CN100449406C - Resistance Measuring System and Measuring Method Using It - Google Patents

Abstract

A resistance measuring system is applied to a machine table, and the machine table is provided with a base and a bearing seat. The bearing seat is provided with at least one first air cushion, the first air cushion is arranged on the bottom surface of the bearing seat, and the bearing seat is suspended on the base by the first air cushion. The resistance measuring system comprises a resistance meter, wherein the resistance meter is provided with a grounding input end and at least one first ohmic input end. The grounding input end is coupled with the base, the first ohmic input end is coupled with the first air cushion, and the resistance meter measures the resistance value between the first air cushion and the base. When the resistance value is smaller than a critical resistance value, the resistance meter sends out a signal to stop the machine.

Description

Resistance Measuring System and Measuring Method Using It

technical field

The present invention relates to a resistance measuring system and a measuring method using the same, and in particular to a resistance measuring system and a measuring method using the same to detect the resistance value between different parts on a machine to detect whether the condition of the machine is abnormal .

Background technique

In the optoelectronic industry, except for routine maintenance, the operation of production machines is basically carried out in a 24-hour uninterrupted manner to maintain maximum production capacity. During the production process, it is unavoidable that the machine still has faults or abnormal states, and it is often only discovered when the product is defective.

Taking the scanning exposure machine used in the exposure process as an example, the exposure platform (chuck) supports the substrate for exposure. The exposure platform continuously blows out the air through the porous material air pad at the bottom to suspend the platform above the base. Please refer to FIG. 1 , which shows a schematic diagram of an air cushion configuration of an exposure platform of a conventional scanning exposure machine. Six bottom air cushions 110 are arranged at the center of the bottom of the exposure platform 100 , and four slide rail air cushions 120 are arranged at the bottom above the slide rails on both sides. In addition, it also includes two lateral air cushions 130 for maintaining a certain distance from the side. The exposure platform 100 is kept stable and free from external interference through these air cushions, so that the substrates carried by it can be exposed accurately.

When an abnormal situation occurs in the air cushion, such as clogging, the exposure platform 100 will be tilted due to unbalanced force, resulting in a wrong exposure pattern of the exposed substrate. Traditionally, it is often necessary to wait until the exposure pattern error is found to know that the problem has occurred. At this time, a considerable number of defective products have been produced and caused losses. And then each air cushion must be manually checked one by one after shutdown, which is very time consuming. Even in routine maintenance and repair work, each air cushion is manually inspected one by one, causing the production line to stop.

Contents of the invention

In view of this, the object of the present invention is to provide a resistance measurement system and a measurement method using the same. By measuring the resistance value between the air cushion and the base, it is judged whether the machine is abnormal, and the machine can be shut down immediately for processing. Therefore, the present invention can stop the operation in the first time when the machine platform is abnormal, so as to prevent the continuous production of defective products. And even if the condition of the air cushion does not reach the warning standard, the measured resistance value can also be used to understand the condition of the connected air cushion, which can be used as a reference during maintenance.

According to the purpose of the present invention, a resistance measurement system is proposed, which is applied to a machine, and the machine has a base and a bearing seat. The bearing base has at least one first air cushion, the first air cushion is arranged on the bottom surface of the bearing base, and the bearing base is suspended on the base by the first air cushion. The resistance measuring system includes a resistance meter having a ground input terminal and at least one first ohm input terminal. The ground input end is coupled to the base, the first ohm input end is coupled to the first air cushion, and the resistance meter measures the resistance between the first air cushion and the base. When the resistance value is less than a critical resistance value, the resistance meter sends out a signal to stop the operation of the machine.

According to the purpose of the present invention, a resistance measurement method is proposed, which is applied to a machine. The machine table has a base and a bearing seat, and the bearing seat has at least one first air cushion, and the first air cushion is arranged on the bottom surface of the bearing seat. The bearing seat is suspended on the base with a first air cushion, and the method includes the following steps: firstly, providing a resistance meter, the resistance meter has a ground input terminal and at least one first ohm input terminal; then, coupling the ground input terminal and the base ; Then, couple the first ohm input terminal with the first air cushion; then, set the critical resistance value of the resistance meter; then, measure a resistance value between the first air cushion and the base. When the resistance value is less than the critical resistance value, the resistance meter sends out a signal to stop the operation of the machine.

