CN100480653C - Large value piezoelectric quartz multi-component force sensor - Google Patents
Large value piezoelectric quartz multi-component force sensor Download PDFInfo
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- CN100480653C CN100480653C CNB2007101579327A CN200710157932A CN100480653C CN 100480653 C CN100480653 C CN 100480653C CN B2007101579327 A CNB2007101579327 A CN B2007101579327A CN 200710157932 A CN200710157932 A CN 200710157932A CN 100480653 C CN100480653 C CN 100480653C
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- 239000010453 quartz Substances 0.000 title claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 230000000694 effects Effects 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000010008 shearing Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 239000000565 sealant Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 10
- 230000003068 static effect Effects 0.000 abstract description 4
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 210000002435 tendon Anatomy 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
本发明涉及一种大力值压电石英多分量力传感器，属于传感器及其测控领域。它是由上盖、底座、力敏元件、预紧螺钉、空心螺钉和密封圈组成的传感器本体与两个开口套筒组成的。传感器本体中的力敏元件为石英晶片，四组石英晶组相对于坐标系呈正方形对称布置，安装于上盖与底座凹凸槽之间，靠过盈量预紧。传感器结构简单，性能好，成本低，具有高刚度、高灵敏度、高固有频率、线性好、耦合系数小、横向干扰小等优良特点，可及时而准确地测出六维静态力、动态力、瞬时力。本传感器，主要用于巨型重载设备轴上六维力的测量，也可用于其它轴上六维力的测量，用途广泛。
The invention relates to a large piezoelectric quartz multi-component force sensor, which belongs to the field of sensors and their measurement and control. It consists of a sensor body consisting of an upper cover, a base, a force-sensitive element, a pre-tightening screw, a hollow screw and a sealing ring, and two open sleeves. The force sensitive element in the sensor body is a quartz wafer, and the four groups of quartz crystals are arranged symmetrically in a square with respect to the coordinate system, and are installed between the upper cover and the concave-convex groove of the base, preloaded by the interference. The sensor has simple structure, good performance, low cost, high rigidity, high sensitivity, high natural frequency, good linearity, small coupling coefficient, small lateral interference, etc. It can timely and accurately measure six-dimensional static force, dynamic force, Instantaneous force. The sensor is mainly used for the measurement of the six-dimensional force on the axis of giant heavy-duty equipment, and can also be used for the measurement of the six-dimensional force on other axes, and has a wide range of uses.
Description
Technical field
The invention belongs to sensor and measurement and control area field thereof, particularly the six-dimension heavy force value of huge heave-load device is measured.
Background technology
Six-dimension force sensor in the tradition, six-dimension force sensor as three vertical tendon structures, the six-dimension force sensor of tubular, the Crossed Circle six-dimension force sensor, four vertical tendon structure six-dimensional force sensings, non-radially three girder construction six-dimension force sensors, the cross structure six-dimension force sensor, Stewart structure six-dimension force transducer etc., all adopt foil gauge to measure the sextuple power of bearing on the measurand surface as force sensing element, the complex structure that wherein has, the size that has is big, the rigidity that has is low, the strain sensitivity that has is low, the decoupling zero difficulty that has, and be used for small value force more and measure, can not satisfy the requirement of kinetic measurement.The force cell of value energetically in the tradition is worth sensor energetically as adhesion type, and it is light and handy to have structure, and reliable operation is safeguarded advantages such as simple, but can only be used to measure one-dimensional energetically.
Huge operating equipment has characteristics such as big inertia, multiple degrees of freedom, change rigidity, and its dynamics is totally different when unloaded and load operation, and parameter mismatch takes place easily, causes the vibration in the dynamic operation process.In manufacture process, operating equipment is normally with the process unit coordinated manipulation, the terminal topworks of operating equipment has power compliance and position compliance to the displacement that workpiece deformation caused in the manufacture process, increases severely or the clamping inefficacy with the load of avoiding causing because of constraint.Real-time sextuple power measurement is the basis of realizing complying with control and multiple degrees of freedom coordination control.The kinetic measurement of sextuple power is the gordian technique in the over-loading operation equipment Control System Design under the fully loaded transportation condition.Huge over-loading operation equipment is operated under high temperature, heavy duty, the impact condition, can not satisfy and is worth sextuple power Testing requirement energetically so above-mentioned traditional six-dimension force sensor and tradition are worth sensor energetically.
