CN100466328C - Organic Light Emitting Display Panel - Google Patents
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- CN100466328C CN100466328C CNB2003101044174A CN200310104417A CN100466328C CN 100466328 C CN100466328 C CN 100466328C CN B2003101044174 A CNB2003101044174 A CN B2003101044174A CN 200310104417 A CN200310104417 A CN 200310104417A CN 100466328 C CN100466328 C CN 100466328C
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Abstract
Description
技术领域 technical field
本发明涉及一种显示面板,特别是一种有机发光显示面板。The invention relates to a display panel, in particular to an organic light emitting display panel.
背景技术 Background technique
近年来平面显示器朝着高亮度、平面化、轻薄以及省能源的趋势发展,有鉴于此,有机发光(OEL)显示装置成为目前光电产业中极欲发展的方向之一。有机发光显示装置是一种利用有机功能性材料(organic functional materials)的自发光的特性来达到显示效果的装置,依照有机功能性材料的分子量不同,可分为小分子有机发光显示装置(small molecule OLED,SM-OLED)与高分子有机发光显示装置(polymer light-emitting display,PLED)两大类。In recent years, flat panel displays are developing toward high brightness, planarization, thinness, and energy saving. In view of this, organic light emitting (OEL) display devices have become one of the most promising development directions in the optoelectronic industry. Organic light-emitting display devices are devices that use the self-luminous properties of organic functional materials to achieve display effects. According to the molecular weight of organic functional materials, they can be divided into small molecule organic light-emitting display devices. OLED, SM-OLED) and polymer light-emitting display (polymer light-emitting display, PLED) two categories.
由于有机发光元件(有机功能性材料)对于水气与氧气非常敏感,与大气接触后容易产生暗点(Dark Spot),所以,为了确保有机发光元件的使用寿命,如图1所示,目前的封装方式是利用溅镀、等离子辅助化学气相沉积(PECVD)或是电子束等方式直接将无机膜41(如SixOy)沉积在有机发光元件42上。Since the organic light-emitting element (organic functional material) is very sensitive to moisture and oxygen, it is easy to produce a dark spot (Dark Spot) after contact with the atmosphere. Therefore, in order to ensure the service life of the organic light-emitting element, as shown in Figure 1, the current The packaging method is to directly deposit the inorganic film 41 (such as Six O y ) on the organic light-emitting
另外,如图2所示,美国Vitex System公司亦将无机/有机的多层阻绝层结构51(Barix Coating)直接沉积于有机发光元件52上,以达到阻隔水气与氧气入侵至有机发光元件52中。In addition, as shown in FIG. 2, Vitex System Company of the United States also directly deposits an inorganic/organic multi-layer barrier layer structure 51 (Barix Coating) on the organic light-emitting
然而,水气与氧气除了会从正面(A方向)入侵有机发光元件之外,亦容易经由阻绝层(无机膜)的边缘(B方向)入侵至元件中。但,上述的两种封装方式仅能够防止水气与氧气从正面(A方向)入侵,并无法阻绝水气与氧气从侧面(B方向)入侵。However, moisture and oxygen not only intrude into the organic light-emitting device from the front side (direction A), but also easily enter the device through the edge of the barrier layer (inorganic film) (direction B). However, the above two packaging methods can only prevent the intrusion of water vapor and oxygen from the front (direction A), but cannot prevent the intrusion of water vapor and oxygen from the side (direction B).
发明内容 Contents of the invention
本发明的目的在于克服现有技术的不足与缺陷,提供一种阻止水气以及氧气入侵的有机发光显示面板。The object of the present invention is to overcome the deficiencies and defects of the prior art, and provide an organic light-emitting display panel that prevents moisture and oxygen from invading.
