CN100422688C - Contact Surface Topography Measurement Method and Measuring Instrument Based on Vertical Displacement Scanning - Google Patents
Contact Surface Topography Measurement Method and Measuring Instrument Based on Vertical Displacement Scanning Download PDFInfo
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- CN100422688C CN100422688C CNB2006102000694A CN200610200069A CN100422688C CN 100422688 C CN100422688 C CN 100422688C CN B2006102000694 A CNB2006102000694 A CN B2006102000694A CN 200610200069 A CN200610200069 A CN 200610200069A CN 100422688 C CN100422688 C CN 100422688C
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Abstract
本发明公开了一种基于垂直位移扫描的接触式表面形貌测量方法及其装置，它采用计算机驱动工作台垂直位移来进行测量，并扫描和采集工作台垂直移动的距离作为测量数据，输入计算机中作为该X-Y-Z坐标上采集到的Z坐标，通过移动工作台，重复采集多个坐标的测量数据，经过计算机处理后即可得到测量的工件表面形貌。本发明通过垂直移动工作台让杠杆在每个采样点上回到平衡位置来测量数据，大大提高了测量的精度。从而真正实现了高精度、大量程的接触测量，并且具有速度快、性价比高的特点。本发明可对不同材料构件的轮廓尺寸、形状、波度及表面粗糙度的二、三维接触式综合测量。
The invention discloses a contact surface topography measurement method based on vertical displacement scanning and its device. It uses a computer to drive the vertical displacement of the workbench for measurement, and scans and collects the vertical movement distance of the workbench as measurement data, which is input into the computer. As the Z coordinate collected on the XYZ coordinate, the measurement data of multiple coordinates is repeatedly collected by moving the worktable, and the measured surface topography of the workpiece can be obtained after computer processing. The invention measures data by moving the workbench vertically to allow the lever to return to the balance position at each sampling point, thereby greatly improving the measurement accuracy. Thus, the contact measurement with high precision and large range is really realized, and it has the characteristics of high speed and high cost performance. The invention can comprehensively measure the contour size, shape, waviness and surface roughness of components of different materials in two or three dimensions.
Description
Technical field
The present invention relates to a kind of contact surface topography measuring method and measuring instrument, belong to the measurement mechanism technical field based on vertical displacement scanning.
Background technology
The contact surface topography measuring instrument kind of using is more at present, for example Britain Rank Taylor Hobson company develops and the Form Talysurf series of products of production, but for existing contact measuring surface form instrument, there are some common problems in they:
(1) owing to is that contact pilotage is in the rotation of doing around balance pivot, so there is the errors of principles of traditional contact pin type measuring method in the measuring process;
(2) nonlinearity erron when being operated in the inelastic region, inductance is arranged;
(3) can not carry out large range measuring, as curved surface, groove and little arc measuring etc.;
(4) range is big more, and the errors of principles of measurement, nonlinearity erron and ergometry are just big more.
The problems referred to above have reflected the defective of these instruments, and it is restricted when carrying out large range measuring.
Summary of the invention
The object of the present invention is to provide a kind of function strong, the contact surface topography measuring method and the measuring instrument based on vertical displacement scanning of high performance-price ratio are realized high resolving power, wide range and high-precision measurement.
Contact surface topography measuring method based on vertical displacement scanning of the present invention is to realize like this, workpiece is placed on movably on the three-dimensional perpendicular displacement scanning workbench, surface with contact inductance displacement sensor measuring workpieces, computing machine drives table veritcal movement according to the zero shift signal of sensor, make the zero shift signal of contact inductance displacement sensor be approximately zero, promptly measure lever always in the equilibrium position, the distance of scanning of diffraction grating displacement transducer and collecting work platform vertical moving is as measurement data, the Z coordinate that collects on this X-Y-Z coordinate as worktable in the input computing machine, pass through travelling table, the measurement data of a plurality of coordinates of repeated acquisition is through the workpiece surface appearance that can obtain measuring after the Computer Processing.
