CN100446157C - Cathode plate of carbon nanotube field emission display and manufacturing method of display - Google Patents

Abstract

The invention provides a method for manufacturing a cathode plate of a carbon nanotube field-effect emission display and a display, wherein the method for manufacturing the cathode plate of the carbon nanotube field-effect emission display comprises the following steps: forming a carbon nanotube coating on a first plate with a conductive layer, providing a guide template, providing a magnetic field between the guide template and the first plate, pressing the guide template and the carbon nanotube coating, curing the carbon nanotube coating, and separating the guide template and the first plate with the carbon nanotube coating, thereby forming a plurality of carbon tube areas which are arranged at intervals and are provided with a plurality of carbon nanotubes arranged in a forward direction on the carbon nanotube coating to prepare the cathode plate; the invention also provides a manufacturing method of the display manufactured by the cathode plate. The invention simplifies the manufacturing process of the carbon nanotube cathode plate and simultaneously can manufacture carbon nanotubes with forward arrangement.

Description

Cathode plate of carbon nanotube field-effect emission display and manufacturing method of display

technical field

The invention relates to a cathode plate (cathode) of a field emission display (referred to as FED) and a manufacturing method of the field emission display, in particular to a carbon nanotube field emission display (carbon Nanotube field emission display; Abbreviated as CNTFED) cathode plate and carbon nanotube field emission display.

Background technique

In recent years, with the development of technologies in related fields such as semiconductor thin film manufacturing process, the current electronic products have become increasingly thinner and smaller. This phenomenon can also be seen in display and other related industries, such as: liquid crystal display (liquid crystal display; Plasma display panel (PDP for short), organic light emitting diode (organic light emitting diode) display and carbon nanotube field emission display, etc.

Generally speaking, the current industry related to CNTFED generally uses the thin film process to make the cathode plate of CNTFED, or prepares the CNT produced by thin film deposition into screen printing paste, and cooperates with the network The cathode plate of CNTFED is made by printing and thin film process.

In Taiwan Patent No. 428189, a method of manufacturing a cold cathode array (not shown) is disclosed. First, a plurality of cathode lines with a circuit design are provided, and multiple cathode lines are interlaced with the cathode lines. An insulating layer (insulator) on the cathode lines, and a substrate of a plurality of gate lines formed on the insulating layers. Next, anodizing is performed on a bare area of the cathode lines to form anodized films on the exposed areas of the cathode lines, so that each anodized film has a plurality of holes. Further, catalysts are respectively formed in the holes. Finally, the substrate is placed in a plasma system, and carbon-containing gas is used to react with the catalyst, so that a plurality of nanometer carbon tubes grow out of the holes.

The plasma system mentioned above uses carbon-containing gas to dissociate carbon ions through the plasma system, so that the dissociated carbon ions can form oversaturation precipitation (oversaturation precipitation) through the catalyst to produce graphitization. ) carbon tubes.

Among them, the carbon-containing gas may include methane (CH ₄ ), acetylene (C ₂ H ₂ ), etc., and the plasma system may be plasma enhanced chemical vapor deposition (PECVD for short) system, microwave plasma assisted chemical vapor deposition Deposition (microwave plasma enhanced chemical vapor deposition; referred to as MPECVD) system, and electron cyclotron resonance chemical vapor deposition (electroncyclotron resonance chemical vapor deposition; referred to as ERCCVD) system.

Those who are familiar with the field of field emission technology know that the field emission rate is directly proportional to the aspect ratio, field emission area, vacuum degree, etc., and is inversely proportional to the distance between the two plates. . However, this method of manufacturing cold cathode arrays by thin film deposition can produce carbon nanotubes arranged in an array (orientation), but the peripheral equipment required for vacuum coating is expensive. And the vacuuming takes a long time, so it has the disadvantages of high equipment cost and high time cost.

Referring to Fig. 1 to Fig. 5, a kind of manufacturing method of the cathode plate of carbon nanotube field emission display (Chinese Taiwan patent announcement case number is 518632), comprises the following steps in order:

(a) prepare a transparent substrate 101, and this transparent substrate 101 has a surface and a lower surface;

(b) Coating a photo-sensitive (photo sensitivity) conductive paste on a surface of the transparent substrate 101, and then utilizing a photolithography process (photolithography) and a sintering (sintering) process to complete a bottom electrode layer with a pattern 102 (as shown in Figure 1);

(c) using a screen printing method to print a carbon nanotube layer 103 on the pattern of the bottom electrode layer 102 (as shown in FIG. 2 );

(d) coating a layer of dielectric material (dielectric) that can be etched (etching) as a dielectric layer 104 (as shown in FIG. 3 );

(e) coating a layer of photosensitive grid (gate) material on the top of the dielectric layer 104, and then forming a gate pattern 105 (as shown in FIG. 4 ) by using a lithography process and a sintering process; and

(f) using the gate pattern 105 as a patterned protective layer, combining with an etching process to etch away the dielectric layer 104 not protected by the gate pattern 105, and completing the cathode plate structure (such as Figure 5).