为达上述目的,依据本发明的一种有机发光显示面板,包含一基板、至少一有机发光区、至少一保护层、至少一阻隔层以及一封合层,其中,有机发光区形成于基板之上,且有机发光区具有数个像素;保护层形成于基板与有机发光区之上;阻隔层系形成于保护层及/或基板之上;封合层形成于基板之上,且至少披覆阻隔层及/或保护层的周缘。To achieve the above object, an organic light-emitting display panel according to the present invention includes a substrate, at least one organic light-emitting region, at least one protective layer, at least one barrier layer, and a sealing layer, wherein the organic light-emitting region is formed on the substrate , and the organic light-emitting region has several pixels; the protective layer is formed on the substrate and the organic light-emitting region; the barrier layer is formed on the protective layer and/or the substrate; the sealing layer is formed on the substrate, and at least covers The perimeter of the barrier and/or protective layer.
为达上述目的,依据本发明的一种有机发光显示面板,包含一基板、至少一有机发光区、至少一突部、至少一保护层、至少一阻隔层以及一封合层,其中,有机发光区形成于基板之上,且有机发光区具有数个像素;突部形成于基板之上;保护层形成于基板与有机发光区之上;阻隔层形成于保护层及/或突部之上;封合层形成于基板及/或突部之上,且至少披覆阻隔层及/或保护层的周缘。To achieve the above object, an organic light-emitting display panel according to the present invention includes a substrate, at least one organic light-emitting region, at least one protrusion, at least one protective layer, at least one barrier layer, and a sealing layer, wherein the organic light-emitting The region is formed on the substrate, and the organic light-emitting region has several pixels; the protrusion is formed on the substrate; the protection layer is formed on the substrate and the organic light-emitting region; the blocking layer is formed on the protection layer and/or the protrusion; The sealing layer is formed on the substrate and/or the protrusion, and at least covers the periphery of the barrier layer and/or the protection layer.
为达上述目的,依据本发明的一种有机发光显示面板,包含一基板、至少一有机发光区、至少一保护层以及至少一阻隔层,其中,有机发光区形成于基板之上,且有机发光区具有数个像素;保护层形成于基板与有机发光区之上;阻隔层形成于保护层与基板之上,且保护层的其中一层及/或阻隔层的其中一层以光化学气相沉积法形成。To achieve the above object, an organic light-emitting display panel according to the present invention includes a substrate, at least one organic light-emitting region, at least one protective layer, and at least one barrier layer, wherein the organic light-emitting region is formed on the substrate, and the organic light-emitting region The region has several pixels; the protection layer is formed on the substrate and the organic light emitting region; the barrier layer is formed on the protection layer and the substrate, and one of the protection layers and/or one of the barrier layers is formed by photochemical vapor deposition form.
承上所述,本发明的有机发光显示面板利用阻隔层或封合层来阻止水气与氧气从元件正面以及侧面入侵。与现有技术相比,本发明的阻隔层或封合层形成于保护层与基板上,可避免水气与氧气从保护层的边缘穿透至元件内部。同时,本发明的保护层可避免后续所形成的阻隔层或封合层发生不连续的情形,更进一步避免水气与氧气经由孔隙进入元件中。另外,本发明的突部使得封合层呈现波浪状的结构,不仅增加封合层与其它部分(突部、基板)之间的接触面积以及附着力,同时减少热涨冷缩所产生的应力,更可增加水气与氧气穿透的路径长度,从而减缓水气与氧气入侵的速率。再者,本发明的多层阻隔层能够错开等阻隔层之间孔隙的位置,有效地补偿膜层的缺陷。又,本发明中的阻隔层更可由具有不同杨氏模数的阻隔层所组成,将具有较低杨氏模数的阻隔层夹置于具有较高杨氏模数的阻隔层之间以产生缓冲的作用,以降低等阻隔层之间的应力。另外,平坦层、阻隔层或是封合层系可利用光化学气相沉积法形成,利用光化学气相沉积法不仅可以在低温(约300℃以下)下提供足够的成膜速率,又,由于低温所形成的膜层结构较为松散,可减低膜层的内应力,更可减少膜层剥落的可能性。Based on the above, the organic light emitting display panel of the present invention uses a barrier layer or a sealing layer to prevent moisture and oxygen from invading from the front and side of the device. Compared with the prior art, the barrier layer or sealing layer of the present invention is formed on the protective layer and the substrate, which can prevent moisture and oxygen from penetrating from the edge of the protective layer to the inside of the element. At the same time, the protective layer of the present invention can prevent discontinuity of the subsequently formed barrier layer or sealing layer, and further prevent moisture and oxygen from entering the element through pores. In addition, the protrusions of the present invention make the sealing layer present a wavy structure, which not only increases the contact area and adhesion between the sealing layer and other parts (protrusions, substrates), but also reduces the stress caused by thermal expansion and contraction , it can increase the path length of water vapor and oxygen penetration, thereby slowing down the rate of water vapor and oxygen intrusion. Furthermore, the multi-layer barrier layer of the present invention can stagger the positions of the pores between the barrier layers, effectively compensating for the defects of the film layer. Furthermore, the barrier layer in the present invention can be composed of barrier layers with different Young's modulus, and the barrier layer with lower Young's modulus is sandwiched between the barrier layers with higher Young's modulus to produce The buffer acts to reduce the stress between such barrier layers. In addition, the flat layer, barrier layer or sealing layer system can be formed by photochemical vapor deposition, which can not only provide sufficient film formation rate at low temperature (below about 300°C), but also, due to the formation of low temperature The film layer structure is relatively loose, which can reduce the internal stress of the film layer and reduce the possibility of peeling off the film layer.