Above-mentioned contact surface topography measuring method based on vertical displacement scanning, fixation reflex grating on worktable, utilize laser to incide reflection grating, behind diffraction of reflection grating, form+1 grade and-1 grade of two bundle diffraction light, will+1 grade and-1 order diffraction light reflected back grating and converge at another point on the grating by the right-angle prism that places the reflection grating both sides, behind the secondary diffraction, will on the photodetector of placing perpendicular to Y-axis, form interference fringe; When table veritcal movement, will cause the phase shift of interference fringe, can obtain the displacement data of workpiece by the variation of surveying striped.
Measuring instrument of the present invention, it comprises inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment, the contact inductance displacement sensor that is used to survey inductance zero shift signal is installed in the top of vertical displacement scanning worktable, the zero shift signal input digit servo motion device of inductance displacement sensor, the digital servo telecontrol equipment outputs control signals to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, on three-dimensional perpendicular displacement scanning workbench, be provided with and be used for the diffraction grating displacement transducer that the perpendicular displacement to worktable scans and gathers, the computing machine in the signal input digit servo motion device of diffraction grating displacement transducer.
Above-mentioned measuring instrument, inductance displacement sensor is made up of magnetic core (1), telefault (2), fulcrum (3), lever (4) and contact pilotage (5), lever (4) two ends on the fulcrum (3) are respectively equipped with contact pilotage (5) and magnetic core (1), magnetic core (1) inserts in the telefault (2), the signal input digit servo motion device of telefault (2).
Above-mentioned measuring instrument, three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (11) and diffraction grating displacement transducer (8); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (11), and the vertical displacement scanning worktable is provided with diffraction grating displacement transducer (8).
Above-mentioned measuring instrument, the vertical displacement scanning worktable is made up of the worktable (7) of oblique mechanism (10), piezoelectric ceramics (9) and place work piece (6); The oblique mechanism of translator (10) is installed on the X-Y worktable (11), and oblique mechanism (10) top is provided with piezoelectric ceramics (9), and piezoelectric ceramics (9) top is the worktable (7) of place work piece (6).
Above-mentioned measuring instrument, the digital servo telecontrol equipment is made up of computing machine (12), X-Y direction motor-drive circuit (13), oblique mechanism motor-drive circuit (14), inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16) and driver circuit for piezoelectric ceramics (17); The input end of computing machine (12) connects the output terminal of inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (12) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (14) and X-Y direction motor-drive circuit (13); Computing machine (12) is handled the signal from telefault (2) and diffraction grating displacement transducer (8), and the motor of control and drive pressure electroceramics (12), oblique mechanism (13) and X-Y worktable (11) is realized the digital servo motion.
Above-mentioned measuring instrument, diffraction grating displacement transducer (11) is made up of reflection grating (18), right-angle prism (19), photelectric receiver (20) and He-Ne laser instrument (21), reflection grating (18) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (21) is installed in reflection grating (18) the place ahead, two right-angle prisms (19) are located at 45 degree positions, reflection grating (18) both sides respectively, and reflection grating (18) the place ahead also is provided with photelectric receiver (19).
Measurement mechanism of the present invention is made up of contact inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment, and has made up the contact surface topography measurement mechanism of whole closed-loop control jointly with other assemblies.This method is different from the metering system of traditional measurement mechanism rotating lever, computing machine removes to drive worktable to realize the servo motion of vertical displacement scanning according to the zero shift signal controlling piezoelectric ceramics and the motor of contact inductance displacement sensor, the zero shift signal that makes the contact inductance displacement sensor is zero, promptly measure lever always in the equilibrium position, avoid the problem of existing contact surface topography measurement mechanism, improved the precision of measuring.Adopt the displacement of the interference fringe surveying work platform that optical grating diffraction obtains simultaneously, obtain the measurement data of worktable vertical direction displacement, improved measuring accuracy greatly by the phase shift variations of measuring interference fringe.If the grating constant that the present invention selects is 1/1200mm, when its interference fringe changed one-period, the grating amount of movement was 1/4800mm, is 200nm, and through twice diffraction, and to signal 20 segmentations, final measurement data can reach the resolution of 5nm.Therefore the present invention has really realized the measurement of high precision, wide range, and has the advantages that speed is fast, cost performance is high.The present invention can to overall size, shape, waviness and the surfaceness of different materials member two, Three-dimension Contact formula composite measurement, comprise arbitrary surface topography measurement, sphere and aspherical profile measurement etc., also can carry out non-cpntact measurement the physical dimension of MEMS, shape, vibration etc.
