CN100451539C - Method for high quality measure of tiny rotation angle using digital interferometer - Google Patents
Method for high quality measure of tiny rotation angle using digital interferometer Download PDFInfo
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- CN100451539C CN100451539C CNB2006100170309A CN200610017030A CN100451539C CN 100451539 C CN100451539 C CN 100451539C CN B2006100170309 A CNB2006100170309 A CN B2006100170309A CN 200610017030 A CN200610017030 A CN 200610017030A CN 100451539 C CN100451539 C CN 100451539C
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Abstract
一种采用数字干涉仪实施高精度测量微小转角的方法属于光学检测技术领域中涉及的一种测量微小转角的方法。要解决的技术问题是：提供一种采用数字干涉仪实施高精度测量微小转角的方法。技术方案是：第一、准备一台数字干涉仪和一块标准平面镜；第二、将标准平面镜安装在被测转角的物体上；第三、调整测试光路，使数字干涉仪的视场光轴与标准平面镜的光轴重合；第四、用数字干涉仪测试安装在被测物上的标准平面镜初始状态的第一面形精度PV值，调整被测物转动后再测标准平面镜的第二面形精度PV值；第五、将两次测得的PV值相减的差值Δ·λ代入公式θ≈sinθ≈Δ·λ/D，得到被测转角θ，式中λ为干涉仪的工作波长，D是标准平面镜的直径。该方法简便易行。
The invention discloses a method for measuring tiny rotation angles with high precision by using a digital interferometer, which belongs to a method for measuring tiny rotation angles in the technical field of optical detection. The technical problem to be solved is to provide a method for implementing high-precision measurement of tiny rotation angles by using a digital interferometer. The technical solution is: first, prepare a digital interferometer and a standard plane mirror; second, install the standard plane mirror on the object of the measured rotation angle; third, adjust the test optical path so that the optical axis of the field of view of the digital interferometer is in line with the The optical axes of the standard flat mirror coincide; Fourth, use a digital interferometer to test the PV value of the first surface shape accuracy of the standard flat mirror installed on the measured object in the initial state, adjust the measured object to rotate and then measure the second surface shape of the standard flat mirror Accurate PV value; Fifth, substituting the difference Δ·λ between the two measured PV values into the formula θ≈sinθ≈Δ·λ/D to obtain the measured rotation angle θ, where λ is the working wavelength of the interferometer , D is the diameter of the standard plane mirror. The method is simple and easy to implement.
Description
One. technical field
The invention belongs to a kind of method of measuring micro-corner that relates in the optical detective technology field.
Two. background technology
Micro-corner usually is meant that at technos this situation often appears at high-tech area less than the corner of inferior rad magnitude, for example is used for developments such as space optics instrument, fine measuring instrument and rigorous analysis instrument.The present invention is based on the needs in space soft X-ray-extreme ultraviolet waveband helioscope (EUT) development and produces, and needs the secondary mirror rotating mechanism is carried out the measurement of inferior rad precision in the EUT development.Yet, in existing angle measurement technique,, all belonging to the bigger angle measurement of angle measurement scope such as optical electric axial angle encoder angle measurement, the angle measurement of circle raster method, parallel light tube angle measurement or the like, inapplicable micro-corner is measured." a kind of method that adopts digital interference instrument to implement the high-acruracy survey micro-corner " that the present invention proposes realized the measurement of inferior rad precision, satisfied the needs of development work.Simultaneously, simple, the easy row of this method, measurement result is reliable, can measure the inferior rad of any device and rotate, and is of universal significance.
Three. summary of the invention
Be difficult to realize measurement to micro-corner in order to overcome prior art, the inventor sets up a kind of method of measuring micro-corner on the basis of summing up many years of experience.
The technical problem to be solved in the present invention is: a kind of method that adopts digital interference instrument to implement the high-acruracy survey micro-corner is provided.The technical scheme of technical solution problem is:
The first, prepare a digital interference instrument and a standard flat mirror;
The second, the standard flat mirror is installed on the object of tested corner;
Three, adjust optical system for testing, make the visual field optical axis of digital interference instrument and the optical axis coincidence of standard flat mirror;
Four, be installed in the first surface figure accuracy PV value of the standard flat mirror original state on the measured object with digital interference instrument test, adjust after the measured object rotation the second surface figure accuracy PV value of mark directrix plane mirror again;
Five, difference DELTA λ substitution formula θ ≈ sin θ ≈ Δ λ/D that the PV value that records for twice is subtracted each other obtains tested rotational angle theta, and λ is the operation wavelength of interferometer in the formula, and D is the diameter of standard flat mirror.
The principle of work explanation:
As shown in Figure 1,1 representative is installed in the initial position face of the standard flat mirror on the measured object, 2 represent the turn an angle mirror position of back standard flat mirror of measured object, 3 representatives are parallel to the mirror position of the initial position face of standard flat mirror, the linear distance that the minute surface edge of line segment 4 expression standard flat mirrors moves, θ represents the angle on two sides.Because Δ λ promptly equals the length of line segment 4, so worked as θ enough hour, we utilize the Taylor expansion formula of sine function to obtain formula θ ≈ sin θ ≈ Δ λ/D, wherein D is the diameter of standard flat mirror, λ is the operation wavelength of digital interference instrument, and θ is that the standard flat mirror also is the angle of measured object deflection.