附图说明 Description of drawings
图1为现有有机发光元件的封装方式之一实施示意图;Fig. 1 is a schematic diagram of implementation of one of the existing packaging methods of organic light-emitting elements;
图2为现有有机发光元件的封装方式的另一实施示意图;Fig. 2 is another implementation schematic diagram of the packaging method of the existing organic light-emitting element;
图3、图4、图5及图6为本发明第一实施例中有机发光显示面板之一组示意图;3, FIG. 4, FIG. 5 and FIG. 6 are schematic diagrams of a set of organic light-emitting display panels in the first embodiment of the present invention;
图7、图8、图9以及图10为本发明第二实施例中有机发光显示面板之一组示意图;以及7, FIG. 8, FIG. 9 and FIG. 10 are a set of schematic diagrams of the organic light emitting display panel in the second embodiment of the present invention; and
图11以及图12为本发明第三实施例中有机发光显示面板之一组示意图。FIG. 11 and FIG. 12 are schematic diagrams of a group of organic light emitting display panels in the third embodiment of the present invention.
图中符号说明:Explanation of symbols in the figure:
1 有机发光显示面板1 organic light emitting display panel
11 基板11 Substrate
12 有机发光区12 organic light-emitting area
121 像素121 pixels
1211 第一电极1211 first electrode
1212 有机功能层1212 Organic functional layer
1213 第二电极1213 Second electrode
13 保护层13 protective layer
14、141、142、143 阻隔层14, 141, 142, 143 barrier layer
15 封合层15 sealing layer
2 有机发光显示面板2 organic light emitting display panel
21 基板21 Substrate
22 有机发光区22 organic light-emitting area
221 像素221 pixels
2211 第一电极2211 First electrode
2212 有机功能层2212 organic functional layer
2213 第二电极2213 Second electrode
23 突部23 protrusion
24 保护层24 layers of protection
25 阻隔层25 barrier layer
26 封合层26 sealing layer
3 有机发光显示面板3 organic light emitting display panel
31 基板31 Substrate
32 有机发光区32 organic light-emitting area
321 像素321 pixels
3211 第一电极3211 first electrode
3212 有机功能层3212 organic functional layer
3213 第二电极3213 Second electrode
33 保护层33 protective layer
34、341、342、343 阻隔层34, 341, 342, 343 barrier layer
41 无机膜41 inorganic membrane
42 有机发光元件42 organic light-emitting elements
51 多层阻绝层结构51 Multi-layer barrier structure
52 有机发光元件52 organic light emitting elements
具体实施方式 Detailed ways
以下将参照相关图示,说明依据本发明较佳实施例的有机发光显示面板。为便于说明,相关图示仅以单一像素显示于后。The organic light emitting display panel according to a preferred embodiment of the present invention will be described below with reference to related figures. For ease of description, the relevant figures are only shown in the following with a single pixel.