According to the purpose of the present invention, a resistance measurement system is further proposed, which is applied to a machine. The machine table has a base and a bearing base, and the bearing base is suspended on the base with multiple groups of air cushions. The resistance measurement system includes a resistance measurement circuit, a megger and an alarm. The resistance measuring circuit includes a plurality of air cushion circuits connected with multiple groups of air cushions, and a ground circuit connected with the base. The resistance measuring circuit is used for measuring a resistance value between multiple sets of air cushions and the base. The megger has an ohm input terminal and a ground input terminal, multiple air cushion lines are connected in parallel to the ohm input terminal, and the ground line is connected to the ground input terminal. The megger has a preset critical resistance value. The alarm is set in the machine table and is electrically connected with the megger. When the resistance value measured by the resistance measuring circuit is lower than the preset critical resistance value, the megger sends a warning signal to the alarm to stop the operation of the machine.

In order to make the above-mentioned purpose, features, and advantages of the present invention more comprehensible, several embodiments are listed below and described in detail in conjunction with the accompanying drawings.

Description of drawings

Figure 1 shows a schematic diagram of the air cushion configuration of the exposure platform of a traditional scanning exposure machine;

Fig. 2 shows the block diagram of a kind of resistance measuring system of embodiment one of the present invention;

Fig. 3 shows the block diagram of a kind of resistance measuring system of embodiment 2 of the present invention; And

FIG. 4 shows a flow chart of an operation method of an alarm system using resistance measurement according to the present invention.

Description of reference symbols

100: Exposure platform

110: bottom air cushion

112, 122, 132: air cushion circuit

120: Slide rail air cushion

130: Lateral Air Cushion

150: Base

152: Ground line

180: control module

200, 400: digital resistance meter

210: Ohm input terminal

220, 440: ground input terminal

300: Alarm System

410: first ohm input

420: second ohm input

430: The third ohm input terminal

Detailed ways

The present invention adds a group of resistance measuring systems to the original machine to measure the resistance value between the suspended bearing seat and the base of the machine. By detecting the resistance value, it is judged whether the machine is abnormal, so as to issue an alarm signal or stop the operation of the machine. As for the detailed implementation, please refer to the following examples.

Embodiment one

Please refer to FIG. 2 , which shows a block diagram of a resistance measurement system according to Embodiment 1 of the present invention. The resistance measurement system is applied to a machine, such as a scanning exposure machine. The scanning exposure machine has a base 150 and a bearing seat, such as the exposure platform 100 in FIG. 1 . The exposure platform 100 has six bottom air cushions 110 , four rail air cushions 120 and two side air cushions 130 . The bottom air cushion 110 is disposed on the bottom surface of the exposure platform 100 , the slide rail air cushion 120 is disposed on the bottom surface of the exposure platform 100 above the slide rail (not shown), and the lateral air cushion 130 is disposed on the side of the exposure platform 100 . The exposure platform 100 is suspended on the base 150 with a plurality of bottom air cushions 110 . The resistance measuring system includes a resistance meter (megger), such as a digital resistance meter 200 . The digital resistance meter 200 has a ground input terminal 220 and an ohm input terminal 210 , and the ground input terminal 220 is coupled to the base 150 through a ground line 152 . In this embodiment, a bottom air cushion 110 , a slide rail air cushion 120 and a side air cushion 130 are respectively connected to the air cushion lines 112 , 122 and 132 . After the air cushion lines 112 , 122 and 132 are connected in parallel, they are coupled to the ohmic input terminal 210 . The digital resistance meter 200 measures the resistance between the parallel air cushion and the base 150 . When any air cushion is blocked and the output is reduced, the distance between the blocked air cushion and the base 150 will be shortened, so that the resistance value between the blocked air cushion and the base 150 will decrease, so the resistance value after the air cushions are connected in parallel will also decrease. . When the resistance value is less than the critical resistance value set by the digital resistance meter 200 , the digital resistance meter 200 sends a signal A1 to the alarm system 300 coupled to the digital resistance meter 200 . After the alarm system 300 receives the signal A1, it sends out an alarm to notify that the status is abnormal. The alarm system 300 here may be a part of the scanning exposure machine itself such as an alarm installed inside.

In addition, the alarm system 300 is further coupled to the control module 180 of the scanning exposure machine. When the alarm system 300 sends out the alarm, it also sends out the warning signal C1 to the control module 180, and the control module 180 stops the operation of the scanning exposure machine.

