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CN100484342C - Induction heater for microwave measurement - Google Patents

Induction heater for microwave measurement Download PDF

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CN100484342C
CN100484342C CNB2007100503509A CN200710050350A CN100484342C CN 100484342 C CN100484342 C CN 100484342C CN B2007100503509 A CNB2007100503509 A CN B2007100503509A CN 200710050350 A CN200710050350 A CN 200710050350A CN 100484342 C CN100484342 C CN 100484342C
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vacuum furnace
microwave
induction heating
hole
heating device
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CN101160000A (en
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李恩
何凤梅
李仲平
聂在平
张其劭
郭高凤
张大海
王金明
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University of Electronic Science and Technology of China
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Abstract

用于微波测量的感应加热装置,属于微波、毫米波技术领域,特别涉及微波、毫米波测试技术领域。本发明的包括感应加热设备、感应圈、真空炉,真空炉上具有两个连接孔;感应圈采用紫铜管制作,其中部绕成螺旋状并位于真空炉内,两端穿过真空炉的连接孔与感应加热设备相连。本发明还可增加一个冷却系统,感应加热设备可以具有功率控制装置,真空炉上开可开有温度测量孔、观察孔、充气孔、真空测量孔、真空抽气孔等。本发明具有结构简单、制作方便、加热速度快、加热效率高等优点,可在不同的温度条件下对被测物体进行加热,从而进行微波测量。

Figure 200710050350

An induction heating device for microwave measurement belongs to the technical field of microwave and millimeter wave, in particular to the technical field of microwave and millimeter wave testing. The present invention includes induction heating equipment, an induction coil, and a vacuum furnace. The vacuum furnace has two connecting holes; the induction coil is made of a copper tube, the middle of which is wound into a spiral shape and located in the vacuum furnace, and the two ends pass through the vacuum furnace. The connection hole is connected with induction heating equipment. The present invention can also add a cooling system, the induction heating equipment can have a power control device, and the vacuum furnace can be provided with a temperature measurement hole, an observation hole, an air filling hole, a vacuum measurement hole, a vacuum suction hole, etc. The invention has the advantages of simple structure, convenient manufacture, fast heating speed, high heating efficiency, etc., and can heat the measured object under different temperature conditions to perform microwave measurement.

Figure 200710050350

Description

用于微波测量的感应加热装置 Induction Heating Unit for Microwave Measurements

所属技术领域Technical field

本发明属于微波、毫米波技术领域,特别涉及微波、毫米波测试技术领域。The invention belongs to the technical field of microwave and millimeter wave, in particular to the technical field of microwave and millimeter wave testing.

背景技术 Background technique

随着微波、毫米波技术的发展,微波、毫米波介质材料和器件的应用也越来越广泛。当这些材料和器件的工作环境温度发生变化时,它们的微波性能也会随之发生变化,严重时甚至不能正常工作。因此,在进行研制和应用时,需要在不同的温度条件下对这些器件和材料的微波性能进行测试。With the development of microwave and millimeter wave technology, the application of microwave and millimeter wave dielectric materials and devices is becoming more and more extensive. When the temperature of the working environment of these materials and devices changes, their microwave properties will also change accordingly, and in severe cases, they may not even work normally. Therefore, it is necessary to test the microwave properties of these devices and materials under different temperature conditions during development and application.

当所需测试的微波器件或介质材料的工作温度较低时,例如小于100℃,通常采用恒温箱即可。但当温度升高到上百度甚至上千度时,则通常采用高温炉或在真空炉中对被测物体进行加热。When the operating temperature of the microwave device or dielectric material to be tested is low, for example, less than 100°C, a constant temperature box is usually sufficient. But when the temperature rises to hundreds or even thousands of degrees, the object to be measured is usually heated in a high-temperature furnace or in a vacuum furnace.

文献“Vasundara V.Varadan,Richard D.Hollinger,Deepak K.Ghodgaonkar,VijayK.Varadan,Free-space broadband measurement of high-temperature complex dielectricproperties at microwave frequencies,IEEE Transactions on Instrumentation andMeasurement,1991,Vol.40,No.5,p842~846.”中采用电阻加热的方法对被测样品进行加热,温度升高到850℃。但当温度需上升到更高温度时,采用电阻加热的方法需采用贵金属,成本昂贵。Literature "Vasundara V. Varadan, Richard D. Hollinger, Deepak K. Ghodgaonkar, Vijay K. Varadan, Free-space broadband measurement of high-temperature complex dielectric properties at microwave frequencies, IEEE Transactions on Instrumentation and Measurement, Vol.401, 199 5. In p842~846.", the resistance heating method is used to heat the tested sample, and the temperature rises to 850 °C. However, when the temperature needs to rise to a higher temperature, the method of resistance heating needs to use precious metals, which is expensive.

