CN100452572C - Mid-infrared high-power laser source based on erbium-ytterbium co-doped double-clad fiber - Google Patents
Mid-infrared high-power laser source based on erbium-ytterbium co-doped double-clad fiber Download PDFInfo
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- KWMNWMQPPKKDII-UHFFFAOYSA-N erbium ytterbium Chemical compound [Er].[Yb] KWMNWMQPPKKDII-UHFFFAOYSA-N 0.000 title claims description 55
- 239000004065 semiconductor Substances 0.000 claims abstract description 28
- 239000013078 crystal Substances 0.000 claims abstract description 22
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- 229910052691 Erbium Inorganic materials 0.000 abstract description 5
- 229910052769 Ytterbium Inorganic materials 0.000 abstract description 5
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 abstract 4
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 abstract 4
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Abstract
一种基于铒镱共掺双包层光纤的中红外高功率激光光源,其构成包括:高功率半导体激光器和自该高功率半导体激光器的输出端依次设置的传能光纤、第一光纤光栅、第二光纤光栅、铒镱共掺双包层光纤、准直透镜、聚焦透镜、非线性晶体和准直输出透镜。所述的铒镱共掺双包层光纤熔接有对1.06μm附近波长λ1和对1.56μm附近波长λ2具有高反射率的第一光纤光栅、第二光纤光栅与铒镱共掺双包层光纤的另一端的端面构成谐振腔,从而实现波长为λ1和λ2的高功率激光输出并通过消色差透镜聚焦于非线性晶体,在非线性晶体内进行差频,经准直输出透镜输出中红外光高功率激光。本发明具有激光转换效率高、结构简单、体积小、重量轻、系统稳定性高等优点。
A mid-infrared high-power laser light source based on erbium and ytterbium co-doped double-clad fiber, which consists of: a high-power semiconductor laser and an energy-transmitting fiber arranged sequentially from the output end of the high-power semiconductor laser, a first fiber grating, and a third fiber grating. Two fiber gratings, erbium and ytterbium co-doped double-clad fibers, collimating lenses, focusing lenses, nonlinear crystals and collimating output lenses. The erbium and ytterbium co-doped double-clad optical fiber is spliced with a first fiber grating and a second fiber grating that have high reflectivity for wavelength λ 1 near 1.06 μm and wavelength λ 2 near 1.56 μm and erbium and ytterbium co-doped double cladding. The end face of the other end of the optical fiber forms a resonant cavity, thereby achieving high-power laser output with wavelengths λ 1 and λ 2 and focusing on the nonlinear crystal through the achromatic lens. The difference frequency is performed in the nonlinear crystal and output through the collimated output lens. Mid-infrared light high-power laser. The invention has the advantages of high laser conversion efficiency, simple structure, small size, light weight, and high system stability.
Description
技术领域 technical field
本发明涉及高功率中红外激光光源,特别是一种基于铒镱共掺双包层光纤的中红外高功率激光光源。The invention relates to a high-power mid-infrared laser source, in particular to a mid-infrared high-power laser source based on erbium-ytterbium co-doped double-clad fiber.
背景技术 Background technique
近年来,激光器的输出波长扩展到中红外已经受到越来越多的关注,不仅是因为气体分子在中红外波长区域的吸收谱线强度要比近红外波段高几个量级,因而中红外激光光谱技术有着非常重要的应用前景,还因为在3~5μm波段是大气的窗口波段,在该波段内激光对大雾、烟尘具有较强的穿透力,在海平面上传输受气体分子散射小,因此适合运用在激光雷达、光电对抗等领域。目前,获得这一波长范围内中红外激光的技术主要有,氟氘化学激光器直接产生,光参量振荡器(OPO)及差频(DFG)产生等多种方法来获得这一波长范围内的激光。化学激光器的能量分布在较宽的光谱范围内,但结构庞大,造价昂贵;光参量振荡器输出光能量低,光束质量较差;而差频相对于光参量振荡器和化学激光器,有很多优点,如可调谐范围灵活、全固化结构紧凑、输出能量高等。In recent years, the extension of the output wavelength of lasers to the mid-infrared has received more and more attention, not only because the absorption line intensity of gas molecules in the mid-infrared wavelength region is several orders of magnitude higher than that in the near-infrared region, so the mid-infrared laser Spectral technology has a very important application prospect, and because the 3-5μm band is the window band of the atmosphere, in this band the laser has a strong penetrating power to the fog and smoke, and the transmission on the sea level is less affected by the scattering of gas molecules. , so it is suitable for use in lidar, photoelectric countermeasures and other fields. At present, the technologies for obtaining mid-infrared lasers in this wavelength range mainly include direct generation of fluorine-deuterium chemical lasers, optical parametric oscillator (OPO) and difference frequency (DFG) generation, etc. to obtain lasers in this wavelength range. . The energy distribution of chemical lasers is in a wide spectral range, but the structure is huge and expensive; the output light energy of optical parametric oscillators is low, and the beam quality is poor; compared with optical parametric oscillators and chemical lasers, the difference frequency has many advantages , such as flexible tunable range, compact all-cured structure, high output energy, etc.