The cathode plate of the carbon nanotube field emission display produced by the thin film deposition process and the screen printing process can reduce some time-consuming process time and save some unnecessary coating peripheral equipment. However, the carbon nanotube layer 103 made by screen printing is prone to poor design of the emulsion thickness of the screen version itself, improper pressure control during the screen printing process, and the viscosity of the screen printing adhesive containing carbon nanotubes. Factors such as the inability to match the size of the screen mesh (mesh) cause problems such as poor resolution of the cathode plate.

Furthermore, the arrangement of the carbon nanotube layer 103 formed on the pattern of the bottom electrode layer 102 by screen printing is a random appearance in the shape of a hairball, therefore, an array cannot be formed. Carbon nanotubes arranged in the same direction to meet the requirements of field emissivity.

All previous patents mentioned above are hereby incorporated into this case as references.

Therefore, how to simplify the manufacturing process of the carbon nanotube cathode plate and at the same time produce the carbon nanotubes aligned in the same direction is a major problem to be overcome by those in the field of developing the carbon nanotube cathode plate.

Contents of the invention

The object of the present invention is to provide a method for manufacturing a cathode plate of a carbon nanotube field-effect emission display.

Another object of the present invention is to provide a method for manufacturing a carbon nanotube field emission display.

The manufacturing method of the cathode plate of the carbon nanotube field emission display of the present invention comprises the following steps:

Step 1: forming a carbon nanotube coating on a first plate with a conductive layer;

Step 2: Provide a bootstrap template;

Step 3: providing a magnetic field between the guide template and the first board;

Step 4: Pressing the guide template and the carbon nanotube coating to form a plurality of carbon tube regions arranged at intervals and having a plurality of carbon nanotubes aligned in the same direction on the carbon nanotube coating;

Step five: curing (curing) the carbon nanotube coating; and

Step 6: separating the guide template and the first plate with the carbon nanotube coating to form a cathode plate with the first plate, the conductive layer and the carbon tube regions.

The manufacturing method of the cathode plate of the carbon nanotube field effect emission display of the present invention, the carbon nanotube coating is made by forming a coating containing carbon nanotubes on the conductive layer, and the carbon nanotubes in the coating The tube has a magnetic metal element selected from the group consisting of iron, cobalt, nickel and combinations thereof.

In the manufacturing method of the cathode plate of the carbon nanotube field emission display according to the present invention, the guide template is made of a non-magnetic material, and has a plurality of perforations arranged in an array, and a guide template is provided Magnetic device to generate this magnetic field.

According to the manufacturing method of the cathode plate of the carbon nanotube field emission display of the present invention, a magnetic body is provided on an upper surface of the guide template, a helical coil is arranged on a periphery of the magnetic body, and a helical coil is placed on the helical coil Electrically connected to a power source to form the magnetic device and generate the magnetic field, the magnetic body is made of a magnetic material selected from the group consisting of ferromagnets, ferrimagnets, antiferromagnets and paramagnets .

In the manufacturing method of the cathode plate of the carbon nanotube field effect emission display of the present invention, the magnetic material is a ferromagnet.

In the manufacturing method of the cathode plate of the carbon nanotube field emission display of the present invention, a permanent magnet is provided on an upper surface of the guide template to form the magnetic device and generate the magnetic field.

In the manufacturing method of the cathode plate of the carbon nanotube field emission display according to the present invention, the guide template is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, on the guide template A helical coil is arranged on the periphery and a voltage is electrically connected to the helical coil to form a magnetic device and generate the magnetic field.

In the manufacturing method of the cathode plate of the carbon nanotube field emission display according to the present invention, the guide template is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, on the guide template A first permanent magnet and a second permanent magnet are respectively provided on an upper side and a lower side of the first board to form a magnetic force device and generate the magnetic field.

According to the manufacturing method of the cathode plate of the carbon nanotube field emission display of the present invention, the curing is completed by a curing method selected from the following group: thermal curing method, light curing method and chemical curing method.

In the manufacturing method of the cathode plate of the carbon nanotube field effect emission display described in the present invention, the curing method is a thermal curing method.

The manufacturing method of the cathode plate of the carbon nanotube field emission display according to the present invention further includes a step 7 for removing the magnetic metal element on the carbon nanotube after the step 6.

The manufacturing method of the cathode plate of the carbon nanotube field effect emission display described in the present invention is removed by a removal method selected from the group consisting of: chemical processing, mechanical processing and chemical processing. Mechanical comprehensive processing method;

The chemical treatment method is selected from the group consisting of etching, pickling treatment, alkaline cleaning treatment and oxidation treatment;

The mechanical processing method is selected from the group consisting of sand blasting, laser processing, electron beam processing and surface grinding.

In the manufacturing method of the cathode plate of the carbon nanotube field effect emission display described in the present invention, the removal method is a chemical treatment method, and the chemical treatment method is etching.