Description of drawings
Accompanying drawing 1 is a structural representation of the present invention;
Accompanying drawing 2 is a measurement schematic flow sheet of the present invention;
Accompanying drawing 3 is the structural representation of diffraction grating displacement transducer.
Embodiment
Embodiments of the invention.As shown in Figure 1, measuring instrument of the present invention mainly comprises inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment three parts, the contact inductance displacement sensor is used for surveying in measuring process by the caused inductance zero shift of workpiece surface appearance signal, be installed in the top of vertical displacement scanning worktable, the zero shift signal input digit servo motion device of inductance displacement sensor is placed the workpiece that needs measurement above the three-dimensional perpendicular displacement scanning workbench; The digital servo telecontrol equipment is used for record, handle each data, and according to the data output control signal that obtains to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, thereby driving the motion of three-dimensional perpendicular displacement scanning workbench makes the zero shift signal of inductance displacement sensor be approximately zero, the diffraction grating displacement transducer is installed on three-dimensional perpendicular displacement scanning workbench, the diffraction grating displacement transducer is used for the perpendicular displacement of worktable is scanned and gathers, and the computing machine in the sweep signal input digit servo motion device of diffraction grating displacement transducer is handled the back as measurement result.
The inductance displacement sensor of present embodiment is made up of magnetic core (1), telefault (2), fulcrum (3), lever (4) and contact pilotage (5), lever (4) two ends on the fulcrum (3) are separately installed with contact pilotage (5) and magnetic core (1), magnetic core (1) inserts in the telefault (2), the signal input digit servo motion device of telefault (2), by the effect of lever (4), the displacement signal of contact pilotage (5) is converted to the inductance signal of telefault (2).
Three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (11) and diffraction grating displacement transducer (8); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (11), and diffraction grating displacement transducer (8) is installed on the vertical displacement scanning worktable; Wherein, the vertical displacement scanning worktable is made up of oblique mechanism (10), piezoelectric ceramics (9) and worktable (7); It divides thick, smart two-stage drive, and thick the driving finished by oblique mechanism (10) and servomotor thereof, and the inclined-plane gradient of oblique mechanism (10) is 1: 10, screw mandrel pitch is 1mm, servomotor is exported 10000 pulse/commentaries on classics, and then per step perpendicular displacement amount is 10nm, and stroke is designed to 10mm.Oblique mechanism (10) is installed on the X-Y worktable (11), and smart the driving finished by piezoelectric ceramics (9), and its design runlength is 30 μ m; Oblique mechanism (10) top is piezoelectric ceramics (9), and piezoelectric ceramics (9) top is the worktable (7) of place work piece (6).
The digital servo telecontrol equipment is made up of computing machine (12), X-Y direction motor-drive circuit (13), oblique mechanism motor-drive circuit (14), inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16) and driver circuit for piezoelectric ceramics (17); The input end of computing machine (12) connects the output terminal of inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (12) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (14) and X-Y direction motor-drive circuit (13); Computing machine (12) is handled the signal from telefault (2) and diffraction grating displacement transducer (8), and the motor of control and drive pressure electroceramics (12), oblique mechanism (13) and X-Y worktable (11) is realized the digital servo motion.
Diffraction grating displacement transducer (11) is made up of reflection grating (18), right-angle prism (19), photelectric receiver (20) and He-Ne laser instrument (21), reflection grating (18) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (21) is installed in reflection grating (18) the place ahead, two right-angle prisms (19) are installed in 45 degree positions, reflection grating (18) both sides respectively, a photelectric receiver (19) has also been installed in reflection grating (18) the place ahead, the signal input diffraction grating displacement transducer signal treatment circuit (16) of photelectric receiver (19).