第一实施例first embodiment
如图3、图4、图5以及图6所示,本发明第一实施例的有机发光显示面板1,包含一基板11、至少一有机发光区12、至少一保护层13、至少一阻隔层14以及一封合层15,其中,有机发光区12形成于基板11之上,且有机发光区12具有数个像素121;保护层13形成于基板11与有机发光区12之上;阻隔层14形成于保护层13及/或基板11之上;封合层15形成于基板11之上,且至少披覆阻隔层14及/或保护层13的周缘。As shown in FIG. 3, FIG. 4, FIG. 5 and FIG. 6, the organic light emitting
于本实施例中,基板11可以是柔性(flexible)基板或是刚性(rigid)基板。另外,基板11亦可以是塑胶(plastic)基板或是玻璃基板等等。其中,柔性基板与塑胶基板可为聚碳酸酯(polycarbonate,PC)基板、聚酯(polyester,PET)基板、环烯共聚物(cyclic olefincopolymer,COC)基板或金属铬合物基材-环烯共聚物(metallocene-based cyclic olefin copolymer,mCOC)基板。当然,基板11亦可以是硅基板。In this embodiment, the
另外,再请参考图3,像素121依序包含一第一电极1211、至少一有机功能层1212及一第二电极1213,而第一电极1211系位于基板11之上。In addition, referring to FIG. 3 , the
于本实施例中,第一电极1211系利用溅镀(sputtering)方式或是离子电镀(ion plating)方式形成于基板11上。在此,第一电极1211通常作为阳极且其材质通常为一透明的可导电的金属氧化物,例如氧化铟锡(ITO)、氧化铝锌(AlZnO)或是氧化铟锌(IZO)。In this embodiment, the
另外,有机功能层1212通常包含一空穴注入层、一空穴传递层、一发光层、一电子传递层以及一电子注入层(图中未显示)。其中,有机功能层1212利用蒸镀(evaporation)、旋转涂布(spin coating)、喷墨印刷(ink jet printing)或是印刷(printing)等方式形成于第一电极1211上。此外,有机功能层1212所发射的光线可为蓝光、绿光、红光、白光、其他的单色光或单色光组合成的彩色光。In addition, the organic
再请参考图3,第二电极1213位于有机功能层1212上。于此,第二电极1213使用蒸镀或是溅镀(sputtering)等方法形成于有机功能层1212上。另外,第二电极1213的材质可选自但不限定为铝(Al)、钙(Ca)、镁(Mg)、铟(In)、锡(Sn)、锰(Mn)、银(Ag)、金(Au)及含镁的合金(例如镁银(Mg:Ag)合金、镁铟(Mg:In)合金、镁锡(Mg:Sn)合金、镁锑(Mg:Sb)合金及镁碲(Mg:Te)合金)等。Referring to FIG. 3 again, the
接着,再请参考图3,保护层13形成于基板11与有机发光区12之上。于此,保护层13可利用光化学气相沉积法形成于基板11与有机发光区12之上。其中,光化学气相沉积法可以是真空紫外光(VacuumUltra-Violet,VUV)化学气相沉积法。Next, please refer to FIG. 3 again, the
由于光化学气相沉积法是利用光子来分解激发反应气体,所以反应得以在低温(约为300℃以下)环境进行。另外,于本实施例中,由于光化学气相沉积法所形成的保护层13结构较为松散,可降低膜层的内应力,所以能够避免保护层13剥离脱落。当然,保护层13亦可利用溅镀法形成于基板11与有机发光区12之上。Since the photochemical vapor deposition method uses photons to decompose the excited reaction gas, the reaction can be carried out in a low temperature environment (below about 300° C.). In addition, in this embodiment, since the structure of the
再请参考图3,本实施例中的保护层13具有防水以及防氧的功能,可保护有机发光区12不受水气与氧气的影响。再者,保护层13亦用以包覆不平坦的有机发光区12,作为平坦化之用,使得后续形成于保护层13上的膜层(阻隔层14)具有较佳的均匀性,而不会发生不连续的情形。同时,保护层13更可包覆工艺中所存在的微粒子。Please refer to FIG. 3 again, the
另外,再请参考图3,本实施例的保护层13可避免后续所形成的阻隔层14发生不连续的情形,而使得水气与氧气经由孔隙进入。In addition, please refer to FIG. 3 again, the
于本实施例中,保护层13为无机材质,且保护层13选自硅氧化物(SiOx)、类金刚石薄膜(Diamond Like Carbon,DLC)、硅氮化物(SiNx)、氮氧化硅(SiOxNy)以及三氧化二铝(Al2O3)至少其中之一。In this embodiment, the
再请参照图3,本实施例的阻隔层14形成于保护层13与基板11之上。当然,如图4、图5以及图6所示,阻隔层14亦可形成于保护层13之上。Referring to FIG. 3 again, the
其中,阻隔层14可利用光化学气相沉积法形成。当然,阻隔层14亦可利用溅镀法形成。Wherein, the
如上所述,利用光化学气相沉积法所形成的阻隔层14结构较为松散,可降低膜层的内应力,所以能够避免阻隔层14剥离脱落。As mentioned above, the structure of the