In addition, the manufacturing method of a carbon nanotube field effect emission display can be completed by cooperating with the manufacturing method of the cathode plate of the carbon nanotube field effect emission display of the present invention. The manufacturing method of the carbon nanotube field emission display comprises the following steps:

Step 1: providing a cathode plate, the cathode plate is made by the following steps: forming a carbon nanotube coating on a first plate with a conductive layer; providing a guide template; A magnetic field is provided between the first plates; the guide template and the carbon nanotube coating are pressed together to form a plurality of carbon nanotube coatings that are arranged at intervals and have a plurality of nanometers arranged in an orderly direction. The carbon tube region of carbon tubes; curing the carbon nanotube coating; and separating the guide template and the first plate with the carbon nanotube coating to form a carbon tube region with the first plate, the conductive layer and the carbon tube region the cathode plate;

Step 2: providing a spacer on the cathode plate, and separating the carbon tube regions by a bottom edge of the spacer;

Step 3: forming an insulating layer on a periphery of each carbon tube area;

Step 4: forming a gate layer on each insulating layer; and

Step 5: setting an anode plate (anode) on a top edge of the space support to form a carbon nanotube field emission display.

In the method for manufacturing a carbon nanotube field emission display according to the present invention, the carbon nanotube coating in the step 1 is formed by forming a coating containing carbon nanotubes on the conductive layer, and the nanometer coating in the coating The carbon tube has a magnetic metal element selected from the group consisting of iron, cobalt, nickel and combinations thereof.

In the manufacturing method of the carbon nanotube field emission display described in the present invention, the guide template in the step 1 is made of a non-magnetic material, and has a plurality of perforations arranged in an array, provided on the guide template A magnetic device is used to generate the magnetic field.

In the manufacturing method of carbon nanotube field emission display according to the present invention, a magnetic body is provided on an upper surface of the guide template, a helical coil is arranged on a periphery of the magnetic body, and the helical coil is electrically connected A power source is used to form the magnetic device and generate the magnetic field. The magnetic body is made of a magnetic material selected from the group consisting of ferromagnets, ferrimagnets, antiferromagnets and paramagnets.

In the manufacturing method of the carbon nanotube field effect emission display described in the present invention, the magnetic material is a ferromagnet.

In the manufacturing method of the carbon nanotube field emission display of the present invention, a permanent magnet is provided on an upper surface of the guide template to form the magnetic device and generate the magnetic field.

In the manufacturing method of carbon nanotube field emission display according to the present invention, the guide template in the step 1 is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, on the guide template A helical coil is arranged on a periphery and a voltage is electrically connected to the helical coil to form a magnetic device and generate the magnetic field.

In the manufacturing method of carbon nanotube field emission display according to the present invention, the guide template in the step 1 is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, on the guide template A first permanent magnet and a second permanent magnet are respectively provided on an upper side of the first plate and a second permanent magnet to form a magnetic force device and generate the magnetic field.

According to the manufacturing method of the carbon nanotube field emission display of the present invention, the curing in the step 1 is completed by a curing method selected from the group consisting of: thermal curing, light curing and chemical curing Law.

In the manufacturing method of the carbon nanotube field-effect emission display described in the present invention, the curing method is a thermal curing method.

The manufacturing method of the carbon nanotube field emission display of the present invention further includes a step for removing the magnetic metal element on the carbon nanotube after the first step.

The manufacturing method of the carbon nanotube field emission display described in the present invention is removed by a removal method selected from the group consisting of: chemical processing, mechanical processing and chemical-mechanical integrated processing Law;

The chemical treatment method is selected from the group consisting of etching, pickling treatment, alkaline cleaning treatment and oxidation treatment;

The mechanical processing method is selected from the group consisting of sand blasting, laser processing, electron beam processing and surface grinding.

In the manufacturing method of the carbon nanotube field effect emission display described in the present invention, the removal method is a chemical treatment method, and the chemical treatment method is etching.

The manufacturing method of the carbon nanotube field emission display described in the present invention, by forming a transparent conductive layer on the lower surface of a transparent second board body, forming a transparent conductive layer on the lower surface of the transparent conductive layer to enhance the contrast The absorption layer, and a plurality of fluorescent coatings are formed on the lower surface of the absorption layer and corresponding to the carbon tube area to form the anode plate.

The method for manufacturing a carbon nanotube field emission display according to the present invention further includes a step 6 after the step 5, decompressing an accommodating space defined by the cooperation of the cathode plate, the space supporter and the anode plate, Make the accommodating space reach a pressure environment at least lower than 0.01mTorr, and further package the cathode plate, the space supporter and the anode plate to complete the step six.

The invention has the effect of simplifying the manufacturing process of the carbon nanotube cathode plate and simultaneously producing the carbon nanotubes arranged in the same direction.