However, those skilled in the technical field to which the present invention pertains will understand that the technology of the present invention is not limited thereto. The six bottom air cushions 110 , the four slide rail air cushions 120 and the two side air cushions 130 of the exposure machine 100 can be partially or completely connected in parallel and coupled to the ohmic input terminal 210 . Therefore, as long as any of the coupled air cushions is blocked and the measured resistance value is less than the critical resistance value, the digital resistance meter 200 sends a signal A1 to the alarm system 300 , and the alarm system 300 sends out an alarm.

Embodiment two

Please refer to FIG. 3 , which shows a block diagram of a resistance measurement system according to Embodiment 2 of the present invention. The main difference between this embodiment and the first embodiment is that the digital resistance meter 400 has a first ohmic input terminal 410 , a second ohmic input terminal 420 and a third ohmic input terminal 430 . And each of a bottom air cushion 110 , a slide rail air cushion 120 and a side air cushion 130 is respectively coupled to the first ohmic input end 410 , the second ohmic input end 420 and the third ohmic input end 430 . That is to say, the digital resistance meter 400 can be used to respectively measure the resistance values between the bottom air cushion 110 , the slide rail air cushion 120 , the side air cushion 130 and the base 150 . Therefore, when the resistance between the bottom air cushion 110 and the base 150 is less than the preset critical resistance value in the digital resistance meter 400 , the digital resistance meter 400 sends a signal A1 to the alarm system 300 , and the alarm system 300 sends out an alarm. In the same principle, when the resistance value between the slide rail air cushion 120 and the side air cushion 130 and the base 150 is less than the preset critical resistance value, the digital resistance meter 400 sends a signal A2 and a signal A3 to the alarm system 300 respectively, so that The alarm system 300 sounds an alarm. The alarm system 300 can be designed to send out different alarms when receiving different signals, so that it can be known that the air cushion connected to the ohm input end is abnormal. Therefore, this embodiment can more efficiently find out the air cushion that has an abnormal condition, so as to facilitate the elimination of the condition.

However, those skilled in the technical field to which the present invention pertains will understand that the technology of the present invention is not limited thereto. If the digital resistance meter had more independent ohm inputs sufficient to individually couple the six bottom air pads 110, the four rail air pads 120, and the two side air pads 130, the digital resistance meter could Different signals are emitted when abnormal conditions occur. The alarm system can issue different alarms and stop the operation of the scanning exposure machine. In this embodiment, the problematic air cushion can be found out more efficiently for troubleshooting.

Please refer to FIG. 4 , which shows a flowchart of an operation method of an alarm system using resistance measurement according to the present invention, and uses the resistance measurement system shown in FIG. 2 of Embodiment 1 for illustration. First, as shown in step 11, a digital resistance meter 200 is provided. The digital resistance meter 200 has an ohm input terminal 210 and a ground input terminal 220 .

Next, as shown in step 12 , the ground input terminal 220 and the base 150 are coupled with the ground line 152 .

Then, as shown in step 13 , a bottom air cushion 110 , a slide rail air cushion 120 and a side air cushion 130 are respectively connected to the air cushion lines 112 , 122 and 132 and then coupled to the ohmic input terminal 210 in parallel.

Next, as shown in step 14 , the critical resistance value of the digital resistance meter 200 is set.

Then, as shown in step 15 , the resistance value between the air cushions connected in parallel and the base 150 is measured.

Next, as shown in step 16 , the digital resistance meter 200 and the alarm system 300 are coupled.

Then, as shown in step 17, when the resistance value is less than the critical resistance value set by the digital resistance meter 200, the digital resistance meter 200 sends a signal A1 to the alarm system 300, and the alarm system 300 sends out an alarm according to the signal A1.

Next, as shown in step 18, the alarm system 300 sends a warning signal C1 to the scanning exposure machine to stop the scanning exposure machine.

In addition, the operation method of the alarm system can also use the resistance measuring system shown in FIG. 3 of the second embodiment. The main difference is that in step 17, when the bottom air cushion 110 , the slide rail air cushion 120 or the side air cushion 130 is coupled to the first ohmic input terminal 410 , the second ohmic input terminal 420 or the third ohmic input terminal 430 measured resistance When the resistance value is less than the preset critical resistance value, the digital resistance meter 400 sends signals A1, A2 or A3 to the alarm system 300 respectively, and the alarm system 300 can issue different alarms according to different signals and stop the operation of the scanning exposure machine.

