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CN100444939C - Nano sieve and its manufacturing method - Google Patents

Nano sieve and its manufacturing method Download PDF

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CN100444939C
CN100444939C CNB2004100774225A CN200410077422A CN100444939C CN 100444939 C CN100444939 C CN 100444939C CN B2004100774225 A CNB2004100774225 A CN B2004100774225A CN 200410077422 A CN200410077422 A CN 200410077422A CN 100444939 C CN100444939 C CN 100444939C
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sieve
acid
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CN1785489A (en
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翁维襄
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Abstract

The present invention provides a nanometer screen mesh which comprises a film, a chassis for holding the film fixedly, and a side wall formed around the chassis, wherein the film comprises an aluminum oxide film with nanometer filtration hole structures arranged orderly in a certain direction; the diameters of nanometer filtration holes are from 5 to 400 nm. In addition, the present invention also provides a manufacture method of the nanometer screen mesh. The film provided by the nanometer screen mesh of the present invention has nanometer filtration hole structures arranged orderly in a direction, can enhance the effective utilization area of the films, and enhances the screen efficiency of the nanometer screen mesh. The nanometer screen mesh can be widely applied to the filtration and screening of a variety of powder bodies in nanometer levels.

Description

纳米筛网及其制造方法 Nano sieve and its manufacturing method

【技术领域】 【Technical field】

本发明关于一种筛选装置,特别涉及一种纳米级筛网及其制造方法。The invention relates to a screening device, in particular to a nanoscale screen and a manufacturing method thereof.

【背景技术】 【Background technique】

目前,纳米技术的生产和应用越来越广泛,而在许多纳米粉体的应用上,往往要求粉体粒径的一致性。常用纳米粉体的制造方法有化学还原法、气相沉积法、溶胶凝胶法等,由于反应条件影响和反应过程难以控制,使这些方法并不能获得粒径单一的纳米粉体,因而需借助于其它方法,例如,通过筛选由上述方法所制备的纳米粉体产物,只要使筛网的网孔直径一致即可筛选出粒径一致的纳米粉体。At present, the production and application of nanotechnology are becoming more and more extensive, and in the application of many nanopowders, the consistency of powder particle size is often required. Commonly used methods for manufacturing nano-powders include chemical reduction method, vapor deposition method, sol-gel method, etc. Due to the influence of reaction conditions and the difficulty of controlling the reaction process, these methods cannot obtain nano-powders with a single particle size. Therefore, it is necessary to resort to In other methods, for example, by screening the nano-powder product prepared by the above-mentioned method, as long as the mesh diameter of the sieve is consistent, the nano-powder with uniform particle size can be screened.

请参阅图1,为传统筛网结构示意图。该筛网1包括一底盘2以及由底盘2周缘向上延伸的侧壁3。底盘2包括一位于中央的网格状筛盘4以及和该筛盘4周缘相接合的周盘5。此传统筛网1采用网格状筛盘4,仅能对宏观粉末微粒进行筛选,而对于纳米级粉体,该筛网1已不适用,必须采用一些具有纳米级多孔结构材料的筛网。Please refer to Figure 1, which is a schematic diagram of a traditional screen structure. The screen 1 includes a chassis 2 and a side wall 3 extending upward from the periphery of the chassis 2 . The bottom pan 2 includes a grid-shaped sieve pan 4 in the center and a peripheral pan 5 joined to the periphery of the sieve pan 4 . The traditional sieve 1 adopts a grid-shaped sieve plate 4, which can only screen macroscopic powder particles, but for nanoscale powders, the sieve 1 is no longer suitable, and some sieves with nanoscale porous structure materials must be used.