Description of drawings

Fig. 1 is a schematic diagram of a side view, which is a method for making a cathode plate of an existing carbon nanotube field emission display disclosed in Taiwan Patent Publication No. 518632, illustrating that a pattern is formed on a transparent substrate the bottom electrode layer;

FIG. 2 is a schematic side view continuation of FIG. 1, illustrating the formation of a carbon nanotube layer on the pattern of the bottom electrode layer;

FIG. 3 is a schematic side view continuation of FIG. 2, illustrating the formation of a dielectric layer on the carbon nanotube layer;

FIG. 4 is a schematic side view continuation of FIG. 3, illustrating the formation of a gate pattern on the dielectric layer;

Fig. 5 is a schematic side view of the continuation of Fig. 4, illustrating the structure of the cathode plate of the carbon nanotube field emission display formed after the final completion;

Fig. 6 is a flow chart, illustrates the manufacture method of the cathode plate of carbon nanotube field effect emission display of the present invention;

7 is a schematic side view illustrating the provision of a carbon nanotube coating on a transparent glass cathode substrate having an ITO cathode conductive layer, and providing a quartz glass guide template provided with a magnetic device for the transparent glass cathode A magnetic field is generated between the substrate and the quartz glass guide template;

Fig. 8 is a side view diagram continuing from Fig. 7, illustrating that the distance between the quartz glass guide template and the carbon nanotube coating is gradually reduced;

Fig. 9 is a schematic side view continuation of Fig. 8, illustrating pressing the quartz glass guide template and the carbon nanotube coating, and curing the carbon nanotube coating;

Figure 10 is a schematic side view continuation of Figure 9, illustrating separation of the quartz glass guide template and the transparent glass cathode substrate with carbon nanotube coating;

Fig. 11 is a schematic side view continuation of Fig. 10, illustrating the removal of magnetic metal element iron particles on a plurality of carbon nanotubes;

Figure 12 is a partially enlarged schematic diagram of Figure 8, illustrating the relationship between the magnetic metal element iron particles and the magnetic field;

Fig. 13 is a schematic side view illustrating a cathode plate made by a specific embodiment of the present invention;

Fig. 14 is a schematic side view continuation of Fig. 13, illustrating that a space supporter is set on the cathode plate;

FIG. 15 is a schematic side view continuation of FIG. 14 , illustrating the formation of a plurality of insulating layers on the periphery of the plurality of carbon tube regions, and the formation of a plurality of gate layers on the insulating layers.

Fig. 16 is a schematic side view continuation of Fig. 15, illustrating that an anode plate is arranged on a top edge of the space support;

Fig. 17 is a schematic diagram of a side view, illustrating a specific embodiment 2 of the manufacturing method of the cathode plate of the carbon nanotube field-effect emission display of the present invention;

Fig. 18 is a schematic diagram of a side view, illustrating a specific embodiment three of the method for making the cathode plate of the carbon nanotube field emission display of the present invention;

FIG. 19 is a schematic side view illustrating a specific embodiment 4 of the manufacturing method of the cathode plate of the carbon nanotube field-effect emission display of the present invention.

Detailed ways

Below in conjunction with accompanying drawing and embodiment the present invention is described in detail:

Referring to Fig. 6, the manufacturing method of the cathode plate of the carbon nanotube field emission display of the present invention comprises the following steps:

Step 1: forming a carbon nanotube coating on a first plate with a conductive layer;

Step 2: Provide a bootstrap template;

Step 3: providing a magnetic field between the guide template and the first board;

Step 4: Pressing the guide template and the carbon nanotube coating to form a plurality of carbon tube regions arranged at intervals and having a plurality of carbon nanotubes aligned in the same direction on the carbon nanotube coating;

Step five: curing the carbon nanotube coating; and

Step 6: separating the guide template and the first plate with the carbon nanotube coating to form a cathode plate with the first plate, the conductive layer and the carbon tube regions.

Preferably, the carbon nanotube coating is formed by forming a slurry containing carbon nanotubes on the conductive layer. Preferably, the carbon nanotubes in the paint have a magnetic metal element selected from the group consisting of iron (Fe), cobalt (Co), nickel (Ni) and a combination thereof. In a specific embodiment, the magnetic metal element is iron.

Preferably, the carbon nanotube layer is formed by a coating method selected from the group consisting of blade coating, spin coating, and dip coating (dip coating) and roller coating (roll coating). In a specific embodiment, the coating method is knife coating.

Preferably, the guide template is made of a non-magnetic material and has a plurality of through holes arranged in an array, and a magnetic device is provided on the guide template to generate the magnetic field. In a specific embodiment, the non-magnetic material is quartz glass.

More preferably, a magnetic body is provided on an upper surface of the guide template, a coil (coil) capable of generating an electromagnetic effect (electromagnetic effect) is arranged on a periphery of the magnetic body, and a power supply is electrically connected to the coil (power) to form the magnetic device and generate the magnetic field. The magnetic body suitable for the present invention is made of a magnetic material (magnetic material) selected from the group consisting of: ferromagnetics, ferrimagnetic materials, antiferromagnets ) and paramagnets. Preferably, the magnetic material is a ferromagnet. The ferromagnet suitable for the present invention is selected from the group consisting of Fe-Si alloys, Fe-containing alloys, Cobalt-containing alloys, Nickel-containing alloys and Fe-Ni alloys. In a specific embodiment, the ferromagnet is an iron-silicon alloy.

More preferably, a permanent magnet is provided on an upper surface of the guide template to form the magnetic device and generate the magnetic field. In a specific embodiment, the permanent magnet is Alnico alloy (Alnico alloy; aluminum-nickel-cobalt alloy).

The method for forming the perforations suitable for the present invention is a processing method selected from the group consisting of: electron beam direct writing (e-beam writing), reactive ion etching (reactive ionic etching; RIE for short) , laser beam writing (laserbeam writing) and micro-precision drilling (precision drilling). In a specific embodiment, the processing method is electron beam direct writing.