文献“Paul Friederich,Rich L.Moore,James W.Larsen,Elevated temperaturemeasurements of permittivity and permeability at temperatures above 1000℃,Antennasand Propagation Society International Symposium,1991,Vol.3,p1672~1675.”中利用在真空炉中采用石墨电极加热的方法对被测样品进行加热,温度可高达2000℃。但石墨电极易脆,且使用不便。Document "Paul Friederich, Rich L.Moore, James W.Larsen, Elevated temperaturemeasurements of permittivity and permeability at temperatures above 1000℃, Antennas and Propagation Society International Symposium, 1991, Vol.3, p1672~1675."Used in a vacuum furnace The measured sample is heated by graphite electrode heating method, and the temperature can be as high as 2000°C. However, graphite electrodes are brittle and inconvenient to use.

文献“M.Garven,J.P.Calame,B.Myers,D.Lobas,Variable temperaturemeasurements of the dielectric properties of lossy materials in W-band,Infrared andMillimeter Waves and 13th International Conference on Terahertz Electronics,2005,Vol.1,p174~175.”中采用在真空炉中对被测样品进行加热,并充一定正压的氮气以避免测试装置被氧化。Literature "M.Garven, JPCalame, B.Myers, D.Lobas, Variable temperature measurements of the dielectric properties of lossy materials in W-band, Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, 2005, Vol.1, p174~ 175." In the vacuum furnace, the tested sample is heated and filled with a certain positive pressure of nitrogen to prevent the test device from being oxidized.

文献“黎义,李建保,何小瓦,采用谐振腔法研究透波材料的高温介电性能,红外与毫米波学报,2004,Vol.23,No.2,p157~160”中介绍了俄罗斯的高温介电性能测试仪。该仪器采用充氮气气氛的高温炉对被测样品进行加热,温度可升到1200℃。The literature "Li Yi, Li Jianbao, He Xiaowa, using resonant cavity method to study high-temperature dielectric properties of wave-transparent materials, Journal of Infrared and Millimeter Waves, 2004, Vol.23, No.2, p157-160" introduced the Russian High temperature dielectric property tester. The instrument uses a high-temperature furnace filled with nitrogen atmosphere to heat the tested sample, and the temperature can rise to 1200°C.

综上所述,国外在对介质材料和微波器件的高温测试技术方面已研究了多年,通常利用的加热设备为充氮气气氛保护的高温炉或真空炉,采用电阻加热或石墨电极加热。这些加热装置较复杂,且加工难度较高、加热速度慢、冷却时间长,难以适应对被测器件或材料进行更高温度的微波参数测试现状要求。To sum up, foreign countries have studied the high-temperature testing technology of dielectric materials and microwave devices for many years, and the heating equipment usually used is a high-temperature furnace or a vacuum furnace protected by a nitrogen-filled atmosphere, using resistance heating or graphite electrode heating. These heating devices are relatively complex, and the processing is difficult, the heating speed is slow, and the cooling time is long, so it is difficult to adapt to the current requirements of microwave parameter testing at higher temperatures for devices or materials under test.

发明内容 Contents of the invention

本发明的任务是提供一种高温加热装置,以实现高温环境下的微波测量。The task of the present invention is to provide a high-temperature heating device to realize microwave measurement in a high-temperature environment.

本发明的技术方案为:Technical scheme of the present invention is:

用于微波测量的感应加热装置,包括感应加热设备1、感应圈2、真空炉3;其特征在于,真空炉3上具有两个连接孔;感应圈2采用紫铜管制作,其中部绕成螺旋状并位于真空炉3内,两端穿过真空炉3的连接孔与感应加热设备相连。An induction heating device for microwave measurement, including induction heating equipment 1, an induction coil 2, and a vacuum furnace 3; it is characterized in that the vacuum furnace 3 has two connecting holes; the induction coil 2 is made of a copper tube, and the middle part is wound into a Helical and located in the vacuum furnace 3, the two ends pass through the connection holes of the vacuum furnace 3 to connect with the induction heating equipment.

上述用于微波测量的感应加热装置的工作过程可以简单描述为:将待测微波介质样品放置于真空炉3内感应圈2中的某个位置,打开感应加热设备1,热量通过感应圈2对待测微波介质样品进行加热,当加热到所需温度后,停止加热,并通过微波介质测量装置对待测微波介质样品进行测试。The working process of the above-mentioned induction heating device for microwave measurement can be simply described as: the microwave medium sample to be tested is placed at a certain position in the induction coil 2 in the vacuum furnace 3, the induction heating device 1 is turned on, and the heat is treated by the induction coil 2. The microwave medium sample to be tested is heated, and when the heating reaches the required temperature, the heating is stopped, and the microwave medium sample to be tested is tested by the microwave medium measuring device.

冷却系统可以是常见的水冷系统。The cooling system can be a common water cooling system.

