Effects 0.000 description 7
- 230000002452 interceptive effect Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Images
Landscapes
- Eye Examination Apparatus (AREA)
Abstract
The invention relates to an automatic focusing method and application thereof, and mainly provides an image capturing device which carries out focusing in three stages of coarse searching, wave packet area searching and fine searching of an optimal focusing position of different focusing positions based on a multi-stage searching rule and a focusing function. The method comprises the steps of taking the integral multiple of half of the wavelength of an incident beam of an image acquisition device as a search step, searching the maximum value of a focusing function in a wave packet area, and defining the focusing position corresponding to the maximum value of the focusing function as the optimal focusing position so as to quickly and effectively obtain the optimal focusing position.
Description
Technical field
The present invention relates to a kind of automatic focusing method and application thereof, the focusing determination methods of an image capture unit particularly is provided, in order to reach the focusing operation of image capture unit at the determinand image capture.
Background technology
Employed automatic focusing method in the existing image acquisition system when image capture is provided, is regulated the optical lens group focusing from required control, in order to obtain clear and correct image information.Usually in this class technology, with the passive type image system, its focusing function curve is one along the unimodal curve of optical lens group to the position change of focal axis, makes that the maximum value of this function promptly is the defined best focusing position of system.Yet for the focusing function curve of interference system, its focusing function is the signal that a unimodal curve and the stack of interference wave bag curve are constituted.Because the focusing of interference system is related to the quality of interference illustration quality, the accuracy of remote effect measuring system, therefore interference system must be adjusted to focusing position with optical system earlier before measuring, known to aforementioned, the focusing function curve of interference system is not to be simple unimodal curve maximum value, but has fluctuations as the ripple bag, time-consuming with the action of manually focusing with spacious day, with correctness, rely on human eye to qualitatively judge, best focusing position usually is difficult to define, and with repeatability, the best focusing position of artificial judgment is difficult to consistent result, Autofocus Technology and artificial focusing are done one relatively, Autofocus Technology is obviously saved the plenty of time, and increases the accuracy and the stability of best focusing position, and real be that interference system indispensable one encircles on commercial Application.
In the existing interference system focusing method automatically, part moves the object lens search for using with the conversion friction speed, searches back and forth near the Bo Bao district, and behind the decision efferent echo Bao Qu border, setting maximum of intensity is best focusing.Usually there are some shortcomings in it, has entered Bo Bao district even comprise location searching, but still need search back and forth drawing up the border in Bo Bao district, thus quite time-consuming on automatically to the interchange journey, and can only near the Bo Bao district, search, thereby only suitable little search area.Moreover, this class technology is to set the threshold of intensity threshold values as best focusing position, but the intensity threshold values can change because of the difference of testee surface nature, or interference objective is because the aberration cause, cause intensity maximum also non-coincidence with the zero optical path difference position, then this algorithm can't find best focusing.
In addition, the part prior art is still needed and is used other hardware auxiliary to reach automatic focusing purpose, so interference system must have more hardware configuration.Or it must have the action of just can focusing of complete ripple bag area information, is not suitable for the scope of exposing thoroughly so flow process is time-consuming and focuses automatically.
Therefore, the present inventor is because the disappearance of existing automatic focusing method is desirable to provide an automatic focusing method and an application thereof, and provides interference system a kind of quick, simple and easy and automatic focusing method that correctness is good with this.
Summary of the invention
Fundamental purpose of the present invention provides an automatic focusing method, it can be used in the automatic focusing method of a kind of quick, the simple and easy and high correctness of interference system, the influence that the function curve of not focused in the focus process rises and falls, can accurately ask for best focusing position, effectively shorten interference system and measuring the required time of preposition action, also reduce the artificial possibility of judging the focusing position mistake.
Another object of the present invention provides an automatic focusing method, can utilize white light interference technique to carry out three-dimensional measurement, need the complete Bo Bao region that scans, taking into account under the prerequisite that measures efficient, correct best focusing with effectively scan scope, unnecessary noise is minimized, make the scope of scanning contain whole Bo Bao district really, it will be more efficient measuring, and sweep limit is the center with best focusing simultaneously, can make error minimizing and metric data more representative.