采用差频产生中红外激光的在先技术中,需要两台不同输出波长的Nd:YAG激光器,以产生4μm波段的中红外激光。参见在先技术[光学与光电技术.3:26-28,2005],固体Nd:YAG激光器的效率相对较低,并且高功率运转时激光光束质量低,导致差频转换效率低;另外,由于采用了两台激光器,系统的成本高,稳定性不高。在先技术中,使用铒镱共掺光纤作为激光介质,通过采取抑制1.06μm的激光振荡来获得1.5μm波长的激光,输出激光的光谱带宽较大。参见在先技术[OPTICSEXPRESS.14:3936-3941,2006],在这种技术中,由于采用镀膜腔片构成谐振腔,不能实现激光器的全光纤化,其推广应用受到一定限制。In the prior art of generating mid-infrared laser by difference frequency, two Nd:YAG lasers with different output wavelengths are required to generate mid-infrared laser in the 4 μm band. See the prior art [Optics and Optoelectronics Technology. 3: 26-28, 2005], the efficiency of the solid Nd:YAG laser is relatively low, and the laser beam quality is low during high power operation, resulting in low difference frequency conversion efficiency; in addition, due to Two lasers are used, the cost of the system is high, and the stability is not high. In the prior art, the erbium-ytterbium co-doped fiber is used as the laser medium, and the laser with a wavelength of 1.5 μm is obtained by suppressing the laser oscillation of 1.06 μm, and the spectral bandwidth of the output laser is relatively large. See the prior art [OPTICSEXPRESS.14: 3936-3941, 2006]. In this technology, since the resonant cavity is formed by the coated cavity plate, the full-fiber laser cannot be realized, and its popularization and application are limited.
发明内容 Contents of the invention
本发明要解决的技术问题在于克服上述在先技术的不足,提供一种基于铒镱共掺双包层光纤的中红外高功率激光光源,以提高激光光源的转换效率和输出稳定性,获得高功率、高光束质量的中红外激光输出,实现结构光纤化,以利于激光光源的小型化。The technical problem to be solved by the present invention is to overcome the deficiencies of the above-mentioned prior art, and provide a mid-infrared high-power laser source based on erbium-ytterbium co-doped double-clad fiber, so as to improve the conversion efficiency and output stability of the laser source, and obtain high Mid-infrared laser output with high power and high beam quality realizes structural fiber optics to facilitate the miniaturization of laser light sources.
本发明的基本思想是:采用高功率半导体激光器泵浦熔接有两个光纤光栅的铒镱共掺双包层光纤,实现了1.06μm附近和1.56μm附近的双波长激光的同时输出,然后利用非线性晶体实现两个波长激光的差频,获得高功率的中红外激光输出。The basic idea of the present invention is to use a high-power semiconductor laser to pump an erbium-ytterbium co-doped double-clad fiber that is fused with two fiber gratings to realize the simultaneous output of dual-wavelength lasers near 1.06 μm and 1.56 μm, and then use non- The linear crystal realizes the difference frequency of two wavelength lasers to obtain high-power mid-infrared laser output.