所述感应加热设备1可以具有功率控制装置,以控制输出功率的大小。The induction heating device 1 may have a power control device to control the output power.

为了方便进行微波介质测量,所述真空炉3上开可开有温度测量孔、观察孔、充气孔、真空测量孔、真空抽气孔等。In order to facilitate microwave medium measurement, the vacuum furnace 3 may be provided with a temperature measurement hole, an observation hole, an air filling hole, a vacuum measurement hole, a vacuum pumping hole and the like.

需要说明的是,本发明适合不同各种微波器件及介质材料的高温微波参数测试,即本发明可以为不同频段对各种微波器件及介质材料进行微波参数高温测试提供高温加热装置。具有结构简单、制作方便、加热速度快等优点。It should be noted that the present invention is suitable for high-temperature microwave parameter testing of various microwave devices and dielectric materials, that is, the present invention can provide a high-temperature heating device for high-temperature testing of microwave parameters of various microwave devices and dielectric materials in different frequency bands. The utility model has the advantages of simple structure, convenient manufacture, fast heating speed and the like.

附图说明 Description of drawings

图1为本发明所述用于微波测量的感应加热装置示意图Fig. 1 is the schematic diagram of the induction heating device for microwave measurement according to the present invention

其中,1是感应加热设备,2是感应圈,3是真空炉。Among them, 1 is an induction heating device, 2 is an induction coil, and 3 is a vacuum furnace.

图2为本发明具有冷却系统的用于微波测量的感应加热装置示意图Fig. 2 is the schematic diagram of the induction heating device for microwave measurement with cooling system of the present invention

其中,4是冷却系统。Among them, 4 is the cooling system.

具体实施方式 Detailed ways

当测试完毕或测试过程中,加热温度过高,需要迅速冷却时,本发明所述用于微波测量的感应加热装置还可增加一个冷却系统4,如图2所示,冷却系统4与真空炉3和感应圈2分别相连,为真空炉3和感应圈2分别提供循环制冷液。When the test is completed or during the test, the heating temperature is too high and rapid cooling is required, the induction heating device for microwave measurement according to the present invention can also increase a cooling system 4, as shown in Figure 2, the cooling system 4 and the vacuum furnace 3 and the induction coil 2 are respectively connected to provide circulating refrigerant liquid for the vacuum furnace 3 and the induction coil 2 respectively.

Claims (4)

1、用于微波测量的感应加热装置,包括感应加热设备(1)、感应圈(2)、真空炉(3);其特征在于,真空炉(3)上具有两个连接孔;感应圈(2)采用紫铜管制作,其中部绕成螺旋状并位于真空炉(3)内,两端穿过真空炉(3)的连接孔与感应加热设备相连。1. An induction heating device for microwave measurement, comprising an induction heating device (1), an induction coil (2), and a vacuum furnace (3); it is characterized in that the vacuum furnace (3) has two connection holes; the induction coil ( 2) It is made of copper tube, the middle of which is wound into a spiral shape and located in the vacuum furnace (3), and the two ends pass through the connection holes of the vacuum furnace (3) to connect with the induction heating equipment. 2、根据权利要求1所述的用于微波测量的感应加热装置,其特征在于,所述感应加热设备(1)还包括一个冷却系统(4),冷却系统(4)与真空炉(3)和感应圈(2)分别相连,为真空炉(3)和感应圈(2)分别提供循环制冷液。2. The induction heating device for microwave measurement according to claim 1, characterized in that, the induction heating device (1) further comprises a cooling system (4), the cooling system (4) and the vacuum furnace (3) They are respectively connected with the induction coil (2), and respectively provide circulating refrigerating liquid for the vacuum furnace (3) and the induction coil (2). 3、根据权利要求2所述的用于微波测量的感应加热装置,其特征在于,所述冷却系统(4)为水冷系统。3. The induction heating device for microwave measurement according to claim 2, characterized in that the cooling system (4) is a water cooling system. 4、根据权利要求1所述的用于微波测量的感应加热装置,其特征在于,所述感应加热设备(1)具有功率控制装置,以控制输出功率的大小。4. The induction heating device for microwave measurement according to claim 1, characterized in that the induction heating device (1) has a power control device to control the output power.
CNB2007100503509A 2007-10-30 2007-10-30 Induction heater for microwave measurement Expired - Fee Related CN100484342C (en)

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Publication number Priority date Publication date Assignee Title
CN101920299B (en) * 2009-06-11 2012-08-08 宝山钢铁股份有限公司 Steel tube end part inductive heating device with temperature detection system
CN102435863A (en) * 2011-11-04 2012-05-02 电子科技大学 A variable temperature measurement device for dielectric properties of dielectric materials based on quasi-optical resonant cavity
CN109782201B (en) * 2019-02-12 2020-12-01 宴晶科技(北京)有限公司 A kind of microwave material electromagnetic parameter measuring instrument and measuring method

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