于本实施例中,阻隔层14为无机材质,其中,阻隔层14选自氧化硅、类金刚石薄膜、氮化硅、氮氧化硅、三氧化二铝及金属(包括但不限于铝、铜、金以及银)至少其中之一。于此,阻隔层14具有防水性,可进一步提高有机发光显示面板1的可靠度。In this embodiment, the
另外,如图3所示,数个阻隔层14中的至少一层可以利用光化学气相沉积法形成。当然,等阻隔层14中的至少一层亦可以利用溅镀法形成。In addition, as shown in FIG. 3, at least one of the plurality of barrier layers 14 may be formed by photochemical vapor deposition. Of course, at least one of the barrier layers 14 can also be formed by sputtering.
于此,等阻隔层14亦可同时具有防水性以及缓冲功能。例如:如图3所示,阻隔层141、143(材质如氮化硅、氮氧化硅、类金刚石薄膜、三氧化二铝及金属(例如、铝、铜、金以及银))具有极高的防水性,能够有效防止水气以及氧气的入侵;而夹置于阻隔层141、143之间的阻隔层142(材质如氧化硅)则具有较小的机械强度,使其具有缓冲功能,能够有效地降低等阻隔层14的内应力。此种多层次结构系能够错开等阻隔层14之间孔隙的位置,有效地补偿膜层的缺陷,另外更使得水气的穿透路径增长,进一步加强防水的效果。Here, the
另外,再请参考图3及图4,封合层15形成于基板11之上,且至少披覆阻隔层14及/或保护层13的周缘。当然,如图5及图6所示,封合层15亦可完全披覆于阻隔层14及保护层13之上。In addition, referring to FIG. 3 and FIG. 4 again, the
于本实施例中,封合层15可利用光化学气相沉积法形成。当然,封合层15亦可利用溅镀法形成。In this embodiment, the
于本实施例中,封合层15为无机材质,且选自氧化硅、类金刚石薄膜、氮化硅、氮氧化硅、三氧化二铝及金属(包括但不限于铝、铜、金以及银)至少其中之一。于此,封合层15系具有防水性,可进一步提高有机发光显示面板1的可靠度。In this embodiment, the
第二实施例second embodiment
另外,再请参照图7、图8、图9以及图10,本发明第二实施例的有机发光显示面板2,包含一基板21、至少一有机发光区22、至少一突部23、至少一保护层24、至少一阻隔层25以及一封合层26,其中,有机发光区22形成于基板21之上,且有机发光区22具有数个像素221;突部23形成于基板21之上;保护层24形成于基板21与有机发光区22之上;阻隔层25形成于保护层24及/或突部23之上;封合层26形成于基板21及/或突部23之上,且至少披覆阻隔层25及/或保护层24的周缘。In addition, referring to FIG. 7, FIG. 8, FIG. 9 and FIG. 10, the organic light-emitting
于本实施例中,像素221依序包含一第一电极2211、至少一有机功能层2212及一第二电极2213,而第一电极2211位于基板21之上。In this embodiment, the
于本实施例中,基板21、有机发光区22、像素221、第一电极2211、有机功能层2212及第二电极2213的特征与功能与第一实施例中的相同元件相同,在此不再赘述。In this embodiment, the features and functions of the
再请参考图7、图8、图9以及图10,保护层24可避免后续所形成的阻隔层25发生不连续的情形,而使得水气与氧气经由孔隙进入。另外,保护层24的特征与功能皆与第一实施例的保护层13相同,在此亦不再赘述。Referring again to FIG. 7 , FIG. 8 , FIG. 9 and FIG. 10 , the
接着,再请参考图7、图8与图9,阻隔层25形成于保护层24之上。再请参考图10,当然,阻隔层25亦可形成于保护层24以及突部23之上。于本实施例中,阻隔层25的其余特征与功能皆与第一实施例的阻隔层14相同,在此亦不再赘述。Next, referring to FIG. 7 , FIG. 8 and FIG. 9 , the
再请参考图7、图8、图9以及图10,突部23形成于基板21之上。于本实施例中,突部23相互连接(如图8所示)。当然,突部23亦可以独立设置(如图7、图9以及图10所示)。Referring to FIG. 7 , FIG. 8 , FIG. 9 and FIG. 10 , the protruding
另外,于本实施例中,突部23的材质系为防水性材料,例如但不限定为感光材料(例如光阻)或二氧化硅。In addition, in this embodiment, the material of the protruding
再者,本实施例的突部23的形状可以是点块状或是长条块状等等。另外,于本实施例中,如图7、图8、图9以及图10所示,突部23可避免后续所形成的封合层26发生不连续的情形,而使得水气与氧气经由孔隙进入。Furthermore, the shape of the protruding
再请参考图7与图10,封合层26披覆阻隔层25及/或保护层24的周缘。当然,如图8与图9所示,封合层26完全披覆于阻隔层25、保护层24、突部23与基板21之上。由于部分的封合层26形成于突部23之上,使得封合层26呈现类似波浪状的结构,此种结构不仅增加了封合层26与其它部分(突部23、基板21)之间的接触面积以及附着力,同时减少热涨冷缩所产生的应力,更可增加水气与氧气穿透的路径长度,从而减缓水气与氧气入侵的速率。Referring to FIG. 7 and FIG. 10 again, the
第三实施例third embodiment