It is worth mentioning that the aforesaid lower surface of the magnetic body and the upper surface of the guide template are combined by a joining method selected from the group consisting of: chemical joining, mechanical jointing and a combination thereof. The chemical joining method suitable for use in the present invention is chemical agent adhesion (adhesion). The mechanical joining method suitable for the present invention is one selected from the group consisting of bolting, screwing, welding, lapping, butting and riveting (riveting). More preferably, the bonding method is a chemical bonding method and a mechanical bonding method. In a specific embodiment, the chemical bonding method is chemical bonding, and the mechanical bonding method is bolting.

In addition, the joining method of the lower surface of the permanent magnet and the upper surface of the guide template is the same as the above-mentioned joining method of the magnetic body and the guide template.

In addition, a plurality of closed ends are jointly defined by the through holes and the lower surface of the magnetic body. Each closed end is in a shape selected from the group consisting of planar, awl-shaped and arcuate. In a specific embodiment, the closed ends are respectively in a plane shape.

In addition, the plurality of closed ends jointly defined by the through holes and a surface of the permanent magnet have the same shape as above.

Preferably, the guide template is made of a non-magnetic material and has a plurality of blind holes arranged in an array, and a magnetic device is provided on the guide template to generate the magnetic field. In a specific embodiment, the non-magnetic material is quartz (quartz) glass, a helical coil is arranged on a periphery of the guide template and a power supply is electrically connected to the helical coil to form the magnetic device and generate the magnetic field .

Preferably, the guide template is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, and a first A permanent magnet and a second permanent magnet form a magnetic device and generate the magnetic field. In one embodiment, the nonmagnetic material is quartz glass, and the first and second permanent magnets are Alnico permanent magnets.

Wherein, the method of forming the blind holes is equivalent to the aforementioned method of forming the through holes.

It is worth mentioning that a closed end of each blind hole of the guide template is in a shape selected from the group consisting of planar shape, cone shape and arc shape. In a specific embodiment, the closed ends of the blind holes are respectively flat.

Preferably, curing is accomplished by a curing method selected from the group consisting of thermal curing, light curing and chemical curing. In a specific embodiment, the curing method is thermal curing.

Preferably, after step six, a step seven for removing the magnetic metal elements on the carbon nanotubes is further included.

Preferably, removal is accomplished by a removal method selected from the group consisting of chemical treatment, machining and chemical-mechanical processing ). The chemical treatment suitable for the present invention is selected from the group consisting of etching, acid treatment, alkaline treatment and oxidation treatment. The mechanical machining method suitable for use in the present invention is one selected from the group consisting of sandblasting, laser beam machining, e-beam machining, and surface grinding ( polishing). More preferably, the removal method is a chemical treatment method. In one embodiment, the chemical treatment is etching.

By means of the manufacturing method of the cathode plate of the carbon nanotube field effect emission display of the present invention, the manufacturing method of the carbon nanotube field effect emission display of the present invention can be further completed. The manufacturing method of the carbon nanotube field-effect emission display of the present invention comprises the following steps:

Step 1: providing a cathode plate made by the aforementioned method;

Step 2: providing a space supporter on the cathode plate, and separating the carbon tube regions by a bottom edge of the space supporter;

Step 3: forming an insulating layer on a periphery of each carbon tube region;

Step 4: forming a gate layer on each insulating layer; and

Step 5: disposing an anode plate on a top edge of the space support to form a carbon nanotube field emission display.

It is worth mentioning that the removal method of step 7 mentioned in the method for making the cathode plate of the carbon nanotube field-effect emission display of the present invention can also be used to complete the cathode plate of the carbon nanotube field-effect emission display of the present invention. One of step 2, step 3, or step 4 in the manufacturing method of the board is carried out.

Preferably, by forming a transparent conductive layer on the lower surface of a transparent second plate body, forming an absorbing layer for enhancing contrast on the lower surface of the transparent conductive layer, and forming And a plurality of fluorescent coatings are formed corresponding to the carbon tube regions to form the anode plate.

The transparent conductive layer of the anode plate suitable for the present invention is a group selected from the following: indium tin oxide (Indium Tin Oxide, referred to as ITO), antimony tin oxide (Antimony Tin Oxide, referred to as ATO), fluorine oxide Tin (Fluorine-DopedTin Oxide, FTO for short), and Iridium Tin Oxide (IRTO for short). In a specific embodiment, the second substrate and the transparent conductive layer are respectively a transparent glass substrate and an ITO.

It is worth mentioning that these fluorescent coatings can meet the needs of electric circuit design, and can be of the following two types: the first one is to form fluorescent coatings in the three primary colors of red, green and blue (abbreviated as RGB). Powder, and set independently, the second is to simultaneously form the RGB three primary colors on a single fluorescent coating.

Preferably, step 6 is further included after step 5. Depressurize the accommodating space defined by the cooperation of the cathode plate, the space support and the anode plate, so that the accommodating space reaches a pressure environment at least lower than 0.01mTorr, and further encapsulate the cathode plate and the space Supporter and anode plate to complete the step six.

Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.