Based on the aforesaid projects of the present invention, the invention provides a kind of automatic focusing method and application thereof, the present invention can be applicable to an interference system, this interference system is for a fechtable image and the image optical system of interfering the signal light source is provided, it comprises light supply apparatus, objective lens, spectroscope, image capture unit and logical calculus control module, this light supply apparatus provides an incident beam to reflex to this objective lens through spectroscope, this objective lens comprises interference objective, this objective lens has the focus adjustment function, make incident beam arrive at object to be measured and reflect to form and carry the folded light beam of interfering signal, folded light beam penetrated spectroscope through after this objective lens, and was captured by image capture unit.This logical calculus control module is by control device and memory means, the focusing of regulating this objective lens from and note down the optical information that this image capture unit captures.The present invention's focusing method automatically is the logical calculus means that had by this logical calculus control module, in order to calculate the optical information that image capture unit captured, and obtain best focusing from, and the key step of this method comprises that the thin search three phases of thick search, ripple bag local range search and the best focusing position of focusing position focuses.Wherein, each search stage searches stride with difference respectively and carries out the focusing position search, and mainly with the wavelength of light supply apparatus as the basis of design of searching stride.
For making those skilled in the art understand purpose of the present invention, feature and effect, now by following specific embodiment, and conjunction with figs., to the present invention illustrate in detail as after.
Description of drawings
Fig. 1 represents focus the automatically flow chart of steps of method of the present invention;
Fig. 2 represents focus the automatically component liaison figure of the applied interference system of method of the present invention;
Focusing function-focusing position that Fig. 3 represents the present invention to focus automatically method captured concerns synoptic diagram;
Fig. 4 represents that focusing function single order differential-focusing position of Fig. 3 of the present invention concerns synoptic diagram;
The optical information synoptic diagram that Fig. 5 represents the present invention to focus automatically method captured;
Fig. 6 represents focus the automatically flow chart of steps that the ripple packet interval is searched of carrying out of method of the present invention;
Fig. 7 represents focus the automatically flow chart of steps that the ripple packet interval is searched of carrying out of method of the present invention;
Fig. 8 represents focus the automatically distribution schematic diagram of ripple packet interval focusing function on focusing position of method of the present invention.
Embodiment
Fig. 1 represents focus the automatically flow chart of steps of method of the present invention; Fig. 2 represents focus the automatically component liaison figure of the applied interference system of method of the present invention; The optical information synoptic diagram that Fig. 3 represents the present invention to focus automatically method captured.With reference to figure 1 and shown in Figure 2, the present invention is the method that image optical system institute pick-up image is focused automatically, with preferred embodiment shown in Figure 2, this image optical system comprises light supply apparatus 1, objective lens 2, spectroscope 3, image capture unit 4 and logical calculus control module 5, this light supply apparatus 1 provides an incident beam 11 to reflex to this objective lens 2 through spectroscope 3, make incident beam 11 arrive at object 6 to be measured and reflect to form and carry the folded light beam 41 of interfering signal, folded light beam 41 is crossed spectroscope 3 through these objective lens 2 back break-through, and is captured by image capture unit 4.Wherein, incident beam 11 light source signals that produced of this light supply apparatus 1 can be white light source; This objective lens 2 includes the focus adjustment means of interference objective and objective lens; And this logical calculus control module 5 has logical calculus means, memory means and control device and can be reached by electronic circuit or computer system.Therefore, this logical calculus control module 5 can pass through its control device and memory means, the focusing of regulating this objective lens 2 from and note down the optical information that this image capture unit 4 is captured, make the present invention's method of focusing logical calculus means that can be had by this logical calculus control module 5 automatically, calculate the optical information that image capture unit 4 is captured, and obtain best focusing from.The key step of its method comprises: step 101, for this logical calculus control module 5 uses control device, control this objective lens 2 with regulate focusing from, and control the optical information of this image capture unit 4 acquisitions object 6 to be measured and be converted to the focusing function, this focusing function comprise optical information and focusing from relation; Step 102, for this logical calculus control module 5 uses the logical calculus means, select the focusing functional value of specific focusing position in big stride mode, to carry out between the focal area 7 thick search, in order to apace best focusing is positioned in the interval, 7 for this focusing function comprises the zone of focal length position, as shown in Figure 3 between this focal area; Step 103 for this logical calculus control module 5 uses the logical calculus means, is carried out ripple bag local range search, and this ripple packet interval 8 comprises the zone of interfering image ripple bag for this focusing function, as shown in Figure 3; And step 104, for this logical calculus control module 5 uses the logical calculus means,, carry out the thin search of best focusing position to search the mode of focusing function maximum value.