本发明的技术解决方案如下:Technical solution of the present invention is as follows:
一种基于铒镱共掺双包层光纤的中红外高功率激光光源,其构成包括:高功率半导体激光器和自该高功率半导体激光器的输出端依次设置的:传能光纤、第一光纤光栅、第二光纤光栅、铒镱共掺双包层光纤、准直透镜、聚焦透镜、非线性晶体和准直输出透镜,所述的铒镱共掺双包层光纤的输出端位于所述的准直透镜的前焦点,所述的聚焦透镜的后焦点和准直输出透镜的前焦点共焦,该焦点位于所述的非线性晶体之中,所述的高功率半导体激光器发出的泵浦光通过传能光纤耦合到铒镱共掺双包层光纤,在所述的传能光纤和铒镱共掺双包层光纤之间,熔接有分别对中心波长λ1和中心波长λ2高反的第一光纤光栅和第二光纤光栅,分别作铒镱共掺双包层光纤激光器的λ1和λ2激光波长的谐振腔镜,铒镱共掺双包层光纤的另一端垂直轴线切割,作为谐振腔的输出镜。A mid-infrared high-power laser light source based on erbium-ytterbium co-doped double-clad fiber, which consists of: a high-power semiconductor laser and sequentially arranged from the output end of the high-power semiconductor laser: an energy transmission fiber, a first fiber grating, The second fiber grating, erbium-ytterbium co-doped double-clad fiber, collimating lens, focusing lens, nonlinear crystal and collimating output lens, the output end of the erbium-ytterbium co-doped double-clad fiber is located at the collimating The front focus of the lens, the back focus of the focusing lens and the front focus of the collimating output lens are confocal, the focus is located in the nonlinear crystal, and the pumping light emitted by the high-power semiconductor laser passes through the The energy fiber is coupled to the erbium-ytterbium co-doped double-clad fiber, and between the energy-transmitting fiber and the erbium-ytterbium co-doped double-clad fiber, there are respectively the first high-reflection to the center wavelength λ 1 and the center wavelength λ 2 The fiber grating and the second fiber grating are respectively used as resonant cavity mirrors for the λ 1 and λ 2 laser wavelengths of the erbium-ytterbium co-doped double-clad fiber laser, and the other end of the erbium-ytterbium co-doped double-clad fiber is cut vertically as a resonant cavity output mirror.
所述的铒镱共掺双包层光纤的纤芯为圆形,直径为20μm,纤芯数值孔径为0.07;其内包层为六角形或八角形,直径为200μm或400μm,内包层数值孔径为0.46。The core of the erbium-ytterbium co-doped double-clad fiber is circular, with a diameter of 20 μm and a core numerical aperture of 0.07; its inner cladding is hexagonal or octagonal, with a diameter of 200 μm or 400 μm, and the inner cladding numerical aperture is 0.46.
所述的第一光纤光栅是中心波长λ1=1.06μm具有高反射率的双包层光纤光栅,其光纤光栅仅仅刻写在圆形纤芯区域,反射率大于90%;其纤芯和内包层的直径和数值孔径与所述的铒镱共掺双包层光纤的相应参数相同。The first fiber grating is a double-clad fiber grating with a central wavelength of λ 1 =1.06 μm and a high reflectivity, and its fiber grating is only written in the circular core area, with a reflectivity greater than 90%; its core and inner cladding The diameter and numerical aperture are the same as the corresponding parameters of the erbium-ytterbium co-doped double-clad fiber.
所述的第二光纤光栅是中心波长λ2=1.56μm具有高反射率的双包层光纤光栅,其光纤光栅仅仅刻写在圆形纤芯区域,反射率大于90%;其纤芯和内包层的直径和数值孔径与所述的铒镱共掺双包层光纤的参数相同。The second fiber grating is a double-clad fiber grating with a central wavelength of λ 2 =1.56 μm and a high reflectivity. The fiber grating is only written in the circular core area, and the reflectivity is greater than 90%. The core and inner cladding The diameter and numerical aperture are the same as those of the erbium-ytterbium co-doped double-clad fiber.