Specific embodiment one:

A specific embodiment of the present invention is described below.

A coating containing carbon nanotubes is coated on a transparent glass cathode substrate 21 with an ITO cathode conductive layer 22 by doctor blade coating to form a cathode plate 2 with a carbon nanotube coating 23 . Wherein, the carbon nanotubes in the paint are iron particles with magnetic metal elements. In addition, a quartz glass guide template 31 having a plurality of through holes 311 arranged in an array and manufactured by electron beam direct writing is provided. Bonding with chemical agents and cooperating with bolting, a ferrosilicon alloy plate 911 is bonded to an upper surface of the quartz glass guide template 31, and a helical coil 912 capable of generating electromagnetic effects is arranged on a periphery of the ferrosilicon alloy plate 911, And a power supply 913 is electrically connected to the spiral coil 912 to form a magnetic device 9 and generate a magnetic field between the cathode plate 2 and the quartz glass guide template 31 (as shown in FIG. 7 ).

Referring to FIG. 8 to FIG. 9 , slowly approach and press the cathode plate 2 and the quartz glass guide template 31 . With the help of the magnetic field and the perforation 311 of the quartz glass guide template 31, a plurality of carbon nanotubes 232 arranged in an array and arranged at intervals and having a plurality of carbon nanotubes 232 aligned in the same direction are formed on the carbon nanotube coating 23. Carbon tube area 231. The carbon tube regions 231 are formed by attracting the magnetic metal element iron particles 233 on the carbon nanotubes 232 by the magnetic field. Wherein, the through holes 311 and the lower surface of the Fe-Si alloy plate 911 jointly define a plurality of closed ends respectively in a plane shape, so that the carbon nanotubes 232 of unequal lengths originally appear in the carbon tube regions 231, Under the attraction of the magnetic field, the carbon nanotubes 232 arranged in alignment can be formed by the planar closed ends. In addition, the cathode plate 2 with the carbon nanotube coating 23 is thermally cured by a heat source 95 .

10 and 11, the cathode plate 2 and the quartz glass guide template 31 are separated, and the magnetic metal element iron particles 233 respectively located on the top edges of the carbon nanotubes 232 are removed by etching to complete the transparent glass. The cathode substrate 21 , the ITO cathode conductive layer 22 and the cathode plate 2 of the carbon tube regions 231 .

Referring to FIG. 12 , the relationship between the magnetic field mentioned in the first embodiment and the magnetic metal element iron particles 233 on the carbon nanotubes 232 can be obtained. Due to the attraction of the magnetic field, the magnetic metal element iron particles 233 on the carbon nanotubes 232 are temporarily magnetized to form carbon nanotubes 232 aligned in the same direction. It is worth mentioning that, as the direction of the magnetic field changes, the magnetization direction of the magnetic metal element iron particles 233 can be changed. Therefore, when the direction of a current (i) formed on the helical coil 912 is opposite, the magnetization direction of the magnetic metal element iron particles 233 can change accordingly. In addition, as the intensity of the magnetic field changes, the direction in which the carbon tubes 232 are arranged upright can be well controlled.

Referring to FIG. 13 to FIG. 14 , the cathode plate 2 prepared by the aforementioned method is provided, and a space supporter 4 is provided on the cathode plate 2 . The carbon tube regions 231 are separated from each other by a bottom edge of the space supporter 4 .

Referring to FIG. 15 , an insulating layer 5 is formed on a periphery of each carbon tube region 231 by using a semiconductor process, and a gate layer 6 is formed on each insulating layer 5 .

An ITO anode conductive layer 72 is formed on the lower surface of a transparent glass anode substrate 71, an absorption layer 73 for enhancing contrast is formed on the lower surface of the ITO anode conductive layer 72, and an absorption layer 73 is formed on the lower surface of the absorption layer 73 with the A plurality of fluorescent coatings 74 are formed corresponding to the carbon tube regions 231 to form an anode plate 7 . The anode plate 7 is arranged on a top edge of the space supporter 4 (as shown in FIG. 16 ), and finally, an accommodating space 8 defined by matching the cathode plate 2, the space supporter 4 and the anode plate 7 The pressure is reduced so that the accommodating space 8 reaches a pressure environment of 1×10 ^-7 Torr. Further, the cathode plate 2, the space supporter 4 and the anode plate 7 are packaged to complete the manufacturing method of the carbon nanotube field emission display of the present invention.

Specific embodiment two:

A second embodiment of the present invention is substantially the same as the first embodiment, the difference lies in the magnetic device 9 provided on the quartz glass guide template 31 .

Referring to FIG. 17 , the second embodiment of the present invention forms the magnetic device 9 and generates the magnetic field by joining an Alnico Alnico permanent magnet alloy plate 92 on the upper surface of the quartz glass guide template 31 .

Specific embodiment three:

A third embodiment of the present invention is substantially the same as the first embodiment, the difference lies in the structure of the quartz glass guide template 31 and the magnetic device 9 provided on the quartz glass guide template 31 .

