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CN100499953C - A packaging method of organic electroluminescent display - Google Patents

A packaging method of organic electroluminescent display Download PDF

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Publication number
CN100499953C
CN100499953C CNB2007103077363A CN200710307736A CN100499953C CN 100499953 C CN100499953 C CN 100499953C CN B2007103077363 A CNB2007103077363 A CN B2007103077363A CN 200710307736 A CN200710307736 A CN 200710307736A CN 100499953 C CN100499953 C CN 100499953C
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layer
cathode
display
vacuum evaporation
film encapsulation
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CN101217837A (en
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张方辉
李欣
矫士博
牟强
张志刚
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Shaanxi University of Science and Technology
Irico Group Corp
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Shaanxi University of Science and Technology
Irico Group Corp
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Abstract

本发明公开了一种可显著提高器件寿命的有机电致发光显示器的封装方法:其特征在于,先在玻璃基板上表面自下而上依次设置ITO导电层、空穴传输层、发光层、电子传输层和阴极层,所述的阴极层设置用于与直流电压负极相连接的引出导体膜片,然后在阴极层表面采用真空蒸镀、粒子溅射或磁控溅射工艺形成一层薄膜封装层,该薄膜封装层同时将空穴传输层、发光层、电子传输层和阴极层侧边密封。

Figure 200710307736

The invention discloses a packaging method of an organic electroluminescent display which can significantly improve the service life of the device: firstly, an ITO conductive layer, a hole transport layer, a light-emitting layer, an electronic The transmission layer and the cathode layer, the cathode layer is set to lead out the conductor diaphragm connected to the negative pole of the DC voltage, and then a layer of thin film packaging is formed on the surface of the cathode layer by vacuum evaporation, particle sputtering or magnetron sputtering layer, the thin film encapsulation layer simultaneously seals the side edges of the hole transport layer, the light emitting layer, the electron transport layer and the cathode layer.

Figure 200710307736

Description

一种有机电致发光显示器的封装方法 A kind of packaging method of organic electroluminescence display

技术领域 technical field

本发明涉及一种有机电致发光显示器的封装方法。The invention relates to a packaging method for an organic electroluminescence display.

背景技术 Background technique

随着人们对视觉要求的逐日提高,显示技术快速发展,已日趋百花齐放的局面,从阴极射线管显示(CRT)、液晶显示(LCD)、等离子显示(PDP)到有机电致发光显示(OLED)以及场致发光显示(FED),不一而足。科学技术的发展日新月异,显示技术领域也在发生一场革命,各种新型的平板显示技术(FPD)应运而生。阴极射线管显示(CRT)存在体积大、功耗高和辐射性的缺点,逐渐失去显示领域的霸主地位;而平板显示技术被誉为一种朝阳技术,是二十一世纪显示技术发展的主流,因而受到了人们的广泛重视,它不仅要具有完美的显示品质,而且需在体积、节能等方面有更多的改进。LCD、PDP和OLED是平板显示的三大主流,OLED显示器件,包括PLED(高分子有机电致发光显示)与其它显示器件相比具有更大的优势,具体表现为工作电压低、制作成本低、能耗小、更薄、亮度和清晰度更高等优点。柔板显示是OLED/PLED显示器件的发展方向之一,但由于目前封装技术所存在的问题,影响了OLED平板显示器件的寿命。With the improvement of people's visual requirements and the rapid development of display technology, it has become a situation where a hundred flowers are blooming, from cathode ray tube display (CRT), liquid crystal display (LCD), plasma display (PDP) to organic electroluminescent display (OLED) And Electroluminescent Display (FED), to name a few. With the rapid development of science and technology, a revolution is also taking place in the field of display technology, and various new flat panel display technologies (FPD) have emerged as the times require. Cathode ray tube display (CRT) has the shortcomings of large size, high power consumption and radiation, and gradually loses its dominance in the display field; flat panel display technology is known as a rising technology and is the mainstream of display technology development in the 21st century , and thus has been widely valued by people, it must not only have perfect display quality, but also need more improvements in volume, energy saving and other aspects. LCD, PDP and OLED are the three mainstreams of flat panel display. OLED display devices, including PLED (polymer organic electroluminescent display), have greater advantages compared with other display devices, specifically manifested in low operating voltage and low production cost. , low energy consumption, thinner, higher brightness and clarity. Flexible display is one of the development directions of OLED/PLED display devices, but the lifespan of OLED flat panel display devices is affected due to the existing problems in packaging technology.