In the abovementioned steps, select the focusing functional value of specific focusing position at Search Area in big stride mode, because this step is carried out the logical calculus means for this logical calculus control module 5 is provided with less sampling spot, its corresponding focusing functional value distribution relation figure on focusing position that obtains as shown in Figure 4.Then, with the focusing distribution relation of functional value on focusing position by the single order differential, the then demonstration of corresponding diagram 4, can obtain shown in Figure 5, and wherein the maximal value behind the differential be focusing that this step determines from rough position.
Fig. 6 represents focus the automatically flow chart of steps that the ripple packet interval is searched of carrying out of method of the present invention.With reference to shown in Figure 6, comprising: step 201, for setting a threshold values (threshold), this threshold values is obtained the empirical value or the experiment value of the focusing function threshold values that enters the ripple packet interval in advance at employed image optical system with experiment method in the laboratory; Step 202, for this logical calculus control module 5 is that the first search stride is searched by the logical calculus means with the search stride less than ripple packet interval width, in instructions of the present invention, provide an embodiment with 0.5 times of ripple packet interval width as searching stride, capture focusing functional value S1, S2, S3, S4 and the S5 of focusing position P1, P2, P3, P4 and 5 positions of P5 simultaneously; Step 203 is the mean value of this logical calculus control module 5 by logical calculus means calculating focusing functional value S1, S2 and S3; Step 204, calculate by the logical calculus means for this logical calculus control module 5 difference of focusing functional value S1 and S2 and S2 and S3 difference on average as a base value, the calculating formula of this base value is expressed as [(S2-S1)+(S3-S2)]/2; Step 205 for this logical calculus control module 5 calculates by the logical calculus means, adds S5 with S4 and deducts the mean value of first three some focusing functional value of twice, again the result is obtained a summit reference value divided by aforementioned base value; Step 206, for this logical calculus control module 5 judges that by the logical calculus means whether this summit reference value is greater than threshold values, if the summit reference value is greater than threshold values, the focusing functional value of then judging P4 and P5 position has entered the ripple packet interval, and near the preferable focusing position in this position, otherwise enter step 207; And step 207, for this logical calculus control module 5 obtains new P1, P2, P3, P4 and 5 positions of P5 by the logical calculus means position that aforementioned 5 focusing functions are selected along 0.5 times of ripple packet interval width of focal adjustment direction reach, and new focusing functional value S1, S2, S3, S4 and the S5 of corresponding acquisition, and get back to step 203 and calculate again.
Fig. 7 represents focus the automatically flow chart of steps that the ripple packet interval is searched of carrying out of method of the present invention; Fig. 8 represents focus the automatically distribution schematic diagram of ripple packet interval focusing function on focusing position of method of the present invention.With reference to shown in Figure 7, in the abovementioned steps, after the step of finishing the search of ripple packet interval, carry out the thin search step of best focusing position, comprise: step 301, search stride for setting greater than the wavelength of incident beam as one second, this wavelength is at the mean wavelength of the light source that light supply apparatus provided of image optical system, and this wavelength can be obtained with experiment method in the laboratory in advance; Step 302, for being respectively the respective value S1 ' that rising of search makes position P1 ' and focusing function with P4 and S4 that abovementioned steps was obtained, and search on the focusing direction, the focus search of functional value of stride with second, be S2 ' and obtain focusing position at P2 ' and corresponding focusing functional value; Step 303 is for whether this logical calculus control module 5 compares S1 ' less than S2 ' by the logical calculus means, if S1 ' less than S2 ', then enters step 304, otherwise enters step 305; Step 304, for 1/2nd of the wavelength of setting incident beam is searched stride as one the 3rd, with reference to shown in Figure 8, set P1 ' and the S1 ' that abovementioned steps obtained and be respectively the respective value Smax that rising of search makes position Pmax and focusing function, be the center with Pmax the forward direction of focusing axis of orientation with oppositely on the 3rd search stride search respectively several location points with and pairing focusing functional value; Step 305, for being searched stride along second of one times of focal adjustment direction reach, the selected position of aforementioned 2 focusing functions obtains new P1 ' and P2 ' position, and new focusing functional value S1 ' and the S2 ' of corresponding acquisition, and get back to step 303 and calculate again; Step 306, in the result who