Summary of the invention
The technical problem to be solved in the present invention is the shortcoming that overcomes said apparatus, designs a kind of technological performance, and reliable operation is easy to make, the large value piezoelectric quartz multi-component force sensor that the coupling coefficient of being convenient to promote the use of is little, highly sensitive is installed and maintenance.Large value piezoelectric quartz multi-component force sensor of the present invention has higher static state and dynamic property.Because simple in structure, so the cost of this sensor reduces greatly, it has higher power-photoelectric transformation efficiency, can measure static force, dynamic force and transient force.Large value piezoelectric quartz multi-component force sensor of the present invention is mainly used in sextuple force measurement on the huge over-loading operation arbor, also can be used for the measurement of power and distortion on other mechanism shaft, also can be used for sextuple force measurement on the plane.
Technical scheme of the present invention is a large value piezoelectric quartz multi-component force sensor, is made up of sensor body and upper and lower opening sleeve.The body of sensor is by loam cake 1, force sensing element 2, O-ring seal 3, base 4, socket head cap screw 5, hollow screw 8 is formed, have toroidal cavity f on loam cake 1 lower surface, annular tongue g is arranged on base 4 upper surfaces, quadrature is placed 4 groups of force sensing elements 2 on the tongue g upper surface, loam cake 1 cooperates by groove f and tongue g with base 4, the upper surface of force sensing element 2 contacts with groove f surface, on the lower surface of loam cake 1, have two O-ring annular groove h, i, respectively be placed with O-ring seal 3 in it, 3 ', 4 pretension screws 5 pass through hole b with loam cake 1, force sensing element 2, base 4, O-ring seal 3,3 ' be installed together, on the loam cake outer cylinder surface, have threaded hole, be used to install hollow screw 8; Force sensing element 2 is by measuring F
x, F
y, F
zThree direction power and M
x, M
y, M
zThree groups of quartzy brilliant groups of three direction torque values are formed, one group of X0 ° of cut type of bearing the tension and compression effect wherein, two groups of Y0 ° of cut types of bearing shearing effect, electrode 9 is posted on every group of quartz wafer surface, after quartz wafer is connected in parallel, by lead 10 outside hollow screw 8 lead bodies.Force sensing element 2 usefulness fluid sealants seal.Upper shed sleeve 6 is for having the hollow cylinder of recessed shoulder, on last outer cylinder surface c, spare and be furnished with 4 through hole a, by bolt 11 upper shed sleeve 6 is fixed on the intermediate shaft 13, on upper shed sleeve 6, have breach k, utilize elasticity that upper shed sleeve 6 and sensor body are tightened up, the surperficial d of upper shed sleeve 6 contacts with the upper surface of loam cake 1.Under shed sleeve 7 is for having the hollow cylinder of recessed shoulder, on following outer cylinder surface c ', spare and be furnished with 4 through hole a ', by bolt 12 under shed sleeve 7 is fixed on the intermediate shaft 13, on under shed sleeve 7, have breach k, utilize elasticity that under shed sleeve 7 and sensor body are tightened up, the surperficial d ' of under shed sleeve 7 contacts with the lower surface of base 4, and the surperficial e ' of under shed sleeve 7 contacts with the inner periphery of base 4.
Remarkable result of the present invention is, and is simple in structure, good rigidly, and symmetry is good, good manufacturability, good stability, easy to manufacture, simple to operate, easy to use, the life-span is long, and cost is lower, and is highly sensitive, is easy to decoupling zero, and laterally disturbs little.Can be used to measure axle is subjected on the huge over-loading operation equipment static force, dynamic force, transient force, also can be used as on-Line Monitor Device or adaptive control system feedback element.