所述的高功率半导体激光器的中心波长同铒镱共掺双包层光纤的吸收波长相匹配,为975nm或915nm,所述的高功率半导体激光器是多个半导体激光器阵列的组合或多个单管半导体激光器的组合。The central wavelength of the high-power semiconductor laser matches the absorption wavelength of the erbium-ytterbium co-doped double-clad fiber, which is 975nm or 915nm. The high-power semiconductor laser is a combination of multiple semiconductor laser arrays or multiple single-tube combination of semiconductor lasers.
所述的准直透镜是由一球面透镜组构成的对波长λ1和λ2消色差的准直透镜,其各个面均镀有该两个波长的增透膜,实现两个波长激光的高效率准直输出。Described collimating lens is the collimating lens that is made of a spherical lens group to wavelength λ 1 and λ 2 achromatism, and its each surface all is coated with the anti-reflection film of these two wavelengths, realizes the high-resolution of two wavelength lasers efficiency collimated output.
所述的聚焦透镜是由一球面透镜组构成的对波长λ1和λ2消色差的聚焦透镜,或是由非球面透镜构成的消色差透镜,并对其各个面均镀有该两个波长的增透膜。使铒镱共掺双包层光纤产生的双波长激光更有效地聚焦到非线性晶体中,实现高效的差频转换。Described focusing lens is the focusing lens to wavelength λ 1 and λ 2 achromats that is made of a spherical lens group, or is the achromatic lens that is made of aspheric lens, and it is all coated with these two wavelengths on each surface anti-reflection coating. The dual-wavelength laser generated by the erbium-ytterbium co-doped double-clad fiber can be more effectively focused into the nonlinear crystal to realize efficient difference frequency conversion.
所述的非线性晶体是LiNbO3晶体、MgO:LiNbO3晶体或其它非线性晶体。所述的非线性晶体具有较高的激光损伤阈值和大非线性系数,其在1μm~4μm波长范围内能够通过调整角度或温度控制实现相位匹配,通过其对波长λ1和λ2的差频转换,获得高效率、高功率的中红外激光输出。The nonlinear crystal is LiNbO 3 crystal, MgO:LiNbO 3 crystal or other nonlinear crystal. The nonlinear crystal has a high laser damage threshold and a large nonlinear coefficient. It can achieve phase matching by adjusting the angle or temperature control in the wavelength range of 1 μm to 4 μm. Through its difference frequency conversion of wavelengths λ1 and λ2, Obtain high-efficiency, high-power mid-infrared laser output.
本发明的技术效果:Technical effect of the present invention:
本发明采用高功率半导体激光器泵浦熔接有两个光纤光栅的铒镱共掺双包层光纤,实现了1.06μm和1.56μm的双波长激光的高功率、高光束质量的激光同时输出,而在先技术,要获得两个波长的激光输出,必须采用两个激光器,因而,本发明具有系统结构简单、效率高的优点,且会大大降低系统成本。The present invention uses a high-power semiconductor laser to pump an erbium-ytterbium co-doped double-clad fiber that is welded with two fiber gratings, and realizes the simultaneous output of high-power, high-beam-quality lasers of 1.06 μm and 1.56 μm dual-wavelength lasers, while in In the prior art, two lasers must be used in order to obtain two wavelengths of laser output. Therefore, the present invention has the advantages of simple system structure and high efficiency, and can greatly reduce system cost.
本发明采用两个光纤光栅分别作为两个不同波长激光的谐振腔镜,实现两个波长激光的同时输出,光纤光栅的采用使得双波长光纤激光器实现了全光纤化,并且有利于窄谱线激光的输出,提高非线性差频转换效率。The present invention adopts two fiber gratings as resonant cavity mirrors of two lasers with different wavelengths to realize the simultaneous output of two wavelengths of lasers. The adoption of fiber gratings makes the dual-wavelength fiber lasers realize full-fiberization, and is beneficial to narrow-spectrum line lasers. The output improves the nonlinear difference frequency conversion efficiency.
在本发明中,采用LiNbO3晶体或MgO:LiNbO3晶体对高光束质量的两个波长激光进行差频,可以实现波长在3.3μm左右的高功率的中红外激光输出。In the present invention, LiNbO 3 crystal or MgO:LiNbO 3 crystal is used to perform frequency difference between two wavelength lasers with high beam quality, and high-power mid-infrared laser output with a wavelength of about 3.3 μm can be realized.