selects to search with the 3rd search stride, focusing functional value the maximum is new Smax, its pairing position is that new rising makes position Pmax; Step 307, in the result who selects to search with the 3rd search stride, focusing functional value the maximum is new Smax, its correspondence position is that new rising makes position Pmax; Step 308, for selecting with the stride less than the 3rd search stride is the 4th search stride, and select with work that to make position Pmax be the center the forward direction of focusing axis of orientation with oppositely on search respectively several location points with and pairing focusing functional value, and among the result who selects to search, focusing functional value the maximum is new Smax, and its correspondence position is that new rising makes position Pmax; Step 309, for selecting with the stride less than the 4th search stride is the 5th search stride, and select with work that to make position Pmax be the center the forward direction of focusing axis of orientation with oppositely on search respectively several location points with and pairing focusing functional value, and among the result who selects to search, focusing functional value the maximum is new Smax, its correspondence position is that new rising makes position Pmax, and this new rising makes position Pmax promptly can be used as best focusing position point.
In the abovementioned steps,, make that space distribution cycle of ripple bag is half of optical source wavelength because the ripple bag cycle in the ripple bag zone of institute's pick-up image information is an optical interference information.Therefore, when searching stride as second greater than the wavelength of incident beam, second search step size system with the wavelength of incident beam as foundation, but have under the excessive stride with respect to wavelength, it is searched does not have meaning.Moreover, again because the focusing function medium wave bag zone of institute's pick-up image information is subjected to the superposition of unimodal curve part, make that the ripple bag focusing functional value of approaching more best focusing position can big more (with same periodic phase), when so employed each search stride of abovementioned steps is the integral multiple of 1/2nd optical source wavelengths respectively, mainly tie up under such search stride, once search to ripple bag when zone, can search the same phase place place of the ripple bag of each periodic distribution, can judge approaching more best focusing position by the increase of focusing functional value.
In the abovementioned steps, step 308 can be searched with millimetre-sized search stride, and step 309 can be searched with nano level search stride, and by constantly reducing to search stride, and reach more accurate best focusing position point search result.
Though the present invention discloses as above with specific embodiment, right its disclosed specific embodiment is not in order to qualification the present invention, any those skilled in the art, without departing from the spirit and scope of the present invention, when doing various changes and retouching, its change of doing all belongs to category of the present invention with retouching.
Claims (7)
1. an automatic focusing method comprises the following steps:
One image optical system is provided, comprise light supply apparatus, objective lens, image capture unit and logical calculus control module, this objective lens comprises interference objective, this objective lens has the focus adjustment function, this logical calculus control module is by control device and memory means, provide the focusing of regulating this objective lens from and note down the optical information that this image capture unit captures, and this logical calculus control module provides and calculates the optical information that image capture unit captured by the logical calculus means;
The focusing of regulating this objective lens from, and control this image capture unit and capture the optical information of object to be measured and be converted to the focusing function;
Select the focusing functional value of specific focusing position in big stride mode, to carry out the thick search between the focal area;
Carry out ripple bag local range search;
And
Carry out the thin search of best focusing position;
Wherein, the thin search step of best focusing position further comprises:
Set the integral multiple of the wavelength 1/2nd of incident beam and search stride as first, in the maximum value of ripple bag local range search focusing function, and the pairing focusing position of definition focusing function maximum value is best focusing position.
2. automatic focusing method as claimed in claim 1, wherein the thin search step of best focusing position further comprises:
Setting is searched stride greater than the wavelength of incident beam as second, and in the maximum value of ripple bag local range search focusing function, and the pairing focusing position of definition focusing function maximum value is second reference position;
And
Set the wavelength 1/2nd of incident beam and search stride as the 3rd, with second reference position is the center, in the ripple bag zone of several 1/2nd wavelength, search the maximum value of focusing function, and the pairing focusing position of definition focusing function maximum value is best focusing position.