Description of drawings
Fig. 1 is the invention structural representation, and Fig. 2 is the structural representation of upper and lower opening sleeve 6,7.Among the figure: 1-loam cake, 2-force sensing element, 3-O-ring seal, 3 '-O-ring seal, 4-base, 5-socket head cap screw, 6-upper shed sleeve, 7-under shed sleeve, 8-hollow screw, 9-electrode, 10-contact conductor, 11-bolt, 12-bolt, 13-intermediate shaft, a-through hole, b-threaded hole, c-upper shed sleeve bolt connects outside surface, d-carry the upper shed sleeve shaft shoulder face that end face contacts with sensor body, the upper shed sleeve surface of e-contact with the sensor body internal diameter, c '-under shed sleeve bolt connects outside surface, the under shed sleeve shaft shoulder face of d '-contact with the sensor body bottom surface, the under shed sleeve surface of e '-contact with the sensor body internal diameter, k-open sleeve breach.
Fig. 3 is the three-dimensional effect diagram of invention.
Embodiment
Be described with reference to the accompanying drawings enforcement of the present invention, as shown in Figure 1, the sensor body material is a stainless steel, and upper shed sleeve 6 and under shed sleeve 7 materials are alloy steel.The geometric parameter of elastic link is selected to guarantee that each phase rigidity is identical.During use, earlier under shed sleeve 7 is installed on the intermediate shaft 13, tighten up with bolt 12, sensor body is placed on the intermediate shaft 13 then, utilize the elastic force of under shed sleeve 7 that sensor body is tightened up, again upper shed sleeve 6 is enclosed within on the intermediate shaft 13, utilizes elastic force to tighten up sensor body, with bolt 11 upper shed sleeve 6 is fixed on the intermediate shaft 13 then.When on the axle when stressed, affact on the sensor body by upper shed sleeve 6, under shed sleeve 7, act on the force sensing element 2 by the elastic link on the sensor, through tension and compression effect, shearing effect, the torsional effect of force sensing element 2 acting force is decomposed into F automatically
x, F
y, F
zThree direction power and M
x, M
y, M
zThe output of three direction moments of torsion produces the corresponding quantity of electric charge, after the charge amplifier amplification becomes the correspondent voltage signal, respectively with voltage U
X1～U
X4, U
Y1～U
Y4, U
Z1～U
Z4, U
Mx1～U
Mx4, U
My1～U
My4, U
Mz1～U
Mz4Output becomes simulating signal into digital signal input computing machine by signal condition and A/D data collecting card, handles drawing each major parameter of space vector power by the computing machine corresponding software, and is last, by terminal demonstration, record, printing etc.Magnitude of interference when wherein force sensing element 2 is packed sensor into generally is taken as 0.3～0.5mm, and pretightning force is 8000～15000N.During assembling for guaranteeing that each to laterally disturbing a minimum principle, will accurately debug the position of force sensing element 2.The present invention is easy to use, and is accurately reliable.
Claims (2)
1, a kind of large value piezoelectric quartz multi-component force sensor, it is characterized in that it is made up of sensor body and upper and lower opening sleeve, the body of its sensor is by loam cake (1), force sensing element (2), O-ring seal (3), base (4), socket head cap screw (5), hollow screw (8) is formed, have toroidal cavity (f) on loam cake (1) lower surface, on base (4) upper surface annular tongue (g) is arranged, quadrature is placed 4 groups of force sensing elements (2) on tongue (g) upper surface, loam cake (1) cooperates by groove (f) and tongue (g) with base (4), the upper surface of force sensing element (2) contacts with groove (f) surface, on the lower surface of loam cake (1), have two O-ring annular grooves (h) (i), respectively be placed with O-ring seal (3) in it, (3 '), 4 pretension screws (5) pass through hole (b) with loam cake (1), force sensing element (2), base (4), O-ring seal (3), (3 ') are installed together, on the loam cake outer cylinder surface, have threaded hole, be used to install hollow screw (8); Upper shed sleeve (6) is for having the hollow cylinder of recessed shoulder, go up even 4 through holes (a) that are furnished with at last outer cylinder surface (c), by bolt (11) upper shed sleeve (6) is fixed on the intermediate shaft (13), on upper shed sleeve (6), have breach (k), utilize elasticity that upper shed sleeve (6) and sensor body are tightened up, the surface (d) of upper shed sleeve (6) contacts with the upper surface of loam cake (1), under shed sleeve (7) is for having the hollow cylinder of recessed shoulder, go up even 4 through holes (a ') that are furnished with at following outer cylinder surface (c '), by bolt (12) under shed sleeve (7) is fixed on the intermediate shaft (13), on under shed sleeve (7), have breach (k), utilize elasticity that under shed sleeve (7) and sensor body are tightened up, the surface (d ') of under shed sleeve (7) contacts with the lower surface of base (4), and the surface (e ') of under shed sleeve (7) contacts with the inner periphery of base (4).