2002年2月28日公开的中国第02110938.9号专利揭露一种以锰结核、富钴结壳为原料合成钡钙锰矿型分子筛的方法。利用新鲜锰结核或富钴结壳和氧化剂反应,以提高原料中锰元素的氧化态;然后将镁离子植入锰矿物晶格,使其发挥模板剂作用;经过高温水热反应,原料中各种铁锰氧化物、氢氧化物均转变成钡钙锰矿型分子筛。该方法所得分子筛具有3×3型隧道孔结构,筛孔直径约0.69纳米,该纳米筛膜孔径小,可广泛应用于化工催化、环境工程、高性能电池等领域。但是其孔径太小且过于单一,不能满足不同孔径需求的纳米级筛网。Chinese Patent No. 02110938.9 published on February 28, 2002 discloses a method for synthesizing barium-permanganite-type molecular sieves using manganese nodules and cobalt-rich crusts as raw materials. Use fresh manganese nodules or cobalt-rich crusts to react with oxidants to increase the oxidation state of manganese in the raw material; then implant magnesium ions into the manganese mineral lattice to make it play the role of template agent; after high-temperature hydrothermal reaction, each of the raw materials All kinds of iron-manganese oxides and hydroxides are transformed into barium calcium manganese-type molecular sieves. The molecular sieve obtained by the method has a 3×3 tunnel hole structure with a sieve hole diameter of about 0.69 nanometers. The nanosieve membrane has a small pore size and can be widely used in chemical catalysis, environmental engineering, high-performance batteries and other fields. However, its pore size is too small and too single to meet the requirements of nanoscale screens with different pore sizes.

2001年2月28日公开的中国第01109223.8号专利申请揭露一种纳米筛膜,其包括陶瓷材料支撑体及在该支撑体上烧结而得的γ-MnO2纳米筛膜。陶瓷支撑体具有微米级滤孔,筛膜平均孔径为2~3nm,γ-MnO2原始粒径为20~30nm,聚集粒径为100~500nm,膜层厚度为10~15微米。反应器用陶瓷支撑体将γ-MnO2纳米筛膜间隔为两个空间,涂覆γ-MnO2纳米筛膜一面是催化反应区,另一面是开放式负压区。该纳米筛膜孔径较小,有利于负载催化剂粒子,提高催化性能。但是其孔洞是由分子的间隔形成,因而孔洞面积相对于整个纳米筛膜的面积较小,即开孔率较小,不能充分利用其有效面积,造成该纳米筛膜筛选速率降低,因而过滤效率低下。Chinese patent application No. 01109223.8 published on February 28, 2001 discloses a nanosieve membrane, which includes a ceramic material support and a γ-MnO 2 nanosieve membrane sintered on the support. The ceramic support body has micron-scale filter holes, the average pore size of the sieve membrane is 2-3nm, the primary particle size of γ- MnO2 is 20-30nm, the aggregate particle size is 100-500nm, and the thickness of the film layer is 10-15 microns. The reactor uses a ceramic support to divide the γ-MnO 2 nano-sieve membrane into two spaces. One side of the coated γ-MnO 2 nano-sieve membrane is a catalytic reaction zone, and the other side is an open negative pressure zone. The nano-sieve membrane has a small pore size, which is beneficial to supporting catalyst particles and improving catalytic performance. However, its pores are formed by molecular intervals, so the pore area is relatively small relative to the area of the entire nanosieve membrane, that is, the opening rate is small, and its effective area cannot be fully utilized, resulting in a decrease in the screening rate of the nanosieve membrane, and thus the filtration efficiency. low.

有鉴于此,提供一种有效利用面积高、筛选效率高的纳米筛网及其制造方法实为必要。In view of this, it is necessary to provide a nano sieve with high effective use area and high screening efficiency and its manufacturing method.

【发明内容】 【Content of invention】

为克服现有技术中纳米筛网有效利用面积低、筛选效率低等不足,本发明的目的在于提供一种有效利用面积高、筛选效率高的纳米筛网。In order to overcome the disadvantages of low effective use area and low screening efficiency of nano-sieves in the prior art, the object of the present invention is to provide a nano-sieve with high effective use area and high screening efficiency.

本发明的另一目的在于提供上述纳米筛网的制造方法。Another object of the present invention is to provide a method for manufacturing the aforementioned nano-sieve.

为实现上述第一目的,本发明提供一种纳米筛网,其包括一薄膜及用于固持该薄膜的底盘,该底盘周缘形成有侧壁;其中,该薄膜为具有方向性规则排列的纳米滤孔结构的氧化铝膜。In order to achieve the above-mentioned first purpose, the present invention provides a nano-sieve, which includes a film and a chassis for holding the film, the periphery of the chassis is formed with side walls; Alumina film with porous structure.

而且,所述纳米滤孔之间相互平行且基本垂直于所述薄膜表面。Moreover, the nanofilter pores are parallel to each other and substantially perpendicular to the surface of the film.