During work, workpiece (6) is placed on the worktable (7), move to motor-driven lower edge X-direction at X, obtain the X coordinate of a measurement point, the contact pilotage (5) of lever (4) one sides contacts the surface of measured workpiece (6) all the time, and move up and down because of the fluctuating of surface profile, driving lever (4) rotates around fulcrum (3), thereby cause the displacement of magnetic core (1) in telefault (2), its zero-bit of inductance signal bias, this signal is through amplifying, and the A/D conversion process is sent and computing machine (12), and Z drives oblique mechanism (10) vertical moving to (being vertical direction) drive motor by computing machine (12) control, and through piezoelectric ceramics (9) fine setting, drive workpiece (6) vertical moving thereupon, finally make lever (4) get back to the equilibrium position, whether whether lever (4) gets back to the equilibrium position is in zero-bit by the signal of telefault (2) and judges.At this moment the distance of workpiece (6) vertical moving is scanned and is collected by diffraction grating displacement transducer (8), this distance is the change of workpiece (6) surface profile on this measurement point vertical direction, this signal is through photoelectric signal processing circuit (preposition amplification, segmentation, sensing, counting) deliver to computing machine, be a Z who collects to coordinate, so repeat this process, can obtain a series of data, deliver to computing machine and can obtain measurement result through surface profile evaluation software processes.
Displacement for accurate measurement worktable (7), on three-dimensional perpendicular displacement scanning workbench, reflection grating is installed, laser incides reflection grating, behind diffraction of reflection grating, form+1 grade and-1 grade of two bundle diffraction light, will+1 grade and-1 order diffraction light reflected back grating and converge at another point on the grating by the right-angle prism that places both sides, behind the secondary diffraction, will on the photodetector of placing perpendicular to Y-axis, form interference fringe; When worktable (7) vertical movement, will cause the phase shift of interference fringe, can obtain the displacement data of workpiece (6) by the variation of surveying striped.Grating move d/4 apart from the time, the striped phase shift is 2 π, promptly changes one-period.The grating that native system adopts, its grating constant is 1/1200mm, so interference fringe is when changing one-period, the grating amount of movement is 1/4800mm, is 200nm, through twice diffraction, and to signal 20 segmentations, can reach the resolution of 5nm.
Claims (8)
1. contact surface topography measuring method based on vertical displacement scanning, it is characterized in that: workpiece is placed on movably on the three-dimensional perpendicular displacement scanning workbench, surface with contact inductance displacement sensor measuring workpieces, computing machine drives table veritcal movement according to the zero shift signal of sensor, make the zero shift signal of contact inductance displacement sensor be approximately zero, promptly measure lever always in the equilibrium position, the distance of scanning of diffraction grating displacement transducer and collecting work platform vertical moving is as measurement data, the Z coordinate that collects on this X-Y-Z coordinate as worktable in the input computing machine, pass through travelling table, the measurement data of a plurality of coordinates of repeated acquisition is through the workpiece surface appearance that can obtain measuring after the Computer Processing.
2. the contact surface topography measuring method based on vertical displacement scanning according to claim 1, it is characterized in that: fixation reflex grating on worktable, utilize laser to incide reflection grating, behind diffraction of reflection grating, form+1 grade and-1 grade of two bundle diffraction light, will+1 grade and-1 order diffraction light reflected back grating and converge at another point on the grating by the right-angle prism that places the reflection grating both sides, behind the secondary diffraction, will on the photodetector of placing perpendicular to Y-axis, form interference fringe; When table veritcal movement, will cause the phase shift of interference fringe, can obtain the displacement data of workpiece by the variation of surveying striped.
3. measuring instrument of realizing claim 1 or 2 described measuring methods, it comprises inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment, it is characterized in that: the contact inductance displacement sensor that is used to survey inductance zero shift signal is installed in the top of vertical displacement scanning worktable, the zero shift signal input digit servo motion device of inductance displacement sensor, the digital servo telecontrol equipment outputs control signals to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, on three-dimensional perpendicular displacement scanning workbench, be provided with and be used for the diffraction grating displacement transducer that the perpendicular displacement to worktable scans and gathers, the computing machine in the signal input digit servo motion device of diffraction grating displacement transducer.