附图说明 Description of drawings
图1为本发明的基于铒镱共掺双包层光纤的中红外高功率激光光源的结构示意图。Fig. 1 is a schematic structural diagram of a mid-infrared high-power laser source based on Erbium-Ytterbium co-doped double-clad fiber of the present invention.
具体实施方式 Detailed ways
以下结合附图与实施例对本发明作进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
先请参阅图1,图1为本发明基于铒镱共掺双包层光纤的中红外高功率激光光源的结构示意图。,由图可见,本发明基于铒镱共掺双包层光纤的中红外高功率激光光源的构成包括高功率半导体激光器1和自该高功率半导体激光器1的输出端依次设置的:传能光纤2、第一光纤光栅3、第二光纤光栅4、铒镱共掺双包层光纤5、准直透镜6、聚焦透镜7、非线性晶体8和准直输出透镜9,所述的铒镱共掺双包层光纤5的输出端10位于所述的准直透镜6的前焦点,所述的聚焦透镜7的后焦点和准直输出透镜9的前焦点共焦,该焦点位于所述的非线性晶体8之中,所述的高功率半导体激光器1发出的泵浦光通过传能光纤2耦合到铒镱共掺双包层光纤5,在所述的传能光纤2和铒镱共掺双包层光纤5之间,熔接有分别对中心波长λ1和中心波长λ2高反的第一光纤光栅3和第二光纤光栅4,分别作铒镱共掺双包层光纤激光器的λ1和λ2激光波长的谐振腔镜,铒镱共掺双包层光纤5的另一端10垂直轴线切割,作为谐振腔的输出镜。Please refer to FIG. 1 first. FIG. 1 is a schematic structural diagram of a mid-infrared high-power laser source based on an Er-Yb co-doped double-clad fiber according to the present invention. As can be seen from the figure, the composition of the mid-infrared high-power laser light source based on the erbium-ytterbium co-doped double-clad fiber of the present invention includes a high-power semiconductor laser 1 and sequentially arranged from the output end of the high-power semiconductor laser 1:
所述的高功率半导体激光器1发出的泵浦光通过传能光纤2耦合到铒镱共掺双包层光纤5,提供铒镱共掺双包层光纤纤芯的粒子数反转,在传能光纤2和铒镱共掺双包层光纤5之间,熔接有分别对波长λ1和λ2具有高反射率的第一光纤光栅和4,分别作为λ1和λ2激光波长的谐振腔镜,λ1在1.06μm附近,λ2在1.56μm附近,光纤的另一端垂直轴线切割,作为激光的输出镜10;从垂直切割光纤端面10输出的波长为λ1和λ2的激光通过准直透镜准直后,再通过聚焦透镜共同聚焦于非线性晶体8,两个波长的激光在非线性晶体8内通过差频作用,产生波长为(λ1×λ2)/(λ2-λ1)中红外激光,并通过准直输出透镜实现准直输出。The pumping light emitted by the high-power semiconductor laser 1 is coupled to the erbium-ytterbium co-doped double-clad fiber 5 through the energy-transfer
下面是本发明一个具体实施例的物理参数:Below is the physical parameter of a specific embodiment of the present invention:
如图1所示,所述的高功率半导体激光器1的中心波长在975nm,其由多个半导体激光阵列经光束整形后,通过传能光纤2耦合输出,输出激光功率达300W。传能光纤2的纤芯直径为400μm,数值孔径为0.44。传能光纤2与第一光纤光栅3直接熔接,第一光纤光栅3的中心波长λ1=1064nm,反射率为97%,为双包层光纤光栅,光栅仅刻写在纤芯区域,纤芯直径为20μm,数值孔径为0.06,内包层横界面为圆形,直径400μm,数值孔径为0.46。第一光纤光栅3的另一端与第二光纤光栅4熔接,第二光纤光栅4的中心波长λ2=1565nm,反射率为97%,第二光纤光栅4也为双包层光纤光栅,其内包层和纤芯参数同第一光纤光栅3的参数相同。第二光纤光栅4的另一端与铒镱共掺双包层光纤5熔接。As shown in FIG. 1 , the central wavelength of the high-power semiconductor laser 1 is 975nm. After beam shaping by multiple semiconductor laser arrays, the high-power semiconductor laser 1 is coupled and output through the energy-transmitting