所述纳米滤孔按六边形分布排列。The nanometer filter holes are arranged in a hexagonal distribution.

所述纳米滤孔的孔径范围为5纳米~400纳米。The pore size range of the nanometer filter is 5 nm to 400 nm.

所述纳米滤孔的开孔率在1011个/cm2以上。The opening ratio of the nanometer filter is above 10 11 /cm 2 .

所述薄膜厚度范围10纳米~100纳米。The thickness of the film ranges from 10 nanometers to 100 nanometers.

为实现上述第二目的,本发明提供上述纳米筛网的制造方法,其包括以下步骤:In order to achieve the above-mentioned second purpose, the present invention provides a method for manufacturing the above-mentioned nano-sieve, which includes the following steps:

提供一铝基材;providing an aluminum substrate;

在铝基材一表面形成具有方向性规则排列纳米滤孔结构的氧化铝薄膜;Form an aluminum oxide film with a directional and regularly arranged nano-pore structure on the surface of the aluminum substrate;

去除铝基材,获得自支撑氧化铝薄膜;Remove the aluminum substrate to obtain a self-supporting aluminum oxide film;

使薄膜固持在一具周缘侧壁的底盘中央位置,构成纳米筛网。The membrane is held in the center of a chassis with a peripheral sidewall to form a nanosieve.

其中,所述薄膜形成方法采用阳极氧化法。Wherein, the film forming method adopts anodic oxidation method.

所述阳极氧化法的电解液采用硫酸、草酸、磷酸、铬酸或其混合酸。The electrolyte of the anodic oxidation method adopts sulfuric acid, oxalic acid, phosphoric acid, chromic acid or mixed acids thereof.

所述铝基材采用组份及其质量分数对应为:磷酸∶乙酸∶硝酸∶水=72%∶15%∶8%∶5%的混合溶液蚀刻去除。The aluminum substrate is removed by etching with a mixed solution whose components and mass fractions correspond to: phosphoric acid: acetic acid: nitric acid: water = 72%: 15%: 8%: 5%.

与现有技术中的纳米筛网相比,本发明提供的纳米筛网采用具有纳米滤孔结构的氧化铝薄膜,该薄膜可通过调整电压来控制其孔隙间距,以获得密集分布且按一定方向性规则排列纳米滤孔结构,能增加薄膜有效利用面积,加快纳米筛网的筛选速率,从而提高其筛选效率。Compared with the nano-sieve in the prior art, the nano-sieve provided by the present invention adopts an aluminum oxide film with a nano-pore structure, and the film can control its pore spacing by adjusting the voltage to obtain dense distribution and a certain direction. The nano-filter pore structure is regularly arranged, which can increase the effective use area of the membrane, speed up the screening rate of the nano-screen, and thus improve its screening efficiency.

【附图说明】 【Description of drawings】

下面结合附图对本发明作进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings.

图1是传统筛网结构示意图。Figure 1 is a schematic diagram of a traditional screen structure.

图2是本发明的纳米筛网结构示意图。Fig. 2 is a schematic diagram of the nano-sieve structure of the present invention.

图3是本发明的纳米筛网中薄膜的表面结构放大示意图。Fig. 3 is an enlarged schematic view of the surface structure of the film in the nanosieve of the present invention.

图4是本发明的纳米筛网的制造过程示意图。Fig. 4 is a schematic diagram of the manufacturing process of the nanosieve of the present invention.

【具体实施方式】 【Detailed ways】

请参阅图2,本发明提供的纳米筛网10包括一薄膜11、用于固持该薄膜的底盘12以及形成在底盘12周缘的侧壁13。其中,底盘12是中央为空的底座,从而可使薄膜11固持在底盘12中央部位。侧壁13具有一定高度,可盛装一定量待筛选的粉末(图未示)。薄膜11是一种多孔性氧化铝薄膜,在其厚度方向形成有按一定方向规则排列的纳米滤孔14。Referring to FIG. 2 , the nanosieve 10 provided by the present invention includes a film 11 , a base 12 for holding the film, and a sidewall 13 formed around the base 12 . Wherein, the chassis 12 is a base with a hollow center, so that the film 11 can be held at the center of the chassis 12 . The side wall 13 has a certain height and can hold a certain amount of powder to be screened (not shown). The membrane 11 is a porous aluminum oxide membrane, and nanometer filter holes 14 regularly arranged in a certain direction are formed in its thickness direction.