如图11及图12所示,依据本发明第三实施例的有机发光显示面板3,包含一基板31、至少一有机发光区32、至少一保护层33以及至少一阻隔层34,其中,有机发光区32形成于基板31之上,且有机发光区32具有数个像素321;保护层33形成于基板31与有机发光区32之上;阻隔层34形成于保护层33与基板31之上,且保护层33的其中一层及/或阻隔层34(341、342、343)的其中一层以光化学气相沉积法形成。As shown in FIG. 11 and FIG. 12, the organic light emitting display panel 3 according to the third embodiment of the present invention includes a
于本实施例中,像素321依序包含一第一电极3211、至少一有机功能层3212及一第二电极3213,而第一电极3211位于基板31之上。In this embodiment, the
于本实施例中,基板31、有机发光区32、像素321、第一电极3211、有机功能层3212、第二电极3213、保护层33以及阻隔层34、341、342、343的特征与功能皆与第一实施例中的相同元件相同,在此亦不再赘述。In this embodiment, the features and functions of the
于本实施例中,更可包含一封合层(图中未示)披覆于阻隔层34与基板31之上。In this embodiment, a sealing layer (not shown in the figure) may be further included to cover the
本发明的有机发光显示面板利用阻隔层或封合层来阻止水气与氧气从元件正面以及侧面入侵。与现有技术相比,本发明的阻隔层或封合层形成于保护层与基板上,可避免水气与氧气从保护层的边缘穿透至元件内部。同时,保护层可避免后续所形成的阻隔层或封合层发生不连续的情形,更进一步避免水气与氧气经由孔隙进入元件中。另外,本发明的突部使得封合层呈现波浪状的结构,不仅增加封合层与其它部分(突部、基板)之间的接触面积以及附着力,同时减少热涨冷缩所产生的应力,更可增加水气与氧气穿透的路径长度,以减缓水气与氧气入侵的速率。再者,本发明的多层阻隔层能够错开阻隔层之间孔隙的位置,有效地补偿膜层的缺陷。又,本发明中的阻隔层更可由具有不同杨氏模数的阻隔层所组成,将具有较低杨氏模数的阻隔层夹置于具有较高杨氏模数的阻隔层之间以产生缓冲的作用,以降低阻隔层之间的应力。另外,平坦层、阻隔层或是封合层可利用光化学气相沉积法形成,利用光化学气相沉积法不仅可以在低温(约300℃以下)下提供足够的成膜速率,又,由于低温所形成的膜层结构较为松散,可减低膜层的内应力,更可减少膜层剥落的可能性。The organic light-emitting display panel of the present invention uses a barrier layer or a sealing layer to prevent moisture and oxygen from invading from the front and side of the device. Compared with the prior art, the barrier layer or sealing layer of the present invention is formed on the protective layer and the substrate, which can prevent moisture and oxygen from penetrating from the edge of the protective layer to the inside of the element. At the same time, the protective layer can prevent discontinuity of the subsequently formed barrier layer or sealing layer, and further prevent moisture and oxygen from entering the element through the pores. In addition, the protrusions of the present invention make the sealing layer present a wavy structure, which not only increases the contact area and adhesion between the sealing layer and other parts (protrusions, substrates), but also reduces the stress caused by thermal expansion and contraction , it can increase the path length of water vapor and oxygen penetration, so as to slow down the rate of water vapor and oxygen intrusion. Furthermore, the multi-layer barrier layer of the present invention can stagger the positions of the pores between the barrier layers, effectively compensating for the defects of the film layer. Furthermore, the barrier layer in the present invention can be composed of barrier layers with different Young's modulus, and the barrier layer