3. automatic focusing method as claimed in claim 1, wherein the thin search step of best focusing position further comprises:
Setting is searched stride greater than the wavelength of incident beam as second, and in the maximum value of ripple bag local range search focusing function, and the pairing focusing position of definition focusing function maximum value is second reference position;
Set the wavelength 1/2nd of incident beam and search stride as the 3rd, with second reference position is the center, in the ripple bag zone of several 1/2nd wavelength, search the maximum value of focusing function, and the pairing focusing position of definition focusing function maximum value is the 3rd reference position;
And
Setting millimeter level distance and search stride as the 4th, is the center with the 3rd reference position, searches the maximum value of focusing function in the ripple bag zone of several millimeters scope, and the pairing focusing position of definition focusing function maximum value is best focusing position.
4. automatic focusing method as claimed in claim 1, wherein step further comprises:
Setting is searched stride greater than the wavelength of incident beam as second, and in the maximum value of ripple bag local range search focusing function, and the pairing focusing position of definition focusing function maximum value is second reference position;
Set the wavelength 1/2nd of incident beam and search stride as the 3rd, with second reference position is the center, in the ripple bag zone of several 1/2nd wavelength, search the maximum value of focusing function, and the pairing focusing position of definition focusing function maximum value is the 3rd reference position;
Setting millimeter level distance and search stride as the 4th, is the center with the 3rd reference position, searches the maximum value of focusing function in the ripple bag zone of several millimeters scope, and the pairing focusing position of definition focusing function maximum value is the 4th reference position;
And
Setting the nanoscale distance and search stride as the 5th, is the center with the 4th reference position, and in several maximum value of how searching the focusing function in the ripple bag zone of rice scope, and the pairing focusing position of definition focusing function maximum value is best focusing position.
5. automatic focusing method as claimed in claim 1, its medium wave bag local range search step further comprises:
Set a focusing function threshold values, in order to select focusing position near the ripple packet interval;
Selection captures focusing functional value S1, S2, S3, S4 and the S5 of focusing position P1, P2, P3, P4 and 5 positions of P5 simultaneously to search less than the search stride of ripple packet interval width;
Calculate the mean value of focusing functional value S1, S2 and S3;
Calculate the difference of focusing functional value S1 and S2 and S2 and S3 difference on average as a base value, the calculating formula of this base value is expressed as [(S2-S1)+(S3-S2)]/2;
Calculate the mean value that S4 adds S5 and deducts first three some focusing functional value of twice, again the result is obtained a summit reference value divided by aforementioned base value;
Judge this summit reference value if greater than threshold values, judge that then the focusing functional value of P4 and P5 position has entered the ripple packet interval, and this position is near preferable focusing position;
And
Judge this summit reference value if less than threshold values, the focusing functional value of then judging P4 and P5 position does not reach the ripple packet interval, this logical calculus control module sees through the logical calculus means position that aforementioned 5 focusing functions are selected and searches stride and obtain new P1, P2, P3, P4 and 5 positions of P5 along one of focal adjustment direction reach, and corresponding obtain new focusing functional value S1, S2, S3, S4 and S5, and get back to abovementioned steps and perform calculations.
6. automatic focusing method as claimed in claim 5 is wherein selected to carry out ripple bag local range search step with 0.5 times of ripple packet interval width as the search stride of searching stride ripple packet interval width.