请参阅图3,为纳米筛网10中薄膜11的表面结构放大示意图。薄膜11由许多具有六面柱体状的晶胞15组成(如图中虚线所示),每个晶胞15中央包含一个圆柱孔状纳米滤孔14,每个晶胞15周围按六边形排布有六个与其相同的晶胞,即各晶胞所含滤孔的中心连线为一六边形(如图中实线所示)。其中,纳米滤孔14为一贯穿薄膜11且垂直于其表面的圆柱通孔,纳米滤孔14之间相互平行、尺寸相同,且按六边形分布排列。上述纳米滤孔14的结构可采用阳极氧化法制得,并通过控制阳极氧化的制备条件,如调节氧化电压、时间等制备条件,即可获得各种尺寸的纳米滤孔14,通常在5纳米~400纳米范围内,深度约为10纳米~100纳米,等同于薄膜11的厚度,纳米滤孔14的开孔率至少为1011个/cm2Please refer to FIG. 3 , which is an enlarged schematic diagram of the surface structure of the film 11 in the nanosieve 10 . Thin film 11 is made up of many unit cells 15 with hexahedron shape (as shown by dotted line in the figure), and each unit cell 15 center contains a cylindrical hole shape nano filter hole 14, and each unit cell 15 surrounds by hexagon There are six identical unit cells arranged therein, that is, the connecting line between the centers of the filter holes contained in each unit cell is a hexagon (as shown by the solid line in the figure). Wherein, the nanofilter hole 14 is a cylindrical through hole penetrating through the film 11 and perpendicular to its surface. The nanofilter holes 14 are parallel to each other, have the same size, and are arranged in a hexagonal distribution. The structure of the above-mentioned nano-pores 14 can be obtained by anodic oxidation, and by controlling the preparation conditions of anodic oxidation, such as adjusting the oxidation voltage, time and other preparation conditions, nano-pores 14 of various sizes can be obtained, usually in the range of 5 nanometers to 5 nanometers. Within the range of 400 nanometers, the depth is about 10 nanometers to 100 nanometers, which is equivalent to the thickness of the membrane 11 , and the opening ratio of the nanofilter holes 14 is at least 10 11 /cm 2 .

本发明提供的纳米筛网10可根据需要预先选择和待筛选粉末颗粒相同尺寸的纳米滤孔14,从而可筛选出粒径均匀一致的纳米颗粒。筛选时可配合其它震动装置如超声波震荡器等一起使用,必要时还可采用冲水过滤的方法筛选粉末。由于纳米滤孔14密集分布且按一定方向性规则排列,增加了薄膜11有效利用面积,同时加快了纳米筛网10的筛选速率,最终提高纳米筛网10的筛选效率。The nano-sieve 10 provided by the present invention can pre-select the nano-filter holes 14 of the same size as the powder particles to be screened, so that the nanoparticles with uniform particle size can be screened out. When screening, it can be used together with other vibrating devices such as ultrasonic oscillators, and if necessary, the powder can be screened by flushing and filtering. Since the nano-filter holes 14 are densely distributed and regularly arranged in a certain direction, the effective area of the membrane 11 is increased, and the screening rate of the nano-sieve 10 is accelerated, and finally the screening efficiency of the nano-sieve 10 is improved.

请参阅图4,为纳米筛网10的制造过程示意图,其包括以下步骤:Please refer to FIG. 4, which is a schematic diagram of the manufacturing process of the nano-sieve 10, which includes the following steps:

(1)提供一铝基材16:选取一块纯度较高的平整铝基材16(也可用铝合金),并对其进行预处理,如热处理、表面脱脂处理及电化学抛光处理等,以使预形成薄膜的表面成为一平整光滑的平滑表面17,以利于进行对其进行阳极氧化处理。(1) Provide an aluminum substrate 16: select a relatively high-purity flat aluminum substrate 16 (aluminum alloy can also be used), and pretreat it, such as heat treatment, surface degreasing treatment and electrochemical polishing treatment, so that The surface of the pre-formed film becomes a flat and smooth smooth surface 17, which is convenient for anodic oxidation treatment.