with lower Young's modulus is sandwiched between the barrier layers with higher Young's modulus to produce The role of the buffer to reduce the stress between the barrier layers. In addition, the flat layer, barrier layer or sealing layer can be formed by photochemical vapor deposition, which can not only provide sufficient film formation rate at low temperature (below about 300 ° C), but also, due to the formation of low temperature The film structure is relatively loose, which can reduce the internal stress of the film layer and reduce the possibility of peeling off the film layer.
以上所述仅为举例性,而非为限制性者。任何未脱离本发明的精神与范畴,而对其进行的等效修改或变更,均应包含于后附的申请专利范围中。The above descriptions are illustrative only, not restrictive. Any equivalent modification or change made without departing from the spirit and scope of the present invention shall be included in the scope of the appended patent application.
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US20020125822A1 (en) * | 1998-12-16 | 2002-09-12 | Graff Gordon L. | Environmental barrier material for organic light emitting device and method of making |
US20020125866A1 (en) * | 2001-01-17 | 2002-09-12 | Stmicroelectronics, S.A. | Voltage regulator with an improved efficiency |
US20030117068A1 (en) * | 2001-12-20 | 2003-06-26 | Stephen Forrest | Organic optoelectronic device structures |
US20030164674A1 (en) * | 2002-01-15 | 2003-09-04 | Seiko Epson Corporation | Sealing structure with barrier membrane for electronic element, display device, electronic apparatus, and fabrication method for electronic element |
-
2003
- 2003-10-29 CN CNB2003101044174A patent/CN100466328C/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6445132A (en) * | 1987-08-13 | 1989-02-17 | Seiko Epson Corp | Semiconductor device |
JPH01283937A (en) * | 1988-05-11 | 1989-11-15 | Seiko Epson Corp | Method for forming surface protective film of organic polymer electronic device |
US20020125822A1 (en) * | 1998-12-16 | 2002-09-12 | Graff Gordon L. | Environmental barrier material for organic light emitting device and method of making |
US20020125866A1 (en) * | 2001-01-17 | 2002-09-12 | Stmicroelectronics, S.A. | Voltage regulator with an improved efficiency |
US20030117068A1 (en) * | 2001-12-20 | 2003-06-26 | Stephen Forrest | Organic optoelectronic device structures |
US20030164674A1 (en) * | 2002-01-15 | 2003-09-04 | Seiko Epson Corporation | Sealing structure with barrier membrane for electronic element, display device, electronic apparatus, and fabrication method for electronic element |
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