4. measuring instrument according to claim 3, it is characterized in that: inductance displacement sensor is made up of magnetic core (1), telefault (2), fulcrum (3), lever (4) and contact pilotage (5), lever (4) two ends on the fulcrum (3) are respectively equipped with contact pilotage (5) and magnetic core (1), magnetic core (1) inserts in the telefault (2), the signal input digit servo motion device of telefault (2).
5. measuring instrument according to claim 3 is characterized in that: three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (11) and diffraction grating displacement transducer (8); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (11), and the vertical displacement scanning worktable is provided with diffraction grating displacement transducer (8).
6. measuring instrument according to claim 5 is characterized in that: the vertical displacement scanning worktable is made up of the worktable (7) of oblique mechanism (10), piezoelectric ceramics (9) and place work piece (6); The oblique mechanism of translator (10) is installed on the X-Y worktable (11), and oblique mechanism (10) top is provided with piezoelectric ceramics (9), and piezoelectric ceramics (9) top is the worktable (7) of place work piece (6).
7. measuring instrument according to claim 3 is characterized in that: the digital servo telecontrol equipment is made up of computing machine (12), X-Y direction motor-drive circuit (13), oblique mechanism motor-drive circuit (14), inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16) and driver circuit for piezoelectric ceramics (17); The input end of computing machine (12) connects the output terminal of inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (12) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (14) and X-Y direction motor-drive circuit (13).
8. measuring instrument according to claim 3, it is characterized in that: diffraction grating displacement transducer (11) is made up of reflection grating (18), right-angle prism (19), photelectric receiver (20) and He-Ne laser instrument (21), reflection grating (18) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (21) is installed in reflection grating (18) the place ahead, two right-angle prisms (19) are located at 45 degree positions, reflection grating (18) both sides respectively, and reflection grating (18) the place ahead also is provided with photelectric receiver (19).
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006102000694A CN100422688C (en) | 2006-04-27 | 2006-04-27 | Contact Surface Topography Measurement Method and Measuring Instrument Based on Vertical Displacement Scanning |
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| CNB2006102000694A CN100422688C (en) | 2006-04-27 | 2006-04-27 | Contact Surface Topography Measurement Method and Measuring Instrument Based on Vertical Displacement Scanning |
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| CN1831473A CN1831473A (en) | 2006-09-13 |
| CN100422688C true CN100422688C (en) | 2008-10-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4705142B2 (en) * | 2008-10-10 | 2011-06-22 | パナソニック株式会社 | 3D shape measurement method |
| CN103499309B (en) * | 2013-10-11 | 2016-04-27 | 中国科学院光电技术研究所 | Automatic interference detection system and method with environment feedback |
| JP6768442B2 (en) * | 2016-10-12 | 2020-10-14 | 株式会社キーエンス | Shape measuring device |
| CN109813226B (en) * | 2019-04-16 | 2019-07-16 | 山东中科普锐检测技术有限公司 | A kind of three-dimensional shape measuring apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2116190U (en) * | 1991-07-27 | 1992-09-16 | 哈尔滨工业大学 | Miniature three dimensions measuring stand |
| WO2003060425A1 (en) * | 2002-01-15 | 2003-07-24 | Intek Plus Co., Ltd. | Optical apparatus for measuring the two and three-dimensional shape of an object |
| CN1529123A (en) * | 2004-01-19 | 2004-09-15 | 哈尔滨工业大学 | Shaped Ring Beam Differential Confocal Sensor with High Spatial Resolution |
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- 2006-04-27 CN CNB2006102000694A patent/CN100422688C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2116190U (en) * | 1991-07-27 | 1992-09-16 | 哈尔滨工业大学 | Miniature three dimensions measuring stand |
| WO2003060425A1 (en) * | 2002-01-15 | 2003-07-24 | Intek Plus Co., Ltd. | Optical apparatus for measuring the two and three-dimensional shape of an object |
| CN1529123A (en) * | 2004-01-19 | 2004-09-15 | 哈尔滨工业大学 | Shaped Ring Beam Differential Confocal Sensor with High Spatial Resolution |
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