2,, it is characterized in that force sensing element (2) is by measuring F according to the large value piezoelectric quartz multi-component force sensor described in the claim 1
x, F
y, F
zThe power of three directions and M
x, M
y, M
zThree groups of quartzy brilliant groups of the torque value of three directions are formed, one group of X0 ° of cut type of bearing the tension and compression effect wherein, two groups of Y0 ° of cut types of bearing shearing effect, electrode (9) is posted on every group of quartz wafer surface, after quartz wafer is connected in parallel, by lead (10) outside hollow screw (8) lead body.Force sensing element (2) seals with fluid sealant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101579327A CN100480653C (en) | 2007-11-01 | 2007-11-01 | Large value piezoelectric quartz multi-component force sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101579327A CN100480653C (en) | 2007-11-01 | 2007-11-01 | Large value piezoelectric quartz multi-component force sensor |
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| CN101149301A CN101149301A (en) | 2008-03-26 |
| CN100480653C true CN100480653C (en) | 2009-04-22 |
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Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102009387B (en) * | 2010-11-20 | 2013-01-30 | 大连理工大学 | A semiconductor wafer grinding force online measurement device and control force grinding method |
| AT511330B1 (en) * | 2011-06-03 | 2012-11-15 | Piezocryst Advanced Sensorics | SENSOR FOR MEASUREMENT OF PRESSURE AND / OR FORCE |
| CN102288334B (en) * | 2011-07-28 | 2014-07-30 | 济南大学 | Parallel piezoelectric six-dimensional large force sensor |
| CN102519634B (en) * | 2011-12-12 | 2014-04-09 | 济南大学 | Piezoelectric film force sensor |
| CN105784230B (en) * | 2014-12-23 | 2018-10-26 | 沈阳透平机械股份有限公司 | Pump class product impeller multi-dimensional force integrated measuring system and its measurement method |
| CN105910750B (en) * | 2016-04-11 | 2019-04-05 | 沈阳工业大学 | Pump installation impeller dynamic circumference vector force measuring device and method |
| CN106441665A (en) * | 2016-09-26 | 2017-02-22 | 郑州航空工业管理学院 | Piezoelectric-quartz-wafer's-bending-effect-based bending moment measurement method and sensor |
| JP2019012012A (en) * | 2017-06-30 | 2019-01-24 | セイコーエプソン株式会社 | Force detection device and robot |
| CN107471085B (en) * | 2017-09-17 | 2023-04-21 | 长春工业大学 | Six-dimensional force measuring device and method based on grinding and polishing of viscoelastic material |
| CN108871626B (en) * | 2018-08-31 | 2020-03-31 | 东北电力大学 | Wedge-shaped interdimensional decoupling of two-dimensional wireless passive implantable sensors |
| CN109974917B (en) * | 2019-04-16 | 2021-06-04 | 上海交通大学 | A strain-concentrated six-dimensional force sensor fabric structure |
| CN110243508B (en) * | 2019-07-25 | 2021-02-05 | 重庆鲁班机器人技术研究院有限公司 | Embedded stepped sensing device and method for measuring six-dimensional force by using same |
| CN111024275A (en) * | 2019-12-23 | 2020-04-17 | 大连理工大学 | Shear type unidirectional force piezoelectric sensor |
| CN111693198B (en) * | 2020-05-15 | 2021-06-01 | 吉林大学 | Double-plate type six-dimensional force torque sensor |
| CN113237578B (en) * | 2021-05-08 | 2022-09-30 | 大连理工大学 | Multi-dimensional force/moment measuring method based on full-shear effect quartz wafer |
-
2007
- 2007-11-01 CN CNB2007101579327A patent/CN100480653C/en active Active
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| Title |
|---|
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| CN101149301A (en) | 2008-03-26 |
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