(2)在铝基材16表面形成具有方向性规则排列的纳米滤孔14结构的氧化铝薄膜11:在硫酸、草酸、磷酸、铬酸或其混合酸等酸性电解液中对铝基材16进行阳极氧化,使其平滑表面17形成多孔氧化铝薄膜11。为获得孔径均匀一致,分布均匀的纳米滤孔14,可去除薄膜11之后重复上述阳极氧化步骤,进行二次阳极氧化,最终可获得具有规则排列的纳米滤孔14结构的薄膜11,而且纳米滤孔14相互平行,由薄膜一表面延伸至另一表面。陆梅等人在《兰州大学学报》(自然科学版),2002,38(4),47-54,“多孔氧化铝膜的制备及其表征”一文中指出,多孔氧化铝膜的孔间距及孔径均随所加氧化电压的增加而增加。因而,可利用电压与孔隙间隔大小成正比的关系,通过调整电压来控制孔隙间距,以调节纳米滤孔14的分布状况,从而获得密集分布纳米滤孔14的薄膜11,使薄膜11具有较高有效利用面积。同时通过控制阳极氧化条件,如电解液种类、氧化电压、温度、时间以及电流密度等因数,可获得不同孔径的纳米滤孔14,通常在5纳米~400纳米之间。如当以硫酸为电解液时,所得纳米滤孔14的孔径较小,通常在20纳米左右;而以草酸为电解液时,所得纳米滤孔14的孔径较大,通常在40纳米以上。(2) On the surface of the aluminum substrate 16, an aluminum oxide film 11 with a nano-filter hole 14 structure arranged regularly in direction is formed: the aluminum substrate 16 is treated in an acid electrolyte such as sulfuric acid, oxalic acid, phosphoric acid, chromic acid or its mixed acids. Anodizing is performed to smooth the surface 17 to form a porous aluminum oxide film 11 . In order to obtain uniform and evenly distributed nanofiltration pores 14, the above-mentioned anodizing step can be repeated after the film 11 is removed, and a second anodization can be performed to finally obtain a film 11 with regularly arranged nanofiltration pores 14 structure, and the nanofiltration The holes 14 are parallel to each other and extend from one surface of the film to the other. Lu Mei et al pointed out in "Journal of Lanzhou University" (Natural Science Edition), 2002, 38 (4), 47-54, "Preparation and Characterization of Porous Aluminum Oxide Membrane", that the pore spacing and The pore size increases with the increase of the applied oxidation voltage. Therefore, the relationship between the voltage and the pore spacing can be used to control the pore spacing by adjusting the voltage to adjust the distribution of the nanofiltration pores 14, thereby obtaining a thin film 11 with densely distributed nanofiltration pores 14, so that the thin film 11 has a higher Effective use of area. At the same time, by controlling the anodizing conditions, such as electrolyte type, oxidation voltage, temperature, time and current density, etc., nano-filter pores 14 with different pore sizes can be obtained, usually between 5 nm and 400 nm. For example, when sulfuric acid is used as the electrolyte, the pore diameter of the obtained nanofilter 14 is relatively small, usually about 20 nanometers; and when oxalic acid is used as the electrolyte, the pore diameter of the obtained nanofilter 14 is relatively large, usually above 40 nanometers.

(3)去除铝基材16,获得自支撑氧化铝薄膜11:去除铝基材16的方法可采用蚀刻法,并以混合酸为蚀刻液,该混合酸中各种酸组份及其所含质量分数对应为:磷酸∶乙酸∶硝酸∶水=72%∶15%∶8%∶5%。蚀刻去除铝基材16之后,剩下自支撑的氧化铝薄膜11,该薄膜11厚度范围为10纳米~100纳米。如欲获得足够大孔径的纳米滤孔14,还可对该自支撑薄膜11进行扩孔处理。(3) Remove the aluminum substrate 16 to obtain a self-supporting aluminum oxide film 11: the method for removing the aluminum substrate 16 can be an etching method, and a mixed acid is used as an etching solution. The mass fraction corresponds to: phosphoric acid: acetic acid: nitric acid: water = 72%: 15%: 8%: 5%. After the aluminum substrate 16 is removed by etching, a self-supporting aluminum oxide film 11 remains, and the thickness of the film 11 ranges from 10 nanometers to 100 nanometers. If it is desired to obtain nanofiltration pores 14 with a sufficiently large pore size, the self-supporting film 11 can also be subjected to pore expansion treatment.