The resistance measurement system disclosed in the above-mentioned embodiments of the present invention and the measurement method using it, use a resistance meter to measure the resistance value between the base of the exposure machine and the air cushion of the exposure platform. If a certain critical resistance value is reached, the resistance meter sends a signal to the coupled alarm system to sound an alarm. The alarm system can be further connected with the control module of the exposure machine, and when the alarm is issued, a warning signal is sent to inform the control module to stop the operation of the exposure machine. And even if the condition of the air cushion does not reach the warning standard, the measured resistance value can also be used to understand the condition of the connected air cushion, which can be used as a reference during maintenance.

In conclusion, although several embodiments of the present invention have been disclosed above, they are not intended to limit the present invention. Those skilled in the art of the present invention can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.

Claims (14)

1. a resistance measurement system is applied to a board, and this board has a pedestal and a load bearing seat, this load bearing seat has at least one first air cushion, this first air cushion is arranged on the bottom surface of this load bearing seat, and this load bearing seat is suspended on this pedestal with this first air cushion, and this resistance measurement system comprises:

One ohmer, this ohmer have a ground connection input end and at least one first ohm of input end, and this ground connection input end couples this pedestal, and this first ohm of input end couples this first air cushion, and this ohmer is measured one first resistance value between this first air cushion and this pedestal;

Wherein, when this first resistance value during less than a critical resistance value, this ohmer sends one first signal to this board, makes this machine table stop operation.

2. resistance measurement as claimed in claim 1 system, wherein, this load bearing seat has one second air cushion, this first air cushion with couple this first ohm of input end after this second air cushion is in parallel.

3. resistance measurement as claimed in claim 2 system, wherein, this second air cushion is arranged on a side of this load bearing seat.

4. resistance measurement as claimed in claim 1 system, wherein, this ohmer more comprises one second ohm of input end, and this load bearing seat more comprises one second air cushion, this second ohm of input end couples this second air cushion, and this ohmer is measured one second resistance value between this second air cushion and this pedestal;

Wherein, when this second resistance value during less than this critical resistance value, this ohmer sends a secondary signal to this board, makes this machine table stop operation.

5. resistance measurement as claimed in claim 4 system, wherein, this ohmer more couples a warning system, and this warning system gives the alarm after receiving this first signal or this secondary signal.

6. resistance measurement as claimed in claim 1 system, wherein, this resistance is counted a digital resistance meter.

7. resistance measurement as claimed in claim 1 system, wherein, this board is an one scan formula exposure machine.

8. resistance measurement as claimed in claim 1 system, wherein, this ohmer more couples a warning system, and this warning system gives the alarm after receiving this first signal.

9. a resistance measurement method is applied to a board, and this board has a pedestal and a load bearing seat, this load bearing seat has at least one first air cushion, this first air cushion is arranged on the bottom surface of this load bearing seat, and this load bearing seat is suspended on this pedestal with this first air cushion, and this method comprises:

One ohmer is provided, and this ohmer has a ground connection input end and at least one first ohm of input end;

Couple this ground connection input end and this pedestal;

Couple this first ohm of input end and this first air cushion;

Set a critical resistance value of this ohmer;

Measure one first resistance value between this first air cushion and this pedestal; And

When this first resistance value during less than this critical resistance value, this ohmer sends one first signal to this board, makes this machine table stop operation.

10. resistance measurement method as claimed in claim 9, wherein, this load bearing seat has one second air cushion, and this method more comprises:

Behind this first air cushion in parallel and this second air cushion, couple this first ohm of input end.

11. resistance measurement method as claimed in claim 9, wherein, this ohmer more comprises one second ohm of input end, and this load bearing seat more comprises one second air cushion, and this method more comprises:

Couple this second ohm of input end and this second air cushion; And

Measure one second resistance value between this second air cushion and this pedestal; And

When this second resistance value during less than this critical resistance value, this ohmer sends a secondary signal to this board, makes this machine table stop operation.

12. resistance measurement method as claimed in claim 11 more comprises:

Couple this resistance and take into account a warning system; And

When this warning system received this first signal or this secondary signal, this warning system gave the alarm.

13. resistance measurement method as claimed in claim 9 more comprises:

Couple this resistance and take into account a warning system; And

When this warning system received this first signal, this warning system gave the alarm.

14. resistance measurement method as claimed in claim 13, wherein, this warning system more couples this board, and this method more comprises:

This warning system is sent a caution signal to this board, makes this machine table stop operation.

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