OLED器件的寿命一方面决定于所选用的有机材料,另一方面还取决于器件的封装方法;因为有机材料很不稳定,如果OLED器件封装不好,有机材料就会与真空腔内的水蒸汽、氧气等气体发生反应,很容易就会失效,导致整个OLED器件寿命降低。因而,为使OLED在长期工作过程中的退化和失效得到抑制,稳定工作达到足够的寿命,对封装材料的阻隔性有很高要求。The lifespan of an OLED device depends on the selected organic material on the one hand, and on the other hand the packaging method of the device; because the organic material is very unstable, if the OLED device is not well packaged, the organic material will be mixed with the water vapor in the vacuum chamber. , Oxygen and other gases react, and it is easy to fail, resulting in a reduction in the lifetime of the entire OLED device. Therefore, in order to suppress the degradation and failure of the OLED in the long-term working process and achieve a sufficient service life in stable operation, there is a high requirement for the barrier property of the packaging material.

发明内容 Contents of the invention

本发明为了解决OLED/PLED显示器件寿命低的问题,提供了一种可显著提高器件寿命的有机电致发光显示器的封装方法。In order to solve the problem of low service life of OLED/PLED display devices, the present invention provides a packaging method for organic electroluminescent displays that can significantly improve device service life.

为达到上述目的,本发明是采取如下技术方案予以实现的:To achieve the above object, the present invention is achieved by taking the following technical solutions:

一种有机电致发光显示器的封装方法,其特征在于,先在玻璃基板上表面自下而上依次设置ITO导电层、空穴传输层、发光层、电子传输层和阴极层,所述的阴极层设置用于与直流电压负极相连接的引出导体膜片,然后在阴极层表面采用真空蒸镀、粒子溅射或磁控溅射工艺形成一层薄膜封装层,该薄膜封装层同时将空穴传输层、发光层、电子传输层和阴极层侧边密封。A method for encapsulating an organic electroluminescent display, characterized in that an ITO conductive layer, a hole transport layer, a light-emitting layer, an electron transport layer and a cathode layer are successively arranged on the upper surface of a glass substrate from bottom to top, and the cathode layer The layer is set to lead out the conductor diaphragm connected to the negative pole of the DC voltage, and then a layer of thin film encapsulation layer is formed on the surface of the cathode layer by vacuum evaporation, particle sputtering or magnetron sputtering, and the thin film encapsulation layer simultaneously absorbs holes The transport layer, emissive layer, electron transport layer and cathode layer are side-sealed.

上述方案中,所述的薄膜封装层用在空气中比较稳定的材料硒、碲、锑等通过真空蒸镀、粒子溅射或磁控溅射工艺形成;真空蒸镀时的真空度为1 X 10-3Pa以下,真空蒸镀厚度为80nm以上。所述的阴极层由金属铝或者钙/铝、镁/银低功函数材料制成。In the above scheme, the thin film encapsulation layer is formed by vacuum evaporation, particle sputtering or magnetron sputtering processes using relatively stable materials such as selenium, tellurium, and antimony in the air; the vacuum degree during vacuum evaporation is 1× 10 -3 Pa or less, and the vacuum deposition thickness is 80 nm or more. The cathode layer is made of metal aluminum or calcium/aluminum, magnesium/silver low work function material.

本发明在OLED/PLED阴极的外面通过高真空条件下的真空蒸镀、粒子溅射、磁控溅射等成膜方法制备一层致密、不易氧化的薄膜封装层,实现对显示器件的封装,减少水、氧等对于器件内部的侵蚀,形成对阴极、有机材料的有效保护,使OLED在长期工作过程中的退化和失效得到抑制,实现稳定工作达到足够的寿命。The present invention prepares a dense, non-oxidizable thin-film encapsulation layer on the outside of the OLED/PLED cathode by vacuum evaporation, particle sputtering, magnetron sputtering and other film-forming methods under high vacuum conditions, so as to realize the encapsulation of the display device. Reduce the erosion of water, oxygen, etc. on the inside of the device, form an effective protection for the cathode and organic materials, suppress the degradation and failure of the OLED during long-term operation, and achieve stable operation to achieve sufficient life.

附图说明 Description of drawings

图1是一种有机电致发光显示器采用本发明方法薄膜封装后的结构图。Fig. 1 is a structure diagram of an organic electroluminescent display after being encapsulated by the method of the present invention.