Referring to FIG. 18 , the quartz glass guide template 31 of the third embodiment of the present invention forms a plurality of blind holes 312 arranged in an array on the quartz glass guide template 31 by electron beam direct writing. A helical coil 931 is provided on a periphery of the quartz glass guide template 31, and a power source 932 is electrically connected to the helical coil 931 to form the magnetic device 9 of the third embodiment and generate the magnetic field.

Specific embodiment four:

A fourth embodiment of the present invention is substantially the same as the third embodiment, the difference lies in the magnetic device 9 .

Referring to Fig. 19, a first Alnico Alnico permanent magnet alloy plate 941 and a second Alnico Alnico permanent magnet are respectively provided above the quartz glass guide template 31 and below the cathode plate 2. alloy plate 942 to form the magnetic device 9 and generate the magnetic field.

The cathode plate of the carbon nanotube field effect emission display and the manufacturing method of the carbon nanotube field effect emission display of the present invention can reduce the pumping time required in the vacuum coating process. In addition, compared with the traditional screen printing process, the carbon nanotube coating formed by the production method of the present invention will not be affected by poor emulsion thickness design, improper pressure control, or carbon nanotubes in the screen printing process. The viscosity of the screen printing glue of the tube cannot match the mesh size of the screen plate and other factors, resulting in problems such as poor resolution of the cathode plate. Furthermore, the cathode plate produced by the manufacturing method of the present invention has carbon nanotubes arranged in the same direction and can improve field emission efficiency.

To sum up the above, the cathode plate of the carbon nanotube field emission display of the present invention and the manufacturing method of the carbon nanotube field emission display can simplify the manufacturing process of the carbon nanotube cathode plate, and can simultaneously produce a aligned carbon nanotubes, so the purpose of the present invention can indeed be achieved.

Claims (28)