Good effect of the present invention: method is simple for this, only need to be equipped with digital interference instrument and standard flat mirror, the standard flat mirror is installed on the object of tested corner, be installed in the surface figure accuracy value of the standard flat mirror of the virgin state on the measured object with the digital interference instrument measurement, survey the surface figure accuracy value that object under test rotates back standard flat mirror again, through calculating the micro-corner of just knowing measured object, measured object can be the variety classes object, can be used for measuring the minor rotation of any object that can the fixed standard level crossing.
Four. description of drawings
Fig. 1 is a principle of work explanation synoptic diagram of the present invention.
Fig. 2 is an installation drawing of measuring the precise rotating platform corner.
Five. embodiment:
The present invention implements by five steps that propose in the technical scheme.At first, prepare a ZYGO digital interference instrument 5 and a standard flat mirror 6, wherein the measuring accuracy PV value of ZYGO digital interference instrument 5 is λ/100, and the bore of standard flat mirror 6 is 45mm, and surface figure accuracy PV value is 0.246 λ; Secondly, the accurate rotatable platform 7 of the Piezoelectric Ceramic that German PI company is produced is connected with standard flat mirror 6, and the accurate rotatable platform 7 of Piezoelectric Ceramic is fixed on the five dimension adjustment racks 8 of ZYGO digital interference instrument 5 special uses, ZGYO digital interference instrument 5 and five is tieed up adjustment racks 8 and is placed on the general optical table 9; The 3rd, adjust optical system for testing, make the visual field optical axis of ZYGO digital interference instrument 5 and the optical axis coincidence of standard flat mirror 6; The 4th, utilize ZGYO digital interference instrument 5 to measure the first surface figure accuracy PV value of standard flat mirror 6 original states on the accurate rotatable platform 7 that is installed in Piezoelectric Ceramic; Send the supporting control device 10 that the accurate rotatable platform 7 of Piezoelectric Ceramic is given in instruction with computing machine 11 by the RS232 interface then, the accurate rotatable platform 7 of control device 10 control Piezoelectric Ceramic drives angle of standard flat mirror 6 deflections, utilizes the second surface figure accuracy PV value of ZGYO digital interference instrument 5 measurement standard level crossings 6; Obtain the difference Δ λ of the PV value of twice measurement, Δ λ represents the linear distance that the minute surface edge of standard flat mirror 6 moves; The 5th, utilize formula θ ≈ sin θ ≈ Δ λ/D, just can obtain the angle of accurate rotatable platform 7 deflections of Piezoelectric Ceramic.Wherein D is the diameter of standard flat mirror 6, and λ is the operation wavelength of ZYGO digital interference instrument 5.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100170309A CN100451539C (en) | 2006-07-20 | 2006-07-20 | Method for high quality measure of tiny rotation angle using digital interferometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100170309A CN100451539C (en) | 2006-07-20 | 2006-07-20 | Method for high quality measure of tiny rotation angle using digital interferometer |
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| Publication Number | Publication Date |
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| CN101109624A CN101109624A (en) | 2008-01-23 |
| CN100451539C true CN100451539C (en) | 2009-01-14 |
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| CNB2006100170309A Expired - Fee Related CN100451539C (en) | 2006-07-20 | 2006-07-20 | Method for high quality measure of tiny rotation angle using digital interferometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111238422B (en) * | 2020-03-13 | 2022-06-14 | 上海大学 | An absolute measurement method of three-plane reference mirror flatness based on small deflection |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86104916A (en) * | 1986-08-08 | 1988-02-17 | 中国科学技术大学 | Method and device for telescopic measurement of oblique light interferometer |
| US5724130A (en) * | 1995-09-08 | 1998-03-03 | Wang; Charles | Technique for the measurement and calibration of angular position |
| CN2616888Y (en) * | 2003-04-11 | 2004-05-19 | 中国科学院上海光学精密机械研究所 | Nano radian resolution ratio angular displacement measuring device |
| CN1656353A (en) * | 2002-09-25 | 2005-08-17 | 罗伯特-博希股份公司 | Interferometric measuring device |
| JP2006090950A (en) * | 2004-09-27 | 2006-04-06 | Fujinon Corp | Measuring system of inclination of surface to be tested |
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2006
- 2006-07-20 CN CNB2006100170309A patent/CN100451539C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86104916A (en) * | 1986-08-08 | 1988-02-17 | 中国科学技术大学 | Method and device for telescopic measurement of oblique light interferometer |
| US5724130A (en) * | 1995-09-08 | 1998-03-03 | Wang; Charles | Technique for the measurement and calibration of angular position |
| CN1656353A (en) * | 2002-09-25 | 2005-08-17 | 罗伯特-博希股份公司 | Interferometric measuring device |
| CN2616888Y (en) * | 2003-04-11 | 2004-05-19 | 中国科学院上海光学精密机械研究所 | Nano radian resolution ratio angular displacement measuring device |
| JP2006090950A (en) * | 2004-09-27 | 2006-04-06 | Fujinon Corp | Measuring system of inclination of surface to be tested |
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| CN101109624A (en) | 2008-01-23 |
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Granted publication date: 20090114 Termination date: 20100720 |