(4)使氧化铝薄膜11固持在一具周缘侧壁13的底盘12中央,构成纳米筛网10:取一具周缘侧壁13的底盘12,该底盘12中央为空,薄膜11即可固定在底盘12的中央,从而构成具纳米筛孔的纳米筛网10。(4) Aluminum oxide film 11 is held in the center of chassis 12 of a peripheral side wall 13 to form a nano-sieve 10: get a chassis 12 of peripheral side wall 13, the center of this chassis 12 is empty, and film 11 can be fixed In the center of the chassis 12, a nano-sieve 10 with nano-sieve holes is formed.

另外,薄膜11使用前还可进一步对其进行表面处理或热处理,以提高其硬度、抗脆性等相关性能。In addition, before the film 11 is used, it can be further subjected to surface treatment or heat treatment to improve its hardness, brittleness resistance and other related properties.

与现有的纳米筛网相比,本发明提供的纳米筛网10采用具有纳米滤孔14结构的氧化铝薄膜11,该薄膜11可通过调整电压来控制其孔隙间距,以获得密集分布且按一定方向性规则排列纳米滤孔14结构,能增加薄膜11有效利用面积,加快纳米筛网10的筛选速率,从而获得较高的筛选效率。Compared with the existing nano-sieve, the nano-sieve 10 provided by the present invention adopts an aluminum oxide film 11 with a structure of nano-filter holes 14, and the film 11 can control its pore spacing by adjusting the voltage to obtain dense distribution and press The structure of the nano-filter holes 14 arranged regularly in a certain direction can increase the effective use area of the membrane 11 and speed up the screening rate of the nano-screen 10, thereby obtaining higher screening efficiency.

Claims (3)

1.一种纳米筛网的制造方法,其包括以下步骤:1. A manufacturing method of nano-sieve, which may further comprise the steps: 提供一铝基材;providing an aluminum substrate; 在铝基材一表面形成具有方向性规则排列纳米滤孔结构的氧化铝薄膜;Form an aluminum oxide film with a directional and regularly arranged nano-pore structure on the surface of the aluminum substrate; 采用组份及其质量分数对应为:磷酸∶乙酸∶硝酸∶水=72%∶15%∶8%∶5%的混合溶液蚀刻去除铝基材,获得自支撑氧化铝薄膜;The components and their mass fractions correspond to: phosphoric acid: acetic acid: nitric acid: water = 72%: 15%: 8%: 5% of the mixed solution to etch and remove the aluminum substrate to obtain a self-supporting aluminum oxide film; 使薄膜固持在一具周缘侧壁的底盘中央位置,构成纳米筛网。The membrane is held in the center of a chassis with a peripheral sidewall to form a nanosieve. 2.如权利要求1所述的纳米筛网的制造方法,其特征在于:所述薄膜形成方法采用阳极氧化法。2. The manufacturing method of the nano-sieve according to claim 1, characterized in that: the film forming method adopts an anodic oxidation method. 3.如权利要求2所述的纳米筛网的制造方法,其特征在于:所述阳极氧化法的电解液采用硫酸、草酸、磷酸、铬酸或其混合酸。3. The manufacturing method of nano-screen according to claim 2, characterized in that: the electrolyte of the anodic oxidation method adopts sulfuric acid, oxalic acid, phosphoric acid, chromic acid or mixed acids thereof.
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US20030010971A1 (en) * 2001-06-25 2003-01-16 Zhibo Zhang Methods of forming nano-scale electronic and optoelectronic devices using non-photolithographically defined nano-channel templates and devices formed thereby
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CN1548589A (en) * 2003-05-19 2004-11-24 中国科学院物理研究所 A kind of production technology of nanoporous alumina template

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CN1222943A (en) * 1996-08-26 1999-07-14 日本电信电话株式会社 Preparation method of porous anodized aluminum oxide film
US20030010971A1 (en) * 2001-06-25 2003-01-16 Zhibo Zhang Methods of forming nano-scale electronic and optoelectronic devices using non-photolithographically defined nano-channel templates and devices formed thereby
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CN1548589A (en) * 2003-05-19 2004-11-24 中国科学院物理研究所 A kind of production technology of nanoporous alumina template

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