铒镱共掺双包层光纤5为大模场面积的双包层光纤,纤芯中铒离子和镱离子按照一定的比例共同掺杂,Yb3+的浓度为1wt%,Er3+的浓度为0.125wt%。掺杂纤芯为圆形,直径为20μm,数值孔径为0.06左右,内包层形状为八角形,直径400μm,数值孔径约为0.46;其一端与光纤光栅4熔接,另一端直接垂直光纤轴线切割,作为激光的输出端10。铒镱共掺双包层光纤5对975nm的小信号吸收约为2dB/m,光纤的长度为6.5m。高功率半导体激光器1发出的975nm的泵浦光经传能光纤2,第一光纤光栅3和第二光纤光栅4高效率地耦合到铒镱共掺双包层光纤5中,为掺杂纤芯中的粒子数反转提供能量,第二光纤光栅4和光纤端面10构成λ2=1565nm的一对激光谐振腔,第一光纤光栅3和光纤端面10构成λ1=1064nm另一对的激光谐振腔,从而可实现1064nm和1565nm两个波长激光的同时运转。The erbium-ytterbium co-doped double-clad fiber 5 is a double-clad fiber with a large mode field area. Erbium ions and ytterbium ions are co-doped in a certain proportion in the fiber core, the concentration of Yb 3+ is 1wt%, and the concentration of Er 3+ It is 0.125wt%. The doped fiber core is circular with a diameter of 20 μm and a numerical aperture of about 0.06. The inner cladding is octagonal in shape with a diameter of 400 μm and a numerical aperture of about 0.46; one end is welded to the
从光纤端面10输出的双波长激光通过焦距f=8mm的消色差复合准直透镜6准直后,再由焦距f=40mm的消色差复合聚焦透镜7聚焦于非线性晶体8,准直透镜6和聚焦透镜7的各个面均镀对波长λ1和λ2增透膜。非线性晶体8为LiNbO3,其非线性系数deff=0.88×10-8esu,对应晶体切割角为θ=48.5°,,非线性晶体8的长度为12mm。注入非线性晶体8的波长λ1=1064nm的激光和波长λ2=1565nm的激光在LiNbO3中进行差频,从而获得波长为(λ1×λ2)/(λ2-λ1)=3.3μm的中红外激光,准直输出透镜9对于3.3μm波长的焦距为40mm,实现对中红外激光的准直。本实施例的基于铒镱共掺双包层光纤的中红外激光光源,在高功率半导体激光器的输出功率为300W时,将能实现波长为3.3μm的近20W的高功率、高光束质量的中红外激光输出。The dual-wavelength laser output from the
综上所述,本发明基于铒镱共掺双包层光纤的中红外高功率激光光源,采用两个高反射率的光纤光栅分别作为1.06μm附近波长和1.56μm附近波长的谐振腔镜,采用一个高功率半导体激光器作为泵浦源,一段铒镱共掺的双包层光纤作为激光增益介质,从一个全光纤化的光纤激光器中实现了两个波长的高功率激光输出;高光束质量的两个波长的激光通过非线性晶体进行差频,以获得高功率、高光束质量的中红外激光输出。与在先技术相比,本发明具有结构简单、稳定性好、转换效率高的特点,并且能够获得高功率、高光束质量的中红外激光输出。In summary, the present invention is based on the mid-infrared high-power laser source of erbium-ytterbium co-doped double-clad fiber, using two high-reflectivity fiber gratings as resonant cavity mirrors with a wavelength near 1.06 μm and a wavelength near 1.56 μm respectively. A high-power semiconductor laser is used as the pump source, and a section of erbium-ytterbium co-doped double-clad fiber is used as the laser gain medium. Two wavelengths of high-power laser output are realized from an all-fiber fiber laser; two high-beam quality The laser with two wavelengths is frequency-differenced by a nonlinear crystal to obtain a mid-infrared laser output with high power and high beam quality. Compared with the prior art, the invention has the characteristics of simple structure, good stability and high conversion efficiency, and can obtain mid-infrared laser output with high power and high beam quality.
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