具体实施方式 Detailed ways

下面结合附图及实施例对本发明作进一步的详细说明。The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

如图1所示,一种有机电致发光显示器的封装方法,先在玻璃基板6上表面自下而上依次设置ITO(氧化铟与氧化锡复合膜材)导电层5、空穴传输层4、发光层(荧光材料)3、电子传输层2和由金属铝或者钙/铝、镁/银等低功函数材料制成阴极层1,再在阴极层1上设置用于与直流电压负极相连接的引出导体膜片,然后在阴极层1表面采用真空蒸镀、粒子溅射或磁控溅射工艺形成一层薄膜封装层7,该薄膜封装层7同时将空穴传输层4、发光层3、电子传输层2和阴极层1侧边密封。薄膜封装层7可用在空气中比较稳定的材料,如硒、碲、锑等,通过真空蒸镀、粒子溅射或磁控溅射工艺形成。这些薄膜材料具有对水气、氧气等良好的阻隔性。As shown in Figure 1, a packaging method for an organic electroluminescent display, firstly, an ITO (indium oxide and tin oxide composite film material) conductive layer 5 and a hole transport layer 4 are sequentially arranged on the upper surface of a glass substrate 6 from bottom to top. , luminescent layer (fluorescent material) 3, electron transport layer 2, and cathode layer 1 made of metal aluminum or calcium/aluminum, magnesium/silver and other low work function materials, and then set on the cathode layer 1 to be used for interfacing with the DC voltage negative electrode connected lead-out conductor diaphragm, and then adopt vacuum evaporation, particle sputtering or magnetron sputtering process to form a layer of thin film encapsulation layer 7 on the surface of cathode layer 1. 3. The sides of the electron transport layer 2 and the cathode layer 1 are sealed. The thin-film encapsulation layer 7 can be formed by vacuum evaporation, particle sputtering or magnetron sputtering using materials that are relatively stable in air, such as selenium, tellurium, and antimony. These film materials have good barrier properties to moisture, oxygen, etc.

本发明一个具体实施例为采用常规制备工艺分别在玻璃基板6上表面自下而上依次设置ITO导电层5、空穴传输层4、发光层3、电子传输层2和由金属铝材料制成阴极层1,然后在真空室内金属阴极1上原位直接用硒材料通过真空蒸镀工艺蒸镀形成薄膜封装层7,真空蒸镀时的真空度为1 X 10-3Pa以下;真空蒸镀后薄膜封装层7的厚度为80nm。封装完毕后,ITO导电层5和阴极层1分别与直流电压的正负电极相连。A specific embodiment of the present invention is to respectively arrange an ITO conductive layer 5, a hole transport layer 4, a light-emitting layer 3, an electron transport layer 2, and an aluminum alloy material on the upper surface of a glass substrate 6 sequentially from bottom to top using a conventional preparation process. Cathode layer 1, and then on the metal cathode 1 in the vacuum chamber, directly use selenium material to form a thin film encapsulation layer 7 by vacuum evaporation process in situ, and the vacuum degree during vacuum evaporation is below 1 × 10 -3 Pa; vacuum evaporation The thickness of the rear thin film encapsulation layer 7 is 80 nm. After the packaging is completed, the ITO conductive layer 5 and the cathode layer 1 are respectively connected to the positive and negative electrodes of the DC voltage.

本发明从提高OLED封装的阻隔性,延长OLED器件寿命出发,通过在完成各功能层设置以后,在真空室内金属阴极上原位直接蒸镀薄膜封装层,不但简化了生产工艺,更有效的延长了OLED器件的寿命。The present invention starts from improving the barrier property of OLED encapsulation and prolonging the service life of OLED devices. After completing the setting of each functional layer, the film encapsulation layer is directly vapor-deposited in situ on the metal cathode in the vacuum chamber, which not only simplifies the production process, but also more effectively prolongs the life of the OLED device. the lifetime of OLED devices.

Claims (3)

1. the method for packing of a display of organic electroluminescence, it is characterized in that, earlier set gradually ITO conductive layer, hole transmission layer, luminescent layer, electron transfer layer and cathode layer from bottom to top at the glass substrate upper surface, described cathode layer is provided for the conductor introduction diaphragm that is connected with the direct voltage negative pole, on the cathode layer surface thin film encapsulated layer is set then, this thin-film encapsulation layer forms by vacuum evaporation, particle sputter or magnetron sputtering technique with the material of one of selenium, tellurium, antimony; Described thin-film encapsulation layer is simultaneously with hole transmission layer, luminescent layer, electron transfer layer and cathode layer side seals.
2. the method for packing of display of organic electroluminescence as claimed in claim 1 is characterized in that, described thin-film encapsulation layer forms by vacuum evaporation process with selenium, and the vacuum degree during vacuum evaporation is 1 X 10 -3Below the Pa.
3. the method for packing of display of organic electroluminescence as claimed in claim 2 is characterized in that, the vacuum evaporation thickness of described thin-film encapsulation layer is at least 80nm.
CNB2007103077363A 2007-12-26 2007-12-26 A packaging method of organic electroluminescent display Expired - Fee Related CN100499953C (en)

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Publication number Priority date Publication date Assignee Title
CN101436648B (en) * 2008-12-09 2010-06-16 彩虹集团公司 Encapsulation method for novel organic electroluminescence device film
CN101740729B (en) * 2009-12-25 2012-05-09 彩虹集团公司 Preparation method of white light organic electroluminescent device
JP5854746B2 (en) 2010-10-15 2016-02-09 日東電工株式会社 Top emission type organic electroluminescence light emitting device and manufacturing method thereof
CN103904248B (en) * 2012-12-25 2016-08-03 海洋王照明科技股份有限公司 Organic electroluminescence device and preparation method thereof
CN105098096B (en) * 2015-08-03 2018-03-30 京东方科技集团股份有限公司 The distribution method of encapsulating compound, display panel and preparation method thereof, display device

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