1, a kind of manufacture method of the cathode plate of carbon nanotube field emission display, it is characterized in that it comprises the following steps: Step 1: forming a carbon nanotube coating on a first plate with a conductive layer; Step 2: Provide a bootstrap template; Step 3: providing a magnetic field between the guide template and the first board; Step 4: Pressing the guide template and the carbon nanotube coating to form a plurality of carbon tube regions arranged at intervals and having a plurality of carbon nanotubes aligned in the same direction on the carbon nanotube coating; Step five: curing the carbon nanotube coating; and Step 6: separating the guide template and the first plate with the carbon nanotube coating to form a cathode plate with the first plate, the conductive layer and the carbon tube region. 2. The manufacturing method of the cathode plate of the carbon nanotube field emission display as claimed in claim 1, characterized in that: The carbon nanotube coating is formed by forming a coating containing carbon nanotubes on the conductive layer. The carbon nanotubes in the coating have a magnetic metal element selected from the group consisting of: iron, Cobalt, nickel and combinations thereof. 3. The manufacturing method of the cathode plate of the carbon nanotube field emission display as claimed in claim 2, characterized in that: The guide template is made of a non-magnetic material and has a plurality of perforations arranged in an array, and a magnetic device is provided on the guide template to generate the magnetic field. 4. The method for making the cathode plate of the carbon nanotube field emission display as claimed in claim 3, characterized in that: A magnetic body is provided on an upper surface of the guide template, a helical coil is arranged on a periphery of the magnetic body, and a power supply is electrically connected to the helical coil to form the magnetic device and generate the magnetic field. The magnetic body is Made of a magnetic material selected from the group consisting of ferromagnets, ferrimagnets, antiferromagnets and paramagnets. 5. The method for manufacturing the cathode plate of the carbon nanotube field emission display as claimed in claim 4, characterized in that: The magnetic material is a ferromagnet. 6. The manufacturing method of the cathode plate of the carbon nanotube field effect emission display as claimed in claim 3, characterized in that: A permanent magnet is provided on an upper surface of the guide template to form the magnetic device and generate the magnetic field. 7. The method for manufacturing the cathode plate of the carbon nanotube field emission display as claimed in claim 2, characterized in that: The guide template is made of a non-magnetic material and has a plurality of blind holes arranged in an array. A helical coil is arranged on a periphery of the guide template and a voltage is electrically connected to the helical coil to form A magnetic device generates the magnetic field. 8. The method for manufacturing the cathode plate of the carbon nanotube field emission display as claimed in claim 2, characterized in that: The guide template is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, and a first permanent magnet and a first permanent magnet are respectively provided on a top of the guide template and a bottom of the first plate. A second permanent magnet forms a magnetic device and generates the magnetic field. 9. The method for manufacturing the cathode plate of the carbon nanotube field emission display as claimed in claim 1, characterized in that: Curing is accomplished by a curing method selected from the group consisting of thermal curing, light curing and chemical curing. 10. The method for manufacturing the cathode plate of the carbon nanotube field emission display according to claim 9, characterized in that: This curing method is a thermal curing method. 11. The method for manufacturing the cathode plate of the carbon nanotube field emission display as claimed in claim 2, characterized in that: After the step six, a step seven for removing the magnetic metal elements on the carbon nanotubes is further included. 12. The method for manufacturing the cathode plate of the carbon nanotube field-effect emission display according to claim 11, characterized in that: Removal is accomplished by a removal method selected from the group consisting of chemical processing, mechanical processing, and chemical-mechanical processing; The chemical treatment method is selected from the group consisting of etching, pickling treatment, alkaline cleaning treatment and oxidation treatment; The mechanical processing method is selected from the group consisting of sand blasting, laser processing, electron beam processing and surface grinding. 13. The method for manufacturing the cathode plate of the carbon nanotube field emission display according to claim 12, characterized in that: The removal method is a chemical processing method, and the chemical processing method is etching. 14. A method for manufacturing a carbon nanotube field emission display, characterized in that it comprises the following methods: Step 1: providing a cathode plate, The cathode plate is made by the following steps: forming a carbon nanotube coating on a first plate with a conductive layer; providing a guide template; between the guide template and the first plate providing a magnetic field; pressing the guide template and the carbon nanotube coating to form a plurality of carbon tube regions spaced apart on the carbon nanotube coating and having a plurality of carbon nanotubes aligned in the same direction; solidifying the carbon nanotube coating; and separating the guide template and the first plate with the carbon nanotube coating to form a cathode plate with the first plate, the conductive layer and the carbon tube region; Step 2: providing a space supporter on the cathode plate, and separating the carbon tube regions by a bottom edge of the space supporter; Step 3: forming an insulating layer on a periphery of each carbon tube area; Step 4: forming a gate layer on each insulating layer; and Step 5: disposing an anode plate on a top edge of the space support to form a carbon nanotube field emission display. 15. The method for manufacturing a carbon nanotube field emission display as claimed in claim 14, characterized in that: The carbon nanotube coating in the step 1 is formed by forming a coating containing carbon nanotubes on the conductive layer. The carbon nanotubes in the coating have a magnetic metal selected from the group consisting of: Elements: Iron, cobalt, nickel and combinations thereof. 16. The method for manufacturing a carbon nanotube field emission display as claimed in claim 15, characterized in that: The guide template in the first step is made of a non-magnetic material and has a plurality of perforations arranged in an array, and a magnetic device is provided on the guide template to generate the magnetic field. 17. The method for manufacturing a carbon nanotube field emission display according to claim 16, characterized in that: A magnetic body is provided on an upper surface of the guide template, a helical coil is arranged on a periphery of the magnetic body, and a power supply is electrically connected to the helical coil to form the magnetic device and generate the magnetic field. The magnetic body is Made of a magnetic material selected from the group consisting of ferromagnets, ferrimagnets, antiferromagnets and paramagnets. 18. The method for manufacturing a carbon nanotube field emission display according to claim 17, characterized in that: The magnetic material is a ferromagnet. 19. The method for manufacturing a carbon nanotube field emission display as claimed in claim 16, characterized in that: A permanent magnet is provided on an upper surface of the guide template to form the magnetic device and generate the magnetic field. 20. The method for manufacturing a carbon nanotube field emission display as claimed in claim 15, characterized in that: The guide template in the step 1 is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, and a helical coil is arranged on a periphery of the guide template and is electrically connected to the helical coil A voltage is applied to form a magnetic device and generate the magnetic field. 21. The method for manufacturing a carbon nanotube field emission display as claimed in claim 15, characterized in that: The guide template in the step 1 is made of a non-magnetic material, and has a plurality of blind holes arranged in an array, and a first guide template is provided on the top of the guide template and below the first board. A permanent magnet and a second permanent magnet form a magnetic device and generate the magnetic field. 22. The method for manufacturing a carbon nanotube field emission display as claimed in claim 14, characterized in that: The curing in step one is accomplished by a curing method selected from the group consisting of thermal curing, light curing and chemical curing. 23. The method for manufacturing a carbon nanotube field emission display according to claim 22, characterized in that: This curing method is a thermal curing method. 24. The method for manufacturing a carbon nanotube field emission display according to claim 15, characterized in that: After the step 1, a step for removing the magnetic metal elements on the carbon nanotubes is further included. 25. The method for manufacturing a carbon nanotube field emission display as claimed in claim 24, characterized in that: Removal is accomplished by a removal method selected from the group consisting of chemical processing, mechanical processing, and chemical-mechanical processing; The chemical treatment method is selected from the group consisting of etching, pickling treatment, alkaline cleaning treatment and oxidation treatment; The mechanical processing method is selected from the group consisting of sand blasting, laser processing, electron beam processing and surface grinding. 26. The method for manufacturing a carbon nanotube field emission display as claimed in claim 25, characterized in that: The removal method is a chemical processing method, and the chemical processing method is etching. 27. The method for manufacturing a carbon nanotube field emission display as claimed in claim 14, characterized in that: By forming a transparent conductive layer on the lower surface of a transparent second plate body, forming an absorbing layer for enhancing contrast on the lower surface of the transparent conductive layer, and forming the lower surface of the absorbing layer with the carbon A plurality of fluorescent coatings are formed corresponding to the tube area to form the anode plate. 28. The manufacturing method of carbon nanotube field emission display according to claim 14, characterized in that: After the step five, a step six is further included, decompressing an accommodating space defined by the cooperation of the cathode plate, the space support and the anode plate, so that the accommodating space reaches a pressure environment at least lower than 0.01mTorr , and further package the cathode plate, the space support and the anode plate to complete the step six.

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