7. automatic focusing method as claimed in claim 1, wherein the thick search step between the focal area further comprises:
The distribution relation of focusing functional value on the focusing position direction passed through the single order differential that the differential means reach the focusing function, and the maximal value of the single order differential of the function of wherein focusing is defined as the rough position between the focal area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101090044A CN100529946C (en) | 2005-10-13 | 2005-10-13 | Automatic focusing method and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101090044A CN100529946C (en) | 2005-10-13 | 2005-10-13 | Automatic focusing method and application thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1949074A CN1949074A (en) | 2007-04-18 |
| CN100529946C true CN100529946C (en) | 2009-08-19 |
Family
ID=38018631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101090044A Expired - Fee Related CN100529946C (en) | 2005-10-13 | 2005-10-13 | Automatic focusing method and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100529946C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813823A (en) * | 2010-03-22 | 2010-08-25 | 中国科学院长春光学精密机械与物理研究所 | A method for automatic focusing of an astronomical telescope |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102445812B (en) * | 2010-10-13 | 2013-10-16 | 致茂电子(苏州)有限公司 | High-speed auto-focusing method |
| CN106154689A (en) * | 2015-04-28 | 2016-11-23 | 信泰光学(深圳)有限公司 | Atomatic focusing method and use the image capture unit of this Atomatic focusing method |
| CN106767497B (en) * | 2016-11-24 | 2018-11-27 | 中国民航大学 | A kind of white light interference contourgraph spacescan range Adaptive Planning method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001311864A (en) * | 2000-04-28 | 2001-11-09 | Minolta Co Ltd | Zoom lens barrel and focusing control method |
| JP2002236249A (en) * | 2001-02-09 | 2002-08-23 | Canon Inc | Automatic focusing camera |
| US6463214B1 (en) * | 2000-07-05 | 2002-10-08 | Asahi Kogaku Kogyo Kabushiki Kaisha | Multi-point autofocus system |
| CN1506744A (en) * | 2002-12-10 | 2004-06-23 | ������������ʽ���� | auto focus device |
-
2005
- 2005-10-13 CN CNB2005101090044A patent/CN100529946C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001311864A (en) * | 2000-04-28 | 2001-11-09 | Minolta Co Ltd | Zoom lens barrel and focusing control method |
| US6463214B1 (en) * | 2000-07-05 | 2002-10-08 | Asahi Kogaku Kogyo Kabushiki Kaisha | Multi-point autofocus system |
| JP2002236249A (en) * | 2001-02-09 | 2002-08-23 | Canon Inc | Automatic focusing camera |
| CN1506744A (en) * | 2002-12-10 | 2004-06-23 | ������������ʽ���� | auto focus device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813823A (en) * | 2010-03-22 | 2010-08-25 | 中国科学院长春光学精密机械与物理研究所 | A method for automatic focusing of an astronomical telescope |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1949074A (en) | 2007-04-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105067568B (en) | Automatic focusing LIBS detecting system and its detection method | |
| CN107346059B (en) | Variable focal length imaging system | |
| CN106482634B (en) | It is focused using the multi-grade image of the tunable lens in machine vision inspection system | |
| CN103674839B (en) | A kind of visual Sample location operating system based on spot detection and method | |
| CN105509641B (en) | For the method to metering system programmed three-D workpiece scan path | |
| CN102724401B (en) | A kind of linear array CCD camera multiple spot automatic focusing method | |
| CN104181685A (en) | Automatic digital slide focusing device and method based on microscope | |
| CN106210520B (en) | A kind of automatic focusing electronic eyepiece and system | |
| EP4212938A1 (en) | Flying-over beam pattern scanning hologram microscope device using scan mirror and translation stage | |
| CN109556531A (en) | A kind of point-diffraction interferometer optical path precision alignment system and method based on image information | |
| US20240416460A1 (en) | Protective method and system combining process monitoring and control in laser drilling | |
| CN109807471A (en) | A laser marking device and method | |
| CN106767465A (en) | A kind of laser facula monitoring and light path automatically collimating integrated system | |
| CN109660716A (en) | Telephoto lens based on automatic distance measurement and method and device for realizing automatic focusing | |
| CN102840964A (en) | Large-caliber long-focus collimator focal point real-time monitoring system | |
| CN105842202A (en) | Multichannel optical element surface particle scattering measuring system and method | |
| CN100529946C (en) | Automatic focusing method and application thereof | |
| CN104423181A (en) | Focusing and leveling device and method for automatic adjustment of vibration amplitude of scanning reflecting mirror | |
| CN112284531A (en) | Calibration optical path and calibration method for improving detection precision of beam combination parameters | |
| JP2002219591A (en) | Laser beam irradiation device | |
| JP3437154B2 (en) | Laser beam measuring device and control device | |
| US9891422B2 (en) | Digital confocal optical profile microscopy | |
| CN113740316A (en) | Laser focusing point position automatic positioning method and system based on light spot position | |
| CN203772222U (en) | Non-contact type displacement measuring system | |
| CN105510234A (en) | Optical fiber sensing-based laser excitation heat wave signal detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090819 |